US20090258578A1

US20090258578A1 - Polishing pad and method for making the same

Info

Publication number: US20090258578A1
Application number: US12/208,520
Authority: US
Inventors: Chung-Chih Feng; Chun-Ta Wang; Yung-Chang Hung; I-Peng Yao
Original assignee: San Fang Chemical Industry Co Ltd
Current assignee: San Fang Chemical Industry Co Ltd
Priority date: 2008-04-11
Filing date: 2008-09-11
Publication date: 2009-10-15
Also published as: TW200942361A

Abstract

The present invention relates to a polishing pad and method for making the same. In the invention, a liquid-state polymer material is directly formed on the surface of a base material, and then the liquid-state polymer material is solidified to form a flat grinding layer. Whereby, the polishing pad has high unity and flatness. The grinding layer has attenuated structures and a plurality of holes, thus increasing the storage ability of polishing particles distributed in a polishing liquid. In addition, the polishing pad has high compression ratio, so the polishing pad can compactly contact a polishing workpiece, and will not scratch the surface of the polishing workpiece scratched. Therefore, the polishing effect and quality will be improved.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention
The present invention relates to a polishing pad and method for making the same, in particular, to a polishing pad with a grinding layer directly formed on the surface of a base material and a method for making the same.
2. Description of the Related Art
Generally speaking, a polishing process is performed on a rough surface through chemical mechanical polishing (CMP). In the polishing process, a slurry containing polishing particles is uniformly distributed on the surface of a polishing pad. After a polishing workpiece is pressed on the polishing pad, a repetitious and regular rubbing and polishing action is performed thereon. The polishing workpiece may be a semiconductor, a storage medium base material, an integrated circuit, an LCD flat panel glass, optical glass, or a photoelectric panel.
In the prior art, a polishing pad is made by means of multi-layer adhesion. For example, a grinding layer is adhered to a base material through a self-adhesive (referring to a multi-layer polishing pad disclosed in R.O.C. Patent Publication No. M269996), or a grinding layer made by adhesion of a plurality of thin layers is adhered to a base material through a self-adhesive (referring to a multi-layer polishing pad used for CMP disclosed in R.O.C. Patent Publication No. 200513348).
After the above conventional polishing pads are immersed in a slurry, as the grinding layer, the base material, and the self-adhesive used for adhering are made of different materials and have different compression ratios, stress is easily generated. Further, after immersion in the slurry for a long time, the adhesiveness of the self-adhesive is gradually reduced, thus resulting in unevenness of the surface of the polishing pad. In addition, during the polishing process, when the polishing machine applies a pressure to polish a polishing workpiece, protrusions on the surface of the polishing pad may cause serious abrasion of the grinding layer as well as scratches on the surface of the polishing workpiece.
Moreover, the conventional polishing pads are limited by the thickness of the grinding layer. If no long holes are formed for storing the slurry and chippings generated after polishing, the holes may be filled with the chippings generated after polishing and easily become smaller. As a result, the polishing effect is reduced, and the service life of the polishing pad is shortened.
Consequently, there is an existing need for a polishing pad and a method for making the same to solve the above-mentioned problems.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to a polishing pad having a base material and a grinding layer. The base material is formed by covering a fiber layer with a polymer and has a surface. The grinding layer is bonded to the surface and has a plurality of holes.
The present invention is further directed to a method for making a polishing pad. The method includes: (a) providing a base material formed by covering a fiber layer with a polymer and having a surface; (b) forming a liquid-state polymer material on the surface; and (c) solidifying the liquid-state polymer material to form a grinding layer. The grinding layer is bonded to the surface and has a plurality of holes.
In the present invention, the liquid-state polymer material is directly formed on the surface of the base material, and is then solidified to form the flat grinding layer, which makes the polishing pad very even and flat. The grinding layer has attenuated structures and holes, which increases the ability to store the polishing particles distributed in a polishing liquid. In addition, the polishing pad has high compression ratio, so the polishing pad can compactly contact a polishing workpiece, and will not scratch the surface of the polishing workpiece. Therefore, the polishing effect and quality will be improved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view of a polishing pad of the present invention;

FIG. 2 is a schematic view of another aspect of a polishing pad according to the present invention; and

FIG. 3 is a flow chart of a method for making a polishing pad according to the present invention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention provides a polishing pad used in a chemical mechanical polishing (CMP) process for polishing or planarizing a polishing workpiece. The polishing workpiece includes, but is not limited to, a semiconductor, a storage medium base material, an integrated circuit, an LCD flat panel glass, optical glass, and a photoelectric panel.
FIG. 1 is a schematic view of a polishing pad of the present invention. The polishing pad 1 includes a base material 11 and a grinding layer 12. In this embodiment, the base material 11 is formed by covering a fiber layer 112 with a polymer 111, and has a surface 113. Preferably, the surface 113 is flattened. The fiber layer 112 is made of a cloth material (for example, a non-woven cloth). In this embodiment, the polymer 111 is continuous foam. In addition, the polymer 111 is selected from PU, PP, PET, or polymer resin. The material of the fiber layer 112 is selected from at least one of PP, PET, or nylon.
The grinding layer 12 is bonded to the surface 113 of the base material 11, and has a plurality of holes 121. Preferably, the distribution thickness of the holes 121 is at least half of the total thickness of the grinding layer 12.
In this embodiment, the polishing pad 1 has a compression ratio of 5% to 50%, a recovery ratio greater than 80%, a thickness of 0.5 to 3.0 mm, and a density of 0.2 to 0.6 g/cm³.
Further, in other applications, some of the fibers 114 in the fiber layer 112 are exposed on the surface 113 of the base material 11, and are further covered by the grinding layer 12 (as shown in FIG. 2). Therefore, the grinding layer 12 is not only attached to the surface 113 of the base material is 111, but also covers the fibers 114 of the fiber layer 112. Thus, the grinding layer 12 is bonded to the base material 11 more stably.
FIG. 3 is a flow chart of a method for making a polishing pad according to the present invention. As shown in FIGS. 2 and 3, first, in Step S21, a base material 11 is provided. The base material 11 is formed by covering a fiber layer 112 with a polymer 111, and has a surface 113. In this embodiment, the base material 11 is formed through the following steps. First, a fiber substrate is provided. Then, the fiber substrate is immersed in a polymer solution, so that the polymer solution covers the fiber substrate. Finally, the polymer solution is solidified to form the base material 11.
Next, in Step S22, a liquid-state polymer material is formed on the surface of the base material 11. In this embodiment, the liquid-state polymer material is formed on the surface 113 of the base material 11 by coating, but not limited to coating. Obviously, the liquid-state polymer material can be formed on the surface 113 of the base material 11 in other manners. In addition, the liquid-state polymer material is selected from at least one of PU, PP, PET, or polymer resin.
Afterwards, in Step S23, the liquid-state polymer material is solidified to form a grinding layer 12, so as to complete the polishing pad 1 of the present invention. The grinding layer 12 is bonded to the surface 113 of the base material 11 and has a plurality of holes 121. In this solidification step, the liquid-state polymer material can be solidified by natural drying or air drying.
It should be noted that, after the liquid-state polymer material is formed on the surface of the base material 11 and then solidified to form a flat surface, the flat surface further contacts a liquid-state polymer material is in a coagulating basin, so as to form the grinding layer 12 through single surface exchange. Thus, the grinding layer 12 grows into the attenuated structure.
In the present invention, the liquid-state polymer material is directly formed on the surface 113 of the base material 11, and is then solidified to form the flat grinding layer 12, which makes the polishing pad very even and flat. The grinding layer 12 has attenuated structures and the holes 121, which increases the ability to store the polishing particles distributed in a polishing liquid. In addition, the polishing pad 1 has high compression ratio, so the polishing pad 1 can compactly contact a polishing workpiece, and will not scratch the surface of the polishing workpiece. Therefore, the polishing effect and quality will be improved.
While the embodiments of the present invention have been illustrated and described, various modifications and improvements can be made by those skilled in the art. The embodiments of the present invention are therefore described in an illustrative but not restrictive sense. It is intended that the present invention may not be limited to the particular forms as illustrated, and that all modifications that maintain the spirit and scope of the present invention are within the scope as defined in the appended claims.

Claims

1. A polishing pad, comprising:

a base material, formed by covering a fiber layer with a polymer, and having a surface; and

a grinding layer, bonded to the surface, and having a plurality of holes.

2. The polishing pad according to claim 1, wherein the fiber layer is made of a cloth material.

3. The polishing pad according to claim 2, wherein the cloth material is a non-woven cloth.

4. The polishing pad according to claim 1, wherein the material of the fiber layer is selected from PP, PET, or nylon.

5. The polishing pad according to claim 1, wherein the polymer is continuous foam.

6. The polishing pad according to claim 5, wherein the polymer is 15 selected from PU, PP, PET, or polymer resin.

7. The polishing pad according to claim 1, wherein the surface is flattened, and the grinding layer is made of one material selected from PU, PP, PET, or polymer resin.

8. The polishing pad according to claim 1, wherein the distribution thickness of the holes is at least half of a total thickness of the grinding layer.

9. The polishing pad according to claim 1, wherein some fibers in the fiber layer are exposed on the surface, and are further covered by the grinding layer.

10. The polishing pad according to claim 1, wherein the compression ratio of the polishing pad is 5% to 50%.

11. The polishing pad according to claim 1, wherein the recovery ratio of the polishing pad is greater than 80%.

12. The polishing pad according to claim 1, wherein a thickness of the polishing pad is 0.5 to 3.0 mm.

13. The polishing pad according to claim 1, wherein the density of the polishing pad is 0.2 to 0.6 g/cm³.

14. A method for making a polishing pad, comprising:

(a) providing a base material, wherein the base material is formed by covering a fiber layer with a polymer and has a surface;

(b) forming a liquid-state polymer material on the surface; and

(c) solidifying the liquid-state polymer material to form a grinding layer, wherein the grinding layer is bonded to the surface and has a plurality of holes.

15. The making method according to claim 14, wherein Step (a) further comprises:

(a1) providing a fiber substrate;

(a2) immersing the fiber substrate in a polymer solution, so that the polymer solution covers the fiber substrate; and

(a3) solidifying the polymer solution to form the base material.

16. The making method according to claim 14, wherein in Step (b), the liquid-state polymer material is formed on the surface by coating.

17. The making method according to claim 16, wherein after Step (b), the liquid-state polymer material is solidified to form a flat surface, and the flat surface contacts a liquid-state polymer material in a coagulating tank, so as to form the grinding layer through single surface exchange.

18. The making method according to claim 14, wherein in Step (c), the liquid-state polymer material is solidified by natural drying.

19. The making method according to claim 14, wherein in Step (c), the liquid-state polymer material is solidified by air drying.