EP1219426A3 - Cmos/mems integrated ink jet print head and method of forming same - Google Patents

Cmos/mems integrated ink jet print head and method of forming same Download PDF

Info

Publication number
EP1219426A3
EP1219426A3 EP01130224A EP01130224A EP1219426A3 EP 1219426 A3 EP1219426 A3 EP 1219426A3 EP 01130224 A EP01130224 A EP 01130224A EP 01130224 A EP01130224 A EP 01130224A EP 1219426 A3 EP1219426 A3 EP 1219426A3
Authority
EP
European Patent Office
Prior art keywords
print head
ink
ink jet
nozzle
jet print
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01130224A
Other languages
German (de)
French (fr)
Other versions
EP1219426B1 (en
EP1219426A2 (en
Inventor
Constantine N. Anagnostopoulos
John A. Lebens
David P. Trauernicht
James M. Chwalek
Christopher N. Delametter
Gilbert A. Hawkins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/751,593 external-priority patent/US6382782B1/en
Priority claimed from US09/751,115 external-priority patent/US6412928B1/en
Priority claimed from US09/792,114 external-priority patent/US6502925B2/en
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of EP1219426A2 publication Critical patent/EP1219426A2/en
Publication of EP1219426A3 publication Critical patent/EP1219426A3/en
Application granted granted Critical
Publication of EP1219426B1 publication Critical patent/EP1219426B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/07Ink jet characterised by jet control
    • B41J2/105Ink jet characterised by jet control for binary-valued deflection
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/02Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2/03Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/02Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2/03Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
    • B41J2002/032Deflection by heater around the nozzle
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/13Heads having an integrated circuit
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/16Nozzle heaters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/22Manufacturing print heads

Abstract

An ink jet print head is formed of a silicon substrate that includes an integrated circuit formed therein for controlling operation of the print head. The silicon substrate has one or more ink channels formed therein along the longitudinal direction of the nozzle array. An insulating layer or layers overlie the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with an ink channel. The area comprising the nozzle openings forms a generally planar surface to facilitate maintenance of the printhead. A heater element is associated with each nozzle opening or bore for asymmetrically heating ink as ink passes through the nozzle opening or bore.
EP20010130224 2000-12-29 2001-12-19 Cmos/mems integrated ink jet print head and method of forming same Expired - Lifetime EP1219426B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US09/751,593 US6382782B1 (en) 2000-12-29 2000-12-29 CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same
US09/751,115 US6412928B1 (en) 2000-12-29 2000-12-29 Incorporation of supplementary heaters in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same
US751593 2000-12-29
US751115 2000-12-29
US09/792,114 US6502925B2 (en) 2001-02-22 2001-02-22 CMOS/MEMS integrated ink jet print head and method of operating same
US792114 2001-02-22

Publications (3)

Publication Number Publication Date
EP1219426A2 EP1219426A2 (en) 2002-07-03
EP1219426A3 true EP1219426A3 (en) 2003-03-19
EP1219426B1 EP1219426B1 (en) 2006-03-01

Family

ID=27419409

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010130224 Expired - Lifetime EP1219426B1 (en) 2000-12-29 2001-12-19 Cmos/mems integrated ink jet print head and method of forming same

Country Status (3)

Country Link
EP (1) EP1219426B1 (en)
JP (1) JP2002225278A (en)
DE (1) DE60117456T2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1317736C (en) * 2003-08-14 2007-05-23 明基电通股份有限公司 Method for preparing monolithic fluid spraying appratus
US7057138B2 (en) 2004-04-23 2006-06-06 Eastman Kodak Company Apparatus for controlling temperature profiles in liquid droplet ejectors
US7735981B2 (en) 2007-07-31 2010-06-15 Eastman Kodak Company Continuous ink-jet printing with jet straightness correction
US7762647B2 (en) * 2007-09-25 2010-07-27 Eastman Kodak Company MEMS printhead based compressed fluid printing system
EP2865787A1 (en) 2013-10-22 2015-04-29 ATOTECH Deutschland GmbH Copper electroplating method
WO2018116561A1 (en) * 2016-12-20 2018-06-28 コニカミノルタ株式会社 Ink jet head and image forming apparatus
KR102621225B1 (en) 2019-02-06 2024-01-04 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. Die for printhead
EP3710260B1 (en) 2019-02-06 2021-07-21 Hewlett-Packard Development Company, L.P. Die for a printhead
MX2021009368A (en) 2019-02-06 2021-09-10 Hewlett Packard Development Co Die for a printhead.
WO2020162911A1 (en) * 2019-02-06 2020-08-13 Hewlett-Packard Development Company, L.P. Die for a printhead

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
EP1034932A2 (en) * 1999-03-12 2000-09-13 Hewlett-Packard Company Printhead having varied thickness passivation layer and method of making same
EP1060890A2 (en) * 1999-06-17 2000-12-20 Eastman Kodak Company Thermal ink jet print head

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1941001A (en) 1929-01-19 1933-12-26 Rca Corp Recorder
US2007162A (en) 1932-03-19 1935-07-09 Laval Separator Co De Milking machine teat cup
US3373437A (en) 1964-03-25 1968-03-12 Richard G. Sweet Fluid droplet recorder with a plurality of jets
FR1495825A (en) 1965-10-08 1967-09-22 Electrical signal recording device
US3946398A (en) 1970-06-29 1976-03-23 Silonics, Inc. Method and apparatus for recording with writing fluids and drop projection means therefor
CA1158706A (en) 1979-12-07 1983-12-13 Carl H. Hertz Method and apparatus for controlling the electric charge on droplets and ink jet recorder incorporating the same
US6079821A (en) 1997-10-17 2000-06-27 Eastman Kodak Company Continuous ink jet printer with asymmetric heating drop deflection
US6247801B1 (en) 1999-12-01 2001-06-19 Eastman Kodak Company Continuous ink jet printing process using asymmetric heating drop deflection

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
EP1034932A2 (en) * 1999-03-12 2000-09-13 Hewlett-Packard Company Printhead having varied thickness passivation layer and method of making same
EP1060890A2 (en) * 1999-06-17 2000-12-20 Eastman Kodak Company Thermal ink jet print head

Also Published As

Publication number Publication date
DE60117456T2 (en) 2006-10-05
DE60117456D1 (en) 2006-04-27
JP2002225278A (en) 2002-08-14
EP1219426B1 (en) 2006-03-01
EP1219426A2 (en) 2002-07-03

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