US20050194098A1

US20050194098A1 - Cast design for plasma chamber cooling

Info

Publication number: US20050194098A1
Application number: US11/110,221
Authority: US
Inventors: Steve Dillon; Justin Mauck
Original assignee: Advanced Energy Industries Inc
Current assignee: Advanced Energy Industries Inc
Priority date: 2003-03-24
Filing date: 2005-04-20
Publication date: 2005-09-08

Abstract

A plasma generation device has a plasma containment vessel comprising integral cast cooling elements. A casting mold is placed over a foundation, leaving at least one surface of the foundation exposed. At least one cooling tube is then placed over the foundation, and a casting material is then poured into the casting mold over the foundation and the cooling tubes. The foundation portion of the assembly is machined and anodized to become an interior and vacuum surface of a plasma chamber with integral cooling elements.

Description

RELATED APPLICATIONS

This is a continuation-in-part of U.S. patent application Ser. No. 10/395,585, filed Mar. 24, 2003.

BACKGROUND

1. Field of the Invention
This invention relates generally to plasma containment vessels, and more specifically to plasma chambers comprising integral cast cooling elements.
2. Brief Description of the Prior Art
A chamber for containment of a subatmospheric plasma typically requires three key features. First, the chamber must be able to seal a vacuum created within the chamber, which may be in the 10⁻⁹Torr range. Second, the interfaces and materials of the chamber need to be able to withstand the heat and chemistry of the plasma environment. Finally, plasma chambers ordinarily must be cooled for extraction of the internal heat generated by the plasma. Aluminum alloys are often materials of choice for construction of interior vacuum surfaces of plasma chambers as they are vacuum compatible and can be anodized to offer the necessary resistance from corrosive gases and from the plasma itself. Cooling may be accomplished for example by providing copper water tubing in contact with or impressed into the aluminum walls of the chamber. One limitation of this approach is the attachment between the cooling tubes and the metal plate. If the tubes are soldered, brazed, welded or epoxied to the aluminum plate, then the attachment point will limit the flow of heat from the plate to the cooling tubes.
Alternatively, attempts have been made to cast cooling tubes inside of the walls of a containment vessel to eliminate the degradation in heat transfer through the soldered, brazed, welded or epoxied connection. Typical cast materials, however, are not appropriate for many applications. In vacuum chambers, the porosity of cast materials can hamper the establishment of a vacuum, significantly slowing production times. Cast materials can also become impregnated with undesired impurities, and typically cannot be anodized to a level that is acceptable for corrosion resistance in a plasma environment.

SUMMARY OF THE INVENTION

The invention features a plasma generation device having a plasma containment vessel comprising integral cast cooling elements. In one aspect of the invention, a core material serves as a foundation for a cast cooling assembly. The core material is selected for its suitability as a vacuum containment material and for its tolerance to a plasma environment. A cooling assembly is then cast upon the foundation material using a casting mold. In one embodiment, the cooling assembly comprises metallic cooling tubes embedded in a casting disposed conformally to the exterior surface of the chamber wall. After the cooling assembly is cast upon the core material, the solid chamber wall assembly is machined and anodized to become an interior vacuum surface of a chamber with integral cooling elements.
In another aspect of the invention, one or more of the integral cooling elements of a plasma chamber vessel serves as a coldplate for mounting of heat generating electrical components. The cooling element thus serves to extract heat from both the plasma as well as from electrical components of the plasma generation device.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings in which like reference numerals refer to similar elements and in which:
FIG. 1 illustrates a cast coldplate within general embodiments of the invention;
FIG. 2 is a flowchart illustrating a method for making a cast coldplate within general embodiments of the invention;
FIG. 3 illustrates a vacuum chamber using a cast coldplate of general embodiments of the invention on one side of the vacuum chamber; and
FIG. 4 illustrates a vacuum chamber using a cast coldplate of general embodiments of the invention on multiple sides of the vacuum chamber.

DETAILED DESCRIPTION

FIG. 1 illustrates a cast coldplate applicable to embodiments of the invention. The cast coldplate 100 has a foundation 102 with a top surface 104, a bottom surface 106, and side surfaces 108, 110. The foundation can be made of any of a variety of materials. In one embodiment, the material is selected for use as an interior wall of a plasma chamber. Such materials include machined aluminum and aluminum alloys such as aluminum 6601.
The coldplate also has a casted component 112 with at least one cooling tube 114, 116, 118, 120 within it. The cooling tubes can be completely or partially surrounded by the casted component, depending upon the application. The cooling tubes can be made of conventional copper water piping or of any of a variety of other materials depending upon the cooling fluid used and the heat exchange properties that are desired. Alternatively, the cooling device is a heat pipe device. An aluminum structure surrounding copper pipes provides for good heat conduction for many applications.
FIG. 2 illustrates a method for making a cast coldplate. The method begins at block 200 and continues to block 202 where a casting mold is placed over the foundation 102, surrounding at least the top surface 104 of the foundation 102. In illustrated embodiments of the invention (see FIG. 1), the casting mold surrounds the top surface 104 of the foundation 102, as well as the side surfaces 108, 110 of the foundation. However, the casting mold may alternatively surround just the top surface 104 of the foundation 102.
At block 204, cooling tubes 114, 116, 118, 120 are placed over the foundation 102. Cooling tubes 114, 116, 118, 120 that are placed over the foundation 102 may be placed directly on the foundation material or suspended off the surface of the foundation material using a fixture. At block 206, casting material is poured over the foundation 102 and the cooling tubes 114, 116, 118, 120 to create a layer of casting material. The casting material, in one embodiment is poured so that is completely surrounds the exterior of each tube. This maximizes the heat transfer surface. The number and placement of the cooling tubes will depend on the particular application and a variety of factors such as heat flow demands, fluid flow and pressure drop tolerances. Coolant, such as water, may then be run through the cooling tubes 114, 116, 118, 120 to keep the cast coldplate cool, thereby keeping components, such as electronics mounted to the plate, cool. The method ends at block 208.
In another aspect of the invention, the foundations of one or more cast coldplates are used as an inner wall of a vacuum chamber, for example, a plasma chamber. The foundation material is particularly well suited for use as a chamber wall and the cast material, in intimate contact with the foundation conducts heat away from the foundation and toward the cooling pipes.
In one embodiment, the bottom surface of the foundation is placed over a top surface of a vacuum chamber, such that one side of the vacuum chamber comprises the bottom surface 106 of the foundation 102, as illustrated in FIG. 3. The vacuum chamber 300 comprises a cast coldplate 100 on one side of the vacuum chamber, a housing 302 such as aluminum or aluminum alloy on a plurality of sides of the vacuum chamber, and a chamber 304 in which plasma is maintained. The housing 302 and bottom surface 106 of the foundation 102 of the cast coldplate 100 surround the chamber 304 in which plasma is maintained. The coldplate also serves as a heat sink upon which components of the power supply, match, or other electronics of the plasma generation device are mounted. In another embodiment, as illustrated in FIG. 4, the vacuum chamber 300 comprises a cast coldplate 100 on each of its sides.
As plasma moves through the vacuum chamber 304, the plasma source body 302 and cast coldplate 100 increase in temperature. To keep the vacuum chamber 300 cool, water is run through the cooling tubes 114, 116, 118, 120.
The plasma source body 302 and foundation 102 may comprise a metal such as aluminum, copper, nickel, or steel, or a coated metal such as anodized aluminum or nickel-plated aluminum. The casting material used to create the casted component 112 of the cast coldplate 100 may comprise an aluminum alloy, or a tin alloy, for example.
In the description above, for the purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. In other instances, well-known circuits, structures, devices, and techniques have been shown in block diagram form or without detail in order not to obscure the understanding of this description.
The present invention includes various steps, but steps can be added to or deleted from any of the methods and signal or messages can be added or subtracted from any of the described steps or control lines without departing from the basic scope of the present invention. It will be apparent to those skilled in the art that many further modifications and adaptations can be made. The particular embodiments are not provided to limit the invention but to illustrate it. The scope of the present invention is not to be determined by the specific examples provided above but only by the claims below.
Furthermore, while the invention has been illustrated in the context of a coldplate used in a plasma chamber, the invention is not so limited. It can be applied to coldplates in general, as well as to any application in which a component needs cooling and requires that a specific foundation material surface be exposed.
It should also be appreciated that reference throughout this specification to “one embodiment” or “an embodiment” means that a particular feature may be included in the practice of the invention. Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various inventive aspects. This method of disclosure, however, is not to be interpreted as reflecting an intention that the claimed invention requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the Detailed Description are hereby expressly incorporated into this Detailed Description, with each claim standing on its own as a separate embodiment of this invention.

Claims

1. A plasma generation device having a plasma chamber, the plasma chamber comprising:

a metallic chamber wall having an interior surface that confines a plasma and an exterior surface; and

one or more integral cast cooling assemblies formed upon the exterior surface of the chamber wall, the one or more integral cast cooling assemblies comprising at least one cooling device embedded in a casting material disposed conformally to the exterior surface of the chamber wall.

2. The device of claim 1 wherein the casting material is a metal alloy.

3. The device of claim 1 wherein the at least one cooling device comprises metal tubing.

4. The device of claim 3 wherein the metal tubing is copper water piping.

5. The device of claim 1 wherein the at least one cooling device is a heat pipe.

6. The device of claim 1 wherein the casting material completely surrounds the at least one cooling device.

7. The device of claim 1 wherein the at least one cooling device contains a cooling fluid that extracts heat from the chamber wall.

8. The device of claim 1 wherein at least one of the one or more integral cast cooling assemblies is a coldplate of the plasma generation device.

9. The device of claim 8 wherein electrical components of the plasma generation device are mounted upon the coldplate.

10. The device of claim 1 wherein the interior surface of the chamber wall is anodized for protection from the plasma.