EP1161654A4 - Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation - Google Patents

Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation

Info

Publication number
EP1161654A4
EP1161654A4 EP00918006A EP00918006A EP1161654A4 EP 1161654 A4 EP1161654 A4 EP 1161654A4 EP 00918006 A EP00918006 A EP 00918006A EP 00918006 A EP00918006 A EP 00918006A EP 1161654 A4 EP1161654 A4 EP 1161654A4
Authority
EP
European Patent Office
Prior art keywords
compensation
multiple layer
domain reflectometry
amplitude reduction
wavenumber domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00918006A
Other languages
German (de)
French (fr)
Other versions
EP1161654A1 (en
Inventor
Henry A Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zetetic Institute
Original Assignee
Zetetic Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Institute filed Critical Zetetic Institute
Publication of EP1161654A1 publication Critical patent/EP1161654A1/en
Publication of EP1161654A4 publication Critical patent/EP1161654A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/14—Heads, e.g. forming of the optical beam spot or modulation of the optical beam specially adapted to record on, or to reproduce from, more than one track simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
EP00918006A 1999-03-18 2000-03-16 Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation Withdrawn EP1161654A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12505799P 1999-03-18 1999-03-18
US125057P 1999-03-18
PCT/US2000/006914 WO2000055572A1 (en) 1999-03-18 2000-03-16 Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation

Publications (2)

Publication Number Publication Date
EP1161654A1 EP1161654A1 (en) 2001-12-12
EP1161654A4 true EP1161654A4 (en) 2006-09-27

Family

ID=22418008

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00918006A Withdrawn EP1161654A4 (en) 1999-03-18 2000-03-16 Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation

Country Status (5)

Country Link
EP (1) EP1161654A4 (en)
JP (1) JP2002539494A (en)
KR (2) KR20010083041A (en)
CN (1) CN1351705A (en)
WO (1) WO2000055572A1 (en)

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KR20040039882A (en) * 2002-11-05 2004-05-12 주식회사 대우일렉트로닉스 Volume holographic data storage and reproducing system
US7733497B2 (en) 2003-10-27 2010-06-08 The General Hospital Corporation Method and apparatus for performing optical imaging using frequency-domain interferometry
DE102005006723B3 (en) * 2005-02-03 2006-06-08 Universität Stuttgart Interferometrical confocal method for optical data memory e.g. terabyte volume memory, involves transmitting light from multi-wavelength source and arranging spectrometer in front of screened receiver
CN100451538C (en) * 2005-07-25 2009-01-14 武汉大学 Appearance measuring method and device for light interference surface based on wide band
ATE516739T1 (en) * 2005-12-06 2011-08-15 Zeiss Carl Meditec Ag INTERFEROMETRIC SAMPLE MEASUREMENT
JP2008135125A (en) 2006-11-29 2008-06-12 Ricoh Co Ltd Optical head, optical disk device, and information processing device
US7933025B2 (en) * 2006-12-18 2011-04-26 Zygo Corporation Sinusoidal phase shifting interferometry
JP5844524B2 (en) * 2008-01-08 2016-01-20 オスラム ゲーエムベーハーＯＳＲＡＭ ＧｍｂＨ Method and apparatus for projecting at least one ray
JP2010025864A (en) * 2008-07-23 2010-02-04 Hamamatsu Photonics Kk Interference measuring apparatus
JP5532792B2 (en) * 2009-09-28 2014-06-25 富士通株式会社 Surface inspection apparatus and surface inspection method
US9522396B2 (en) 2010-12-29 2016-12-20 S.D. Sight Diagnostics Ltd. Apparatus and method for automatic detection of pathogens
DE102011013614A1 (en) * 2011-03-08 2012-09-13 Carl Zeiss Microimaging Gmbh Laser scanning microscope and method of its operation
CN106840812B (en) 2011-12-29 2019-12-17 思迪赛特诊断有限公司 Methods and systems for detecting pathogens in biological samples
WO2013183057A1 (en) * 2012-06-05 2013-12-12 B-Nano Ltd. A system and method for performing analysis of materials in a non-vacuum environment using an electron microscope
KR101683407B1 (en) * 2012-10-05 2016-12-06 고쿠리츠다이가쿠호우징 카가와다이가쿠 Spectroscopic measurement device
US9696264B2 (en) * 2013-04-03 2017-07-04 Kla-Tencor Corporation Apparatus and methods for determining defect depths in vertical stack memory
WO2014188405A1 (en) 2013-05-23 2014-11-27 Parasight Ltd. Method and system for imaging a cell sample
IL227276A0 (en) 2013-07-01 2014-03-06 Parasight Ltd A method and system for preparing a monolayer of cells, particularly suitable for diagnosis
US10831013B2 (en) 2013-08-26 2020-11-10 S.D. Sight Diagnostics Ltd. Digital microscopy systems, methods and computer program products
EP3186778B1 (en) 2014-08-27 2023-01-11 S.D. Sight Diagnostics Ltd. System and method for calculating focus variation for a digital microscope
EP3859425B1 (en) 2015-09-17 2024-04-17 S.D. Sight Diagnostics Ltd. Methods and apparatus for detecting an entity in a bodily sample
EP3222964B1 (en) * 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
CA3018536A1 (en) 2016-03-30 2017-10-05 S.D. Sight Diagnostics Ltd Distinguishing between blood sample components
LU93022B1 (en) * 2016-04-08 2017-11-08 Leica Microsystems Method and microscope for examining a sample
US11307196B2 (en) 2016-05-11 2022-04-19 S.D. Sight Diagnostics Ltd. Sample carrier for optical measurements
WO2017195208A1 (en) 2016-05-11 2017-11-16 S.D. Sight Diagnostics Ltd Performing optical measurements on a sample
CN106289090B (en) * 2016-08-24 2018-10-09 广东工业大学 A kind of measuring device of dental resin planted agent variable field
US10481111B2 (en) 2016-10-21 2019-11-19 Kla-Tencor Corporation Calibration of a small angle X-ray scatterometry based metrology system
AU2018369859B2 (en) 2017-11-14 2024-01-25 S.D. Sight Diagnostics Ltd Sample carrier for optical measurements
US11573304B2 (en) * 2018-04-27 2023-02-07 Liturex (Guangzhou) Co. Ltd LiDAR device with a dynamic spatial filter
CN112970233A (en) * 2018-12-17 2021-06-15 瑞士优北罗股份有限公司 Estimating one or more characteristics of a communication channel

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213706A (en) * 1977-08-19 1980-07-22 The University Of Arizona Foundation Background compensating interferometer
US4304464A (en) * 1977-08-19 1981-12-08 The University Of Arizona Foundation Background compensating interferometer
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5708504A (en) * 1996-10-25 1998-01-13 The United States Of America As Represented By The Secretary Of The Air Force Interfering imaging spectrometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213706A (en) * 1977-08-19 1980-07-22 The University Of Arizona Foundation Background compensating interferometer
US4304464A (en) * 1977-08-19 1981-12-08 The University Of Arizona Foundation Background compensating interferometer
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0055572A1 *

Also Published As

Publication number Publication date
WO2000055572A1 (en) 2000-09-21
KR20010083041A (en) 2001-08-31
EP1161654A1 (en) 2001-12-12
CN1351705A (en) 2002-05-29
JP2002539494A (en) 2002-11-19
KR20020034988A (en) 2002-05-09

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