EP1495306A4 - Surface cleaning and particle counting - Google Patents

Surface cleaning and particle counting

Info

Publication number
EP1495306A4
EP1495306A4 EP02807182A EP02807182A EP1495306A4 EP 1495306 A4 EP1495306 A4 EP 1495306A4 EP 02807182 A EP02807182 A EP 02807182A EP 02807182 A EP02807182 A EP 02807182A EP 1495306 A4 EP1495306 A4 EP 1495306A4
Authority
EP
European Patent Office
Prior art keywords
surface cleaning
particle counting
counting
particle
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02807182A
Other languages
German (de)
French (fr)
Other versions
EP1495306A1 (en
Inventor
John Samuel Batchelder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Convey Technology Inc
Original Assignee
Convey Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Convey Technology Inc filed Critical Convey Technology Inc
Priority claimed from PCT/US2002/010199 external-priority patent/WO2003085384A1/en
Publication of EP1495306A1 publication Critical patent/EP1495306A1/en
Publication of EP1495306A4 publication Critical patent/EP1495306A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
EP02807182A 2002-04-02 2002-04-02 Surface cleaning and particle counting Withdrawn EP1495306A4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/010199 WO2003085384A1 (en) 1999-05-12 2002-04-02 Surface cleaning and particle counting

Publications (2)

Publication Number Publication Date
EP1495306A1 EP1495306A1 (en) 2005-01-12
EP1495306A4 true EP1495306A4 (en) 2007-10-03

Family

ID=33449001

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02807182A Withdrawn EP1495306A4 (en) 2002-04-02 2002-04-02 Surface cleaning and particle counting

Country Status (4)

Country Link
EP (1) EP1495306A4 (en)
JP (1) JP4383178B2 (en)
KR (1) KR100809988B1 (en)
AU (1) AU2002307046A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2933194B1 (en) * 2008-06-26 2010-08-13 Commissariat Energie Atomique METHOD AND DEVICE FOR QUANTIFYING PARTICULATE SURFACE CONTAMINANTS BY IMPROVED ANALYSIS
WO2014051076A1 (en) 2012-09-28 2014-04-03 株式会社Ｂｎａ Bna clamp method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4705388A (en) * 1985-05-09 1987-11-10 Oce-Nederland B.V. Method and apparatus for determining when a layer of tacky material present on a cleaning member needs to be rejuvenated
US4766324A (en) * 1987-08-07 1988-08-23 Tencor Instruments Particle detection method including comparison between sequential scans
US5373365A (en) * 1992-12-23 1994-12-13 Eastman Kodak Company Apparatus and method for measuring particle contamination

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1014638A (en) 1974-04-16 1977-07-26 Domtar Limited Measuring the surface roughness of a moving sheet material
US4053237A (en) 1976-07-02 1977-10-11 Westvaco Corporation Measuring the surface of a roller by glossmeter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4705388A (en) * 1985-05-09 1987-11-10 Oce-Nederland B.V. Method and apparatus for determining when a layer of tacky material present on a cleaning member needs to be rejuvenated
US4766324A (en) * 1987-08-07 1988-08-23 Tencor Instruments Particle detection method including comparison between sequential scans
US5373365A (en) * 1992-12-23 1994-12-13 Eastman Kodak Company Apparatus and method for measuring particle contamination

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO03085384A1 *

Also Published As

Publication number Publication date
EP1495306A1 (en) 2005-01-12
KR20050002922A (en) 2005-01-10
JP4383178B2 (en) 2009-12-16
AU2002307046A1 (en) 2003-10-20
JP2005521887A (en) 2005-07-21
KR100809988B1 (en) 2008-03-07

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20041021

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A4 Supplementary search report drawn up and despatched

Effective date: 20070831

RIC1 Information provided on ipc code assigned before grant

Ipc: G01N 15/02 20060101ALI20070827BHEP

Ipc: G01N 21/88 20060101AFI20070827BHEP

17Q First examination report despatched

Effective date: 20080724

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20091103