US20060040499A1 - In situ surface contaminant removal for ion implanting - Google Patents

In situ surface contaminant removal for ion implanting Download PDF

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Publication number
US20060040499A1
US20060040499A1 US10/922,710 US92271004A US2006040499A1 US 20060040499 A1 US20060040499 A1 US 20060040499A1 US 92271004 A US92271004 A US 92271004A US 2006040499 A1 US2006040499 A1 US 2006040499A1
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Prior art keywords
wafer
chamber
exposing
implant chamber
implant
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US10/922,710
Inventor
Steve Walther
Sandeep Mehta
Naushad Variam
Ukyo Jeong
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Varian Semiconductor Equipment Associates Inc
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Varian Semiconductor Equipment Associates Inc
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Priority to US10/922,710 priority Critical patent/US20060040499A1/en
Assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. reassignment VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: JEONG, UKYO, MEHTA, SANDEEP, VARIAM, NAUSHAD, WALTHER, STEVE
Priority to JP2007528008A priority patent/JP2008511139A/en
Priority to KR1020077004635A priority patent/KR20070041595A/en
Priority to CNA2005800275709A priority patent/CN101006198A/en
Priority to PCT/US2005/029387 priority patent/WO2006023637A2/en
Priority to TW094128295A priority patent/TWI268547B/en
Publication of US20060040499A1 publication Critical patent/US20060040499A1/en
Priority to US12/099,420 priority patent/US7544959B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0055—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ion implantation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0071—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by heating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/002—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ultraviolet light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32412—Plasma immersion ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02046—Dry cleaning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/335—Cleaning

Definitions

  • the present invention relates generally to ion implantation, and more particularly, to in situ surface contaminant removal for ion implanting.
  • Semiconductor wafers that are to be ion implanted typically have contaminant materials and oxides on the wafer surface. These materials can contaminate the implant process and cause dose non-uniformity and reduced dose retained in the silicon.
  • the invention includes a method and apparatus that introduce, within the ion implant chamber or an isolated chamber in communication therewith, the capability to remove contaminants and oxide surface layers on a wafer surface prior to ion implantation.
  • the mechanisms for removal of contaminants include conducting: a low energy plasma etch, heating the wafer and application of ultraviolet illumination, either in combination or individually.
  • implantation can occur immediately after the cleaning/preparation process without the contamination potential of exposure of the wafer to an external environment.
  • the preparation allows for the removal of surface contaminants, such as water vapor, organic materials and surface oxides.
  • a first aspect of the invention is directed to an ion implanting apparatus comprising: an implant chamber; means for generating ions for implanting a wafer in the chamber; and means for removing contaminants from a surface of the wafer in situ within the implant chamber.
  • a second aspect of the invention is directed to a method of removing contaminants from a surface of a wafer in situ of an ion implant apparatus, the method comprising: placing the wafer in an isolated chamber that is in communication with an implant chamber; and removing contaminants from a surface of the wafer in situ within one of the isolated chamber and the implant chamber.
  • a third aspect of the invention is directed to a method of removing contaminants from a surface of a wafer, the method comprising: placing the wafer in an isolated chamber that is in communication with an implant chamber; and removing contaminants from a surface of the wafer in situ within one of the isolated chamber and the implant chamber by conducting at least one of: exposing the surface to ultraviolet (UV) illumination; heating a platen that holds the wafer in the implant chamber; and controlling a radio frequency (RF) source of the implant chamber to conduct a low energy plasma etch
  • UV ultraviolet
  • RF radio frequency
  • FIG. 1 shows an ion implant apparatus according to a first embodiment of the invention.
  • FIG. 2 shows an ion implant apparatus according to a second embodiment of the invention.
  • FIG. 1 shows an ion implant apparatus 10 according to the invention.
  • Apparatus 10 includes an implant chamber 20 configured to receive a process gas 22 from a gas source 24 .
  • a gas pressure controller 25 may be provided by, for example, a combination of upstream controller and variable position throttle valve 23 .
  • An exhaust port 27 is coupled to one or more vacuum pump(s) 29 .
  • Pressure controller 25 operates to maintain implant chamber 20 pressure to a set value by fixing exhaust conductance and varying process gas 22 flow rate in a feedback loop to allow for changing gas demand.
  • a radio frequency (RF) source 26 is configured to resonate radio frequency currents in a radio frequency antenna 28 , which pass into implant chamber 20 and excite and ionize process gas 22 to generate plasma within the chamber.
  • RF radio frequency
  • RF source 26 is coupled, via an impedance match 42 , to antenna 28 that surrounds implant chamber 20 .
  • RF source 26 can be either pulsed or continuous.
  • Apparatus 10 also includes a platen 46 for holding a semiconductor wafer 48 , to be implanted within implant chamber 20 .
  • ion implant apparatus 10 may function using a glow discharge system in which a pulsed DC voltage (negative) is applied to the cathode (platen 46 ) as one would do anyway for implant. Under suitable conditions of this wafer bias voltage and process gas 22 pressure (e.g., for ⁇ 5 kV and 15 mTorr of BF 3 ) a glow discharge plasma is created. This is a pulsed plasma as the wafer bias is a pulsed signal.
  • the pulsed wafer bias voltage is typically applied to platen 46 with the other conductive chamber components connected to electrical ground.
  • the plasma may also be created by biasing a third electrode synchronously with the wafer bias, which may be used in cases where the wafer bias is too small to create the plasma.
  • the pulsed DC voltage applied depends on the desired implant energy and process gas 22 used. In this case, RF source 26 is not necessary.
  • the above-described plasma immersion ion implanter devices may be replaced by, for example, a low energy beamline implanter (not shown).
  • an isolated chamber 50 that is sealed for transport of wafers 48 to implant chamber 20 is also included. Isolated chamber 50 can include any now known or later developed load locks or wafer handler chambers.
  • the invention also includes a number of mechanisms for removing contaminants from a surface 60 of wafer 48 .
  • a first mechanism includes exposing wafer 48 to ultraviolet light.
  • one or more ultraviolet illumination devices 70 may be employed for exposing surface 60 to ultraviolet (UV) illumination.
  • a UV illumination device 72 is mounted within implant chamber 20 .
  • a UV illumination device 74 is mounted externally of process chamber 20 and transmits UV light through a window 76 of process chamber 20 .
  • a UV illumination device 78 may also be mounted to transmit UV light into isolated chamber 50 so that a wafer 48 may be de-contaminated during transport.
  • UV light may also be produced by RF source 26 resonating radio frequency currents to produce a UV emitting plasma, or by the above-described glow discharge system producing a UV emitting plasma.
  • Removal of contaminants under any of the UV light exposure embodiments also preferably includes exposing wafer 48 to a vacuum of better than 1 ⁇ 10 ⁇ 5 Torr (pressure equal to that value or less) by one or more vacuum pump(s) 29 .
  • a vacuum may also be applied therein in a conventional fashion.
  • a second mechanism for removing contaminants from surface 60 includes, as shown in FIG. 1 , heating wafer 48 .
  • this mechanism is implemented by heating platen 46 so as to heat wafer 48 in implant chamber 20 .
  • platen 46 may be provided with a heater 80 such as one or more embedded heating coils.
  • This mechanism may also include a temperature controller 82 for heater 80 including a thermocouple 84 and a heater controller 86 .
  • a gas portal 88 may also be provided for introducing a gas 90 between platen 46 and wafer 48 to improve heat transfer.
  • Gas 90 flow may be controlled by heater controller 86 by controlling a valve 92 .
  • Removal of contaminants by heating wafer 48 also preferably includes exposing wafer 48 to a high vacuum of better than 1 ⁇ 10 ⁇ 5 Torr (pressure equal to that value or less) by one or more vacuum pump(s) 29 .
  • a third mechanism for removing contaminants includes, as shown in FIG. 1 , controlling RF source 26 to conduct a low energy plasma etch 98 .
  • a pulsed glow discharge approach may be implemented that conducts a low energy plasma etch 98 .
  • low energy plasma etch 98 uses no greater than ⁇ 1000 V of wafer bias, with a suitable etching process gas (e.g., NF 3 , SiF 4 , BF 3 , F 2 , H 2 etc.).
  • a suitable etching process gas e.g., NF 3 , SiF 4 , BF 3 , F 2 , H 2 etc.
  • low energy plasma etch 98 may use one of: BF 3 , NF 3 and F 2 as a plasma gas source for a subsequent BF 3 plasma implantation.
  • the duration process may be controlled by monitoring the wafer pulsing current to detect the change in secondary electron emission as the wafer surface is altered.
  • a method of removing contaminants from a surface of a wafer 46 includes placing wafer 48 in isolated chamber 50 that is in communication with implant chamber 20 , and then removing contaminants from surface 60 of wafer 48 in situ within one of isolated chamber 50 and implant chamber 20 .
  • the removing step includes conducting at least one of: exposing surface 60 to ultraviolet (UV) illumination; heating wafer 48 ; and controlling RF source 26 of implant chamber 20 to conduct low energy plasma etch 98 .
  • UV ultraviolet

Abstract

Methods and apparatus that introduce, within the ion implant chamber or an isolated chamber in communication therewith, the capability to remove contaminants and oxide surface layers on a wafer surface prior to ion implantation, are disclosed. The mechanisms for removal of contaminants include conducting: a low energy plasma etch, heating the wafer and application of ultraviolet illumination, either in combination or individually. As a result, implantation can occur immediately after the cleaning/preparation process without the contamination potential of exposure of the wafer to an external environment. The preparation allows for the removal of surface contaminants, such as water vapor, organic materials and surface oxides.

Description

    BACKGROUND OF THE INVENTION
  • 1. Technical Field
  • The present invention relates generally to ion implantation, and more particularly, to in situ surface contaminant removal for ion implanting.
  • 2. Related Art
  • Semiconductor wafers that are to be ion implanted typically have contaminant materials and oxides on the wafer surface. These materials can contaminate the implant process and cause dose non-uniformity and reduced dose retained in the silicon.
  • Conventional surface preparation procedures include pre-cleaning techniques that are external to an ion implantation chamber. One of these approaches includes stripping of native oxide from the wafer, and exposing the wafer to a high vacuum environment to allow water vapor to evaporate off of the wafer surface. Unfortunately, externally removing oxides still allows for oxide re-growth as the wafer is transported to the implant tool. Accordingly, the performance of devices on the wafer may be limited by the external environment in which they are cleaned. In addition, since the external environment is typically not controlled, the repeatability of the transport conditions also may affect performance.
  • In view of the foregoing, there is a need in the art for a way to prepare a wafer surface for ion implantation in situ.
    • SUMMARY OF THE INVENTION
  • The invention includes a method and apparatus that introduce, within the ion implant chamber or an isolated chamber in communication therewith, the capability to remove contaminants and oxide surface layers on a wafer surface prior to ion implantation. The mechanisms for removal of contaminants include conducting: a low energy plasma etch, heating the wafer and application of ultraviolet illumination, either in combination or individually. As a result, implantation can occur immediately after the cleaning/preparation process without the contamination potential of exposure of the wafer to an external environment. The preparation allows for the removal of surface contaminants, such as water vapor, organic materials and surface oxides.
  • A first aspect of the invention is directed to an ion implanting apparatus comprising: an implant chamber; means for generating ions for implanting a wafer in the chamber; and means for removing contaminants from a surface of the wafer in situ within the implant chamber.
  • A second aspect of the invention is directed to a method of removing contaminants from a surface of a wafer in situ of an ion implant apparatus, the method comprising: placing the wafer in an isolated chamber that is in communication with an implant chamber; and removing contaminants from a surface of the wafer in situ within one of the isolated chamber and the implant chamber.
  • A third aspect of the invention is directed to a method of removing contaminants from a surface of a wafer, the method comprising: placing the wafer in an isolated chamber that is in communication with an implant chamber; and removing contaminants from a surface of the wafer in situ within one of the isolated chamber and the implant chamber by conducting at least one of: exposing the surface to ultraviolet (UV) illumination; heating a platen that holds the wafer in the implant chamber; and controlling a radio frequency (RF) source of the implant chamber to conduct a low energy plasma etch
  • The foregoing and other features of the invention will be apparent from the following more particular description of embodiments of the invention.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • The embodiments of this invention will be described in detail, with reference to the following figures, wherein like designations denote like elements, and wherein:
  • FIG. 1 shows an ion implant apparatus according to a first embodiment of the invention.
  • FIG. 2 shows an ion implant apparatus according to a second embodiment of the invention.
    • DETAILED DESCRIPTION OF THE INVENTION
  • Referring to the attached drawings, FIG. 1 shows an ion implant apparatus 10 according to the invention. Apparatus 10 includes an implant chamber 20 configured to receive a process gas 22 from a gas source 24. A gas pressure controller 25 may be provided by, for example, a combination of upstream controller and variable position throttle valve 23. An exhaust port 27 is coupled to one or more vacuum pump(s) 29. Pressure controller 25 operates to maintain implant chamber 20 pressure to a set value by fixing exhaust conductance and varying process gas 22 flow rate in a feedback loop to allow for changing gas demand. A radio frequency (RF) source 26 is configured to resonate radio frequency currents in a radio frequency antenna 28, which pass into implant chamber 20 and excite and ionize process gas 22 to generate plasma within the chamber. RF source 26 is coupled, via an impedance match 42, to antenna 28 that surrounds implant chamber 20. RF source 26 can be either pulsed or continuous. Apparatus 10 also includes a platen 46 for holding a semiconductor wafer 48, to be implanted within implant chamber 20. In an alternative embodiment, ion implant apparatus 10 may function using a glow discharge system in which a pulsed DC voltage (negative) is applied to the cathode (platen 46) as one would do anyway for implant. Under suitable conditions of this wafer bias voltage and process gas 22 pressure (e.g., for −5 kV and 15 mTorr of BF3) a glow discharge plasma is created. This is a pulsed plasma as the wafer bias is a pulsed signal. The pulsed wafer bias voltage is typically applied to platen 46 with the other conductive chamber components connected to electrical ground. The plasma may also be created by biasing a third electrode synchronously with the wafer bias, which may be used in cases where the wafer bias is too small to create the plasma. The pulsed DC voltage applied depends on the desired implant energy and process gas 22 used. In this case, RF source 26 is not necessary. In another alternative embodiment, the above-described plasma immersion ion implanter devices may be replaced by, for example, a low energy beamline implanter (not shown). In any case, an isolated chamber 50 that is sealed for transport of wafers 48 to implant chamber 20 is also included. Isolated chamber 50 can include any now known or later developed load locks or wafer handler chambers.
  • The invention also includes a number of mechanisms for removing contaminants from a surface 60 of wafer 48.
  • A first mechanism includes exposing wafer 48 to ultraviolet light. In this case, one or more ultraviolet illumination devices 70 may be employed for exposing surface 60 to ultraviolet (UV) illumination. In one embodiment, as shown in FIG. 1, a UV illumination device 72 is mounted within implant chamber 20. However, in another embodiment, as shown in FIG. 2, a UV illumination device 74 is mounted externally of process chamber 20 and transmits UV light through a window 76 of process chamber 20. In another embodiment, a UV illumination device 78 may also be mounted to transmit UV light into isolated chamber 50 so that a wafer 48 may be de-contaminated during transport. Alternatively, to the above-described embodiments that transmit UV light into implant chamber 20, UV light may also be produced by RF source 26 resonating radio frequency currents to produce a UV emitting plasma, or by the above-described glow discharge system producing a UV emitting plasma. Removal of contaminants under any of the UV light exposure embodiments also preferably includes exposing wafer 48 to a vacuum of better than 1×10−5 Torr (pressure equal to that value or less) by one or more vacuum pump(s) 29. When UV light is used in isolated chamber 50, a vacuum may also be applied therein in a conventional fashion.
  • A second mechanism for removing contaminants from surface 60 includes, as shown in FIG. 1, heating wafer 48. In one embodiment, this mechanism is implemented by heating platen 46 so as to heat wafer 48 in implant chamber 20. It should be recognized, however, that a variety of other mechanisms may be implemented to heat wafer 48, and the invention should not be limited other than as set out in the attached claims. In the former case, platen 46 may be provided with a heater 80 such as one or more embedded heating coils. This mechanism may also include a temperature controller 82 for heater 80 including a thermocouple 84 and a heater controller 86. A gas portal 88 may also be provided for introducing a gas 90 between platen 46 and wafer 48 to improve heat transfer. Gas 90 flow may be controlled by heater controller 86 by controlling a valve 92. Removal of contaminants by heating wafer 48 also preferably includes exposing wafer 48 to a high vacuum of better than 1×10−5 Torr (pressure equal to that value or less) by one or more vacuum pump(s) 29.
  • A third mechanism for removing contaminants includes, as shown in FIG. 1, controlling RF source 26 to conduct a low energy plasma etch 98. Alternatively, a pulsed glow discharge approach may be implemented that conducts a low energy plasma etch 98. In either case, low energy plasma etch 98 uses no greater than −1000 V of wafer bias, with a suitable etching process gas (e.g., NF3, SiF4, BF3, F2, H2 etc.). In one example, low energy plasma etch 98 may use one of: BF3, NF3 and F2 as a plasma gas source for a subsequent BF3 plasma implantation. The duration process may be controlled by monitoring the wafer pulsing current to detect the change in secondary electron emission as the wafer surface is altered.
  • A method of removing contaminants from a surface of a wafer 46 according to the invention includes placing wafer 48 in isolated chamber 50 that is in communication with implant chamber 20, and then removing contaminants from surface 60 of wafer 48 in situ within one of isolated chamber 50 and implant chamber 20. The removing step includes conducting at least one of: exposing surface 60 to ultraviolet (UV) illumination; heating wafer 48; and controlling RF source 26 of implant chamber 20 to conduct low energy plasma etch 98.
  • While this invention has been described in conjunction with the specific embodiments outlined above, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art. Accordingly, the embodiments of the invention as set forth above are intended to be illustrative, not limiting. Various changes may be made without departing from the spirit and scope of the invention as defined in the following claims.

Claims (33)

1. An ion implanting apparatus comprising:
an implant chamber;
means for generating ions for implanting a wafer in the chamber; and
means for removing contaminants from a surface of the wafer in situ within the implant chamber.
2. The apparatus of claim 1, wherein the contaminant removing means includes means for exposing the surface to ultraviolet (UV) illumination.
3. The apparatus of claim 2, wherein the exposing means is mounted externally of the implant chamber and includes a UV illumination device to transmit UV light through a window of the implant chamber.
4. The apparatus of claim 2, wherein the exposing means includes one of an internally-mounted UV illumination device and means for producing an ion plasma configured to emit UV light.
5. The apparatus of claim 4, wherein the producing means includes one of:
a) a radio frequency (RF) source configured to resonate radio frequency currents in a radio frequency antenna to pass into the implant chamber and excite and ionize a process gas to generate plasma within the implant chamber; and
b) a direct current (DC) pulse generator for generating a pulsed DC voltage in a wafer cathode to excite and ionize the process gas to generate plasma within the implant chamber.
6. The apparatus of claim 2, wherein the exposing means further includes means for exposing the wafer to a vacuum of better than 1×10−5 Torr.
7. The apparatus of claim 1, wherein the contaminant removing means includes a heater for heating the wafer.
8. The apparatus of claim 7, further comprising a temperature controller for the heater.
9. The apparatus of claim 7, further comprising a gas portal for introducing a gas between a platen that holds the wafer and the wafer to improve heat transfer.
10. The apparatus of claim 1, wherein the contaminant removing means includes means for conducting a low energy plasma etch.
11. The apparatus of claim 10, wherein the low energy plasma etch uses no greater than −1000 V of wafer bias.
12. The apparatus of claim 10, wherein the low energy plasma etch includes using one of:
BF3, NF3 and F2 as a plasma for a subsequent BF3 plasma implantation.
13. The apparatus of claim 10, wherein the ion generating means includes at least one of:
a) a radio frequency (RF) source configured to resonate radio frequency currents in a radio frequency antenna to pass into the implant chamber and excite and ionize a process gas to generate plasma within the implant chamber; and
b) a direct current (DC) pulse generator for generating a pulsed DC voltage in a wafer cathode to excite and ionize the process gas to generate plasma within the implant chamber.
14. A method of removing contaminants from a surface of a wafer in situ of an ion implant apparatus, the method comprising:
placing the wafer in an isolated chamber that is in communication with an implant chamber; and
removing contaminants from a surface of the wafer in situ within one of the isolated chamber and the implant chamber.
15. The method of claim 14, wherein the contaminant removing step includes exposing the surface to ultraviolet (UV) illumination.
16. The method of claim 15, wherein the exposing step includes exposing the surface to UV light through a window of one of the isolated chamber and the implant chamber.
17. The method of claim 15, wherein the exposing step includes exposing the surface to one of an internally-mounted UV illumination device and means for producing a UV light emitting plasma.
18. The method of claim 17, wherein the producing means includes one of:
a) a radio frequency (RF) source configured to resonate radio frequency currents in a radio frequency antenna to pass into the implant chamber and excite and ionize a process gas to generate plasma within the implant chamber; and
b) a direct current (DC) pulse generator for generating a pulsed DC voltage in a wafer cathode to excite and ionize the process gas to generate plasma within the implant chamber.
19. The method of claim 15, wherein the exposing step further includes exposing the wafer to a vacuum of better than 1×10−5 Torr.
20. The method of claim 14, wherein the contaminant removing step includes heating the wafer.
21. The method of claim 20, wherein the heating step includes heating a platen that holds the wafer in the implant chamber, and further comprising controlling a temperature of the heating.
22. The method of claim 20, further comprising introducing a gas between the platen and the wafer to improve heat transfer.
23. The method of claim 14, wherein the contaminant removing step includes controlling a radio frequency (RF) source of the implant chamber to conduct a low energy plasma etch.
24. The method of claim 23, wherein the low energy plasma etch uses no greater than −1000 V wafer bias.
25. The method of claim 23, wherein the low energy plasma etch includes using one of: BF3, NF3 or F2 as a plasma for a subsequent BF3 plasma implantation.
26. A method of removing contaminants from a surface of a wafer, the method comprising:
placing the wafer in an isolated chamber that is in communication with an implant chamber; and
removing contaminants from a surface of the wafer in situ within one of the isolated chamber and the implant chamber by conducting at least one of:
exposing the surface to ultraviolet (UV) illumination;
heating a platen that holds the wafer in the implant chamber; and
controlling a radio frequency (RF) source of the implant chamber to conduct a low energy plasma etch.
27. The method of claim 26, wherein the exposing step includes exposing the surface to UV light through a window of one of the isolated chamber and the process chamber.
28. The method of claim 26, wherein the exposing step includes exposing the surface to one of an internally-mounted UV illumination device and means for producing UV light emitting plasma.
29. The method of claim 28, wherein the producing means includes one of:
a) a radio frequency (RF) source configured to resonate radio frequency currents in a radio frequency antenna to pass into the implant chamber and excite and ionize a process gas to generate plasma within the implant chamber; and
b) a direct current (DC) pulse generator for generating a pulsed DC voltage in a wafer cathode to excite and ionize the process gas to generate plasma within the implant chamber.
30. The method of claim 26, wherein the heating step further includes controlling a temperature of the heating.
31. The method of claim 26, wherein the heating step further includes introducing a gas between the platen and the wafer to improve heat transfer.
32. The method of claim 26, wherein the controlling step includes using no greater than 0.1 V.
33. The method of claim 26, wherein the controlling step includes using one of: BF3, NF3 or F2 as a source gas for a subsequent BF3 plasma implantation.
US10/922,710 2004-08-20 2004-08-20 In situ surface contaminant removal for ion implanting Abandoned US20060040499A1 (en)

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JP2007528008A JP2008511139A (en) 2004-08-20 2005-08-18 Apparatus and method for in situ removal of surface contaminants for ion implantation
KR1020077004635A KR20070041595A (en) 2004-08-20 2005-08-18 In situ surface contaminant removal for ion implanting
CNA2005800275709A CN101006198A (en) 2004-08-20 2005-08-18 In situ surface contaminant removal for ion implanting
PCT/US2005/029387 WO2006023637A2 (en) 2004-08-20 2005-08-18 In situ surface contaminant removal for ion implanting
TW094128295A TWI268547B (en) 2004-08-20 2005-08-19 In situ surface contaminant removal for ion implanting
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