EP1232823A3 - Method for producing microstructures and the corresponding use - Google Patents

Method for producing microstructures and the corresponding use Download PDF

Info

Publication number
EP1232823A3
EP1232823A3 EP02003677A EP02003677A EP1232823A3 EP 1232823 A3 EP1232823 A3 EP 1232823A3 EP 02003677 A EP02003677 A EP 02003677A EP 02003677 A EP02003677 A EP 02003677A EP 1232823 A3 EP1232823 A3 EP 1232823A3
Authority
EP
European Patent Office
Prior art keywords
corresponding use
producing microstructures
microstructures
producing
electrochemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02003677A
Other languages
German (de)
French (fr)
Other versions
EP1232823B1 (en
EP1232823A2 (en
Inventor
Thomas Ehben
Daniel Dr. Reznik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of EP1232823A2 publication Critical patent/EP1232823A2/en
Publication of EP1232823A3 publication Critical patent/EP1232823A3/en
Application granted granted Critical
Publication of EP1232823B1 publication Critical patent/EP1232823B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects

Landscapes

  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Weting (AREA)
  • Studio Circuits (AREA)

Abstract

Erläutert wird ein Verfahren, bei dem auf einem Werkstück (22) auf Siliziumbasis mindestens ein Bereich (50) durch funkenerosives oder elektrochemisches Formabtragen abgetragen wird.

Figure 00000001
A method is explained in which at least one area (50) is removed on a workpiece (22) based on silicon by spark erosion or electrochemical shape removal.
Figure 00000001
EP20020003677 2001-02-20 2002-02-18 Method for producing microstructures and the corresponding use Expired - Lifetime EP1232823B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10108074 2001-02-20
DE2001108074 DE10108074A1 (en) 2001-02-20 2001-02-20 Process for the production of microstructures and associated use

Publications (3)

Publication Number Publication Date
EP1232823A2 EP1232823A2 (en) 2002-08-21
EP1232823A3 true EP1232823A3 (en) 2004-09-15
EP1232823B1 EP1232823B1 (en) 2007-04-04

Family

ID=7674814

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20020003677 Expired - Lifetime EP1232823B1 (en) 2001-02-20 2002-02-18 Method for producing microstructures and the corresponding use

Country Status (2)

Country Link
EP (1) EP1232823B1 (en)
DE (2) DE10108074A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102357688B (en) * 2011-09-06 2013-01-30 大连理工大学 Electrical discharge machining method of die inserted block for forming microstructure

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131524A (en) * 1969-11-24 1978-12-26 U.S. Philips Corporation Manufacture of semiconductor devices
US5429984A (en) * 1990-11-01 1995-07-04 Matsushita Electric Industrial Co., Ltd. Method of discharge processing of semiconductor
JP2000202718A (en) * 1999-01-14 2000-07-25 Matsushita Electric Ind Co Ltd Manufacture of electrode for working tool and machining method
US6124632A (en) * 1999-07-23 2000-09-26 Industrial Technology Research Institute Monolithic silicon mass flow control structure

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401932A (en) * 1992-02-07 1995-03-28 Matsushita Electric Industrial Co., Ltd. Method of producing a stencil mask

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131524A (en) * 1969-11-24 1978-12-26 U.S. Philips Corporation Manufacture of semiconductor devices
US5429984A (en) * 1990-11-01 1995-07-04 Matsushita Electric Industrial Co., Ltd. Method of discharge processing of semiconductor
JP2000202718A (en) * 1999-01-14 2000-07-25 Matsushita Electric Ind Co Ltd Manufacture of electrode for working tool and machining method
US6124632A (en) * 1999-07-23 2000-09-26 Industrial Technology Research Institute Monolithic silicon mass flow control structure

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 10 17 November 2000 (2000-11-17) *
REYNAERTS D ET AL: "Machining of three-dimensional microstructures in silicon by electro-discharge machining", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 67, no. 1-3, 15 May 1998 (1998-05-15), pages 159 - 165, XP004130129, ISSN: 0924-4247 *

Also Published As

Publication number Publication date
EP1232823B1 (en) 2007-04-04
DE10108074A1 (en) 2002-09-12
DE50209850D1 (en) 2007-05-16
EP1232823A2 (en) 2002-08-21

Similar Documents

Publication Publication Date Title
EP1504965A3 (en) Process for determining a critical driver behavior
EP0827312A3 (en) Method for changing the configuration of data packets
CA2108720A1 (en) Surgical cutting instrument
DE60317506D1 (en) HEAT EXCHANGE TUBE AND METHOD AND TOOL FOR THE PRODUCTION THEREOF
ATE297319T1 (en) MOTOR VEHICLE EMBLEM AND METHOD FOR PRODUCING IT
EP1241563A3 (en) Method for improving print efficiency
EP1101573A3 (en) Handle for a hand tool and method for producing same
DE59601917D1 (en) Wire electrode and method for producing a wire electrode, in particular for the spark erosion method
EP1319581A3 (en) Plastic mud-guard for motor vehicles
EP1589320A3 (en) Navigation apparatus and navigation method
EP1162343A3 (en) Rock drilling tool
EP1149741A3 (en) Folding method and device
EP0976481A3 (en) Quick clamping cylinder without cover
ATE428902T1 (en) FIREARM AND METHOD FOR THE PRODUCTION THEREOF
DE59204438D1 (en) Ion filter, in particular for a mass spectrometer, and method for producing the same.
ATE364573T1 (en) MICROMECHANICAL CLOCK MOVEMENT COMPONENTS AND METHOD FOR THEIR PRODUCTION
EP1232823A3 (en) Method for producing microstructures and the corresponding use
DE50214276D1 (en) Method and apparatus for the determination of offset values by a histogram method
EP0892425A3 (en) Fabriciation method for a platinum-metal pattern by means of a lift-off process
EP0903555A3 (en) Fin for heat exchanger and method for making holes in such a fin
EP1170785A3 (en) Process for forming microroughness on a surface
DE60221454D1 (en) Method for producing sheet metal plates by pulling over a tool or "mold"
EP1223053A3 (en) Process for applying an identification number
EP1236539A3 (en) Honing method
EP0666127A3 (en) Method and vacuumchamber for the production of metal models

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

17P Request for examination filed

Effective date: 20040927

AKX Designation fees paid

Designated state(s): DE FR GB

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REF Corresponds to:

Ref document number: 50209850

Country of ref document: DE

Date of ref document: 20070516

Kind code of ref document: P

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20070704

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20080107

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 15

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 16

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20170217

Year of fee payment: 16

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20170216

Year of fee payment: 16

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20170425

Year of fee payment: 16

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 50209850

Country of ref document: DE

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20180218

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20181031

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180901

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180218

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180228