US20050189331A1 - Laser ablation nozzle assembly - Google Patents
Laser ablation nozzle assembly Download PDFInfo
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- US20050189331A1 US20050189331A1 US10/673,856 US67385603A US2005189331A1 US 20050189331 A1 US20050189331 A1 US 20050189331A1 US 67385603 A US67385603 A US 67385603A US 2005189331 A1 US2005189331 A1 US 2005189331A1
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- Prior art keywords
- nozzle
- window
- laser beam
- nozzle assembly
- channel
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
- B23K26/1436—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for pressure control
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
- B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
- B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
Definitions
- This invention relates generally to a laser ablation system and in particular to a laser ablation nozzle assembly.
- UV laser ablation and in particular ultraviolet (“UV”) laser ablation is widely used, for example, to remove materials from substrates.
- materials may be inorganic or organic (e.g., photo-resists and polymers) and often these to-be removed materials are in thin-film form coated on a substrate.
- materials are removed using laser ablation to produce a via hole so that there is electrical contact between a top conductive layer and a bottom conductive layer through the via hole.
- materials are removed from areas of a thin-film electronic device using laser ablation so that those areas can be used to encapsulate the electronic device.
- an inorganic substrate e.g., a glass substrate
- organic layers e.g., photo-resist layers or polymer layers
- the resulting electronic device is encapsulated by mating a cover/encapsulating sheet (e.g., metal cans and glass sheets) with the substrate by gluing the two together with, for example, a UV-cure material.
- a cover/encapsulating sheet e.g., metal cans and glass sheets
- the bonding of the glue to the substrate when certain organic layers are present on the substrate is not good and hence laser ablation is used to remove the organic layers from the substrate to allow for better bonding between the cover/encapsulating sheet and the substrate.
- laser ablation is used where an inorganic substrate (e.g. a glass substrate) is coated with organic layers (e.g.; photo-resist layers or polymer layers) and the resulting electronic device is encapsulated with a sputtered or evaporated organic and/or inorganic material. Bonding between the encapsulating material and the substrate when the organic layers are present on the substrate is not good and hence laser ablation is used to remove the organic layers from the substrate to allow for better bonding between the encapsulating material and the substrate. Materials may also be removed from areas on the electronic device which when exposed to humidity and oxygen cause corrosion.
- organic layers e.g.; photo-resist layers or polymer layers
- Laser ablation systems that perform the above functions are commercially available from, for example, Resonetics Corporation of Nashua, N.H., or Exitech Limited of Oxford, England.
- FIG. 1 shows a prior art laser ablation system 103 .
- the laser ablation system 103 includes a nozzle assembly 134 that includes a nozzle 113 and a window 122 .
- the nozzle 113 has a top end and a bottom end.
- the window 122 is on the top end of the nozzle 113 and the bottom end of the nozzle is in close proximity to a target 110 (e.g., a substrate) on which the materials (e.g., polymers, photo-resists, and thin films) that are to be laser ablated reside.
- a laser beam 125 enters the nozzle 113 by passing through a window 122 that is transparent.
- the window 122 may be comprised of transparent materials such as, for example, quartz or glass.
- the laser beam 125 is generated by a laser assembly 131 located above the nozzle 113 .
- the laser assembly 131 includes the laser, laser optics, and other components used to generate and position the laser beam 125 .
- the window 122 protects the laser optics and other components within the laser assembly 131 from debris 116 .
- the laser beam 125 travels from a top end of the nozzle 113 to the bottom end of the nozzle 113 .
- the debris 116 is generated by the laser beam 125 ablating the materials resulting in ejection of the debris 116 from the ablation point.
- Suction pumps can be used to create a vacuum or a gas flow within a vacuum channel 119 to remove the debris 116 by sucking the debris 116 away from the target 110 .
- the debris 116 may be re-deposited on the target 110 around the ablation point, and/or the debris 116 may be re-deposited on the window 122 thus obstructing the laser beam path.
- the re-deposited debris can cause, for example, weaker bonding between the target 110 and the glue, or contaminate the target 110 thus adversely affecting the electrical/optical performance of the resulting electronic device fabricated on the target 110 .
- the debris 116 can cause a reduction in the laser beam intensity at the ablation point, fluctuation in beam intensity at the ablation point resulting in poor uniformity in processing the materials, rapid degradation of the window, permanent window damage, and high costs associated with frequent replacing or cleaning of the window.
- An embodiment of a nozzle assembly within a laser ablation system is described that, for example, reduces debris deposition on a window.
- the embodiment of the nozzle assembly includes a nozzle that has a top end and the window is located on the top end of the nozzle.
- the window has at least one aperture and a laser beam is emitted through a particular one of the at least one aperture.
- An embodiment of a method that, for example, reduces debris deposition at one or more points on a window of a laser ablation system.
- the embodiment of this method includes generating a laser beam, and emitting the laser beam through an aperture at one of the points on the window.
- a nozzle assembly within a laser ablation system that, for example, reduces debris deposition on the window.
- This embodiment of the nozzle assembly includes a nozzle having at least one channel at a top end of the nozzle, a window located on the at least one channel, and a gas that flows through the at least one channel. The gas flow through the at least one channel reduces debris deposition on the window.
- Another embodiment of a method is described that, for example, reduces debris deposition on a window of a laser ablation system.
- This embodiment of the method includes moving a gas through at least one channel that contacts the window to reduce the accumulation of debris on the window.
- a nozzle assembly within a laser ablation system that, for example, reduces the debris being re-deposited onto a target.
- This embodiment of the nozzle assembly includes a nozzle that has a central channel aligned longitudinally and through which a laser beam travels from a top end of the nozzle to a bottom end of the nozzle.
- the nozzle assembly also includes a window located on the top end of the nozzle. In this embodiment, the central channel is threaded.
- FIG. 1 shows a prior art laser ablation system.
- FIG. 2 shows a first embodiment of a nozzle assembly within a laser ablation system.
- FIG. 3 shows a second embodiment of a nozzle assembly within a laser ablation system.
- FIG. 4 shows a third embodiment of a nozzle assembly within a laser ablation system.
- FIG. 5 shows an embodiment of a threaded central channel according to the present invention.
- FIG. 6 shows a fourth embodiment of a nozzle assembly within a laser ablation system.
- a laser ablation system includes a first embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target.
- the nozzle assembly includes a nozzle having a top end, and a window placed on the top end of the nozzle.
- the window includes one or more apertures and the laser beam is emitted through one of those apertures.
- Another laser ablation system includes a second embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target.
- the nozzle assembly includes a nozzle having one or more channels at a top end of the nozzle.
- the nozzle assembly also includes a window that is placed on the one or more channels. A gas flows through the one or more channels and that gas flow reduces debris deposition on the window.
- Yet another laser ablation system includes a third embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target.
- the nozzle assembly includes a nozzle that has a central channel aligned longitudinally through which said laser beam travels from a top end of said nozzle to a bottom end of said nozzle. A window is placed on the top end of the nozzle.
- the central channel of the nozzle is threaded.
- FIG. 2 shows a first embodiment of a nozzle assembly 231 within a laser ablation system 203 .
- a laser beam 125 travels through the nozzle assembly 231 to remove materials on a target 110 .
- the target 100 can be coated with electrically and/or optically active organic materials such as, for example, conductive polymers and/or conjugated polymers, molecules, dentrimers, oligomers, fluorescents, or phosphorescents.
- the resulting electronic device can be, for example, an organic thin-film transistor, a light detector, a solar cell, or an organic light emitting device (“OLED”) (the OLEDs can be used in, for example, signs, displays or as the light source elements of a light source).
- OLED organic light emitting device
- the nozzle assembly 231 includes a nozzle 213 and a window 222 .
- the nozzle 213 has a top end and a bottom end.
- the window 222 is on the top end of the nozzle 213 and the bottom end of the nozzle is in close proximity to a target 110 on which the materials (e.g., polymers, photo-resists, and thin films) that are to be laser ablated reside.
- the nozzle 213 may have any shape such as, for example, a cone (as shown in FIG. 2 ), an inverted cone, a triangle, or a cylinder.
- the laser beam 125 enters the nozzle 213 through the window 222 .
- the laser beam 125 is generated by a laser assembly located above the nozzle assembly 231 .
- the window 222 protects the laser optics and other components within the laser assembly from debris 116 .
- the window 222 can be comprised of transparent materials such as quartz or glass.
- the window 222 can be comprised of opaque materials such as an opaque metal or plastic or a coated material such as quartz or glass with a coating.
- the window 222 includes an aperture 234 and the laser beam 125 is emitted through the aperture 234 .
- the aperture 234 can be of any size.
- the diameter of the aperture 234 can be greater than or equal to the diameter of the laser beam 125 to minimize the loss of the laser beam's 225 intensity by allowing the laser beam 125 to pass through unimpeded.
- the diameter of the aperture 234 can be less than the diameter of the laser beam 125 so that the aperture 234 acts as a beam mask to further limit or define the laser beam dimensions.
- the aperture 234 can of any shape.
- the aperture can have a circular shape (as shown in FIG. 2 ), a square shape, or a rectangular shape.
- the aperture 234 can be mechanically operated to change its size or shape depending on the process to be performed.
- the window 222 may include more than one aperture.
- the additional apertures can be covered with a transparent material.
- the additional apertures can be used, for example, to provide illumination or optical viewing.
- an adjustable window e.g., a sliding or rotatable window
- the window can be adjusted such that the laser beam passes through one of the other apertures when the previous aperture becomes too dirty and/or damaged.
- the laser beam 125 travels from a top end of the nozzle 213 to the bottom end of the nozzle 213 through a central channel 228 .
- the debris 116 is generated by the laser beam 125 ablating the materials resulting in ejection of the debris 116 from the ablation point.
- Suction pumps can be used to create a vacuum or gas flow within a vacuum channel 219 to remove the debris 116 by sucking the debris 116 away from the target 110 . Gas entering from the bottom end of the nozzle 213 and/or from the aperture 234 on the window 222 are pumped out through the vacuum channel 219 creating a gas flow that removes the debris 116 .
- the term “channel” includes, for example, a slit, a slot, an opening, a hole, a gap, or a chamber.
- the channel can have various geometrical shapes such as, for example, a rectangular shape (as shown in FIG. 2 ), a circular shape, or an oval shape.
- FIG. 3 shows a second embodiment of a nozzle assembly 340 within a laser ablation system 303 .
- the laser beam 125 is emitted through the nozzle assembly 340 to remove materials on the target 110 .
- the nozzle assembly 340 includes a nozzle 313 and a window 322 .
- the nozzle 313 has a top end and a bottom end.
- a channel 337 is at the top end of the nozzle 313 . In this configuration of this embodiment, only one channel is used, however, in other embodiments, multiple channels can be used to pass a gas 346 across the window 322 .
- the window 322 is placed on the channel 337 such that the window 322 is in contact with the channel 337 .
- the bottom end of the nozzle is in close proximity to a target 110 on which the materials that are to be laser ablated reside.
- the nozzle 313 may have any shape such as, for example, a cone (as shown in FIG. 3 ), an inverted cone, a triangle, or a cylinder.
- the laser beam 125 enters the nozzle 313 through the window 322 .
- the window 322 can have no aperture, or one or more apertures. If the window 422 includes one or more apertures, then those apertures can be any shape or size.
- a gas 346 moves through the channel 337 and the flow of the gas 346 across or through the window 322 reduces debris accumulation on the window 322 .
- the gas 346 includes a gas or a mixture of gasses that can carry debris away, that is used in the ablation process to prevent contamination of the resulting electronic device, or that assist in the ablation of material from the substrate.
- the gas 346 includes, for example, air, dry air, nitrogen, argon or a mixture of these gasses.
- the gas 346 is evacuated (e.g., pumped out) from the nozzle 313 through an exit channel 343 .
- only one exit channel is used, however, in other configurations multiple exit channels can be used to evacuate the gas 346 from the nozzle 313 .
- These exit channels can be placed anywhere on the side of the nozzle 313 .
- the channels guide the gas 346 directly to the point where the laser beam passes through the window 322 in order to reduce the amount of debris deposition at this point.
- the window 322 has an aperture and the gas 346 may or may not flow through the aperture (the gas flow through the aperture is in addition to the gas flow across the window 322 ).
- the laser beam 125 travels from a top end of the nozzle 313 to the bottom end of the nozzle 313 through a central channel 328 .
- the debris 116 is generated by the laser beam 125 ablating the materials resulting in ejection of the debris 116 from the ablation point.
- Suction pumps can be used to create a vacuum within a vacuum channel 319 to remove the debris 116 by sucking the debris 116 away from the target 110 .
- only one vacuum channel is used, however, in other configurations, multiple vacuum channels can be used and these vacuum channels can be placed anywhere on the nozzle 313 .
- the debris 116 and the debris deposition at the window 322 can be removed through the same channel or same channels if multiple channels are used.
- FIG. 4 shows a third embodiment of a nozzle assembly 431 within a laser ablation system 403 .
- a laser beam 125 travels through the nozzle assembly 431 to remove materials on the target 110 .
- the nozzle assembly 431 includes a nozzle 413 and a window 422 .
- the nozzle 413 has a top end and a bottom end.
- the window 422 is on the top end of the nozzle 413 and the bottom end of the nozzle 413 is in close proximity to the target 110 on which the materials that are to be laser ablated reside.
- the nozzle 413 may have any shape such as, for example, a cone (as shown in FIG. 4 ), an inverted cone, a triangle, or a cylinder.
- the laser beam 125 enters the nozzle 413 through the window 422 .
- the laser beam 125 travels from the top end of the nozzle 413 to the bottom end of the nozzle 413 through a central channel that is threaded (i.e., a threaded central channel 428 ).
- the threaded central channel 428 is formed by machining threads to the central channel.
- FIG. 5 shows an embodiment of the threaded central channel 428 according to the present invention.
- a thread pitch 440 is the distance between two adjacent threads of the threaded central channel 428 .
- a thread depth 452 is the depth of one of the threads of the threaded central channel 428 .
- a flank angle 443 is the angle between two adjacent threads of the threaded central channel 428 .
- a channel length 449 is the length of the threaded central channel 428 .
- a channel diameter 446 (or major diameter) is the outside diameter of the male threads of the threaded central channel 428 . All of the above parameters of the threaded central channel 428 can be modified to change the flow created within the threaded central channel 428 .
- the threads are rounded (e.g., each of the threads has a semicircular shape rather than a triangular shape).
- the vacuum channel 419 is angled such that there is a smooth transition from the threads of the central channel to the vacuum channel 419 (i.e., an angle 455 between a thread of the central channel and the vacuum channel 419 is equal to the flank angle 443 ).
- the vacuum channel 419 is a smooth continuation of the threaded central channel 428 so as to reduce any points or areas that create turbulence.
- the transition from the threads of the central channel to the vacuum channel 419 is not smooth (i.e., the angle 455 between the thread of the central channel and the vacuum channel 419 is not equal to the flank angle 443 ).
- a diameter of the vacuum channel 419 is greater than the thread pitch 440 (as shown in FIG. 5 ); alternatively, the diameter of the vacuum channel 419 can be the same or close to the thread pitch 440 .
- the window 422 can be transparent or opaque.
- the window 422 can have no aperture, or one or more apertures. If the window 422 includes apertures, then those one or more apertures can be any shape or size. In this configuration of this embodiment, only one vacuum channel is used, however, in other configurations, multiple vacuum channels can be used and these vacuum channels can be placed anywhere on the side of the nozzle 413 .
- FIG. 6 shows a fourth embodiment of a nozzle assembly 540 within a laser ablation system 503 .
- the nozzle assembly 540 includes a nozzle 513 and a window 422 .
- the nozzle 513 has a top end and a bottom end.
- a threaded channel 537 is at the top end of the nozzle 513 .
- only one channel is used, however, in other configurations, multiple channels can be used to pass a gas 546 across the window 422 .
- the window 422 is placed on the threaded channel 537 such that the window 422 is in contact with the threaded channel 537 .
- the bottom end of the nozzle is in close proximity to a target 110 on which the materials that are to be laser ablated reside.
- the nozzle 513 may have any shape such as, for example, a cone (as shown in FIG. 6 ), an inverted cone, a triangle, or a cylinder.
- a gas 546 moves through the threaded channel 537 and the flow of the gas 546 across the window 422 reduces debris accumulation on the window 422 .
- the threaded channel 537 is formed by machining threads to that channel. By using the threaded channel 537 , a flow is created that better captures more of the debris 116 across the window 422 resulting in better removal of that debris from the window 422 .
- the gas 546 entering the threaded channel 537 is pumped out through an exit channel 543 and because of the threads, the gas being pumped out creates a cork-screw type flow that better removes the debris across the window 422 .
- the gas 546 includes a gas or a mixture of gasses that can carry debris away, that is used in the ablation process to prevent contamination of the resulting electronic device, or that assist in the ablation of material from the substrate.
- the gas 546 includes, for example, air, dry air, nitrogen, argon or a mixture of these gasses.
- only one exit channel is used, however, in other configurations multiple exit channels can be used to evacuate the gas 546 from the nozzle 513 . These exit channels can be placed anywhere on the side of the nozzle 513 .
- a threaded central channel 528 is used in the nozzle 513 .
- the threads of the central channel provide the benefits described earlier.
- a non-threaded central channel is used within the nozzle 513 .
- only one vacuum channel is used, however, in other configurations, multiple vacuum channels can be used and these vacuum channels can be placed anywhere on the side of the nozzle 513 .
- the thread parameters (e.g., the thread pitch 440 and the thread depth 452 ) of the channel used to reduce debris accumulation at the window 422 can be the same or differ from the thread parameters of the channel that removes the debris 116 (e.g., the threaded central channel 528 ).
- the thread parameters of these channels are adjusted to optimize the gas flow, reduce the turbulence, and optimize debris removal.
Abstract
A laser ablation system includes a first embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having a top end, and a window placed on the top end of the nozzle. The window includes one or more apertures and the laser beam is emitted through one of those apertures. Another laser ablation system includes a second embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having one or more channels at a top end of the nozzle. The nozzle assembly also includes a window that is placed on the one or more channels. A gas flows through the one or more channels and that gas flow reduces debris deposition on the window. Yet another laser ablation system includes a third embodiment of a nozzle assembly that includes a nozzle that has a central channel aligned longitudinally through which said laser beam travels from a top end of said nozzle to a bottom end of said nozzle. In this embodiment, the central channel of the nozzle is threaded.
Description
- 1. Field of the Invention
- This invention relates generally to a laser ablation system and in particular to a laser ablation nozzle assembly.
- 2. Description of the Related Art
- Laser ablation and in particular ultraviolet (“UV”) laser ablation is widely used, for example, to remove materials from substrates. Such materials may be inorganic or organic (e.g., photo-resists and polymers) and often these to-be removed materials are in thin-film form coated on a substrate. For example, materials are removed using laser ablation to produce a via hole so that there is electrical contact between a top conductive layer and a bottom conductive layer through the via hole. In another example, materials are removed from areas of a thin-film electronic device using laser ablation so that those areas can be used to encapsulate the electronic device. In this case, an inorganic substrate (e.g., a glass substrate) is coated with organic layers (e.g., photo-resist layers or polymer layers) and the resulting electronic device is encapsulated by mating a cover/encapsulating sheet (e.g., metal cans and glass sheets) with the substrate by gluing the two together with, for example, a UV-cure material. Often, however, the bonding of the glue to the substrate when certain organic layers are present on the substrate is not good and hence laser ablation is used to remove the organic layers from the substrate to allow for better bonding between the cover/encapsulating sheet and the substrate.
- In yet another example, laser ablation is used where an inorganic substrate (e.g. a glass substrate) is coated with organic layers (e.g.; photo-resist layers or polymer layers) and the resulting electronic device is encapsulated with a sputtered or evaporated organic and/or inorganic material. Bonding between the encapsulating material and the substrate when the organic layers are present on the substrate is not good and hence laser ablation is used to remove the organic layers from the substrate to allow for better bonding between the encapsulating material and the substrate. Materials may also be removed from areas on the electronic device which when exposed to humidity and oxygen cause corrosion.
- Laser ablation systems that perform the above functions are commercially available from, for example, Resonetics Corporation of Nashua, N.H., or Exitech Limited of Oxford, England.
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FIG. 1 shows a prior artlaser ablation system 103. Thelaser ablation system 103 includes anozzle assembly 134 that includes anozzle 113 and awindow 122. Thenozzle 113 has a top end and a bottom end. Thewindow 122 is on the top end of thenozzle 113 and the bottom end of the nozzle is in close proximity to a target 110 (e.g., a substrate) on which the materials (e.g., polymers, photo-resists, and thin films) that are to be laser ablated reside. Alaser beam 125 enters thenozzle 113 by passing through awindow 122 that is transparent. Thewindow 122 may be comprised of transparent materials such as, for example, quartz or glass. Thelaser beam 125 is generated by alaser assembly 131 located above thenozzle 113. Thelaser assembly 131 includes the laser, laser optics, and other components used to generate and position thelaser beam 125. Thewindow 122 protects the laser optics and other components within thelaser assembly 131 fromdebris 116. Thelaser beam 125 travels from a top end of thenozzle 113 to the bottom end of thenozzle 113. - The
debris 116 is generated by thelaser beam 125 ablating the materials resulting in ejection of thedebris 116 from the ablation point. Suction pumps can be used to create a vacuum or a gas flow within avacuum channel 119 to remove thedebris 116 by sucking thedebris 116 away from thetarget 110. However, even with the vacuum or gas flow, thedebris 116 may be re-deposited on thetarget 110 around the ablation point, and/or thedebris 116 may be re-deposited on thewindow 122 thus obstructing the laser beam path. When thedebris 116 is re-deposited on thetarget 110, the re-deposited debris can cause, for example, weaker bonding between thetarget 110 and the glue, or contaminate thetarget 110 thus adversely affecting the electrical/optical performance of the resulting electronic device fabricated on thetarget 110. When thedebris 116 is re-deposited on thewindow 122, thedebris 116 can cause a reduction in the laser beam intensity at the ablation point, fluctuation in beam intensity at the ablation point resulting in poor uniformity in processing the materials, rapid degradation of the window, permanent window damage, and high costs associated with frequent replacing or cleaning of the window. - Therefore, there is a need to reduce the debris deposition on the window and also to reduce the amount of debris being re-deposited onto the target.
- An embodiment of a nozzle assembly within a laser ablation system is described that, for example, reduces debris deposition on a window. The embodiment of the nozzle assembly includes a nozzle that has a top end and the window is located on the top end of the nozzle. The window has at least one aperture and a laser beam is emitted through a particular one of the at least one aperture.
- An embodiment of a method is described that, for example, reduces debris deposition at one or more points on a window of a laser ablation system. The embodiment of this method includes generating a laser beam, and emitting the laser beam through an aperture at one of the points on the window.
- Another embodiment of a nozzle assembly within a laser ablation system is described that, for example, reduces debris deposition on the window. This embodiment of the nozzle assembly includes a nozzle having at least one channel at a top end of the nozzle, a window located on the at least one channel, and a gas that flows through the at least one channel. The gas flow through the at least one channel reduces debris deposition on the window.
- Another embodiment of a method is described that, for example, reduces debris deposition on a window of a laser ablation system. This embodiment of the method includes moving a gas through at least one channel that contacts the window to reduce the accumulation of debris on the window.
- Yet another embodiment of a nozzle assembly within a laser ablation system is described that, for example, reduces the debris being re-deposited onto a target. This embodiment of the nozzle assembly includes a nozzle that has a central channel aligned longitudinally and through which a laser beam travels from a top end of the nozzle to a bottom end of the nozzle. The nozzle assembly also includes a window located on the top end of the nozzle. In this embodiment, the central channel is threaded.
-
FIG. 1 shows a prior art laser ablation system. -
FIG. 2 shows a first embodiment of a nozzle assembly within a laser ablation system. -
FIG. 3 shows a second embodiment of a nozzle assembly within a laser ablation system. -
FIG. 4 shows a third embodiment of a nozzle assembly within a laser ablation system. -
FIG. 5 shows an embodiment of a threaded central channel according to the present invention. -
FIG. 6 shows a fourth embodiment of a nozzle assembly within a laser ablation system. - A laser ablation system includes a first embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having a top end, and a window placed on the top end of the nozzle. The window includes one or more apertures and the laser beam is emitted through one of those apertures.
- Another laser ablation system includes a second embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having one or more channels at a top end of the nozzle. The nozzle assembly also includes a window that is placed on the one or more channels. A gas flows through the one or more channels and that gas flow reduces debris deposition on the window.
- Yet another laser ablation system includes a third embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle that has a central channel aligned longitudinally through which said laser beam travels from a top end of said nozzle to a bottom end of said nozzle. A window is placed on the top end of the nozzle. In this embodiment, the central channel of the nozzle is threaded.
-
FIG. 2 shows a first embodiment of anozzle assembly 231 within alaser ablation system 203. Alaser beam 125 travels through thenozzle assembly 231 to remove materials on atarget 110. The target 100 can be coated with electrically and/or optically active organic materials such as, for example, conductive polymers and/or conjugated polymers, molecules, dentrimers, oligomers, fluorescents, or phosphorescents. The resulting electronic device can be, for example, an organic thin-film transistor, a light detector, a solar cell, or an organic light emitting device (“OLED”) (the OLEDs can be used in, for example, signs, displays or as the light source elements of a light source). - The
nozzle assembly 231 includes anozzle 213 and awindow 222. Thenozzle 213 has a top end and a bottom end. Thewindow 222 is on the top end of thenozzle 213 and the bottom end of the nozzle is in close proximity to atarget 110 on which the materials (e.g., polymers, photo-resists, and thin films) that are to be laser ablated reside. Thenozzle 213 may have any shape such as, for example, a cone (as shown inFIG. 2 ), an inverted cone, a triangle, or a cylinder. Thelaser beam 125 enters thenozzle 213 through thewindow 222. Thelaser beam 125 is generated by a laser assembly located above thenozzle assembly 231. Thewindow 222 protects the laser optics and other components within the laser assembly fromdebris 116. Thewindow 222 can be comprised of transparent materials such as quartz or glass. Alternatively, thewindow 222 can be comprised of opaque materials such as an opaque metal or plastic or a coated material such as quartz or glass with a coating. - The
window 222 includes anaperture 234 and thelaser beam 125 is emitted through theaperture 234. Theaperture 234 can be of any size. For example, the diameter of theaperture 234 can be greater than or equal to the diameter of thelaser beam 125 to minimize the loss of the laser beam's 225 intensity by allowing thelaser beam 125 to pass through unimpeded. Alternatively, the diameter of theaperture 234 can be less than the diameter of thelaser beam 125 so that theaperture 234 acts as a beam mask to further limit or define the laser beam dimensions. Theaperture 234 can of any shape. For example, the aperture can have a circular shape (as shown inFIG. 2 ), a square shape, or a rectangular shape. Theaperture 234 can be mechanically operated to change its size or shape depending on the process to be performed. Thewindow 222 may include more than one aperture. The additional apertures can be covered with a transparent material. The additional apertures can be used, for example, to provide illumination or optical viewing. In addition, with an adjustable window (e.g., a sliding or rotatable window) and multiple apertures, the window can be adjusted such that the laser beam passes through one of the other apertures when the previous aperture becomes too dirty and/or damaged. - The
laser beam 125 travels from a top end of thenozzle 213 to the bottom end of thenozzle 213 through acentral channel 228. Thedebris 116 is generated by thelaser beam 125 ablating the materials resulting in ejection of thedebris 116 from the ablation point. Suction pumps can be used to create a vacuum or gas flow within avacuum channel 219 to remove thedebris 116 by sucking thedebris 116 away from thetarget 110. Gas entering from the bottom end of thenozzle 213 and/or from theaperture 234 on thewindow 222 are pumped out through thevacuum channel 219 creating a gas flow that removes thedebris 116. In one configuration of this embodiment, only one vacuum channel is used, however, in other configurations, multiple vacuum channels can be used to remove thedebris 116 and these vacuum channels can be placed anywhere on thenozzle 213. As used within the specification and the claims, the term “channel” includes, for example, a slit, a slot, an opening, a hole, a gap, or a chamber. The channel can have various geometrical shapes such as, for example, a rectangular shape (as shown inFIG. 2 ), a circular shape, or an oval shape. -
FIG. 3 shows a second embodiment of anozzle assembly 340 within alaser ablation system 303. Thelaser beam 125 is emitted through thenozzle assembly 340 to remove materials on thetarget 110. Thenozzle assembly 340 includes anozzle 313 and awindow 322. Thenozzle 313 has a top end and a bottom end. Achannel 337 is at the top end of thenozzle 313. In this configuration of this embodiment, only one channel is used, however, in other embodiments, multiple channels can be used to pass agas 346 across thewindow 322. Thewindow 322 is placed on thechannel 337 such that thewindow 322 is in contact with thechannel 337. The bottom end of the nozzle is in close proximity to atarget 110 on which the materials that are to be laser ablated reside. Thenozzle 313 may have any shape such as, for example, a cone (as shown inFIG. 3 ), an inverted cone, a triangle, or a cylinder. Thelaser beam 125 enters thenozzle 313 through thewindow 322. Thewindow 322 can have no aperture, or one or more apertures. If thewindow 422 includes one or more apertures, then those apertures can be any shape or size. - A
gas 346 moves through thechannel 337 and the flow of thegas 346 across or through thewindow 322 reduces debris accumulation on thewindow 322. By reducing the debris accumulation on thewindow 322, there may be less debris on the laser beam path resulting in a greater beam intensity at the ablation point, greater uniformity in processing the materials on thetarget 110, decreased degradation of thewindow 322, and reduced costs resulting from not having to frequently replace or clean thewindow 322. Thegas 346 includes a gas or a mixture of gasses that can carry debris away, that is used in the ablation process to prevent contamination of the resulting electronic device, or that assist in the ablation of material from the substrate. Thegas 346 includes, for example, air, dry air, nitrogen, argon or a mixture of these gasses. Thegas 346 is evacuated (e.g., pumped out) from thenozzle 313 through anexit channel 343. In this configuration of this embodiment, only one exit channel is used, however, in other configurations multiple exit channels can be used to evacuate thegas 346 from thenozzle 313. These exit channels can be placed anywhere on the side of thenozzle 313. - In another configuration, the channels guide the
gas 346 directly to the point where the laser beam passes through thewindow 322 in order to reduce the amount of debris deposition at this point. In yet another configuration, thewindow 322 has an aperture and thegas 346 may or may not flow through the aperture (the gas flow through the aperture is in addition to the gas flow across the window 322). - The
laser beam 125 travels from a top end of thenozzle 313 to the bottom end of thenozzle 313 through acentral channel 328. Thedebris 116 is generated by thelaser beam 125 ablating the materials resulting in ejection of thedebris 116 from the ablation point. Suction pumps can be used to create a vacuum within avacuum channel 319 to remove thedebris 116 by sucking thedebris 116 away from thetarget 110. In one configuration of this embodiment, only one vacuum channel is used, however, in other configurations, multiple vacuum channels can be used and these vacuum channels can be placed anywhere on thenozzle 313. In another configuration, thedebris 116 and the debris deposition at thewindow 322 can be removed through the same channel or same channels if multiple channels are used. -
FIG. 4 shows a third embodiment of anozzle assembly 431 within alaser ablation system 403. Alaser beam 125 travels through thenozzle assembly 431 to remove materials on thetarget 110. Thenozzle assembly 431 includes anozzle 413 and awindow 422. Thenozzle 413 has a top end and a bottom end. Thewindow 422 is on the top end of thenozzle 413 and the bottom end of thenozzle 413 is in close proximity to thetarget 110 on which the materials that are to be laser ablated reside. Thenozzle 413 may have any shape such as, for example, a cone (as shown inFIG. 4 ), an inverted cone, a triangle, or a cylinder. Thelaser beam 125 enters thenozzle 413 through thewindow 422. - The
laser beam 125 travels from the top end of thenozzle 413 to the bottom end of thenozzle 413 through a central channel that is threaded (i.e., a threaded central channel 428). The threadedcentral channel 428 is formed by machining threads to the central channel. By threading the central channel, a less turbulent flow is created that captures more of thedebris 116 resulting in better removal of thedebris 116 and a reduction of the amount ofdebris 116 re-deposited on the materials on thetarget 110 or re-deposited on thewindow 422. The gas entering from the bottom end of thenozzle 413, and/or if thewindow 422 has an aperture, the gas entering from an aperture on thewindow 422, are pumped out through thevacuum channel 419 and because of the threads, the gas being pumped out creates a cork-screw type flow that is less turbulent allowing better removal of the debris from the ablated materials on thetarget 110 and reducing the amount ofdebris 116 re-deposited on thewindow 422. -
FIG. 5 shows an embodiment of the threadedcentral channel 428 according to the present invention. Athread pitch 440 is the distance between two adjacent threads of the threadedcentral channel 428. Athread depth 452 is the depth of one of the threads of the threadedcentral channel 428. Aflank angle 443 is the angle between two adjacent threads of the threadedcentral channel 428. Achannel length 449 is the length of the threadedcentral channel 428. A channel diameter 446 (or major diameter) is the outside diameter of the male threads of the threadedcentral channel 428. All of the above parameters of the threadedcentral channel 428 can be modified to change the flow created within the threadedcentral channel 428. In another configuration of this embodiment, the threads are rounded (e.g., each of the threads has a semicircular shape rather than a triangular shape). - In this configuration of this embodiment, the
vacuum channel 419 is angled such that there is a smooth transition from the threads of the central channel to the vacuum channel 419 (i.e., anangle 455 between a thread of the central channel and thevacuum channel 419 is equal to the flank angle 443). Specifically, thevacuum channel 419 is a smooth continuation of the threadedcentral channel 428 so as to reduce any points or areas that create turbulence. In another configuration, the transition from the threads of the central channel to thevacuum channel 419 is not smooth (i.e., theangle 455 between the thread of the central channel and thevacuum channel 419 is not equal to the flank angle 443). - In one configuration of this embodiment, a diameter of the
vacuum channel 419 is greater than the thread pitch 440 (as shown inFIG. 5 ); alternatively, the diameter of thevacuum channel 419 can be the same or close to thethread pitch 440. - Referring back to
FIG. 4 , thewindow 422 can be transparent or opaque. Thewindow 422 can have no aperture, or one or more apertures. If thewindow 422 includes apertures, then those one or more apertures can be any shape or size. In this configuration of this embodiment, only one vacuum channel is used, however, in other configurations, multiple vacuum channels can be used and these vacuum channels can be placed anywhere on the side of thenozzle 413. -
FIG. 6 shows a fourth embodiment of anozzle assembly 540 within alaser ablation system 503. Thenozzle assembly 540 includes anozzle 513 and awindow 422. Thenozzle 513 has a top end and a bottom end. A threadedchannel 537 is at the top end of thenozzle 513. In this configuration of this embodiment, only one channel is used, however, in other configurations, multiple channels can be used to pass agas 546 across thewindow 422. Thewindow 422 is placed on the threadedchannel 537 such that thewindow 422 is in contact with the threadedchannel 537. The bottom end of the nozzle is in close proximity to atarget 110 on which the materials that are to be laser ablated reside. Thenozzle 513 may have any shape such as, for example, a cone (as shown inFIG. 6 ), an inverted cone, a triangle, or a cylinder. - A
gas 546 moves through the threadedchannel 537 and the flow of thegas 546 across thewindow 422 reduces debris accumulation on thewindow 422. The threadedchannel 537 is formed by machining threads to that channel. By using the threadedchannel 537, a flow is created that better captures more of thedebris 116 across thewindow 422 resulting in better removal of that debris from thewindow 422. Thegas 546 entering the threadedchannel 537 is pumped out through anexit channel 543 and because of the threads, the gas being pumped out creates a cork-screw type flow that better removes the debris across thewindow 422. Thegas 546 includes a gas or a mixture of gasses that can carry debris away, that is used in the ablation process to prevent contamination of the resulting electronic device, or that assist in the ablation of material from the substrate. Thegas 546 includes, for example, air, dry air, nitrogen, argon or a mixture of these gasses. In this configuration of this embodiment, only one exit channel is used, however, in other configurations multiple exit channels can be used to evacuate thegas 546 from thenozzle 513. These exit channels can be placed anywhere on the side of thenozzle 513. - In one configuration of this embodiment, a threaded
central channel 528 is used in thenozzle 513. The threads of the central channel provide the benefits described earlier. In another configuration, a non-threaded central channel is used within thenozzle 513. In one configuration of this embodiment, only one vacuum channel is used, however, in other configurations, multiple vacuum channels can be used and these vacuum channels can be placed anywhere on the side of thenozzle 513. - The thread parameters (e.g., the
thread pitch 440 and the thread depth 452) of the channel used to reduce debris accumulation at the window 422 (e.g., the threaded channel 537) can be the same or differ from the thread parameters of the channel that removes the debris 116 (e.g., the threaded central channel 528). The thread parameters of these channels are adjusted to optimize the gas flow, reduce the turbulence, and optimize debris removal. - As any person of ordinary skill in the art of laser ablation will recognize from the description, figures, and examples that modifications and changes can be made to the preferred embodiments of the invention without departing from the scope of the invention defined by the following claims.
Claims (11)
1-6. (canceled)
7. Within a laser ablation system, a method to reduce debris deposition at one or more points on a window, comprising:
generating a laser beam; and
emitting said laser beam through an aperture at a particular one of said one or more points on said window.
8. The method of claim 7 wherein a diameter of said aperture is greater than or equal to a diameter of said laser beam.
9. The method of claim 7 wherein a diameter of said aperture is less than a diameter of said laser beam.
10-20. (canceled)
21. A method to produce a nozzle assembly of a laser ablation system, comprising:
inserting an aperture in a window;
depositing said window on a top end of a nozzle,
wherein a laser beam is emitted through said aperture of said window.
22. The method of claim 21 wherein a diameter of said aperture is greater than or equal to a diameter of said laser beam.
23. The method of claim 21 wherein a diameter of said aperture is less than a diameter of said laser beam.
24. The method of claim 21 wherein said window is transparent.
25. The method of claim 21 wherein said window is opaque.
26. The method of claim 21 wherein a shape of said aperture is any one of a circle, a square, or a rectangle.
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- 2002-12-20 US US10/325,066 patent/US6683277B1/en not_active Expired - Lifetime
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2003
- 2003-09-29 US US10/673,856 patent/US20050189331A1/en not_active Abandoned
- 2003-09-29 US US10/673,588 patent/US6797919B1/en not_active Expired - Lifetime
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US7302309B2 (en) * | 2004-04-26 | 2007-11-27 | Hewlett-Packard Development Company, L.P. | Laser micromachining methods and systems |
US20050240299A1 (en) * | 2004-04-26 | 2005-10-27 | Graeme Scott | Laser micromachining methods and systems |
US20070278195A1 (en) * | 2004-11-10 | 2007-12-06 | Synova Sa | Method and Device for Generating a Jet of Fluid for Material Processing and Fluid Nozzle for Use in Said Device |
US10016845B2 (en) * | 2004-11-10 | 2018-07-10 | Synova Sa | Method and device for generating a jet of fluid for material processing and fluid nozzle for use in said device |
US20110220143A1 (en) * | 2008-04-18 | 2011-09-15 | Plasmatreat Gmbh | Device for Treating an Inner Surface of a Work Piece |
US20100252541A1 (en) * | 2009-03-31 | 2010-10-07 | Ats Automation Tooling Systems Inc. | Laser processing nozzle |
US8642919B2 (en) | 2009-03-31 | 2014-02-04 | Ats Automation Tooling Systems Inc. | Laser processing nozzle |
US8241945B2 (en) | 2010-02-08 | 2012-08-14 | Suniva, Inc. | Solar cells and methods of fabrication thereof |
US20110132448A1 (en) * | 2010-02-08 | 2011-06-09 | Suniva, Inc. | Solar cells and methods of fabrication thereof |
US20130104827A1 (en) * | 2010-05-27 | 2013-05-02 | Pascal Woerner | Laser-induced spark ignition for an internal combustion engine |
US11298772B2 (en) * | 2018-09-26 | 2022-04-12 | Kabushiki Kaisha Toshiba | Welding apparatus and nozzle device |
US11465238B2 (en) * | 2019-02-13 | 2022-10-11 | Bystronic Laser Ag | Gas guide, laser cutting head and laser cutting machine |
WO2022266534A1 (en) * | 2021-06-18 | 2022-12-22 | Ipg Photonics Corporation | Material processing functionality in handheld laser system |
Also Published As
Publication number | Publication date |
---|---|
US6797919B1 (en) | 2004-09-28 |
US6683277B1 (en) | 2004-01-27 |
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