US20070116994A1 - Methods of operating fuel cells - Google Patents
Methods of operating fuel cells Download PDFInfo
- Publication number
- US20070116994A1 US20070116994A1 US11/521,593 US52159306A US2007116994A1 US 20070116994 A1 US20070116994 A1 US 20070116994A1 US 52159306 A US52159306 A US 52159306A US 2007116994 A1 US2007116994 A1 US 2007116994A1
- Authority
- US
- United States
- Prior art keywords
- power
- fuel cell
- pem
- hydrogen
- cells
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04858—Electric variables
- H01M8/04925—Power, energy, capacity or load
- H01M8/0494—Power, energy, capacity or load of fuel cell stacks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0271—Sealing or supporting means around electrodes, matrices or membranes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/0432—Temperature; Ambient temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/0432—Temperature; Ambient temperature
- H01M8/04365—Temperature; Ambient temperature of other components of a fuel cell or fuel cell stacks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/0438—Pressure; Ambient pressure; Flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04537—Electric variables
- H01M8/04544—Voltage
- H01M8/04552—Voltage of the individual fuel cell
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04537—Electric variables
- H01M8/04574—Current
- H01M8/04582—Current of the individual fuel cell
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04537—Electric variables
- H01M8/04604—Power, energy, capacity or load
- H01M8/04619—Power, energy, capacity or load of fuel cell stacks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04746—Pressure; Flow
- H01M8/04753—Pressure; Flow of fuel cell reactants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04858—Electric variables
- H01M8/04865—Voltage
- H01M8/0488—Voltage of fuel cell stacks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04858—Electric variables
- H01M8/04895—Current
- H01M8/0491—Current of fuel cell stacks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/1097—Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
- H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
- H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
- H01M8/2418—Grouping by arranging unit cells in a plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
- H01M8/2457—Grouping of fuel cells, e.g. stacking of fuel cells with both reactants being gaseous or vaporised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2300/00—Electrolytes
- H01M2300/0017—Non-aqueous electrolytes
- H01M2300/0065—Solid electrolytes
- H01M2300/0082—Organic polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M8/1286—Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
- H01M8/249—Grouping of fuel cells, e.g. stacking of fuel cells comprising two or more groupings of fuel cells, e.g. modular assemblies
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49108—Electric battery cell making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53135—Storage cell or battery
Definitions
- the electrochemical fuel cell is not new. Invented in 1839 by Alexander Grove, it has recently been the subject of extensive development. NASA used its principals in their 1960's space program, but the latest push into this technology is being driven largely by the automotive industry. Daimler-Chrysler and Ford Motor Co. together have invested about $750 million in a partnership to develop fuel cell systems. As environmental concerns mount and legislation toughens, development of “green” energy sources becomes more justified as a course of action, if not required.
- a method and apparatus uses a combination of SAMs (self-assembled monolayers), MEMS (micro electrical mechanical systems), “chemistry-on-a-chip” and semiconductor fabrication techniques to create a scalable array of power cells directly on a substrate, preferably a semiconductor wafer.
- SAMs self-assembled monolayers
- MEMS micro electrical mechanical systems
- chemistry-on-a-chip semiconductor fabrication techniques to create a scalable array of power cells directly on a substrate, preferably a semiconductor wafer.
- These wafers may be “stacked” (i.e., electrically connected in series or parallel), as well as individually programmed to achieve various power (V*I) characteristics and application driven configurations.
- One preferred embodiment of the invention is formed by fabricating a plurality of individual fuel cells on a planar semiconductor wafer into which flow channels are formed by etching or other well-known semiconductor processes. Oxygen is admitted into one side of a channel and hydrogen into the other side; with the two gases being separated by a membrane. Electrodes are formed on opposite sides of the membrane and a catalyst is provided in electrical communication with the electrode and membrane on both sides. Lastly, a gas impermeable cover or lid is attached to the cell.
- the membrane is a PEM (Proton Exchange Membrane) formed by depositing or otherwise layering a column of polymers into etched channels in the substrate to create a gas tight barrier between the oxygen and hydrogen, which is capable of conveying hydrogen ions formed by the catalyst across the barrier to produce electricity across the contacts and water when the H-ions combine with the oxygen in the other channel.
- PEM Plasma Exchange Membrane
- a number of fuel cells can be electrically interconnected and coupled to gas sources on a portion of the same wafer to form a “power chip”.
- Traditional electrical circuitry can be integrated on the wafer along with the chips to provide process monitoring and control functions for the individual cells. Wafers containing multiple chips (power discs) or multiple cells can then be vertically stacked upon one another.
- the present invention is method of forming a fuel cell.
- the steps include forming a fuel cell on a substrate, and forming electronics on the substrate electronically coupled to the fuel cell that controls generation of power by the fuel cell through electrical communication with the fuel cell.
- FIG. 1 is a schematic plan view of a semiconductor fuel cell array in accordance with the invention.
- FIG. 2 is a simplified schematic cross-sectional view taken along the lines II-II of a fuel cell 12 of the invention.
- FIGS. 3 ( a )-( h ) is a schematic sectional process view of the major steps in fabricating a PEM barrier structure 30 of the invention.
- FIG. 4 is a cross-sectional schematic view illustrating an alternate cast PEM barrier invention.
- FIG. 5 is a sectional view of a PEM structure embodiment.
- FIG. 6 is a sectional view of an alternate of the PEM structure.
- FIG. 7 is a sectional view of another alternate PEM structure.
- FIG. 8 is a block diagram of circuitry which may be integrated onto a fuel cell chip.
- FIG. 9 is a schematic of the wiring for an integrated control system for the operation of individual cells or groups of cells.
- FIG. 10 is a schematic side view of a manifold system for a power cell.
- FIG. 11 is a schematic plan view of a plurality of cells arranged side-by-side on a wafer to form a power chip and stocked on top of each other to form a power disc.
- FIG. 12 is a fragmented side-view of FIG. 11 .
- FIG. 1 there is shown in plan view a conventional semiconductor wafer 10 upon which a plurality of semiconductor fuel cells 12 have been fabricated.
- a plurality of cells may be electrically interconnected on a wafer and provided with gases to form a power chip 15 .
- fuel cells 12 and chips 15 are not shown to scale in as much as it is contemplated that at least 80 million cells may be formed on a 4′′ wafer.
- One such cell is shown in fragmented cross-section in FIG. 2 .
- each cell 12 consists of a substrate 14 , contacts 16 A and B, and a conductive polymer base 18 formed on both sides of a first layer 20 ( a ) of non-conductive layered polymer support structure 20 and in intimate contact with the metal electrical contacts.
- a conductive polymer 22 with embedded catalyst particles 28 on both sides of the central structure 20 forms a PEM barrier separating the hydrogen gas on the left side from the oxygen gas on the right side.
- Etched channels 50 B and 50 A respectively for admittance of the O 2 and H 2 gas and a heatsink lid 40 over the cell 12 is also shown in FIG. 2 .
- FIGS. 3 a - 3 h are a series of schematic sectional views showing the relevant fabrication details of the PEM barrier 30 in several steps.
- FIG. 3 a shows the bottom of a power cell channel which has been etched into the semiconductor substrate 14 . It also shows the metal contacts 16 which are responsible for conveying the electrons out of the power cell 12 to the rest of the circuitry. These metal contact are deposited by well-known photolithographic processes in the metalization phase of the semiconductor fabrication process.
- FIG. 3 b shows the conductive polymer base 18 as it has been applied to the structure.
- Base 18 is in physical/electrical contact with the metal contacts 16 and has been adapted to attract the conductive polymer 22 of the step shown in FIG. 3 a - 3 h.
- FIG. 3 c shows the nonconductive polymer base 20 ( a ) as it has been applied to the structure. It is positioned between the two conductive polymer base sites 18 and is adapted to attract the nonconductive polymer 20 .
- FIG. 3 d shows a polymer resist 21 as applied to the structure. Resist 21 is responsible for repelling the polymers and preventing their growth in unwanted areas.
- FIG. 3 e shows the first layer 20 B of nonconductive polymer as it has been grown on its base 20 A. This is the center material of the PEM barrier. It helps support the thinner outer sides 22 when they are constructed.
- FIG. 3 f shows the subsequent layers of nonconductive polymer 20 which are laid down, in a layer by layer fashion to form a vertical barrier. This vertical orientation allows for area amplification.
- FIG. 3 g shows the first layer 22 a of conductive polymer grown on its base 18 . This is the outside wall material with catalyst of the PEM barrier.
- FIG. 3 h shows the subsequent layers of conductive polymer 22 laid down, in a layer by layer fashion on to the structure.
- FIG. 2 shows the completed structure after removal of the polymer resist layer 21 and the addition of lid 40 and the pre-existing sidewalls 52 left out of FIG. 3 a - 3 h for simplicity. This resist removal may not be necessary if layer 21 was originally the passivation layer of the final step in the semiconductor fabrication process.
- the protein exchange membrane shown generally at 30 forms a barrier between the fuel H 2 and the oxidant O 2 .
- the PEM barrier 30 is made up of three parts of two materials. There is the first outside wall 22 B, then the center 20 , and finally the second outside wall 22 C. It is constructed with a center piece 20 of the first material in contact with the two outside walls which are both made of the second material.
- the material 20 forming the center piece is preferably an ionic polymer capable of passing the hydrogen ions (protons) through from the hydrogen side to the oxygen side. It is electrically nonconductive so that it does not, effectively, short out the power cell across the two contacts 16 A and 16 B. It may be made of Nafion® or of a material of similar characteristics. An external load 5 as shown in dotted lines may be coupled across the contacts to extract power.
- the second material 22 is also a similar ionic polymer capable of passing the hydrogen ions.
- it is doped with nano catalyst particles 28 (shown by the dots), such as, platinum/alloy catalyst and is also electrically conductive.
- an electrode is produced.
- the proximity of the electrode to the catalytic reaction affects how well it collects electrons. This method allows the catalytic reaction to occur effectively within the electrode itself. This intimate contact provides a readily available path which allows the electrons to migrate freely towards the anode 16 A. This will allow for the successful collection of most of the free electrons. Again, this will dramatically increase the system efficiency.
- This self assembly process allows for the construction of a more optimum PEM barrier. By design it will be more efficient.
- FIG. 4 there is shown in simplified perspective an alternate embodiment of a PEM barrier involving a casting/injecting process and structure.
- three channels 60 A, 60 B and 60 C are etched into a semiconductor substrate 140 .
- the outside two channels 60 A and 60 C are separated from the middle channel 60 B by thin walls 70 A, 70 B. These walls have a plurality of thin slits S 1 - - - S n etched into them.
- the resultant tines T 1 -T n+1 have a catalyst 280 deposited on them in the area of the slits.
- a metal electrode 160 A, 160 B is deposited at the bottom of these thin walls 70 A, 70 B, on the side which makes up a wall of an outside channel 60 A, 60 C.
- a catalyst 280 is deposited on the tines after the electrodes 160 are in place. This allows the catalyst to be deposited so as to come into electrical contact and to cover to some degree, the respective electrodes 160 at their base.
- metal conductors 90 are deposited to connect to each electrode 160 , which then run up and out of the outside channels.
- a lid 400 is provided with an adhesive layer 420 which is used to bond the lid to the substrate 140 .
- the lid 400 has various strategically placed electrolyte injection ports or holes 500 . These holes 500 provide feed pathways that lead to an electrolyte membrane of polymer material (not shown) in the reaction channel 60 B only.
- FIG. 4 The structure of FIG. 4 is assembled as follows:
- the semiconductor fabrication process is formed including substrate machining and deposition of all electrical circuits.
- the lid 400 is machined and prepared with adhesive 420 .
- the lid 400 is bonded to the substrate 140 .
- the electrolyte (not shown) is injected into the structure.
- the thin walls 70 A, 70 B of the reaction channel 60 B serve to retain the electrolyte during its casting.
- the slits S 1 - - - S N allow the hydrogen and oxygen in the respective channels 60 A, 60 B access to the catalyst 280 and PEM 300 .
- Coating the tines T 1 -T 1+n with a catalyst 280 in the area of the slits provides a point of reaction when the H 2 gas enters the slits.
- the electrolyte is poured/injected into the reaction channel 60 B, it fills it up completely. The surface tension of the liquid electrolyte keeps it from pushing through the slits and into the gas channels, which would otherwise fill up as well.
- the electrolyte Because there is some amount of pressure behind the application of the electrolyte, there will be a ballooning effect of the electrolyte's surface as the pressure pushes it into the slits. This will cause the electrolyte to be in contact with the catalyst 280 which coats the sides of the slits S 1 - - - S N . Once this contact is formed and the membrane (electrolyte) is hydrated, it will expand even further, ensuring good contact with the catalyst.
- the H 2 /O 2 gases are capable of diffusing into the (very thin, i.e. 5 microns) membrane, in the area of the catalyst. Because it can be so thin it will produce a more efficient i.e. less resistance (I2R) losses are low.
- the electrodes 160 A and 160 B in electrical contact with the catalyst 280 is the fourth component and provides a path for the free electrons, through an external load (not shown), while the hydrogen ions pass through the electrolyte membrane to complete the reaction on the other side.
- FIG. 5 the central PEM structure 20 is formed as a continuous nonconductive vertical element, and the electrode/catalyst 16 / 28 is a non-continuous element to which lead wires 90 are attached.
- FIG. 6 is a view of an alternative PEM structure in which the catalyst 28 is embedded in the non-conductive core 20 and the electrodes 16 are formed laterally adjacent the catalyst.
- FIG. 7 the PEM structure is similar to FIG. 5 but the center core 201 is discontinuous.
- FIG. 8 is a schematic block diagram showing some of the possible circuits that may be integrated along with a microcontroller onto the semiconductor wafer 10 to monitor and control multiple cells performance.
- sensor circuits 80 , 82 , 84 and 86 are provided to perform certain functions.
- Temperature circuit 80 provides the input to allow the micro processor 88 to define a thermal profile of the fuel cell 12 .
- Voltage circuit 82 monitors the voltage at various levels of the configuration hierarchy or group of cells. This provides information regarding changes in the load. With this information, the processor 88 can adjust the system configuration to achieve/maintain the required performance.
- Current circuit 84 performs a function similar to the voltage monitoring circuit 82 noted above.
- Pressure circuit 86 monitors the pressure in the internal gas passages 50 A, 50 B. Since the system's performance is affected by this pressure, the microprocessor 88 can make adjustments to keep the system running at optimum performance based on these readings.
- An undefined circuit 81 is made available to provide a few spare inputs for the microprocessor 88 in anticipation of future functions.
- configuration circuit 94 can be used to control at least the V*I switches to be described in connection with FIG. 9 .
- the output voltage and current capability is defined by the configuration of these switches.
- Local circuitry 92 is provided as necessary to be dynamically programmed, such as the parameters of the monitoring circuits. These outputs can be used to effect that change.
- Local subsystems 94 are used by the microprocessor 98 to control gas flow rate, defect isolation, and product removal.
- a local power circuit 96 is used to tap off some part of the electricity generated by the fuel cell 12 to power the onboard electronics. This power supply circuit 96 will have its own regulation and conditioning circuits.
- a two-wire communications I/F device 98 may be integrated onto the chip to provide the electrical interface between communicating devices and a power bus (not shown) that connects them.
- the microcontroller 8 is the heart of the integrated electronics subsystem. It is responsible for monitoring and controlling all designated system functions. In addition, it handles the communications protocol of any external communications. It is capable of “in circuit programming” so that its executive control program can be updated as required. It is capable of data storage and processing and is also capable of self/system diagnostics and security features.
- the individual power cells 12 1 , 12 2 - - - 12 n are formed on a wafer and wired in parallel across power buses 99 A and 99 B using transistor switches 97 which can be controlled from the microprocessor 88 of FIG. 8 .
- Switches 97 B and 97 A are negative and positive bus switches, respectively, whereas switch 97 C is a series switch and switches 97 D and 97 E are respective positive and negative parallel switches, respectively.
- the individual cells or groups of cells can be wired in various configurations, i.e., parallel or series.
- Various voltages are created by wiring the cells in series.
- the current capacity can also be increased by wiring the cells in parallel.
- the power profile of the power chip can be dynamically controlled to achieve or maintain a “programmed” specification.
- the chip can be configured at the time of fabrication to some static profile and, thus, eliminate the need for the power switches. By turning the switches on and off and by changing the polarity of wiring, one can produce both AC and DC power output.
- Circuitry can be formed directly on the chip to constantly measure the efficiencies of the processes. This feedback can be used to modify the control of the system in a closed loop fashion. This permits a maximum level of system efficiency to be dynamically maintained.
- the quality of the power generation process will vary as the demands on the system change over time.
- a knowledge of the realtime status of several operational parameters can help make decisions which will enable the system to self-adjust, in order to sustain optimum performance.
- the boundaries of these parameters are defined by the program.
- the power output can be monitored and, if a cell or group is not performing, it can be removed if necessary. This can be accomplished by the power switches 97 previously described.
- An average power level can also be maintained while moving the active “loaded” area around on the chip. This should give a better overall performance level due to no one area being on 100% of the time. This duty cycle approach is especially applicable to surge demands.
- the concept here is to split the power into pieces for better cell utilization characteristics.
- the lid 40 is the second piece of a two-piece “power chip” assembly. It is preferably made of metal to provide a mechanically rigid backing for the fragile semiconductor substrate 14 . This allows for easy handling and provides a stable foundation upon which to build “power stacks”, i.e., a plurality of power chips 15 that are literally stacked on top of each other. The purpose being to build a physical unit with more power.
- FIG. 10 illustrates how the fuel and oxidant/product channels 50 A (and 50 B not shown) may be etched into the surface of the substrate 14 . These troughs are three sided and may be closed and sealed on the top side. The lid 40 and adhesive 42 provides this function of forming a hermetic seal when bonded to the substrate 14 and completes the channels. A matrix of fuel supply and oxidant and product water removal channels is thereby formed at the surface of the substrate.
- the lid 40 provides a mechanically stable interface on which the input/output ports can be made. These are the gas supply and water removal ports.
- the design may encompass the size transition from the large outside world to the micrometer sized features on the substrate. This is accomplished by running the micrometer sized channels to a relatively much larger hole H. This larger hole will allow for less registration requirements between the lid and substrate.
- the large holes in the lid line up with the large holes in the substrate which have micrometer sized channels also machined into the substrate leading from the larger hole to the power cells.
- Each wafer may have its own manifolds. This would require external connections for the fuel supply, oxidant and product removal.
- the external plumbing may require an automated docking system.
- FIGS. 11 and 12 illustrates one of many ways in which several cells 12 (in this example three cells side-by-side can be formed on a wafer 14 to form a power chip 15 .
- Power disks can be stacked vertically upon each other to form a vertical column with inlet ports, 50 HI, 50 OI coupled to sources of hydrogen and oxygen, respectively.
- the vertical column of wafers with power chips formed therein comprise a power stack ( 93 ).
- FIG. 12 illustrates how stacking of a number of power discs 15 may be used to form power stacks ( 93 ) with appreciable power.
- stacking is reasonable for it suggests the close proximity of the wafers, allowing for short electrical interconnects and minimal plumbing.
- the stacking actually refers to combining the electrical power of the wafers to form a more powerful unit. They need only to be electrically stacked to effect this combination. However, it is desirable to produce the most amount of power in the smallest space and with the highest efficiencies.
- the shortest electrical interconnect power bussing
- a desirable manifold design would allow for power disc stacking.
- the actual manifold 95 would be constructed in segments, each segment being an integral part of the lid 40 .
- a manifold (tube) is formed. This type of design would greatly reduce the external plumbing requirements.
- Special end caps would complete the manifold at the ends of the power stack.
- one of the primary objects of this invention is to be able to mass produce a power chip 15 comprised of a wafer 10 containing multiple power cells 12 on each chip 15 utilizing quasi standard semiconductor processing methods.
- This process inherently supports very small features. These features (power cells), in turn, are expected to create very small amounts of power per cell.
- Each cell will be designed to have the maximum power the material can support.
- power disc semiconductor wafer 10
- a 10 uM ⁇ 10 uM power cell would enable one million power cells per square centimeter.
- the final power cell topology will be determined by the physical properties of the constituent materials and their characteristics.
- the basic electrochemical reaction of the solid polymer hydrogen fuel cell is most efficient at an operating temperature somewhere between 80 to 100° C. This is within the operating range of a common semiconductor substrate like silicon. However, if the wafers are stacked additional heatsinking may be required. Since a cover is needed anyway, making the lid 40 into a heatsink for added margin makes sense.
- the fuel and oxidant/product channels are etched into the surface of the semiconductor substrate. These troughs are three-sided and may be closed and sealed on the top side.
- the lid 40 provides this function. It is coated with an adhesive to form a hermetic seal when bonded to the semiconductor substrate and completes the channels. This forms a matrix of fuel supply and oxidant and product water removal channels at the surface of the semiconductor substrate.
- the power cells two primary channels are themselves separated by the PEM which is bonded to this same adhesive. Thus, removing any fine grain critical alignment requirements.
- the substrate 14 may be formed of an amorphous material such as glass or plastic, or phenolic; in which case, the controls for the cells can be formed on a separate semiconductor die and electrically coupled to the cells to form a hybrid structure.
- the interface between the PEM's structure is preferably an assembled monolayer (SAM) interface formed of gold, however, other metals such as silver or platinum, may be used in place thereof.
- SAM assembled monolayer
- the PEM is formed of many molecular chains, it preferably has a base with an affinity for gold so that it will bond to the gold SAM feature. Again, other pure metals such as platinum and silver may be substituted therefore.
Abstract
A fuel cell is disclosed which is formed on a semiconductor wafer by etching channel in the wafer and forming electronics on the substrate electronically coupled to the fuel cell that controls generation of power by the fuel cell through electrical communication with the fuel cell. A hydrogen fuel is admitted into one of the divided channels and an oxidant into the other. The hydrogen reacts with a catalyst formed on an anode electrode at the hydrogen side of the channel to release hydrogen ions (protons) which are absorbed into the PEM. The protons migrate through the PEM and recombine with return hydrogen electrons on a cathode electrode on the oxygen side of the PEM and the oxygen to form water.
Description
- This application is a Continuation of U.S. application Ser. No. 11/322,760, filed Dec. 29, 2005, which claims priority to and is a continuation application of U.S. application Ser. No. 10/953,038 filed on Sep. 29, 2004, now U.S. Pat. No. 6,992,866, and of U.S. application Ser. No. 10/985,736 filed on Nov. 9, 2004, now U.S. Pat. No. 7,029,779, which are a divisional application and a continuation application, respectively, of U.S. application Ser. No. 09/949,301 filed Sep. 7, 2001, now U.S. Pat. No. 6,815,110, which is a continuation of U.S. application Ser. No. 09/449,377, filed Nov. 24, 1999, now U.S. Pat. No. 6,312,846.
- The entire teachings of the above applications are incorporated herein by reference.
- The electrochemical fuel cell is not new. Invented in 1839 by Alexander Grove, it has recently been the subject of extensive development. NASA used its principals in their 1960's space program, but the latest push into this technology is being driven largely by the automotive industry. Daimler-Chrysler and Ford Motor Co. together have invested about $750 million in a partnership to develop fuel cell systems. As environmental concerns mount and legislation toughens, development of “green” energy sources becomes more justified as a course of action, if not required.
- The information age has ushered in the necessity for new ways to examine, process, manage, access and control the information. As the basic technologies and equipment evolve to handle these new requirements, there is a growing need for a smaller, lighter and faster (to refuel/recharge) electrical energy source. Portable computing and communications, in particular, would benefit greatly from a miniature fuel cell based power source.
- In accordance with the invention, a method and apparatus is provided which uses a combination of SAMs (self-assembled monolayers), MEMS (micro electrical mechanical systems), “chemistry-on-a-chip” and semiconductor fabrication techniques to create a scalable array of power cells directly on a substrate, preferably a semiconductor wafer. These wafers may be “stacked” (i.e., electrically connected in series or parallel), as well as individually programmed to achieve various power (V*I) characteristics and application driven configurations.
- One preferred embodiment of the invention is formed by fabricating a plurality of individual fuel cells on a planar semiconductor wafer into which flow channels are formed by etching or other well-known semiconductor processes. Oxygen is admitted into one side of a channel and hydrogen into the other side; with the two gases being separated by a membrane. Electrodes are formed on opposite sides of the membrane and a catalyst is provided in electrical communication with the electrode and membrane on both sides. Lastly, a gas impermeable cover or lid is attached to the cell.
- Preferably, the membrane is a PEM (Proton Exchange Membrane) formed by depositing or otherwise layering a column of polymers into etched channels in the substrate to create a gas tight barrier between the oxygen and hydrogen, which is capable of conveying hydrogen ions formed by the catalyst across the barrier to produce electricity across the contacts and water when the H-ions combine with the oxygen in the other channel.
- In addition, a number of fuel cells can be electrically interconnected and coupled to gas sources on a portion of the same wafer to form a “power chip”. Traditional electrical circuitry can be integrated on the wafer along with the chips to provide process monitoring and control functions for the individual cells. Wafers containing multiple chips (power discs) or multiple cells can then be vertically stacked upon one another.
- In one embodiment, the present invention is method of forming a fuel cell. The steps include forming a fuel cell on a substrate, and forming electronics on the substrate electronically coupled to the fuel cell that controls generation of power by the fuel cell through electrical communication with the fuel cell.
- A further understanding of the nature and advantages of the invention herein may be realized with respect to the detailed description which follows and the drawings described below.
- The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular description of preferred embodiments of the invention, as illustrated in the accompanying drawings in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention.
-
FIG. 1 is a schematic plan view of a semiconductor fuel cell array in accordance with the invention. -
FIG. 2 is a simplified schematic cross-sectional view taken along the lines II-II of afuel cell 12 of the invention. - FIGS. 3(a)-(h) is a schematic sectional process view of the major steps in fabricating a
PEM barrier structure 30 of the invention. -
FIG. 4 is a cross-sectional schematic view illustrating an alternate cast PEM barrier invention. -
FIG. 5 is a sectional view of a PEM structure embodiment. -
FIG. 6 is a sectional view of an alternate of the PEM structure. -
FIG. 7 is a sectional view of another alternate PEM structure. -
FIG. 8 is a block diagram of circuitry which may be integrated onto a fuel cell chip. -
FIG. 9 is a schematic of the wiring for an integrated control system for the operation of individual cells or groups of cells. -
FIG. 10 is a schematic side view of a manifold system for a power cell. -
FIG. 11 is a schematic plan view of a plurality of cells arranged side-by-side on a wafer to form a power chip and stocked on top of each other to form a power disc. -
FIG. 12 is a fragmented side-view ofFIG. 11 . - A description of preferred embodiments of the invention follows.
- A description of preferred embodiments of the invention follows.
- Referring now to
FIG. 1 , there is shown in plan view aconventional semiconductor wafer 10 upon which a plurality ofsemiconductor fuel cells 12 have been fabricated. A plurality of cells may be electrically interconnected on a wafer and provided with gases to form apower chip 15. For simplicity,fuel cells 12 andchips 15 are not shown to scale in as much as it is contemplated that at least 80 million cells may be formed on a 4″ wafer. One such cell is shown in fragmented cross-section inFIG. 2 . In its simplest form, eachcell 12 consists of asubstrate 14,contacts 16A and B, and aconductive polymer base 18 formed on both sides of a first layer 20(a) of non-conductive layeredpolymer support structure 20 and in intimate contact with the metal electrical contacts. - A
conductive polymer 22 with embeddedcatalyst particles 28 on both sides of thecentral structure 20 forms a PEM barrier separating the hydrogen gas on the left side from the oxygen gas on the right side. Etchedchannels heatsink lid 40 over thecell 12 is also shown inFIG. 2 . -
FIGS. 3 a-3 h are a series of schematic sectional views showing the relevant fabrication details of thePEM barrier 30 in several steps.FIG. 3 a shows the bottom of a power cell channel which has been etched into thesemiconductor substrate 14. It also shows themetal contacts 16 which are responsible for conveying the electrons out of thepower cell 12 to the rest of the circuitry. These metal contact are deposited by well-known photolithographic processes in the metalization phase of the semiconductor fabrication process. -
FIG. 3 b shows theconductive polymer base 18 as it has been applied to the structure.Base 18 is in physical/electrical contact with themetal contacts 16 and has been adapted to attract theconductive polymer 22 of the step shown inFIG. 3 a-3 h. -
FIG. 3 c shows the nonconductive polymer base 20(a) as it has been applied to the structure. It is positioned between the two conductivepolymer base sites 18 and is adapted to attract thenonconductive polymer 20. -
FIG. 3 d shows a polymer resist 21 as applied to the structure. Resist 21 is responsible for repelling the polymers and preventing their growth in unwanted areas. -
FIG. 3 e shows the first layer 20B of nonconductive polymer as it has been grown on itsbase 20A. This is the center material of the PEM barrier. It helps support the thinnerouter sides 22 when they are constructed. -
FIG. 3 f shows the subsequent layers ofnonconductive polymer 20 which are laid down, in a layer by layer fashion to form a vertical barrier. This vertical orientation allows for area amplification. -
FIG. 3 g shows the first layer 22 a of conductive polymer grown on itsbase 18. This is the outside wall material with catalyst of the PEM barrier. -
FIG. 3 h shows the subsequent layers ofconductive polymer 22 laid down, in a layer by layer fashion on to the structure.FIG. 2 shows the completed structure after removal of the polymer resistlayer 21 and the addition oflid 40 and thepre-existing sidewalls 52 left out ofFIG. 3 a-3 h for simplicity. This resist removal may not be necessary iflayer 21 was originally the passivation layer of the final step in the semiconductor fabrication process. - Referring now to
FIG. 2 again further details of the elements forming thefuel cell 12 will be explained. The protein exchange membrane shown generally at 30 forms a barrier between the fuel H2 and the oxidant O2. - The
PEM barrier 30 is made up of three parts of two materials. There is the firstoutside wall 22B, then thecenter 20, and finally the secondoutside wall 22C. It is constructed with acenter piece 20 of the first material in contact with the two outside walls which are both made of the second material. - The material 20 forming the center piece, is preferably an ionic polymer capable of passing the hydrogen ions (protons) through from the hydrogen side to the oxygen side. It is electrically nonconductive so that it does not, effectively, short out the power cell across the two
contacts 16A and 16B. It may be made of Nafion® or of a material of similar characteristics. An external load 5 as shown in dotted lines may be coupled across the contacts to extract power. - The
second material 22, forming the two outside walls, is also a similar ionic polymer capable of passing the hydrogen ions. In addition, it is doped with nano catalyst particles 28 (shown by the dots), such as, platinum/alloy catalyst and is also electrically conductive. - By embedding the
catalyst particles 28 into thepolymer 22, maximum intimate contact is achieved with thePEM 30. This intimate contact provides a readily available path which allows the ions to migrate freely towards the cathode electrode 16B. Catalysis is a surface effect. By suspending thecatalytic particles 28 in thepolymer 22, effective use of the entire surface area is obtained. This will dramatically increase the system efficiency. - By making the
second material 22 electrically conductive, an electrode is produced. The proximity of the electrode to the catalytic reaction affects how well it collects electrons. This method allows the catalytic reaction to occur effectively within the electrode itself. This intimate contact provides a readily available path which allows the electrons to migrate freely towards theanode 16A. This will allow for the successful collection of most of the free electrons. Again, this will dramatically increase the system efficiency. - In addition to the electrical and chemical/functional characteristics of the
PEM 30 described above, there are some important physical ones, that are described below: - This self assembly process allows for the construction of a more optimum PEM barrier. By design it will be more efficient.
- First, there is the matter of forming the separate hydrogen and oxygen path ways. This requires that the PEM structure to be grown/formed so that it dissects the etched
channel 50 fully into twoseparate channels lid 40. - Second, there is the matter of forming a gas tight seal. This requires that the
PEM structure 30 be bonded thoroughly to thebase structures substrate 14 and the end walls (not shown) of the power cell and to an adhesive 42 which coats thelid 40. By proper choice of the polymers, a chemical bond is formed between the materials they contact in the channel. In addition to this chemical bond, there is the physical sealing effect by applying thelid 40 down on top of the PEM barrier. If the height of thePEM 30 is controlled correctly, the pressure of the applied lid forms a mechanical “0 ring” type of self seal. Growing thePEM 30 on thesubstrate 14 eliminates any fine registration issues when combining it with thelid 40. There are no fine details on the lid that require targeting. - Turning now to
FIG. 4 , there is shown in simplified perspective an alternate embodiment of a PEM barrier involving a casting/injecting process and structure. - Using MEMS machining methods three
channels semiconductor substrate 140. The outside twochannels thin walls 70A, 70B. These walls have a plurality of thin slits S1 - - - Sn etched into them. The resultant tines T1-Tn+1 have acatalyst 280 deposited on them in the area of the slits. At the bottom of thesethin walls 70A, 70B, on the side which makes up a wall of anoutside channel metal electrode catalyst 280 is deposited on the tines after the electrodes 160 are in place. This allows the catalyst to be deposited so as to come into electrical contact and to cover to some degree, the respective electrodes 160 at their base. In addition,metal conductors 90 are deposited to connect to each electrode 160, which then run up and out of the outside channels. - A
lid 400 is provided with anadhesive layer 420 which is used to bond the lid to thesubstrate 140. In this way, three separate channels are formed in the substrate; ahydrogen channel 60A, a reaction channel 60B, and anoxygen channel 60C. In addition, thelid 400 has various strategically placed electrolyte injection ports or holes 500. Theseholes 500 provide feed pathways that lead to an electrolyte membrane of polymer material (not shown) in the reaction channel 60B only. - The structure of
FIG. 4 is assembled as follows: - First, the semiconductor fabrication process is formed including substrate machining and deposition of all electrical circuits.
- Next, the
lid 400 is machined and prepared with adhesive 420. Thelid 400 is bonded to thesubstrate 140. Then, the electrolyte (not shown) is injected into the structure. - The
thin walls 70A, 70B of the reaction channel 60B serve to retain the electrolyte during its casting. The slits S1 - - - SN allow the hydrogen and oxygen in therespective channels 60A, 60B access to thecatalyst 280 and PEM 300. Coating the tines T1-T1+n with acatalyst 280 in the area of the slits provides a point of reaction when the H2 gas enters the slits. When the electrolyte is poured/injected into the reaction channel 60B, it fills it up completely. The surface tension of the liquid electrolyte keeps it from pushing through the slits and into the gas channels, which would otherwise fill up as well. Because there is some amount of pressure behind the application of the electrolyte, there will be a ballooning effect of the electrolyte's surface as the pressure pushes it into the slits. This will cause the electrolyte to be in contact with thecatalyst 280 which coats the sides of the slits S1 - - - SN. Once this contact is formed and the membrane (electrolyte) is hydrated, it will expand even further, ensuring good contact with the catalyst. The H2/O2 gases are capable of diffusing into the (very thin, i.e. 5 microns) membrane, in the area of the catalyst. Because it can be so thin it will produce a more efficient i.e. less resistance (I2R) losses are low. This then puts the three components of the reaction in contact with each other. Theelectrodes catalyst 280 is the fourth component and provides a path for the free electrons, through an external load (not shown), while the hydrogen ions pass through the electrolyte membrane to complete the reaction on the other side. - Referring now to the cross-sectional views of
FIGS. 5-7 , various alternative configurations of thePEM structure 30 of the invention will be described in detail. InFIG. 5 , thecentral PEM structure 20 is formed as a continuous nonconductive vertical element, and the electrode/catalyst 16/28 is a non-continuous element to whichlead wires 90 are attached.FIG. 6 is a view of an alternative PEM structure in which thecatalyst 28 is embedded in thenon-conductive core 20 and theelectrodes 16 are formed laterally adjacent the catalyst. Lastly, inFIG. 7 , the PEM structure is similar toFIG. 5 but thecenter core 201 is discontinuous. -
FIG. 8 is a schematic block diagram showing some of the possible circuits that may be integrated along with a microcontroller onto thesemiconductor wafer 10 to monitor and control multiple cells performance.Several sensor circuits -
Temperature circuit 80 provides the input to allow themicro processor 88 to define a thermal profile of thefuel cell 12.Voltage circuit 82 monitors the voltage at various levels of the configuration hierarchy or group of cells. This provides information regarding changes in the load. With this information, theprocessor 88 can adjust the system configuration to achieve/maintain the required performance.Current circuit 84 performs a function similar to thevoltage monitoring circuit 82 noted above. -
Pressure circuit 86 monitors the pressure in theinternal gas passages microprocessor 88 can make adjustments to keep the system running at optimum performance based on these readings. Anundefined circuit 81 is made available to provide a few spare inputs for themicroprocessor 88 in anticipation of future functions. - In addition,
configuration circuit 94 can be used to control at least the V*I switches to be described in connection withFIG. 9 . The output voltage and current capability is defined by the configuration of these switches.Local circuitry 92 is provided as necessary to be dynamically programmed, such as the parameters of the monitoring circuits. These outputs can be used to effect that change.Local subsystems 94 are used by themicroprocessor 98 to control gas flow rate, defect isolation, and product removal. Alocal power circuit 96 is used to tap off some part of the electricity generated by thefuel cell 12 to power the onboard electronics. Thispower supply circuit 96 will have its own regulation and conditioning circuits. A two-wire communications I/F device 98 may be integrated onto the chip to provide the electrical interface between communicating devices and a power bus (not shown) that connects them. - The
microcontroller 8 is the heart of the integrated electronics subsystem. It is responsible for monitoring and controlling all designated system functions. In addition, it handles the communications protocol of any external communications. It is capable of “in circuit programming” so that its executive control program can be updated as required. It is capable of data storage and processing and is also capable of self/system diagnostics and security features. - Referring now to
FIG. 9 , further details of the invention are shown. In this embodiment, theindividual power cells 12 1, 12 2 - - - 12 n are formed on a wafer and wired in parallel acrosspower buses microprocessor 88 ofFIG. 8 .Switches switch 97C is a series switch and switches 97D and 97E are respective positive and negative parallel switches, respectively. - This allows the individual cells or groups of cells (power chip 15) to be wired in various configurations, i.e., parallel or series. Various voltages are created by wiring the cells in series. The current capacity can also be increased by wiring the cells in parallel. In general, the power profile of the power chip can be dynamically controlled to achieve or maintain a “programmed” specification. Conversely, the chip can be configured at the time of fabrication to some static profile and, thus, eliminate the need for the power switches. By turning the switches on and off and by changing the polarity of wiring, one can produce both AC and DC power output.
- To implement a power management subsystem, feedback from the power generation process is required. Circuitry can be formed directly on the chip to constantly measure the efficiencies of the processes. This feedback can be used to modify the control of the system in a closed loop fashion. This permits a maximum level of system efficiency to be dynamically maintained. Some of these circuits are discussed next.
- The quality of the power generation process will vary as the demands on the system change over time. A knowledge of the realtime status of several operational parameters can help make decisions which will enable the system to self-adjust, in order to sustain optimum performance. The boundaries of these parameters are defined by the program.
- For example, it is possible to measure both the voltage and the current of an individual power cell or group of power cells. The power output can be monitored and, if a cell or group is not performing, it can be removed if necessary. This can be accomplished by the power switches 97 previously described.
- An average power level can also be maintained while moving the active “loaded” area around on the chip. This should give a better overall performance level due to no one area being on 100% of the time. This duty cycle approach is especially applicable to surge demands. The concept here is to split the power into pieces for better cell utilization characteristics.
- It is expected that the thermal characteristics of the power chip will vary due to electrical loading and that this heat might have an adverse effect on power generation at the power cell level. Adequate temperature sensing and an appropriate response to power cell utilization will minimize the damaging effects of a thermal build up.
- The
lid 40 is the second piece of a two-piece “power chip” assembly. It is preferably made of metal to provide a mechanically rigid backing for thefragile semiconductor substrate 14. This allows for easy handling and provides a stable foundation upon which to build “power stacks”, i.e., a plurality ofpower chips 15 that are literally stacked on top of each other. The purpose being to build a physical unit with more power. -
FIG. 10 illustrates how the fuel and oxidant/product channels 50A (and 50B not shown) may be etched into the surface of thesubstrate 14. These troughs are three sided and may be closed and sealed on the top side. Thelid 40 and adhesive 42 provides this function of forming a hermetic seal when bonded to thesubstrate 14 and completes the channels. A matrix of fuel supply and oxidant and product water removal channels is thereby formed at the surface of the substrate. - The
lid 40 provides a mechanically stable interface on which the input/output ports can be made. These are the gas supply and water removal ports. The design may encompass the size transition from the large outside world to the micrometer sized features on the substrate. This is accomplished by running the micrometer sized channels to a relatively much larger hole H. This larger hole will allow for less registration requirements between the lid and substrate. The large holes in the lid line up with the large holes in the substrate which have micrometer sized channels also machined into the substrate leading from the larger hole to the power cells. - Each wafer may have its own manifolds. This would require external connections for the fuel supply, oxidant and product removal. The external plumbing may require an automated docking system.
-
FIGS. 11 and 12 illustrates one of many ways in which several cells 12 (in this example three cells side-by-side can be formed on awafer 14 to form apower chip 15. Power disks can be stacked vertically upon each other to form a vertical column with inlet ports, 50HI, 50OI coupled to sources of hydrogen and oxygen, respectively. The vertical column of wafers with power chips formed therein comprise a power stack (93). -
FIG. 12 illustrates how stacking of a number ofpower discs 15 may be used to form power stacks (93) with appreciable power. The use of the word “stacking” is reasonable for it suggests the close proximity of the wafers, allowing for short electrical interconnects and minimal plumbing. In reality, the stacking actually refers to combining the electrical power of the wafers to form a more powerful unit. They need only to be electrically stacked to effect this combination. However, it is desirable to produce the most amount of power in the smallest space and with the highest efficiencies. When considering the shortest electrical interconnect (power bussing) alternatives, one should also consider the possibility of using two of the main manifolds as electrical power busses. This can be done by electrically isolating these manifold/electrical power buss segments and using them to convey the power from each wafer to the next. This reduces the big power wiring requirements and permits this function to be done in an automated fashion with the concomitant increased accuracy and reliability. - A desirable manifold design would allow for power disc stacking. In this design the
actual manifold 95 would be constructed in segments, each segment being an integral part of thelid 40. As the discs are stacked a manifold (tube) is formed. This type of design would greatly reduce the external plumbing requirements. Special end caps would complete the manifold at the ends of the power stack. - In summary, one of the primary objects of this invention is to be able to mass produce a
power chip 15 comprised of awafer 10 containingmultiple power cells 12 on eachchip 15 utilizing quasi standard semiconductor processing methods. This process inherently supports very small features. These features (power cells), in turn, are expected to create very small amounts of power per cell. Each cell will be designed to have the maximum power the material can support. To achieve any real substantially power, many millions will be fabricated on asingle power chip 15 and many power chips fabricated on a “power disc” (semiconductor wafer 10). This is why reasonable power output can be obtained from a single wafer. A 10 uM×10 uM power cell would enable one million power cells per square centimeter. The final power cell topology will be determined by the physical properties of the constituent materials and their characteristics. - The basic electrochemical reaction of the solid polymer hydrogen fuel cell is most efficient at an operating temperature somewhere between 80 to 100° C. This is within the operating range of a common semiconductor substrate like silicon. However, if the wafers are stacked additional heatsinking may be required. Since a cover is needed anyway, making the
lid 40 into a heatsink for added margin makes sense. - The fuel and oxidant/product channels are etched into the surface of the semiconductor substrate. These troughs are three-sided and may be closed and sealed on the top side. The
lid 40 provides this function. It is coated with an adhesive to form a hermetic seal when bonded to the semiconductor substrate and completes the channels. This forms a matrix of fuel supply and oxidant and product water removal channels at the surface of the semiconductor substrate. The power cells two primary channels are themselves separated by the PEM which is bonded to this same adhesive. Thus, removing any fine grain critical alignment requirements. - Equivalents
- While this invention has been particularly shown and described with references to preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention encompassed by the appended claims.
- For example, while silicon because of its well-defined electrical and mechanical properties is the material of choice for the
substrate 14, other semiconductor materials may be substituted, therefore, such as Gd, Ge, or Ill-V compounds such as GaAs. Alternatively, the substrate for the cell may be formed of an amorphous material such as glass or plastic, or phenolic; in which case, the controls for the cells can be formed on a separate semiconductor die and electrically coupled to the cells to form a hybrid structure. The interface between the PEM's structure is preferably an assembled monolayer (SAM) interface formed of gold, however, other metals such as silver or platinum, may be used in place thereof. Likewise, although the PEM is formed of many molecular chains, it preferably has a base with an affinity for gold so that it will bond to the gold SAM feature. Again, other pure metals such as platinum and silver may be substituted therefore.
Claims (2)
1. A method of forming a fuel cell, comprising:
a) forming a fuel cell on a substrate; and
b) forming electronics on the substrate, the electronics electrically coupled to the fuel cell and configured to control generation of power by the fuel cell through electrical communication with the fuel cell.
2. A method of operating a fuel cell, comprising:
a) providing a plurality of fuel cells configured to convert fuel and oxidant into power; and
b) selectively controlling generation of power by the plurality of fuel cells in a presence of the fuel and oxidant through electrical control of an electrical element coupled to at least a subset of the plurality of fuel cells.
Priority Applications (18)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/521,593 US20070116994A1 (en) | 1999-11-24 | 2006-09-14 | Methods of operating fuel cells |
US11/713,458 US8834700B2 (en) | 1999-11-24 | 2007-03-02 | Method and apparatus for electro-chemical reaction |
EP11177893.2A EP2432062B1 (en) | 2006-03-02 | 2007-03-02 | Power cell architecture |
CN2007800102643A CN101405909B (en) | 2006-03-02 | 2007-03-02 | Power cell architectures and control of power generator arrays |
JP2008557367A JP5782217B2 (en) | 2006-03-02 | 2007-03-02 | Power cell operation method and power supply device including power cell |
PCT/US2007/005255 WO2007103104A2 (en) | 2006-03-02 | 2007-03-02 | Power cell architectures and control of power generator arrays |
US11/713,460 US8980492B2 (en) | 1999-11-24 | 2007-03-02 | Method and apparatus for controlling an array of power generators |
US11/713,459 US8518594B2 (en) | 1999-11-24 | 2007-03-02 | Power cell and power chip architecture |
EP11177895.7A EP2432063B1 (en) | 2006-03-02 | 2007-03-02 | Method and apparatus for cleaning catalyst of a power cell |
EP07751983.3A EP1994598B1 (en) | 2006-03-02 | 2007-03-02 | Power cell architectures and control of power generator arrays |
EP11177903.9A EP2424022A3 (en) | 2006-03-02 | 2007-03-02 | Method and apparatus for controlling power cells |
EP11177900.5A EP2410599B1 (en) | 2006-03-02 | 2007-03-02 | Layered control of power cells |
US12/220,787 US8431281B2 (en) | 1999-11-24 | 2008-07-28 | Methods of operating fuel cells |
HK09109292.7A HK1130951A1 (en) | 2006-03-02 | 2009-10-07 | Power cell architectures and control of power generator arrays |
US13/849,929 US9406955B2 (en) | 1999-11-24 | 2013-03-25 | Methods of operating fuel cells |
US13/932,593 US8962166B2 (en) | 1999-11-24 | 2013-07-01 | Power cell and power chip architecture |
US14/052,695 US20140038074A1 (en) | 1999-11-24 | 2013-10-11 | Method and apparatus for electro-chemical reaction |
JP2014260147A JP6016879B2 (en) | 2006-03-02 | 2014-12-24 | Cleaning method and cleaning apparatus for power cell catalyst |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/449,377 US6312846B1 (en) | 1999-11-24 | 1999-11-24 | Fuel cell and power chip technology |
US9949301A | 2001-09-07 | 2001-09-07 | |
US10/953,038 US6991866B2 (en) | 1999-11-24 | 2004-09-29 | Fuel cell and power chip technology |
US10/985,736 US7029779B2 (en) | 1999-11-24 | 2004-11-09 | Fuel cell and power chip technology |
US11/322,760 US20060110636A1 (en) | 1999-11-24 | 2005-12-29 | Methods of operating fuel cells |
US11/521,593 US20070116994A1 (en) | 1999-11-24 | 2006-09-14 | Methods of operating fuel cells |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/322,760 Continuation US20060110636A1 (en) | 1999-11-24 | 2005-12-29 | Methods of operating fuel cells |
Related Child Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/713,460 Continuation-In-Part US8980492B2 (en) | 1999-11-24 | 2007-03-02 | Method and apparatus for controlling an array of power generators |
US11/713,459 Continuation-In-Part US8518594B2 (en) | 1999-11-24 | 2007-03-02 | Power cell and power chip architecture |
US11/713,458 Continuation-In-Part US8834700B2 (en) | 1999-11-24 | 2007-03-02 | Method and apparatus for electro-chemical reaction |
US12/220,787 Continuation US8431281B2 (en) | 1999-11-24 | 2008-07-28 | Methods of operating fuel cells |
Publications (1)
Publication Number | Publication Date |
---|---|
US20070116994A1 true US20070116994A1 (en) | 2007-05-24 |
Family
ID=23783934
Family Applications (8)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/449,377 Expired - Lifetime US6312846B1 (en) | 1999-11-24 | 1999-11-24 | Fuel cell and power chip technology |
US09/949,301 Expired - Lifetime US6815110B2 (en) | 1999-11-24 | 2001-09-07 | Fuel cell and power chip technology |
US10/953,038 Expired - Lifetime US6991866B2 (en) | 1999-11-24 | 2004-09-29 | Fuel cell and power chip technology |
US10/985,736 Expired - Lifetime US7029779B2 (en) | 1999-11-24 | 2004-11-09 | Fuel cell and power chip technology |
US11/322,760 Abandoned US20060110636A1 (en) | 1999-11-24 | 2005-12-29 | Methods of operating fuel cells |
US11/521,593 Abandoned US20070116994A1 (en) | 1999-11-24 | 2006-09-14 | Methods of operating fuel cells |
US12/220,787 Expired - Fee Related US8431281B2 (en) | 1999-11-24 | 2008-07-28 | Methods of operating fuel cells |
US13/849,929 Expired - Fee Related US9406955B2 (en) | 1999-11-24 | 2013-03-25 | Methods of operating fuel cells |
Family Applications Before (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/449,377 Expired - Lifetime US6312846B1 (en) | 1999-11-24 | 1999-11-24 | Fuel cell and power chip technology |
US09/949,301 Expired - Lifetime US6815110B2 (en) | 1999-11-24 | 2001-09-07 | Fuel cell and power chip technology |
US10/953,038 Expired - Lifetime US6991866B2 (en) | 1999-11-24 | 2004-09-29 | Fuel cell and power chip technology |
US10/985,736 Expired - Lifetime US7029779B2 (en) | 1999-11-24 | 2004-11-09 | Fuel cell and power chip technology |
US11/322,760 Abandoned US20060110636A1 (en) | 1999-11-24 | 2005-12-29 | Methods of operating fuel cells |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/220,787 Expired - Fee Related US8431281B2 (en) | 1999-11-24 | 2008-07-28 | Methods of operating fuel cells |
US13/849,929 Expired - Fee Related US9406955B2 (en) | 1999-11-24 | 2013-03-25 | Methods of operating fuel cells |
Country Status (7)
Country | Link |
---|---|
US (8) | US6312846B1 (en) |
EP (2) | EP1236237B1 (en) |
JP (1) | JP5313423B2 (en) |
CN (2) | CN100349318C (en) |
AU (1) | AU5901601A (en) |
HK (1) | HK1049069B (en) |
WO (1) | WO2001054217A2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070248848A1 (en) * | 1999-11-24 | 2007-10-25 | Marsh Stephen A | Power cell and power chip architecture |
US20070251829A1 (en) * | 1999-11-24 | 2007-11-01 | Marsh Stephen A | Method and apparatus for electro-chemical reaction |
US20070287043A1 (en) * | 1999-11-24 | 2007-12-13 | Marsh Stephen A | Method and apparatus for controlling an array of power generators |
US9406955B2 (en) | 1999-11-24 | 2016-08-02 | Encite Llc | Methods of operating fuel cells |
US9819037B2 (en) | 2006-03-02 | 2017-11-14 | Encite Llc | Method and apparatus for cleaning catalyst of a power cell |
Families Citing this family (112)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7892681B2 (en) * | 2005-07-19 | 2011-02-22 | Pelton Walter E | System of distributed electrochemical cells integrated with microelectronic structures |
US20120264024A1 (en) * | 1999-04-29 | 2012-10-18 | Pelton Walter E | Methods and apparatuses for electrochemical cell system with movable medium and non-conducting substrate |
US20110117462A1 (en) * | 2006-07-18 | 2011-05-19 | Pelton Walter E | Methods and apparatuses for distributed fuel cells with nanotechnology |
US6893892B2 (en) * | 2000-03-29 | 2005-05-17 | Georgia Tech Research Corp. | Porous gas sensors and method of preparation thereof |
US6589883B2 (en) * | 2000-03-29 | 2003-07-08 | Georgia Tech Research Corporation | Enhancement, stabilization and metallization of porous silicon |
US6696189B2 (en) * | 2000-12-15 | 2004-02-24 | Motorola, Inc. | Direct methanol fuel cell system including an integrated methanol sensor and method of fabrication |
US7141859B2 (en) * | 2001-03-29 | 2006-11-28 | Georgia Tech Research Corporation | Porous gas sensors and method of preparation thereof |
US7838949B2 (en) * | 2001-03-29 | 2010-11-23 | Georgia Tech Research Corporation | Porous gas sensors and method of preparation thereof |
US6677070B2 (en) * | 2001-04-19 | 2004-01-13 | Hewlett-Packard Development Company, L.P. | Hybrid thin film/thick film solid oxide fuel cell and method of manufacturing the same |
JP2003072059A (en) * | 2001-06-21 | 2003-03-12 | Ricoh Co Ltd | Inkjet recorder and duplicator |
JP4041961B2 (en) * | 2001-09-26 | 2008-02-06 | ソニー株式会社 | FUEL CELL, ELECTRIC DEVICE AND FUEL CELL MOUNTING METHOD |
FR2832549B1 (en) * | 2001-11-16 | 2004-05-28 | Commissariat Energie Atomique | FUEL CELL WITH SIGNIFICANT ACTIVE SURFACE AND REDUCED VOLUME AND METHOD FOR MANUFACTURING THE SAME |
US7252898B2 (en) * | 2002-01-14 | 2007-08-07 | The Board Of Trustees Of The University Of Illinois | Fuel cells comprising laminar flow induced dynamic conducting interfaces, electronic devices comprising such cells, and methods employing same |
US6713206B2 (en) * | 2002-01-14 | 2004-03-30 | Board Of Trustees Of University Of Illinois | Electrochemical cells comprising laminar flow induced dynamic conducting interfaces, electronic devices comprising such cells, and methods employing same |
US7651797B2 (en) * | 2002-01-14 | 2010-01-26 | The Board Of Trustees Of The University Of Illinois | Electrochemical cells comprising laminar flow induced dynamic conducting interfaces, electronic devices comprising such cells, and methods employing same |
ATE402484T1 (en) * | 2002-01-29 | 2008-08-15 | Matsushita Electric Ind Co Ltd | SEMICONDUCTOR DEVICE WITH FUEL CELL AND METHOD FOR PRODUCING SAME |
KR100441376B1 (en) * | 2002-01-31 | 2004-07-23 | (주)퓨얼셀 파워 | A very thin Composite membrane |
US6864010B1 (en) | 2002-02-06 | 2005-03-08 | Angstrom Power | Apparatus of high power density fuel cell layer with micro for connecting to an external load |
US6872287B1 (en) | 2002-02-06 | 2005-03-29 | Angstrom Power | Electrochemical cell |
US6989215B1 (en) | 2002-02-06 | 2006-01-24 | Angstrom Power | Apparatus of high power density fuel cell layer with micro structured components |
US7150933B1 (en) | 2002-02-06 | 2006-12-19 | Angstrom Power, Inc. | Method of manufacturing high power density fuel cell layers with micro structured components |
US6969563B1 (en) | 2002-03-01 | 2005-11-29 | Angstrom Power | High power density fuel cell stack using micro structured components |
JP2005526363A (en) * | 2002-05-16 | 2005-09-02 | バラード パワー システムズ インコーポレイティド | Power facility with an array of adjustable fuel cell systems |
US7393369B2 (en) * | 2002-06-11 | 2008-07-01 | Trulite, Inc. | Apparatus, system, and method for generating hydrogen |
US6838203B2 (en) * | 2002-06-19 | 2005-01-04 | Yongjian Zheng | Monolithic fuel cell and method of manufacture of same |
US20030234172A1 (en) * | 2002-06-25 | 2003-12-25 | Arthur Alan R. | Method of facilitating a chemical reaction by applying radio frequency energy |
US7491457B2 (en) * | 2002-08-16 | 2009-02-17 | Hewlett-Packard Development Company, L.P. | Fuel cell apparatus |
US20040053100A1 (en) * | 2002-09-12 | 2004-03-18 | Stanley Kevin G. | Method of fabricating fuel cells and membrane electrode assemblies |
US20040067404A1 (en) * | 2002-10-03 | 2004-04-08 | Dennis Lazaroff | Fuel cell assembly and reactant distribution structure and method of making the same |
US20040086767A1 (en) * | 2002-10-31 | 2004-05-06 | Dennis Lazaroff | Fuel cell assembly and reactant distribution structure and method of making the same |
DE10255736B4 (en) * | 2002-11-29 | 2009-03-19 | Micronas Gmbh | Fuel cell and method of manufacture |
DE10393844B4 (en) * | 2002-12-06 | 2014-07-24 | Fairchild Semiconductor Corporation | Integrated fuel cell power conditioning with additional function control |
US7029781B2 (en) * | 2003-01-21 | 2006-04-18 | Stmicroelectronics, Inc. | Microfuel cell having anodic and cathodic microfluidic channels and related methods |
US7147955B2 (en) * | 2003-01-31 | 2006-12-12 | Societe Bic | Fuel cartridge for fuel cells |
US7318970B2 (en) * | 2003-04-04 | 2008-01-15 | Texaco Inc. | Architectural hierarchy of control for a fuel processor |
US7521097B2 (en) * | 2003-06-06 | 2009-04-21 | Nanogram Corporation | Reactive deposition for electrochemical cell production |
US7556660B2 (en) * | 2003-06-11 | 2009-07-07 | James Kevin Shurtleff | Apparatus and system for promoting a substantially complete reaction of an anhydrous hydride reactant |
US7205057B2 (en) * | 2003-06-19 | 2007-04-17 | Angstrom Power Inc. | Integrated fuel cell and heat sink assembly |
US20060127711A1 (en) * | 2004-06-25 | 2006-06-15 | Ultracell Corporation, A California Corporation | Systems and methods for fuel cartridge distribution |
US8318368B2 (en) * | 2003-06-27 | 2012-11-27 | UltraCell, L.L.C. | Portable systems for engine block |
US8821832B2 (en) | 2003-06-27 | 2014-09-02 | UltraCell, L.L.C. | Fuel processor for use with portable fuel cells |
US20060156627A1 (en) * | 2003-06-27 | 2006-07-20 | Ultracell Corporation | Fuel processor for use with portable fuel cells |
US20050014040A1 (en) * | 2003-06-27 | 2005-01-20 | Ultracell Corporation | Fuel preheat in fuel cells and portable electronics |
US7666539B2 (en) * | 2003-06-27 | 2010-02-23 | Ultracell Corporation | Heat efficient portable fuel cell systems |
EP1641671B1 (en) * | 2003-06-27 | 2015-06-24 | Portaclave LLP | Portable fuel cartridge for fuel cells |
US7655337B2 (en) | 2003-06-27 | 2010-02-02 | Ultracell Corporation | Micro fuel cell thermal management |
EP1644111A4 (en) * | 2003-06-27 | 2011-02-09 | Ultracell Corp | Annular fuel processor and methods |
US20050069740A1 (en) * | 2003-09-29 | 2005-03-31 | Kurt Ulmer | Fuel cell modulation and temperature control |
US7348087B2 (en) * | 2003-07-28 | 2008-03-25 | Hewlett-Packard Development Company, L.P. | Fuel cell with integral manifold |
US7645537B2 (en) * | 2003-10-15 | 2010-01-12 | Hewlett-Packard Development Company, L.P. | Multi-cell fuel cell layer and system |
AU2004235658B2 (en) * | 2003-12-08 | 2010-05-13 | Rodolfo Antonio M Gomez | Proton membrane fuel cells |
US20050162122A1 (en) * | 2004-01-22 | 2005-07-28 | Dunn Glenn M. | Fuel cell power and management system, and technique for controlling and/or operating same |
DE102004011554A1 (en) * | 2004-03-08 | 2005-09-29 | Micronas Gmbh | A fuel cell assembly |
US20050249989A1 (en) * | 2004-05-07 | 2005-11-10 | Pearson Martin T | Apparatus and method for hybrid power module systems |
US7521138B2 (en) * | 2004-05-07 | 2009-04-21 | Ballard Power Systems Inc. | Apparatus and method for hybrid power module systems |
US20050255368A1 (en) * | 2004-05-12 | 2005-11-17 | Ultracell Corporation, A California Corporation | High surface area micro fuel cell architecture |
US7648792B2 (en) | 2004-06-25 | 2010-01-19 | Ultracell Corporation | Disposable component on a fuel cartridge and for use with a portable fuel cell system |
US7968250B2 (en) | 2004-06-25 | 2011-06-28 | Ultracell Corporation | Fuel cartridge connectivity |
WO2006017375A2 (en) | 2004-08-06 | 2006-02-16 | Ultracell Corporation | Method and system for controlling fluid delivery in a fuel cell |
TWI241048B (en) * | 2004-09-01 | 2005-10-01 | Nan Ya Printed Circuit Board C | Method for manufacturing bipolar plate and direct methanol fuel cell |
US20060088744A1 (en) * | 2004-09-15 | 2006-04-27 | Markoski Larry J | Electrochemical cells |
AU2005304304B2 (en) * | 2004-11-12 | 2009-01-15 | Trulite, Inc. | Hydrogen generator cartridge |
US7807313B2 (en) * | 2004-12-21 | 2010-10-05 | Ultracell Corporation | Compact fuel cell package |
US20060170391A1 (en) * | 2005-01-28 | 2006-08-03 | Duhane Lam | Fuel cell charger |
US20060194082A1 (en) * | 2005-02-02 | 2006-08-31 | Ultracell Corporation | Systems and methods for protecting a fuel cell |
US7635530B2 (en) | 2005-03-21 | 2009-12-22 | The Board Of Trustees Of The University Of Illinois | Membraneless electrochemical cell and microfluidic device without pH constraint |
US20060246336A1 (en) * | 2005-05-02 | 2006-11-02 | Hsi-Ming Shu | Electronic circuit board integrated with a fuel cell |
US20070026266A1 (en) * | 2005-07-19 | 2007-02-01 | Pelton Walter E | Distributed electrochemical cells integrated with microelectronic structures |
US7871734B2 (en) * | 2005-08-23 | 2011-01-18 | Massachusetts Institute Of Technology | Micro fuel cell |
DE602005009965D1 (en) * | 2005-12-16 | 2008-11-06 | St Microelectronics Srl | Fuel cell integrally integrated on a monocrystalline silicon circuit and method of manufacture |
US7901817B2 (en) * | 2006-02-14 | 2011-03-08 | Ini Power Systems, Inc. | System for flexible in situ control of water in fuel cells |
US20070202378A1 (en) * | 2006-02-28 | 2007-08-30 | D Urso John J | Integrated micro fuel cell apparatus |
HK1130951A1 (en) * | 2006-03-02 | 2010-01-08 | Encite Llc | Power cell architectures and control of power generator arrays |
EP2410599B1 (en) * | 2006-03-02 | 2016-01-13 | Encite LLC | Layered control of power cells |
DE102006026257A1 (en) * | 2006-06-02 | 2007-12-06 | Micronas Gmbh | Power supply by means of fuel cells |
US20080003485A1 (en) * | 2006-06-30 | 2008-01-03 | Ramkumar Krishnan | Fuel cell having patterned solid proton conducting electrolytes |
US7648786B2 (en) * | 2006-07-27 | 2010-01-19 | Trulite, Inc | System for generating electricity from a chemical hydride |
US7651542B2 (en) * | 2006-07-27 | 2010-01-26 | Thulite, Inc | System for generating hydrogen from a chemical hydride |
US20080061027A1 (en) * | 2006-09-12 | 2008-03-13 | Mangat Pawitter S | Method for forming a micro fuel cell |
US8158300B2 (en) | 2006-09-19 | 2012-04-17 | Ini Power Systems, Inc. | Permselective composite membrane for electrochemical cells |
US20080118815A1 (en) * | 2006-11-20 | 2008-05-22 | D Urso John J | Method for forming a micro fuel cell |
EP2109909B1 (en) | 2006-12-21 | 2016-07-06 | Arizona Board of Regents, acting for and on behalf of, Arizona State University | Fuel cell with transport flow across gap |
US7776386B2 (en) * | 2007-01-31 | 2010-08-17 | Motorola, Inc. | Method for forming a micro fuel cell |
US8551667B2 (en) | 2007-04-17 | 2013-10-08 | Ini Power Systems, Inc. | Hydrogel barrier for fuel cells |
US8357214B2 (en) * | 2007-04-26 | 2013-01-22 | Trulite, Inc. | Apparatus, system, and method for generating a gas from solid reactant pouches |
US8691464B2 (en) * | 2007-05-25 | 2014-04-08 | Massachusetts Institute Of Technology | Three dimensional single-chamber fuel cells |
CN101355172A (en) * | 2007-07-25 | 2009-01-28 | 思柏科技股份有限公司 | Fuel battery device with series parallel circuit |
US20090025293A1 (en) * | 2007-07-25 | 2009-01-29 | John Patton | Apparatus, system, and method for processing hydrogen gas |
EP2181477A4 (en) | 2007-07-25 | 2011-08-03 | Trulite Inc | Apparatus, system, and method to manage the generation and use of hybrid electric power |
EP2058649B1 (en) * | 2007-11-06 | 2011-06-29 | Micronas GmbH | Sensor fuel cell |
US20090191443A1 (en) * | 2008-01-28 | 2009-07-30 | Panjak Sinha | Planar fuel cell |
US8309259B2 (en) | 2008-05-19 | 2012-11-13 | Arizona Board Of Regents For And On Behalf Of Arizona State University | Electrochemical cell, and particularly a cell with electrodeposited fuel |
FR2931299B1 (en) * | 2008-05-19 | 2010-06-18 | Commissariat Energie Atomique | MEMBRANE STACKED FUEL CELL / PERPENDICULAR ELECTRODES TO THE SUPPORT SUBSTRATE AND METHOD OF MAKING SAME |
US20100040931A1 (en) * | 2008-08-12 | 2010-02-18 | Gm Global Technology Operations, Inc. | Integration of electronics and electrical distribution inside a fuel cell stack |
WO2010022321A1 (en) * | 2008-08-21 | 2010-02-25 | Georgia Tech Research Corporation | Gas sensors, methods of preparation thereof, methods of selecting gas sensor materials, and methods of use of gas sensors |
US8163429B2 (en) | 2009-02-05 | 2012-04-24 | Ini Power Systems, Inc. | High efficiency fuel cell system |
WO2011163553A1 (en) | 2010-06-24 | 2011-12-29 | Fluidic, Inc. | Electrochemical cell with stepped scaffold fuel anode |
CN202550031U (en) | 2010-09-16 | 2012-11-21 | 流体公司 | Electrochemical battery system with gradual oxygen evolution electrode/fuel electrode |
ES2549592T3 (en) | 2010-10-20 | 2015-10-29 | Fluidic, Inc. | Battery reset processes for fuel electrode in frame |
JP5908251B2 (en) | 2010-11-17 | 2016-04-26 | フルイディック,インク.Fluidic,Inc. | Multi-mode charging of hierarchical anode |
US9464356B2 (en) | 2011-09-21 | 2016-10-11 | Encite Llc | High pressure gas system |
US8986898B2 (en) | 2011-09-30 | 2015-03-24 | Blackberry Limited | Apparatus including fuel cell and electrolyzer and method for controlling fuel cell operating conditions of the apparatus |
US20130260183A1 (en) * | 2012-03-28 | 2013-10-03 | International Business Machines Corporation | Three dimensional solid-state battery integrated with cmos devices |
US9522371B2 (en) | 2012-05-07 | 2016-12-20 | Encite Llc | Self-regulating gas generator and method |
IN2014DN09365A (en) | 2012-05-04 | 2015-07-17 | Encite Llc | |
US9588558B2 (en) | 2013-06-13 | 2017-03-07 | Microsoft Technology Licensing, Llc | On-chip integrated processing and power generation |
CA3031513A1 (en) | 2016-07-22 | 2018-01-25 | Nantenergy, Inc. | Moisture and carbon dioxide management system in electrochemical cells |
KR20200013317A (en) * | 2018-07-30 | 2020-02-07 | 현대자동차주식회사 | Method for preparing flat―type membrane electrode assembly for fuel cell and flat―type membrane electrode assembly for fuel cell prepared using the same |
CN110106512A (en) * | 2019-04-17 | 2019-08-09 | 河北工业大学 | Device for preparing hydrogen |
WO2020231718A1 (en) | 2019-05-10 | 2020-11-19 | Nantenergy, Inc. | Nested annular metal-air cell and systems containing same |
US20220384835A1 (en) * | 2019-11-07 | 2022-12-01 | Hitachi High-Tech Corporation | Fuel Cell Array and Fuel Cell Inspection Method |
CN116314907A (en) * | 2021-12-20 | 2023-06-23 | 康蒂泰克振动控制有限公司 | Fuel cell module |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4248941A (en) * | 1979-12-26 | 1981-02-03 | United Tecnologies Corporation | Solid electrolyte electrochemical cell |
US5559638A (en) * | 1993-07-29 | 1996-09-24 | Olympus Optical Co., Ltd. | Wide-angle lens system #6 |
US5811062A (en) * | 1994-07-29 | 1998-09-22 | Battelle Memorial Institute | Microcomponent chemical process sheet architecture |
US5919583A (en) * | 1995-03-20 | 1999-07-06 | E. I. Du Pont De Nemours And Company | Membranes containing inorganic fillers and membrane and electrode assemblies and electrochemical cells employing same |
US5945231A (en) * | 1996-03-26 | 1999-08-31 | California Institute Of Technology | Direct liquid-feed fuel cell with membrane electrolyte and manufacturing thereof |
US6093500A (en) * | 1998-07-28 | 2000-07-25 | International Fuel Cells Corporation | Method and apparatus for operating a fuel cell system |
US6299744B1 (en) * | 1997-09-10 | 2001-10-09 | California Institute Of Technology | Hydrogen generation by electrolysis of aqueous organic solutions |
US6312846B1 (en) * | 1999-11-24 | 2001-11-06 | Integrated Fuel Cell Technologies, Inc. | Fuel cell and power chip technology |
US6387556B1 (en) * | 1997-11-20 | 2002-05-14 | Avista Laboratories, Inc. | Fuel cell power systems and methods of controlling a fuel cell power system |
US20020122972A1 (en) * | 1999-05-06 | 2002-09-05 | Tom Klitsner | Fuel cell and membrane |
US6465119B1 (en) * | 2000-07-18 | 2002-10-15 | Motorola, Inc. | Fuel cell array apparatus and method of fabrication |
US20030039874A1 (en) * | 1999-02-01 | 2003-02-27 | The Regents Of The University Of California | MEMS-based thin-film fuel cells |
US20030082431A1 (en) * | 1999-05-06 | 2003-05-01 | Tom Klitsner | Fuel cell and membrane |
US6692851B2 (en) * | 1999-07-06 | 2004-02-17 | General Motors Corporation | Fuel cell stack monitoring and system control |
US6699866B2 (en) * | 2001-04-17 | 2004-03-02 | Sepracor Inc. | Thiazole and other heterocyclic ligands for mammalian dopamine, muscarinic and serotonin receptors and transporters, and methods of use thereof |
Family Cites Families (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4460444A (en) | 1983-04-06 | 1984-07-17 | Westinghouse Electric Corp. | Hydriodic acid-anode-depolarized hydrogen generator |
JPS6020468A (en) * | 1983-07-13 | 1985-02-01 | Agency Of Ind Science & Technol | Hydrogen-oxygen solid electrolyte fuel cell |
US5023150A (en) * | 1988-08-19 | 1991-06-11 | Fuji Electric Co., Ltd. | Method and apparatus for controlling a fuel cell |
CN1011422B (en) * | 1988-09-21 | 1991-01-30 | 北京市印刷技术研究所 | Low smelting point zinc base alloy and producing light steel matrix method by using the alloy |
AT393045B (en) * | 1989-08-08 | 1991-07-25 | Peter Dipl Ing Dr Schuetz | Thin-layer H2/O2 fuel cell, in the form of a plate, and a method for its production |
JP2745776B2 (en) | 1990-05-10 | 1998-04-28 | 富士電機株式会社 | Fuel cell power generation system |
JP3333877B2 (en) * | 1990-11-23 | 2002-10-15 | ビーエイイー システムズ マリン リミテッド | Application of fuel cell to power generation system |
US5364711A (en) | 1992-04-01 | 1994-11-15 | Kabushiki Kaisha Toshiba | Fuel cell |
JPH06319287A (en) | 1993-04-30 | 1994-11-15 | Aqueous Res:Kk | Electric power supply equipment for driving motor |
JPH07201348A (en) * | 1993-12-28 | 1995-08-04 | Nri & Ncc Co Ltd | Microsized fuel cell system |
JP3564742B2 (en) | 1994-07-13 | 2004-09-15 | トヨタ自動車株式会社 | Fuel cell power generator |
EP0788172B1 (en) * | 1996-02-05 | 2001-12-05 | Matsushita Electric Industrial Co., Ltd. | Fuel cell for mounting on equipment |
US6479177B1 (en) * | 1996-06-07 | 2002-11-12 | Ballard Power Systems Inc. | Method for improving the cold starting capability of an electrochemical fuel cell |
US5858568A (en) * | 1996-09-19 | 1999-01-12 | Ztek Corporation | Fuel cell power supply system |
JPH10144334A (en) | 1996-11-13 | 1998-05-29 | Toshiba Corp | Fuel cell system power plant, and starting and stopping method therefor |
DE19710819C1 (en) | 1997-03-15 | 1998-04-02 | Forschungszentrum Juelich Gmbh | Fuel cell with anode-electrolyte-cathode unit |
US20030022033A1 (en) | 1997-03-15 | 2003-01-30 | Mannesmann Ag | Fuel cell with pulsed anode potential |
US6451463B1 (en) | 1997-10-06 | 2002-09-17 | Reveo, Inc. | Electro-chemical power generation systems employing arrays of electronically-controllable discharging and/or recharging cells within a unity support structure |
US5910378A (en) | 1997-10-10 | 1999-06-08 | Minnesota Mining And Manufacturing Company | Membrane electrode assemblies |
US6472090B1 (en) | 1999-06-25 | 2002-10-29 | Ballard Power Systems Inc. | Method and apparatus for operating an electrochemical fuel cell with periodic reactant starvation |
JP3108686B2 (en) * | 1999-03-10 | 2000-11-13 | 株式会社関西新技術研究所 | Power generation system |
DE19914681C2 (en) * | 1999-03-31 | 2002-07-18 | Joerg Mueller | Polymer electrolyte membrane Fuel cell system in microsystem technology |
JP2001086691A (en) | 1999-09-14 | 2001-03-30 | Nippon Densan Corp | Spindle motor |
US8518594B2 (en) | 1999-11-24 | 2013-08-27 | Encite, Llc | Power cell and power chip architecture |
US8834700B2 (en) | 1999-11-24 | 2014-09-16 | Encite, Llc | Method and apparatus for electro-chemical reaction |
US8980492B2 (en) | 1999-11-24 | 2015-03-17 | Encite Llc | Method and apparatus for controlling an array of power generators |
DE10053851A1 (en) | 2000-10-30 | 2002-05-08 | Siemens Ag | Process for the regeneration of CO poisoning in HT-PEM fuel cells |
CA2440563A1 (en) * | 2001-03-12 | 2002-09-19 | Lexicon Genetics Incorporated | Novel human egf-family proteins and polynucleotides encoding the same |
JP2003187822A (en) | 2001-12-20 | 2003-07-04 | Sony Corp | Proton conductor, membrane electrode, junction, fuel cell, fuel cell system, and voltage converter |
CA2475504C (en) | 2002-02-06 | 2013-07-09 | Battelle Memorial Institute | Methods of removing contaminants from a fuel cell electrode |
JP2005518644A (en) | 2002-02-20 | 2005-06-23 | エビオニクス、インク. | Metal air cell system |
WO2003075113A1 (en) | 2002-03-04 | 2003-09-12 | Josuke Nakata | Power generating system |
AU2003215473A1 (en) | 2002-03-29 | 2003-10-13 | Estco Battery Management Inc. | Fuel cell operating control system |
US7491457B2 (en) | 2002-08-16 | 2009-02-17 | Hewlett-Packard Development Company, L.P. | Fuel cell apparatus |
US7316719B2 (en) | 2002-09-06 | 2008-01-08 | Hewlett-Packard Development Company, L.P. | Hydrogen generating apparatus |
US20040053100A1 (en) | 2002-09-12 | 2004-03-18 | Stanley Kevin G. | Method of fabricating fuel cells and membrane electrode assemblies |
JP2004120831A (en) | 2002-09-24 | 2004-04-15 | Terakawa Soji | Charge and discharge device |
DE10393844B4 (en) | 2002-12-06 | 2014-07-24 | Fairchild Semiconductor Corporation | Integrated fuel cell power conditioning with additional function control |
JP4669654B2 (en) | 2003-05-15 | 2011-04-13 | 関西電力株式会社 | Small fuel cell system |
JP4060756B2 (en) | 2003-06-03 | 2008-03-12 | 東芝電池株式会社 | Secondary battery charging method, charging device and charging control program therefor |
JP2005085509A (en) | 2003-09-04 | 2005-03-31 | Nec Corp | Fuel cell system and its driving method |
US7491458B2 (en) | 2003-11-10 | 2009-02-17 | Polyplus Battery Company | Active metal fuel cells |
US7474078B2 (en) | 2003-12-19 | 2009-01-06 | Texaco Inc. | Cell maintenance device for fuel cell stacks |
JP4412001B2 (en) | 2004-02-27 | 2010-02-10 | ソニー株式会社 | Power generation unit, fuel cell |
JP2005293901A (en) | 2004-03-31 | 2005-10-20 | Nec Corp | Fuel cell system and driving method thereof |
JP2006049110A (en) | 2004-08-05 | 2006-02-16 | Hitachi Ltd | Catalyst for fuel cell, membrane electrode assembly using it, its manufacturing method, and the fuel cell |
JP2006351343A (en) | 2005-06-15 | 2006-12-28 | Toshiba Corp | Fuel cell power generation device and method |
US8158286B2 (en) | 2005-08-17 | 2012-04-17 | Honda Motor Co., Ltd. | Energy stations |
US9819037B2 (en) | 2006-03-02 | 2017-11-14 | Encite Llc | Method and apparatus for cleaning catalyst of a power cell |
US7682719B2 (en) | 2006-09-22 | 2010-03-23 | Gm Global Technology Operations, Inc. | Method for adaptive prediction of stack voltage in automotive fuel cell systems |
JP2010216461A (en) | 2009-03-18 | 2010-09-30 | Sango Co Ltd | Exhaust manifold |
-
1999
- 1999-11-24 US US09/449,377 patent/US6312846B1/en not_active Expired - Lifetime
-
2000
- 2000-11-17 JP JP2001553607A patent/JP5313423B2/en not_active Expired - Fee Related
- 2000-11-17 AU AU59016/01A patent/AU5901601A/en not_active Abandoned
- 2000-11-17 EP EP00993366.4A patent/EP1236237B1/en not_active Expired - Lifetime
- 2000-11-17 CN CNB008161291A patent/CN100349318C/en not_active Expired - Lifetime
- 2000-11-17 WO PCT/US2000/031825 patent/WO2001054217A2/en active Application Filing
- 2000-11-17 EP EP11185602A patent/EP2525431A3/en not_active Withdrawn
- 2000-11-17 CN CNA2007101527074A patent/CN101118974A/en active Pending
-
2001
- 2001-09-07 US US09/949,301 patent/US6815110B2/en not_active Expired - Lifetime
-
2003
- 2003-01-30 HK HK03100771.2A patent/HK1049069B/en not_active IP Right Cessation
-
2004
- 2004-09-29 US US10/953,038 patent/US6991866B2/en not_active Expired - Lifetime
- 2004-11-09 US US10/985,736 patent/US7029779B2/en not_active Expired - Lifetime
-
2005
- 2005-12-29 US US11/322,760 patent/US20060110636A1/en not_active Abandoned
-
2006
- 2006-09-14 US US11/521,593 patent/US20070116994A1/en not_active Abandoned
-
2008
- 2008-07-28 US US12/220,787 patent/US8431281B2/en not_active Expired - Fee Related
-
2013
- 2013-03-25 US US13/849,929 patent/US9406955B2/en not_active Expired - Fee Related
Patent Citations (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4248941A (en) * | 1979-12-26 | 1981-02-03 | United Tecnologies Corporation | Solid electrolyte electrochemical cell |
US5559638A (en) * | 1993-07-29 | 1996-09-24 | Olympus Optical Co., Ltd. | Wide-angle lens system #6 |
US5811062A (en) * | 1994-07-29 | 1998-09-22 | Battelle Memorial Institute | Microcomponent chemical process sheet architecture |
US5919583A (en) * | 1995-03-20 | 1999-07-06 | E. I. Du Pont De Nemours And Company | Membranes containing inorganic fillers and membrane and electrode assemblies and electrochemical cells employing same |
US5945231A (en) * | 1996-03-26 | 1999-08-31 | California Institute Of Technology | Direct liquid-feed fuel cell with membrane electrolyte and manufacturing thereof |
US6299744B1 (en) * | 1997-09-10 | 2001-10-09 | California Institute Of Technology | Hydrogen generation by electrolysis of aqueous organic solutions |
US6432284B1 (en) * | 1997-09-10 | 2002-08-13 | California Institute Of Technology | Hydrogen generation by electrolysis of aqueous organic solutions |
US6387556B1 (en) * | 1997-11-20 | 2002-05-14 | Avista Laboratories, Inc. | Fuel cell power systems and methods of controlling a fuel cell power system |
US6093500A (en) * | 1998-07-28 | 2000-07-25 | International Fuel Cells Corporation | Method and apparatus for operating a fuel cell system |
US20030039874A1 (en) * | 1999-02-01 | 2003-02-27 | The Regents Of The University Of California | MEMS-based thin-film fuel cells |
US20030138685A1 (en) * | 1999-02-01 | 2003-07-24 | Alan F. Jankowski | Mems-based thin-film fuel cells |
US20020122972A1 (en) * | 1999-05-06 | 2002-09-05 | Tom Klitsner | Fuel cell and membrane |
US20030082431A1 (en) * | 1999-05-06 | 2003-05-01 | Tom Klitsner | Fuel cell and membrane |
US6841290B2 (en) * | 1999-05-06 | 2005-01-11 | Sandia Corporation | Fuel cell and membrane |
US6692851B2 (en) * | 1999-07-06 | 2004-02-17 | General Motors Corporation | Fuel cell stack monitoring and system control |
US6312846B1 (en) * | 1999-11-24 | 2001-11-06 | Integrated Fuel Cell Technologies, Inc. | Fuel cell and power chip technology |
US6815110B2 (en) * | 1999-11-24 | 2004-11-09 | Integrated Fuel Cell Technologies, Inc. | Fuel cell and power chip technology |
US7029779B2 (en) * | 1999-11-24 | 2006-04-18 | Integrated Fuel Cell Technologies, Inc. | Fuel cell and power chip technology |
US6465119B1 (en) * | 2000-07-18 | 2002-10-15 | Motorola, Inc. | Fuel cell array apparatus and method of fabrication |
US6699866B2 (en) * | 2001-04-17 | 2004-03-02 | Sepracor Inc. | Thiazole and other heterocyclic ligands for mammalian dopamine, muscarinic and serotonin receptors and transporters, and methods of use thereof |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070248848A1 (en) * | 1999-11-24 | 2007-10-25 | Marsh Stephen A | Power cell and power chip architecture |
US20070251829A1 (en) * | 1999-11-24 | 2007-11-01 | Marsh Stephen A | Method and apparatus for electro-chemical reaction |
US20070287043A1 (en) * | 1999-11-24 | 2007-12-13 | Marsh Stephen A | Method and apparatus for controlling an array of power generators |
US8518594B2 (en) | 1999-11-24 | 2013-08-27 | Encite, Llc | Power cell and power chip architecture |
US8834700B2 (en) | 1999-11-24 | 2014-09-16 | Encite, Llc | Method and apparatus for electro-chemical reaction |
US8962166B2 (en) | 1999-11-24 | 2015-02-24 | Encite Llc | Power cell and power chip architecture |
US8980492B2 (en) | 1999-11-24 | 2015-03-17 | Encite Llc | Method and apparatus for controlling an array of power generators |
US9406955B2 (en) | 1999-11-24 | 2016-08-02 | Encite Llc | Methods of operating fuel cells |
US9819037B2 (en) | 2006-03-02 | 2017-11-14 | Encite Llc | Method and apparatus for cleaning catalyst of a power cell |
US10199671B2 (en) | 2006-03-02 | 2019-02-05 | Encite Llc | Apparatus for cleaning catalyst of a power cell |
US11121389B2 (en) | 2006-03-02 | 2021-09-14 | Encite Llc | Method and controller for operating power cells using multiple layers of control |
Also Published As
Publication number | Publication date |
---|---|
US6815110B2 (en) | 2004-11-09 |
EP1236237B1 (en) | 2017-04-12 |
US7029779B2 (en) | 2006-04-18 |
CN100349318C (en) | 2007-11-14 |
JP5313423B2 (en) | 2013-10-09 |
AU5901601A (en) | 2001-07-31 |
JP2003532977A (en) | 2003-11-05 |
US20020045082A1 (en) | 2002-04-18 |
CN101118974A (en) | 2008-02-06 |
US20080292920A1 (en) | 2008-11-27 |
US9406955B2 (en) | 2016-08-02 |
US20140030621A1 (en) | 2014-01-30 |
WO2001054217A3 (en) | 2002-05-02 |
US8431281B2 (en) | 2013-04-30 |
EP2525431A3 (en) | 2013-01-16 |
US20060110636A1 (en) | 2006-05-25 |
HK1049069B (en) | 2018-04-27 |
EP2525431A2 (en) | 2012-11-21 |
US6991866B2 (en) | 2006-01-31 |
WO2001054217A9 (en) | 2002-08-01 |
US20050060876A1 (en) | 2005-03-24 |
WO2001054217A2 (en) | 2001-07-26 |
CN1421054A (en) | 2003-05-28 |
EP1236237A2 (en) | 2002-09-04 |
US6312846B1 (en) | 2001-11-06 |
US20050130021A1 (en) | 2005-06-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8431281B2 (en) | Methods of operating fuel cells | |
US8980492B2 (en) | Method and apparatus for controlling an array of power generators | |
US8962166B2 (en) | Power cell and power chip architecture | |
US8834700B2 (en) | Method and apparatus for electro-chemical reaction | |
US11121389B2 (en) | Method and controller for operating power cells using multiple layers of control | |
EP2432062B1 (en) | Power cell architecture |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ENCITE LLC, MASSACHUSETTS Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:MARSH, STEPHEN A.;REEL/FRAME:020538/0270 Effective date: 20071221 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |