US20060261463A1 - Low cost power semiconductor module without substrate - Google Patents

Low cost power semiconductor module without substrate Download PDF

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US20060261463A1
US20060261463A1 US11/495,107 US49510706A US2006261463A1 US 20060261463 A1 US20060261463 A1 US 20060261463A1 US 49510706 A US49510706 A US 49510706A US 2006261463 A1 US2006261463 A1 US 2006261463A1
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power
conductive
power semiconductor
module according
power module
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US7545033B2 (en
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William Grant
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Infineon Technologies North America Corp
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International Rectifier Corp USA
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    • HELECTRICITY
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    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49861Lead-frames fixed on or encapsulated in insulating substrates
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    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inverter Devices (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Power Conversion In General (AREA)

Abstract

A power module for low voltage applications, which does not include an insulated metal substrate is disclosed. The module includes a power shell and a plurality of lead frames each lead frame including a conductive pad on which one or more MOSFETs may be electrically mounted. The MOSFETs are electrically connected via wire bonds.

Description

    RELATED APPLICATIONS
  • This application is a divisional of U.S. patent application Ser. No. 10/635,359, filed Aug. 6, 2003, entitled Low Cost Power Semiconductor Module Without Substrate which is a divisional of U.S. patent application Ser. No. 09/758,822, filed Jan. 11, 2001 by William Grant, now U.S. Pat. No. 6,703,703 entitled Low Cost Power Semiconductor Module Without Substrate which application relates and claims priority to a U.S. provisional application Ser. No. 60/175,802, entitled Low Cost Power Semiconductor Module Without Substrate, filed in the United States Patent and Trademark Office on Jan. 12, 2000.
  • BACKGROUND OF THE INVENTION
  • This invention relates to power modules and more specifically relates to a low cost 3 phase inverter module which has no substrate for the power semiconductor die.
  • Power semiconductor modules are well known and are widely used. Typically, a plurality of semiconductor die, such as MOSgated devices, thyristors or diodes in various combinations are mounted on a substrate heatsink, such as an IMS (insulated metal substrate) or other substrate and are electrically connected through the substrate, and/or by wire bonds, to form a particular circuit. A printed circuit board containing low power control components is also supported by the module. Power and control terminals may then extend from an insulation housing which carries the substrate.
  • Substrates used to carry the power die constitute a significant part of the cost of power modules, and therefore they are limited to the smallest possible area. It would be desirable to reduce the cost of such modules while permitting appropriate thermal management and electrical insulation.
  • SUMMARY OF THE INVENTION
  • In accordance with the invention, the power die are mounted directly on lead frame extensions of a lead frame which is insert molded within and supported by the module insulation housing. A heat conductive insulation layer underlies the lead frame elements to insulate it from a heat sink support for the module. No added IMS or other substrate is used, thus reducing the cost of the module.
  • In a preferred embodiment, the module is a three phase inverter circuit for automotive application for example, for electric power steering motors. However, any other desired circuit can be provided.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a top view of a lead frame which can be used with the present invention.
  • FIG. 2 is a cross-section of the lead frame of FIG. 1 taken across section line 2-2 in FIG. 1 as incorporated in a module according to the present invention.
  • FIG. 3 is a perspective view of the module of the invention, before its interior is sealed with insulation plastic.
  • FIG. 4 is another perspective view of the module of the invention after its interior is filled.
  • FIG. 5 is a top view of the module of FIG. 4.
  • FIG. 6 is a side view of FIG. 5.
  • FIG. 7 is an end view of FIG. 5.
  • FIG. 8 is a circuit diagram of an exemplary module circuit which can be formed by the module.
  • DETAILED DESCRIPTION OF THE DRAWINGS
  • Referring first to FIG. 8, there is shown an exemplary electrical circuit diagram of a 3 phase inverter circuit which could have application to automotive uses particularly to electric power steering. Thus, terminals 20 and 21 are d-c terminals which could be connected to the automobile battery and output terminals U, V and W are 3 phase output terminals which can be used to power ac motors, or, with suitable rectification, dc motors, such as dc brushless motors, that are typically found within the automotive system. A conventional three phase inverter circuit is shown. An ASIC and other control circuit components for the MOSFETs S1 to S6 may also be provided to operate power MOSFETS S1 to S6 in a conventional sequence. The instant invention is particularly suited for low voltage applications. The die of the present invention are rated from 30 to 75 volts and are size 4.0 to 6 die as sold by the International Rectifier Corporation. Higher or lower voltage rates may also be used. For example, voltage rates of up to 1000 volts, or as low as 10 volts may be used.
  • While power MOSFETs S1 to S6 are shown as N channel devices, complementary N and P channel MOSFETs could be used.
  • In conventional modules, the circuit of FIG. 8 is commonly formed by employing unpackaged MOSFET die which are mounted on an IMS or DBC substrate and interconnected through the substrate and by wire bonds. The substrate would then be mounted within an insulation housing and terminals, such as the terminals 20, 21, U, V, W and G1 to G 6 would extend beyond the housing surface to be available for connection.
  • The substrate used to mount the die within the housing according to conventional modules is expensive. In accordance with the invention, this substrate is eliminated, with the die mounted directly on the lead frame extensions of the terminals. Note that any circuit other than an inverter can be formed, and that any type of die or mix of die, such as N and P channel MOSFETs or IGBTs, diodes, thyristors and the like can be used and enjoy the benefits of the invention.
  • FIGS. 1 to 7 show a preferred embodiment of the invention for housing the 3 phase inverter circuit of FIG. 8. Note that the same identifying numeral or letter is used in all drawings to identify the same part.
  • FIG. 1 shows one segment of an elongated conductive, stamped lead frame which can be used with the invention. A plurality of such segments are provided in the usual manner. The various segments of the lead frame are held together by webs which will be stamped out after parts are mounted on the lead frame and wire bonded and the lead frame segments are singulated. One half of the lead frame provides terminals U, V and W which are connected to large pad areas 30, 31 and 32 respectively. These pads 30, 31 and 32 will receive the MOSFET die S4, S5 and S6 respectively. The other half of the lead frame has terminals 20 and 21 and a common drain pad 33. Terminal 21 is also connected to a source pad area 34. Die S1, S2 and S3 are connected to pad 33. Die S1 to S6 are vertical conduction MOSFET die having metallized bottom drain electrodes and a top source and gate electrode. The bottom drain electrodes may be soldered or otherwise connected, as by a silver loaded conductive epoxy, to the enlarged lead frame pad regions 30, 31, 32 and 33.
  • After the die S1 to S6 are fixed in place, they may be wire bonded, as shown in FIG. 3 to complete the circuit of FIG. 8. Thus, as shown in FIG. 3, source bond wires 40 connect the pads 30, 31 and 32 to the source electrodes of die S1, S2 and S3 respectively; and source bond wires 41 connect the source electrodes of die S4, S5 and S6 to pad 34 and d-c terminal 21. Note that these bonds can be made after mounting of the lead frame in its housing.
  • Thus, after the die S1 to S6 are bonded to their various lead frame pads, the lead frame is insert molded in an insulation housing 50 and the lead frame bridging sections (exterior of the dotted line in FIG. 1) are removed to separate the leads from one another and the lead frames are thus singulated.
  • Alternatively, the lead frame may be first insert molded in the insulation housing 50, and the lead frame bridging sections removed, thereby singulating the leads from one another. Then, the die S1 to S6 may be bonded to their various lead frame pads, and wire bonded to one another.
  • In either case, the lead frames are supported by the housing 50 after lead frame trimming, with conductors U, V, W, 20 and 21 extending beyond the periphery of housing 50. Housing 50 may be preferably a thermally conductive insulation material which can electrically isolate conductive lead frame pads and a heat sink, on which the module may be mounted, from one another. The housing 50 need not, however, be made from thermally conductive material to reduce the cost of the module. For example, housing 50 may be a QUESTRA plastic made by DOW chemical, or a suitable PPA such as the one made by Amoco and sold under the mark AMODEL.
  • Housing 50 will have windows 51, 52, 53 and 54 to expose the top surfaces of pads 32, 31, 30 and 33 respectively to provide access to die S1 to S6 for the die bonding operation. A rim 60 is integral with and surrounds the housing 50 and bolt-down openings 61, 62, 63, 64 are provided at the housing corners. A bottom layer 70 of a thin insulation material extends fully across the bottom of the housing 50 and acts to electrically isolate the pads 30, 31, 32, 33 and 34 from one another and from the users heat sink on which the housing is mounted. Note that lead frame pads act to conduct thermal energy generated by the die S1 to S6 through the lead terminals and to the thermally conductive insulation layer, which may be placed in contact with a heat sink. A large percentage of the thermal energy is dissipated through the thermally conductive insulation layer, and the remainder may be dissipated through the lead terminals.
  • As next shown in FIG. 3 printed circuit boards 80 and 81 which carry control terminals G1 to G6 (FIGS. 4 and 5) and related Kelvin (source) terminals and wire bond terminals therefor are fixed to the top opposite platform end surfaces of the housing 50 and appropriate wire bonds can be made.
  • After all wire bonds are made, the interior of rim 60 of housing 50 may be filled by a suitable silastic (FIGS. 4 and 5), or an epoxy or the like.
  • A separation means 90 may then be disposed over the rim. The separation means may be rigid, and may allow the terminals to pass through. The separation means may be a blank circuit board that is capable of receiving electronic components. A circuit board containing components for the control of the inverter circuit may then be disposed over the separation means 90. Due to its rigidity, the separation means keeps the terminals aligned for engagement with the circuit board containing the control components.
  • Note that the module of FIGS. 1 to 7 has no separate substrate for receiving the die S1 to S6 and, therefore has a reduced expense.
  • Although the present invention has been described in relation to particular embodiments thereof, many other variations and modifications and other uses will become apparent to those skilled in the art. It is preferred, therefore, that the present invention be limited not by the specific disclosure herein, but only by the appended claims.

Claims (14)

1. A power module comprising:
a support housing;
a heatsink;
thermally conductive and electrically insulating body in contact with said heatsink; and
a lead frame supported by said support housing, said lead frame including a plurality of conductive pads each unitarily formed with a respective lead that extends from a respective conductive pad to the exterior of said support housing, each conductive pad including a top surface for receiving a power semiconductor switch and an opposing bottom surface in contact with said thermally conductive and electrically insulating body, whereby a portion of heat generated by each said power semiconductor switch is transmitted through said thermally conductive and electrically insulating body and another portion of heat generated by each said power semiconductor switch is transmitted through a respective lead and dissipated outside said support housing.
2. A power module according to claim 1, wherein said support housing comprises a molded rim surrounding said conductive pad, and said leads extend through said rim to the exterior thereof.
3. A power module according to claim 1, wherein at least one of said power semiconductor switches is electrically connected to at least another one of said semiconductor switches to form a power circuit.
4. A power module according to claim 1, wherein at least one of said leads is electrically connectable to a power bus to supply power to a connected power semiconductor switch and at least another one of said leads is used as an output external connection, further comprising an external lead electrically connected to a common conductive pad disposed within said support housing and electrically connectable to a common bus, wherein at least one of said power semiconductor switches is electrically connected to said common conductive pad.
5. A power module according to claim 1, wherein a plurality of power semiconductor switches are disposed on one common conductive pad, and each remaining conductive pad includes one power semiconductor switch and further comprising a conductive bar isolated from said one common conductive pad and said remaining conductive pads, said isolated conductive bar being disposed between said one common conductive pad and said remaining conductive pads.
6. A power module according to claim 5, wherein said external lead connected to said one common conductive pad is connectable to a power bus to supply power to said power semiconductor switches disposed thereon, said leads connected to said remaining conductive pads serve as output leads and said lead connected to said conductive bar serves as a connection to ground.
7. A power module according to claim 6, wherein at least one of said power semiconductor switches disposed on said one common conductive pad is electrically connected to a respective one of said remaining pads by at least one wire bond, and each of said power semiconductor switches is connected to said isolated conductive bar by at least one wire bond.
8. A power module according to claim 1, further comprising a plurality of pins each electrically connected to a control electrode of a respective power semiconductor switch and extending from an interior of said support housing to an exterior thereof for electrical connection.
9. A power module according to claim 8, wherein a number of said pins are disposed on a first circuit board adjacent said isolated conductive pads and the remaining pins are disposed on a second circuit board adjacent said at least one conductive pad.
10. A power module according to claim 1, further comprising at least one circuit board disposed inside said support housing and including at least one pin electrically connected to a conductive land, said conductive land being electrically connected to the control electrode of a power semiconductor switch.
11. A power module according to claim 10, further comprising a circuit board disposed over said support housing, wherein-said at least one pin extends through said circuit board for connection to a control circuit for controlling the operation of said power semiconductor switch.
12. A power module according to claim 6, wherein said leads connected to said remainder conductive pads extend from one side of said support housing and said lead connected to said one common conductive pad and said external lead connected to said isolated conductive bar extend from an opposing side of said support housing.
13. A power module according to claim 1, wherein said power semiconductor switches are power MOSFETs.
14. A power module according to claim 1, wherein said thermally conductive and electrically insulating body is comprised of a sil pad.
US11/495,107 2000-01-12 2006-07-28 Low cost power semiconductor module without substrate Expired - Fee Related US7545033B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070165376A1 (en) * 2006-01-17 2007-07-19 Norbert Bones Three phase inverter power stage and assembly
EP2146375A1 (en) * 2008-07-16 2010-01-20 Semikron Elektronik GmbH & Co. KG Patentabteilung Semi-conductor module
WO2022184640A1 (en) * 2021-03-05 2022-09-09 Robert Bosch Gmbh Power module, in particular for an inverter for electric machines

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10191585B8 (en) * 2000-04-25 2009-07-02 Kabushiki Kaisha Toyota Jidoshokki, Kariya Semiconductor device
US7046518B2 (en) * 2001-04-02 2006-05-16 International Rectifier Corporation Power module
DE10144323A1 (en) * 2001-09-10 2003-03-27 Delphi Tech Inc Electrical circuit unit, in particular power module, and method for the production thereof
DE10144324A1 (en) * 2001-09-10 2003-03-27 Delphi Tech Inc Electrical module
FR2833802B1 (en) * 2001-12-13 2004-03-12 Valeo Electronique POWER MODULE AND POWER MODULE SET
EP1363026A3 (en) 2002-04-26 2004-09-01 Denso Corporation Invertor integrated motor for an automotive vehicle
US6914357B2 (en) * 2002-06-10 2005-07-05 Visteon Global Technologies, Inc. Electric machine with integrated power electronics
US6841747B2 (en) 2002-09-23 2005-01-11 Siemens Energy & Automation, Inc. System and method for motor controller with a reversible housing base
EP1594164B1 (en) * 2003-02-14 2012-05-09 Hitachi, Ltd. Integrated circuit for driving semiconductor device
DE10316355C5 (en) * 2003-04-10 2008-03-06 Semikron Elektronik Gmbh & Co. Kg Power semiconductor module with flexible external pin assignment
WO2004105220A2 (en) * 2003-05-16 2004-12-02 Ballard Power Systems Corporation Power module system
DE10326321A1 (en) * 2003-06-11 2005-01-13 Compact Dynamics Gmbh Electronic assembly for switching electrical power
JP4342232B2 (en) * 2003-07-11 2009-10-14 三菱電機株式会社 Semiconductor power module and main circuit current measuring system for measuring main circuit current value of the module
US7187551B2 (en) * 2003-08-14 2007-03-06 International Rectifier Corporation Module for solid state relay for engine cooling fan control
US6933593B2 (en) * 2003-08-14 2005-08-23 International Rectifier Corporation Power module having a heat sink
FR2859066A1 (en) * 2003-08-14 2005-02-25 Int Rectifier Corp MOSFET-type power module for electric motors in car, has moulded casing having walls enclosing lower portion including conductive zones, and moulding material filling spaces between zones so that lower portion and walls form unified body
EP1689058B1 (en) * 2003-11-18 2008-07-23 Hitachi, Ltd. Control module
US20050128706A1 (en) * 2003-12-16 2005-06-16 Ballard Power Systems Corporation Power module with heat exchange
US7301755B2 (en) * 2003-12-17 2007-11-27 Siemens Vdo Automotive Corporation Architecture for power modules such as power inverters
US7149088B2 (en) * 2004-06-18 2006-12-12 International Rectifier Corporation Half-bridge power module with insert molded heatsinks
DE102005018941B4 (en) * 2005-04-22 2010-07-08 Infineon Technologies Ag Semiconductor device in a standard housing and method of making the same
US7547964B2 (en) * 2005-04-25 2009-06-16 International Rectifier Corporation Device packages having a III-nitride based power semiconductor device
EP2306634A3 (en) * 2005-06-30 2015-04-29 Continental Automotive Systems US, Inc. Control system for electric drives
US7504733B2 (en) 2005-08-17 2009-03-17 Ciclon Semiconductor Device Corp. Semiconductor die package
DE102005039165B4 (en) * 2005-08-17 2010-12-02 Infineon Technologies Ag Wire and strip bonded semiconductor power device and method of making the same
US7560808B2 (en) * 2005-10-19 2009-07-14 Texas Instruments Incorporated Chip scale power LDMOS device
US8018056B2 (en) * 2005-12-21 2011-09-13 International Rectifier Corporation Package for high power density devices
US7446375B2 (en) * 2006-03-14 2008-11-04 Ciclon Semiconductor Device Corp. Quasi-vertical LDMOS device having closed cell layout
US20070257343A1 (en) * 2006-05-05 2007-11-08 Hauenstein Henning M Die-on-leadframe (dol) with high voltage isolation
KR101251694B1 (en) * 2006-07-24 2013-04-05 엘지이노텍 주식회사 Intelligent Power Module
US20080036078A1 (en) * 2006-08-14 2008-02-14 Ciclon Semiconductor Device Corp. Wirebond-less semiconductor package
JP5112101B2 (en) * 2007-02-15 2013-01-09 株式会社東芝 Semiconductor package
JP2008211945A (en) * 2007-02-28 2008-09-11 Hitachi Ltd Vehicle drive device
DE102007020618B8 (en) 2007-04-30 2009-03-12 Danfoss Silicon Power Gmbh Method for producing a solid power module and transistor module made therewith
DE102007031490B4 (en) 2007-07-06 2017-11-16 Infineon Technologies Ag Method for producing a semiconductor module
DE102008009510B3 (en) * 2008-02-15 2009-07-16 Danfoss Silicon Power Gmbh Method for low-temperature pressure sintering
US7763970B2 (en) * 2008-02-27 2010-07-27 Infineon Technologies Ag Power module
KR101493866B1 (en) * 2008-02-28 2015-02-16 페어차일드코리아반도체 주식회사 Power device package and the method of fabricating the same
JP5107114B2 (en) * 2008-03-28 2012-12-26 三菱重工業株式会社 Inverter-integrated electric compressor
US7952879B1 (en) * 2008-04-15 2011-05-31 Vlt, Inc. System and apparatus for efficient heat removal from heat-generating electronic modules
KR101073286B1 (en) * 2008-12-03 2011-10-12 엘에스산전 주식회사 Power semiconductor module
CN101453158B (en) * 2008-12-26 2011-09-21 南京银茂微电子制造有限公司 Power module used for micro frequency transformer
US8049312B2 (en) * 2009-01-12 2011-11-01 Texas Instruments Incorporated Semiconductor device package and method of assembly thereof
JP5201171B2 (en) * 2010-05-21 2013-06-05 株式会社デンソー Semiconductor module and driving device using the same
JP5437943B2 (en) * 2010-07-26 2014-03-12 日立オートモティブシステムズ株式会社 Power semiconductor unit, power module and manufacturing method thereof
CN103262238B (en) * 2010-09-24 2016-06-22 半导体元件工业有限责任公司 Circuit arrangement
EP2624293B1 (en) * 2010-09-28 2018-03-07 Kyocera Corporation Semiconductor device housing package and electronic apparatus using the same
KR101278393B1 (en) * 2010-11-01 2013-06-24 삼성전기주식회사 Power package module and a fabricating mothod the same
US8847381B2 (en) * 2011-01-20 2014-09-30 Kyocera Corporation Semiconductor element housing package and semiconductor device equipped with the same
JP5936310B2 (en) * 2011-03-17 2016-06-22 三菱電機株式会社 Power semiconductor module and its mounting structure
DE202011100820U1 (en) 2011-05-17 2011-12-01 Ixys Semiconductor Gmbh Power semiconductor
AT512525B1 (en) 2012-05-04 2013-09-15 Mikroelektronik Ges Mit Beschraenkter Haftung Ab Printed circuit board, in particular for a power electronics module, comprising an electrically conductive substrate
JP6368646B2 (en) 2012-09-20 2018-08-01 ローム株式会社 Power module semiconductor device, inverter device, power module semiconductor device manufacturing method, and mold
EP2775520B1 (en) * 2013-03-07 2021-05-05 Infineon Technologies Americas Corp. Open source Power Quad Flat No-Lead (PQFN) leadframe
CN104052244B (en) * 2013-03-14 2019-12-13 珠海格力电器股份有限公司 Power module
DE102013008193A1 (en) 2013-05-14 2014-11-20 Audi Ag Device and electrical assembly for converting a DC voltage into an AC voltage
JP6337394B2 (en) * 2013-07-05 2018-06-06 パナソニックIpマネジメント株式会社 Semiconductor device
JP6026009B2 (en) * 2013-11-05 2016-11-16 三菱電機株式会社 Semiconductor module
DE102015108700A1 (en) 2015-06-02 2016-12-08 Infineon Technologies Austria Ag Semiconductor power package and method of making the same
CN107924913B (en) * 2016-03-22 2020-12-01 富士电机株式会社 Semiconductor device and method for manufacturing semiconductor device
JP6694589B2 (en) * 2016-06-02 2020-05-20 株式会社ジェイテクト Power module
JP6781021B2 (en) * 2016-11-29 2020-11-04 モレックス エルエルシー Electronic components
IT201700033230A1 (en) * 2017-03-27 2018-09-27 S M E S P A Power module for a converter of electrical quantities
JP1593817S (en) * 2017-03-28 2017-12-25
US10418307B2 (en) * 2017-12-22 2019-09-17 Deere & Company Electronic assembly with a direct bonded copper substrate
JPWO2019234911A1 (en) * 2018-06-08 2020-06-18 新電元工業株式会社 Semiconductor module
US11462974B2 (en) 2018-06-08 2022-10-04 Shindengen Electric Manufacturing Co., Ltd. Semiconductor module
CN110859055B (en) * 2018-06-08 2022-08-02 新电元工业株式会社 Semiconductor module
CN116825768B (en) * 2020-10-14 2024-02-23 罗姆股份有限公司 Semiconductor module
DE112021002452T5 (en) 2020-10-14 2023-02-09 Rohm Co., Ltd. SEMICONDUCTOR MODULE
DE212021000239U1 (en) 2020-10-14 2022-06-07 Rohm Co., Ltd. semiconductor module

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5001299A (en) * 1989-04-17 1991-03-19 Explosive Fabricators, Inc. Explosively formed electronic packages
US5036381A (en) * 1990-06-15 1991-07-30 Motorola, Inc. Multiple electronic devices within a single carrier structure
US5258647A (en) * 1989-07-03 1993-11-02 General Electric Company Electronic systems disposed in a high force environment
US5315486A (en) * 1991-12-16 1994-05-24 General Electric Company Hermetically packaged HDI electronic system
US5371405A (en) * 1992-02-04 1994-12-06 Mitsubishi Denki Kabushiki Kaisha High-frequency high-power transistor
US5559374A (en) * 1993-03-25 1996-09-24 Sanyo Electric Co., Ltd. Hybrid integrated circuit
US5677567A (en) * 1996-06-17 1997-10-14 Micron Technology, Inc. Leads between chips assembly
US5744752A (en) * 1995-06-05 1998-04-28 International Business Machines Corporation Hermetic thin film metallized sealband for SCM and MCM-D modules
US6105226A (en) * 1996-05-16 2000-08-22 Sawtek Inc. Leadless ceramic chip carrier crosstalk suppression method
US6313598B1 (en) * 1998-09-11 2001-11-06 Hitachi, Ltd. Power semiconductor module and motor drive system

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936864A (en) * 1973-05-18 1976-02-03 Raytheon Company Microwave transistor package
JPS5386576A (en) * 1977-01-10 1978-07-31 Nec Corp Package for semiconductor element
DE3381070D1 (en) * 1982-07-19 1990-02-08 Toshiba Kawasaki Kk SEND RECEIVER MODULE FOR OPTICAL MESSAGE TRANSMISSION.
US4649416A (en) * 1984-01-03 1987-03-10 Raytheon Company Microwave transistor package
JPH0770641B2 (en) * 1989-03-17 1995-07-31 三菱電機株式会社 Semiconductor package
DE3916899C2 (en) * 1989-05-24 2003-04-03 Bosch Gmbh Robert Housing for an electronic circuit
JPH06283639A (en) 1993-03-25 1994-10-07 Sanyo Electric Co Ltd Hybrid integrated circuit
JP3516789B2 (en) * 1995-11-15 2004-04-05 三菱電機株式会社 Semiconductor power module
JP3201277B2 (en) 1996-09-11 2001-08-20 株式会社日立製作所 Semiconductor device
JP3169578B2 (en) * 1998-03-23 2001-05-28 松下電器産業株式会社 Substrate for electronic components
JP2001085613A (en) 1999-09-13 2001-03-30 Hitachi Ltd Transfer mold power module
JP4494587B2 (en) * 2000-05-11 2010-06-30 古河電気工業株式会社 Optical semiconductor device package and optical semiconductor device module using the package
JP3496633B2 (en) * 2000-10-05 2004-02-16 日本電気株式会社 Heat sink and power supply unit using the same

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5001299A (en) * 1989-04-17 1991-03-19 Explosive Fabricators, Inc. Explosively formed electronic packages
US5258647A (en) * 1989-07-03 1993-11-02 General Electric Company Electronic systems disposed in a high force environment
US5036381A (en) * 1990-06-15 1991-07-30 Motorola, Inc. Multiple electronic devices within a single carrier structure
US5315486A (en) * 1991-12-16 1994-05-24 General Electric Company Hermetically packaged HDI electronic system
US5371405A (en) * 1992-02-04 1994-12-06 Mitsubishi Denki Kabushiki Kaisha High-frequency high-power transistor
US5559374A (en) * 1993-03-25 1996-09-24 Sanyo Electric Co., Ltd. Hybrid integrated circuit
US5744752A (en) * 1995-06-05 1998-04-28 International Business Machines Corporation Hermetic thin film metallized sealband for SCM and MCM-D modules
US6105226A (en) * 1996-05-16 2000-08-22 Sawtek Inc. Leadless ceramic chip carrier crosstalk suppression method
US5677567A (en) * 1996-06-17 1997-10-14 Micron Technology, Inc. Leads between chips assembly
US6313598B1 (en) * 1998-09-11 2001-11-06 Hitachi, Ltd. Power semiconductor module and motor drive system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070165376A1 (en) * 2006-01-17 2007-07-19 Norbert Bones Three phase inverter power stage and assembly
EP2146375A1 (en) * 2008-07-16 2010-01-20 Semikron Elektronik GmbH & Co. KG Patentabteilung Semi-conductor module
WO2022184640A1 (en) * 2021-03-05 2022-09-09 Robert Bosch Gmbh Power module, in particular for an inverter for electric machines

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US7545033B2 (en) 2009-06-09
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US6703703B2 (en) 2004-03-09
US20010030362A1 (en) 2001-10-18
US7122890B2 (en) 2006-10-17
DE10101086A1 (en) 2001-07-26

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