US20060163962A1 - Magnetic bearing device - Google Patents
Magnetic bearing device Download PDFInfo
- Publication number
- US20060163962A1 US20060163962A1 US10/500,572 US50057204A US2006163962A1 US 20060163962 A1 US20060163962 A1 US 20060163962A1 US 50057204 A US50057204 A US 50057204A US 2006163962 A1 US2006163962 A1 US 2006163962A1
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- US
- United States
- Prior art keywords
- magnetic bearing
- cooling wind
- flow
- air flow
- rotary shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
- F16C37/005—Cooling of bearings of magnetic bearings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/12—Arrangements for cooling or lubricating parts of the machine
- B23Q11/126—Arrangements for cooling or lubricating parts of the machine for cooling only
- B23Q11/127—Arrangements for cooling or lubricating parts of the machine for cooling only for cooling motors or spindles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/047—Details of housings; Mounting of active magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/083—Structural association with bearings radially supporting the rotary shaft at both ends of the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/02—Arrangements for cooling or ventilating by ambient air flowing through the machine
- H02K9/04—Arrangements for cooling or ventilating by ambient air flowing through the machine having means for generating a flow of cooling medium
- H02K9/06—Arrangements for cooling or ventilating by ambient air flowing through the machine having means for generating a flow of cooling medium with fans or impellers driven by the machine shaft
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Motor Or Generator Cooling System (AREA)
Abstract
In order to obtain a magnetic bearing apparatus in which a large cooling effect is exerted by a simple configuration, fins 15 which for man air flow in a rearward direction are disposed in a rear portion and outer diameter of a rotary shaft 1, a generator 16 which converts an air flow produced by rotation of the fins 15 to a compressed vortex flow, and which has an axial through hole is fixed with being separated from the fins 15 by an appropriate gap, and a tube 20 in which the inner diameter is larger than the diameter of the through hole 19 of the generator 16, and which has a control valve 21 at the rear end is provided in rear of the generator 16. Cooling wind is produced by a driving force of the rotary shaft 1. Cooling wind flow paths 22 through which the cooling wind is to be passed, and which axially elongate are formed in the rotary shaft 1.
Description
- The present invention relates to a magnetic bearing apparatus which is to be used in a spindle unit of a machine tool or the like, and more particularly to a cooling structure for such a magnetic bearing apparatus.
- Usually, a magnetic bearing apparatus is used for the primary purpose of realizing ultrahigh speed rotation which is hardly realized by a rolling bearing apparatus that is conventionally widely used. As compared with a rolling bearing apparatus, in a magnetic bearing apparatus, ultrahigh speed rotation is enabled, but it is usual that the main unit of the bearing apparatus generates a large amount of heat because of an increased number of electrical components. In a conventional countermeasure for cooling a magnetic bearing apparatus, for example, air is supplied from the outside into a unit by a compressor or the like, and the supplied air flow is passed over the surface of a rotary shaft to conduct a cooling operation. Such a cooling structure for a magnetic bearing apparatus is disclosed in, for example, JP-A-8-61366.
- In the above-described cooling structure, however, the air flow which is close to the ambient temperature is simply circulated from the outside into the unit. Therefore, the structure has problems in that the cooling performance is not excellent, and that apparatuses (such as a compressor) for supplying the air flow from the outside into the unit are additionally required and hence the scale of cooling facilities becomes large.
- The invention has been conducted in order to solve the above problems. It is an object of the invention to obtain a magnetic bearing apparatus in which a large cooling effect can be exerted by a simple configuration.
- In order to attain the object, the invention is configured so as to comprise: cooling wind producing means for producing cooling wind of a low temperature with using a driving force of a rotary member; and a cooling wind flow path through which the low-temperature cooling wind produced by the cooling wind producing means is to flow into a magnetic bearing apparatus.
- The cooling wind producing means comprises: high-speed air flow producing means for producing a high-speed air flow with using the driving force of the rotary member; converting means for converting the high-speed air flow produced by the high-speed air flow producing means, to a vortex flow; an air flow path through which the high-speed vortex flow converted by the converting means is to flow; and a control valve which is disposed on a side of the air flow path opposite to the converting means.
- The low-temperature cooling wind is produced with using ultrahigh speed rotation of the rotary member. Therefore, it is possible to obtain a magnetic bearing apparatus in which a large cooling effect can be exerted by a simple configuration.
- Alternatively, the magnetic bearing apparatus comprises: cooling wind producing means that produces cooling wind of a low temperature, and that has: fins which are disposed on a rotary shaft, and which produces an axial air flow by a driving force of the rotary shaft; a generator which is fixed with forming a predetermined gap with respect to the fins, and which produces a high-speed vortex flow; a tube through which the high-speed vortex flow produced by the generator is to flow; and a control valve which is disposed on a side of the tube opposite to the generator; and a cooling wind flow path through which the low-temperature cooling wind produced by the cooling wind producing means is to flow into the magnetic bearing apparatus.
- The low-temperature cooling wind is produced with using ultrahigh speed rotation of a rotary member. Therefore, it is possible to obtain a magnetic bearing apparatus in which a large cooling effect can be exerted by a simple configuration.
- The cooling wind flow path is disposed in the rotary shaft portion so as to axially elongate.
- Therefore, the rotary shaft portion can be efficiently cooled.
- The cooling wind flow path has: a cooling wind flow path disposed in the case; and a pipe which guides the low-temperature cooling wind to the cooling wind flow path disposed in the case.
- Therefore, not only the rotary shaft portion, but also the whole of the magnetic bearing apparatus can be efficiently cooled.
- Alternatively, the magnetic bearing apparatus comprises: cooling wind producing means that produces cooling wind of a low temperature, and that has: fins which are disposed on an axial magnetic bearing disc, and which produces an air flow directed in an outer radial direction of the axial magnetic bearing disc; a supply port which is positioned in an outer circumferential portion of the fins, and through which the air flow produced by the fins is introduced and ejected as a high-speed air flow in the outer radial direction; a generator which converts the high-speed air flow ejected from the supply port, to a vortex flow; an air flow path through which the high-speed vortex flow produced by the generator is to flow; and a control valve which is disposed on a side of the air flow path opposite to the generator; and a cooling wind flow path through which the low-temperature cooling wind produced by the cooling wind producing means is to flow into the magnetic bearing apparatus.
- The low-temperature cooling wind is produced with using ultrahigh speed rotation of a rotary member. Therefore, it is possible to obtain a magnetic bearing apparatus in which a large cooling effect can be exerted by a simple configuration. Among portions of rotary portions, particularly, the axial magnetic bearing disc has the largest outer diameter, and hence the largest cooling effect is attained as compared with cases where a high-speed vortex flow is produced by other portions.
- A guide portion which guides the low-temperature cooling wind to a rotary shaft portion is disposed.
- The cooling wind flow path has: a cooling wind flow path which is disposed in the case, and through which the low-temperature cooling wind produced by the cooling wind producing means is to flow; a guide plate which guides the cooling wind that has been passed through the cooling flow path, to a rotary shaft portion; and a cooling wind flow path which is disposed in the rotary shaft portion, and through which the cooling wind that has been guided by the guide plate is to axially flow, thereby cooling the rotary shaft portion.
- Therefore, also the rotary shaft portion can be efficiently cooled, and the whole of the magnetic bearing apparatus can be efficiently cooled.
- Alternatively, the magnetic bearing apparatus comprises: cooling wind producing means that produces cooling wind of a low temperature, and that has: fins which are disposed on an axial magnetic bearing disc, and which produces an air flow directed in an outer radial direction of the axial magnetic bearing disc; an air suction port which is positioned in an outer circumferential portion of the fins, and through which the air flow produced by the fins is introduced and ejected as a high-speed air flow in the outer radial direction; an air flow path through which the high-speed air flow ejected from the air suction port is to flow; a generator which converts the high-speed air flow ejected from the air flow path, to a vortex flow; a tube through which the high-speed vortex flow produced by the generator is to flow; and a control valve which is disposed on a side of the tube opposite to the generator; and a cooling wind flow path through which the low-temperature cooling wind produced by the cooling wind producing means is to flow into the magnetic bearing apparatus.
- The low-temperature cooling wind is produced with using ultrahigh speed rotation of a rotary member. Therefore, it is possible to obtain a magnetic bearing apparatus in which a large cooling effect can be exerted by a simple configuration.
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FIG. 1 is a section view showing the whole configuration of a magnetic bearing spindle unit ofEmbodiment 1 of the invention. -
FIGS. 2A-2C are views showing a generator structure to be used in the magnetic bearing spindle unit ofEmbodiment 1 of the invention. -
FIG. 3 is a section view taken along the line X-X′ inFIG. 1 . -
FIG. 4 is a section view showing the whole configuration of a magnetic bearing spindle unit of Embodiment 2 of the invention. -
FIGS. 5A-5C are views showing a generator structure to be used in the magnetic bearing spindle unit of Embodiment 2 of the invention. -
FIG. 6 is a section view showing the whole configuration of a magnetic bearing spindle unit ofEmbodiment 3 of the invention. -
FIGS. 7A and 7B are views showing a generator structure to be used in the magnetic bearing spindle unit ofEmbodiment 3 of the invention. -
FIG. 8 is a section view showing the whole configuration of a magnetic bearing spindle unit ofEmbodiment 4 of the invention. -
FIG. 9 is a section view showing the whole configuration of a magnetic bearing spindle unit of Embodiment 5 of the invention. - Hereinafter,
Embodiment 1 of the invention will be described with reference to FIGS. 1 to 3. -
Embodiment 1 of the invention shows a magnetic bearing spindle unit in which a magnetic bearing apparatus is used in a spindle for rotating a tool.FIG. 1 is a section view showing the whole configuration of the magnetic bearing spindle unit,FIGS. 2A-2C are views which show a generator structure to be used in the magnetic bearing spindle unit, and in whichFIG. 2A is a front view,FIG. 2B is a section view taken along the line Y-Y inFIG. 2A , andFIG. 2C is a rear view ofFIG. 2A , andFIG. 3 is a section view showing a control valve to be used in the magnetic bearing spindle unit, and taken along the line X-X′ inFIG. 1 . - The magnetic bearing spindle unit is configured in the following manner.
- Namely, a front radial magnetic bearing
rotor 2 a which is formed by stacking annular magnetic steel sheets, an axialmagnetic bearing disc 3 made of a magnetic material, a spindle motor rotor 4 (positioned between the axialmagnetic bearing disc 3 and a rear radial magnetic bearingrotor 2 b), and the rear radial magnetic bearingrotor 2 b which is formed by stacking annular magnetic steel sheets are fitted and fixed to arotary shaft 1 which incorporates a tool holder holding mechanism. At the left end of therotary shaft 1, although not shown, a rotary tool is disposed on the toolholder holding mechanism 47 via a tool holder. When the tool holder is to be fixed to the toolholder holding mechanism 47, apushrod 49 is pushed toward the left side of the figure against the pressing force of aspring member 48 by ahydraulic cylinder 45 for attaching and detaching the tool holder, to open a collet-like toolholder holding portion 50 which is positioned in the left end of the figure, and the tool holder is inserted into the opened portion. When the pushing force on thepushrod 49 is then released, a tool is held to the toolholder holding portion 50 by the pushing force of thespring member 48. The toolholder holding mechanism 47 and therotary shaft 1 are enabled by the axial pushing force of thespring member 48 to be integrally rotated. - A front radial
magnetic bearing stator 5 a and a rear radialmagnetic bearing stator 5 b are placed in a radial direction on outer diameter portions of the radialmagnetic bearing rotors rotary shaft 1, with forming an adequate small gap (usually, about 0.5 to 1.0 mm). When energized, the radial magnetic bearingstator 5 a forms four electromagnets around the radial magnetic bearingrotor 2 a. When energized, similarly, the radial magnetic bearingstator 5 b forms four electromagnets around the radial magnetic bearingrotor 2 b. - In the vicinity of the axial
magnetic bearing disc 3 of therotary shaft 1, a pair of axialmagnetic bearing stators magnetic bearing stator 6 a and the opposite-to-load side axialmagnetic bearing stator 6 b) having an annular electromagnet are placed so as to sandwich the axialmagnetic bearing disc 3 with forming an adequate small gap (usually, about 0.5 to 1.0 mm) in an axial direction. The axialmagnetic bearing stators annular collar 27. - In the vicinity of the
spindle motor rotor 4, aspindle motor stator 7 for rotating therotary shaft 1 is placed with forming an adequate small gap in a radial direction from an outer diameter portion of thespindle motor rotor 4. -
Oil jackets magnetic bearing stators spindle motor stator 7, respectively. In the figure, 8 a denotes the oil jacket for cooling the front radial magnetic bearing stator, 8 b denotes the oil jacket for cooling the rear radial magnetic bearing stator, and 9 denotes the oil jacket for cooling the spindle motor stator. - The
rotary shaft 1, the radialmagnetic bearing stators magnetic bearing stators spindle motor stator 7 are housed in acylindrical frame 10 via theoil jackets load side bracket 11 and an opposite-to-load side bracket 12 are attached to the ends of theframe 10, respectively. Also the axialmagnetic bearing stators frame 10. -
Non-contact displacement sensors load side bracket 11 and the opposite-to-load side bracket 12 via an adequate small gap (usually, about 0.5 mm) with respect to therotary shaft 1, respectively. - Protection bearings (also called touchdown bearings) 13 a, 13 b for preventing the unit from being damaged in case of emergency are attached to the
load side bracket 11 and the opposite-to-load side bracket 12 via an adequate small gap (usually, about 0.2 mm) with respect to therotary shaft 1, respectively. Namely, when the magnetic bearing apparatus normally operates, theprotection bearings rotary shaft 1, and, when the magnetic bearing apparatus is out of control due to any cause, are in contact with therotary shaft 1 to receive therotary shaft 1, thereby preventing the unit from being damaged. - The
non-contact displacement sensors rotary shaft 1 are fixed to theload side bracket 11 and the opposite-to-load side bracket 12, respectively. On the basis of output signals of thenon-contact displacement sensors magnetic bearing stators magnetic bearing rotors magnetic bearing stators magnetic bearing disc 3, an adequate magnetic attractive force is generated by a magnetic bearing driver which is not shown, whereby therotary shaft 1 is supported in a non-contact manner at a target position separated from thestators spindle motor stator 7 under the non-contact state, ultrahigh speed rotation (about 70,000 r/min or higher) of therotary shaft 1 is realized. - The number of rotations of the
rotary shaft 1 is detected by an encoder gear secured to therotary shaft 1, and anencoder head 51 secured to the opposite-to-load side bracket 12. The detected number of rotations is fed back to the magnetic bearing driver. - A plurality of
fins 15 for forming an air flow in a rearward direction (to the side opposite to the load) are disposed at regular intervals in a rear portion of therotary shaft 1. A generator (converting means) 16 is fixed to a fixingangle 44 supported by the opposite-to-load side bracket 12, with being separated from thefins 15 by an appropriate gap. -
FIGS. 2A-2C show only thegenerator 16. In thegenerator 16, in order to convert a high-speed air flow which is produced by a synergistic action with thefins 15 to a high-pressure vortex flow, plural fin members (inFIGS. 2A-2C , eight fin members) are formed in such a manner that each member is more tapered as further moving from a high-speed airflow suction port 17 toward vortex flow discharge ports 18 (inFIGS. 2A-2C , formed at eight places) and formed in a spiral direction to an axial direction of thegenerator 16. An axial throughhole 19 is formed in a further inner diameter portion of thegenerator 16. - A tube (air flow path) 20 having an inner diameter which is larger than the diameter of the through
hole 19 of thegenerator 16 is connected to the rear side of thegenerator 16. Acontrol valve 21 which is shown inFIG. 3 , and which controls the amount of part of the high-pressure vortex flow that is to be discharged to the outside air is disposed at the rear end of thetube 20. Thecontrol valve 21 is disposed on thetube 20 by screwing hot-wind dischargeamount adjusting threads 46 formed in the outer circumferential portion of the valve, into thetube 20. - In the portion of the
rotary shaft 1, as shown inFIG. 1 , a plurality of coolingwind flow paths 22 are formed at regular intervals in the circumferential direction. Each of the coolingwind flow paths 22 is configured by a first cooling wind flow path and a second cooling wind flow path. The first cooling wind flow path has a configuration in which the flow path axially elongates in therotary shaft 1, one end is opened in an axial end on the side of thefins 15, and the other end is opened in an inner wall portion of the rear radialmagnetic bearing rotor 2 b. The second cooling wind flow path is configured by: a spline-like portion which is formed in an outer circumferential portion of therotary shaft 1 so as to communicate with the opening of the first cooling wind flow path on the side of the rear radialmagnetic bearing rotor 2 b, and elongate to the load-side end portion of the front radialmagnetic bearing rotor 2 a; and the inner peripheral walls of the rear radialmagnetic bearing rotor 2 b, thespindle motor rotor 4, the axialmagnetic bearing disc 3, the front radialmagnetic bearing rotor 2 a, and the collar positioned between the rotors. The inner peripheral walls close the opening portion of the spline-like portion. - In
Embodiment 1, thefins 15, thegenerator 16, thetube 20, and thecontrol valve 21 constitute cooling wind producing means for producing cooling wind of a low temperature with using the driving force of therotary shaft 1 which is rotated at a high speed. Thefins 15 and part of thegenerator 16 constitute compressed air flow producing means. Theframe 10, theload side bracket 11, and the opposite-to-load side bracket 12 constitute a case. - The magnetic bearing spindle unit of
Embodiment 1 is configured as described above. - According to the structure, since a magnetic bearing spindle unit is usually used at ultrahigh speed rotation in most cases, a high-speed air flow which is directed toward the rear side of the spindle is produced by the
fins 15 when therotary shaft 1 is rotated at an ultrahigh speed. The high-speed air flow is sent into thesuction port 17 of thegenerator 16, and then discharged from thedischarge ports 18. Along the way, thegenerator 16 is tapered and formed in a spiral direction. At the timing when the air flow is discharged from thedischarge ports 18, therefore, the air flow is formed as a high-pressure vortex flow, and discharged to the inner circumferential face of theadjacent tube 20, in a tangential direction of the face at a speed close to that of sound. The high-speed vortex flow which is sent into thetube 20 is subjected to a large centrifugal force during a process in which the vortex flow moves toward thecontrol valve 21 that is disposed in the rear of the tube, so that the pressure and the density are rapidly raised, the pipe resistance is increased, and the temperature is raised. As a result, the vortex flow is formed into hot wind to be discharged to the outside air from a hot-wind discharge port 23. At the same time, by the centrifugal force of the high-speed vortex flow, air in the vicinity of the center of thetube 20 is lowered in density, and, while rotating in the same direction as the outer vortex flow of the hot wind, moves in the opposite direction toward the throughhole 19 of thegenerator 16 which is opposite to the hot-wind discharge port 23. During the moving process, because of a decelerating braking action, the inner vortex flow conducts a work on the outer vortex flow, and the temperature is lowered. Therefore, the vortex flow is formed as cooling wind to be discharged from the throughhole 19 of thegenerator 16. This principle of producing such cooling wind was found at about 1930 by a French physicist, Georges Ranque. When compressed air of 7 PMa and 20° C. is supplied at 640 L/min, air of −55° C. is ejected at 100 L/min from the throughhole 19 of thegenerator 16. Since the throughhole 19 is smaller than the inner diameter of thetube 20, only the inner vortex flow formed as cooling wind can be passed through the through hole, so that an efficient structure is attained. Since the coolingwind flow paths 22 which are axially passed are formed inside therotary shaft 1, the cooling wind discharged from the throughhole 19 of thegenerator 16 moves the inner side of therotary shaft 1 toward the front side (load side) of the spindle unit as indicated by the arrows. During the process, the cooling wind cools therotary shaft 1, and is finally discharged from the front side (load side) of therotary shaft 1 to the outside air. - Namely, this structure is a very simple one in which no driving portion is formed in the cooling wind producing portion, and, with using ultrahigh speed rotation of the
rotary shaft 1 itself, can produce high-pressure air to form cooling wind, without using an external compressing machine or the like such as a compressor. The produced cooling wind is passed through the interior of therotary shaft 1, whereby therotary shaft 1 can be efficiently cooled. - The amount of the cooling wind which is to be discharged in the direction to the
rotary shaft 1 from the throughhole 19 of thegenerator 16 can be controlled by adjusting the amount of the hot wind to be discharged from the hot-wind discharge port 23. In other words, the amount of the cooling wind can be arbitrarily determined by adjusting thecontrol valve 21. Embodiment 2. - Next, Embodiment 2 of the invention will be described with reference to
FIGS. 4 and 5 A-5C. - In the same manner as
Embodiment 1, also Embodiment 2 of the invention shows a magnetic bearing spindle unit in which a magnetic bearing apparatus is used in a spindle for rotating a tool.FIG. 3 is a section view showing the whole configuration of the magnetic bearing spindle unit, andFIGS. 4A-4C are views which show a generator structure to be used in the magnetic bearing spindle unit, and in whichFIG. 4A is a front view,FIG. 4B is a section view taken along the line Z-Z inFIG. 4A andFIG. 4C is a rear view ofFIG. 4A . - The magnetic bearing spindle unit is configured in the following manner.
- Namely, a plurality of cooling
wind flow paths 26 which axially elongate, and which are positioned at regular intervals in the circumferential direction are formed in an opposite-to-load side bracket 12 and a frame 10 (in the embodiment, two coolingwind flow paths 26 are formed). Coolingwind flow paths 26 which communicate with the coolingwind flow paths 26, respectively, and which are opened in an outer circumferential portion of the axialmagnetic bearing disc 3 are formed in anaxial positioning collar 27 for the axialmagnetic bearing stators wind flow paths 26 is configured so that one end is opened in the outer circumferential portion of the axialmagnetic bearing disc 3 and the other end is opened in the external end face of the opposite-to-load side bracket 12. -
FIG. 4 shows only agenerator 16 which is fixed with being separated fromfins 15 by an appropriate gap. A plurality of pipes 24 (in the embodiment, two pipes) are passed and fixed from a side which is further inside the inner diameter of a throughhole 19 of thegenerator 16, and in a radial direction of thegenerator 16. In each of thepipes 24, oneend 25 inside thegenerator 16 is disposed so as to be directed toward thetube 20. - The other ends of the
pipes 24 are connected to the openings of the coolingwind flow paths 26 on the side of the opposite-to-load side bracket 12. - The other components are configured in a similar manner as those of the magnetic bearing spindle unit which has been described in
Embodiment 1. - In this structure, when the
rotary shaft 1 is rotated at an ultrahigh speed, a high-speed air flow which is directed toward the rear side of the spindle is produced by thefins 15. The high-speed air flow is sent into thesuction port 17 of thegenerator 16, and then discharged from thedischarge ports 18. Along the way, thegenerator 16 is tapered and formed in a spiral direction. At the timing when the air flow is discharged from thedischarge ports 18, therefore, the air flow is formed as a high-pressure vortex flow, and discharged to the inner circumferential face of theadjacent tube 20, in a tangential direction of the face at a speed close to that of sound. The high-speed vortex flow which is sent into thetube 20 is subjected to a large centrifugal force during a process in which the vortex flow moves toward thecontrol valve 21 that is disposed in the rear of the tube, so that the pressure and the density are rapidly raised, the pipe resistance is increased, and the temperature is raised. As a result, the vortex flow is formed into hot wind to be discharged to the outside air from the hot-wind discharge port 23. At the same time, by the centrifugal force of the high-speed vortex flow, air in the vicinity of the center of thetube 20 is lowered in density, and, while rotating in the same direction as the outer vortex flow of the hot wind, moves in the opposite direction, toward the throughhole 19 of thegenerator 16 which is opposite to the hot-wind discharge port 23. During the moving process, because of a decelerating braking action, the inner vortex flow conducts a work on the outer vortex flow, and the temperature is lowered. Therefore, the vortex flow is formed as cooling wind to be discharged from the throughhole 19 of thegenerator 16. Since the throughhole 19 is smaller than the inner diameter of thetube 20, only the inner vortex flow formed as cooling wind can be passed through the through hole, so that an efficient structure is attained. Since the coolingwind flow paths 22 which are axially passed are formed inside therotary shaft 1, the cooling wind discharged from the throughhole 19 of thegenerator 16 moves the inner side of therotary shaft 1 toward the front side of the spindle unit as indicated by the arrows. During the process, the cooling wind cools therotary shaft 1, and is finally discharged from the front side of therotary shaft 1 to the outside air. Since the oneend 25 of each of thepipes 24 disposed in thegenerator 16 is disposed so as to be directed toward thetube 20, moreover, part of the cooling wind discharged from thegenerator 16 is sucked into thepipe 24 as indicated by the arrows, and then is passed through the coolingwind flow path 26 disposed inside the opposite-to-load side bracket 12 and theframe 10 to enter the interior of the unit from the outer diameter portion of theaxial positioning collar 27 for the axial magnetic bearing stators 6. The cooling wind entering from the portion of thecollar 27 is discharged to the outside air with being passed mainly through the air gaps between the axialmagnetic bearing disc 3 and the axialmagnetic bearing stators magnetic bearing rotor 2 a and the radialmagnetic bearing stator 5 a, thespindle motor rotor 4 and thespindle motor stator 7, and the radialmagnetic bearing rotor 2 b and the radialmagnetic bearing stator 5 b. During the process in which the cooling wind moves to the outside air, the cooling wind cools the surface of therotary shaft 1, and the stators. - Namely, this structure can efficiently cool the
rotary shaft 1 and the stators on the same principle as that described inEmbodiment 1. - Similarly, the amount of the cooling wind can be adjusted by adjusting the
control valve 21. - Next,
Embodiment 3 of the invention will be described with reference toFIGS. 6 and 7 . - In the same manner as
Embodiment 1, alsoEmbodiment 3 of the invention shows a magnetic bearing spindle unit in which a magnetic bearing apparatus is used in a spindle for rotating a tool. - The magnetic bearing spindle unit is configured in the following manner.
- Namely,
radial fins 28 for forming an air flow in a radial direction are disposed on the outer diameter portion of an axialmagnetic bearing disc 3. In anaxial positioning collar 27 for axialmagnetic bearing stators fins 28 by an adequate gap, anair suction port 29 which is more tapered as further moving from the inner diameter portion toward the outer diameter portion is disposed in plural places.Supply ports 30 which are on the tapered side communicate with outer diameter portions ofgenerators 16, respectively. Thegenerators 16 are positioned at positions opposed to thesupply ports 30, and fixed to the interior of theframe 10. As shown in detail inFIGS. 7A and 7B (FIG. 7A is a front view, andFIG. 7B is a longitudinal section view ofFIG. 7A ), in each of thegenerators 16, in order to convert an air flow ejected from thesupply port 30 to a vortex flow and allow the vortex flow to flow through anair flow path 32, a plurality of cutaway portions through which the air flow ejected from thesupply port 30 is to be introduced are formed at regular intervals in the outer circumferential portion of the side face, andspiral grooves 31 which are directed from the cutaway portions toward the inner circumferential portion are formed in a side face portion. Thegenerators 16 have an axial throughhole 19 in a center portion. InFIGS. 7A and 7B , 18 denotes a vortex flow discharge port. - In the rear portion of the unit with respect to the
generators 16, furthermore, theair flow paths 32 having an inner diameter which is larger than the diameter of the throughholes 19 of thegenerators 16 are axially formed inside theframe 10 and the opposite-to-load side bracket 12. Acontrol valve 21 is disposed in the rear end of each of theair flow paths 32. In the front portion of the unit with respect to thegenerators 16, coolingwind flow paths 33 which elongate from the respective throughholes 19 of thegenerators 16 to the interior of the unit are disposed inside theframe 10 and theload side bracket 11. - The other components are configured in a similar manner as those of the magnetic bearing spindle units which have been described in
Embodiments 1 and 2. - In this structure, when the
rotary shaft 1 is rotated at an ultrahigh speed, a high-speed air flow which is directed in a radial direction is produced by the effect of theradial fins 28 which are formed on the outer diameter portion of the axialmagnetic bearing disc 3. The high-speed air flow is introduced into each of theair suction ports 29 disposed in theaxial positioning collar 27 for the axialmagnetic bearing stators air suction port 29 has the shape which is more tapered as further moving in the outer radial direction, the air flow is formed as high-pressure air at the timing when the air flow is discharged from thesupply port 30 of the outer diameter portion of thecollar 27. The high-pressure air is sent to the outer diameter portion of thegenerator 16, and, at the timing when discharged from thedischarge port 18 of thegenerator 16, formed as a high-pressure vortex flow by the effect of the spiral groove formed in thegenerator 16. The high-pressure vortex flow is discharged to the inner circumferential face of theair flow path 32 in theframe 10 which is adjacent on the rear side of the unit, in a tangential direction of the face at a speed close to that of sound. Among the portions of therotary shaft 1, the axialmagnetic bearing disc 3 has the largest outer diameter, and hence the largest effect is attained as compared with cases where a high-speed vortex flow is produced by other portions. The high-speed vortex flow which is sent into theair flow path 32 is subjected to a large centrifugal force during a process in which the vortex flow moves toward thecontrol valve 21 that is disposed in the rear of the flow path, so that the pressure and the density are rapidly raised, the pipe resistance is increased, and the temperature is raised. As a result, the vortex flow is formed into hot wind to be discharged to the outside air from a hot-wind discharge port 23. At the same time, by the centrifugal force of the high-speed vortex flow, air in the vicinity of the center of theair flow path 32 is lowered in density, and, while rotating in the same direction as the outer vortex flow of the hot wind, moves in the opposite direction, toward the throughhole 19 of thegenerator 16 which is opposite to the hot-wind discharge port 23. During the moving process, because of a decelerating braking action, the inner vortex flow conducts a work on the outer vortex flow, and the temperature is lowered. Therefore, the vortex flow is formed as cooling wind to be passed through the throughhole 19 of thegenerator 16 toward the front side of the unit as indicated by the arrows. Since the throughhole 19 is smaller than the inner diameter of theair flow path 32, only the inner vortex flow formed as cooling wind can be passed through the through hole, so that an efficient structure is attained. The cooling wind is then sent to a coolingwind flow path 33 disposed in theframe 10 and theload side bracket 11 which are positioned in front of thegenerator 16, and transported to the interior of the unit to cool the surface of therotary shaft 1, and the stators. - Namely, this structure can efficiently cool the
rotary shaft 1 and the stators on the same principle as that described inEmbodiments 1 and 2. - Similarly, the amount of the cooling wind can be adjusted by adjusting the
control valves 21. - Next,
Embodiment 4 of the invention will be described with reference toFIG. 8 . - In the same manner as
Embodiment 1, alsoEmbodiment 4 of the invention shows a magnetic bearing spindle unit in which a magnetic bearing apparatus is used in a spindle for rotating a tool. - The magnetic bearing spindle unit is configured in the following manner.
- Namely, in the same manner as
Embodiment 3, the unit is structured so thatradial fins 28 are disposed on the outer diameter portion of an axialmagnetic bearing disc 3, and cooling wind is produced by the effect of the fins. InEmbodiment 4, furthermore, coolingwind flow paths 22 which are axially passed are formed inside therotary shaft 1, andfins 34 which allow the cooling wind to be easily introduced into the coolingwind flow paths 22 are disposed at positions opposed to an opening of a coolingwind flow path 35 in therotary shaft 1. A coolingwind guide plate 35 for efficiently introducing the cooling wind ejected from the coolingwind flow path 35 into the coolingwind flow paths 22 is disposed by clamping a peripheral portion of the guide plate between aload side bracket 11 and aframe 10. - Each of the cooling
wind flow paths 22 is configured by a spline-like portion which is formed in the outer circumferential portion of therotary shaft 1 so as to elongate from the portion of therotary shaft 1 where thefins 34 are disposed, to the vicinity of adisplacement sensor 14 b, and the inner peripheral walls of the rear radialmagnetic bearing rotor 2 b, thespindle motor rotor 4, the axialmagnetic bearing disc 3, the front radialmagnetic bearing rotor 2 a, and the collar positioned between the rotors. The inner peripheral walls close opening portions of the spline-like portion. - The other components are configured in a similar manner as those of the magnetic bearing spindle unit which has been described in
Embodiment 3. - In this structure, when the
rotary shaft 1 is rotated at an ultrahigh speed, a high-speed air flow which is directed in a radial direction is produced by the effect of theradial fins 28 which are formed on the outer diameter portion of the axialmagnetic bearing disc 3. The high-speed air flow is introduced into each of theair suction ports 29 disposed in theaxial positioning collar 27 for the axialmagnetic bearing stators air suction port 29 has the shape which is more tapered as further moving in the outer radial direction, the air flow is formed as high-pressure air at the timing when the air flow is discharged from thesupply port 30 of the outer diameter portion of thecollar 27. The high-pressure air is sent to the outer diameter portion of thegenerator 16, and, at the timing when discharged from thedischarge port 18 of thegenerator 16, formed as a high-pressure vortex flow by the effect of the spiral groove formed in thegenerator 16. The high-pressure vortex flow is discharged to the circumferential face of theair flow path 32 in theframe 10 which is adjacent on the rear side of the unit, in a tangential direction of the face at a speed close to that of sound. Among the portions of therotary shaft 1, the axialmagnetic bearing disc 3 has the largest outer diameter, and hence the largest effect is attained as compared with cases where a high-speed vortex flow is produced by other portions. The high-speed vortex flow which is sent into theair flow path 32 is subjected to a large centrifugal force during a process in which the vortex flow moves toward thecontrol valve 21 that is disposed in the rear of the flow path, so that the pressure and the density are rapidly raised, the pipe resistance is increased, and the temperature is raised. As a result, the vortex flow is formed into hot wind to be discharged to the outside air from a hot-wind discharge port 23. At the same time, by the centrifugal force of the high-speed vortex flow, air in the vicinity of the center of theair flow path 32 is lowered in density, and, while rotating in the same direction as the outer vortex flow of the hot wind, moves in the opposite direction, toward the throughhole 19 of thegenerator 16 which is opposite to the hot-wind discharge port 23. During the moving process, because of a decelerating braking action, the inner vortex flow conducts a work on the outer vortex flow, and the temperature is lowered. Therefore, the vortex flow is formed as cooling wind to be passed through the throughhole 19 of thegenerator 16 toward the front side of the unit as indicated by the arrows. Since the throughhole 19 is smaller than the inner diameter of theair flow path 32, only the inner vortex flow formed as cooling wind can be passed through the through hole, so that an efficient structure is attained. The cooling wind is then sent to a coolingwind flow path 33 disposed in theframe 10 and theload side bracket 11 which are positioned in front of thegenerator 16, and transported to the interior of the unit. Most of the cooling wind is concentrated to the vicinity of thefins 34 disposed on therotary shaft 1, by the coolingwind guide plate 35. Thefins 34 are formed so as to introduce the cooling wind to the coolingwind flow paths 22 formed inside therotary shaft 1. Therefore, most of the cooling wind is passed through the coolingwind flow paths 22 to efficiently cool therotary shaft 1 during the process. - Namely, this structure can efficiently cool the
rotary shaft 1 on the same principle as that described inEmbodiments 1 to 3. Similarly, the amount of the cooling wind can be adjusted by adjusting thecontrol valves 21. - Next, Embodiment 5 of the invention will be described with reference to
FIG. 9 . - In the same manner as
Embodiment 1, also Embodiment 5 of the invention shows a magnetic bearing spindle unit in which a magnetic bearing apparatus is used in a spindle for rotating a tool. - The magnetic bearing spindle unit is configured in the following manner.
- Namely,
radial fins 28 for forming an air flow in a radial direction are disposed on the outer diameter portion of an axialmagnetic bearing disc 3. Anaxial positioning collar 27 for axialmagnetic bearing stators fins 28 by an adequate gap. In thecollar 27, anair suction port 29 which is more tapered as further moving from the inner diameter portion toward the outer diameter portion is disposed. Asupply port 30 which is on the tapered side is connected to a high-pressureair flow path 36 which is disposed in aframe 10 and an opposite-to-load side bracket 12. A high-pressureair discharge port 37 of the opposite-to-load side bracket 12 is connected by a pipe or the like to a high-pressureair suction port 39 of a vortex flow cooler (cooling wind producing means) 38 which is disposed outside the magnetic bearing spindle unit. In the magnetic bearing spindle unit, a coolingwind flow path 42 which is passed from the outside of the unit into the unit is formed in a place which does not overlap with the high-pressureair flow path 36, and in theframe 10, theload side bracket 11, and the opposite-to-load side bracket 12, and a coolingwind suction port 43 of the opposite-to-load side bracket 12 and a coolingwind discharge port 41 of avortex flow generator 38 are connected to each other by a pipe or the like. - The vortex flow cooler 38 is configured by a tube, a generator which converts a high-pressure air flow to a vortex flow, and a control valve which adjusts the amount of cooling wind, and operates to eject cooling wind to the cooling
wind discharge port 41 in a similar manner as that which has been described in the embodiment above. - In this structure, when the
rotary shaft 1 is rotated at an ultrahigh speed, a high-speed air flow which is directed in a radial direction is produced by the effect of theradial fins 28 which are formed on the outer diameter portion of the axialmagnetic bearing disc 3. The high-speed air flow is introduced into each of theair suction port 29 disposed in theaxial positioning collar 27 for the axialmagnetic bearing stators air suction port 29 has the shape which is more tapered as further moving in the outer radial direction, the air flow is formed as high-pressure air at the timing when the air flow is discharged from thesupply port 30 of the outer diameter portion of thecollar 27. The high-pressure air is passed through the high-pressureair flow path 36 which is disposed inside theframe 10 and the opposite-to-load side bracket 12, to be discharged from the high-pressureair discharge port 37, and then sent to the high-pressureair suction port 39 of the vortex flow cooler 38. On the same principle as that described in the embodiment above, heat exchange is conducted in the vortex flow cooler 38. The hot wind is discharged to the outside air in a place where the hot wind does not thermally affect the magnetic bearing spindle unit through the hotwind discharge port 40. The cooling wind which is produced by the vortex flow cooler 38 is discharged from the coolingwind discharge port 41, and then sent to the magnetic bearing spindle unit through the coolingwind suction port 43 connected thereto. The cooling wind is passed through the coolingwind flow path 42 to be sent into the unit, thereby efficiently cool therotary shaft 1 and the stators. - In the embodiment also, the cooling wind ejected from the vortex flow cooler 38 may be flown around the
rotary shaft 1 as shown inEmbodiments - As described above, the magnetic bearing apparatus of the invention is suitable for being used in a spindle unit of a machine tool or the like.
Claims (9)
1. A magnetic bearing apparatus comprising: a rotatable rotary member in which a radial magnetic bearing rotor and an axial magnetic bearing disc are secured to a rotary shaft; electromagnets that are arranged around said rotary member via a small gap; and a case housing them, wherein
said apparatus further comprises: cooling wind producing means for producing cooling wind of a low temperature with using a driving force of said rotary member; and a cooling wind flow path through which the low-temperature cooling wind produced by said cooling wind producing means is to flow into said magnetic bearing apparatus.
2. A magnetic bearing apparatus according to claim 1 , wherein said cooling wind producing means comprises: high-speed air flow producing means for producing a high-speed air flow with using the driving force of said rotary member; converting means for converting the high-speed air flow produced by said high-speed air flow producing means, to a vortex flow; an air flow path through which the high-speed vortex flow converted by said converting means is to flow; and a control valve which is disposed on a side of said air flow path opposite to said converting means.
3. A magnetic bearing apparatus comprising: a rotatable rotary shaft to which a radial magnetic bearing rotor and an axial magnetic bearing disc are secured; electromagnets which are arranged with forming a small gap with respect to said radial magnetic bearing rotor and said axial magnetic bearing disc; and a case housing them, wherein
said apparatus further comprises: cooling wind producing means that produces cooling wind of a low temperature, and that has: fins which are disposed on said rotary shaft, and which produces an axial air flow by a driving force of said rotary shaft; a generator which is fixed with forming a predetermined gap with respect to said fins, and which produces a high-speed vortex flow; a tube through which the high-speed vortex flow produced by said generator is to flow; and a control valve which is disposed on a side of said tube opposite to said generator; and a cooling wind flow path through which the low-temperature cooling wind produced by said cooling wind producing means is to flow into said magnetic bearing apparatus.
4. A magnetic bearing apparatus according to claim 3 , wherein said cooling wind flow path is disposed in said rotary shaft portion so as to axially elongate.
5. A magnetic bearing apparatus according to claim 3 or claim 4 , wherein said cooling wind flow path has: a cooling wind flow path disposed in said case; and a pipe which guides the low-temperature cooling wind to said cooling wind flow path disposed in said case.
6. A magnetic bearing apparatus comprising: a rotatable rotary shaft to which a radial magnetic bearing rotor and an axial magnetic bearing disc are secured; electromagnets which are arranged with forming a small gap with respect to said radial magnetic bearing rotor and said axial magnetic bearing disc; and a case housing them, wherein
said apparatus further comprises: cooling wind producing means that produces cooling wind of a low temperature, and that has: fins which are disposed on said axial magnetic bearing disc, and which produces an air flow directed in an outer radial direction of said axial magnetic bearing disc; a supply port which is positioned in an outer circumferential portion of said fins, and through which the air flow produced by said fins is introduced and ejected as a high-speed air flow in the outer radial direction; a generator which converts the high-speed air flow ejected from said supply port, to a vortex flow; an air flow path through which the high-speed vortex flow produced by said generator is to flow; and a control valve which is disposed on a side of said air flow path opposite to said generator; and a cooling wind flow path through which the low-temperature cooling wind produced by said cooling wind producing means is to flow into said magnetic bearing apparatus.
7. A magnetic bearing apparatus according to claim 6 , wherein a guide portion which guides the low-temperature cooling wind to a rotary shaft portion is disposed.
8. A magnetic bearing apparatus according to claim 6 , wherein said cooling wind flow path has: a cooling wind flow path which is disposed in said case, and through which the low-temperature cooling wind produced by said cooling wind producing means is to flow; a guide plate which guides the cooling wind that has been passed through said cooling flow path, to a rotary shaft portion; and a cooling wind flow path which is disposed in said rotary shaft portion, and through which the cooling wind that has been guided by said guide plate is to axially flow, thereby cooling said rotary shaft portion.
9. A magnetic bearing apparatus comprising: a rotatable rotary shaft to which a radial magnetic bearing rotor and an axial magnetic bearing disc are secured; electromagnets which are arranged with forming a small gap with respect to said radial magnetic bearing rotor and said axial magnetic bearing disc; and a case housing them, wherein
said apparatus further comprises: cooling wind producing means that produces cooling wind of a low temperature, and that has: fins which are disposed on said axial magnetic bearing disc, and which produces an air flow directed in an outer radial direction of said axial magnetic bearing disc; a supply port which is positioned in an outer circumferential portion of said fins, and through which the air flow produced by said fins is introduced and ejected as a high-speed air flow in the outer radial direction; an air flow path through which the high-speed air flow ejected from said supply port is to flow; a generator which converts the high-speed air flow ejected from said air flow path, to a vortex flow; a tube through which the high-speed vortex flow produced by said generator is to flow; and a control valve which is disposed on a side of said tube opposite to said generator; and a cooling wind flow path through which the low-temperature cooling wind produced by said cooling wind producing means is to flow into said magnetic bearing apparatus.
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US11/470,852 US7315101B2 (en) | 2003-07-04 | 2006-09-07 | Magnetic bearing apparatus |
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PCT/JP2003/008544 WO2005003580A1 (en) | 2003-07-04 | 2003-07-04 | Magnetic bearing device |
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US11/470,852 Expired - Fee Related US7315101B2 (en) | 2003-07-04 | 2006-09-07 | Magnetic bearing apparatus |
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EP (1) | EP1717468A4 (en) |
JP (1) | JP4293185B2 (en) |
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- 2003-07-04 WO PCT/JP2003/008544 patent/WO2005003580A1/en active Application Filing
- 2003-07-04 US US10/500,572 patent/US20060163962A1/en not_active Abandoned
- 2003-07-04 CN CNB038019523A patent/CN100344889C/en not_active Expired - Fee Related
- 2003-07-04 EP EP03738686A patent/EP1717468A4/en not_active Withdrawn
- 2003-07-04 JP JP2005503386A patent/JP4293185B2/en not_active Expired - Fee Related
-
2006
- 2006-09-07 US US11/470,852 patent/US7315101B2/en not_active Expired - Fee Related
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US5693994A (en) * | 1994-07-07 | 1997-12-02 | The Glacier Metal Company Limited | Back-up bearing arrangement for a magnetic bearing |
US5720160A (en) * | 1994-07-23 | 1998-02-24 | Traxler; Alfons | Vaccum centrifuge with magnetic bearings and sealing method |
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Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
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US7224094B2 (en) * | 2002-07-12 | 2007-05-29 | Mitsubishi Denki Kabushiki Kaisha | Magnetic bearing spindle |
US20060175920A1 (en) * | 2002-07-12 | 2006-08-10 | Mitsubishi Denki Kabushiki Kaisha | Magnetic bearing spindle |
US20080231128A1 (en) * | 2005-08-24 | 2008-09-25 | Mecos Traxler Ag | Magnetic Bearing Device With an Improved Vacuum Feedthrough |
US7932655B2 (en) * | 2005-08-24 | 2011-04-26 | Mecos Traxler Ag | Magnetic bearing device with an improved vacuum feedthrough |
US20120038233A1 (en) * | 2009-04-23 | 2012-02-16 | Koninklijke Philips Electronics N.V. | Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus |
US8836190B2 (en) * | 2009-04-23 | 2014-09-16 | Koninklijke Philips N.V. | Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus |
US10060474B2 (en) * | 2013-05-09 | 2018-08-28 | Dresser-Rand Company | Magnetic bearing protection device |
US20160084304A1 (en) * | 2013-05-09 | 2016-03-24 | Dresser-Rand Company | Magnetic bearing protection device |
US10523084B2 (en) * | 2015-08-21 | 2019-12-31 | Vitesco Technologies GmbH | Cooling system for an electric machine |
US11309754B2 (en) * | 2015-11-09 | 2022-04-19 | Time To Act Limited | Generator with series stators, and series rotors separated by annular collars with cooling vents |
US20170321749A1 (en) * | 2016-05-09 | 2017-11-09 | Skf Canada Limited | Non-cantilevered magnetic bearing for drum-shaped vertical rotors |
US20170338716A1 (en) * | 2016-05-23 | 2017-11-23 | Hangzhou Stellar Mechanical & Electrical Technology, Inc. | High-speed permanent magnetic motor assembly |
JP2017219246A (en) * | 2016-06-07 | 2017-12-14 | 株式会社Ihi | Rotary machine |
WO2017212713A1 (en) * | 2016-06-07 | 2017-12-14 | 株式会社Ihi | Rotary machine |
US11300131B2 (en) * | 2017-05-09 | 2022-04-12 | Daikin Industries, Ltd. | Electric motor system and turbo compressor provided therewith |
US20220224179A1 (en) * | 2021-01-08 | 2022-07-14 | Beta Air, Llc | Methods and systems for a fractional concentrated stator configured for use in electric aircraft motor |
US11799343B2 (en) * | 2021-01-08 | 2023-10-24 | Beta Air, Llc | Methods and systems for a fractional concentrated stator configured for use in electric aircraft motor |
Also Published As
Publication number | Publication date |
---|---|
US20070273219A1 (en) | 2007-11-29 |
EP1717468A4 (en) | 2009-12-16 |
WO2005003580A1 (en) | 2005-01-13 |
CN1666026A (en) | 2005-09-07 |
US7315101B2 (en) | 2008-01-01 |
JP4293185B2 (en) | 2009-07-08 |
CN100344889C (en) | 2007-10-24 |
JPWO2005003580A1 (en) | 2006-08-17 |
EP1717468A1 (en) | 2006-11-02 |
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