US20070117383A1 - Precursor material delivery system with staging volume for atomic layer deposition - Google Patents
Precursor material delivery system with staging volume for atomic layer deposition Download PDFInfo
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- US20070117383A1 US20070117383A1 US11/564,272 US56427206A US2007117383A1 US 20070117383 A1 US20070117383 A1 US 20070117383A1 US 56427206 A US56427206 A US 56427206A US 2007117383 A1 US2007117383 A1 US 2007117383A1
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- B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4402—Reduction of impurities in the source gas
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/4557—Heated nozzles
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S55/00—Gas separation
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Abstract
A precursor delivery system includes a flow path from a precursor container to a reaction space of a thin film deposition system, such as an atomic layer deposition (ALD) reactor. A staging volume is preferably established between the precursor container and the reaction space for receiving at least one dose of the precursor material from the precursor container, and from which pulses are released toward the reaction space. A pulse control device is preferably interposed between the staging volume and the reaction space. A sensor may sense a physical condition in the staging volume for providing feedback to a controller of the precursor delivery system, for performance monitoring and control.
Description
- This application is a divisional under 35 U.S.C. § 121 and claims priority under 35 U.S.C. § 120 from U.S. application Ser. No. 10/660,365, filed Sep. 10, 2003, issued as U.S. Pat. No. 7,141,095, which claims the benefit under 35 U.S.C. § 119(e) of U.S. Provisional Patent Application No. 60/410,067, filed Sep. 11, 2002, and which is a continuation-in-part of U.S. patent application Ser. No. 10/400,054, filed Mar. 25, 2003, now U.S. Pat. No. 6,936,086, all of which are incorporated herein by reference.
- The field of the present disclosure relates to methods and devices for storing precursor materials in a thin film deposition process, such as atomic layer deposition; conditioning such precursor materials in preparation for deposition, e.g., by adjusting their temperature and/or pressure; and introducing pulses of vaporized precursor material into a reaction space of a thin film deposition system.
- Atomic layer deposition (“ALD”), formerly known as atomic layer epitaxy (“ALE”), is a thin film deposition process that has been used to manufacture electroluminescent (“EL”) displays for over 20 years. See, e.g., U.S. Pat. No. 4,058,430 of Suntola et al., incorporated herein by reference. The films yielded by the ALD technique have exceptional characteristics such as being pinhole free and possessing almost perfect step coverage. Recently, ALD has been proposed for use in the semiconductor processing industry for depositing thin films on semiconductor substrates, to achieve desired step coverage and physical properties needed for next-generation integrated circuits. ALD offers several benefits over other thin film deposition methods commonly used in semiconductor processing, such as physical vapor deposition (“PVD”) (e.g., evaporation or sputtering) and chemical vapor deposition (“CVD”), as described in Atomic Layer Epitaxy (T. Suntola and M. Simpson, eds., Blackie and Son Ltd., Glasgow, 1990).
- In contrast to CVD, in which the flows of precursors are static (i.e., flow rates are steady during processing), precursor flows in ALD processing are dynamic. There are many precursor delivery system components, such as mass flow controllers and particle filters, that can be used in CVD processing in which flow resistance and switching speed are not especially important. However, the inventors have recognized that such delivery system components have limited utility in ALD processes and equipment, due to the dynamic precursor flows and fast switching needed in ALD.
- Successful ALD growth typically requires the sequential introduction of two or more different precursor vapors into a reaction space around a substrate. ALD is usually performed at elevated temperatures and pressures. For example, the reaction space may be heated to between 200° C. and 600° C. and pumped down to a pressure of approximately 1 Torr. In a typical ALD reactor, the reaction space is bounded by a reaction chamber sized to accommodate one or more substrates. One or more precursor material delivery systems (also known as “precursor sources”) are typically provided for feeding precursor materials into the reaction chamber.
- After the substrates are loaded into the reaction chamber and heated to a desired processing temperature, a first precursor vapor is directed over the substrates. Some of the precursor vapor chemisorbs on the surface of the substrates to make a one monolayer thick film. For true ALD, the molecules of precursor vapor will not attach to other like molecules, and the process is therefore self-limiting. Next the reaction space is purged to remove excess of the first vapor and any volatile reaction products. Purging is typically accomplished by introduction of an inert or non-reactive purge gas into the reaction space. After purging, a second precursor vapor is introduced. Molecules of the second precursor vapor chemisorb or otherwise react with the chemisorbed first precursor molecules to form a thin film product of the first and second precursors. To complete the ALD cycle, the reaction space is again purged to remove any excess of the second vapor as well as any volatile reaction products. The steps of first precursor pulse, purge, second precursor pulse, and purge are typically repeated hundreds or thousands of times until the desired thickness of the film is achieved.
- A key to successful ALD growth is to have the first and second precursor vapors pulsed into the reaction chamber sequentially and without overlap. An ideal set of ALD precursor pulses would be a pair of Delta functions, as illustrated in
FIG. 1 , which is a simplified timing diagram representing two cycles of a simple ALD process. With reference toFIG. 1 , alternating pulses of afirst precursor 12 and asecond precursor 14 are separated byintervals 16, which can be made small compared to the duration “d” of each of thepulses pulses FIG. 1 as having equal duration, but unequal pulse durations would also be feasible. - As noted above,
FIG. 1 illustrates an ideal set of precursor pulses. However, in practice, imperfections in the precursor delivery system, precursor adsorption on the walls of the delivery system and reaction chamber, and fluid flow dynamics cause the concentration of precursor material in the ALD reaction space to have a leading edge slope and an exponential decay during purge.FIG. 2 is a simplified timing diagram illustrating respective first andsecond pulses edge slope 26 andexponential decay 28. With reference toFIG. 2 , because theactual pulses second precursor pulse 24 is started before thefirst precursor pulse 22 is completely decayed, as illustrated byoverlap region 29. If substantial amounts of both of the first and second precursor chemicals are present in the reaction space at the same time, then non-ALD growth can occur, which can generate particles, non-uniform film thickness, and other defects. To prevent the problems caused by non-ALD growth, thepulses overlap 29. -
FIG. 3 illustrates apurge interval 32, between respective first andsecond precursor pulses 34 and 36, that is sufficiently long to prevent overlap. For simplicity, thepurge interval 32 is illustrated as having a duration similar to the duration of thepulses 34 and 36. However, in practice, it is common for purge times in an ALD process to be 10 times longer than the pulse times, due to long exponential decays of precursor pulses caused by flow restrictions and cold spots in the flow path. For example, a ALD process including precursor vapor pulses having a duration of 50 milliseconds (ms) may require pulse intervals of 500 ms or longer to prevent overlap and achieve good film thickness uniformity. Long purge intervals increase processing time, which substantially reduces the overall efficiency of the ALD reactor. The present inventors have recognized that reducing the rise and decay times also reduces the overall time required for each ALD process cycle without causing non-ALD growth, thereby improving the throughput of the ALD reactor. - Conventionally, precursors have been stored and vapors delivered from glass tubes placed inside the reactor, as described in U.S. Pat. No. 4,389,973 of Suntola et al., incorporated herein by reference. The flow of each precursor vapor is controlled by so-called “inert gas valving,” which involves controlling the direction of an inert gas flowing through the tube containing the precursor chemical. Conventional inert gas valving has been employed for about 20 years for the fabrication of EL displays, including its use with certain solid precursors like ZnCl2 and MnCl2. However, the present inventors have found that the particle requirements for other applications, particularly semiconductor processing, are far more stringent than those required for EL display manufacturing. Conventional precursor delivery methods and inert gas valving do not provide a barrier to prevent particles present in powdered precursors from being carried into the reaction space with the pulses of precursor vapor. Further, the conventional methods cannot accommodate certain highly reactive precursors useful for semiconductor processing, which cannot be loaded in an open tube due to their reactivity with air and/or moisture.
- For most films grown by ALD, unwanted particles in or on the film will reduce the manufacturing yield. It is therefore important that the precursor delivery system does not emit particles. Preventing particles is especially difficult when one or more of the precursors exist in powdered form at room temperature and pressure. CVD systems commonly include a high efficiency particle filter that can block up to 99.99999% of particles smaller than 0.003 microns. However, the present inventors have found that CVD-type high efficiency particle filters are unsuitable for use in ALD processing because they are highly resistive to flow, which leads to long precursor rise and/or decay times. High efficiency particle filters also have a tendency to become blocked by coarse particles emanating from a supply of precursor material, which can cause system failures and yield losses in manufacturing. A new type of ALD-oriented particle filtering is therefore needed.
- The inventors have also recognized a need for improved control of unwanted precursor migration between pulses (during purging).
- U.S. Patent Application Publication No. 2001/0042523 A1 of Kesala discloses a reactant gas source contained in a vacuum shell. Liquid or solid reactant matter is held in an ampoule having an opening covered by a high efficiency particle filter. The ampoule is enclosed within a gas-tight container that defines a gas space around the ampoule. An outlet of the gas-tight container leads from the gas space through a second high efficiency particle filter and into the reaction chamber. Pulses of reactant gases are switched by a backflow of inert gas in a line between the second high efficiency particle filter and the reaction chamber.
- U.S. Pat. No. 6,270,839 of Onoe at el. discloses a precursor source for a CVD system that does not include a mechanism for pulsing, as required in an ALD system.
- Thus the inventors have recognized a need for improved methods and devices for storing precursor materials in a thin film deposition process, conditioning such precursor materials in preparation for deposition, and introducing pulses of vaporized precursor material into a reaction space of a thin film deposition system.
- A precursor delivery system for delivering pulses of precursor material to a reaction space in a thin film deposition system includes a precursor container for holding a supply of precursor material and a flow path from the precursor container to the reaction space. In a preferred embodiment, a pulse control device is interposed between the precursor container and the reaction space for selectively permitting pulses of the precursor material to flow from the precursor container to the reaction space via the flow path. In some embodiments, a staging volume may be established downstream from the precursor container and upstream from the reaction space for receiving at least one dose of the precursor material from the precursor container. The staging volume is preferably selectively isolatable from the reaction space for releasing a series of pulses of the precursor material from the staging volume toward the reaction space. The staging volume may also be selectively isolatable from the precursor container. One or more sensors may be coupled to the staging volume for sensing a physical condition of the staging volume or the precursor material present in it, such as temperature or pressure, for monitoring system performance and/or providing feedback to an automatic controller of the precursor delivery system for closed-loop control.
- The precursor material is preferably vaporized after loading it in the precursor container by heating the precursor material or reducing pressure inside the precursor container. A vacuum line may be coupled to the precursor container for reducing pressure inside the precursor container. The vacuum line preferably bypasses a reaction chamber of the thin film deposition system to prevent particles from being drawn through the flow path and into the reaction chamber. The vaporized precursor material (hereinafter “precursor vapor”) may be drawn into the staging volume, via a pressure differential, upon opening an optional isolation valve between the precursor container and the staging volume. A particle filter may be interposed in the flow path between the precursor container and the reaction space, and preferably between the precursor container and a staging volume, for filtering particles from the precursor vapor.
- The particle filter may include a high conductivity particle filter for preventing the particles from passing into the reaction space without significantly restricting the flow of the pulses through the flow path. In a preferred embodiment, the high conductivity particle filter defines a filter passage having multiple turns, at least one of which passes near a trap in communication with the filter passage such that the inertia of the particles causes them to travel into the trap as the precursor material flows through said turn. The particle filter may also comprise a compound filter including one or more high efficiency filters downstream from a high conductivity particle filter. In the compound filter arrangement, the high conductivity particle filter operates to remove coarse particles before the precursor reaches the high efficiency filters, thereby protecting the high efficiency filters from clogging.
- Methods and devices in accordance with the disclosed embodiments may be useful in atomic layer deposition (“ALD”), as well as for other pulsed thin film deposition techniques, such as pulsed chemical vapor deposition (“Pulsed-CVD”) and pulsed metal-organic chemical vapor deposition (“Pulsed-MOCVD”), for example.
- Additional aspects and advantages will be apparent from the following detailed description of preferred embodiments, which proceeds with reference to the accompanying drawings.
- Non-exhaustive embodiments are described with reference to the figures, in which like reference numerals identify like elements.
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FIG. 1 is a simplified timing diagram representing two cycles of an idealized thin film deposition process; -
FIG. 2 is a timing diagram illustrating overlapping first and second precursor pulses in a simplified prior art ALD process, which may cause non-ALD film growth; -
FIG. 3 is a timing diagram illustrating a simplified prior art ALD process, in which a purge interval prevents overlapping of sequential first and second precursor pulses; -
FIG. 4 is a schematic representation of a precursor delivery system in accordance with a preferred embodiment; -
FIG. 5 is an isometric section view illustrating an embodiment of the precursor delivery system ofFIG. 4 ; -
FIG. 6 is an enlarged isometric section view of a removable precursor container module for use with the precursor delivery system ofFIG. 5 , including detail of an optional high conductivity particle filter positioned within the precursor container of the precursor container module; -
FIG. 7 is a schematic representation of the precursor delivery system ofFIGS. 4 and 5 , illustrating a flow of purge gas controlled by a diffusion barrier module of the precursor delivery system during a purging step of an ALD process cycle; -
FIG. 8 is a schematic representation of the precursor delivery system ofFIGS. 4 and 5 , illustrating the flow of precursor vapors and purge gas during a precursor pulse step of the ALD process cycle; and -
FIGS. 9-16 show various embodiments of a high conductivity particle filter used in the precursor delivery system ofFIGS. 4-6 , of which: -
FIG. 9 is a cross-sectional view of one embodiment; -
FIG. 10 is a cross-sectional view of an alternative embodiment; -
FIG. 11 is a cross-sectional view of a second alternative embodiment; -
FIG. 12 is a cross-sectional view of a third alternative embodiment; -
FIG. 13A is a plan view of a first plate for another alternative embodiment; -
FIG. 13B is a plan view of a second plate for use with the plate ofFIG. 13A ; -
FIG. 13C is a perspective view of plates ofFIGS. 13A and 13B arranged sequentially; -
FIG. 13D is a cross-sectional view of a filter incorporating the plates ofFIGS. 13A and 13B arranged sequentially as shown inFIG. 13C ; -
FIG. 14 is a cross-sectional view of an alternative embodiment; -
FIG. 15 is a cross-sectional perspective view of yet another alternative embodiment; and -
FIG. 16 is a cross-sectional view of still another alternative embodiment. - Throughout the specification, reference to “one embodiment,” or “an embodiment,” or “some embodiments” means that a particular described feature, structure, or characteristic is included in at least one embodiment. Thus appearances of the phrases “in one embodiment,” “in an embodiment,” or “in some embodiments” in various places throughout this specification are not necessarily all referring to the same embodiment.
- Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. Various embodiments can be practiced without one or more of the specific details or with other methods, components, materials, etc. In other instances, well-known structures, materials, or operations are not shown or not described in detail to avoid obscuring aspects of the embodiments.
- As used herein, terminology referring to “communication” or “fluid communication” between components is inclusive of both a direct connection between components and an indirection connection in which such communication is effected via one or more intermediate components or pathways.
-
FIG. 4 shows an schematic representation of aprecursor delivery system 100 in accordance with a preferred embodiment.FIG. 5 is an isometric cross section view illustrating an embodiment of theprecursor delivery system 100 ofFIG. 4 . With reference toFIGS. 4 and 5 , a supply of precursor material (not shown) is stored in a precursor container (PC) 102, where it is preferably vaporized before flowing through aflow path 104 of thesystem 100 and into a reaction space inside areaction chamber 110 of a thin film deposition system. Precursor material may originate as a solid, liquid, gas, or mixtures thereof, although it will most commonly be in powdered or liquid form when initially loaded intoprecursor container 102. When the precursor material originates in gaseous form, it is typically unnecessary to take steps for vaporizing the precursor material, such as heating or pressure reduction inprecursor container 102. Valves V1, V2, V3, and V4 are used to regulate the pressure at different stages inprecursor delivery system 100 and to control the flow of precursor material, as further described below. For clarity, the details of valves V1, V2, V3, and V4 are omitted and, inFIGS. 5 and 6 , the valve stems and valve actuators of the valves are merely outlined in dashed lines. Any of a variety of diaphragm valves, fast-switching shut-off valves, or other flow shut-off mechanisms may be used. A preferred diaphragm valve is described in U.S. patent application Ser. No. 10/609,134, filed Jun. 26, 2003, incorporated herein by reference. - A staging volume (VOL) 114 is defined by the walls of a
volume module 116, which is interposed inflow path 104 downstream fromprecursor container 102 and upstream fromreaction chamber 110.Staging volume 114 is selectively isolatable fromprecursor container 102 andreaction chamber 110 for receiving and holding at least one dose of precursor material from which one or more pulses of precursor vapor may be released throughflow path 104 and intoreaction chamber 110. A particle filter module (PF2) 120 prevents particles from being transported into stagingvolume 114 when it receives a dose of the precursor fromprecursor container 102.Particle filter module 120 may include a high conductivity particle filter, as described below; a high efficiency filter; or a compound filter including a high conductivity particle filter followed by a series of one or more high efficiency filters. In the embodiment ofFIGS. 4 and 5 ,particle filter module 120 includes a series of fourfilters flow path 104, of which thefirst filter 122 a is a high conductivity filter and the second, third, andfourth filters first filter 122 a may preferably be of the type described below with reference toFIGS. 9-11 , including a spiraling filter passage flanked by a series of inertial traps. In some embodiments,filters first filter 122 a may be the coarsest filter and the last filter may be the finest. In other embodiments (not shown),particle filter module 120 may include a greater or fewer number of filters in series. - A fast switching
pulse control device 124 includes a pulse valve (V4) 126 for controlling the timing and duration of pulses of precursor material released intoreaction chamber 110.Pulse valve 126 may include a diaphragm valve for selectively interruptingflow path 104. A suitable diaphragm valve is described in U.S. patent application Ser. No. 10/609,134, filed Jun. 26, 2003, which is incorporated herein by reference. In alternative embodiments (not shown),pulse control device 124 includes other devices for releasing pulses of precursor vapor, such as an inert gas valve.Pulse control device 124 preferably includes a diffusion barrier (DB) 130 positioned in the precursor flow path betweenpulse valve 126 andreaction chamber 110. One purpose ofdiffusion barrier 130 is to purgeflow path 104 andreaction chamber 110 between pulses by injecting an inert gas such as nitrogen (N2) intoflow path 104 at a location upstream fromreaction chamber 110 and downstream frompulse valve 126.Diffusion barrier 130 also operates so that any precursor material that might leak throughpulse valve 126, when closed, is prevented from diffusing intoreaction chamber 110 and reacting with a different precursor material being delivered intoreaction chamber 110 by a second precursor delivery system (not shown). - In one embodiment, a high conductivity particle filter (HCPF) 140 is the last component in
flow path 104 ofprecursor delivery system 100 beforereaction chamber 110 to prevent particles from reachingreaction chamber 110. High conductivity particle filters may also be placed at other locations alongflow path 104, to prevent particles from clogging or fouling valves, high efficiency particle filters, and other components ofprecursor delivery system 100. - An isolation valve (V2) 146 is positioned downstream from
particle filter module 120 and upstream fromvolume module 116 for selectively isolatingstaging volume 114 fromprecursor container 102.Isolation valve 146 may include a diaphragm valve for selectively interruptingflow path 104 between stagingvolume 114 andprecursor container 102. A suitable diaphragm valve is described in U.S. patent application Ser. No. 10/609,134. Apump 152 is coupled toprecursor container 102 and can draw a vacuum withinprecursor container 102 independently of vacuum drawn at other locations inprecursor delivery system 100 or the thin film deposition reactor. Avacuum path 156 betweenprecursor container 102 and pump 152 is selectively opened and closed by a vacuum valve (V1) 158.Vacuum valve 158 may include a diaphragm valve for selectively interruptingvacuum path 156, such as the diaphragm valve described in U.S. patent application Ser. No. 10/609,134. Pump 152 may be the same pumps used to reduce the pressure in thereaction chamber 110 or independent pumps, butvacuum path 156 preferably bypassesreaction chamber 110 so that any particles drawn intovacuum path 156 fromprecursor chamber 102 will not pass throughreaction chamber 110. By bypassingreaction chamber 110,vacuum path 156 also facilitates the use of less expensive precursor chemicals because it allows high vapor pressure contaminants and byproducts, such as water, to be removed from the supply of precursor material without contaminating thereaction space 110.Isolation valve 146 preferably prevents the portion offlow path 104 located downstream fromisolation valve 146 from the effects ofpumps 152.Vacuum valve 158 andisolation valve 146 may cooperate so that normally no more than one of them is open at a time. A particle filter (PF1) 160 (FIG. 4 ) may be interposed betweenprecursor container 102 andvacuum valve 158 to prevent particles from clogging or foulingvacuum valve 158.Particle filter 160 preferably comprises a high conductivity particle filter of the type described below with reference toFIGS. 9-16 . Alternatively,particle filter 160 may include a high efficiency particle filter. - A boost valve (V3) 164 connects a source of
inert boost gas 166 to stagingvolume 114 at a location downstream fromisolation valve 146. Thediffusion barrier 130 includes a control valve (V5) 168 and a network of flow channels with flow restrictors R1, R2, and R3.Diffusion barrier 130 includes aninput channel 174 from apurge gas source 176 supplying an inert gas, and anoutput channel 178 to adiffusion barrier pump 182.Purge gas source 176 anddiffusion barrier pump 182 may be shared or combined with the source ofboost gas 166 and thevacuum pump 152, respectively. -
FIG. 6 is an enlarged sectional perspective view of a removableprecursor container module 190 of thesystem 100 ofFIG. 5 , includingprecursor container 102,vacuum valve 158, andparticle filter module 120. A valve 194 (not shown inFIGS. 4 and 5 ) is included at the end ofmodule 190 opposite fromvacuum valve 158 to allowprecursor container 102 to be sealed before it is disconnected fromprecursor delivery system 100, to thereby prevent leakage of precursor material into the workspace when changingprecursor container module 190. Whenprecursor container module 190 is removed, isolation valve 146 (FIGS. 4 and 5 ) is shut to prevent leakage of precursor from stagingvolume 114 or loss of pressure inreaction chamber 110. - A high conductivity particle filter 196 (not shown in
FIGS. 4 and 5 ) is optionally disposed withinprecursor chamber 102 above areservoir 198 where a supply of precursor material is held (not shown).Filter 196 may take the place of or be in addition to particle filter 160 (FIG. 4 ). Also, if highconductivity particle filter 196 is used, then first filter 122 a ofparticle filter module 120 may optionally be a high efficiency filter or may be omitted. In yet another embodiment (not shown),filter module 120 may be entirely replaced by highconductivity particle filter 196. -
Filter 196 includes a series of stackedplates 202 andnon-aligned apertures 204 creating a labyrinth filter passage within theprecursor container 102 that passes by a series of inertial traps for filtering particles without significantly impeding the flow of precursor vapor. The filter passage extends between aninlet 203 communicating withflow path 104 at an upstream part offilter 196, and an outlet 205 communicating withflow path 104 at a downstream part offilter 196. (In the embodiment ofFIG. 6 , theflow path 104 begins at thereservoir 198 and follows the labyrinth filter passage through thefilter 196 to outlet 205 and beyond.) Spacer pins (not shown, seeFIG. 13 ) holdplates 202 in spaced relation and keepplates 202 held together as a unit that is easily replaceable and removable. The entire unit preferably rests on alip 208 circumscribingprecursor container 102, but could also hang from aremovable lid 210 ofprecursor container 102 or stand on legs (not shown) extending to thebottom 212 ofprecursor container 102.Plates 202 may be closely fit to the walls ofprecursor container 102, thereby eliminating the need for a resilient seal or bushing therebetween. By preventing the transmission of particles,filter 196 protects highefficiency particle filters 122 a-d from clogging and increases their life. A high conductivity filter design similar to filter 196 is described below in greater detail with reference toFIGS. 13A, 13B , 13C, and 13D. Various other embodiments of high conductivity particle filters useful inprecursor container module 190 are described below with reference toFIGS. 9-16 . - A pair of
monitoring ports particle filter 120. Optional pressure sensors may be inserted inports particle filter 120 to determine conductance of the filter and to provide a signal or alarm whenparticle filter 120 is clogged and requires cleaning or replacement. Pressure sensors may be coupled to controller 250 (FIG. 4 ) for monitoring and control purposes. Alternatively, ports may be plugged if not used. - A precursor such as ZrCl4 is loaded into the
precursor container 102 under possibly inert conditions such as a nitrogen-filled glove box.Lid 210 is sealed with an o-ring 214 andvalves Precursor container module 190 is connected to downstream components ofprecursor delivery system 100 via bolts extending through mountingholes 216 and flowpath 104 is sealed by an o-ring fitted in anannular groove 218 at the connecting end ofprecursor container module 190. The pressure inprecursor container 102 is reduced by openingvacuum valve 158 to the bypass path 156 (vacuum path). The precursor material is also heated to operating temperature by aheater 222 positioned adjacentprecursor container module 190, which can lead to an increase in pressure withinprecursor container 102 due to the expulsion of crystalline or adsorbed water and reaction by products with the precursor material. Pressure buildup inprecursor container 102 may be periodically released by again openingvacuum valve 158. Once the precursor material has reached operating temperature, the precursor source is stabilized and ready for use. A thermocouple (not shown) may be used to monitor the temperature of the precursor material and a pressure transducer (not shown) may be used to monitor the pressure inprecursor container 102, for closed loop control ofheater 222 andvacuum valve 158, via an automatic controller 250 (FIG. 4 ). - The various components of the
precursor delivery system 100 are preferably formed in or supported on one or more thermallyconductive blocks 230 or other solid bodies, preferably made of a heat-resistant thermally conductive material, such as aluminum, stainless steel, titanium, or another suitable metal.Precursor delivery system 100 may be made modular through the use of more than oneblock 230 removably joined and sealed, thereby facilitating equipment modifications, repair, and replacement.Blocks 230 together form an elongate thermally conductive body extending from theprecursor container 102 to thereaction chamber 110. In an alternative embodiment,precursor delivery system 100 may be formed in a single block of solid thermally conductive material, to eliminate the possibility of leakage at seams between theblocks 230 ofFIG. 4 . Becauseblocks 230 are each formed of a solid block of thermally conductive material, they provide around and along flow path 104 a thermal pathway having low thermal resistance, which allows a positive temperature gradient to be maintained along the flow path 104 (the temperature preferably increases toward the reaction space) viaheater 222 and a second heater 234 (FIG. 5 ). A positive temperature gradient ensures that precursor vapor flowing throughflow path 104 will not encounter cold spots downstream fromprecursor container 102 and condense inflow path 104. In particular,heaters volume 114 is maintained at a higher temperature thanprecursor container 102, so that precursor material will not condense when released fromprecursor container 102 into stagingvolume 114. - Referring to the schematic of
FIG. 4 , the following is a preferred sequence of steps for sending pulses of precursor vapor to the reaction chamber 110: - 1)
Isolation valve 146 is opened to allow precursor vapor to flow into thestaging volume 114 for filling of stagingvolume 114. - 2) A
control circuit 250 monitors the pressure in stagingvolume 114 via apressure sensor 238. - 3) When the pressure reaches a preset or target level, the
control circuit 250 signals theisolation valve 146 to close. - 4) The
control circuit 250 then signals the inertgas boost valve 164 to open. - 5) A
control circuit 250 monitors the pressure in stagingvolume 114 via thepressure sensor 238. - 6) When the pressure reaches a preset operating level, the
control circuit 250 signals the inertgas boost valve 164 to close. - 7) The diffusion
barrier control valve 168 is opened to change the direction of the diffusion barrier flow as shown inFIG. 8 . - 8) The
precursor pulse valve 126 is opened, which allows a pulse of the precursor vapor to flow from stagingvolume 114 towardsreaction chamber 110. - 9) The precursor vapor travels through high conductivity particle filter (HCPF) 140 where it must make several high speed changes of direction. This action separates any remaining particles from the precursor vapor due to the higher inertia of the particles.
- 10) The precursor vapor enters the
reaction chamber 110 where a single monolayer chemisorbs on the surface of the substrate. - 11)
Pulse valve 126 is then closed and the concentration precursor material present inreaction chamber 110 decays through the action of inert purge gas supplied bydiffusion barrier 130 or otherwise (i.e., the reaction chamber is purged of the precursor material). Diffusionbarrier control valve 168 is closed to change the direction of the diffusion barrier flow as shown inFIG. 7 , to prevent any precursor material leaking throughpulse valve 126 from reachingreaction chamber 110. - 12) After a suitable purge time has elapsed, a pulse of second precursor material is released into
reaction chamber 110 via a second precursor delivery system (not shown) acting in a similar manner as described above. - 13) The pulsing sequence of the two (or more) precursors is repeated until the desired thickness of the film is reached.
- At the end of the process the integrity of the seals in
valves staging volume 114 to a predetermined pressure and usingpressure sensor 238 to check for a pressure change in stagingvolume 114 over time. If the pressure decreases then it is assumed thatpulse valve 126 is leaking; if the pressure increases it is assumed that eitherboost valve 164 orisolation valve 146 is leaking. Either situation suggests maintenance is needed. - The level of the precursor may be checked by filling
staging volume 114 to a predetermined pressure with inert gas (via boost valve 164), then opening isolation valve 145. The pressure measured bypressure sensor 238 will decrease as the inert gas expands into the precursor container in the open space above the supply of precursor material. The ideal gas equation PV=nRT can be used to calculate the volume additional volume filled by the expanding gas, which represents the open space above the supply of precursor material in the bottom ofprecursor container 102. The volume can then be compared to baseline information on the known volume of anempty precursor container 102, to determine the amount of precursor material remaining inprecursor container 102. - Turning again to
FIG. 4 , the precursor material is loaded intoprecursor container 102 at a pressure of about 1 bar. Many precursors cause a large pressure increase in the container upon first heating, which can lead to large amounts of particles in thereaction chamber 110 if the pressure increase is released via theflow path 104 toward thereaction chamber 110. To eliminate this source of particles,vacuum valve 158 and vacuum path (bypass path) 156 allows excess pressure and agitated particles to be directed topumps 152 away fromreaction chamber 110. To preventvacuum valve 158 from becoming plugged, aparticle filter 160 may be provided.Particle filter 160 inhibits particles from powdered precursors (and droplets, in the case of liquid precursors) from being carried into stagingvolume 114.Particle filter 160 may include a high efficiency particle filter having low flow conductivity, or a high conductivity particle filter 196 (FIG. 6 ), or a combination of both kinds of filters. Becausefilter 160 is not located betweenpulse valve 126 andreaction chamber 110, a high flow resistance offilter 160 will not increase the rise or decay time of precursor pulses. Iffilter 160 has a high resistance (low conductivity), it can also act as a flow dampener to reduce turbulence inprecursor container 102 during pump down of precursor container 102 (i.e., when reducing pressure inprecursor container 102 viavacuum path 156 and pumps 152). Reducing turbulence inprecursor container 102 further reduces the incidence of particle transmission intoflow path 104 andreaction chamber 110. - For improved process control it is advantageous to control the dose of precursor in each pulse. A control system 250 (“controller” in
FIG. 4 ) typically includes a computer and drive electronics (for solenoid valves) or a pneumatic control system (for pneumatically driven valves) for driving thevalves Control system 250 coordinates the operation of the valves to direct the precursor material to the reaction chamber, as described above, and, viadiffusion barrier 130, to prevent any leaked precursor from reaching thereaction chamber 110. To improve the repeatability of the dose of precursor material included in each pulse released bypulse valve 126,pressure sensor 238 may be used to provide closed-loop feedback to controlsystem 250. In one embodiment, a sensor may be coupled to the staging volume for sensing a physical condition of the staging volume or the precursor material present in it, such as temperature or pressure, for monitoring system performance and/or providing feedback to an automatic controller of the precursor delivery system for closed-loop control. - Another potential advantage of
pressure sensor 238 is the ability to do diagnostic tests on valves periodically or before each process run, to monitor valve leakage or failure. Over time all of the valves that come in contact with the precursor vapors will begin to leak, which can lead to non-uniform films and non-ALD growth. By setting the pressure of stagingvolume 114 to a certain level and determining the rate of change of the pressure it may be possible to determine if a valve is leaking significantly. It may also be possible to determine if the precursor supply has been exhausted, as described above. - It may also be possible to increase the pressure of staging
volume 114 before each pulse, by injecting N2 or another inert gas viaboost valve 164. Pressure increase provided by an inert gas boost enhances the injection of precursor material vapor into thereaction chamber 110, which is especially important for low vapor pressure precursors. Alternatively, an inert gas boost may be utilized to increase the pressure in stagingvolume 114 before the precursor vapor is released into it fromprecursor container 102, so that the pressure difference between theprecursor container 102 and thestaging volume 114 is reduced. A reduced pressure differential betweenprecursor container 102 and stagingvolume 114 during filling of stagingvolume 114 may help prevent turbulence upon opening ofisolation valve 146, which can otherwise cause particles to be stirred and transmitted into stagingvolume 114, especially when using high vapor pressure powder precursors. -
Pulse valve 126 allows precursor vapor to travel from stagingvolume 114 towardreaction chamber 110.Pulse valve 126 is the principal barrier preventing the precursor material from entering thereaction chamber 110 at undesired times. However, diaphragm valves of the type used forpulse valve 126 will eventually begin to leak after prolonged exposure to most precursor vapors. To prevent leaked precursor vapor from reaching thereaction chamber 110 and causing CVD growth, the so-called “diffusion barrier” concept is employed. In this manifestation of the “diffusion barrier” concept, any vapor leaked frompulse valve 126 will preferentially be carried towards the “P2 out”outlet channel 178 by a backflow of inert gas, as shown inFIG. 7 , in which pumps 182 draw the leaked vapor away from thesystem 100, bypassingreaction chamber 110. As shown inFIG. 8 , when a pulse of precursor vapor is released, the diffusionbarrier control valve 168 is opened to release a forward flow of inert gas (such as N2), to prevent the precursor vapor from being drawn intopump 182 and bypassing thereaction chamber 110. The gas flows during the pulse time are illustrated inFIG. 8 . The ability to switch between a backflow of inert gas inflow path 104, as shown inFIG. 7 , and a forward flow of inert gas, as shown inFIG. 8 , merely through opening and closing of asingle control valve 168, is achieved by adjusting flow restrictors R1, R2, and R3 to properly balance the pressures at each intersection indiffusion barrier 130. - During the purge cycle (
FIG. 7 ),pulse valve 126 is closed to stop the flow of precursor material from the stagingvolume 114, and any remaining precursor gases are purged by a flow of inert gas from inlet channel 174 (“IG in”) though the diffusion barrier 130 (as illustrated inFIG. 7 by black arrows). The inert gas also flows through the highconductivity particle filter 140 and thereaction chamber 110 to purge residual precursor material. The backflow of inert gas is pumped throughpumps 182 indiffusion barrier 130 upstream from theinlet channel 174. This backflow of inert gas carries out of the system throughpump 182 any precursor chemical that may leak through the pulse valve 126 (as indicated by the white arrows). - One potential benefit of the
diffusion barrier 130 is that the flow of inert gas may tend to push the flow of the precursor material during the purge stage, reducing the delay between the time when the precursor material is released from stagingvolume 114 and when it enters thereaction chamber 110. An even greater boost is provided by inertgas boost module volume 114. Whenboost valve 164 is opened, inert gas is pumped into thestaging volume 114 via inlet IG1. If stagingvolume 114 holds only a single dose of precursor material, boostvalve 164 may be opened whenpulse valve 126 is opened, to push precursor material from the stagingvolume 114 into thereaction chamber 110 more quickly. When thepulse valve 126 is closed, theboost valve 164 may also be closed to maintain the lowered working pressure of stagingvolume 114.Isolation valve 146 may then be opened to rechargestaging volume 114 with another dose of the precursor material. - Preferably, staging
volume 114 holds more than one dose of precursor material, in which case the use of an inert gas boost during pulsing may be unnecessary. Further, when thestaging volume 114 holds much more than a single pulse, a smaller pressure differential need be applied between stagingvolume 114 andreaction chamber 110 in order to release sufficient precursor vapor for thin film deposition processing. A smaller pressure differential further reduces turbulence and the transmission of particles from stagingvolume 114 throughflow path 104. For example, stagingvolume 114 should desirably hold enough precursor vapor so that upon release of a single pulse of precursor vapor (and without inert gas boost or other inflow into staging volume 114), the pressure inside stagingvolume 114 decreases less than 50% of its pre-pulse pressure. More preferably the pressure decreases no more than 30% of its pre-pulse pressure. - A high
conductivity particle filter 140 is preferably the last element in theflow path 104 beforereaction chamber 110. It is important that this filter is highly conductive, as any flow resistance will lead to a lengthening of the precursor decay. To separate particles from the precursor vapor without adding significant resistance in theflow path 104, the highconductivity particle filter 140 includes a labyrinth filter passage that requires the precursor vapor to make many fast changes of direction. The inertia of particles carried by the precursor vapor causes them to be trapped in dead ends of the labyrinth (i.e., “inertial traps”) while the precursor vapor can continue to flow through the highconductivity particle filter 140. As described below with reference toFIGS. 9-16 , the labyrinth and inertial traps may be formed of a variety of different structures and may have a variety of different shapes and orientations. - Referring to
FIG. 9 , a cross-sectional view of one embodiment of a highconductivity particle filter 410 is shown. Thefilter 410 provides a primarily two-dimensional flow that captures unwanted particles. In order to separate particles from a vapor stream, the higher inertia of particles is used to separate the particles. - The
filter 410 includes a filter passage (hereinafter “flow path”) 412 that may be formed in ablock 414. Theflow path 412 is configured as a continuous spiral in communication with aninput 416 and anoutput 418. The arrows indicate the direction of vapor flow through theflow path 412. Theoutput 418 may be oriented perpendicular to theflow path 412. In application, theflow path 412 provides one-way directional flow of a vapor stream from theinput 416 to theoutput 418. Configured as shown, theflow path 412 is a plane curve that moves around the fixed point of theoutput 418 while constantly approaching theoutput 418. - The
flow path 412 is in communication with a plurality of tangential particle reservoirs or traps 420. As vapor travels through theflow path 412 the particles have greater inertia than the vapor. As the vapor travels through the curve, the inertia of particles does not allow the particles to follow and the particles are captured in thetraps 420 while the vapor continues.Several traps 420 disposed along theflow path 412 provide a highlyefficient filter 410 that does not constrain flow. The exact number oftraps 420 may vary and depends, in part, on system design limitations. - The
filter 410 may be formed from ablock 414 of heat-resistant material, such as metal. The material may be aluminum, silicon, titanium, copper, stainless steel or other high thermal conductivity material. In manufacturing, theflow path 412 may be drilled or otherwise machined from theblock 414. A lid may then be placed on theblock 414 to seal theflow path 412. Thefilter 410 may be interchangeable in a modular system to facilitate equipment modifications, repair, and replacement. After forming thefilter 410, the filter 410 (including the walls of the flow path 412) may be coated with Al2O3 or other chemically resistant material to protect thefilter 410 from corrosive vapors and/or abrasive particles. - Referring to
FIG. 10 , another embodiment of a highconductivity particle filter 422 is shown that also relies on a primarily two-dimensional flow path 424. Thefilter 422 may be formed in a manner similar to the previous embodiment. The flow path 424 is in communication with aninput 426 and anoutput 428. The flow path 424 is configured as a spiral, but not a curved spiral as inFIG. 9 . As defined herein, the term spiral refers to a path that moves around and approaches a fixed point, such as an output. Thus, the spiral need not be continuously curving, but does move around and approaches a fixed point. - The movement around the fixed point may be achieved through angled turns 430. The angled turns 430 of
FIG. 10 are approximately 45 degrees relative to the flow path 424. Of course, turns having other angles may also be used. The flow path 424 includes twoangled turns 430 in order to negotiate a 90-degree turn in theblock 414. One of skill in the art will appreciate that the configuration of the spiral flow path 424 may vary and the embodiments shown herein are for exemplary purposes only. For example, theblock 414 may not have a rectangular cross section in which case, the flow path 424 may be adjusted accordingly. As such, the angles and the number of turns may be varied as required. - A
trap 432 is disposed before anangled turn 430 such that thetrap 432 continues along the direction of the flow path 424 before theangled turn 430. As the vapor stream approaches the turn, the inertia of the particles is greater than that of the vapor. As the vapor stream passes through anangled turn 430, particles continue along the former path of the flow path 424 and into atrap 432. Thefilter 422 includesseveral traps 432 to provide high filtering efficiency. Thetraps 432 do not limit the flow of a vapor stream, which allows for high conductivity. - The turns need not all have the same angle in order to accommodate the flow path. For example, in the embodiment shown in
FIG. 10 , two 90-degree angles are used for the first andlast turns 434 in the flow path 424. Based on design considerations, the angles of theturns turn corresponding trap 432. Nevertheless, in order to maximize efficiency it is desirable to include a greater number of traps. - Referring to
FIG. 11 , a cross-sectional view of another embodiment of a highconductivity particle filter 436 is shown. As in the foregoing embodiments, thefilter 436 may be formed from ablock 414 with aflow path 438 machined within. Theflow path 438 is similar to the embodiments ofFIGS. 9 and 10 in that it spirals around and approaches anoutput 440. Theflow path 438 is also in communication with aninput 442 for introducing a vapor stream into thefilter 436. - The
spiral flow path 438 is comprised entirely of 90-degree angled turns 444. In alternative implementations, the angle of theturns 444 may vary. Atrap 446 is disposed prior to anangled turn 444 such that thetrap 446 continues along the direction of theflow path 438 before theangled turn 444. As the vapor stream passes through anangled turn 444, particles continue along the former path of theflow path 438 and into atrap 446.Traps 446 may be placed prior to eachturn 444 to maximize the efficiency of thefilter 436. - The flow paths shown in
FIGS. 9-11 may be altered into various configurations and still provide a spiral that approaches a central point. A flow path may include a combination of features heretofore described. For example, a flow path may include 45-degree angled turns, 90-degree angle turns and turns of other angles. A flow path may also include a combination of curves and angled turns. In an alternative embodiment, the input and the output may be reversed such that the flow path originates at a center point and moves around the center point as it approaches the output. In such an embodiment, the traps are disposed in an alternative configuration to capture particles. Thus, high conductivity particle filters are not necessarily limited to the embodiments shown, which are for exemplary purposes only. - Referring to
FIG. 12 , a cross-sectional view of another embodiment of a highconductivity particle filter 450 is shown. Thefilter 450 may be formed from a block of heat resistant material as in previous embodiments. Thefilter 450 includes ahousing 451 that surrounds elements of thefilter 450, such as aflow path 452. Theflow path 452 is in communication with aninput 454 and anoutput 456 and includes a series of 180-degree turns 457 to separate particles from a vapor stream. - The
filter 450 includes a series of baffles aligned to define paths and traps. Thefilter 450 includes amajor baffle 460 that defines apath 462 for a vapor stream. Thehousing 451 provides an opposing side and also defines thepath 462. Aminor baffle 464, that is substantially in the same plane as a correspondingmajor baffle 460, defines atrap 458 to capture particles. Thehousing 451 also defines thetrap 458. Thetrap 458 continues in the same direction as thepath 462. The turns 457 require abrupt directional changes and particle inertia will cause particles to enter traps. As in previous filters, thetrap 458 is a dead end to capture and retain particles. As the names indicate, themajor baffle 460 has a greater length than theminor baffle 464. Accordingly, thepath 462 is longer than acorresponding trap 458. - An
aperture 466 separates the major and minor baffles and is nonaligned with a subsequent adjacent aperture. Theaperture 466 may also be nonaligned with theinput 454 andoutput 456. Theaperture 466 provides the only exit for a vapor stream from thepath 462 to a subsequent path. Theaperture 466 may be referred to as providing the only flow path exit from thepath 462. The flow path is defined as passing from theinput 454 to theoutput 456 in the direction indicated by the arrows. Thus, the vapor stream must pass through theaperture 466 and be subject to a 180-degreeangled turn 457. - As the vapor stream enters the
filter 450, the vapor stream enters thepath 462. Theinput 454 may be disposed perpendicular to themajor baffle 460. The vapor stream continues along thepath 462, toward thetrap 458, until encountering theaperture 466. Since the vapor has less inertia than the particles, the path of the vapor will tend to bend and travel through theaperture 466. The particles, due to their greater inertia, will tend to continue on their direction and enter thetrap 458. - A second
major baffle 470 is disposed parallel to the firstminor baffle 464, and together the firstminor baffle 464 and the secondmajor baffle 470 defines apocket 472 that serves as a secondary trap to capture particles ejected from theflow path 462 after the flow path has passed through theaperture 466. - A vapor stream passing through the
aperture 466 enters asecond path 468 that is defined by the secondmajor baffle 470 and the firstmajor baffle 460. The secondmajor baffle 470 is disposed to create a 180-degree turn 457 for the vapor stream. The secondmajor baffle 470 is separated from a secondminor baffle 474 by asecond aperture 476. The secondminor baffle 474 is substantially in the same plane as the secondmajor baffle 470 and defines asecond trap 478. Thesecond trap 478 continues in the same direction as thesecond path 468 to capture particles. The secondmajor baffle 470 is longer than the secondminor baffle 474 as thesecond path 468 is longer than thesecond trap 478. - The
second aperture 476 provides the only exit for a vapor stream passing from thefirst path 462 to thesecond path 468. Thesecond aperture 476 is nonaligned with theaperture 466 or a subsequent downstream aperture. - Additional major and minor baffles with separating apertures may be similarly disposed to create a series of 180-degree turns 457 and corresponding traps. Some particles, especially smaller particles, may be able to follow the vapor through one or more apertures without being captured in a trap. Further, while the traps are designed to retain particles, it remains possible for particles collected in a trap to be drawn back into the vapor stream. Accordingly, multiple stages of filtering are used to increase the overall effectiveness of the
filter 450. - To increase the chances that a particle will be captured, the velocity of the stream should be as high as possible at the
turn 457. The inertia differences that separate particles from the vapor are a function of the velocity of the flow and, in particular, the velocity of the particles. Accordingly, the path leading up to a trap should be as long as space allows, which will allow sufficient room in which to accelerate the particles to a substantial linear velocity before reaching the turn adjacent the trap. - The
output 456 may be disposed perpendicular to a finalmajor baffle 477 and is in communication with afinal path 479. The number of baffles and turns may vary based on design considerations, but allows for high conductivity while maintaining the efficiency of thefilter 450. - The surface of each
trap pocket 472 may be modified to help retain particles in the traps and pockets. For example, one or more of the trap and pocket surfaces may be roughened or have an adhesive coating applied, to cause particles to adhere to the surfaces. The entire flow path may include a rough surface or an adhesive coating as well. In this implementation, particles traveling through the flow path would be collected and retained by the flow path surface. - Referring to
FIG. 13A , a plan view of aplate 480 for use in another embodiment of a high conductivity particle filter is shown. Theplate 480 may be formed of a heat resistant material and in any number of shapes including a circle, oval, ellipse, rectangle and the like. Theplate 480 includes anaperture 482 that provides an exit for a vapor stream passing through a filter. Theaperture 482 may be aligned off-center so as to be nonaligned with a filter input and output. Theaperture 482 is not disposed on the perimeter or edge of theplate 480, rather theaperture 482 is disposed at an intermediate location on the surface area of theplate 480. As such, the surface area of theplate 480 surrounds theaperture 482, and the aperture does not contact a perimeter of theplate 480. Theplate 480 serves as a retaining wall to capture and retain particles. - Referring to
FIG. 13B , a plan view of asecond plate 484 is shown for use in series with theplate 480 ofFIG. 13A . Thesecond plate 484 may be formed of a similar shape and size as thefirst plate 480. Thesecond plate 484 also includes asecond aperture 486 that provides an exit for vapor stream passing through a filter. As with thefirst plate 480, theaperture 486 is disposed at an intermediate location on the surface area of theplate 480. Thesecond plate 484 may, in fact, be identical to thefirst plate 480. However, when disposed adjacent to thefirst plate 480, thesecond plate 484 may be rotated 180 degrees such that thesecond aperture 486 is nonaligned with thefirst aperture 482. - Referring to
FIG. 13C , a perspective view of a series ofplates plates plates plate plates apertures - Referring to
FIG. 13D , a cross-sectional view of a highconductivity particle filter 488 is shown which includesplates housing 490. Thehousing 490 couples to eachplate plates housing 490 may be cylindrical or other shape, and has sealed first and second ends 492, 494 to define an interior 496. Thehousing 490 and theplates sequential chambers 498 within theinterior 496. Thehousing 490 is secured to eachplate aperture chamber 498 to an adjacent chamber. - An
input 500 provides passage through thefirst end 492 and is in communication with afirst chamber 502. Similarly, anoutput 504 provides passage through thesecond end 494 and is in communication with afinal chamber 506. Theinput 500 andoutput 504 may be disposed perpendicular to the surface area of theplates input 500 andoutput 504 may be nonaligned with thesequential apertures - The
filter 488 may be characterized as providing a three-dimensional flow path, as vapor movement is not primarily confined to two dimensions. A vapor stream must pass through the provided aperture to exit each chamber and undergoes a series of turns.Sequential apertures apertures chambers 498 adjacent the apertures. A series ofplates chambers 498 provide a highly efficient filter without unnecessary flow resistance. The interior surfaces of thechambers 498 may be modified to encourage particle adhesion. For example, the interior surfaces of achamber 498 may be roughened or coated with an adhesive to retain particles. - In one embodiment (not shown), the
plates first chamber 502 would have a greater volume than thesecond chamber 508, the subsequent chamber would have a volume less than thesecond chamber 508, and so forth. Thefinal chamber 506 may be configured with the smallest volume of all the previous chambers. Progressively decreasing the chamber volumes gradually decreases the cross-section of the flow path through thefilter 488 and increases the velocity of a vapor stream. An increased vapor stream velocity increases the likelihood of smaller particles being retained in atrap 498.Apertures - Referring to
FIG. 14 , a cross-section of another embodiment of a highconductivity particle filter 510 is shown. Theparticle filter 510 includes ahousing 512 with sealed first and second ends 514, 516, which define an interior 518. Thefilter 510 includes aninput 520 and anoutput 521, which allows passage through the first and second ends 514, 516 respectively. - The
filter 510 includestubes 522 that are disposed parallel to one another. Eachtube 522 has sealed first and second ends 524, 526 and a first (input)aperture 528 and a second (output)aperture 530 disposed along the length of thetube 522. Theapertures tube 522 and define first andsecond traps tube 522. Thetraps apertures trap - Each
tube 522 includes apath 537 which may be generally defined as the length of thetube 522 from thefirst aperture 528 to thesecond aperture 530. Vapor exiting thepath 537 must turn through theoutput aperture 530 and particles, having a higher inertia than the vapor, continue in the same direction and enter atrap 534. - The
tubes 522 are in communication with one another to provide a sinuous flow path that includes a series ofpaths 537 and turns.Traps aperture tubes 522 used for a flow path may vary based on system design constraints and desired efficiency of thefilter 510. - The first and
second apertures tubes 522 in thefilter 510 as shown inFIG. 14 . Thus, whether an aperture may be characterized as an input or output is relative to the tube since an output for one tube is an input for an adjacent tube. - The last tube in the flow path is defined herein as the
output tube 538 and is in communication with or passes through theoutput 521. Theoutput tube 538 may have anopen end 540 to provide an exit for the vapor stream as shown inFIG. 14 . Alternatively, theoutput tube 538 may have one or more output apertures. - In the embodiment shown in
FIG. 14 , thefilter 510 provides splitpaths input 520 into the interior 518, the vapor stream is bifurcated into the twoflow paths parallel tubes 522 configured withpaths 537 andapertures flow paths output tube 538 before exiting thefilter 510. One of skill in the art will appreciate that thetubes 522 may be arranged in series to provide a single flow path, or two or more flow paths. - The
filter 510 may further include one or morepreliminary traps 542 adjacent theinput 520. Thepreliminary traps 542 may be formed by the extending the walls of thetubes 522 beyond their sealed first ends 524. Thepreliminary traps 542 may be disposed such that incoming vapor stream must turn and pass over thetraps 542 before entering into thetubes 522. As in previous embodiments, thepreliminary traps 542 and the previously discussed first andsecond traps tubes 522 and theoutput tube 538 may include a rough surface or an adhesive coating to capture and retain particles. - A method of increasing velocity is to decrease the cross section of
paths 537. Thus, thetubes 522 may be configured with progressively decreasing cross sectional areas in the direction of a flow path. Decreasing the cross sectional area of a flow path increases the velocity of a fluid as it travels along the flow path. -
FIG. 15 is a perspective cross-section view of an alternative embodiment of a highconductivity particle filter 546 similar to thefilter 510 ofFIG. 14 . With reference toFIG. 15 , thefilter 546 is formed ofconcentric tubes 548 having progressively smaller diameters as the flow path traverses from afirst tube 550 tosubsequent tubes tubes output tube 538.Apertures 530 may also be configured with incrementally decreasing diameters along a defined flow path. - The vapor stream proceeds from
tube 550 to 552 to 554 to 556 to 558 and, since the cross section is decreasing, the vapor stream velocity is increasing, thereby increasing the inertia of any particles in the vapor. The decreasing diameters and increasing particle inertia encourage separation of the increasingly smaller particles from the vapor stream as the flow proceeds to theoutlet 540. - Referring to
FIG. 16 another alternative embodiment of afilter 560 having high conductivity is shown. Thetraps 562 include anorifice 564 that is in communication with a pump or a bypass line (not shown). Anorifice 564 may be effectively implemented with traps of previously discussed embodiments. - An
orifice 564 may have a cross-section that is approximately 1 to 5 percent as large as the cross-sectional area of thevapor flow channel 566. Theorifices 564 communicating with a pump improve the ability of thefilter 560 to capture and retain particles from avapor stream 572. Theorifices 564 also provide a means for cleaning the traps in-situ, without disassembling thefilter 560, to thereby prevent the traps from becoming filled with particles that might otherwise be drawn back into thevapor stream 572. The resistance of theorifices 564 should be high enough so that the majority (e.g., preferably more than 90 percent) of thevapor stream 572 flowing through thefilter 560 does not go through anorifice 564, but rather continues to the exit of thefilter 560. - To direct the particles toward an
orifice 564, atrap 568 may have sidewalls that are tapered toward theorifice 564 in a funnel configuration. In this implementation, particles traveling through theorifice 564 are directed away from thetrap 568 down aseparate path 570. The particles are permanently removed from thevapor stream 572. Sometraps 568 may have tapering configurations whileother traps 562 do not. Furthermore, sometraps 562 may haveorifices 564 while others do not. - The high conductivity particle filters described herein provide a flow path with turns and traps to capture particles. The number of turns and traps ensure filter efficiency. The turns preferably involve abrupt high-speed changes of direction, which separates particles from vapor due to higher inertia. The filter's high conductivity offers little flow resistance, thereby speeding up precursor vapor pulse decay. Faster switching times for precursor vapor are possible due to the decreased resistance. Although the filter is described for use in a precursor vapor delivery system, the filter may also be used in a pumping line, a reaction chamber, and other applications.
- Depending upon the location of the filter, the preferred dimensions and operating conditions will vary. When the filter is in a precursor delivery system of an ALD system or other thin film deposition system, it may typically operate at a temperature in the range of 120° C. to 250° C. and at a pressure in the range of 1 to 10 Torr with flows less than 1 standard liter per minute (slm). If the filter is located near a reaction chamber, it may typically operate at a temperature in the range of 200° C. to 500° C. and at a pressure of 0.5 to 5 Torr at flows in the range of 1 to 10 slm. If the filter is located in the pumping line, it may operate near room temperature at pressures in the range of 0.1 to 10 Torr and at flows in the range of 1 to 10 slm.
- In embodiments of the
precursor delivery system 100, the interior surfaces of the flow path 104 (including valves and high conductivity particle filters) exposed to the vapor stream are preferably coated or passivated to prevent chemical reactions. Otherwise, the precursor vapor stream may react with the surface of the material of which the filter is made. Reactions affect the concentration of a vapor stream and destabilizeprecursor delivery system 100. The coating or passivation may include, for example, oxides such as Al2O3, ZrO2, HfO2, TiO2, Ta2O5, and Nb2O5; nitrides such as AlN, ZrN, HfN, TiN, TaN, and NbN; or carbides such as AlC, ZrC, HfC, TiC, TaC, and NbC; and mixtures thereof. - Precursor
material delivery systems 100 in accordance with the embodiments described herein are preferred for precursors that are solids at temperatures they are vaporized. Examples of such precursors include metal halides, metal β-diketonates, and organometal compounds. In particular, such systems are preferred for hafnium tetrachloride (HfCl4), zirconium tetrachloride (ZrCl4), aluminum trichloride (AlCl3), tantalum pentachloride (TaCl5), niobium pentachloride (NbCl5), molybdenum pentachloride (MoCl5), tungsten hexachloride (WCl6), platinum (II) acetylacetonate (Pt(acac)2), and tris(cyclopentadienyl)scandium (Sc(Cp)3), among others. As noted above, precursor material delivery systems in accordance with the disclosed embodiments may be adapted for use in various types of thin film deposition systems, including ALD systems, CVD systems, MOCVD systems, PVD systems and others, especially when it is desirable or necessary to deliver pulses of precursor vapor to the reaction chamber in such systems. Furthermore, precursor material delivery systems in accordance with various embodiments may accept precursors originating in any of a number of different forms, including solid, liquid, gas, fluid, slurry, powder, and mixtures thereof. - It will be obvious to those having skill in the art that many changes may be made to the details of the above-described embodiments without departing from the underlying principles of the invention. The scope of the present invention should, therefore, be determined only by the following claims.
Claims (45)
1. A precursor delivery system for delivering pulses of a precursor material to a reaction space in a thin film deposition system, comprising:
a precursor container for holding a supply of precursor material;
a flow path extending from the precursor container and adapted to be coupled, in use, to the reaction space; and
a staging volume interposed in the flow path downstream from the precursor container and upstream from the reaction space, in use, for receiving at least one dose of the precursor material from the precursor container, the staging volume being selectively isolatable from the precursor container, and the staging volume being selectively isolatable from the reaction space for releasing a series of pulses of the precursor material from the staging volume toward the reaction space;
a pulse control device interposed between the staging volume and the reaction space, in use, the pulse control device adapted to selectively release pulses of the precursor material from the staging volume toward the reaction space via the flow path; and
a sensor coupled to the staging volume for sensing a physical condition in the staging volume.
2. The system of claim 1 , further comprising a controller coupled to the sensor and responsive to the sensor for controlling the operation of the precursor delivery system.
3. The system of claim 1 , further comprising a controller coupled to the sensor for monitoring the precursor delivery system.
4. The system of claim 1 , further comprising a controller coupled the pulse control device for automatically controlling the operation of the pulse control device, the controller being responsive to an output of the sensor representative of the physical condition in the staging volume.
5. The system of claim 1 , in which the sensor includes a pressure transducer.
6. The system of claim 1 , in which the sensor includes a temperature sensor.
7. The system of claim 1 , in which the pulse control device includes a pulse valve.
8. The system of claim 7 , in which the pulse control device further includes a diffusion barrier operably connected to the flow path downstream from the pulse valve for preventing leakage from the pulse valve from reaching the reaction space.
9. The system of claim 1 , in which the pulse control device includes an inert gas valve operably coupled to the flow path.
10. The system of claim 1 , further comprising a particle filter interposed between the precursor container and the staging volume for filtering particles from the precursor material.
11. The system of claim 10 , in which the particle filter includes a high conductivity particle filter, the high conductivity particle filter including at least one inertial trap adjacent the flow path for filtering particles from the precursor material without significantly restricting flow of the pulses through the flow path.
12. The system of claim 1 , further comprising an isolation valve interposed in the flow path between the precursor container and the staging volume for selectively isolating the staging volume from the precursor container.
13. The system of claim 1 , further comprising a heater thermally associated with the precursor container for vaporizing at least a portion of the precursor material.
14. The system of claim 1 , further comprising a vacuum source coupled to the precursor container via a vacuum flow path for controlling a pressure within the precursor container.
15. The system of claim 14 , further comprising a vacuum shut-off valve operably interposed between the vacuum source and the precursor container for selectively interrupting the vacuum flow path.
16. The system of claim 15 , further comprising a vacuum filter interposed in the vacuum flow path between the precursor container and the vacuum shut-off valve.
17. The system of claim 14 , further comprising an isolation valve interposed between the precursor container and the staging volume for sealing the flow path downstream from the precursor container to facilitate adjustment of the pressure in the precursor container via the vacuum source.
18. The system of claim 1 , further comprising a high conductivity particle filter interposed in the flow path between the precursor container and the reaction space, the high conductivity particle filter including at least one inertial trap adjacent the flow path for filtering particles from the precursor material without significantly restricting flow of the pulses through the flow path.
19. The system of claim 18 , in which the high conductivity particle filter further includes:
an inlet coupled to an upstream portion of the flow path;
an outlet coupled to a downstream portion of the flow path;
a filter passage in communication with the inlet and the outlet, the filter passage including multiple turns between the inlet and the outlet; and
in which the inertial trap communicates with the filter passage and is positioned in proximity to one of the turns so that the inertia of the particles causes the particles to travel into the trap as the precursor material flows through the filter passage through said turn, thereby preventing the particles from passing into the reaction space.
20. The system of claim 19 , in which at least some of the turns of the filter passage form a spiral.
21. The system of claim 19 , in which at least some of the turns of the filter passage are defined by a series of baffles between the inlet and the outlet.
22. The system of claim 18 , in which the flow path and the filter passage are bordered by surfaces that are passivated.
23. The system of claim 22 , in which a passivation of the surfaces is selected from the group consisting of oxides, nitrides, carbides, and mixtures thereof.
24. The system of claim 1 , further comprising a supply of inert boost gas coupled to the staging volume.
25. The system of claim 1 , in which the staging volume is sufficiently large so that the release of a single pulse of the precursor material from the staging volume causes a pressure inside the staging volume to decrease no more than 50 percent.
26. The system of claim 1 , in which the flow path is formed in one or more solid blocks of thermally conductive material, said one or more blocks together forming an elongate thermally conductive body extending from the precursor container to the reaction space.
27. The system of claim 26 , in which internal surfaces of the thermally conductive body bordering the flow path are passivated.
28. The system of claim 27 , in which a passivation of the internal surfaces is selected from the group consisting of oxides, nitrides, carbides, and mixtures thereof.
29. The system of claim 26 , further comprising at least one heater in thermal association with the thermally conductive body for maintaining a temperature gradient in the flow path that increases toward the reaction space.
30. The system of claim 1 , in which the flow path is bordered by surfaces having a passivation selected from the group consisting of Al2O3, ZrO2, HfO2, TiO2, Ta2O5, Nb2O5, AlN, ZrN, HfN, TiN, TaN, NbN, AlC, ZrC, HfC, TiC, TaC, NbC, and mixtures thereof.
31. The system of claim 1 , in which the thin film deposition system comprises an atomic layer deposition system.
32. A method of delivering pulses of a precursor vapor to a reaction space in a thin film deposition system, comprising:
providing a supply of precursor material;
establishing a flow path from the supply of precursor material to the reaction space;
vaporizing at least a portion of the precursor material to form a precursor vapor;
accumulating at least one dose of the precursor vapor in a staging volume located downstream in the flow path from the supply of precursor material and upstream from the reaction space;
isolating the staging volume from the supply of precursor material;
sensing a physical condition in the staging volume; and
selectively releasing pulses of the precursor vapor from the staging volume through the flow path and toward the reaction space.
33. The method of claim 32 , further comprising controlling the release of the pulses based on the physical condition sensed.
34. The method of claim 32 , further comprising triggering an alarm in response to sensing a physical condition indicative of leakage in the precursor delivery system.
35. The method of claim 32 , in which the physical condition includes a fluid pressure within the staging volume.
36. The method of claim 32 , further comprising filtering parties from the precursor vapor as it passes through the flow path.
37. The method of claim 36 , in which the filtering of particles includes directing the precursor vapor through a filter passage having multiple turns, at least one of the turns being positioned in proximity to an inertial trap in communication with the filter passage so that inertia of particles carried into the filter passage by the precursor vapor causes the particles to travel into the trap as the precursor vapor flows through said turn.
38. The method of claim 32 , in which the vaporizing of the precursor material includes heating the supply of precursor material.
39. The method of claim 32 , further comprising storing the supply of precursor material in a precursor container and drawing a vacuum inside the precursor container.
40. The method of claim 39 , in which the drawing of the vacuum inside the precursor container is accomplished via a vacuum flow path that bypasses the reaction space.
41. The method of claim 40 , further comprising filtering particles from the vacuum flow path.
42. The method of claim 32 , further comprising accumulating multiple doses of the precursor vapor in the staging volume before commencing the release of the pulses.
43. The method of claim 32 , further comprising injecting an inert boost gas into the staging volume.
44. The method of claim 32 , further comprising establishing a positive temperature gradient in the flow path that increases toward the reaction space.
45. The method of claim 32 , in which the thin film deposition system comprises an atomic layer deposition system.
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US11/564,272 US20070117383A1 (en) | 2002-09-11 | 2006-11-28 | Precursor material delivery system with staging volume for atomic layer deposition |
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US11/564,272 US20070117383A1 (en) | 2002-09-11 | 2006-11-28 | Precursor material delivery system with staging volume for atomic layer deposition |
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US11/564,276 Abandoned US20070089674A1 (en) | 2002-09-11 | 2006-11-28 | Precursor material delivery system with thermal enhancements for atomic layer deposition |
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Also Published As
Publication number | Publication date |
---|---|
US20040045889A1 (en) | 2004-03-11 |
US20040124131A1 (en) | 2004-07-01 |
WO2004024981A2 (en) | 2004-03-25 |
WO2004024981A3 (en) | 2004-07-29 |
GB2407586A (en) | 2005-05-04 |
US6936086B2 (en) | 2005-08-30 |
AU2003267107A1 (en) | 2004-04-30 |
GB0503353D0 (en) | 2005-03-23 |
GB0503354D0 (en) | 2005-03-23 |
AU2003266027A1 (en) | 2004-04-30 |
GB2409180B (en) | 2006-01-25 |
GB2409180A (en) | 2005-06-22 |
WO2004024296A1 (en) | 2004-03-25 |
GB2407586B8 (en) | 2006-07-26 |
GB2407586A8 (en) | 2006-07-26 |
GB2407586B (en) | 2006-03-22 |
US20070089674A1 (en) | 2007-04-26 |
US7141095B2 (en) | 2006-11-28 |
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