US20020047185A1 - Lead frame tooling design for bleed barrier groove - Google Patents

Lead frame tooling design for bleed barrier groove Download PDF

Info

Publication number
US20020047185A1
US20020047185A1 US09/862,067 US86206701A US2002047185A1 US 20020047185 A1 US20020047185 A1 US 20020047185A1 US 86206701 A US86206701 A US 86206701A US 2002047185 A1 US2002047185 A1 US 2002047185A1
Authority
US
United States
Prior art keywords
lead frame
encapsulant
groove
mold
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US09/862,067
Inventor
Buford Carter
Dennis Davis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to US09/862,067 priority Critical patent/US20020047185A1/en
Publication of US20020047185A1 publication Critical patent/US20020047185A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4821Flat leads, e.g. lead frames with or without insulating supports
    • H01L21/4842Mechanical treatment, e.g. punching, cutting, deforming, cold welding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a method for stamp tooling bleed barrier grooves in thin material for preventing bleed of encapsulant over an integrated circuit exposed pad or slug for utilization as a heat sink.
  • an exposed thermal pad or slug of highly thermally conductive material such as, for example, copper
  • the preferred finish for an exposed pad lead frame is palladium so as to avoid any wet process steps.
  • the purpose of the palladium coating, when used, is set forth in Ser. No. 08/190,729, the contents of which are incorporated herein by reference.
  • the exposed thermal pad is generally defined as the surface of the lead frame opposed to and adjacent to the semiconductor chip. It should be understood that, as an alternative, the lead frame can be made thicker in the region of the thermal pad or with an attached thermal slug.
  • a portion of the processing operation involves encapsulation of the chip and lead frame. This operation requires that the thermal pad be exposed to the external environment in order to allow for maximum dissipation of heat from the semiconductor chip to the external environment through the thermal pad.
  • the pad is disposed against the mold surface, preferably under compression against the mold surface, to minimize the likelihood of encapsulant traveling between the mold surface and the thermal pad and thereby over the thermal pad surface.
  • a problem may arise during the encapsulation as described above if the lead frame encapsulation is not flat to the edges or if the compression of the thermal slug against the mold surface is insufficient to prevent mold bleed wherein the molding material not only encapsulates the lead frame and semiconductor chip, but the molding material also passes over and forms a thin, generally transparent coating over the thermal pad.
  • This coating of encapsulant over the thermal pad reduces the thermal performance of the thermal pad by reducing the exposed pad area.
  • the encapsulant coating over the thermal pad also prevents or reduces the ability to bond or solder to the external thermal sink.
  • irregular mold bleed makes it difficult to specify manufacturing limits and causes a problem during quality control to judge acceptable and unacceptable criteria. Uncontrolled mold bleed is also a cosmetic defect that may result in unacceptability of an otherwise good product.
  • this mold bleed has generally been removed by abrading or by chemical action of some type.
  • the abrading or chemical action step involves an economic cost in that the abrading and/or chemical action step must be added.
  • the abrading and/or chemical action step may damage, contaminate or cause removal of all or part of the palladium coating over the lead frame, thereby minimizing or eliminating the beneficial effects derived from the palladium coating.
  • a groove or grooves of various possible shapes are formed in the lead frame itself by stamping, etching or the like.
  • the groove surrounds all or part of the thermal pad so that any encapsulant traveling toward the center of the thermal pad freezes at the entrance to the groove and therefore acts as a block to the travel of encapsulant over the thermal pad.
  • the encapsulant may fill the groove and travels no further.
  • the groove or grooves can be formed in the mold.
  • ridges can be placed in the mold to prevent the movement of the encapsulant over the exposed surface of the thermal pad.
  • ridges can be formed on the lead frame surface.
  • the encapsulant is either trapped in the grooves or freezes when entering a groove to inhibit further travel of encapsulant over the thermal pad surface.
  • the ridges rest against the surface of the mold, generally but not necessarily under compression, to act as a barrier to the travel of the encapsulant beyond the ridges and over the surface of the thermal pad. The action is the same as the groove but reversed in implementation.
  • the groove should be of sufficient depth to trap or freeze the encapsulant in the groove.
  • the tool should be designed so as to control swelling of the thermal pad as the groove is being formed.
  • the grooves can take various shapes, examples of these shapes being “V,” check, sawtooth, square and rectangular, as well as a concave cup in the case of etching.
  • the grooves will generally have a depth equal to about half of their lead frame material thickness.
  • a minimum groove depth of about 1.5 to 2.5 mils can provide a suitable barrier to the encapsulant.
  • bleed control is provided by design into the lead frame or mold to provide lower cost and higher assembly throughout than is obtained by the prior art chemical deflash, mechanical deflash, liquid or tape masking or the pad/slug and by use of tape, chemical or special materials in the package mold.
  • the present invention requires no chemicals, wet processing or added plating cost. In addition, no processing is required which will degrade package reliability, and no additional assembly processes or materials are required.
  • the palladium solderable finish, when used, is preserved over the lead frame, and the groove provides better ability for quality control inspection for mold bleed.
  • FIG. 1 a is a view of the surface of a lead frame containing a groove in accordance with the present invention
  • FIG. 1 b is a cross-section view taken through the center of the die mounted onto the lead frame in FIG. 1 a;
  • FIG. 1 c is a side view of the lead frame of FIG. 1 a;
  • FIG. 1 d is an enlarged view of a groove corner having a rounded geometry in accordance with the present invention
  • FIG. 1 e is an enlarged view of a groove corner having a chamfered geometry in accordance with the present invention
  • FIG. 1 f is an enlarged view of a groove corner having open corner geometry in accordance with the present invention.
  • FIGS. 2 to 11 show various embodiments in accordance with the present invention
  • FIG. 12 a shows an etched groove cross-section
  • FIGS. 12 b to 12 e show various stamp groove configurations
  • FIGS. 13 a to 13 e show design techniques for matching swelling of stamped groove junctures and line segments
  • FIG. 14 shows the implementation of stamped bleed barrier grooves that provide simple, flexible, economical groove tooling and uniform swelling of line segments and junctures;
  • FIGS. 15 a and 15 b show top and cross-sectional view of the implementation of etched bleed barrier grooves in a HTQFP package
  • FIG. 16 illustrates a tool to create a stamped “V” groove in accordance with the present invention
  • FIG. 17 illustrates the tool being used
  • FIG. 18 illustrates another tool being used to create a stamped “square” or “rectangular” groove in accordance with the present invention.
  • FIG. 19 illustrates the effect of the tool of FIG. 16 being used.
  • FIG. 1 a there is shown a lead frame 1 having a plurality of lead fingers 3 and a thermal pad region 5 which contains one of a thermal pad (better shown in FIGS. 1 b and 1 c ).
  • a semiconductor chip or die 6 shown in FIGS. 1 a and 1 b, will be positioned over the thermal pad 5 .
  • a groove 9 (on the opposite side of the lead frame from the die) surrounds a major portion of the thermal pad 5 .
  • the stamp groove may have radius corners 11 a , chamfered corners 11 b , or open corners 11 c , shown in FIGS. 1 d, 1 e and 1 f, which are designs to avoid the build-up of lead frame material at the corners during groove formation.
  • the groove 9 can take any one of several shapes as shown in FIG. 12.
  • a V-shaped groove with a chamfered groove corner is shown in FIG. 1 f as an example.
  • the lead frame of FIGS. 1 a to 1 c is provided with a semiconductor chip disposed over the thermal pad 5 .
  • the chip 6 is bonded to the top of the lead frame thermal pad 5 , and the groove 9 is disposed on the opposite side of the lead frame from the chip, and the thermal pad remains exposed after molding is completed (encapsulation with plastic).
  • FIGS. 2 to 5 show lead frames with a thermal slug or dual thickness lead frames.
  • FIG. 2 there is shown a lead frame 1 having a thermal slug 7 secured thereto.
  • the thermal slug 7 is disposed in a cavity 21 in a mold 23 with a space being provided between the sides of the cavity 21 and the thermal slug 7 .
  • a chip 6 is secured to the lead frame 1 on the lead frame surface opposed to the slug 7 and directly adjacent to or over the slug.
  • the encapsulant will travel into the cavity and freeze in the cavity region between the slug 7 and the cavity side wall. This will prevent the further travel of encapsulant over the surface of the thermal slug 7 .
  • FIG. 3 there is shown the same lead frame 1 and thermal slug 7 as shown in FIG. 2.
  • the mold 25 has a cavity 27 with the thermal slug 7 resting over the cavity.
  • the encapsulant will travel into the cavity 27 and freeze as it enters the cavity, assuming that the cavity is not filled with encapsulant. In this case, some encapsulant may remain in the cavity 27 when the encapsulated device is removed from the mold.
  • FIG. 4 there is shown the same lead frame 1 ; however, the thermal slug 29 has been altered to have a cavity 31 , the edges of the cavity contacting the mold 33 .
  • the perimeter of the cavity 31 acts as a barrier to the movement of the encapsulant into the cavity.
  • the thermal slug 37 has been provided with one or a plurality of grooves 39 of the type discussed above with reference to FIGS. 12 a to 12 e .
  • the grooves 39 contact the mold 41 .
  • any encapsulant which travels between the mold 41 and the slug 37 is trapped in a groove 39 which surrounds the slug.
  • One or two grooves can be used, this Figure showing both possibilities in part.
  • FIGS. 6 to 11 show single-piece deep downset thermal pad lead frames (POWER PADTM) with grooves.
  • FIG. 6 there is shown lead frame 1 with grooves 45 in the lead frame.
  • the grooves 45 operate against the mold 41 in the same manner as discussed above with reference to FIG. 5.
  • FIG. 7 there is shown a lead frame 1 wherein ridges 47 are disposed in the mold 45 . Fabrication takes place in the same manner as discussed above with reference to FIG. 4.
  • FIG. 8 there is shown a lead frame 1 wherein the grooves 49 are disposed in the mold 51 . Fabrication takes place in the same manner as discussed above with reference to FIGS. 5 or 6 .
  • FIG. 9 there is shown a lead frame 1 with the thermal pad resting over a cavity 55 in the mold 53 . Fabrication takes place in the same manner as discussed above with reference to FIG. 3.
  • FIG. 10 there is shown a lead frame 1 with the thermal pad resting within a cavity 57 in the mold 59 . Fabrication takes place in the same manner as set forth above with reference to FIG. 2.
  • FIG. 11 there is shown a lead frame 1 with ridges 61 in the lead frame forming a cavity 63 between the lead frame, the ridges and the mold 65 . Fabrication takes place in the same manner as set forth above with reference to FIG. 4.
  • FIGS. 12 a to 12 e there are shown typical groove shapes that can be used, FIG. 12 a showing a cup-shaped groove obtained by etching. Etched grooves offer great flexibility in a groove flat pattern. The depth and width of the groove are controlled through the photo tool artwork.
  • FIGS. 12 b to 12 e Shapes obtainable by stamping are shown in FIGS. 12 b to 12 e with FIG. 12 b showing a V-shaped groove, FIG. 12 c showing a check-shaped groove, FIG. 12 d showing a sawtooth-shaped groove, and FIG. 12 e showing a square-shaped groove.
  • the sharp square or sawtooth groove is preferred; however, the “V” is the easiest to implement.
  • the balanced “V” groove swells equally on both sides of the groove.
  • FIGS. 13 a to 13 e show design techniques for matching swelling of stamped groove junctures 73 and line segments 71 .
  • the groove swelling is projected, and the location of the adjoining grooves 71 is set so that the projected swelling at junctures 73 is equal to that for the longer line segments.
  • the grooves at the ends of the line segments 73 are angled to achieve the desired uniform projected swelling.
  • FIG. 14 shows the implementation of “stamped” bleed barrier grooves 43 to provide simple, flexible, economical groove tooling and uniform swelling of line segments and junctures. This is a good high-volume production design that allows the groove segments to sharply follow contour where bleed protection has been determined to be needed.
  • FIG. 15 shows the implementation of “etched” bleed barrier grooves 41 in a HTQFP package.
  • the groove pattern is placed in the etch lead frame artwork and, hence, results in no added cost or process steps.
  • FIG. 16 illustrates the tool 1604 in accordance with the teachings of the present invention.
  • the tool 1604 is used to stamp a groove into the lead frame 1602 or, more particularly, the thermal pad of the lead frame 1602 .
  • the lead frame is illustrated as element 1602 . Additionally, the lead frame 1602 could be a thermal slug.
  • the tool 1604 includes edges 1608 and 1606 . These edges 1608 and 1606 form a V-shaped member which is used to form a groove within lead frame 1602 .
  • the tool 1604 includes shoulder 1610 and shoulder 1612 which are adjacent to edges 1608 and 1606 . These shoulders 1610 and 1612 are used to coin swelling of lead frame 1602 .
  • FIG. 19 illustrates a lead frame 1602 after it has had a groove formed within it.
  • the groove 1902 is substantially V-shaped.
  • lead frames that have a thickness of 8 to 10 mils (b) have a groove depth of approximately 2.5 to 4 mils (a) while lead frames that have a thickness of 5 to 6 mils (b) having a groove depth of approximately 1.5 to 2.5 mils (a).
  • the width of the groove at the surface of the lead frame is 3.0 to 8.0 mils (c). A value of 3 mils minimum for (c) is sufficient to prevent the material from jumping across the groove, which otherwise would prevent the groove from functioning as a barrier.
  • FIG. 17 illustrates the operation of tool 1604 of the present invention.
  • FIG. 17 a illustrates the tool positioned above lead frame 1602 .
  • FIG. 17 b illustrates the tool 1604 penetrating the lead frame 1602 .
  • swell 1702 occurs.
  • FIG. 17 c illustrates that the swell 1704 is reduced due to the coining of the tool 1610 and 1612 onto the lead frame.
  • Swell 1702 is flattened to uniform height.
  • FIG. 18 illustrates another tool 1804 used to create a different shape groove, for example a square or rectangle shaped groove, into lead frame 1802 .
  • the tool 1804 has a rectangular projection 1810 .
  • lead frames that have a thickness of 8 to 10 mils (e) have a groove depth of approximately 2.5 to 4 mils (d) while lead frames that have a thickness of 5 to 6 mils (e) have a groove depth of approximately 1.5 to 2.5 mils (d).
  • the width of the groove at the surface of the lead frame is 3.0 to 8.0 mils (dd). A value of 3 mils minimum is sufficient to prevent the material from jumping across the groove, which otherwise would prevent the groove from functioning as a barrier.
  • FIG. 18 a illustrates the tool 1804 positioned above the lead frame 1802 .
  • the tool 1804 moves downward to penetrate the surface of lead frame 1802 .
  • FIG. 18 b illustrates the tool 1804 penetrating the lead frame 1802 .
  • Swelling 1806 occurs around the protrusion 1810 .
  • FIG. 18 c illustrates that the tool 1804 has made a square groove and coined the lead frame swell 1806 .

Abstract

An apparatus for forming a stamped groove in a lead frame including a tool for coining the groove in the lead frame. The tool has a shoulder to control swelling of the lead frame surface near the groove.

Description

    FIELD OF THE INVENTION
  • The present invention relates to a method for stamp tooling bleed barrier grooves in thin material for preventing bleed of encapsulant over an integrated circuit exposed pad or slug for utilization as a heat sink. [0001]
  • BACKGROUND OF THE INVENTION
  • In the fabrication of integrated circuits, it is often necessary to provide an exposed thermal pad or slug of highly thermally conductive material, such as, for example, copper, which is an integral part of or attached to a lead frame in order to conduct heat away from the semiconductor chip attached to the lead frame. The preferred finish for an exposed pad lead frame is palladium so as to avoid any wet process steps. The purpose of the palladium coating, when used, is set forth in Ser. No. 08/190,729, the contents of which are incorporated herein by reference. The exposed thermal pad is generally defined as the surface of the lead frame opposed to and adjacent to the semiconductor chip. It should be understood that, as an alternative, the lead frame can be made thicker in the region of the thermal pad or with an attached thermal slug. A portion of the processing operation involves encapsulation of the chip and lead frame. This operation requires that the thermal pad be exposed to the external environment in order to allow for maximum dissipation of heat from the semiconductor chip to the external environment through the thermal pad. During encapsulation, the pad is disposed against the mold surface, preferably under compression against the mold surface, to minimize the likelihood of encapsulant traveling between the mold surface and the thermal pad and thereby over the thermal pad surface. [0002]
  • A problem may arise during the encapsulation as described above if the lead frame encapsulation is not flat to the edges or if the compression of the thermal slug against the mold surface is insufficient to prevent mold bleed wherein the molding material not only encapsulates the lead frame and semiconductor chip, but the molding material also passes over and forms a thin, generally transparent coating over the thermal pad. This coating of encapsulant over the thermal pad reduces the thermal performance of the thermal pad by reducing the exposed pad area. The encapsulant coating over the thermal pad also prevents or reduces the ability to bond or solder to the external thermal sink. In addition, irregular mold bleed makes it difficult to specify manufacturing limits and causes a problem during quality control to judge acceptable and unacceptable criteria. Uncontrolled mold bleed is also a cosmetic defect that may result in unacceptability of an otherwise good product. [0003]
  • In the prior art, this mold bleed has generally been removed by abrading or by chemical action of some type. The abrading or chemical action step involves an economic cost in that the abrading and/or chemical action step must be added. In addition, the abrading and/or chemical action step may damage, contaminate or cause removal of all or part of the palladium coating over the lead frame, thereby minimizing or eliminating the beneficial effects derived from the palladium coating. [0004]
  • SUMMARY OF THE INVENTION
  • In accordance with the present invention, the above described problems of the prior art are minimized if not eliminated. [0005]
  • Briefly, the above is accomplished by providing a barrier to the encapsulant travel over the thermal pad during device encapsulation. This is accomplished in several ways in accordance with the present invention. In accordance with one group of embodiments of the invention, a groove or grooves of various possible shapes are formed in the lead frame itself by stamping, etching or the like. The groove surrounds all or part of the thermal pad so that any encapsulant traveling toward the center of the thermal pad freezes at the entrance to the groove and therefore acts as a block to the travel of encapsulant over the thermal pad. In some cases, the encapsulant may fill the groove and travels no further. As a second group of embodiments, the groove or grooves can be formed in the mold. As a third group of embodiments, ridges can be placed in the mold to prevent the movement of the encapsulant over the exposed surface of the thermal pad. As a fourth group of embodiments, ridges can be formed on the lead frame surface. In the case of the grooves, the encapsulant is either trapped in the grooves or freezes when entering a groove to inhibit further travel of encapsulant over the thermal pad surface. In the case of the ridges, the ridges rest against the surface of the mold, generally but not necessarily under compression, to act as a barrier to the travel of the encapsulant beyond the ridges and over the surface of the thermal pad. The action is the same as the groove but reversed in implementation. [0006]
  • In those instances wherein the features of the grooves are stamped into the lead frame, there can be swelling due to displaced material along the length of the groove and where the grooves meet at a corner. Greater swelling at corner intersections results in a failure to maintain the lead frame flat with the mold and permits encapsulant to travel to the thermal pad via longer straight line regions. The solution for stamped grooves was to pattern ends of grooves short of the corner or groove line segment such that swelling by displaced groove material created an effective swelling equivalent to the swelling of the straight line segments (see FIGS. 13, 13[0007] a, 13 b and 14). Etched grooves do not introduce any swelling and can easily be patterned for any shape. However, etched grooves typically have a prohibitive cost for high volume.
  • Additionally, it is necessary to have a tool that is capable of forming the groove. The groove should be of sufficient depth to trap or freeze the encapsulant in the groove. The tool should be designed so as to control swelling of the thermal pad as the groove is being formed. [0008]
  • The grooves can take various shapes, examples of these shapes being “V,” check, sawtooth, square and rectangular, as well as a concave cup in the case of etching. The grooves will generally have a depth equal to about half of their lead frame material thickness. A minimum groove depth of about 1.5 to 2.5 mils can provide a suitable barrier to the encapsulant. [0009]
  • As a result of the subject invention, bleed control is provided by design into the lead frame or mold to provide lower cost and higher assembly throughout than is obtained by the prior art chemical deflash, mechanical deflash, liquid or tape masking or the pad/slug and by use of tape, chemical or special materials in the package mold. [0010]
  • The present invention requires no chemicals, wet processing or added plating cost. In addition, no processing is required which will degrade package reliability, and no additional assembly processes or materials are required. The palladium solderable finish, when used, is preserved over the lead frame, and the groove provides better ability for quality control inspection for mold bleed. [0011]
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1[0012] a is a view of the surface of a lead frame containing a groove in accordance with the present invention;
  • FIG. 1[0013] b is a cross-section view taken through the center of the die mounted onto the lead frame in FIG. 1a;
  • FIG. 1[0014] c is a side view of the lead frame of FIG. 1a;
  • FIG. 1[0015] d is an enlarged view of a groove corner having a rounded geometry in accordance with the present invention;
  • FIG. 1[0016] e is an enlarged view of a groove corner having a chamfered geometry in accordance with the present invention;
  • FIG. 1[0017] f is an enlarged view of a groove corner having open corner geometry in accordance with the present invention;
  • FIGS. [0018] 2 to 11 show various embodiments in accordance with the present invention;
  • FIG. 12[0019] a shows an etched groove cross-section;
  • FIGS. 12[0020] b to 12 e show various stamp groove configurations;
  • FIGS. 13[0021] a to 13 e show design techniques for matching swelling of stamped groove junctures and line segments;
  • FIG. 14 shows the implementation of stamped bleed barrier grooves that provide simple, flexible, economical groove tooling and uniform swelling of line segments and junctures; [0022]
  • FIGS. 15[0023] a and 15 b show top and cross-sectional view of the implementation of etched bleed barrier grooves in a HTQFP package;
  • FIG. 16 illustrates a tool to create a stamped “V” groove in accordance with the present invention; [0024]
  • FIG. 17 illustrates the tool being used; [0025]
  • FIG. 18 illustrates another tool being used to create a stamped “square” or “rectangular” groove in accordance with the present invention; and [0026]
  • FIG. 19 illustrates the effect of the tool of FIG. 16 being used. [0027]
  • DETAILED DESCRIPTION OF THE PRESENT INVENTION
  • Referring first to FIG. 1[0028] a, there is shown a lead frame 1 having a plurality of lead fingers 3 and a thermal pad region 5 which contains one of a thermal pad (better shown in FIGS. 1b and 1 c). A semiconductor chip or die 6, shown in FIGS. 1a and 1 b, will be positioned over the thermal pad 5. A groove 9 (on the opposite side of the lead frame from the die) surrounds a major portion of the thermal pad 5. The stamp groove may have radius corners 11 a, chamfered corners 11 b, or open corners 11 c, shown in FIGS. 1d, 1 e and 1 f, which are designs to avoid the build-up of lead frame material at the corners during groove formation. The groove 9 can take any one of several shapes as shown in FIG. 12. A V-shaped groove with a chamfered groove corner is shown in FIG. 1f as an example.
  • In order to fabricate a semiconductor device, the lead frame of FIGS. 1[0029] a to 1 c is provided with a semiconductor chip disposed over the thermal pad 5. The chip 6 is bonded to the top of the lead frame thermal pad 5, and the groove 9 is disposed on the opposite side of the lead frame from the chip, and the thermal pad remains exposed after molding is completed (encapsulation with plastic).
  • FIGS. [0030] 2 to 5 show lead frames with a thermal slug or dual thickness lead frames.
  • Referring to FIG. 2, there is shown a [0031] lead frame 1 having a thermal slug 7 secured thereto. The thermal slug 7 is disposed in a cavity 21 in a mold 23 with a space being provided between the sides of the cavity 21 and the thermal slug 7. A chip 6 is secured to the lead frame 1 on the lead frame surface opposed to the slug 7 and directly adjacent to or over the slug. During encapsulation, the encapsulant will travel into the cavity and freeze in the cavity region between the slug 7 and the cavity side wall. This will prevent the further travel of encapsulant over the surface of the thermal slug 7.
  • Referring to FIG. 3, there is shown the [0032] same lead frame 1 and thermal slug 7 as shown in FIG. 2. The mold 25 has a cavity 27 with the thermal slug 7 resting over the cavity. During encapsulation, the encapsulant will travel into the cavity 27 and freeze as it enters the cavity, assuming that the cavity is not filled with encapsulant. In this case, some encapsulant may remain in the cavity 27 when the encapsulated device is removed from the mold.
  • Referring to FIG. 4, there is shown the [0033] same lead frame 1; however, the thermal slug 29 has been altered to have a cavity 31, the edges of the cavity contacting the mold 33. The perimeter of the cavity 31 acts as a barrier to the movement of the encapsulant into the cavity.
  • Referring to FIG. 5, there is shown the [0034] same lead frame 1; however, the thermal slug 37 has been provided with one or a plurality of grooves 39 of the type discussed above with reference to FIGS. 12a to 12 e. The grooves 39 contact the mold 41. During encapsulation, any encapsulant which travels between the mold 41 and the slug 37 is trapped in a groove 39 which surrounds the slug. One or two grooves can be used, this Figure showing both possibilities in part.
  • FIGS. [0035] 6 to 11 show single-piece deep downset thermal pad lead frames (POWER PAD™) with grooves.
  • Referring to FIG. 6, there is shown [0036] lead frame 1 with grooves 45 in the lead frame. The grooves 45 operate against the mold 41 in the same manner as discussed above with reference to FIG. 5.
  • Referring to FIG. 7, there is shown a [0037] lead frame 1 wherein ridges 47 are disposed in the mold 45. Fabrication takes place in the same manner as discussed above with reference to FIG. 4.
  • Referring to FIG. 8, there is shown a [0038] lead frame 1 wherein the grooves 49 are disposed in the mold 51. Fabrication takes place in the same manner as discussed above with reference to FIGS. 5 or 6.
  • Referring to FIG. 9, there is shown a [0039] lead frame 1 with the thermal pad resting over a cavity 55 in the mold 53. Fabrication takes place in the same manner as discussed above with reference to FIG. 3.
  • Referring to FIG. 10, there is shown a [0040] lead frame 1 with the thermal pad resting within a cavity 57 in the mold 59. Fabrication takes place in the same manner as set forth above with reference to FIG. 2.
  • Referring to FIG. 11, there is shown a [0041] lead frame 1 with ridges 61 in the lead frame forming a cavity 63 between the lead frame, the ridges and the mold 65. Fabrication takes place in the same manner as set forth above with reference to FIG. 4.
  • It should be understood that, in all cases wherein an exposed thermal pad lead frame is discussed, this can be replaced with a thermal slug or thickened lead frame. Also, all grooves can have any of the above discussed shapes as well as many other shapes, the stamped “V” shape and etched groove being the easiest to fabricate. [0042]
  • Referring to FIGS. 12[0043] a to 12 e, there are shown typical groove shapes that can be used, FIG. 12a showing a cup-shaped groove obtained by etching. Etched grooves offer great flexibility in a groove flat pattern. The depth and width of the groove are controlled through the photo tool artwork.
  • Shapes obtainable by stamping are shown in FIGS. 12[0044] b to 12 e with FIG. 12b showing a V-shaped groove, FIG. 12c showing a check-shaped groove, FIG. 12d showing a sawtooth-shaped groove, and FIG. 12e showing a square-shaped groove. The sharp square or sawtooth groove is preferred; however, the “V” is the easiest to implement. The balanced “V” groove swells equally on both sides of the groove.
  • FIGS. 13[0045] a to 13 e show design techniques for matching swelling of stamped groove junctures 73 and line segments 71. During design, the groove swelling is projected, and the location of the adjoining grooves 71 is set so that the projected swelling at junctures 73 is equal to that for the longer line segments. The grooves at the ends of the line segments 73 are angled to achieve the desired uniform projected swelling. By building the stamped groove in the line segment, the tooling is made much easier to fabricate and accommodate design changes.
  • FIG. 14 shows the implementation of “stamped” [0046] bleed barrier grooves 43 to provide simple, flexible, economical groove tooling and uniform swelling of line segments and junctures. This is a good high-volume production design that allows the groove segments to sharply follow contour where bleed protection has been determined to be needed.
  • FIG. 15 shows the implementation of “etched” [0047] bleed barrier grooves 41 in a HTQFP package. The groove pattern is placed in the etch lead frame artwork and, hence, results in no added cost or process steps.
  • FIG. 16 illustrates the [0048] tool 1604 in accordance with the teachings of the present invention. The tool 1604 is used to stamp a groove into the lead frame 1602 or, more particularly, the thermal pad of the lead frame 1602. The lead frame is illustrated as element 1602. Additionally, the lead frame 1602 could be a thermal slug. The tool 1604 includes edges 1608 and 1606. These edges 1608 and 1606 form a V-shaped member which is used to form a groove within lead frame 1602. Additionally, the tool 1604 includes shoulder 1610 and shoulder 1612 which are adjacent to edges 1608 and 1606. These shoulders 1610 and 1612 are used to coin swelling of lead frame 1602.
  • FIG. 19 illustrates a [0049] lead frame 1602 after it has had a groove formed within it. The groove 1902 is substantially V-shaped. Typically, lead frames that have a thickness of 8 to 10 mils (b) have a groove depth of approximately 2.5 to 4 mils (a) while lead frames that have a thickness of 5 to 6 mils (b) having a groove depth of approximately 1.5 to 2.5 mils (a).
  • The width of the groove at the surface of the lead frame is 3.0 to 8.0 mils (c). A value of 3 mils minimum for (c) is sufficient to prevent the material from jumping across the groove, which otherwise would prevent the groove from functioning as a barrier. [0050]
  • FIG. 17 illustrates the operation of [0051] tool 1604 of the present invention. FIG. 17a illustrates the tool positioned above lead frame 1602. FIG. 17b illustrates the tool 1604 penetrating the lead frame 1602. As a consequence of the penetration of tool 1604 into lead frame 1602, swell 1702 occurs. FIG. 17c illustrates that the swell 1704 is reduced due to the coining of the tool 1610 and 1612 onto the lead frame. Swell 1702 is flattened to uniform height.
  • FIG. 18 illustrates another [0052] tool 1804 used to create a different shape groove, for example a square or rectangle shaped groove, into lead frame 1802. The tool 1804 has a rectangular projection 1810. Typically, lead frames that have a thickness of 8 to 10 mils (e) have a groove depth of approximately 2.5 to 4 mils (d) while lead frames that have a thickness of 5 to 6 mils (e) have a groove depth of approximately 1.5 to 2.5 mils (d).
  • The width of the groove at the surface of the lead frame is 3.0 to 8.0 mils (dd). A value of 3 mils minimum is sufficient to prevent the material from jumping across the groove, which otherwise would prevent the groove from functioning as a barrier. [0053]
  • Similar to [0054] shoulders 1610 and 1612, the shoulder 1812 and shoulder 1814 are used to coin the lead frame swell 1806. In operation, FIG. 18a illustrates the tool 1804 positioned above the lead frame 1802. The tool 1804 moves downward to penetrate the surface of lead frame 1802. FIG. 18b illustrates the tool 1804 penetrating the lead frame 1802. Swelling 1806 occurs around the protrusion 1810. FIG. 18c illustrates that the tool 1804 has made a square groove and coined the lead frame swell 1806.
  • Though the invention has been described with reference to specific preferred embodiments thereof, many variations and modifications will immediately become apparent to those skilled in the art. It is therefore the intention that the appended claims be interpreted as broadly as possible in view of the prior art to include all such variations and modifications. [0055]

Claims (11)

1. An apparatus for forming a groove in a lead frame comprising:
a tool for forming said groove in said lead frame,
said tool having a shoulder to coin swelling from said lead frame.
2. An apparatus for forming a groove, as in claim 1, wherein said tool includes a V-shaped member.
3. An apparatus for forming a groove, as in claim 1, wherein said tool includes a rectangular-shaped member.
4. An apparatus for forming a groove, as in claim 1, wherein said tool includes a square-shaped member.
5. A method of minimizing bleeding of encapsulant in a semiconductor device which comprises the steps of:
providing a lead frame having a region designed for conducting heat from said lead frame to the external environment;
providing a mold;
forming an encapsulant barrier for surrounding said region designed for conducting heat;
placing said lead frame within said mold with said encapsulant barrier surrounding said region designed for conducting heat; and
incorporating encapsulant into said mold to encapsulate said lead frame, said encapsulant barrier preventing said encapsulant from bleeding over said region within said mold,
wherein said encapsulant barrier is one of a groove or ridge at least 1.5 mils deep at the surface of the lead frame on one side of said lead frame.
6. The method of claim 5, wherein said region designed for conducting heat includes an exposed thermal pad.
7. The method of claim 5, wherein said region is a highly thermally conductive thickened region of said lead frame, a thermal slug, or an exposed single-piece lead frame pad.
8. The method of claim 5, wherein said encapsulant barrier is a groove and wherein said groove has one of rounded or chamfered corners or a swell-controlled abutment.
9. A system for minimizing bleeding of encapsulant in a semiconductor device which comprises:
a lead frame having a region designed for conducting heat from said lead frame to the external environment;
a mold;
an encapsulant barrier surrounding said region designed for conducting heat;
said lead frame disposed within said mold with said encapsulant barrier surrounding said region designed for conducting heat; and
encapsulant incorporated into said mold encapsulating said lead frame, said encapsulant barrier preventing said encapsulant from bleeding over said region within said mold.
10. The system of claim 9, wherein said encapsulant barrier is one of a groove or ridge at least 1.5 mils deep at the surface of said lead frame on one side of said lead frame.
11. A method of minimizing bleeding of encapsulant in a semiconductor device which comprises the steps of:
providing a lead frame having a region designed for conducting heat from said lead frame to the external environment;
providing a mold;
forming an encapsulant barrier for surrounding said region designed for conducting heat;
placing said lead frame within said mold with said encapsulant barrier surrounding said region designed for conducting heat; and
incorporating encapsulant into said mold to encapsulate said lead frame, said encapsulant barrier preventing said encapsulant from bleeding over said region within said mold,
wherein said encapsulant barrier is one of a groove or ridge at least 1.5 mils deep at the surface of the lead frame.
US09/862,067 2000-08-22 2001-05-21 Lead frame tooling design for bleed barrier groove Abandoned US20020047185A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US09/862,067 US20020047185A1 (en) 2000-08-22 2001-05-21 Lead frame tooling design for bleed barrier groove

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64354200A 2000-08-22 2000-08-22
US09/862,067 US20020047185A1 (en) 2000-08-22 2001-05-21 Lead frame tooling design for bleed barrier groove

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US64354200A Division 2000-08-22 2000-08-22

Publications (1)

Publication Number Publication Date
US20020047185A1 true US20020047185A1 (en) 2002-04-25

Family

ID=24581247

Family Applications (2)

Application Number Title Priority Date Filing Date
US09/862,067 Abandoned US20020047185A1 (en) 2000-08-22 2001-05-21 Lead frame tooling design for bleed barrier groove
US09/862,009 Expired - Lifetime US6465274B2 (en) 2000-08-22 2001-05-21 Lead frame tooling design for bleed barrier groove

Family Applications After (1)

Application Number Title Priority Date Filing Date
US09/862,009 Expired - Lifetime US6465274B2 (en) 2000-08-22 2001-05-21 Lead frame tooling design for bleed barrier groove

Country Status (1)

Country Link
US (2) US20020047185A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030127711A1 (en) * 2002-01-09 2003-07-10 Matsushita Electric Industrial Co., Ltd. Lead frame, method for manufacturing the same, resin-encapsulated semiconductor device and method for manufacturing the same
US20090014851A1 (en) * 2007-07-10 2009-01-15 Choi Yeonho Fusion quad flat semiconductor package

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4523138B2 (en) * 2000-10-06 2010-08-11 ローム株式会社 Semiconductor device and lead frame used therefor
JP4372508B2 (en) * 2003-10-06 2009-11-25 ローム株式会社 Lead frame manufacturing method, semiconductor device manufacturing method using the same, semiconductor device, and portable device and electronic device including the same
MY136216A (en) * 2004-02-13 2008-08-29 Semiconductor Components Ind Method of forming a leadframe for a semiconductor package
US20050224925A1 (en) * 2004-04-01 2005-10-13 Peter Chou Lead frame having a tilt flap for locking molding compound and semiconductor device having the same
WO2019110096A1 (en) 2017-12-06 2019-06-13 Osram Opto Semiconductors Gmbh Lead frame, method for manufacturing a lead frame and semiconductor device with a lead frame

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5557144A (en) * 1993-01-29 1996-09-17 Anadigics, Inc. Plastic packages for microwave frequency applications
US6058602A (en) * 1998-09-21 2000-05-09 Integrated Packaging Assembly Corporation Method for encapsulating IC packages with diamond substrate
US6001672A (en) * 1997-02-25 1999-12-14 Micron Technology, Inc. Method for transfer molding encapsulation of a semiconductor die with attached heat sink

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030127711A1 (en) * 2002-01-09 2003-07-10 Matsushita Electric Industrial Co., Ltd. Lead frame, method for manufacturing the same, resin-encapsulated semiconductor device and method for manufacturing the same
US8193091B2 (en) * 2002-01-09 2012-06-05 Panasonic Corporation Resin encapsulated semiconductor device and method for manufacturing the same
US20090014851A1 (en) * 2007-07-10 2009-01-15 Choi Yeonho Fusion quad flat semiconductor package
US7977774B2 (en) * 2007-07-10 2011-07-12 Amkor Technology, Inc. Fusion quad flat semiconductor package

Also Published As

Publication number Publication date
US6465274B2 (en) 2002-10-15
US20020025598A1 (en) 2002-02-28

Similar Documents

Publication Publication Date Title
US6611047B2 (en) Semiconductor package with singulation crease
US7119421B2 (en) Quad flat non-leaded package comprising a semiconductor device
US7247927B2 (en) Leadframe alteration to direct compound flow into package
US6798047B1 (en) Pre-molded leadframe
EP0862211A2 (en) Semiconductor apparatus and method for fabricating the same
KR20080027920A (en) Semiconductor device
KR101017533B1 (en) Miniature moldlocks for heatsink or flag for an overmolded plastic package
US9355994B2 (en) Build-up package for integrated circuit devices, and methods of making same
US20180122731A1 (en) Plated ditch pre-mold lead frame, semiconductor package, and method of making same
US6341549B2 (en) Trimming apparatus having punches with air flow routes for removal of gate scraps
US6465274B2 (en) Lead frame tooling design for bleed barrier groove
US20040046267A1 (en) Semiconductor package having a die pad with downward extended tabs
US6686652B1 (en) Locking lead tips and die attach pad for a leadless package apparatus and method
JP2857648B2 (en) Electronic component manufacturing method
US6401765B1 (en) Lead frame tooling design for exposed pad features
US20070031996A1 (en) Packaged integrated circuit having a heat spreader and method therefor
US6316829B1 (en) Reinforced semiconductor package
JP6695166B2 (en) Lead frame and method for manufacturing semiconductor package
KR100819794B1 (en) Lead-frame and method for manufacturing semi-conductor package using such
KR100244721B1 (en) Semiconductor package
KR100253708B1 (en) Semiconductor package and method for manufacture thereof
KR970010671B1 (en) Plastic mold package having semiconductor heat sink
KR0141945B1 (en) Semiconductor package and leadframe with heat sink
JP2001135768A (en) Electronic component and method of manufacturing the same
JPH039538A (en) Resin seal metal mold for semiconductor device

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION