EP0931654A1 - Ink jet nozzle head - Google Patents
Ink jet nozzle head Download PDFInfo
- Publication number
- EP0931654A1 EP0931654A1 EP99200091A EP99200091A EP0931654A1 EP 0931654 A1 EP0931654 A1 EP 0931654A1 EP 99200091 A EP99200091 A EP 99200091A EP 99200091 A EP99200091 A EP 99200091A EP 0931654 A1 EP0931654 A1 EP 0931654A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- diaphragm
- plate
- ink
- bumps
- nozzle head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims abstract description 3
- 239000011521 glass Substances 0.000 claims description 16
- 230000006835 compression Effects 0.000 claims description 11
- 238000007906 compression Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 25
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- SGPGESCZOCHFCL-UHFFFAOYSA-N Tilisolol hydrochloride Chemical compound [Cl-].C1=CC=C2C(=O)N(C)C=C(OCC(O)C[NH2+]C(C)(C)C)C2=C1 SGPGESCZOCHFCL-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14379—Edge shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
- means (12) defining a nozzle (16) and an ink channel (18) connected to said nozzle,
- a diaphragm (20) covering at least a portion of said ink channel (18),
- actuator means (24) capable of deflecting the diaphragm, and
- bump means (32) arranged for concentrating the force of the actuator means that is applied to the diaphragm,
Description
- Fig. 1
- is a perspective view of a portion of a nozzle head with parts broken away for illustration purposes;
- Fig. 2
- is an enlarged cross-sectional view of the nozzle head according to Fig. 1 as viewed in the direction of arrow II in Fig. 1;
- Fig. 3
- is a cross-sectional view corresponding to Fig. 2, but showing an active state of the nozzle head; and
- Figs. 4 to 7
- are cross-sectional views illustrating steps of a manufacturing process for the nozzle head.
It is clear that to avoid filthiness of the
Claims (9)
- Ink jet nozzle head comprising:means (12) defining a nozzle (16) and an ink channel (18) connected to said nozzle,a diaphragm (20) covering at least a portion of said ink channel (18),actuator means (24) capable of deflecting the diaphragm, andbump means (32) arranged for concentrating the force of the actuator means that is applied to the diaphragm,
- Ink jet nozzle head according to claim 1, wherein a plurality of ink channels (18) are formed in parallel in a surface of a channel plate (12), and the diaphragm (20) extends over the plurality of ink channels (18).
- Ink jet nozzle head according to claim 1 or 2, wherein the actuator means are formed by piezoelectric actuators (24) which are aligned with the respective ink channels (18) and each have an end face bonded to the surface of the diaphragm (20).
- Ink jet nozzle head according to any of the preceding claims, wherein the diaphragm (20) is an integral structure made of glass.
- Method of manufacturing a diaphragm (20) for an ink jet nozzle head according to any one of the preceding claims, comprising the steps of:forming a pattern of parallel grooves (40) with elongated bumps (32) intervening therebetween in the surface of a first plate (38),superposing a second plate (30) on the bumps (32) of the first plate,the material of the first and second plates (38, 32) being selected to be suitable and mutually compatible for compression bonding, andbonding the second plate (30) to the bumps (32) by compression bonding.
- Method according to claim 5, wherein the grooves (40) are formed by etching.
- Method of manufacturing an ink jet nozzle head (10) according to any of the claims 1 to 4, comprising the steps of:forming a plurality of parallel ink channels (18) in the surface of a substrate (12; 36),superposing a first plate (38) on the substrate so as to cover the ink channels (18), and bonding the substrate and the first plate together,forming a pattern of parallel grooves (40) with elongate bumps (32) intervening therebetween in the exposed surface of the first plate (38), the bumps (32) being centered on the ink channels (18),superposing a second plate (30) on the bumps (32) of the first plate (38),the material of the first and second plates (38, 30) being selected to be suitable and mutually compatible for compression bonding, andbonding the second plate (30) to the bumps (32) by compression bonding, thereby to form an integral channel plate/diaphragm unit (12, 20) which is assembled with the actuating means (24) to form the ink jet nozzle head (10).
- Method according to claim 7, wherein the substrate is a wafer (36) which, after the first and second plates (38, 30) have been bonded thereto, is diced to form a plurality of channel plate/substrate units (12, 20).
- Method according to claim 7 or 8, wherein the first plate (38) is bonded to the substrate (12; 36) by compression bonding.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19990200091 EP0931654B1 (en) | 1998-01-23 | 1999-01-12 | Ink jet nozzle head |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98200190 | 1998-01-23 | ||
EP98200190 | 1998-01-23 | ||
EP19990200091 EP0931654B1 (en) | 1998-01-23 | 1999-01-12 | Ink jet nozzle head |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0931654A1 true EP0931654A1 (en) | 1999-07-28 |
EP0931654B1 EP0931654B1 (en) | 2003-12-03 |
Family
ID=26149987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19990200091 Expired - Lifetime EP0931654B1 (en) | 1998-01-23 | 1999-01-12 | Ink jet nozzle head |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP0931654B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003070467A3 (en) * | 2002-02-20 | 2003-12-04 | Xaar Technology Ltd | Fluid pumping and droplet deposition apparatus |
WO2019043340A1 (en) | 2017-09-01 | 2019-03-07 | Arkema France | Metal corrosion inhibitors |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4364070A (en) * | 1980-07-04 | 1982-12-14 | Hitachi, Ltd. | Drop jet apparatus |
US4383264A (en) * | 1980-06-18 | 1983-05-10 | Exxon Research And Engineering Co. | Demand drop forming device with interacting transducer and orifice combination |
EP0402172A1 (en) | 1989-06-09 | 1990-12-12 | Sharp Kabushiki Kaisha | Head for ink-jet printer |
EP0563603A2 (en) * | 1992-03-03 | 1993-10-06 | Seiko Epson Corporation | Ink jet recording head and a method of manufacturing the same |
EP0713774A2 (en) * | 1994-11-24 | 1996-05-29 | Sharp Kabushiki Kaisha | Ink jet head for high speed printing and method for it's fabrication |
EP0718102A2 (en) | 1994-12-20 | 1996-06-26 | Sharp Kabushiki Kaisha | Compact ink jet head with deformable structure for ink discharge with great force |
JPH09174836A (en) * | 1995-12-22 | 1997-07-08 | Nec Corp | Ink jet recording head and manufacture thereof |
EP0783965A2 (en) * | 1995-08-22 | 1997-07-16 | Nec Corporation | Fluid drop projecting apparatus and fluid drop projecting method |
JPH09226104A (en) * | 1996-02-21 | 1997-09-02 | Sharp Corp | Printer |
JPH09277527A (en) * | 1996-04-17 | 1997-10-28 | Citizen Watch Co Ltd | Ink jet head |
EP0819524A1 (en) | 1996-07-18 | 1998-01-21 | Océ-Technologies B.V. | Ink jet nozzle head with backing member |
-
1999
- 1999-01-12 EP EP19990200091 patent/EP0931654B1/en not_active Expired - Lifetime
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4383264A (en) * | 1980-06-18 | 1983-05-10 | Exxon Research And Engineering Co. | Demand drop forming device with interacting transducer and orifice combination |
US4364070A (en) * | 1980-07-04 | 1982-12-14 | Hitachi, Ltd. | Drop jet apparatus |
EP0402172A1 (en) | 1989-06-09 | 1990-12-12 | Sharp Kabushiki Kaisha | Head for ink-jet printer |
EP0563603A2 (en) * | 1992-03-03 | 1993-10-06 | Seiko Epson Corporation | Ink jet recording head and a method of manufacturing the same |
EP0713774A2 (en) * | 1994-11-24 | 1996-05-29 | Sharp Kabushiki Kaisha | Ink jet head for high speed printing and method for it's fabrication |
EP0718102A2 (en) | 1994-12-20 | 1996-06-26 | Sharp Kabushiki Kaisha | Compact ink jet head with deformable structure for ink discharge with great force |
EP0783965A2 (en) * | 1995-08-22 | 1997-07-16 | Nec Corporation | Fluid drop projecting apparatus and fluid drop projecting method |
JPH09174836A (en) * | 1995-12-22 | 1997-07-08 | Nec Corp | Ink jet recording head and manufacture thereof |
JPH09226104A (en) * | 1996-02-21 | 1997-09-02 | Sharp Corp | Printer |
JPH09277527A (en) * | 1996-04-17 | 1997-10-28 | Citizen Watch Co Ltd | Ink jet head |
EP0819524A1 (en) | 1996-07-18 | 1998-01-21 | Océ-Technologies B.V. | Ink jet nozzle head with backing member |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 097, no. 011 28 November 1997 (1997-11-28) * |
PATENT ABSTRACTS OF JAPAN vol. 098, no. 001 30 January 1998 (1998-01-30) * |
PATENT ABSTRACTS OF JAPAN vol. 098, no. 002 30 January 1998 (1998-01-30) * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003070467A3 (en) * | 2002-02-20 | 2003-12-04 | Xaar Technology Ltd | Fluid pumping and droplet deposition apparatus |
WO2019043340A1 (en) | 2017-09-01 | 2019-03-07 | Arkema France | Metal corrosion inhibitors |
Also Published As
Publication number | Publication date |
---|---|
EP0931654B1 (en) | 2003-12-03 |
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