US20060211837A1 - Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same - Google Patents

Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same Download PDF

Info

Publication number
US20060211837A1
US20060211837A1 US11/270,830 US27083005A US2006211837A1 US 20060211837 A1 US20060211837 A1 US 20060211837A1 US 27083005 A US27083005 A US 27083005A US 2006211837 A1 US2006211837 A1 US 2006211837A1
Authority
US
United States
Prior art keywords
insulating film
dielectric insulating
coating composition
group
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/270,830
Inventor
Min-Jin Ko
Ki-Youl Lee
Bum-Gyu Choi
Myung-Sun Moon
Dae-Ho Kang
Jeong-Man Son
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Chem Ltd
Original Assignee
LG Chem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Chem Ltd filed Critical LG Chem Ltd
Assigned to LG CHEM, LTD. reassignment LG CHEM, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHOI, BUM-GYU, KANG, DAE-HO, KO, MIN-JIN, LEE, KI-YOUL, MOON, MYUNG-SUN, SON, JEONG-MAN
Publication of US20060211837A1 publication Critical patent/US20060211837A1/en
Priority to US12/222,120 priority Critical patent/US7635524B2/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/46—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes silicones
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04—Polysiloxanes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/32—Post-polymerisation treatment
    • C08G77/34—Purification
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/14—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/65—Additives macromolecular
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02142—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
    • H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/312—Organic layers, e.g. photoresist
    • H01L21/3121—Layers comprising organo-silicon compounds
    • H01L21/3122—Layers comprising organo-silicon compounds layers comprising polysiloxane compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/31695—Deposition of porous oxides or porous glassy oxides or oxide based porous glass
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
    • C08L71/02—Polyalkylene oxides
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04—Polysiloxanes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/285—Permanent coating compositions
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
    • H05K3/4676—Single layer compositions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Definitions

  • the present invention relates to a coating composition for a dielectric insulating film, a dielectric insulating film prepared therefrom, and an electric or electronic device comprising the same, and more particularly to a coating composition for a dielectric insulating film having superior mechanical strength and electric properties while having a low dielectric constant, a dielectric insulating film prepared therefrom, and an electric or electronic device comprising the same.
  • reducing the RC delay can initially be considered.
  • resistance of the metal wiring material and conductance between each metal wire are reduced.
  • use of copper (Cu) which has good electric conductivity as a metal wiring material and a highly insulating material between the metal wires are known to be good for the purpose.
  • a coating composition for a dielectric insulating film used in a semiconductor device should have particulate or metallic impurities below a given level. If particles or metal ions are present in the dielectric insulating film composition, productivity may decrease.
  • metals such as Na, K, Ca, Fe, Cu, Ni, Mg, and Zn or their ions are present in the dielectric insulating film composition, electric properties of the resultant dielectric insulating film may be poor.
  • metal ions as Na + and K + should be controlled to below a given level, because they diffuse fast and may cause a fatal effect on the performance of the gate device.
  • the present invention was made in consideration of the above-mentioned problems, and it is an object of the invention to provide a coating composition for a dielectric insulating film comprising specific metal ions and thus offering a low dielectric constant and superior mechanical strength and electric properties to a dielectric insulating film.
  • the present invention provides a coating composition for a dielectric insulating film comprising a) an organosiloxane polymer; b) a first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof; and c) an organic solvent, where the first metal ions are comprised at 1 to 200 ppm based on the weight of the composition.
  • the invention also provides a dielectric insulating film prepared from the coating composition for a dielectric insulating film and comprising metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof.
  • the invention further provides an electric or electronic device comprising the dielectric insulating film.
  • the present inventors worked on a dielectric insulating film having a low dielectric constant and superior mechanical and electric properties while containing fewer metals, such as Na, K, Ca, Fe, Cu, Ni, Mg, and Zn, and ions thereof. In doing so, they found that a coating composition for a dielectric insulating film including a specific amount of Rb ions, Cs ions, or a mixture thereof facilitates curing of the dielectric insulating film and increases cross-linkage density of the dielectric insulating film, thereby improving the mechanical strength, dielectric property, electric properties, etc., of the dielectric insulating film.
  • Rb ions, Cs ions, or a mixture thereof is referred to as the first metal ions
  • the other metal ions excluding the Rb ions or the Cs ions, such as Na, K, Ca, Fe, Cu, Ni, Mg, or Zn ions is referred to as the second metal ions.
  • the second metal ions may be included above a certain level when making copper wiring and during barrier film processing and dielectric insulating film manufacturing. Also, it may be included above a certain level when manufacturing the coating composition for a dielectric insulating film because of the organosiloxane polymer source, solvent, reactor, and so forth.
  • the electric properties of the dielectric insulating film may be not good.
  • the Na + ions and the K + ions may cause a fatal effect on the gate device characteristics because of a very fast diffusion rate.
  • their content is strictly limited in semiconductor manufacturing processes.
  • the coating composition for a dielectric insulating film in accordance with the present invention comprises a) an organosiloxane polymer, b) first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof, and c) an organic solvent.
  • the organosiloxane polymer may be any one polymerized from a silane compound or a silane oligomer, however an organosiloxane polymer polymerized from at least one silane compound selected from the group consisting of a) at least one monomer selected from the group consisting of the compounds represented by Formula 1 and Formula 2 below, b) a dimer prepared from the monomer, and c) an oligomer prepared from the monomer, the dimer, or a mixture thereof, is more preferable in terms of dielectric property and mechanical strength.
  • R 1 is hydrogen, an aryl, a vinyl, an allyl, a C 1 -C 4 linear or branched alkyl substituted with fluorine, or a C 1 -C 4 linear or branched alkyl not substituted with fluorine;
  • R 2 is a C 1 -C 4 linear or branched alkoxy, acetoxy, or chlorine
  • each of R 3 and R 5 is, independently, hydrogen, fluorine, an aryl, a vinyl, an allyl, a C 1 -C 4 linear or branched alkyl substituted with fluorine, or a C 1 -C 4 linear or branched alkyl not substituted with fluorine;
  • each of R 4 and R 6 is, independently, a C 1 -C 4 linear or branched alkoxy, an acetoxy, or chlorine;
  • each of q and r is an integer of 0 to 2.
  • the organosiloxane polymer preferably has a weight-average molecular weight, in terms of equivalent polystyrene molecular weight, of at least 500, and is preferably in the range of 500 to 1,000,000. If the weight-average molecular weight of the organosiloxane polymer is less than 500, the coating property of the dielectric insulating film may worsen.
  • the organosiloxane polymer may be prepared by mixing a silane compound polymerized from at least one selected from the group consisting of i) at least one monomer selected from the group consisting of the compounds represented by Formula 1 and Formula 2, ii) a dimer prepared from the monomer, and iii) an oligomer prepared from the monomer, the dimer, or a mixture thereof with a catalyst and water, and then hydrolyzing and condensing the silane compound.
  • the hydrolysis and condensation may proceed by adding an organic solvent, if necessary.
  • the hydrolysis and condensation are performed in the presence of an organic solvent for convenience of molecular weight control of the organosiloxane polymer to be polymerized.
  • any organic solvent that does not affect the hydrolysis or condensation of the silane compound may be used, however, at least one selected from the group consisting of an aliphatic hydrocarbon solvent, an aromatic hydrocarbon solvent, an alcohol solvent, a ketone solvent, an ether solvent, an ester solvent, and an amide solvent is preferable.
  • At least one organic solvent selected from the group consisting of a) at least one aliphatic hydrocarbon solvent selected from the group consisting of n-pentane, i-pentane, n-hexane, i-hexane, 2,2,4-trimethylpentane, cyclohexane, and methylcyclohexane, b) at least one aromatic hydrocarbon solvent selected from the group consisting of benzene, toluene, xylene, trimethylbenzene, ethylbenzene, and methylethylbenzene, c) at least one alcohol solvent selected from the group consisting of methyl alcohol, ethyl alcohol, n-propanol, i-propanol, n-butanol, i-butanol, sec-butanol, t-butanol, 4-methyl-2-pentanol, cyclohexanol, methylcyclohexan
  • the catalyst used in the hydrolysis and condensation may be an acid catalyst or a base catalyst.
  • an acid catalyst is preferable when an organic molecule or an organic polymer is processed.
  • the acid catalyst is not particularly limited, but at least one selected from the group consisting of hydrochloric acid, nitric acid, sulfuric acid, phosphoric acid, fluoric acid, formic acid, acetic acid, propionic acid, butanoic acid, pentanoic acid, hexanoic acid, monochloroacetic acid, dichloroacetic acid, trichloroacetic acid, trifluoroacetic acid, oxalic acid, malonic acid, sulfonic acid, phthalic acid, fumaric acid, citric acid, maleic acid, oleic acid, methylmalonic acid, adipic acid, p-aminobenzoic acid, and p-toluenesulfonic acid is preferable.
  • the base catalyst is also not particularly limited, but at least one selected from the group consisting of an alkali metal compound, ammonia water, an organic amine, and a quaternary ammonium compound is preferable.
  • the addition amount of the catalyst is not particularly limited, but is determined depending on the kind of the catalyst and the silane compound.
  • the water used along with the catalyst is added to hydrolyze the silane compound.
  • the water is used at 1 to 30 moles, more preferably at 2 to 20 moles, per 1 mole of hydrolysable functional groups of the silane compound. If the water content is below 1 mole per mole of hydrolysable functional groups of the silane compound, hydrolysis and condensation may be insufficient, and the resultant dielectric insulating film will not have good dielectric and mechanical properties. Otherwise, if the water content exceeds 30 moles per mole of hydrolysable functional groups of the silane compound, phase separation may occur during hydrolysis and condensation, thereby causing non-uniform reaction, and the coating property tends to become poor.
  • Water may be added incrementally or continuously.
  • the catalyst may be mixed in the organic solvent in advance, or may be added after being dissolved or dispersed in water.
  • the hydrolysis and condensation of the organosiloxane polymer are performed at 0 to 100° C.
  • the first metal ions may be added along with the organosiloxane polymer and the organic solvent included in a metal salt comprising Rb ions, Cs ions, or a mixture thereof.
  • the first metal ions are preferably comprised at 1 to 200 ppm, more preferably at 5 to 100 ppm, based on the weight of the coating composition for a dielectric insulating film. If the content of the first metal ions is below 1 ppm, facilitation of curing of the organosiloxane polymer, a matrix resin, is only slight, and thus mechanical strength, electric properties, and the dielectric property of the dielectric insulating film become poor. Otherwise, if it exceeds 200 ppm, no further property improvement is obtained and storage stability becomes poor, which may cause worsening of the dielectric and electric properties of the dielectric insulating film.
  • the content of the second metal ion should be as small as possible. Preferably, it is comprised at less than 0.5 ppm based on the weight of the composition. And, preferably, the content of Na + ions and K + ions is smaller than 0.1 ppm, and more preferably smaller than 0.02 ppm. If the content of the second metal ions exceeds 0.5 ppm, or if the content of Na + ions and K + ions exceeds 0.1 ppm, electric properties of the dielectric insulating film may be affected, and gate device characteristics may be fatally affected.
  • the second metal ions may be removed by a common metal ion removing method prior to the addition of the first metal ions. More specifically, the second metal ions may be washed off with water, or removed using an ion exchange resin filter or a zeta-potential filter, and so forth. However, these examples are not limiting examples.
  • the organic solvent comprised in the coating composition for a dielectric insulating film is not particularly limited. It may be the organic solvent used in the preparation of the organosiloxane polymer, a new organic solvent added after the preparation of the organosiloxane polymer, or a mixture of the two.
  • the organic solvent are the same as the organic solvent used in the preparation of the organosiloxane polymer, and will not be specified here.
  • the organic solvent that has been used in the preparation of the organosiloxane polymer it is preferable to remove specific organic solvents that impair coating properties of the coating composition, reaction byproducts produced during the preparation of the organosiloxane polymer, and water, to below a specific level.
  • the coating composition for a dielectric insulating film of the invention may further comprise d) a pore generating material, in order to reduce the density of the dielectric insulating film.
  • the pore generating material is any organic molecule, or an organic polymer that can be pyrolyzed at 450° C. or lower.
  • the pore generating material may have an alkoxy silane functional group, at the terminal or inside the molecule that can react with the organosiloxane polymer.
  • the pore generating material has a weight-average molecular weight of 300 to 100,000, more preferably 300 to 20,000. If the molecular weight of the pore generating material is smaller than 300, pore generation may be insufficient. Otherwise, if it exceeds 100,000, compatibility with the matrix resin becomes poor, and formation of micropores becomes difficult.
  • the pore generating material is at least one selected from the group consisting of a polymer or a copolymer having a linear, block, radial, or crosslinkage type of molecular structure. More preferably, it is at least one selected from the group consisting of a polymer or a copolymer having a block, radial, or crosslinkage type of molecular structure.
  • the coating properties of the coating composition for a dielectric insulating film are controlled by the solid content in the composition.
  • the coating composition for a dielectric insulating film has a solid content of 2 to 60 wt %, and more preferably 5 to 40 wt %. If the solid content is below 2 wt %, a sufficient film thickness cannot be attained. Otherwise, if it exceeds 60 wt %, coating properties and storage stability become poor.
  • the coating composition for a dielectric insulating film may further comprise water for improvement of its mechanical strength and dielectric property.
  • the water is comprised at 1 to 10 wt %, and more preferably at 2 to 7 wt %, per 100 wt % of the composition. If the water content is below 1 wt %, improvement of the mechanical strength and dielectric property is only slight. Otherwise, if it exceeds 10 wt %, coating properties of the dielectric insulating film become poor, so that it is difficult to obtain a uniform dielectric insulating film.
  • the dielectric insulating film of the invention is prepared from the coating composition for a dielectric insulating film by coating the composition on a substrate, and curing the resultant film by drying and baking.
  • the substrate is not particularly limited, but a silicon wafer, a SiO 2 wafer, a SiN wafer, a compound semiconductor, a glass substrate, or a polymer substrate is preferable.
  • Coating of the composition on the substrate may be performed by conventional liquid phase coating, preferably by spin coating, dip coating, roll coating, or spray coating, and more preferably by spin coating, particularly when the dielectric insulating film is used between multilayer circuits of a semiconductor device.
  • Thickness of the coat film may be controlled by the viscosity of the composition.
  • the thickness may be controlled by adjusting the spinning rate of the spin coater.
  • an organosiloxane polymer dielectric insulating film having a three-dimensional structure may be formed by drying and baking.
  • the drying is performed in the temperature range where the organic solvent included in the coating composition can evaporate, more preferably at 30 to 300° C.
  • the drying process may be divided into pre-baking and soft-baking steps. In the pre-baking step, the organic solvent included in the dielectric insulating film is slowly evaporated, and in the soft-baking step, a specific amount of the functional groups of the organosiloxane polymer is cross-linked.
  • the baking process which follows the drying process, is the last process of reacting any remaining functional groups of the organosiloxane polymer.
  • the baking temperature may be determined considering thermal stability of the organosiloxane polymer dielectric insulating film, and characteristics of the semiconductor device prepared therefrom.
  • the baking is performed at 300° C. or above, and more preferably at 350 to 500° C.
  • the drying and baking may be performed either by increasing the temperature continuously, or by increasing the temperature incrementally. In the case of incremental drying and baking, drying and baking at each temperature is preferably performed for from 1 minute to 5 hours.
  • the same or different heating methods may be used during the drying and baking processes.
  • the first metal ions or the salt thereof facilitate curing of the organosiloxane polymer, thereby reducing unreacted functional groups in the dielectric insulating film, enhancing mechanical strength of the dielectric insulating film, and improving the dielectric and electric properties of the dielectric insulating film.
  • the dielectric insulating film has a good dielectric property and superior mechanical and electric properties, it may be used as an inter-layer dielectric insulating film of a semiconductor device, an inter-layer dielectric insulating film of an electronic device, a protection film of an electronic device, an inter-layer dielectric insulating film of a multilayer wiring substrate, a protection film, or an anti-insulating film of a liquid crystal display device, gas barrier film, etc.
  • the thickness of the dielectric insulating film can vary depending on use, and is not particularly limited, but when it is used as an inter-layer dielectric insulating film of a semiconductor device, a thickness of 0.05 to 2 ⁇ m is preferable.
  • the reaction solution was diluted with ether, and washed with water until a neutral pH obtained. Magnesium sulfate was added to completely remove water from the reaction solution, and then remaining solvent was completely removed in a vacuum oven to obtain an organosiloxane polymer.
  • the organosiloxane polymer had a weight-average molecular weight of 3500.
  • the organosiloxane polymer was dissolved in propylene glycol methyl ether acetate to a 20 wt % solution.
  • the solution was passed through a metal ion removal filter, so that the total metal ion content became 0.05 ppm or lower based on the weight of the solution.
  • Metal ion content was measured with an inductively coupled plasma-mass spectrometer (ICP-MS). The results are given in Table 1 below.
  • ICP-MS inductively coupled plasma-mass spectrometer
  • the resultant coating composition for a dielectric insulating film was spin coated on a silicon wafer to obtain a coat film, and dried by pre-baking on a hot plate at 80° C. for 1 minute, and then soft-baking at 150° C. for 1 minute.
  • a polyethylene oxide (PEO)-polypropylene oxide (PPO)-polyethylene oxide (PEO) copolymer having a weight-average molecular weight of 5,000 and a polyethylene oxide content of 30% was dissolved in propylene glycol methyl ether acetate to a concentration of 20 wt % to obtain a PEO-PPO-PEO solution.
  • a mixture of 1.1 g of water and 7.6 g of the PEO-PPO-PEO solution was added to 20 g of the prepared organosiloxane polymer solution.
  • the mixture solution was passed through a metal ion removal filter, so that the total metal ion content became 0.05 ppm or lower based on the weight of the solution.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a RbCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a CsCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 50 ppm of a RbCl salt and 50 ppm of a CsCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 1, except that a RbCl salt was not added after purification using a metal ion removal filter.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that a RbCl salt was not added after purification using a metal ion removal filter.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 0.2 ppm of a RbCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a ZnCl 2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a SnCl 2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a PtCl 2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a NiCl 2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • a dielectric insulating film was prepared in the same manner as in Example 1. RbCl salt was deposited on the surface of the dielectric insulating film, and it was impossible to obtain a uniform coat film.
  • a coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a tetramethylammonium nitrate salt based on the mixture solution purified using a metal ion removal filter was added to the solution. When stored at room temperature for 1 week, the viscosity of the solution dropped rapidly.
  • a dielectric insulating film was prepared in the same manner as in Example 1.
  • the dielectric constant, mechanical strength, and leakage current were measured for the dielectric insulating films prepared in Examples 1 to 5, and Comparative Examples 1 to 10. Measurements were made as follows.
  • An MIS (metal/insulator/semiconductor) device comprising each of the dielectric insulating films prepared in Examples 1 to 5 and Comparative Examples 1 to 10 was manufactured on a P-doped Si wafer. Measurements were made at 1 MHz using an LCR meter (HP).
  • An MIS (metal/insulator/semiconductor) device comprising each of the dielectric insulating films prepared in Examples 1 to 5 and Comparative Examples 1 to 10 was manufactured on a P-doped Si wafer. Breakdown voltage and leakage current were measured using a Keithley 6517 electrometer.

Abstract

The present invention relates to a coating composition for a dielectric insulating film comprising a) an organosiloxane polymer, b) first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof, and c) an organic solvent, in which the first metal ions are comprised at 1 to 200 ppm based on the weight of the composition, a dielectric insulating film prepared therefrom, and an electric or electronic device comprising the same. A dielectric insulating film prepared from the coating composition of the present invention has an improved dielectric constant and superior mechanical strength and electric properties.

Description

    CROSS REFERENCES TO RELATED APPLICATION
  • This application claims priority to and the benefit of Korean Patent Application No. 10-2005-0021977 filed in the Korean Industrial Property Office on Mar. 16, 2005, the entire contents of which are incorporated hereinto by reference.
    • FIELD OF THE INVENTION
  • The present invention relates to a coating composition for a dielectric insulating film, a dielectric insulating film prepared therefrom, and an electric or electronic device comprising the same, and more particularly to a coating composition for a dielectric insulating film having superior mechanical strength and electric properties while having a low dielectric constant, a dielectric insulating film prepared therefrom, and an electric or electronic device comprising the same.
    • BACKGROUND OF THE INVENTION
  • As semiconductor devices become more integrated, and consequently the metal wiring pitches decrease, such problems as propagation delay, crosstalk noise, and power dissipation are causing concern.
  • To solve these problems, reducing the RC delay can initially be considered. For this purpose, resistance of the metal wiring material and conductance between each metal wire are reduced. In general, use of copper (Cu) which has good electric conductivity as a metal wiring material and a highly insulating material between the metal wires are known to be good for the purpose.
  • Most currently used insulating are SiO2 based materials, having a dielectric constant of 4.0. Recently, materials having a dielectric constant of 3.0 have become commercially available. Efforts are being made to reduce the constant to below 2.2 or 2.0 in the long term.
  • As conventional ways of reducing the dielectric constant to or below 2.5, there are a method of introducing a pore generating material into a low-dielectric matrix resin, curing it, and removing the material to obtain a porous dielectric insulating film, a method of hydrolyzing a silane compound in the presence of a base catalyst and polymerizing it to obtain a porous film, and so forth. Although low-dielectric insulating films obtained by these methods have a dielectric constant of 2.5 or less, mechanical strength decreases significantly and electric properties worsen because of the presence of pores. Thus, improvement of physical properties is required for semiconductors.
  • Besides having good dielectric and mechanical properties, a coating composition for a dielectric insulating film used in a semiconductor device should have particulate or metallic impurities below a given level. If particles or metal ions are present in the dielectric insulating film composition, productivity may decrease.
  • Also, if metals such as Na, K, Ca, Fe, Cu, Ni, Mg, and Zn or their ions are present in the dielectric insulating film composition, electric properties of the resultant dielectric insulating film may be poor. Especially, such metal ions as Na+ and K+ should be controlled to below a given level, because they diffuse fast and may cause a fatal effect on the performance of the gate device.
    • SUMMARY OF THE INVENTION
  • The present invention was made in consideration of the above-mentioned problems, and it is an object of the invention to provide a coating composition for a dielectric insulating film comprising specific metal ions and thus offering a low dielectric constant and superior mechanical strength and electric properties to a dielectric insulating film.
  • It is another object of the invention to provide a dielectric insulating film prepared from the dielectric insulating film composition and which thus has a low dielectric constant and superior mechanical strength and electric properties.
  • It is still another object of the invention to provide an electric or electronic device comprising the dielectric insulating film.
  • In order to attain the objects, the present invention provides a coating composition for a dielectric insulating film comprising a) an organosiloxane polymer; b) a first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof; and c) an organic solvent, where the first metal ions are comprised at 1 to 200 ppm based on the weight of the composition.
  • The invention also provides a dielectric insulating film prepared from the coating composition for a dielectric insulating film and comprising metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof.
  • The invention further provides an electric or electronic device comprising the dielectric insulating film.
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Hereunder is given a detailed description of the present invention.
  • The present inventors worked on a dielectric insulating film having a low dielectric constant and superior mechanical and electric properties while containing fewer metals, such as Na, K, Ca, Fe, Cu, Ni, Mg, and Zn, and ions thereof. In doing so, they found that a coating composition for a dielectric insulating film including a specific amount of Rb ions, Cs ions, or a mixture thereof facilitates curing of the dielectric insulating film and increases cross-linkage density of the dielectric insulating film, thereby improving the mechanical strength, dielectric property, electric properties, etc., of the dielectric insulating film.
  • In this specification, Rb ions, Cs ions, or a mixture thereof is referred to as the first metal ions, and the other metal ions excluding the Rb ions or the Cs ions, such as Na, K, Ca, Fe, Cu, Ni, Mg, or Zn ions, is referred to as the second metal ions.
  • In general, in the manufacturing process of semiconductor devices, the second metal ions may be included above a certain level when making copper wiring and during barrier film processing and dielectric insulating film manufacturing. Also, it may be included above a certain level when manufacturing the coating composition for a dielectric insulating film because of the organosiloxane polymer source, solvent, reactor, and so forth.
  • If a coating composition containing the second metal ions is prepared into a dielectric insulating film, the electric properties of the dielectric insulating film may be not good. In particular, the Na+ ions and the K+ ions may cause a fatal effect on the gate device characteristics because of a very fast diffusion rate. Thus, their content is strictly limited in semiconductor manufacturing processes.
  • However, if a coating composition not containing the second metal ions is prepared into a dielectric insulating film, the dielectric property, mechanical strength, and electric properties become poor.
  • The coating composition for a dielectric insulating film in accordance with the present invention comprises a) an organosiloxane polymer, b) first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof, and c) an organic solvent.
  • The organosiloxane polymer may be any one polymerized from a silane compound or a silane oligomer, however an organosiloxane polymer polymerized from at least one silane compound selected from the group consisting of a) at least one monomer selected from the group consisting of the compounds represented by Formula 1 and Formula 2 below, b) a dimer prepared from the monomer, and c) an oligomer prepared from the monomer, the dimer, or a mixture thereof, is more preferable in terms of dielectric property and mechanical strength.
    SiR1 pR2 4-p   (1)
  • where
  • R1 is hydrogen, an aryl, a vinyl, an allyl, a C1-C4 linear or branched alkyl substituted with fluorine, or a C1-C4 linear or branched alkyl not substituted with fluorine;
  • R2 is a C1-C4 linear or branched alkoxy, acetoxy, or chlorine; and
  • p is an integer of 1 or 2,
    R3 qR4 3-qSi-M-SiR5 rR6 3-r   (2)
  • where
  • each of R3 and R5 is, independently, hydrogen, fluorine, an aryl, a vinyl, an allyl, a C1-C4 linear or branched alkyl substituted with fluorine, or a C1-C4 linear or branched alkyl not substituted with fluorine;
  • each of R4 and R6 is, independently, a C1-C4 linear or branched alkoxy, an acetoxy, or chlorine;
  • M is a C1-C6 alkylene, or a phenylene; and
  • each of q and r is an integer of 0 to 2.
  • The organosiloxane polymer preferably has a weight-average molecular weight, in terms of equivalent polystyrene molecular weight, of at least 500, and is preferably in the range of 500 to 1,000,000. If the weight-average molecular weight of the organosiloxane polymer is less than 500, the coating property of the dielectric insulating film may worsen.
  • The organosiloxane polymer may be prepared by mixing a silane compound polymerized from at least one selected from the group consisting of i) at least one monomer selected from the group consisting of the compounds represented by Formula 1 and Formula 2, ii) a dimer prepared from the monomer, and iii) an oligomer prepared from the monomer, the dimer, or a mixture thereof with a catalyst and water, and then hydrolyzing and condensing the silane compound.
  • The hydrolysis and condensation may proceed by adding an organic solvent, if necessary. Preferably, the hydrolysis and condensation are performed in the presence of an organic solvent for convenience of molecular weight control of the organosiloxane polymer to be polymerized.
  • In the preparation of the organosiloxane polymer, any organic solvent that does not affect the hydrolysis or condensation of the silane compound may be used, however, at least one selected from the group consisting of an aliphatic hydrocarbon solvent, an aromatic hydrocarbon solvent, an alcohol solvent, a ketone solvent, an ether solvent, an ester solvent, and an amide solvent is preferable.
  • To be specific, at least one organic solvent selected from the group consisting of a) at least one aliphatic hydrocarbon solvent selected from the group consisting of n-pentane, i-pentane, n-hexane, i-hexane, 2,2,4-trimethylpentane, cyclohexane, and methylcyclohexane, b) at least one aromatic hydrocarbon solvent selected from the group consisting of benzene, toluene, xylene, trimethylbenzene, ethylbenzene, and methylethylbenzene, c) at least one alcohol solvent selected from the group consisting of methyl alcohol, ethyl alcohol, n-propanol, i-propanol, n-butanol, i-butanol, sec-butanol, t-butanol, 4-methyl-2-pentanol, cyclohexanol, methylcyclohexanol, and glycerol, d) at least one ketone solvent selected from the group consisting of methylethylketone, methylisobutylketone, diethylketone, methyl n-propylketone, methyl n-butylketone, cyclohexanone, methylcyclohexanone, and acetylacetone, e) at least one ether solvent selected from the group consisting of tetrahydrofuran, 2-methyltetrahydrofuran, ethyl ether, n-propylether, isopropylether, diglyme, dioxin, dimethyldioxin, ethylene glycol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, propylene glycol monomethyl ether, and propylene glycol dimethyl ether, f) at least one ester solvent selected from the group consisting of diethyl carbonate, methyl acetate, ethyl acetate, ethyl lactate, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, and ethylene glycol diacetate, and g) at least one amide solvent selected from the group consisting of N-methylpyrrolidone, formamide, N-methylformamide, N-ethylformamide, N,N-dimethylacetamide, and N,N-diethylacetamide is preferable.
  • The catalyst used in the hydrolysis and condensation may be an acid catalyst or a base catalyst. In general, an acid catalyst is preferable when an organic molecule or an organic polymer is processed.
  • The acid catalyst is not particularly limited, but at least one selected from the group consisting of hydrochloric acid, nitric acid, sulfuric acid, phosphoric acid, fluoric acid, formic acid, acetic acid, propionic acid, butanoic acid, pentanoic acid, hexanoic acid, monochloroacetic acid, dichloroacetic acid, trichloroacetic acid, trifluoroacetic acid, oxalic acid, malonic acid, sulfonic acid, phthalic acid, fumaric acid, citric acid, maleic acid, oleic acid, methylmalonic acid, adipic acid, p-aminobenzoic acid, and p-toluenesulfonic acid is preferable.
  • The base catalyst is also not particularly limited, but at least one selected from the group consisting of an alkali metal compound, ammonia water, an organic amine, and a quaternary ammonium compound is preferable.
  • The addition amount of the catalyst is not particularly limited, but is determined depending on the kind of the catalyst and the silane compound.
  • The water used along with the catalyst is added to hydrolyze the silane compound. Preferably, the water is used at 1 to 30 moles, more preferably at 2 to 20 moles, per 1 mole of hydrolysable functional groups of the silane compound. If the water content is below 1 mole per mole of hydrolysable functional groups of the silane compound, hydrolysis and condensation may be insufficient, and the resultant dielectric insulating film will not have good dielectric and mechanical properties. Otherwise, if the water content exceeds 30 moles per mole of hydrolysable functional groups of the silane compound, phase separation may occur during hydrolysis and condensation, thereby causing non-uniform reaction, and the coating property tends to become poor.
  • Water may be added incrementally or continuously. The catalyst may be mixed in the organic solvent in advance, or may be added after being dissolved or dispersed in water.
  • Preferably, the hydrolysis and condensation of the organosiloxane polymer are performed at 0 to 100° C.
  • The first metal ions may be added along with the organosiloxane polymer and the organic solvent included in a metal salt comprising Rb ions, Cs ions, or a mixture thereof.
  • The first metal ions are preferably comprised at 1 to 200 ppm, more preferably at 5 to 100 ppm, based on the weight of the coating composition for a dielectric insulating film. If the content of the first metal ions is below 1 ppm, facilitation of curing of the organosiloxane polymer, a matrix resin, is only slight, and thus mechanical strength, electric properties, and the dielectric property of the dielectric insulating film become poor. Otherwise, if it exceeds 200 ppm, no further property improvement is obtained and storage stability becomes poor, which may cause worsening of the dielectric and electric properties of the dielectric insulating film.
  • In the present invention, the content of the second metal ion should be as small as possible. Preferably, it is comprised at less than 0.5 ppm based on the weight of the composition. And, preferably, the content of Na+ ions and K+ ions is smaller than 0.1 ppm, and more preferably smaller than 0.02 ppm. If the content of the second metal ions exceeds 0.5 ppm, or if the content of Na+ ions and K+ ions exceeds 0.1 ppm, electric properties of the dielectric insulating film may be affected, and gate device characteristics may be fatally affected.
  • The second metal ions may be removed by a common metal ion removing method prior to the addition of the first metal ions. More specifically, the second metal ions may be washed off with water, or removed using an ion exchange resin filter or a zeta-potential filter, and so forth. However, these examples are not limiting examples.
  • The organic solvent comprised in the coating composition for a dielectric insulating film is not particularly limited. It may be the organic solvent used in the preparation of the organosiloxane polymer, a new organic solvent added after the preparation of the organosiloxane polymer, or a mixture of the two.
  • Preferable examples of the organic solvent are the same as the organic solvent used in the preparation of the organosiloxane polymer, and will not be specified here. However, among them, at least one ether solvent selected from the group consisting of ethylene glycol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, propylene glycol monomethyl ether, and propylene glycol dimethyl ether, and at lest one ester solvent selected from the group consisting of diethyl carbonate, methyl acetate, ethyl acetate, ethyl lactate, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, and ethylene glycol diacetate are more preferable for use as the main solvent, considering the coating properties of the coating composition.
  • When the organic solvent that has been used in the preparation of the organosiloxane polymer is used, it is preferable to remove specific organic solvents that impair coating properties of the coating composition, reaction byproducts produced during the preparation of the organosiloxane polymer, and water, to below a specific level.
  • The coating composition for a dielectric insulating film of the invention may further comprise d) a pore generating material, in order to reduce the density of the dielectric insulating film. Preferably, the pore generating material is any organic molecule, or an organic polymer that can be pyrolyzed at 450° C. or lower.
  • To take specific preferable examples, at least one organic molecule selected from the group consisting of an aliphatic hydrocarbon, an aromatic hydrocarbon, an ether compound, an ester compound, an anhydride compound, a carbonate compound, an acryl compound, a thioether compound, an isocyanate compound, an isocyanurate compound, a sulfone compound, and a sulfoxide compound that can be pyrolyzed at 150 to 450° C., or a polymer polymerized therefrom, and more preferably an alkylene oxide polymer and an acrylate polymer that can be pyrolyzed at 150 to 450° C., may be used.
  • The pore generating material may have an alkoxy silane functional group, at the terminal or inside the molecule that can react with the organosiloxane polymer.
  • Preferably, the pore generating material has a weight-average molecular weight of 300 to 100,000, more preferably 300 to 20,000. If the molecular weight of the pore generating material is smaller than 300, pore generation may be insufficient. Otherwise, if it exceeds 100,000, compatibility with the matrix resin becomes poor, and formation of micropores becomes difficult.
  • Preferably, the pore generating material is at least one selected from the group consisting of a polymer or a copolymer having a linear, block, radial, or crosslinkage type of molecular structure. More preferably, it is at least one selected from the group consisting of a polymer or a copolymer having a block, radial, or crosslinkage type of molecular structure.
  • The coating properties of the coating composition for a dielectric insulating film are controlled by the solid content in the composition. Preferably, the coating composition for a dielectric insulating film has a solid content of 2 to 60 wt %, and more preferably 5 to 40 wt %. If the solid content is below 2 wt %, a sufficient film thickness cannot be attained. Otherwise, if it exceeds 60 wt %, coating properties and storage stability become poor.
  • The coating composition for a dielectric insulating film may further comprise water for improvement of its mechanical strength and dielectric property. Preferably, the water is comprised at 1 to 10 wt %, and more preferably at 2 to 7 wt %, per 100 wt % of the composition. If the water content is below 1 wt %, improvement of the mechanical strength and dielectric property is only slight. Otherwise, if it exceeds 10 wt %, coating properties of the dielectric insulating film become poor, so that it is difficult to obtain a uniform dielectric insulating film.
  • The dielectric insulating film of the invention is prepared from the coating composition for a dielectric insulating film by coating the composition on a substrate, and curing the resultant film by drying and baking.
  • The substrate is not particularly limited, but a silicon wafer, a SiO2 wafer, a SiN wafer, a compound semiconductor, a glass substrate, or a polymer substrate is preferable.
  • Coating of the composition on the substrate may be performed by conventional liquid phase coating, preferably by spin coating, dip coating, roll coating, or spray coating, and more preferably by spin coating, particularly when the dielectric insulating film is used between multilayer circuits of a semiconductor device.
  • Thickness of the coat film may be controlled by the viscosity of the composition. In the case of spin coating, the thickness may be controlled by adjusting the spinning rate of the spin coater.
  • After the composition is coated, an organosiloxane polymer dielectric insulating film having a three-dimensional structure may be formed by drying and baking.
  • Preferably, the drying is performed in the temperature range where the organic solvent included in the coating composition can evaporate, more preferably at 30 to 300° C. The drying process may be divided into pre-baking and soft-baking steps. In the pre-baking step, the organic solvent included in the dielectric insulating film is slowly evaporated, and in the soft-baking step, a specific amount of the functional groups of the organosiloxane polymer is cross-linked.
  • The baking process, which follows the drying process, is the last process of reacting any remaining functional groups of the organosiloxane polymer. The baking temperature may be determined considering thermal stability of the organosiloxane polymer dielectric insulating film, and characteristics of the semiconductor device prepared therefrom. Preferably, the baking is performed at 300° C. or above, and more preferably at 350 to 500° C.
  • The drying and baking may be performed either by increasing the temperature continuously, or by increasing the temperature incrementally. In the case of incremental drying and baking, drying and baking at each temperature is preferably performed for from 1 minute to 5 hours.
  • The method of heating in the drying and baking is not particularly limited. A hot plate, an oven, a furnace, etc., may be used for heating. The heating may be performed under an inert gas atmosphere, e.g., with nitrogen, argon, or helium, under an oxygen atmosphere, under an oxygen-containing gas atmosphere (e.g., air), in a vacuum, or under an ammonia- or hydrogen-containing gas atmosphere.
  • The same or different heating methods may be used during the drying and baking processes.
  • The dielectric insulating film prepared from the coating composition may comprise first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof, or a salt thereof, which is added to facilitate curing of the organosiloxane polymer.
  • The first metal ions or the salt thereof facilitate curing of the organosiloxane polymer, thereby reducing unreacted functional groups in the dielectric insulating film, enhancing mechanical strength of the dielectric insulating film, and improving the dielectric and electric properties of the dielectric insulating film.
  • The content of the first metal ions or the salt thereof is determined by the content of the first metal ions comprised in the coating composition for a dielectric insulating film. Preferably, it is 5 to 1500 ppm, more preferably 15 to 800 ppm, based on the weight of the dielectric insulating film. If the content of the first metal ions is below 5 ppm, mechanical strength and electric properties of the dielectric insulating film may worsen. Otherwise, if it exceeds 1500 ppm, dielectric and electric properties of the dielectric insulating film may worsen.
  • Since the dielectric insulating film has a good dielectric property and superior mechanical and electric properties, it may be used as an inter-layer dielectric insulating film of a semiconductor device, an inter-layer dielectric insulating film of an electronic device, a protection film of an electronic device, an inter-layer dielectric insulating film of a multilayer wiring substrate, a protection film, or an anti-insulating film of a liquid crystal display device, gas barrier film, etc.
  • The thickness of the dielectric insulating film can vary depending on use, and is not particularly limited, but when it is used as an inter-layer dielectric insulating film of a semiconductor device, a thickness of 0.05 to 2 μm is preferable.
    • EXAMPLES
  • The following examples further illustrate the present invention in detail, but they are not to be construed as limiting the scope of the invention.
    • Example 1
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • 100.0 g of methyl trimethoxysilane (MTMS) and 83.8 g of tetramethoxysilane (TMS) were added to 429 g of tetrahydrofuran, an organic solvent. Then, 81.0 g of a 0.01 N aqueous nitric acid solution was slowly added thereto. Reaction was performed at room temperature (25° C.) for 30 minutes. After slowly heating to 80° C., reaction was performed overnight (24 hours) while heating and refluxing.
  • After the reaction was completed, the reaction solution was diluted with ether, and washed with water until a neutral pH obtained. Magnesium sulfate was added to completely remove water from the reaction solution, and then remaining solvent was completely removed in a vacuum oven to obtain an organosiloxane polymer. The organosiloxane polymer had a weight-average molecular weight of 3500.
  • The organosiloxane polymer was dissolved in propylene glycol methyl ether acetate to a 20 wt % solution. The solution was passed through a metal ion removal filter, so that the total metal ion content became 0.05 ppm or lower based on the weight of the solution. Metal ion content was measured with an inductively coupled plasma-mass spectrometer (ICP-MS). The results are given in Table 1 below.
    TABLE 1
    (Unit: ppm)
    Element
    Cu Fe K Na Ca Mg Zn Total
    Content 0.001 0.014 0.002 0.003 0.016 0.004 0.004 0.044
  • 30 ppm of a RbCl salt based on the weight of the solution was added to the purified organosiloxane polymer solution, to obtain a coating composition for a dielectric insulating film.
  • (Preparation of Dielectric Insulating Film)
  • The resultant coating composition for a dielectric insulating film was spin coated on a silicon wafer to obtain a coat film, and dried by pre-baking on a hot plate at 80° C. for 1 minute, and then soft-baking at 150° C. for 1 minute.
  • The dried silicon wafer was heated to 430° C. in a furnace, and cured for 1 hour to obtain a dielectric insulating film.
    • Example 2 (Preparation of Coating Composition for a Dielectric Insulating Film)
  • An organosiloxane polymer obtained in the same manner as in Example 1 was dissolved in propylene glycol methyl ether acetate to a concentration of 20 wt % to obtain an organosiloxane polymer solution.
  • And, a polyethylene oxide (PEO)-polypropylene oxide (PPO)-polyethylene oxide (PEO) copolymer (triblock copolymer) having a weight-average molecular weight of 5,000 and a polyethylene oxide content of 30% was dissolved in propylene glycol methyl ether acetate to a concentration of 20 wt % to obtain a PEO-PPO-PEO solution.
  • A mixture of 1.1 g of water and 7.6 g of the PEO-PPO-PEO solution was added to 20 g of the prepared organosiloxane polymer solution. The mixture solution was passed through a metal ion removal filter, so that the total metal ion content became 0.05 ppm or lower based on the weight of the solution.
  • 30 ppm of a RbCl salt based on the weight of the solution was added to the purified polymer solution to obtain a coating composition for a dielectric insulating film.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Example 3
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a RbCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Example 4
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a CsCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Example 5
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 50 ppm of a RbCl salt and 50 ppm of a CsCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 1
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 1, except that a RbCl salt was not added after purification using a metal ion removal filter.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 2
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that a RbCl salt was not added after purification using a metal ion removal filter.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 3
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 0.2 ppm of a RbCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 4
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a ZnCl2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 5
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a SnCl2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 6
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a PtCl2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 7
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a FeCl3 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 8
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a NiCl2 salt based on the mixture solution purified using a metal ion removal filter was added to the solution instead of the RbCl salt.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
    • Comparative Example 9
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 500 ppm of a RbCl salt based on the mixture solution purified using a metal ion removal filter was added to the solution.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1. RbCl salt was deposited on the surface of the dielectric insulating film, and it was impossible to obtain a uniform coat film.
    • Comparative Example 10
  • (Preparation of Coating Composition for a Dielectric Insulating Film)
  • A coating composition for a dielectric insulating film was prepared in the same manner as in Example 2, except that 100 ppm of a tetramethylammonium nitrate salt based on the mixture solution purified using a metal ion removal filter was added to the solution. When stored at room temperature for 1 week, the viscosity of the solution dropped rapidly.
  • (Preparation of Dielectric Insulating Film)
  • A dielectric insulating film was prepared in the same manner as in Example 1.
  • [Measurement of Physical Properties of Dielectric Insulating Film]
  • The dielectric constant, mechanical strength, and leakage current were measured for the dielectric insulating films prepared in Examples 1 to 5, and Comparative Examples 1 to 10. Measurements were made as follows.
  • Dielectric Constant
  • An MIS (metal/insulator/semiconductor) device comprising each of the dielectric insulating films prepared in Examples 1 to 5 and Comparative Examples 1 to 10 was manufactured on a P-doped Si wafer. Measurements were made at 1 MHz using an LCR meter (HP).
  • Mechanical Strength
  • Modulus and hardness were measured using a Nano Indenter.
  • Breakdown Voltage and Leakage Current)
  • An MIS (metal/insulator/semiconductor) device comprising each of the dielectric insulating films prepared in Examples 1 to 5 and Comparative Examples 1 to 10 was manufactured on a P-doped Si wafer. Breakdown voltage and leakage current were measured using a Keithley 6517 electrometer.
  • Measurement results are shown in Table 2 below.
    TABLE 2
    Leakage
    Breakdown current @
    Dielectric Modulus Hardness voltage 1 MV/cm
    Added materials constant (GPa) (GPa) (MV/cm) (A/cm2)
    Example 1 30 ppm RbCl 2.89 14.5 1.61 5.0  10 −10
    Example 2 30 ppm RbCl, 2.20 5.30 0.61 3.4 10−9
    PEO-PPO-PEO
    Example 3 100 ppm RbCl, 2.18 5.89 0.65 3.6 <10−9  
    PEO-PPO-PEO
    Example 4 100 ppm CsCl, 2.20 5.59 0.62 3.9 <10−9  
    PEO-PPO-PEO
    Example 5 50 ppm RbCl + 50 ppm 2.20 5.75 0.63 3.7 <10−9  
    CsCl,
    PEO-PPO-PEO
    Comparative — 3.23 11.8 1.31 4.5 10−7
    Example 1
    Comparative PEO-PPO-PEO 2.72 4.14 0.46 2.9 10−5
    Example 2
    Comparative 0.2 ppm RbCl, 2.70 4.20 0.47 3.0 10−6
    Example 3 PEO-PPO-PEO
    Comparative 100 ppm ZnCl2, 2.80 3.70 0.39 2.5 >10−5  
    Example 4 PEO-PPO-PEO
    Comparative 100 ppm SnCl2, 3.03 3.75 0.41 2.2 >10−5  
    Example 5 PEO-PPO-PEO
    Comparative 100 ppm PtCl2, 2.60 4.44 0.54 2.9 10−6
    Example 6 PEO-PPO-PEO
    Comparative 100 ppm FeCl3, 3.21 4.12 0.43 2.0 >10−5  
    Example 7 PEO-PPO-PEO
    Comparative 100 ppm NiCl2, 2.73 4.34 0.54 2.6 10−5
    Example 8 PEO-PPO-PEO
    Comparative 500 ppm RbCl, 2.34 5.60 0.62 3.1 10−7
    Example 9 PEO-PPO-PEO
    Comparative 100 ppm 2.45 3.91 0.43 3.0 10−7
    Example Me4NNO3,
    10 PEO-PPO-PEO
  • As seen in Table 2, the dielectric insulating films prepared from the coating compositions comprising Rb ions or CS ions, i.e., the first metal ions (Examples 1 to 5), had lower dielectric constants and improved mechanical strength and electric properties compared with other dielectric insulating films not comprising the metal ions.
  • The dielectric constant and mechanical properties of the dielectric insulating films of Comparative Examples 4 to 8, which comprised the metal ions other than the Rb ions or CS ions, i.e., the second metal ions, were not improved. The dielectric insulating film of Comparative Example 10, which was prepared from the coating composition comprising an amine (ammonium salt), which is known to facilitate curing, had poor storage stability and mechanical strength, and the electrical and dielectric properties were not good.
  • While the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art will appreciate that various modifications and substitutions can be made thereto without departing from the spirit and scope of the invention as set forth in the appended claims.

Claims (20)

1. A coating composition for a dielectric insulating film, comprising:
a) an organosiloxane polymer;
b) first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof; and
c) an organic solvent,
wherein the first metal ions are comprised at 1 to 200 ppm based on the weight of the composition.
2. The coating composition of claim 1, wherein the organosiloxane polymer is polymerized from at least one silane compound selected from the group consisting of:
a) at least one monomer selected from the group consisting of the compounds represented by Formula 1 and Formula 2 below;
b) a dimer prepared from the monomer; and
c) an oligomer prepared from the monomer, the dimer, or a mixture thereof,

SiR1 pR2 4-p   (1)
where
R1 is hydrogen, an aryl, a vinyl, an allyl, a C1-C4 linear or branched alkyl substituted with fluorine, or a C1-C4 linear or branched alkyl not substituted with fluorine,
R2 is a linear or branched C1-C4 alkoxy, acetoxy, or chlorine, and
p is an integer 1, or 2, and

R3 qR4 3-qSi-M-SiR5 rR6 3-r,   (2)
where
each of R3 and R5 is, independently, hydrogen, a fluorine, an aryl, a vinyl, an allyl, a C1-C4 linear or branched alkyl substituted with fluorine, or a C1-C4 linear or branched alkyl not substituted with fluorine, each of R4 and R6 is, independently, a C1-C4 linear or branched alkoxy, acetoxy, or chlorine;
M is a C1-C6 alkylene, or a phenylene; and
each of q and r is an integer of 0 to 2.
3. The coating composition of claim 1, wherein the total content of the second metal ions which are metal ions excluding the Rb ions or the Cs ion is 0.5 ppm or smaller.
4. The coating composition of claim 3, wherein the total content of Na ions and K ions is 0.1 ppm or smaller.
5. The coating composition of claim 1, wherein the organic solvent is at least one selected from the group consisting of:
a) at least one aliphatic hydrocarbon solvent selected from the group consisting of n-pentane, i-pentane, n-hexane, i-hexane, 2,2,4-trimethylpentane, cyclohexane, and methylcyclohexane;
b) at least one aromatic hydrocarbon solvent selected from the group consisting of benzene, toluene, xylene, trimethylbenzene, ethylbenzene, and methyl ethylbenzene;
c) at least one alcohol solvent selected from the group consisting of methyl alcohol, ethyl alcohol, n-propanol, i-propanol, n-butanol, i-butanol, sec-butanol, t-butanol, 4-methyl 2-pentanol, cyclohexanol, methylcyclohexanol, and glycerol;
d) at least one ketone solvent selected from the group consisting of methyl ethyl ketone, methyl isobutyl ketone, diethyl ketone, methyl n-propyl ketone, methyl n-butyl ketone, cyclohexanone, methylcyclohexanone, and acetylacetone;
e) at least one ether solvent selected from the group consisting of tetrahydrofuran, 2-methyltetrahydrofuran, ethyl ether, n-propyl ether, isopropyl ether, diglyme, dioxin, dimethyldioxin, ethylene glycol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, propylene glycol monomethyl ether, and propylene glycol dimethyl ether;
f) at least one ester solvent selected from the group consisting of diethyl carbonate, methyl acetate, ethyl acetate, ethyl lactate, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, and ethylene glycol diacetate; and
g) at least one amide solvent selected from the group consisting of N-methylpyrrolidone, formamide, N-methylformamide, N-ethylformamide, N,N-dimethylacetamide, and N,N-diethylacetamide.
6. The coating composition of claim 1, further comprising:
d) a pore generating material.
7. The coating composition of claim 6, wherein the pore generating material is at least one organic molecule selected from the group consisting of an aliphatic hydrocarbon, an aromatic hydrocarbon, an ether compound, an ester compound, an anhydride compound, a carbonate compound, an acryl compound, a thioether compound, an isocyanate compound, an isocyanurate compound, a sulfone compound, and a sulfoxide compound that can be pyrolyzed in the temperature range of 150 to 450° C., and a polymer polymerized therefrom.
8. The coating composition of claim 7, wherein the pore generating material is a linear polymer, a block copolymer, a radial polymer, or a crosslinkage polymer which has a weight-average molecular weight of 300 to 100,000.
9. The coating composition of claim 1, wherein a solid content of the coating composition is 2 to 60 wt %.
10. The coating composition of claim 1, further comprising:
e) water.
11. A dielectric insulating film prepared from a coating composition of claim 1 and comprising 5 to 1500 ppm of the first metal ions selected from the group consisting of Rb ions, Cs ions, and a mixture thereof, based on the weight of the dielectric insulating film.
12. The dielectric insulating film of claim 11, wherein the coating composition comprises a organosiloxane polymer which is polymerized from at least one silane compound selected from the group consisting of:
a) at least one monomer selected from the group consisting of the compounds represented by Formula 1 and Formula 2 below;
b) a dimer prepared from the monomer; and
c) an oligomer prepared from the monomer, the dimer, or a mixture thereof,

SiR1 pR2 4-p   (1)
where
R1 is hydrogen, an aryl, a vinyl, an allyl, a C1-C4 linear or branched alkyl substituted with fluorine, or a C1-C4 linear or branched alkyl not substituted with fluorine,
R2 is a linear or branched C1-C4 alkoxy, acetoxy, or chlorine, and p is an integer 1, or 2, and
R3 qR4 3-qSi-M-SiR5 rR6 3-r,   (2)
where
each of R3 and R5 is, independently, hydrogen, a fluorine, an aryl, a vinyl, an allyl, a C1-C4 linear or branched alkyl substituted with fluorine, or a C1-C4 linear or branched alkyl not substituted with fluorine, each of R4 and R6 is, independently, a C1-C4 linear or branched alkoxy, acetoxy, or chlorine;
M is a C1-C6 alkylene, or a phenylene; and
each of q and r is an integer of 0 to 2.
13. The dielectric insulating film of claim 11, wherein a total content of second metal ions which are metal ions excluding the Rb ions or the Cs ion in the coating composition is 0.5 ppm or smaller.
14. The dielectric insulating film of claim 11, wherein the coating composition comprises at least one organic solvent selected from the group consisting of:
a) at least one aliphatic hydrocarbon solvent selected from the group consisting of n-pentane, i-pentane, n-hexane, i-hexane, 2,2,4-trimethylpentane, cyclohexane, and methylcyclohexane;
b) at least one aromatic hydrocarbon solvent selected from the group consisting of benzene, toluene, xylene, trimethylbenzene, ethylbenzene, and methyl ethylbenzene;
c) at least one alcohol solvent selected from the group consisting of methyl alcohol, ethyl alcohol, n-propanol, i-propanol, n-butanol, i-butanol, sec-butanol, t-butanol, 4-methyl 2-pentanol, cyclohexanol, methylcyclohexanol, and glycerol;
d) at least one ketone solvent selected from the group consisting of methyl ethyl ketone, methyl isobutyl ketone, diethyl ketone, methyl n-propyl ketone, methyl n-butyl ketone, cyclohexanone, methylcyclohexanone, and acetylacetone;
e) at least one ether solvent selected from the group consisting of tetrahydrofuran, 2-methyltetrahydrofuran, ethyl ether, n-propyl ether, isopropyl ether, diglyme, dioxin, dimethyldioxin, ethylene glycol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, propylene glycol monomethyl ether, and propylene glycol dimethyl ether;
f) at least one ester solvent selected from the group consisting of diethyl carbonate, methyl acetate, ethyl acetate, ethyl lactate, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, and ethylene glycol diacetate; and
g) at least one amide solvent selected from the group consisting of N-methylpyrrolidone, formamide, N-methylformamide, N-ethylformamide, N,N-dimethylacetamide, and N,N-diethylacetamide.
15. The dielectric insulating film of claim 11, wherein the coating composition further comprises d) a pore generating material.
16. The dielectric insulating film of claim 15, wherein the pore generating material is at least one organic molecule selected from the group consisting of an aliphatic hydrocarbon, an aromatic hydrocarbon, an ether compound, an ester compound, an anhydride compound, a carbonate compound, an acryl compound, a thioether compound, an isocyanate compound, an isocyanurate compound, a sulfone compound, and a sulfoxide compound that can be pyrolyzed in the temperature range of 150 to 450° C., and a polymer polymerized therefrom.
17. The dielectric insulating film of claim 16, wherein the pore generating material is a linear polymer, a block copolymer, a radial polymer, or a crosslinkage polymer which has a weight-average molecular weight of 300 to 100,000.
18. The dielectric insulating film of claim 11, wherein a solid content of the coating composition is 2 to 60 wt %.
19. The dielectric insulating film of claim 11, wherein the coating composition further comprises e) water.
20. An electric or electronic device comprising the dielectric insulating film of claim 11.
US11/270,830 2005-03-16 2005-11-10 Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same Abandoned US20060211837A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/222,120 US7635524B2 (en) 2005-03-16 2008-08-01 Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050021977A KR100775100B1 (en) 2005-03-16 2005-03-16 Coating composition for dielectric insulating film, dielectric film prepared therefrom, and electric or electronic device comprising the same
KR10-2005-0021977 2005-03-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/222,120 Division US7635524B2 (en) 2005-03-16 2008-08-01 Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same

Publications (1)

Publication Number Publication Date
US20060211837A1 true US20060211837A1 (en) 2006-09-21

Family

ID=36991878

Family Applications (2)

Application Number Title Priority Date Filing Date
US11/270,830 Abandoned US20060211837A1 (en) 2005-03-16 2005-11-10 Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same
US12/222,120 Active US7635524B2 (en) 2005-03-16 2008-08-01 Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same

Family Applications After (1)

Application Number Title Priority Date Filing Date
US12/222,120 Active US7635524B2 (en) 2005-03-16 2008-08-01 Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same

Country Status (8)

Country Link
US (2) US20060211837A1 (en)
EP (1) EP1858996B8 (en)
JP (1) JP2007520624A (en)
KR (1) KR100775100B1 (en)
CN (1) CN1926209B (en)
AT (1) ATE551380T1 (en)
TW (1) TWI303266B (en)
WO (1) WO2006098544A1 (en)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008036423A3 (en) * 2006-09-24 2008-07-31 Shocking Technologies Inc Formulations for voltage switchable dielectric material having a stepped voltage response and methods for making the same
US20090226635A1 (en) * 2008-03-07 2009-09-10 Bathium Canada Inc. Process for making electrodes for lithium based electrochemical cells
US20090226636A1 (en) * 2008-03-07 2009-09-10 Bathium Canada Inc. Process for making electrodes for lithium based electrochemical cells
US7695644B2 (en) 1999-08-27 2010-04-13 Shocking Technologies, Inc. Device applications for voltage switchable dielectric material having high aspect ratio particles
US7793236B2 (en) 2007-06-13 2010-09-07 Shocking Technologies, Inc. System and method for including protective voltage switchable dielectric material in the design or simulation of substrate devices
US7825491B2 (en) 2005-11-22 2010-11-02 Shocking Technologies, Inc. Light-emitting device using voltage switchable dielectric material
US7923844B2 (en) 2005-11-22 2011-04-12 Shocking Technologies, Inc. Semiconductor devices including voltage switchable materials for over-voltage protection
US7968015B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Light-emitting diode device for voltage switchable dielectric material having high aspect ratio particles
US8117743B2 (en) 1999-08-27 2012-02-21 Shocking Technologies, Inc. Methods for fabricating current-carrying structures using voltage switchable dielectric materials
US8203421B2 (en) 2008-04-14 2012-06-19 Shocking Technologies, Inc. Substrate device or package using embedded layer of voltage switchable dielectric material in a vertical switching configuration
US8206614B2 (en) 2008-01-18 2012-06-26 Shocking Technologies, Inc. Voltage switchable dielectric material having bonded particle constituents
US8272123B2 (en) 2009-01-27 2012-09-25 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US8362871B2 (en) 2008-11-05 2013-01-29 Shocking Technologies, Inc. Geometric and electric field considerations for including transient protective material in substrate devices
US8399773B2 (en) 2009-01-27 2013-03-19 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US8968606B2 (en) 2009-03-26 2015-03-03 Littelfuse, Inc. Components having voltage switchable dielectric materials
US9053844B2 (en) 2009-09-09 2015-06-09 Littelfuse, Inc. Geometric configuration or alignment of protective material in a gap structure for electrical devices
US9082622B2 (en) 2010-02-26 2015-07-14 Littelfuse, Inc. Circuit elements comprising ferroic materials
US9208930B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductive core shelled particles
US9208931B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductor-on-conductor core shelled particles
US9226391B2 (en) 2009-01-27 2015-12-29 Littelfuse, Inc. Substrates having voltage switchable dielectric materials
US9224728B2 (en) 2010-02-26 2015-12-29 Littelfuse, Inc. Embedded protection against spurious electrical events
US9320135B2 (en) 2010-02-26 2016-04-19 Littelfuse, Inc. Electric discharge protection for surface mounted and embedded components

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100775100B1 (en) 2005-03-16 2007-11-08 주식회사 엘지화학 Coating composition for dielectric insulating film, dielectric film prepared therefrom, and electric or electronic device comprising the same
DE102010025769A1 (en) * 2010-07-01 2012-01-05 Basf Coatings Gmbh Process for the preparation of a color and / or effect multilayer coating
EP2508572B1 (en) 2011-04-08 2014-06-25 Dow Global Technologies LLC Low/zero voc glycol ether-esters and use as clean-up solvents and paint thinners
KR101599954B1 (en) 2013-08-08 2016-03-04 제일모직 주식회사 Composition for forming silica based insulating layer, silica based insulating layer and method for manufacturing silica based insulating layer
JP6293585B2 (en) * 2014-06-20 2018-03-14 株式会社日立製作所 Electrical insulating paper and static induction machine using the same
JP6471622B2 (en) * 2015-06-18 2019-02-20 住友ベークライト株式会社 Build-up material, laminated board, printed wiring board, semiconductor device, and laminated board manufacturing method
KR102084283B1 (en) * 2015-12-16 2020-03-03 주식회사 엘지화학 Composition for electric insulation material, electric insulation film manufactured by using the composition and circuit board and electronic device comprising the electric insulation film
WO2021162358A1 (en) * 2020-02-12 2021-08-19 한양대학교 산학협력단 Low-permittivity dielectric composition for display dielectric film, method for manufacturing low-permittivity dielectric film for display and display device using same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611040A (en) * 1985-06-05 1986-09-09 Ppg Industries, Inc. Fluoride ion as a curing catalyst for silicon-containing resins
US5512650A (en) * 1986-06-20 1996-04-30 Minnesota Mining And Manufacturing Company Block copolymer, method of making the same, diamine precursors of the same, method of making such diamines and end products comprising the block copolymer
US6617264B1 (en) * 2002-06-25 2003-09-09 Industrial Technology Research Institute SOG materials for spacer anodic bonding and method of preparing the same
US20060141163A1 (en) * 2003-04-17 2006-06-29 Bum-Gyu Choi Organic siloxane resins and insulating film using the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468285A (en) * 1994-01-18 1995-11-21 Kennerknecht; Steven Ceramic core for investment casting and method for preparation of the same
FI96373C (en) * 1994-05-26 1996-06-10 Nokia Telecommunications Oy Bus extended TST architecture
US6576568B2 (en) 2000-04-04 2003-06-10 Applied Materials, Inc. Ionic additives for extreme low dielectric constant chemical formulations
JP4840547B2 (en) 2000-04-17 2011-12-21 Ｊｓｒ株式会社 Insulating film forming composition, insulating film forming method, and silica-based film
EP1148105B1 (en) * 2000-04-17 2006-10-04 JSR Corporation Composition for film formation, method of film formation, and silica-based film
JP2002003784A (en) 2000-04-17 2002-01-09 Jsr Corp Composition for film formation, method for forming film and silica-based film
JP2002348542A (en) 2001-03-21 2002-12-04 Nippon Sheet Glass Co Ltd Coated article, coating liquid composition, and method for producing the coated article
JP2003115485A (en) * 2001-10-03 2003-04-18 Jsr Corp Film forming method, laminating film, insulation film, and substrate for semiconductor
US7345351B2 (en) * 2003-04-09 2008-03-18 Lg Chem, Ltd. Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same
KR100507967B1 (en) 2003-07-01 2005-08-10 삼성전자주식회사 Siloxane-based Resin and Semiconductive Interlayer Insulating Film Using the Same
KR100504291B1 (en) * 2003-07-14 2005-07-27 삼성전자주식회사 Siloxane-based Resin containing Germanium and Method of Semiconductor Interlayer Insulating Film Using the Same
KR100775100B1 (en) * 2005-03-16 2007-11-08 주식회사 엘지화학 Coating composition for dielectric insulating film, dielectric film prepared therefrom, and electric or electronic device comprising the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611040A (en) * 1985-06-05 1986-09-09 Ppg Industries, Inc. Fluoride ion as a curing catalyst for silicon-containing resins
US5512650A (en) * 1986-06-20 1996-04-30 Minnesota Mining And Manufacturing Company Block copolymer, method of making the same, diamine precursors of the same, method of making such diamines and end products comprising the block copolymer
US6617264B1 (en) * 2002-06-25 2003-09-09 Industrial Technology Research Institute SOG materials for spacer anodic bonding and method of preparing the same
US20060141163A1 (en) * 2003-04-17 2006-06-29 Bum-Gyu Choi Organic siloxane resins and insulating film using the same

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9144151B2 (en) 1999-08-27 2015-09-22 Littelfuse, Inc. Current-carrying structures fabricated using voltage switchable dielectric materials
US7695644B2 (en) 1999-08-27 2010-04-13 Shocking Technologies, Inc. Device applications for voltage switchable dielectric material having high aspect ratio particles
US8117743B2 (en) 1999-08-27 2012-02-21 Shocking Technologies, Inc. Methods for fabricating current-carrying structures using voltage switchable dielectric materials
US8310064B2 (en) 2005-11-22 2012-11-13 Shocking Technologies, Inc. Semiconductor devices including voltage switchable materials for over-voltage protection
US7825491B2 (en) 2005-11-22 2010-11-02 Shocking Technologies, Inc. Light-emitting device using voltage switchable dielectric material
US7923844B2 (en) 2005-11-22 2011-04-12 Shocking Technologies, Inc. Semiconductor devices including voltage switchable materials for over-voltage protection
US7968014B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Device applications for voltage switchable dielectric material having high aspect ratio particles
US7981325B2 (en) 2006-07-29 2011-07-19 Shocking Technologies, Inc. Electronic device for voltage switchable dielectric material having high aspect ratio particles
US7968015B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Light-emitting diode device for voltage switchable dielectric material having high aspect ratio particles
US7968010B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Method for electroplating a substrate
US8163595B2 (en) 2006-09-24 2012-04-24 Shocking Technologies, Inc. Formulations for voltage switchable dielectric materials having a stepped voltage response and methods for making the same
US7872251B2 (en) 2006-09-24 2011-01-18 Shocking Technologies, Inc. Formulations for voltage switchable dielectric material having a stepped voltage response and methods for making the same
WO2008036423A3 (en) * 2006-09-24 2008-07-31 Shocking Technologies Inc Formulations for voltage switchable dielectric material having a stepped voltage response and methods for making the same
US7793236B2 (en) 2007-06-13 2010-09-07 Shocking Technologies, Inc. System and method for including protective voltage switchable dielectric material in the design or simulation of substrate devices
US8206614B2 (en) 2008-01-18 2012-06-26 Shocking Technologies, Inc. Voltage switchable dielectric material having bonded particle constituents
US8420158B2 (en) * 2008-03-07 2013-04-16 Bathium Canada Inc. Process for making electrodes for lithium based electrochemical cells
US20090226635A1 (en) * 2008-03-07 2009-09-10 Bathium Canada Inc. Process for making electrodes for lithium based electrochemical cells
US20090226636A1 (en) * 2008-03-07 2009-09-10 Bathium Canada Inc. Process for making electrodes for lithium based electrochemical cells
US8147916B2 (en) * 2008-03-07 2012-04-03 Bathium Canada Inc. Process for making electrodes for lithium based electrochemical cells
US8203421B2 (en) 2008-04-14 2012-06-19 Shocking Technologies, Inc. Substrate device or package using embedded layer of voltage switchable dielectric material in a vertical switching configuration
US9208931B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductor-on-conductor core shelled particles
US9208930B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductive core shelled particles
US8362871B2 (en) 2008-11-05 2013-01-29 Shocking Technologies, Inc. Geometric and electric field considerations for including transient protective material in substrate devices
US8399773B2 (en) 2009-01-27 2013-03-19 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US8272123B2 (en) 2009-01-27 2012-09-25 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US9226391B2 (en) 2009-01-27 2015-12-29 Littelfuse, Inc. Substrates having voltage switchable dielectric materials
US8968606B2 (en) 2009-03-26 2015-03-03 Littelfuse, Inc. Components having voltage switchable dielectric materials
US9053844B2 (en) 2009-09-09 2015-06-09 Littelfuse, Inc. Geometric configuration or alignment of protective material in a gap structure for electrical devices
US9082622B2 (en) 2010-02-26 2015-07-14 Littelfuse, Inc. Circuit elements comprising ferroic materials
US9224728B2 (en) 2010-02-26 2015-12-29 Littelfuse, Inc. Embedded protection against spurious electrical events
US9320135B2 (en) 2010-02-26 2016-04-19 Littelfuse, Inc. Electric discharge protection for surface mounted and embedded components

Also Published As

Publication number Publication date
EP1858996A4 (en) 2010-03-17
KR20060100980A (en) 2006-09-22
TWI303266B (en) 2008-11-21
CN1926209A (en) 2007-03-07
EP1858996B8 (en) 2012-04-25
TW200634112A (en) 2006-10-01
WO2006098544A1 (en) 2006-09-21
US20080293879A1 (en) 2008-11-27
KR100775100B1 (en) 2007-11-08
CN1926209B (en) 2011-05-25
JP2007520624A (en) 2007-07-26
US7635524B2 (en) 2009-12-22
EP1858996A1 (en) 2007-11-28
ATE551380T1 (en) 2012-04-15
EP1858996B1 (en) 2012-03-28

Similar Documents

Publication Publication Date Title
US7635524B2 (en) Coating composition for dielectric insulating film, dielectric insulating film prepared therefrom, and electric or electronic device comprising the same
US7648894B2 (en) Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same
CN1537325A (en) Plasma curing of MSQ-based porouslow-k film materials
JP4049775B2 (en) Organosilicate polymer and insulating film containing the same
JP4142643B2 (en) Organosilicate polymer and insulating film containing the same
KR100677782B1 (en) Process for Preparing the Material for Insulation Film
US7144453B2 (en) Composition for preparing porous dielectric thin film containing saccharides porogen
US6451381B2 (en) Electrically insulating crosslinked thin-film-forming organic resin composition and method for forming thin film therefrom
US7744946B2 (en) Organic siloxane resins and insulating film using the same
JP4344903B2 (en) Materials for forming interlayer insulation film for semiconductor elements
US20050089642A1 (en) Dielectric materials preparation
KR100508901B1 (en) Organic silicate polymer and insulation film comprising the same
JP3669250B2 (en) Process for producing film-forming composition and film-forming composition obtained thereby
KR100824037B1 (en) Porogen composition for preparing dielectric insulating film, coating composition for dielectric insulating film, method for preparing dielectric insulating film by using the same, and dielectric film prepared therefrom
KR100508900B1 (en) Organic silicate polymer and insulation film comprising the same

Legal Events

Date Code Title Description
AS Assignment

Owner name: LG CHEM, LTD., KOREA, REPUBLIC OF

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KO, MIN-JIN;LEE, KI-YOUL;CHOI, BUM-GYU;AND OTHERS;REEL/FRAME:017381/0868

Effective date: 20051122

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION