US20010009343A1 - Piezoelectric resonator - Google Patents
Piezoelectric resonator Download PDFInfo
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- US20010009343A1 US20010009343A1 US09/749,866 US74986600A US2001009343A1 US 20010009343 A1 US20010009343 A1 US 20010009343A1 US 74986600 A US74986600 A US 74986600A US 2001009343 A1 US2001009343 A1 US 2001009343A1
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- piezoelectric
- piezoelectric plate
- longitudinal direction
- plate
- piezoelectric resonator
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- 229920005989 resin Polymers 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 12
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 230000035882 stress Effects 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- -1 generally Polymers 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
An energy-trap type piezoelectric resonator utilizes a fundamental wave of a thickness shear vibration mode and includes resonance electrodes provided on both main surfaces of a substantially rectangular piezoelectric plate so as to face each other with the piezoelectric plate disposed therebetween. An energy trap vibration portion including a portion of the piezoelectric plate where the resonance electrodes overlap each other is asymmetrical with respect to the center in the longitudinal direction of the piezoelectric plate.
Description
- 1. Field of the Invention
- The present invention relates to an energy-trap type piezoelectric resonator and more particularly, to an energy-trap type piezoelectric resonator including a substantially rectangular piezoelectric plate and vibrating using a fundamental wave of a thickness shear vibration mode.
- 2. Description of the Related Art
- Energy-trap type piezoelectric resonators utilizing a thickness shear vibration mode have been used as resonators and filters. In FIGS.6A and GB, a perspective view and a vertical sectional view of a conventional piezoelectric resonator are shown.
- A
piezoelectric resonator 51 contains a long and narrow rectangularpiezoelectric plate 52. Thepiezoelectric plate 52 is made of a piezoelectric ceramic material, such as lead zirconate titanate based ceramic, and is polarized in the longitudinal direction. - A
resonance electrode 53 is disposed on the upper surface of thepiezoelectric plate 52 and aresonance electrode 54 is disposed on the lower surface. Theresonance electrodes piezoelectric plate 52 disposed therebetween in the middle of the longitudinal direction of thepiezoelectric plate 52. Theresonance electrode 53 extends to one end in the longitudinal direction of thepiezoelectric plate 52, and theresonance electrode 54 extends to the other end in the longitudinal direction of thepiezoelectric plate 52. - In the conventional
piezoelectric resonator 51, by applying an alternating electric field between theresonance electrodes resonance electrodes - In the conventional
piezoelectric resonator 51, the vibration portion is located in the middle of the longitudinal dimension of thepiezoelectric resonator 52. - There are cases where the
piezoelectric resonator 51 is constructed as a piezoelectric component in which lead terminals are joined to theresonance electrodes piezoelectric resonator 51 is constructed as a piezoelectric component in which thepiezoelectric resonator 51 is joined to a substrate of a case with a space provided over the substrate so as not to prevent the vibration portion from vibrating and in which thepiezoelectric resonator 51 is covered by a metal cap. - In either structure, the
piezoelectric resonator 51 is connected to the lead terminals or the electrodes on the substrate of a case by soldering. Accordingly, during packaging or hardening and contraction of the finishing resin, an external stress may be applied in the longitudinal direction of thepiezoelectric plate 52. As a result, the polarization axis of thepiezoelectric plate 52 is bent, and accordingly, unwanted ripples are generated in the frequency band between the resonant frequency and the antiresonant frequency. - Particularly, when the thickness of the
piezoelectric plate 52 is reduced and the width of thepiezoelectric plate 52 is reduced in order to realize apiezoelectric resonator 51 having a smaller size, the above-mentioned ripples are more easily generated. Because of this defect, thepiezoelectric resonator 51 could not be reduced in size. - In order to overcome the problems described above, preferred embodiments of the present invention provide a piezoelectric resonator that is constructed to use a fundamental wave of a thickness shear vibration mode and such that, even if a stress is applied to a piezoelectric plate of the resonator, the generation of unwanted ripples between the resonant frequency and the antiresonant frequency is prevented and the piezoelectric resonator can be made much smaller that conventional resonators.
- According to a preferred embodiment of the present invention, an energy-trap type piezoelectric resonator utilizing a fundamental wave of a thickness shear vibration mode includes a substantially rectangular piezoelectric plate which is polarized in the longitudinal direction, and first and second resonance electrodes disposed on first and second main surfaces of the piezoelectric plate and arranged to define an energy trap vibration section and to face each other with the piezoelectric plate disposed therebetween, wherein the energy-trap vibration section is arranged to be asymmetrical with respect to the center in the longitudinal direction of the piezoelectric plate.
- In the piezoelectric resonator according to various preferred embodiments of the present invention, a relationship 3t≦ΔL≦5t is preferably satisfied, where L is the length of the piezoelectric plate, t is the thickness of the piezoelectric plate, and ΔL is the distance between the center in the longitudinal direction of the piezoelectric plate and the center in the longitudinal direction of the vibrator portion.
- In the piezoelectric resonator according to various preferred embodiments of the present invention, the first resonance electrode is arranged to extend to one end in the longitudinal direction of the piezoelectric plate and the second resonance electrode is arranged to extend to the other end in the longitudinal direction of the piezoelectric plate.
- In the piezoelectric resonator according to various preferred embodiments of the present invention, first and second lead terminals are electrically connected to the lead-out portions of the first and second resonance electrodes, respectively, and, excluding the tips of the first and second lead terminal, the rest of the piezoelectric resonator is covered by finishing resin such that a space is defined around the vibration section of the resonator so as not to prevent or hinder the vibration section from vibrating.
- Other features, elements, characteristics and advantages of the present invention will become more apparent from the detailed description of preferred embodiments thereof with reference to the drawings.
- FIGS. 1A and 1B are a perspective view and a vertical sectional view of a piezoelectric resonator according to a preferred embodiment of the present invention;
- FIG. 2 is a schematic perspective view for illustrating the distortion of a polarization axis when a stress is applied in the longitudinal direction of a piezoelectric resonator;
- FIG. 3 is a schematic perspective view showing a piezoelectric resonator element with leads using a piezoelectric resonator according to a preferred embodiment of the present invention;
- FIG. 4 shows the relationship between the generation rate of ripples and the mechanical factor of merit Qm relative to the dimension of electrode displacement showing the displacement of a piezoelectric vibrator portion from the center in the longitudinal direction of a piezoelectric plate;
- FIG. 5 is a diagram illustrating ripples generated in the frequency range between the resonant frequency and the antiresonant frequency in a piezoelectric resonator; and
- FIGS. 6A and 6B are a perspective view and a vertical sectional view, respectively, showing one example of conventional energy-trap type piezoelectric resonators.
- Hereinafter, the present invention will be described in further detail by way of preferred embodiments with reference to the accompanying drawings.
- FIGS. 1A and 1B are a perspective view and a vertical sectional view which show a piezoelectric resonator according to a preferred embodiment of the present invention.
- A
piezoelectric resonator 1 is an energy-trap type piezoelectric resonator utilizing a fundamental wave of a thickness shear vibration mode. - The
piezoelectric resonator 1 preferably includes apiezoelectric plate 2 that preferably has a long and narrow substantially rectangular shape. Thepiezoelectric plate 2 is preferably made of a piezoelectric ceramic material such as, for example, a lead zirconate titanate based ceramic material and is polarized in the direction P that is substantially parallel with the longitudinal direction of thepiezoelectric plate 2. - A
first resonance electrode 3 is disposed on theupper surface 2 a of thepiezoelectric plate 2. Asecond resonance electrode 4 is disposed on thelower surface 2 b of thepiezoelectric plate 2. The first andsecond resonance electrodes piezoelectric plate 2 disposed therebetween. The portion of theplate 2 where theresonance electrodes piezoelectric plate 2 disposed therebetween constitutes an energy trap vibration portion. - The
resonance electrode 3 is arranged to extend to one end in the longitudinal direction of thepiezoelectric plate 2 from the above-mentioned vibration portion on theupper surface 2 a of thepiezoelectric plate 2. On the other hand, theresonance electrode 4 is arranged to extend to the other end in the longitudinal direction of thepiezoelectric plate 2 from the vibration portion on thelower surface 2 b. - The
resonance electrodes - The
piezoelectric resonator 1 of the present preferred embodiment is uniquely constructed such that the energy trap vibration section is asymmetrical with respect to the center in the longitudinal direction of thepiezoelectric plate 2 a. That is, the center portion of the resonator where theresonance electrode 3 and theresonance electrode 4 overlap each other is located closer to one end in the longitudinal direction of thepiezoelectric plate 2 than the center in the longitudinal direction of thepiezoelectric plate 2. - In the
piezoelectric resonator 1 of the present preferred embodiment, because the energy trap vibration section is arranged to be located in a line on the side of one end from the center in the longitudinal direction of thepiezoelectric plate 2, even if an external force is applied to thepiezoelectric resonator 1 when thepiezoelectric resonator 1 is packaged, or when resin finishing of thepiezoelectric resonator 1 with lead terminals attached thereto takes place, in the frequency range between the resonant frequency and the antiresonant frequency of a piezoelectric resonator element as a final product, the generation of unwanted ripples can be effectively suppressed and prevented. This is specifically described with reference to FIGS. 2 to 5. - When a piezoelectric resonator includes a piezoelectric resonator element having lead terminals attached thereto or when a piezoelectric resonator is mounted on a substrate of a case and is sealed by a cap so as to define a piezoelectric resonator device, because of stress imparted during hardening and contracting the resin used to define an outer package or because of stress applied by the connection portions during the packaging, generally the
piezoelectric resonator 1 is warped. That is, as shown in FIG. 2, stresses F1 and F2 are applied, warping thepiezoelectric resonator 1. In this case, thepiezoelectric resonator 1 is warped, as shown by arrows P, and the polarization axis is also warped along the longitudinal direction of thepiezoelectric plate 2. - In a
piezoelectric resonator element 11, for example, shown in FIG. 3,lead terminals 5 and 6 are connected to apiezoelectric resonator 1 and, excluding the tip portion of thelead terminals 5 and 6, the rest of thepiezoelectric resonator part 11 is covered by afinishing resin 7. As such a finishing resin, generally, thermosetting resin such as epoxy resin, or other suitable material, is used and the material contracts when hardened. Accordingly, the abovementioned stresses F1 and F2 are applied to thepiezoelectric resonator 1. - Therefore, in the conventional
piezoelectric resonator 51, because the polarization axis p is also warped when the above-mentioned stresses are applied, unwanted ripples were likely to be generated between the resonant frequency and the antiresonant frequency as shown by an arrow A in FIG. 5. - The inventor of the present invention discovered that, when the application of the stress during the abovementioned hardening and contraction of the finishing resin and the application of the stress at the packaging is considered, if in the
piezoelectric resonator 1 the vibration section is constructed so as to suppress and minimize distortion of the polarization axis caused by the above-described stresses, the generation of unwanted ripples is prevented, and this finding has lead to development of various preferred embodiments of the present invention. - FIG. 4 shows the change of Qm and of the generation rate of ripples, when the center of the vibrator portion is displaced toward the side of one end from the center in the longitudinal direction of the
piezoelectric plate 2 in thepiezoelectric resonator 1, based on the above-mentioned concepts. Moreover, in FIG. 4, the result of various piezoelectric resonators whereresonance electrodes piezoelectric plate 2 having the approximate dimensions of 5.4×0.42×a thickness of about 0.12 mm and made of a lead zirconate titanate based ceramic material and where theresonance electrodes piezoelectric plate 2 and the center of the vibration section along the longitudinal direction of thepiezoelectric plate 2. - As is clearly seen in FIG. 4, when the vibration section is located at the center in the longitudinal direction of the
piezoelectric plate 2, that is, when the dimension of electrode displacement is zero, the generation rate of ripples exceeds 6 percent. On the other hand, it is understood that by shifting the center of the vibration section toward the side of the end from the center in the longitudinal direction of thepiezoelectric plate 2, the generation rate of ripples decreases. That is, as in the present preferred embodiment, by shifting the center of the vibration section toward the side of one end from the center in the longitudinal direction of thepiezoelectric plate 2, that is, by constructing the vibration section so as to be asymmetrical about the center of thepiezoelectric plate 2, it is understood that ripples which conventionally appear in the frequency area between the resonant frequency and the antiresonant frequency are effectively suppressed and prevented from occurring. - Moreover, regarding the generation rate of ripples of the vertical axis in FIG. 4, as in the impedance to frequency characteristic shown in FIG. 5, for example, in the frequency area between the resonant frequency Fr and the antiresonant frequency Fa, when a portion where the curve is not smoothly continuous, that is, in the portion where the area is not smoothly continuous, if the difference between the top and the bottom is larger than 0 dB, it is understood that a ripple is generated.
- Furthermore, a mechanical factor of merit is also reduced when the dimension of electrode displacement is larger than zero as in the above.
- Moreover, in the above-mentioned experimental example, a case where the vibration section was displaced toward the side of one end in the longitudinal direction of the
piezoelectric plate 2 was described, but also in a case where the vibration section is displaced toward the side of the other end of thepiezoelectric plate 2, the generation of ripples can be suppressed in the same way and that a mechanical factor of merit can be decreased. - As is clearly seen in FIG. 4, preferably, when a relationship 3t≦ΔL is satisfied, where L is the length of a
piezoelectric plate 2, t is the thickness of thepiezoelectric plate 2, and ΔL is a distance between the center in the longitudinal direction of thepiezoelectric plate 2 and the center in the longitudinal direction of the vibrator portion, the generation rate of ripples is about 4% or less. Furthermore, when ΔL≦5t, the decrease of a mechanical factor of merit Qm can be suppressed and prevented. - Therefore, it is preferable that the relationship 3t≦ΔL≦5t is satisfied.
- In a piezoelectric resonator according to various preferred embodiments of the present invention, as described above, an energy trap vibration section utilizing a thickness shear vibration mode is asymmetrical with respect to the center in the longitudinal direction of a substantially rectangular piezoelectric plate which is polarized in the longitudinal direction, and accordingly, the generation of unwanted ripples between the resonant frequency and the antiresonant frequency is effectively suppressed and prevented. Therefore, when the resonator according to preferred embodiments of the present invention is used as a piezoelectric oscillator, for example, it is possible to provide a piezoelectric oscillator in which phenomena such as the skipping of oscillation, the stopping of oscillation, or other defects, can be certainly prevented and to provide an oscillator having superior reliability.
- Furthermore, up to now, the above-mentioned piezoelectric resonators that generate ripples were considered to be defective products. However, according to preferred embodiments of the present invention, because the generation of unwanted ripples as described above is effectively prevented, the rate of acceptable products is greatly increased and accordingly, the cost of piezoelectric resonators is greatly reduced.
- In various preferred embodiments of the present invention, when the relationship 3t≦ΔL≦5t is satisfied, the generation of ripples is prevented and the increase of a mechanical factor of merit Qm is prevented. Accordingly, the characteristics of the resonator when it is used as a piezoelectric oscillator, for example, are maintained while the generation of ripples is effectively prevented.
- In various preferred embodiments of the present invention, when a first resonance electrode is arranged to extend out to one end in the longitudinal direction of a piezoelectric plate and a second resonance electrode is arranged to extend out to the other end in the longitudinal direction of the piezoelectric plate, in the same way as in conventional piezoelectric resonators utilizing a thickness shear vibration mode, an electrical connection and a mechanical support can be located at both ends of a piezoelectric resonator. Accordingly, a piezoelectric resonator element having leads attached thereto on which resin finishing has been performed, and a piezoelectric resonator element with a cap thereon which is mounted on a substrate of a case and is sealed by a cap, can be constructed.
- While the invention has been particularly shown and described with reference to preferred embodiments thereof, it will be understood by those skilled in the art that the foregoing and other changes in form and details can be made without departing from the spirit and scope of the invention.
Claims (20)
1. An energy-trap type piezoelectric resonator mode comprising:
a piezoelectric plate which is polarized in the longitudinal direction and includes first and second main surfaces; and
first and second resonance electrodes disposed on the first and second main surfaces of the piezoelectric plate, respectively, such that the first and second electrodes overlap each other with the piezoelectric plate disposed therebetween so as to define an energy trap vibration section; wherein
the energy trap vibration section is asymmetrical with respect to the center in the longitudinal direction of the piezoelectric plate.
2. The piezoelectric resonator according to , wherein the piezoelectric plate and the first and second resonance electrodes are arranged such that the resonator vibrates using a fundamental wave of a thickness shear vibration.
claim 1
3. The piezoelectric resonator according to , wherein the piezoelectric plate is substantially rectangular.
claim 1
4. The piezoelectric resonator according to , wherein a relationship 3t≦ΔL≦5t is satisfied, where L is the length of the piezoelectric plate, t is the thickness of the piezoelectric plate, and ΔL is a distance between the center in the longitudinal direction of the piezoelectric plate and the center in the longitudinal direction of the vibration section.
claim 1
5. The piezoelectric resonator according to , wherein the first resonance electrode is arranged to extend to one end in the longitudinal direction of the piezoelectric plate and the second resonance electrode is arranged to extend to the other end in the longitudinal direction of the piezoelectric plate.
claim 1
6. The piezoelectric resonator according to , wherein a first lead terminal and a second lead terminal are electrically connected to the lead-out portions of the first and second resonance electrodes, respectively, and wherein the remaining portion of the piezoelectric resonator except for tips of the first and second lead terminals is covered by resin such that a space is defined around the vibration section so as not to hinder the vibration section from vibrating.
claim 1
7. The piezoelectric resonator according to , wherein the piezoelectric plate is made of a piezoelectric ceramic material and is polarized in a direction that is substantially parallel to the longitudinal direction of the piezoelectric plate.
claim 1
8. The piezoelectric resonator according to , wherein the first and second resonance electrodes are made of one of Ag, Ag—Pd alloy, Al, and Cu.
claim 1
9. The piezoelectric resonator according to , wherein the center portion of the resonator where the first and second resonance electrodes overlap each other is located closer to one end in the longitudinal direction of the piezoelectric plate than the center in the longitudinal direction of the piezoelectric plate.
claim 1
10. An oscillator comprising:
at least one piezoelectric resonator including:
a piezoelectric plate which is polarized in the longitudinal direction and includes first and second main surfaces; and
first and second resonance electrodes disposed on the first and second main surfaces of the piezoelectric plate, respectively, such that the first and second electrodes overlap each other with the piezoelectric plate disposed therebetween so as to define an energy trap vibration section; wherein
the energy trap vibration section is asymmetrical with respect to the center in the longitudinal direction of the piezoelectric plate; and
a case containing said at least one piezoelectric resonator.
11. An energy-trap type piezoelectric resonator mode comprising:
a piezoelectric plate which is polarized in the longitudinal direction and includes first and second main surfaces; and
first and second resonance electrodes disposed on the first and second main surfaces of the piezoelectric plate, respectively, such that the first and second electrodes overlap each other with the piezoelectric plate disposed therebetween so as to define an energy trap vibration section; wherein
the center portion of the resonator where the first and second resonance electrodes overlap each other is located closer to one end in the longitudinal direction of the piezoelectric plate than the center in the longitudinal direction of the piezoelectric plate.
12. The piezoelectric resonator according to , wherein the piezoelectric plate and the first and second resonance electrodes are arranged such that the resonator vibrates using a fundamental wave of a thickness shear vibration.
claim 11
13. The piezoelectric resonator according to , wherein the piezoelectric plate is substantially rectangular.
claim 11
14. The piezoelectric resonator according to , wherein a relationship 3t≦ΔL≦5t is satisfied, where L is the length of the piezoelectric plate, t is the thickness of the piezoelectric plate, and ΔL is a distance between the center in the longitudinal direction of the piezoelectric plate and the center in the longitudinal direction of the vibration section.
claim 11
15. The piezoelectric resonator according to , wherein the first resonance electrode is arranged to extend to one end in the longitudinal direction of the piezoelectric plate and the second resonance electrode is arranged to extend to the other end in the longitudinal direction of the piezoelectric plate.
claim 11
16. The piezoelectric resonator according to , wherein a first lead terminal and a second lead terminal are electrically connected to the lead-out portions of the first and second resonance electrodes, respectively, and wherein the remaining portion of the piezoelectric resonator except for tips of the first and second lead terminals is covered by resin such that a space is defined around the vibration section so as not to hinder the vibration section from vibrating.
claim 11
17. The piezoelectric resonator according to , wherein the piezoelectric plate is made of a piezoelectric ceramic material and is polarized in a direction that is substantially parallel to the longitudinal direction of the piezoelectric plate.
claim 11
18. The piezoelectric resonator according to , wherein the first and second resonance electrodes are made of one of Ag, Ag—Pd alloy, Al, and Cu.
claim 11
19. The piezoelectric resonator according to , wherein the energy trap vibration section is asymmetrical with respect to the center in the longitudinal direction of the piezoelectric plate.
claim 11
20. An oscillator comprising:
at least one piezoelectric resonator including:
a piezoelectric plate which is polarized in the longitudinal direction and includes first and second main surfaces; and
first and second resonance electrodes disposed on the first and second main surfaces of the piezoelectric plate, respectively, such that the first and second electrodes overlap each other with the piezoelectric plate disposed therebetween so as to define an energy trap vibration section; wherein the center portion of the resonator where the first and second resonance electrodes overlap each other is located closer to one end in the longitudinal direction of the piezoelectric plate than the center in the longitudinal direction of the piezoelectric plate; and
a case containing said at least one piezoelectric resonator.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000012006A JP3446705B2 (en) | 2000-01-20 | 2000-01-20 | Piezoelectric resonator |
JP2000-012006 | 2000-01-20 |
Publications (2)
Publication Number | Publication Date |
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US20010009343A1 true US20010009343A1 (en) | 2001-07-26 |
US6448690B2 US6448690B2 (en) | 2002-09-10 |
Family
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US09/749,866 Expired - Lifetime US6448690B2 (en) | 2000-01-20 | 2000-12-28 | Piezoelectric resonator |
Country Status (6)
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---|---|
US (1) | US6448690B2 (en) |
JP (1) | JP3446705B2 (en) |
KR (1) | KR100494047B1 (en) |
CN (1) | CN1157850C (en) |
DE (1) | DE10100833B4 (en) |
TW (1) | TW494627B (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6690101B2 (en) | 2000-03-23 | 2004-02-10 | Elliptec Resonant Actuator Ag | Vibratory motors and methods of making and using same |
US20050110368A1 (en) * | 2002-02-06 | 2005-05-26 | Elliptec Resonant Actuator Akteingesellschaft | Piezoelectric motor control |
US20050140250A1 (en) * | 2003-12-25 | 2005-06-30 | Tdk Corporation | Lead terminal, resonator and train of electronic components |
US20060193107A1 (en) * | 2003-08-06 | 2006-08-31 | Keiichi Kami | Case with insert terminal and piezoelectric electroacoustic transducer using this case, process for manufacturing case with insert terminal |
US11222752B2 (en) * | 2019-10-28 | 2022-01-11 | Tdk Corporation | Ceramic electronic device |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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DE10146704A1 (en) * | 2001-09-21 | 2003-04-10 | Elliptec Resonant Actuator Ag | Piezomotors with piezo elements, manufactured using the ceramic capacitor process |
US7057330B2 (en) * | 2003-12-18 | 2006-06-06 | Palo Alto Research Center Incorporated | Broad frequency band energy scavenger |
US7235916B2 (en) * | 2004-06-03 | 2007-06-26 | Zippy Technology Corp. | Piezoelectric blades anchoring structure |
US7293411B2 (en) * | 2004-12-20 | 2007-11-13 | Palo Alto Research Center Incorporated | Energy scavengers which adjust their frequency by altering liquid distributions on a beam |
WO2007091376A1 (en) * | 2006-02-08 | 2007-08-16 | Murata Manufacturing Co., Ltd. | Piezoelectric oscillator |
EP3148076B1 (en) * | 2014-05-17 | 2020-06-03 | Kyocera Corporation | Piezoelectric component |
JP6405785B2 (en) * | 2014-08-13 | 2018-10-17 | セイコーエプソン株式会社 | Piezoelectric drive device, robot, and drive method thereof |
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US4356421A (en) * | 1980-03-25 | 1982-10-26 | Tohoku Metal Industries, Ltd. | Piezoelectric resonators of an energy-trapping type of a width extensional vibratory mode |
US4481488A (en) * | 1982-11-08 | 1984-11-06 | Motorola, Inc. | Trapped energy resonator for oscillator and multiple resonator applications |
JPS60180131U (en) * | 1984-05-08 | 1985-11-29 | 株式会社村田製作所 | Chip type piezoelectric resonator |
JPH03151705A (en) * | 1989-11-08 | 1991-06-27 | Murata Mfg Co Ltd | Piezoelectric vibration element |
JP3125454B2 (en) * | 1992-07-07 | 2001-01-15 | 株式会社村田製作所 | Three-terminal type piezoelectric resonator |
JPH07226644A (en) * | 1994-02-16 | 1995-08-22 | Murata Mfg Co Ltd | Energy confinement type piezoelectric resonator |
US6114801A (en) * | 1997-04-14 | 2000-09-05 | Toyo Communication Equipment Co., Ltd. | At-cut crystal resonator |
JP3319378B2 (en) * | 1998-03-10 | 2002-08-26 | 株式会社村田製作所 | Manufacturing method of piezoelectric resonator |
JP3303777B2 (en) * | 1998-06-02 | 2002-07-22 | 株式会社村田製作所 | Piezoelectric resonator |
JP2000134060A (en) * | 1998-10-26 | 2000-05-12 | Murata Mfg Co Ltd | Energy confinement type piezoelectric resonator, and energy confinement type piezoelectric resonator component |
JP2000138554A (en) * | 1998-11-02 | 2000-05-16 | Murata Mfg Co Ltd | Energy confinement piezoelectric resonator |
JP2001144576A (en) * | 1999-11-12 | 2001-05-25 | Murata Mfg Co Ltd | Piezoelectric resonator |
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2000
- 2000-01-20 JP JP2000012006A patent/JP3446705B2/en not_active Expired - Fee Related
- 2000-12-21 TW TW089127472A patent/TW494627B/en not_active IP Right Cessation
- 2000-12-28 US US09/749,866 patent/US6448690B2/en not_active Expired - Lifetime
-
2001
- 2001-01-10 DE DE10100833A patent/DE10100833B4/en not_active Expired - Fee Related
- 2001-01-19 KR KR10-2001-0003141A patent/KR100494047B1/en not_active IP Right Cessation
- 2001-01-20 CN CNB011017600A patent/CN1157850C/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6690101B2 (en) | 2000-03-23 | 2004-02-10 | Elliptec Resonant Actuator Ag | Vibratory motors and methods of making and using same |
US20050110368A1 (en) * | 2002-02-06 | 2005-05-26 | Elliptec Resonant Actuator Akteingesellschaft | Piezoelectric motor control |
US7187102B2 (en) | 2002-02-06 | 2007-03-06 | Elliptec Resonant Actuator Ag | Piezoelectric motor control |
US20060193107A1 (en) * | 2003-08-06 | 2006-08-31 | Keiichi Kami | Case with insert terminal and piezoelectric electroacoustic transducer using this case, process for manufacturing case with insert terminal |
US7259502B2 (en) * | 2003-08-06 | 2007-08-21 | Murata Manufacturing Co., Ltd. | Insert terminal-containing case, piezoelectric electroacoustic transducer using the same, and process for producing insert terminal-containing case |
US20050140250A1 (en) * | 2003-12-25 | 2005-06-30 | Tdk Corporation | Lead terminal, resonator and train of electronic components |
US7135808B2 (en) * | 2003-12-25 | 2006-11-14 | Tdk Corporation | Lead terminal, resonator and train of electronic components |
US11222752B2 (en) * | 2019-10-28 | 2022-01-11 | Tdk Corporation | Ceramic electronic device |
Also Published As
Publication number | Publication date |
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JP2001203557A (en) | 2001-07-27 |
US6448690B2 (en) | 2002-09-10 |
KR20010076381A (en) | 2001-08-11 |
DE10100833B4 (en) | 2005-07-14 |
KR100494047B1 (en) | 2005-06-10 |
TW494627B (en) | 2002-07-11 |
CN1306346A (en) | 2001-08-01 |
DE10100833A1 (en) | 2001-08-09 |
JP3446705B2 (en) | 2003-09-16 |
CN1157850C (en) | 2004-07-14 |
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