EP1354180A4 - Time based mass flow controller and method for controlling flow rate using it - Google Patents

Time based mass flow controller and method for controlling flow rate using it

Info

Publication number
EP1354180A4
EP1354180A4 EP01272934A EP01272934A EP1354180A4 EP 1354180 A4 EP1354180 A4 EP 1354180A4 EP 01272934 A EP01272934 A EP 01272934A EP 01272934 A EP01272934 A EP 01272934A EP 1354180 A4 EP1354180 A4 EP 1354180A4
Authority
EP
European Patent Office
Prior art keywords
time based
flow rate
based mass
mass flow
flow controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01272934A
Other languages
German (de)
French (fr)
Other versions
EP1354180A1 (en
Inventor
Young-Chul Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANG, YOUNG-CHUL
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR10-2001-0052398A external-priority patent/KR100458511B1/en
Application filed by Individual filed Critical Individual
Priority claimed from US10/112,692 external-priority patent/US6782906B2/en
Publication of EP1354180A1 publication Critical patent/EP1354180A1/en
Publication of EP1354180A4 publication Critical patent/EP1354180A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
EP01272934A 2000-12-28 2001-11-22 Time based mass flow controller and method for controlling flow rate using it Withdrawn EP1354180A4 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
KR2000084326 2000-12-28
KR20000084326 2000-12-28
KR20010041670 2001-07-11
KR2001041670 2001-07-11
KR10-2001-0052398A KR100458511B1 (en) 2000-12-28 2001-08-29 Time-based flow controller and method for controlling mass flow using it
KR2001052398 2001-08-29
PCT/KR2001/002016 WO2002054020A1 (en) 2000-12-28 2001-11-22 Time based mass flow controller and method for controlling flow rate using it
US10/112,692 US6782906B2 (en) 2000-12-28 2002-03-29 Time based mass flow controller and method for controlling flow rate using it

Publications (2)

Publication Number Publication Date
EP1354180A1 EP1354180A1 (en) 2003-10-22
EP1354180A4 true EP1354180A4 (en) 2005-01-12

Family

ID=29740958

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01272934A Withdrawn EP1354180A4 (en) 2000-12-28 2001-11-22 Time based mass flow controller and method for controlling flow rate using it

Country Status (2)

Country Link
EP (1) EP1354180A4 (en)
WO (1) WO2002054020A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6782906B2 (en) * 2000-12-28 2004-08-31 Young-Chul Chang Time based mass flow controller and method for controlling flow rate using it
DE102010064017A1 (en) * 2010-12-23 2012-06-28 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Device for controlling volumetric flow of liquid used in e.g. sewage treatment plant, adjusts auxiliary pressure generated by auxiliary pressure sensor through gas line between regulated gas pressure generating and tracking units
CN113203443A (en) * 2021-04-27 2021-08-03 西安热工研究院有限公司 Differential pressure type online micro gas flowmeter and automatic detection method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1165432A (en) * 1966-10-24 1969-10-01 Balzers Patent Und Beseiligung Improvements in and relating to the Continuous Digital Measuring of Amounts of Gas Given Off or Sorbed by Specimens
US4285245A (en) * 1979-12-06 1981-08-25 Precision Machine Products, Inc. Method and apparatus for measuring and controlling volumetric flow rate of gases in a line
US4364413A (en) * 1981-01-07 1982-12-21 The Perkin-Elmer Corporation Molar gas-flow controller
EP0660091A1 (en) * 1993-12-24 1995-06-28 SEVA, Société anonyme Method and device for metering gas under pressure
US5925829A (en) * 1994-01-14 1999-07-20 Unit Instruments, Inc. Method and apparatus for determining a rate of flow of gas by a rate of change of pressure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09222344A (en) * 1996-02-16 1997-08-26 Hitachi Metals Ltd Mass flow controller
US5720415A (en) * 1996-04-02 1998-02-24 American Medical Systems, Inc. Apparatus for delivering fluid at a controlled rate and pressure
US6074691A (en) * 1997-06-24 2000-06-13 Balzers Aktiengesellschaft Method for monitoring the flow of a gas into a vacuum reactor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1165432A (en) * 1966-10-24 1969-10-01 Balzers Patent Und Beseiligung Improvements in and relating to the Continuous Digital Measuring of Amounts of Gas Given Off or Sorbed by Specimens
US4285245A (en) * 1979-12-06 1981-08-25 Precision Machine Products, Inc. Method and apparatus for measuring and controlling volumetric flow rate of gases in a line
US4364413A (en) * 1981-01-07 1982-12-21 The Perkin-Elmer Corporation Molar gas-flow controller
EP0660091A1 (en) * 1993-12-24 1995-06-28 SEVA, Société anonyme Method and device for metering gas under pressure
US5925829A (en) * 1994-01-14 1999-07-20 Unit Instruments, Inc. Method and apparatus for determining a rate of flow of gas by a rate of change of pressure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO02054020A1 *

Also Published As

Publication number Publication date
WO2002054020A1 (en) 2002-07-11
EP1354180A1 (en) 2003-10-22

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20030725

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Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: CHANG, YOUNG-CHUL

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB IT

A4 Supplementary search report drawn up and despatched

Effective date: 20041130

RIC1 Information provided on ipc code assigned before grant

Ipc: 7G 01F 1/68 A

Ipc: 7G 05D 7/06 B

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20050214