EP1640320A3 - Method and system for packaging a micromechanical display - Google Patents
Method and system for packaging a micromechanical display Download PDFInfo
- Publication number
- EP1640320A3 EP1640320A3 EP05255634A EP05255634A EP1640320A3 EP 1640320 A3 EP1640320 A3 EP 1640320A3 EP 05255634 A EP05255634 A EP 05255634A EP 05255634 A EP05255634 A EP 05255634A EP 1640320 A3 EP1640320 A3 EP 1640320A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- packaging
- backplane
- transparent substrate
- interferometric modulator
- joined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0109—Bonding an individual cap on the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0145—Hermetically sealing an opening in the lid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0172—Seals
- B81C2203/019—Seals characterised by the material or arrangement of seals between parts
Abstract
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61356304P | 2004-09-27 | 2004-09-27 | |
US61337704P | 2004-09-27 | 2004-09-27 | |
US61332004P | 2004-09-27 | 2004-09-27 | |
US61346704P | 2004-09-27 | 2004-09-27 | |
US61348404P | 2004-09-27 | 2004-09-27 | |
US61395604P | 2004-09-27 | 2004-09-27 | |
US11/150,496 US8124434B2 (en) | 2004-09-27 | 2005-06-10 | Method and system for packaging a display |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1640320A2 EP1640320A2 (en) | 2006-03-29 |
EP1640320A3 true EP1640320A3 (en) | 2007-02-28 |
EP1640320B1 EP1640320B1 (en) | 2011-05-04 |
Family
ID=35207614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP05255634A Not-in-force EP1640320B1 (en) | 2004-09-27 | 2005-09-14 | Method for packaging a micromechanical display |
Country Status (11)
Country | Link |
---|---|
US (2) | US8124434B2 (en) |
EP (1) | EP1640320B1 (en) |
JP (2) | JP4535386B2 (en) |
KR (2) | KR101239270B1 (en) |
AT (1) | ATE508094T1 (en) |
AU (1) | AU2005203700A1 (en) |
CA (1) | CA2518805A1 (en) |
DE (1) | DE602005027785D1 (en) |
MX (1) | MXPA05010085A (en) |
SG (1) | SG155970A1 (en) |
TW (1) | TWI370102B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7746537B2 (en) | 2006-04-13 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | MEMS devices and processes for packaging such devices |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
KR100703140B1 (en) | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | Interferometric modulation and its manufacturing method |
US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US20060076632A1 (en) * | 2004-09-27 | 2006-04-13 | Lauren Palmateer | System and method for display device with activated desiccant |
US7405924B2 (en) * | 2004-09-27 | 2008-07-29 | Idc, Llc | System and method for protecting microelectromechanical systems array using structurally reinforced back-plate |
US7561334B2 (en) * | 2005-12-20 | 2009-07-14 | Qualcomm Mems Technologies, Inc. | Method and apparatus for reducing back-glass deflection in an interferometric modulator display device |
US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
WO2007136706A1 (en) * | 2006-05-17 | 2007-11-29 | Qualcomm Mems Technologies Inc. | Desiccant in a mems device |
WO2007149475A2 (en) * | 2006-06-21 | 2007-12-27 | Qualcomm Mems Technologies, Inc. | Method for packaging an optical mems device |
DE102006031772A1 (en) | 2006-07-10 | 2008-01-17 | Robert Bosch Gmbh | Method for producing a sensor element and sensor element |
US7763962B2 (en) * | 2006-11-10 | 2010-07-27 | Spatial Photonics, Inc. | Wafer-level packaging of micro devices |
US7816164B2 (en) | 2006-12-01 | 2010-10-19 | Qualcomm Mems Technologies, Inc. | MEMS processing |
US7791708B2 (en) * | 2006-12-27 | 2010-09-07 | Asml Netherlands B.V. | Lithographic apparatus, substrate table, and method for enhancing substrate release properties |
US8241713B2 (en) * | 2007-02-21 | 2012-08-14 | 3M Innovative Properties Company | Moisture barrier coatings for organic light emitting diode devices |
EP2116508A3 (en) * | 2007-09-28 | 2010-10-13 | QUALCOMM MEMS Technologies, Inc. | Optimization of desiccant usage in a MEMS package |
TW200938479A (en) * | 2007-10-22 | 2009-09-16 | Toshiba Kk | Micromachine device and method of manufacturing the same |
US8309388B2 (en) * | 2008-04-25 | 2012-11-13 | Texas Instruments Incorporated | MEMS package having formed metal lid |
US20090323170A1 (en) * | 2008-06-30 | 2009-12-31 | Qualcomm Mems Technologies, Inc. | Groove on cover plate or substrate |
US7782522B2 (en) * | 2008-07-17 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Encapsulation methods for interferometric modulator and MEMS devices |
US20100020382A1 (en) * | 2008-07-22 | 2010-01-28 | Qualcomm Mems Technologies, Inc. | Spacer for mems device |
US8410690B2 (en) * | 2009-02-13 | 2013-04-02 | Qualcomm Mems Technologies, Inc. | Display device with desiccant |
US8379392B2 (en) * | 2009-10-23 | 2013-02-19 | Qualcomm Mems Technologies, Inc. | Light-based sealing and device packaging |
NL1038551C2 (en) * | 2011-01-27 | 2012-07-31 | Geerts Peter | PARTICULATE POLLUTION MEASUREMENT FOR CLEAN SPACE PRODUCTS. |
CN102744317A (en) * | 2012-07-06 | 2012-10-24 | 邓洋阳 | Production method of liquid crystal display frame |
US20140028686A1 (en) * | 2012-07-27 | 2014-01-30 | Qualcomm Mems Technologies, Inc. | Display system with thin film encapsulated inverted imod |
JP6260080B2 (en) | 2013-01-07 | 2018-01-17 | セイコーエプソン株式会社 | Wavelength variable interference filter, method for manufacturing wavelength variable interference filter, optical module, and electronic device |
KR101446414B1 (en) * | 2013-02-20 | 2014-10-02 | 희성전자 주식회사 | Method for manufacturing a display device |
JP6070404B2 (en) * | 2013-05-14 | 2017-02-01 | 富士通株式会社 | MEMS device and method for manufacturing MEMS device |
US8760797B1 (en) | 2013-06-13 | 2014-06-24 | Seagate Technology Llc | Contamination control for a disc drive |
US20160299332A1 (en) * | 2015-04-09 | 2016-10-13 | Qualcomm Mems Technologies, Inc. | Pre-release encapsulation of electromechanical system devices |
US11394296B2 (en) * | 2017-10-11 | 2022-07-19 | Verily Life Sciences Llc | Voltage driver for electrowetting lens |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001058804A2 (en) * | 2000-02-09 | 2001-08-16 | Robert Bosch Gmbh | Micromechanical component and corresponding production method |
US20020043706A1 (en) * | 2000-06-28 | 2002-04-18 | Institut National D'optique | Miniature Microdevice Package and Process for Making Thereof |
US20020075551A1 (en) * | 2000-11-29 | 2002-06-20 | Onix Microsystems, Inc | Enclosure for MEMS apparatus and method of using the same |
US20020126364A1 (en) * | 1994-05-05 | 2002-09-12 | Iridigm Display Corporation, A Delaware Corporation | Interferometric modulation of radiation |
WO2003054925A2 (en) * | 2001-10-25 | 2003-07-03 | The Regents Of The University Of Michigan | Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
US6589625B1 (en) * | 2001-08-01 | 2003-07-08 | Iridigm Display Corporation | Hermetic seal and method to create the same |
Family Cites Families (353)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2009A (en) * | 1841-03-18 | Improvement in machines for boring war-rockets | ||
US2534846A (en) | 1946-06-20 | 1950-12-19 | Emi Ltd | Color filter |
DE1288651B (en) | 1963-06-28 | 1969-02-06 | Siemens Ag | Arrangement of electrical dipoles for wavelengths below 1 mm and method for producing such an arrangement |
FR1603131A (en) | 1968-07-05 | 1971-03-22 | ||
US3813265A (en) | 1970-02-16 | 1974-05-28 | A Marks | Electro-optical dipolar material |
US3653741A (en) | 1970-02-16 | 1972-04-04 | Alvin M Marks | Electro-optical dipolar material |
DE2336930A1 (en) | 1973-07-20 | 1975-02-06 | Battelle Institut E V | INFRARED MODULATOR (II.) |
US4036360A (en) | 1975-11-12 | 1977-07-19 | Graham Magnetics Incorporated | Package having dessicant composition |
US4074480A (en) | 1976-02-12 | 1978-02-21 | Burton Henry W G | Kit for converting single-glazed window to double-glazed window |
US4099854A (en) | 1976-10-12 | 1978-07-11 | The Unites States Of America As Represented By The Secretary Of The Navy | Optical notch filter utilizing electric dipole resonance absorption |
DE2802728C2 (en) | 1977-01-24 | 1984-03-15 | Sharp K.K., Osaka | Electrochromic display cell |
US4389096A (en) | 1977-12-27 | 1983-06-21 | Matsushita Electric Industrial Co., Ltd. | Image display apparatus of liquid crystal valve projection type |
US4445050A (en) | 1981-12-15 | 1984-04-24 | Marks Alvin M | Device for conversion of light power to electric power |
US4663083A (en) | 1978-05-26 | 1987-05-05 | Marks Alvin M | Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics |
US4431691A (en) | 1979-01-29 | 1984-02-14 | Tremco, Incorporated | Dimensionally stable sealant and spacer strip and composite structures comprising the same |
US4228437A (en) | 1979-06-26 | 1980-10-14 | The United States Of America As Represented By The Secretary Of The Navy | Wideband polarization-transforming electromagnetic mirror |
NL8001281A (en) | 1980-03-04 | 1981-10-01 | Philips Nv | DISPLAY DEVICE. |
CH633902A5 (en) | 1980-03-11 | 1982-12-31 | Centre Electron Horloger | LIGHT MODULATION DEVICE. |
US4377324A (en) | 1980-08-04 | 1983-03-22 | Honeywell Inc. | Graded index Fabry-Perot optical filter device |
US4441791A (en) | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
FR2506026A1 (en) | 1981-05-18 | 1982-11-19 | Radant Etudes | METHOD AND DEVICE FOR ANALYZING A HYPERFREQUENCY ELECTROMAGNETIC WAVE RADIATION BEAM |
NL8103377A (en) | 1981-07-16 | 1983-02-16 | Philips Nv | DISPLAY DEVICE. |
US4571603A (en) | 1981-11-03 | 1986-02-18 | Texas Instruments Incorporated | Deformable mirror electrostatic printer |
NL8200354A (en) | 1982-02-01 | 1983-09-01 | Philips Nv | PASSIVE DISPLAY. |
US4500171A (en) | 1982-06-02 | 1985-02-19 | Texas Instruments Incorporated | Process for plastic LCD fill hole sealing |
US4482213A (en) | 1982-11-23 | 1984-11-13 | Texas Instruments Incorporated | Perimeter seal reinforcement holes for plastic LCDs |
US4566935A (en) | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
US4710732A (en) | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
US5061049A (en) | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
US4596992A (en) | 1984-08-31 | 1986-06-24 | Texas Instruments Incorporated | Linear spatial light modulator and printer |
US4662746A (en) | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
US5096279A (en) | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
US4615595A (en) | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
JPS61206244A (en) * | 1985-03-11 | 1986-09-12 | Hitachi Ltd | Package for optical element |
US5172262A (en) | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
US5835255A (en) | 1986-04-23 | 1998-11-10 | Etalon, Inc. | Visible spectrum modulator arrays |
GB8610129D0 (en) | 1986-04-25 | 1986-05-29 | Secr Defence | Electro-optical device |
US4748366A (en) | 1986-09-02 | 1988-05-31 | Taylor George W | Novel uses of piezoelectric materials for creating optical effects |
US4786128A (en) | 1986-12-02 | 1988-11-22 | Quantum Diagnostics, Ltd. | Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction |
US4977009A (en) | 1987-12-16 | 1990-12-11 | Ford Motor Company | Composite polymer/desiccant coatings for IC encapsulation |
US4956619A (en) | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
US4856863A (en) | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
US4982184A (en) | 1989-01-03 | 1991-01-01 | General Electric Company | Electrocrystallochromic display and element |
US5446479A (en) | 1989-02-27 | 1995-08-29 | Texas Instruments Incorporated | Multi-dimensional array video processor system |
US5272473A (en) | 1989-02-27 | 1993-12-21 | Texas Instruments Incorporated | Reduced-speckle display system |
US5170156A (en) | 1989-02-27 | 1992-12-08 | Texas Instruments Incorporated | Multi-frequency two dimensional display system |
US5192946A (en) | 1989-02-27 | 1993-03-09 | Texas Instruments Incorporated | Digitized color video display system |
US5162787A (en) | 1989-02-27 | 1992-11-10 | Texas Instruments Incorporated | Apparatus and method for digitized video system utilizing a moving display surface |
US5206629A (en) | 1989-02-27 | 1993-04-27 | Texas Instruments Incorporated | Spatial light modulator and memory for digitized video display |
US5287096A (en) | 1989-02-27 | 1994-02-15 | Texas Instruments Incorporated | Variable luminosity display system |
US5079544A (en) | 1989-02-27 | 1992-01-07 | Texas Instruments Incorporated | Standard independent digitized video system |
US5214420A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Spatial light modulator projection system with random polarity light |
KR100202246B1 (en) | 1989-02-27 | 1999-06-15 | 윌리엄 비. 켐플러 | Apparatus and method for digital video system |
US5214419A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Planarized true three dimensional display |
US5022745A (en) | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
US4954789A (en) | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
US5381253A (en) | 1991-11-14 | 1995-01-10 | Board Of Regents Of University Of Colorado | Chiral smectic liquid crystal optical modulators having variable retardation |
US5124834A (en) | 1989-11-16 | 1992-06-23 | General Electric Company | Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same |
US5037173A (en) | 1989-11-22 | 1991-08-06 | Texas Instruments Incorporated | Optical interconnection network |
US5500635A (en) | 1990-02-20 | 1996-03-19 | Mott; Jonathan C. | Products incorporating piezoelectric material |
CH682523A5 (en) | 1990-04-20 | 1993-09-30 | Suisse Electronique Microtech | A modulation matrix addressed light. |
GB9012099D0 (en) | 1990-05-31 | 1990-07-18 | Kodak Ltd | Optical article for multicolour imaging |
EP0467048B1 (en) | 1990-06-29 | 1995-09-20 | Texas Instruments Incorporated | Field-updated deformable mirror device |
US5142405A (en) | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
US5099353A (en) | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5018256A (en) | 1990-06-29 | 1991-05-28 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5216537A (en) | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
US5304419A (en) | 1990-07-06 | 1994-04-19 | Alpha Fry Ltd | Moisture and particle getter for enclosures |
US5153771A (en) | 1990-07-18 | 1992-10-06 | Northrop Corporation | Coherent light modulation and detector |
US5526688A (en) | 1990-10-12 | 1996-06-18 | Texas Instruments Incorporated | Digital flexure beam accelerometer and method |
US5192395A (en) | 1990-10-12 | 1993-03-09 | Texas Instruments Incorporated | Method of making a digital flexure beam accelerometer |
US5044736A (en) | 1990-11-06 | 1991-09-03 | Motorola, Inc. | Configurable optical filter or display |
US5602671A (en) | 1990-11-13 | 1997-02-11 | Texas Instruments Incorporated | Low surface energy passivation layer for micromechanical devices |
US5331454A (en) | 1990-11-13 | 1994-07-19 | Texas Instruments Incorporated | Low reset voltage process for DMD |
US5233459A (en) | 1991-03-06 | 1993-08-03 | Massachusetts Institute Of Technology | Electric display device |
CA2063744C (en) | 1991-04-01 | 2002-10-08 | Paul M. Urbanus | Digital micromirror device architecture and timing for use in a pulse-width modulated display system |
US5142414A (en) | 1991-04-22 | 1992-08-25 | Koehler Dale R | Electrically actuatable temporal tristimulus-color device |
US5226099A (en) | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
US5268533A (en) | 1991-05-03 | 1993-12-07 | Hughes Aircraft Company | Pre-stressed laminated lid for electronic circuit package |
US5179274A (en) | 1991-07-12 | 1993-01-12 | Texas Instruments Incorporated | Method for controlling operation of optical systems and devices |
US5168406A (en) | 1991-07-31 | 1992-12-01 | Texas Instruments Incorporated | Color deformable mirror device and method for manufacture |
US5254980A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | DMD display system controller |
US5563398A (en) | 1991-10-31 | 1996-10-08 | Texas Instruments Incorporated | Spatial light modulator scanning system |
CA2081753C (en) | 1991-11-22 | 2002-08-06 | Jeffrey B. Sampsell | Dmd scanner |
US5233385A (en) | 1991-12-18 | 1993-08-03 | Texas Instruments Incorporated | White light enhanced color field sequential projection |
US5233456A (en) | 1991-12-20 | 1993-08-03 | Texas Instruments Incorporated | Resonant mirror and method of manufacture |
US5244707A (en) | 1992-01-10 | 1993-09-14 | Shores A Andrew | Enclosure for electronic devices |
CA2087625C (en) | 1992-01-23 | 2006-12-12 | William E. Nelson | Non-systolic time delay and integration printing |
US5296950A (en) | 1992-01-31 | 1994-03-22 | Texas Instruments Incorporated | Optical signal free-space conversion board |
US5231532A (en) | 1992-02-05 | 1993-07-27 | Texas Instruments Incorporated | Switchable resonant filter for optical radiation |
EP0562424B1 (en) | 1992-03-25 | 1997-05-28 | Texas Instruments Incorporated | Embedded optical calibration system |
US5312513A (en) | 1992-04-03 | 1994-05-17 | Texas Instruments Incorporated | Methods of forming multiple phase light modulators |
US5401983A (en) | 1992-04-08 | 1995-03-28 | Georgia Tech Research Corporation | Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices |
US5311360A (en) | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
JPH0651250A (en) | 1992-05-20 | 1994-02-25 | Texas Instr Inc <Ti> | Monolithic space optical modulator and memory package |
JPH06214169A (en) | 1992-06-08 | 1994-08-05 | Texas Instr Inc <Ti> | Controllable optical and periodic surface filter |
US5818095A (en) | 1992-08-11 | 1998-10-06 | Texas Instruments Incorporated | High-yield spatial light modulator with light blocking layer |
US5327286A (en) | 1992-08-31 | 1994-07-05 | Texas Instruments Incorporated | Real time optical correlation system |
US5325116A (en) | 1992-09-18 | 1994-06-28 | Texas Instruments Incorporated | Device for writing to and reading from optical storage media |
US5324888A (en) | 1992-10-13 | 1994-06-28 | Olin Corporation | Metal electronic package with reduced seal width |
US5659374A (en) | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
US5322161A (en) | 1992-11-30 | 1994-06-21 | United States Surgical Corporation | Clear package for bioabsorbable articles |
JP3547160B2 (en) | 1993-01-11 | 2004-07-28 | テキサス インスツルメンツ インコーポレイテツド | Spatial light modulator |
US6674562B1 (en) | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
US5461411A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Process and architecture for digital micromirror printer |
DE4317274A1 (en) | 1993-05-25 | 1994-12-01 | Bosch Gmbh Robert | Process for the production of surface-micromechanical structures |
JP3439766B2 (en) * | 1993-07-02 | 2003-08-25 | マサチューセッツ・インスティチュート・オブ・テクノロジー | Spatial light modulator |
US5489952A (en) | 1993-07-14 | 1996-02-06 | Texas Instruments Incorporated | Method and device for multi-format television |
US5365283A (en) | 1993-07-19 | 1994-11-15 | Texas Instruments Incorporated | Color phase control for projection display using spatial light modulator |
US5526172A (en) | 1993-07-27 | 1996-06-11 | Texas Instruments Incorporated | Microminiature, monolithic, variable electrical signal processor and apparatus including same |
US5581272A (en) | 1993-08-25 | 1996-12-03 | Texas Instruments Incorporated | Signal generator for controlling a spatial light modulator |
FR2710161B1 (en) | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Miniature array of light shutters. |
US5457493A (en) | 1993-09-15 | 1995-10-10 | Texas Instruments Incorporated | Digital micro-mirror based image simulation system |
US5526051A (en) | 1993-10-27 | 1996-06-11 | Texas Instruments Incorporated | Digital television system |
US5497197A (en) | 1993-11-04 | 1996-03-05 | Texas Instruments Incorporated | System and method for packaging data into video processor |
US5459602A (en) | 1993-10-29 | 1995-10-17 | Texas Instruments | Micro-mechanical optical shutter |
US5452024A (en) | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
US5517347A (en) | 1993-12-01 | 1996-05-14 | Texas Instruments Incorporated | Direct view deformable mirror device |
CA2137059C (en) | 1993-12-03 | 2004-11-23 | Texas Instruments Incorporated | Dmd architecture to improve horizontal resolution |
US5583688A (en) | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
US5448314A (en) | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
US5500761A (en) | 1994-01-27 | 1996-03-19 | At&T Corp. | Micromechanical modulator |
US5444566A (en) | 1994-03-07 | 1995-08-22 | Texas Instruments Incorporated | Optimized electronic operation of digital micromirror devices |
US5665997A (en) | 1994-03-31 | 1997-09-09 | Texas Instruments Incorporated | Grated landing area to eliminate sticking of micro-mechanical devices |
US20010003487A1 (en) | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
US6040937A (en) | 1994-05-05 | 2000-03-21 | Etalon, Inc. | Interferometric modulation |
US7550794B2 (en) | 2002-09-20 | 2009-06-23 | Idc, Llc | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
US7460291B2 (en) | 1994-05-05 | 2008-12-02 | Idc, Llc | Separable modulator |
US7123216B1 (en) | 1994-05-05 | 2006-10-17 | Idc, Llc | Photonic MEMS and structures |
US6710908B2 (en) | 1994-05-05 | 2004-03-23 | Iridigm Display Corporation | Controlling micro-electro-mechanical cavities |
DE69522856T2 (en) | 1994-05-17 | 2002-05-02 | Sony Corp | Display device with position detection of a pointer |
US5497172A (en) | 1994-06-13 | 1996-03-05 | Texas Instruments Incorporated | Pulse width modulation for spatial light modulator with split reset addressing |
US5673106A (en) | 1994-06-17 | 1997-09-30 | Texas Instruments Incorporated | Printing system with self-monitoring and adjustment |
US5454906A (en) | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
US5499062A (en) | 1994-06-23 | 1996-03-12 | Texas Instruments Incorporated | Multiplexed memory timing with block reset and secondary memory |
US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
US5636052A (en) | 1994-07-29 | 1997-06-03 | Lucent Technologies Inc. | Direct view display based on a micromechanical modulation |
US5703710A (en) | 1994-09-09 | 1997-12-30 | Deacon Research | Method for manipulating optical energy using poled structure |
US6053617A (en) | 1994-09-23 | 2000-04-25 | Texas Instruments Incorporated | Manufacture method for micromechanical devices |
US5619059A (en) | 1994-09-28 | 1997-04-08 | National Research Council Of Canada | Color deformable mirror device having optical thin film interference color coatings |
US5650881A (en) | 1994-11-02 | 1997-07-22 | Texas Instruments Incorporated | Support post architecture for micromechanical devices |
US5552924A (en) | 1994-11-14 | 1996-09-03 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
US5610624A (en) | 1994-11-30 | 1997-03-11 | Texas Instruments Incorporated | Spatial light modulator with reduced possibility of an on state defect |
TW378276B (en) | 1995-01-13 | 2000-01-01 | Seiko Epson Corp | Liquid crystal display device and its fabrication method |
JPH08263208A (en) | 1995-02-24 | 1996-10-11 | Whitaker Corp:The | Elastic-wave touch panel and its manufacture |
US5567334A (en) | 1995-02-27 | 1996-10-22 | Texas Instruments Incorporated | Method for creating a digital micromirror device using an aluminum hard mask |
US5610438A (en) | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
US5535047A (en) | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
US5784190A (en) | 1995-04-27 | 1998-07-21 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
US6046840A (en) | 1995-06-19 | 2000-04-04 | Reflectivity, Inc. | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
US6969635B2 (en) | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
US5837562A (en) | 1995-07-07 | 1998-11-17 | The Charles Stark Draper Laboratory, Inc. | Process for bonding a shell to a substrate for packaging a semiconductor |
US5739945A (en) | 1995-09-29 | 1998-04-14 | Tayebati; Parviz | Electrically tunable optical filter utilizing a deformable multi-layer mirror |
US7907319B2 (en) | 1995-11-06 | 2011-03-15 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light with optical compensation |
US5999306A (en) | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
US5825528A (en) | 1995-12-26 | 1998-10-20 | Lucent Technologies Inc. | Phase-mismatched fabry-perot cavity micromechanical modulator |
JP3799092B2 (en) | 1995-12-29 | 2006-07-19 | アジレント・テクノロジーズ・インク | Light modulation device and display device |
US5771321A (en) | 1996-01-04 | 1998-06-23 | Massachusetts Institute Of Technology | Micromechanical optical switch and flat panel display |
US5784166A (en) | 1996-04-03 | 1998-07-21 | Nikon Corporation | Position resolution of an interferometrially controlled moving stage by regression analysis |
US5936758A (en) | 1996-04-12 | 1999-08-10 | Texas Instruments Incorporated | Method of passivating a micromechanical device within a hermetic package |
US5815141A (en) | 1996-04-12 | 1998-09-29 | Elo Touch Systems, Inc. | Resistive touchscreen having multiple selectable regions for pressure discrimination |
US5939785A (en) | 1996-04-12 | 1999-08-17 | Texas Instruments Incorporated | Micromechanical device including time-release passivant |
EP0802125B1 (en) | 1996-04-17 | 2001-06-27 | Mitsubishi Gas Chemical Company, Inc. | Package to hold a product under controlled environmental conditions, in particular for a glass item |
US5710656A (en) | 1996-07-30 | 1998-01-20 | Lucent Technologies Inc. | Micromechanical optical modulator having a reduced-mass composite membrane |
US5789848A (en) | 1996-08-02 | 1998-08-04 | Motorola, Inc. | Field emission display having a cathode reinforcement member |
US5912758A (en) | 1996-09-11 | 1999-06-15 | Texas Instruments Incorporated | Bipolar reset for spatial light modulators |
US5771116A (en) | 1996-10-21 | 1998-06-23 | Texas Instruments Incorporated | Multiple bias level reset waveform for enhanced DMD control |
DE69806846T2 (en) | 1997-05-08 | 2002-12-12 | Texas Instruments Inc | Improvements for spatial light modulators |
US6480177B2 (en) | 1997-06-04 | 2002-11-12 | Texas Instruments Incorporated | Blocked stepped address voltage for micromechanical devices |
GB9724077D0 (en) | 1997-11-15 | 1998-01-14 | Dow Corning Sa | Insulating glass units |
US6028690A (en) | 1997-11-26 | 2000-02-22 | Texas Instruments Incorporated | Reduced micromirror mirror gaps for improved contrast ratio |
US6180428B1 (en) | 1997-12-12 | 2001-01-30 | Xerox Corporation | Monolithic scanning light emitting devices using micromachining |
JP2876530B1 (en) | 1998-02-24 | 1999-03-31 | 東京工業大学長 | Ultra-small element having means for repairing fixed movable part and method of manufacturing the same |
US6195196B1 (en) | 1998-03-13 | 2001-02-27 | Fuji Photo Film Co., Ltd. | Array-type exposing device and flat type display incorporating light modulator and driving method thereof |
KR100703140B1 (en) | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | Interferometric modulation and its manufacturing method |
EP0951068A1 (en) | 1998-04-17 | 1999-10-20 | Interuniversitair Micro-Elektronica Centrum Vzw | Method of fabrication of a microstructure having an inside cavity |
US6160833A (en) | 1998-05-06 | 2000-12-12 | Xerox Corporation | Blue vertical cavity surface emitting laser |
JPH11326852A (en) * | 1998-05-13 | 1999-11-26 | Fuji Photo Film Co Ltd | Gradation drive method of arrayed optical modulation elements and flat display device |
US6282010B1 (en) | 1998-05-14 | 2001-08-28 | Texas Instruments Incorporated | Anti-reflective coatings for spatial light modulators |
US6323982B1 (en) | 1998-05-22 | 2001-11-27 | Texas Instruments Incorporated | Yield superstructure for digital micromirror device |
US6147790A (en) | 1998-06-02 | 2000-11-14 | Texas Instruments Incorporated | Spring-ring micromechanical device |
US6295154B1 (en) | 1998-06-05 | 2001-09-25 | Texas Instruments Incorporated | Optical switching apparatus |
JP2000003783A (en) | 1998-06-12 | 2000-01-07 | Tdk Corp | Organic electroluminescent display device |
US6496122B2 (en) | 1998-06-26 | 2002-12-17 | Sharp Laboratories Of America, Inc. | Image display and remote control system capable of displaying two distinct images |
US6303986B1 (en) | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
US6113239A (en) | 1998-09-04 | 2000-09-05 | Sharp Laboratories Of America, Inc. | Projection display system for reflective light valves |
US6365229B1 (en) | 1998-09-30 | 2002-04-02 | Texas Instruments Incorporated | Surface treatment material deposition and recapture |
US6843936B1 (en) | 1998-10-22 | 2005-01-18 | Texas Instruments Incorporated | Getter for enhanced micromechanical device performance |
US6004179A (en) | 1998-10-26 | 1999-12-21 | Micron Technology, Inc. | Methods of fabricating flat panel evacuated displays |
JP2000156287A (en) | 1998-11-20 | 2000-06-06 | Hokuriku Electric Ind Co Ltd | Organic el element, and manufacture thereof |
GB9827965D0 (en) | 1998-12-19 | 1999-02-10 | Secr Defence | Assembly of cells having spaced opposed substrates |
GB9827900D0 (en) | 1998-12-19 | 1999-02-10 | Secr Defence | Spacers for cells having spaced opposed substrates |
US6245194B1 (en) | 1998-12-21 | 2001-06-12 | Sikorsky Aircraft Corporation | Processed fiber for emission of energy into a medium and method therefor |
US6606175B1 (en) | 1999-03-16 | 2003-08-12 | Sharp Laboratories Of America, Inc. | Multi-segment light-emitting diode |
EP1048972A3 (en) | 1999-04-30 | 2004-03-10 | Matsushita Electric Industrial Co., Ltd. | Liquid crystal display element and manufacturing method thereof |
US6201633B1 (en) | 1999-06-07 | 2001-03-13 | Xerox Corporation | Micro-electromechanical based bistable color display sheets |
US6862029B1 (en) | 1999-07-27 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Color display system |
US6833668B1 (en) | 1999-09-29 | 2004-12-21 | Sanyo Electric Co., Ltd. | Electroluminescence display device having a desiccant |
WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
US6549338B1 (en) | 1999-11-12 | 2003-04-15 | Texas Instruments Incorporated | Bandpass filter to reduce thermal impact of dichroic light shift |
US6472739B1 (en) | 1999-11-15 | 2002-10-29 | Jds Uniphase Corporation | Encapsulated microelectromechanical (MEMS) devices |
US6552840B2 (en) | 1999-12-03 | 2003-04-22 | Texas Instruments Incorporated | Electrostatic efficiency of micromechanical devices |
DE69933380T2 (en) | 1999-12-15 | 2007-08-02 | Asulab S.A. | Method for hermetically encapsulating microsystems on site |
US6545335B1 (en) | 1999-12-27 | 2003-04-08 | Xerox Corporation | Structure and method for electrical isolation of optoelectronic integrated circuits |
US6548908B2 (en) | 1999-12-27 | 2003-04-15 | Xerox Corporation | Structure and method for planar lateral oxidation in passive devices |
US6583921B2 (en) | 1999-12-28 | 2003-06-24 | Texas Instruments Incorporated | Micromechanical device and method for non-contacting edge-coupled operation |
JP2001249287A (en) | 1999-12-30 | 2001-09-14 | Texas Instr Inc <Ti> | Method for operating bistabl micro mirror array |
DE10004964B4 (en) | 2000-02-04 | 2010-07-29 | Robert Bosch Gmbh | Micromechanical cap structure |
GB2359216B (en) | 2000-02-11 | 2003-10-29 | Purple Voice Ltd | A method of synchronising the replay of audio data in a network of computers |
JP2001305514A (en) | 2000-04-21 | 2001-10-31 | Matsushita Electric Ind Co Ltd | Liquid crystal display panel and image display applied instrument |
JP2001318324A (en) | 2000-05-11 | 2001-11-16 | Seiko Epson Corp | Optical switching unit, method for manufacturing the same and image display device |
US6661084B1 (en) | 2000-05-16 | 2003-12-09 | Sandia Corporation | Single level microelectronic device package with an integral window |
US6379988B1 (en) | 2000-05-16 | 2002-04-30 | Sandia Corporation | Pre-release plastic packaging of MEMS and IMEMS devices |
US6384473B1 (en) | 2000-05-16 | 2002-05-07 | Sandia Corporation | Microelectronic device package with an integral window |
JP2001351998A (en) | 2000-06-09 | 2001-12-21 | Kyocera Corp | Package for semiconductor device |
US6473274B1 (en) | 2000-06-28 | 2002-10-29 | Texas Instruments Incorporated | Symmetrical microactuator structure for use in mass data storage devices, or the like |
EP1720347B1 (en) | 2000-07-03 | 2010-06-23 | Sony Corporation | Optical multilayer structure, optical switching device, and image display |
US6853129B1 (en) | 2000-07-28 | 2005-02-08 | Candescent Technologies Corporation | Protected substrate structure for a field emission display device |
US6778155B2 (en) | 2000-07-31 | 2004-08-17 | Texas Instruments Incorporated | Display operation with inserted block clears |
TWI251101B (en) | 2000-08-02 | 2006-03-11 | Allied Material Technology Cor | A liquid crystal display and a method for fabricating the same |
JP2002062491A (en) | 2000-08-15 | 2002-02-28 | Canon Inc | Image pickup optical system and light quantity controller using interferometric modulation device |
JP2002062492A (en) | 2000-08-15 | 2002-02-28 | Canon Inc | Projection optical system using interferometric modulation device |
US6643069B2 (en) | 2000-08-31 | 2003-11-04 | Texas Instruments Incorporated | SLM-base color projection display having multiple SLM's and multiple projection lenses |
US6466354B1 (en) | 2000-09-19 | 2002-10-15 | Silicon Light Machines | Method and apparatus for interferometric modulation of light |
US6426461B1 (en) | 2000-09-21 | 2002-07-30 | Delphi Technologies, Inc. | Enclosure for electronic components |
DE10049288B4 (en) | 2000-10-04 | 2004-07-15 | Infineon Technologies Ag | Electronic components and a film tape for packaging bond wire connections of electronic components and their manufacturing processes |
CZ20031012A3 (en) | 2000-10-20 | 2004-04-14 | Pfizer Products Inc. | Alpha-aryl ethanolamines and their use as beta-3 adrenergic receptor agonists |
US6859218B1 (en) | 2000-11-07 | 2005-02-22 | Hewlett-Packard Development Company, L.P. | Electronic display devices and methods |
US7178927B2 (en) | 2000-11-14 | 2007-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Electroluminescent device having drying agent |
US6762868B2 (en) | 2000-11-16 | 2004-07-13 | Texas Instruments Incorporated | Electro-optical package with drop-in aperture |
US6664779B2 (en) | 2000-11-16 | 2003-12-16 | Texas Instruments Incorporated | Package with environmental control material carrier |
US6906847B2 (en) | 2000-12-07 | 2005-06-14 | Reflectivity, Inc | Spatial light modulators with light blocking/absorbing areas |
US6775174B2 (en) | 2000-12-28 | 2004-08-10 | Texas Instruments Incorporated | Memory architecture for micromirror cell |
US6625047B2 (en) | 2000-12-31 | 2003-09-23 | Texas Instruments Incorporated | Micromechanical memory element |
JP2002296519A (en) | 2001-03-29 | 2002-10-09 | Ricoh Co Ltd | Optical modulator and method of manufacturing the same, image forming apparatus having the optical modulator, and image projection display device having the optical modulator |
JP2002258310A (en) | 2001-02-28 | 2002-09-11 | Kyocera Corp | Liquid crystal display device and display equipment |
US6455927B1 (en) | 2001-03-12 | 2002-09-24 | Amkor Technology, Inc. | Micromirror device package |
US6630786B2 (en) | 2001-03-30 | 2003-10-07 | Candescent Technologies Corporation | Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance |
JP2002312066A (en) | 2001-04-17 | 2002-10-25 | Hunet Inc | Portable computer equipped with removable attached additional display and display module for additional installation of such display |
JP2002311843A (en) | 2001-04-17 | 2002-10-25 | Dainippon Printing Co Ltd | Member for shielding electromagnetic wave, and display |
KR100387239B1 (en) | 2001-04-26 | 2003-06-12 | 삼성전자주식회사 | MEMS Relay and fabricating method thereof |
US6465355B1 (en) | 2001-04-27 | 2002-10-15 | Hewlett-Packard Company | Method of fabricating suspended microstructures |
JP2002328313A (en) | 2001-05-01 | 2002-11-15 | Sony Corp | Optical switching element, its manufacturing method, and image display device |
US6706316B2 (en) | 2001-05-08 | 2004-03-16 | Eastman Kodak Company | Ultrasonically sealing the cover plate to provide a hermetic enclosure for OLED displays |
US6558820B2 (en) | 2001-05-10 | 2003-05-06 | Eastman Kodak Company | High contrast light-emitting diode devices |
US6822628B2 (en) | 2001-06-28 | 2004-11-23 | Candescent Intellectual Property Services, Inc. | Methods and systems for compensating row-to-row brightness variations of a field emission display |
TW533188B (en) * | 2001-07-20 | 2003-05-21 | Getters Spa | Support for microelectronic, microoptoelectronic or micromechanical devices |
US6862022B2 (en) | 2001-07-20 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method and system for automatically selecting a vertical refresh rate for a video display monitor |
US6922499B2 (en) | 2001-07-24 | 2005-07-26 | Lucent Technologies Inc. | MEMS driver circuit arrangement |
US6600201B2 (en) | 2001-08-03 | 2003-07-29 | Hewlett-Packard Development Company, L.P. | Systems with high density packing of micromachines |
US6632698B2 (en) | 2001-08-07 | 2003-10-14 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
US6778046B2 (en) | 2001-09-17 | 2004-08-17 | Magfusion Inc. | Latching micro magnetic relay packages and methods of packaging |
US6590157B2 (en) | 2001-09-21 | 2003-07-08 | Eastman Kodak Company | Sealing structure for highly moisture-sensitive electronic device element and method for fabrication |
US6893574B2 (en) | 2001-10-23 | 2005-05-17 | Analog Devices Inc | MEMS capping method and apparatus |
US6870581B2 (en) | 2001-10-30 | 2005-03-22 | Sharp Laboratories Of America, Inc. | Single panel color video projection display using reflective banded color falling-raster illumination |
KR100442830B1 (en) | 2001-12-04 | 2004-08-02 | 삼성전자주식회사 | Low temperature hermetic sealing method having a passivation layer |
US7050835B2 (en) | 2001-12-12 | 2006-05-23 | Universal Display Corporation | Intelligent multi-media display communication system |
US6776538B2 (en) | 2001-12-12 | 2004-08-17 | Axsun Technologies, Inc. | MEMS tunable optical filter system with moisture getter for frequency stability |
JP2003185496A (en) | 2001-12-13 | 2003-07-03 | Mitsubishi Electric Corp | Infrared ray detection array and manufacturing method thereof |
JP3755460B2 (en) | 2001-12-26 | 2006-03-15 | ソニー株式会社 | Electrostatically driven MEMS element and manufacturing method thereof, optical MEMS element, light modulation element, GLV device, laser display, and MEMS apparatus |
JP4168757B2 (en) | 2002-02-01 | 2008-10-22 | 松下電器産業株式会社 | filter |
JP2003228302A (en) | 2002-02-04 | 2003-08-15 | Toshiba Electronic Engineering Corp | Display device and manufacturing method therefor |
US6794119B2 (en) | 2002-02-12 | 2004-09-21 | Iridigm Display Corporation | Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
JP4088864B2 (en) | 2002-02-13 | 2008-05-21 | ソニー株式会社 | Optical multilayer structure, optical switching element and image display device using the same |
US7045459B2 (en) | 2002-02-19 | 2006-05-16 | Northrop Grumman Corporation | Thin film encapsulation of MEMS devices |
US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
US7535093B1 (en) | 2002-03-08 | 2009-05-19 | Raytheon Company | Method and apparatus for packaging circuit devices |
US6603182B1 (en) | 2002-03-12 | 2003-08-05 | Lucent Technologies Inc. | Packaging micromechanical devices |
US7046374B1 (en) | 2002-03-14 | 2006-05-16 | Avanex Corporation | Interferometers for optical communications utilizing photo-sensitive materials |
US6627814B1 (en) | 2002-03-22 | 2003-09-30 | David H. Stark | Hermetically sealed micro-device package with window |
US7832177B2 (en) | 2002-03-22 | 2010-11-16 | Electronics Packaging Solutions, Inc. | Insulated glazing units |
US6962834B2 (en) | 2002-03-22 | 2005-11-08 | Stark David H | Wafer-level hermetic micro-device packages |
US6707351B2 (en) | 2002-03-27 | 2004-03-16 | Motorola, Inc. | Tunable MEMS resonator and method for tuning |
US20030183916A1 (en) | 2002-03-27 | 2003-10-02 | John Heck | Packaging microelectromechanical systems |
JP3558621B2 (en) | 2002-04-15 | 2004-08-25 | シャープ株式会社 | Liquid crystal display |
JP2003315693A (en) | 2002-04-25 | 2003-11-06 | Fuji Photo Film Co Ltd | Image display element and projector device using the same |
US6972882B2 (en) | 2002-04-30 | 2005-12-06 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with light angle amplification |
US20030202264A1 (en) | 2002-04-30 | 2003-10-30 | Weber Timothy L. | Micro-mirror device |
US6954297B2 (en) | 2002-04-30 | 2005-10-11 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
US20040212026A1 (en) | 2002-05-07 | 2004-10-28 | Hewlett-Packard Company | MEMS device having time-varying control |
JP4554357B2 (en) * | 2002-05-07 | 2010-09-29 | マイクロファブリカ インク | Electrochemically molded and hermetically sealed microstructure and method and apparatus for producing the microstructure |
JP3943437B2 (en) | 2002-05-10 | 2007-07-11 | アルプス電気株式会社 | Liquid crystal display |
FR2839812B1 (en) | 2002-05-17 | 2005-07-01 | Atmel Grenoble Sa | COLLECTIVE MANUFACTURING METHOD OF OPTICAL FILTER COMPONENTS AND COMPONENT WAFER |
TW589915B (en) | 2002-05-24 | 2004-06-01 | Sanyo Electric Co | Electroluminescence display device |
US7034984B2 (en) | 2002-06-19 | 2006-04-25 | Miradia Inc. | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
FR2841380A1 (en) | 2002-06-25 | 2003-12-26 | Commissariat Energie Atomique | Encapsulation of an object under a controlled atmosphere in a cavity provided with a vent that is stopped with a porous material prior to final sealing |
ITTO20020551A1 (en) | 2002-06-26 | 2003-12-29 | Vhit Spa | VARIABLE DISPLACEMENT FLUID MACHINE ACCORDING TO PRESSURE |
US6741377B2 (en) | 2002-07-02 | 2004-05-25 | Iridigm Display Corporation | Device having a light-absorbing mask and a method for fabricating same |
JP2004053852A (en) | 2002-07-18 | 2004-02-19 | Sony Corp | Optical modulation element and manufacturing method therefor |
JP3758622B2 (en) | 2002-08-08 | 2006-03-22 | セイコーエプソン株式会社 | Optical device, optical unit, and projector |
TW544787B (en) | 2002-09-18 | 2003-08-01 | Promos Technologies Inc | Method of forming self-aligned contact structure with locally etched gate conductive layer |
JP2004118001A (en) | 2002-09-27 | 2004-04-15 | Matsushita Electric Ind Co Ltd | Display device |
US6936494B2 (en) | 2002-10-23 | 2005-08-30 | Rutgers, The State University Of New Jersey | Processes for hermetically packaging wafer level microscopic structures |
US6747785B2 (en) | 2002-10-24 | 2004-06-08 | Hewlett-Packard Development Company, L.P. | MEMS-actuated color light modulator and methods |
US6666561B1 (en) | 2002-10-28 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Continuously variable analog micro-mirror device |
US7370185B2 (en) | 2003-04-30 | 2008-05-06 | Hewlett-Packard Development Company, L.P. | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
KR100474455B1 (en) | 2002-11-08 | 2005-03-11 | 삼성전자주식회사 | Method and device for mounting vacumm of micro electro mechanical system at wafer level |
US6741503B1 (en) | 2002-12-04 | 2004-05-25 | Texas Instruments Incorporated | SLM display data address mapping for four bank frame buffer |
JP4342174B2 (en) | 2002-12-27 | 2009-10-14 | 新光電気工業株式会社 | Electronic device and manufacturing method thereof |
US20040140557A1 (en) | 2003-01-21 | 2004-07-22 | United Test & Assembly Center Limited | Wl-bga for MEMS/MOEMS devices |
US20040147056A1 (en) | 2003-01-29 | 2004-07-29 | Mckinnell James C. | Micro-fabricated device and method of making |
US7205675B2 (en) | 2003-01-29 | 2007-04-17 | Hewlett-Packard Development Company, L.P. | Micro-fabricated device with thermoelectric device and method of making |
US6903487B2 (en) | 2003-02-14 | 2005-06-07 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with increased mirror tilt |
WO2004077523A2 (en) * | 2003-02-25 | 2004-09-10 | Ic Mechanics, Inc. | Micromachined assembly with a multi-layer cap defining cavity |
US7492019B2 (en) | 2003-03-07 | 2009-02-17 | Ic Mechanics, Inc. | Micromachined assembly with a multi-layer cap defining a cavity |
JP4156946B2 (en) | 2003-02-26 | 2008-09-24 | 三菱電機株式会社 | Acceleration sensor |
US20040166606A1 (en) | 2003-02-26 | 2004-08-26 | David Forehand | Low temperature wafer-level micro-encapsulation |
US6844953B2 (en) | 2003-03-12 | 2005-01-18 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
TW591778B (en) | 2003-03-18 | 2004-06-11 | Advanced Semiconductor Eng | Package structure for a microsystem |
US7015885B2 (en) | 2003-03-22 | 2006-03-21 | Active Optical Networks, Inc. | MEMS devices monolithically integrated with drive and control circuitry |
US6779260B1 (en) | 2003-03-28 | 2004-08-24 | Delphi Technologies, Inc. | Overmolded electronic package including circuit-carrying substrate |
TW567355B (en) | 2003-04-21 | 2003-12-21 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
US7153016B2 (en) | 2003-04-24 | 2006-12-26 | Waltop International Corp. | Package for the display module with the electromagnetic module |
US7358966B2 (en) | 2003-04-30 | 2008-04-15 | Hewlett-Packard Development Company L.P. | Selective update of micro-electromechanical device |
US6829132B2 (en) | 2003-04-30 | 2004-12-07 | Hewlett-Packard Development Company, L.P. | Charge control of micro-electromechanical device |
US6741384B1 (en) | 2003-04-30 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Control of MEMS and light modulator arrays |
US7400489B2 (en) | 2003-04-30 | 2008-07-15 | Hewlett-Packard Development Company, L.P. | System and a method of driving a parallel-plate variable micro-electromechanical capacitor |
US6853476B2 (en) | 2003-04-30 | 2005-02-08 | Hewlett-Packard Development Company, L.P. | Charge control circuit for a micro-electromechanical device |
US7072093B2 (en) | 2003-04-30 | 2006-07-04 | Hewlett-Packard Development Company, L.P. | Optical interference pixel display with charge control |
CN1220621C (en) | 2003-04-30 | 2005-09-28 | 华中科技大学 | Post-package technology for microelectromechinical system |
US6819469B1 (en) | 2003-05-05 | 2004-11-16 | Igor M. Koba | High-resolution spatial light modulator for 3-dimensional holographic display |
US7218499B2 (en) | 2003-05-14 | 2007-05-15 | Hewlett-Packard Development Company, L.P. | Charge control circuit |
US6917459B2 (en) | 2003-06-03 | 2005-07-12 | Hewlett-Packard Development Company, L.P. | MEMS device and method of forming MEMS device |
US6811267B1 (en) | 2003-06-09 | 2004-11-02 | Hewlett-Packard Development Company, L.P. | Display system with nonvisible data projection |
US7221495B2 (en) | 2003-06-24 | 2007-05-22 | Idc Llc | Thin film precursor stack for MEMS manufacturing |
US20050012197A1 (en) | 2003-07-15 | 2005-01-20 | Smith Mark A. | Fluidic MEMS device |
US7190380B2 (en) | 2003-09-26 | 2007-03-13 | Hewlett-Packard Development Company, L.P. | Generating and displaying spatially offset sub-frames |
US7173314B2 (en) | 2003-08-13 | 2007-02-06 | Hewlett-Packard Development Company, L.P. | Storage device having a probe and a storage cell with moveable parts |
TWI251712B (en) | 2003-08-15 | 2006-03-21 | Prime View Int Corp Ltd | Interference display plate |
TWI305599B (en) | 2003-08-15 | 2009-01-21 | Qualcomm Mems Technologies Inc | Interference display panel and method thereof |
TW200506479A (en) | 2003-08-15 | 2005-02-16 | Prime View Int Co Ltd | Color changeable pixel for an interference display |
TW593127B (en) | 2003-08-18 | 2004-06-21 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
US20050057442A1 (en) | 2003-08-28 | 2005-03-17 | Olan Way | Adjacent display of sequential sub-images |
JP3979982B2 (en) | 2003-08-29 | 2007-09-19 | シャープ株式会社 | Interferometric modulator and display device |
US6977391B2 (en) | 2003-09-25 | 2005-12-20 | Osram Semiconductors Gmbh | Transport balancing diffusion layer for rate limited scavenging systems |
US20050068583A1 (en) | 2003-09-30 | 2005-03-31 | Gutkowski Lawrence J. | Organizing a digital image |
US6861277B1 (en) | 2003-10-02 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method of forming MEMS device |
US20050093134A1 (en) | 2003-10-30 | 2005-05-05 | Terry Tarn | Device packages with low stress assembly process |
US7161728B2 (en) | 2003-12-09 | 2007-01-09 | Idc, Llc | Area array modulation and lead reduction in interferometric modulators |
US20050184304A1 (en) | 2004-02-25 | 2005-08-25 | Gupta Pavan O. | Large cavity wafer-level package for MEMS |
TW200530669A (en) | 2004-03-05 | 2005-09-16 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
US7060895B2 (en) | 2004-05-04 | 2006-06-13 | Idc, Llc | Modifying the electro-mechanical behavior of devices |
US7164520B2 (en) | 2004-05-12 | 2007-01-16 | Idc, Llc | Packaging for an interferometric modulator |
US20050253283A1 (en) | 2004-05-13 | 2005-11-17 | Dcamp Jon B | Getter deposition for vacuum packaging |
US20060029732A1 (en) | 2004-08-04 | 2006-02-09 | Boris Kobrin | Vapor deposited functional organic coatings |
US7126741B2 (en) | 2004-08-12 | 2006-10-24 | Hewlett-Packard Development Company, L.P. | Light modulator assembly |
US7424198B2 (en) * | 2004-09-27 | 2008-09-09 | Idc, Llc | Method and device for packaging a substrate |
US7184202B2 (en) * | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
US7327510B2 (en) | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
WO2007120887A2 (en) * | 2006-04-13 | 2007-10-25 | Qualcomm Mems Technologies, Inc | Packaging a mems device using a frame |
US7816164B2 (en) * | 2006-12-01 | 2010-10-19 | Qualcomm Mems Technologies, Inc. | MEMS processing |
-
2005
- 2005-06-10 US US11/150,496 patent/US8124434B2/en not_active Expired - Fee Related
- 2005-08-17 AU AU2005203700A patent/AU2005203700A1/en not_active Abandoned
- 2005-08-26 TW TW094129173A patent/TWI370102B/en not_active IP Right Cessation
- 2005-09-01 JP JP2005253492A patent/JP4535386B2/en not_active Expired - Fee Related
- 2005-09-12 CA CA002518805A patent/CA2518805A1/en not_active Abandoned
- 2005-09-12 SG SG200906382-7A patent/SG155970A1/en unknown
- 2005-09-14 AT AT05255634T patent/ATE508094T1/en not_active IP Right Cessation
- 2005-09-14 DE DE602005027785T patent/DE602005027785D1/en active Active
- 2005-09-14 EP EP05255634A patent/EP1640320B1/en not_active Not-in-force
- 2005-09-21 MX MXPA05010085A patent/MXPA05010085A/en not_active Application Discontinuation
- 2005-09-23 KR KR1020050088594A patent/KR101239270B1/en not_active IP Right Cessation
-
2010
- 2010-03-01 JP JP2010044179A patent/JP2010176140A/en active Pending
-
2012
- 2012-01-18 US US13/353,132 patent/US20120127556A1/en not_active Abandoned
- 2012-10-04 KR KR1020120109891A patent/KR20120117716A/en not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020126364A1 (en) * | 1994-05-05 | 2002-09-12 | Iridigm Display Corporation, A Delaware Corporation | Interferometric modulation of radiation |
WO2001058804A2 (en) * | 2000-02-09 | 2001-08-16 | Robert Bosch Gmbh | Micromechanical component and corresponding production method |
US20020043706A1 (en) * | 2000-06-28 | 2002-04-18 | Institut National D'optique | Miniature Microdevice Package and Process for Making Thereof |
US20020075551A1 (en) * | 2000-11-29 | 2002-06-20 | Onix Microsystems, Inc | Enclosure for MEMS apparatus and method of using the same |
US6589625B1 (en) * | 2001-08-01 | 2003-07-08 | Iridigm Display Corporation | Hermetic seal and method to create the same |
WO2003054925A2 (en) * | 2001-10-25 | 2003-07-03 | The Regents Of The University Of Michigan | Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7746537B2 (en) | 2006-04-13 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | MEMS devices and processes for packaging such devices |
Also Published As
Publication number | Publication date |
---|---|
US8124434B2 (en) | 2012-02-28 |
US20060076637A1 (en) | 2006-04-13 |
EP1640320A2 (en) | 2006-03-29 |
KR20120117716A (en) | 2012-10-24 |
KR20060092895A (en) | 2006-08-23 |
TW200626483A (en) | 2006-08-01 |
ATE508094T1 (en) | 2011-05-15 |
TWI370102B (en) | 2012-08-11 |
JP2010176140A (en) | 2010-08-12 |
KR101239270B1 (en) | 2013-03-07 |
MXPA05010085A (en) | 2006-05-17 |
DE602005027785D1 (en) | 2011-06-16 |
AU2005203700A1 (en) | 2006-04-13 |
CA2518805A1 (en) | 2006-03-27 |
JP2006099095A (en) | 2006-04-13 |
JP4535386B2 (en) | 2010-09-01 |
US20120127556A1 (en) | 2012-05-24 |
SG155970A1 (en) | 2009-10-29 |
EP1640320B1 (en) | 2011-05-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1640320A3 (en) | Method and system for packaging a micromechanical display | |
WO2007120885A3 (en) | Mems devices and processes for packaging such devices | |
TW200626473A (en) | System and method for display device with integrated desiccant | |
MY139178A (en) | Packaging for an interferometric modulator | |
MXPA05010100A (en) | System and method for display device with reinforcing substance. | |
MXPA05009407A (en) | System and method for display device with activated desiccant. | |
WO2003082732A3 (en) | Packaging microelectromechanical systems | |
WO2007149475A3 (en) | Method for packaging an optical mems device | |
EP2202559A3 (en) | Method and system for packaging a MEMS device | |
BRPI0503900A (en) | method and system for providing secondary sealed mems device packaging | |
MY134774A (en) | Packaging microelectromechanical structures | |
TW200626484A (en) | Device having patterned spacers for backplates and method of making the same | |
TW200626472A (en) | Method and device for packaging a substrate | |
AU2003221750A1 (en) | Methods of sealing electronic, optical and electro-optical packages and related package and substrate designs | |
WO2005010240A3 (en) | Low temperature methods for hermetically sealing reservoir devices | |
BRPI1011547A2 (en) | product with bioresorbable substrate and packaging | |
WO2007139707A8 (en) | Method for forming a temporary hermetic seal for an oled display device | |
WO2007045378A3 (en) | Cold-workable laminate for blister bottom parts | |
MXPA05002606A (en) | Reclosable thermoformed flexible packages and method of making same. | |
ES2191917T3 (en) | PACKING WITH SEAL. | |
BRPI0503890A (en) | method and system for packaging a display | |
TW200618213A (en) | Method and system for packaging a MENS device | |
WO2003054840A3 (en) | Improvements to floor posters | |
PT1103488E (en) | PACKAGING SHEET THAT MAY BECOME CLOSED AND PACKAGED THAT USE IT |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA HR MK YU |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA HR MK YU |
|
17P | Request for examination filed |
Effective date: 20070817 |
|
17Q | First examination report despatched |
Effective date: 20070919 |
|
AKX | Designation fees paid |
Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: QUALCOMM MEMS TECHNOLOGIES, INC. |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
RTI1 | Title (correction) |
Free format text: METHOD FOR PACKAGING A MICROMECHANICAL DISPLAY |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R081 Ref document number: 602005027785 Country of ref document: DE Owner name: SNAPTRACK, INC., SAN DIEGO, US Free format text: FORMER OWNER: IDC, LLC, SAN FRANCISCO, CALIF., US |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D |
|
REF | Corresponds to: |
Ref document number: 602005027785 Country of ref document: DE Date of ref document: 20110616 Kind code of ref document: P |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 602005027785 Country of ref document: DE Effective date: 20110616 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: VDEP Effective date: 20110504 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110905 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110815 Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110805 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110904 Ref country code: BE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20120207 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MC Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110930 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 602005027785 Country of ref document: DE Effective date: 20120207 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: MM4A |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20120531 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110930 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110930 Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110914 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110930 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110914 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110804 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20110504 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20150825 Year of fee payment: 11 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20150930 Year of fee payment: 11 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R082 Ref document number: 602005027785 Country of ref document: DE Representative=s name: MAUCHER JENKINS, DE Ref country code: DE Ref legal event code: R081 Ref document number: 602005027785 Country of ref document: DE Owner name: SNAPTRACK, INC., SAN DIEGO, US Free format text: FORMER OWNER: QUALCOMM MEMS TECHNOLOGIES, INC., SAN DIEGO, CALIF., US Ref country code: DE Ref legal event code: R082 Ref document number: 602005027785 Country of ref document: DE Representative=s name: MAUCHER JENKINS PATENTANWAELTE & RECHTSANWAELT, DE |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: 732E Free format text: REGISTERED BETWEEN 20170112 AND 20170118 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 602005027785 Country of ref document: DE |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20160914 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20170401 Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20160914 |