US20100260934A9 - Perfluoroparacyclophane and related methods therefor - Google Patents

Perfluoroparacyclophane and related methods therefor Download PDF

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US20100260934A9
US20100260934A9 US12/510,038 US51003809A US2010260934A9 US 20100260934 A9 US20100260934 A9 US 20100260934A9 US 51003809 A US51003809 A US 51003809A US 2010260934 A9 US2010260934 A9 US 2010260934A9
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paracyclophane
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William R. Dolbier, Jr.
Puhui Xie
Rakesh Kumar
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Specialty Coating Systems Inc
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    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00Preparation of halogenated hydrocarbons
    • C07C17/38Separation; Purification; Stabilisation; Use of additives
    • C07C17/392Separation; Purification; Stabilisation; Use of additives by crystallisation; Purification or separation of the crystals
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00Preparation of halogenated hydrocarbons
    • C07C17/26Preparation of halogenated hydrocarbons by reactions involving an increase in the number of carbon atoms in the skeleton
    • C07C17/263Preparation of halogenated hydrocarbons by reactions involving an increase in the number of carbon atoms in the skeleton by condensation reactions
    • C07C17/269Preparation of halogenated hydrocarbons by reactions involving an increase in the number of carbon atoms in the skeleton by condensation reactions of only halogenated hydrocarbons
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C25/00Compounds containing at least one halogen atom bound to a six-membered aromatic ring
    • C07C25/18Polycyclic aromatic halogenated hydrocarbons
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F114/00Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F114/18Monomers containing fluorine
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F14/00Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F14/18Monomers containing fluorine

Definitions

  • This invention relates to paracyclophane compounds, preparation of paracyclophane compounds, and articles comprising polymerized paracyclophane compounds, and more particularly to perfluormated paracyclophane, synthesis of perfluorinated paracyclophane, as well as articles comprising polymerized perfluorinated paracyclophane.
  • polymeric fluorinated parylene, poly-para-xylylene, materials have also been disclosed.
  • Taylor et al. in U.S. Pat. No. 5,888,905, a two-step formation of fluorinated parylene by deposition of a parylene film followed by direct fluorination of the film.
  • one or more embodiments thereof involve a composition comprising perfluoro-[2,2]-paracyclophane.
  • one or more embodiments thereof are directed to a method of preparing a paracyclophane comprising exposing a reaction mixture of a difluoromethyl benzene and at least one metal to conditions that promote formation of a reaction product comprising a perfluoroparacyclophane.
  • n is at least 2 and R is a halogen.
  • the invention relates to paracyclophane compounds. Some aspects of the invention relate to the preparation of polymeric materials formed from one or more paracyclophane compounds. Still further aspects of the invention relate to articles having parylene polymer on a surface thereof formed from one or more paracyclophane compounds as well as techniques of preparation thereof.
  • some compounds and/or polymeric materials relevant to some aspects of the invention pertain to halogenated paracyclophane compounds.
  • the novel compounds, techniques, and materials, including but not limited to polymeric materials, and/or systems of the invention can have one or more halogen-containing moieties.
  • the halogenated paracyclophane compounds of the invention can be perfluorinated paracyclophane compounds. Aspects of the invention can involve systems and techniques pertinent to synthesizing perfluorinated paracyclophane compounds.
  • the halogenated paracyclophane compounds of the invention can be fluorinated compounds represented by the formula (I).
  • R is a halogen.
  • at least one of the moieties that are pendant on the aromatic ring may be fluorine.
  • some of the fluorinated paracyclophane compounds of the invention are fluorine saturated.
  • the perfluorinated paracyclophane of some aspects of the invention include perfluoro-[2,2]-paracyclophane.
  • the one or more halogenated precursor compounds can be any suitable compound that includes an aromatic ring having at least one pendant halogen-containing or halogenated moiety.
  • the one or more precursor compounds can comprise at least one pendant chlorodihalo-containing moiety such as but not limited to a chlorodifluoroalkyl moiety.
  • the chlorinated precursor compounds of the invention can be an at least partially fluorinated benzene ring having one or more chlorohaloalkyl moieties pendant thereon.
  • Non-limiting examples of the fluorinated or chlorinated precursor compounds of the invention include, but are not limited to, chlorodihaloalkyl fluorinated benzenes, which includes 1,4-bis(chlorodifluoromethyl)-2,3,5,6-tetrafluorobenzene, also referred to as PFPX-dichloride and represented by the formula (II):
  • aromatic chlorohaloalkyl compounds may be utilized to prepare the various paracyclophanes of the invention.
  • the systems and techniques involved in facilitating the synthesis of paracyclophane compounds from halogenated precursor compounds can comprise components, subsystems, or acts that link the ring or aromatic component of the precursor compounds.
  • One or more reduction, rearrangement, substitution, and/or condensation reactions may also be utilized in the schemes of the invention.
  • other reaction schemes may include, for example, pericyclic and redox reactions.
  • One or more of the fluorinated paracyclophane compounds of the invention may be a reaction product of one or more chlorodihaloalkyl compounds.
  • the synthesis of a fluorinated compound of the invention can involve a reduction, rearrangement, substitution, or condensation reaction of the compound (II).
  • Any of the reactions of the invention may be catalyzed by one or more compounds which can include one or more salts, metals, organometallic compounds or other complexes such as ligates and chelates, acids, bases, or electron donors or acceptors.
  • one or more of the reactions of the invention may utilize one or more reducing agents that facilitate reduction of, for example, one or more chlorohalomethylated compound to produce a perfluorinated dimer.
  • any of the reactions of the invention may be facilitated in the presence of one or more solvents or carriers.
  • the solvent, or mixture is typically an organic solvent, comprising inert compounds that typically do not react with the reactant and the product.
  • the one or more solvents utilized in some aspects of the invention can be aprotic, polar, non-polar, or a hybrid thereof.
  • Non-limiting examples of non-polar solvents that may facilitate one or more reactions of the invention include hexane, benzene, toluene, and chloroform.
  • Non-limiting examples of polar aprotic solvents that may facilitate one or more reactions of the invention include dioxane, tetrahydrofuran, acetone, acetonitrile, dimethyl sulfoxide, and dimethylformamide.
  • Synthesis of the fluorinated paracyclophanes of the invention can comprise contacting or exposing chlorohalomethyl compounds to conditions that promote formation of a reaction product represented by, for instance, compound (I).
  • perfluoro-[2,2]-paracyclophane can be prepared through a dimerization reaction of 1,4-bis(chlorodifluoromethyl)-2,3,5,6-tetrafluorobenzene according to the following reaction scheme.
  • the reaction is typically facilitated by one or more reducing agents at an elevated temperature, typically in a range of about 110° C. to about 130° C., and preferably in a range of about 115° C. to about 120° C.
  • the reaction can also be further facilitated by utilizing a solvent.
  • Zinc may be used as a suitable reducing agent and acetonitrile may be used as a solvent to effect formation of the perfluorinated paracyclophane.
  • the reaction is thus typically represented according to scheme (1) below.
  • Chlorodihaloalkyl fluorinated compounds of the invention may be prepared by halogenating fluoroxylene compounds.
  • a tetrafluoroxylene may be halogenated to yield chlorohaloalkyl compounds according to scheme (2) below.
  • Scheme (2) can be performed under conditions that thermodynamically promote the formation of the dichloride compound (II).
  • reaction scheme (2) can be facilitated by actinic radiation.
  • Preferred non-limiting embodiments can also utilize one or more solvents such as, but not limited to, carbon tetrachloride, as a medium for one or more reactants.
  • Tetrafluoroxylene compounds utilized in the above reaction scheme may be synthesized from any suitable precursor compounds.
  • tetrachlorinated cyano compounds may be fluorinated in a substitution reaction to provide a cyano-tetrafluorobenzene intermediate product.
  • the tetrafluorobenzene intermediate compound may then be reduced to provide tetrafluoroaldehyde which can then be further fluorinated by nucleophilic fluorination or fluorodeoxygenation.
  • the compounds of the invention may thus be obtained through the synthetic methodology illustrated in scheme (3) below. Other synthetic schemes may be utilized to prepare the various compounds above.
  • gaseous dicyanobenzene compounds may be converted by activated carbon catalysts at a temperature range of about 280° C. to about 320° C.
  • halogen-metal exchange schemes may be appropriate to produce the aldehyde compounds.
  • Deposition techniques conventionally utilized with respect to, for example, non-halogenated paracyclophanes, can be utilized to apply one or more layers of the perfluorinated dimer compounds represented by formula (I). Polymerization of the dimer compounds may then provide a perfluorinated polymer.
  • vapor deposition techniques may be utilized to deposit and polymerize a paracyclophane comprising a perfluorinated dimer such as perfluoro-[2,2]-paracyclophane to produce at least one perfluorinated paraxylylene layer on at least a portion of a surface.
  • Other deposition and polymerization techniques may be utilized with the perfluoro-[2,2]-paracyclophane compounds.
  • solvent carrier-based procedures may be utilized to apply a polymerizable layer comprising the perfluorinated dimer compound on the surface. Thereafter, polymerization of the deposited compound comprising perfluorinated paracyclophane may be initiated to produce a perfluorinated paraxylylene layer on the surface. Deposition and polymerization may be performed substantially simultaneously or in substantially the same step. For example, vapor polymerization to produce the perfluorinated paraxylylene may be performed with vaporized perfluoroparacyclophane dimer compound (I).
  • the paraxylylene polymeric material can be applied on any desired surface or portion of a surface.
  • the precursor perfluorinated paracyclophane compounds of the invention may be utilized to render any desired surface inert.
  • the paraxylylene polymeric material may be applied on at least a portion of an electronic component such as a semiconductor.
  • Other surfaces include those exposed to or subject chemical and/or biological environments that would damage or otherwise alter the surface properties.
  • Non-limiting examples include components or articles having at least a portion thereof exposed to elevated temperatures, solvents, and/or other corrosive environments.
  • the applied perfluorinated layer may have any desired thickness that provides a desired characteristic. Indeed, the layer may be applied uniformly or at various thickness, alone or with other coatings. The layer can be applied to form a pattern on the surface.
  • the mixture was stirred at a temperature of about 110° C. for about ten hours. Nitrogen gas was used to blanket the mixture.
  • the reaction mixture was poured into a beaker containing about 500 mL ice-water.
  • the cooled mixture was then to collect the precipitate, which was washed by water and recrystallized with acetone.
  • the recrystallized product 1,4-dicyano-2,3,5,6-tetrafluorobenzene, was dried and measured to weigh about 5.4 g (about 90%).
  • the aqueous layer was then extracted several times with CH 2 Cl 2 .
  • the organic layer was combined and dried by evaporation.
  • the mixture was cooled to about 0° C. under a N 2 atmosphere.
  • DAST diethyl aminosulfur trifluoride
  • the mixture was brought to room temperature for about six hours and then poured into about 100 mL of ice-water.
  • the organic layer was washed with an about 5% sodium hydroxide solution.
  • the melting point of the product was about 70° C.
  • Chlorine gas was bubbled through the mixture for about 56 hours at 60° C.
  • a tungsten sunlamp was used to irradiate the mixture.
  • the carbon tetrachloride carrier was carefully removed by rotary evaporation.
  • the mixture was refluxed at about 115° C.) for about fourteen hours under nitrogen.
  • the mixture was refluxed for another four hours to reach about 100% conversion.
  • reaction mixture was hot filtered and washed several times with acetonitrile and acetone.
  • the combined filtrate was dried by rotary evaporation.
  • the crude mixture was flash chromatographed with hexane through silica gel as the stationary phase to yield about 0.4 g of crude product.
  • the crude product was recrystallized with dichloromethane twice, and also with acetone to yield about 0.3 g (about 25%) of product with a purity of about 95%.
  • the crude product was analyzed and determined to have a melting point in a range of about 195 to 196° C.; a 19 F NMR resonance in CDCl 3 of ⁇ ⁇ 102.81 (s, 4F), ⁇ 132.40 (s, 4F).
  • the crude product was further analyzed by mass spectrometry to be 496 of C 16 F 16 , and 248 of C 8 F 8 .
  • solvents that may be utilized instead of, or in combination with the solvents listed above include, but are not limited to, acetonitrile, anisole, 2-butanone, 1,4-dioxane, benzonitrile, succinonitrile, and acetic anhydride.
  • Alternative reducing agents may be used including, for example, trimethylsilyltributyltin (TMSTBT, Me 3 SiSnBu 3 ).
  • Table 1 shows the results utilizing various reducing agents and solvents in scheme (8).
  • the monomer peak was observed at ⁇ 101.536 ppm. 4F peak was noted at ⁇ 146.377 ppm.
  • NMP N-methylpyrrolidone
  • the monomer was observed to be stable at room temperature in the NMR tube even after one week.
  • the monomer was preserved or trapped by slow addition of bromine to form ⁇ , ⁇ ′-dibromo- ⁇ , ⁇ , ⁇ ′, ⁇ ′-tetrafluoro-2,3,5,6-tetrafluorooxylene, ⁇ 43.773 ppm, m, 4F; ⁇ 137.852 ppm, m, 4F and M/Z:M-Br, 327, M-2Br, 248.

Abstract

A composition comprising perfluoro-[2,2]-paracyclophane dimer compound is disclosed. The synthesis reaction of the paracyclophane dimer from 1,4-bis(chlorodifluoromethane)-2,3,5,6-tetrafluorobenzene involves heating in the presence of a metal catalyst and a solvent. A perfluorinated paraxylylene coating formed from the perfluorinated paracyclophane dimer is also disclosed.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • This invention relates to paracyclophane compounds, preparation of paracyclophane compounds, and articles comprising polymerized paracyclophane compounds, and more particularly to perfluormated paracyclophane, synthesis of perfluorinated paracyclophane, as well as articles comprising polymerized perfluorinated paracyclophane.
  • 2. Description of Related Art
  • Synthesis techniques for preparing fluorinated paracyclophane dimers have been disclosed. For example, Dolbier, Jr. et al., in U.S. Pat. No. 5,841,005, described low dilution techniques for preparing octafluoro-[2,2]-paracyclophane.
  • Further, polymeric fluorinated parylene, poly-para-xylylene, materials have also been disclosed. For example, Taylor et al., in U.S. Pat. No. 5,888,905, a two-step formation of fluorinated parylene by deposition of a parylene film followed by direct fluorination of the film.
  • BRIEF SUMMARY OF THE INVENTION
  • In accordance with one or more aspects of the invention, one or more embodiments thereof involve a composition comprising perfluoro-[2,2]-paracyclophane.
  • In accordance with still further aspects of the invention, one or more embodiments thereof are directed to a method of preparing a paracyclophane comprising exposing a reaction mixture of a difluoromethyl benzene and at least one metal to conditions that promote formation of a reaction product comprising a perfluoroparacyclophane.
  • Further embodiments pertinent to other aspects of the invention are directed to a polymer having a formula:
  • Figure US20100260934A9-20101014-C00001
  • wherein n is at least 2 and R is a halogen.
  • DETAILED DESCRIPTION
  • The invention relates to paracyclophane compounds. Some aspects of the invention relate to the preparation of polymeric materials formed from one or more paracyclophane compounds. Still further aspects of the invention relate to articles having parylene polymer on a surface thereof formed from one or more paracyclophane compounds as well as techniques of preparation thereof.
  • In accordance with one or more embodiments, some compounds and/or polymeric materials relevant to some aspects of the invention pertain to halogenated paracyclophane compounds. For example, the novel compounds, techniques, and materials, including but not limited to polymeric materials, and/or systems of the invention can have one or more halogen-containing moieties. In accordance with some aspects of the invention, the halogenated paracyclophane compounds of the invention can be perfluorinated paracyclophane compounds. Aspects of the invention can involve systems and techniques pertinent to synthesizing perfluorinated paracyclophane compounds.
  • In accordance with still further embodiments of the invention, the halogenated paracyclophane compounds of the invention can be fluorinated compounds represented by the formula (I).
  • Figure US20100260934A9-20101014-C00002
  • wherein R is a halogen. In some cases, at least one of the moieties that are pendant on the aromatic ring may be fluorine. Indeed, in some cases, some of the fluorinated paracyclophane compounds of the invention are fluorine saturated. In embodiments where the halogen is fluorine, the perfluorinated paracyclophane of some aspects of the invention include perfluoro-[2,2]-paracyclophane.
  • Some of the aspects pertinent to synthesizing the paracyclophane compounds of the invention can involve providing one or more halogenated precursor compounds. The one or more halogenated precursor compounds can be any suitable compound that includes an aromatic ring having at least one pendant halogen-containing or halogenated moiety. In some cases, the one or more precursor compounds can comprise at least one pendant chlorodihalo-containing moiety such as but not limited to a chlorodifluoroalkyl moiety. Further, the chlorinated precursor compounds of the invention can be an at least partially fluorinated benzene ring having one or more chlorohaloalkyl moieties pendant thereon. Non-limiting examples of the fluorinated or chlorinated precursor compounds of the invention include, but are not limited to, chlorodihaloalkyl fluorinated benzenes, which includes 1,4-bis(chlorodifluoromethyl)-2,3,5,6-tetrafluorobenzene, also referred to as PFPX-dichloride and represented by the formula (II):
  • Figure US20100260934A9-20101014-C00003
  • However, the invention is not limited to systems and techniques involving PFPX-dichloride. Other suitable aromatic chlorohaloalkyl compounds may be utilized to prepare the various paracyclophanes of the invention. For example, aromatic compounds having other alkyl-based pendant moieties that provide bridges linking the aromatic rings and facilitate the formation of the fluorinated compounds (I).
  • The systems and techniques involved in facilitating the synthesis of paracyclophane compounds from halogenated precursor compounds can comprise components, subsystems, or acts that link the ring or aromatic component of the precursor compounds. One or more reduction, rearrangement, substitution, and/or condensation reactions may also be utilized in the schemes of the invention. For example, other reaction schemes may include, for example, pericyclic and redox reactions.
  • One or more of the fluorinated paracyclophane compounds of the invention may be a reaction product of one or more chlorodihaloalkyl compounds. For example, the synthesis of a fluorinated compound of the invention can involve a reduction, rearrangement, substitution, or condensation reaction of the compound (II).
  • Any of the reactions of the invention may be catalyzed by one or more compounds which can include one or more salts, metals, organometallic compounds or other complexes such as ligates and chelates, acids, bases, or electron donors or acceptors.
  • In some cases, one or more of the reactions of the invention may utilize one or more reducing agents that facilitate reduction of, for example, one or more chlorohalomethylated compound to produce a perfluorinated dimer.
  • Further, any of the reactions of the invention may be facilitated in the presence of one or more solvents or carriers. The solvent, or mixture, is typically an organic solvent, comprising inert compounds that typically do not react with the reactant and the product. The one or more solvents utilized in some aspects of the invention can be aprotic, polar, non-polar, or a hybrid thereof. Non-limiting examples of non-polar solvents that may facilitate one or more reactions of the invention include hexane, benzene, toluene, and chloroform. Non-limiting examples of polar aprotic solvents that may facilitate one or more reactions of the invention include dioxane, tetrahydrofuran, acetone, acetonitrile, dimethyl sulfoxide, and dimethylformamide.
  • Synthesis of the fluorinated paracyclophanes of the invention can comprise contacting or exposing chlorohalomethyl compounds to conditions that promote formation of a reaction product represented by, for instance, compound (I).
  • For example, perfluoro-[2,2]-paracyclophane can be prepared through a dimerization reaction of 1,4-bis(chlorodifluoromethyl)-2,3,5,6-tetrafluorobenzene according to the following reaction scheme. The reaction is typically facilitated by one or more reducing agents at an elevated temperature, typically in a range of about 110° C. to about 130° C., and preferably in a range of about 115° C. to about 120° C. The reaction can also be further facilitated by utilizing a solvent. Zinc may be used as a suitable reducing agent and acetonitrile may be used as a solvent to effect formation of the perfluorinated paracyclophane. The reaction is thus typically represented according to scheme (1) below.
  • Figure US20100260934A9-20101014-C00004
  • Chlorodihaloalkyl fluorinated compounds of the invention may be prepared by halogenating fluoroxylene compounds. For example, a tetrafluoroxylene may be halogenated to yield chlorohaloalkyl compounds according to scheme (2) below.
  • Figure US20100260934A9-20101014-C00005
  • Scheme (2) can be performed under conditions that thermodynamically promote the formation of the dichloride compound (II). For example, reaction scheme (2) can be facilitated by actinic radiation. Preferred non-limiting embodiments can also utilize one or more solvents such as, but not limited to, carbon tetrachloride, as a medium for one or more reactants.
  • Tetrafluoroxylene compounds utilized in the above reaction scheme may be synthesized from any suitable precursor compounds. For example, tetrachlorinated cyano compounds may be fluorinated in a substitution reaction to provide a cyano-tetrafluorobenzene intermediate product. The tetrafluorobenzene intermediate compound may then be reduced to provide tetrafluoroaldehyde which can then be further fluorinated by nucleophilic fluorination or fluorodeoxygenation. The compounds of the invention may thus be obtained through the synthetic methodology illustrated in scheme (3) below. Other synthetic schemes may be utilized to prepare the various compounds above. For example, gaseous dicyanobenzene compounds may be converted by activated carbon catalysts at a temperature range of about 280° C. to about 320° C. In some cases, halogen-metal exchange schemes may be appropriate to produce the aldehyde compounds.
  • Figure US20100260934A9-20101014-C00006
  • Deposition techniques conventionally utilized with respect to, for example, non-halogenated paracyclophanes, can be utilized to apply one or more layers of the perfluorinated dimer compounds represented by formula (I). Polymerization of the dimer compounds may then provide a perfluorinated polymer. For example, vapor deposition techniques may be utilized to deposit and polymerize a paracyclophane comprising a perfluorinated dimer such as perfluoro-[2,2]-paracyclophane to produce at least one perfluorinated paraxylylene layer on at least a portion of a surface. Other deposition and polymerization techniques may be utilized with the perfluoro-[2,2]-paracyclophane compounds. For example, solvent carrier-based procedures may be utilized to apply a polymerizable layer comprising the perfluorinated dimer compound on the surface. Thereafter, polymerization of the deposited compound comprising perfluorinated paracyclophane may be initiated to produce a perfluorinated paraxylylene layer on the surface. Deposition and polymerization may be performed substantially simultaneously or in substantially the same step. For example, vapor polymerization to produce the perfluorinated paraxylylene may be performed with vaporized perfluoroparacyclophane dimer compound (I).
  • The paraxylylene polymeric material can be applied on any desired surface or portion of a surface. Thus, the precursor perfluorinated paracyclophane compounds of the invention may be utilized to render any desired surface inert. For example, the paraxylylene polymeric material may be applied on at least a portion of an electronic component such as a semiconductor. Other surfaces include those exposed to or subject chemical and/or biological environments that would damage or otherwise alter the surface properties. Non-limiting examples include components or articles having at least a portion thereof exposed to elevated temperatures, solvents, and/or other corrosive environments. Further, the applied perfluorinated layer may have any desired thickness that provides a desired characteristic. Indeed, the layer may be applied uniformly or at various thickness, alone or with other coatings. The layer can be applied to form a pattern on the surface.
  • Although various embodiments exemplarily shown have been described, it should be appreciated that the invention is not so limited. This invention is thus not limited in its application to the details of construction and the arrangement of components set forth in the description or illustrated in the drawings.
  • EXAMPLES
  • The function and advantages of these and other embodiments of the invention can be further understood from the examples below, which illustrate the benefits and/or advantages of the one or more systems and techniques of the invention but do not exemplify the full scope of the invention.
  • Example 1 Preparation of 1,4-dicyano-2,3,5,6-tetrafluorobenzene
  • About 8 g (about 0.03 mol) of 1,4-dicyano-2,3,5,6-tetrachlorobenzene and about 8 g (about 0.137 mol) of KF were transferred into a flask containing about 60 mL of dry dimethyl formamide (DMF).
  • The mixture was stirred at a temperature of about 110° C. for about ten hours. Nitrogen gas was used to blanket the mixture.
  • The reaction mixture was poured into a beaker containing about 500 mL ice-water.
  • The cooled mixture was then to collect the precipitate, which was washed by water and recrystallized with acetone.
  • The recrystallized product, 1,4-dicyano-2,3,5,6-tetrafluorobenzene, was dried and measured to weigh about 5.4 g (about 90%).
  • The 19F NMR resonance of this product in CDCl3 was δ −128.8 (singlet).
  • The reaction scheme (4) is illustrated below.
  • Figure US20100260934A9-20101014-C00007
  • Example 2 Preparation of Tetrafluorophthalaldehyde
  • About 1.25 g (about 6.25 mmol) of the 1,4-dicyano-2,3,5,6-tetrafluorobenzene synthesized according to the procedure described in Example 1 was transferred into about 57.5 mL of N2 bubbled toluene, which was at about 0° C. About 17.5 ml (about 17.5 mmol) of 1 M DIBAL-H (diisopropylaluminumhydride) toluene solution was added. After the reaction mixture was stirred for about 2.5 hours at room temperature, the mixture was cooled to about 0° C.
  • About 30 mL of about 2 N HCl was added until the pH of the mixture was less than about 2 units.
  • The aqueous layer was then extracted several times with CH2Cl2.
  • The organic layer was combined and dried by evaporation.
  • The crude product was chromatographed with toluene as a carrier through silica gel and produced about 0.79 g of product (about 62%).
  • The 1H NMR resonance of this product in CDCl3 was δ 10.36 and the 19F NMR resonance was δ −144.1 (singlet).
  • The reaction scheme (5) is illustrated below.
  • Figure US20100260934A9-20101014-C00008
  • Example 3 Preparation of α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene
  • About 0.84 g (about 4.08 mmol) of tetrafluorophthalaldehyde prepared as described in Example 2 was added to about 20 mL of dry dichloromethane.
  • The mixture was cooled to about 0° C. under a N2 atmosphere.
  • About 1.6 mL (about 12.2 mmol) of a fluorinating agent, diethyl aminosulfur trifluoride (DAST), in about 5 mL of the dichloromethane was added drop by drop.
  • After the addition, the mixture was brought to room temperature for about six hours and then poured into about 100 mL of ice-water.
  • The organic layer was washed with an about 5% sodium hydroxide solution.
  • The crude mixture was flash chromatographed with hexane providing an about 60% yield of α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene.
  • The 1H NMR resonance of the α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene product in CDCl3 was δ 6.952 (t, 2H), and the 19F NMR resonance was δ −115.19 (4F, d, J=50 Hz), −115.282 (2F, d), −142.17 (s, 4F). The melting point of the product was about 70° C.
  • The reaction scheme (6) is illustrated below.
  • Figure US20100260934A9-20101014-C00009
  • Example 4 Synthesis of α,α′-dichloro-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene
  • About 26 g (about 0.104 mol) of α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene was dissolved in about 400 mL of carbon tetrachloride.
  • Chlorine gas was bubbled through the mixture for about 56 hours at 60° C.
  • A tungsten sunlamp was used to irradiate the mixture.
  • The reaction was monitored by checking the 19F NMR resonance.
  • The mixture was cooled and white precipitate was filtered.
  • The carbon tetrachloride carrier was carefully removed by rotary evaporation.
  • The residue was distilled under vacuum, at about 0.2 mm Hg and about 3° C., to yield α,α′-dichloro-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene product, which was found to have a 19F NMR resonance in CDCl3 of δ −47.61 (m, 4F), −137.88 (m, 4F). The product was further analyzed by GC-EI-MS to be C8F8Cl2, 319; C8F8Cl, 283, and C8F8, 248.
  • The reaction scheme (7) is illustrated below.
  • Figure US20100260934A9-20101014-C00010
  • Example 5 Preparation of Perfluoro-Paracyclophane (AF8)
  • About 2 g (about 6.27 mmol) of α,α′-dichloro-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene was added to about 1.63 g (about 25 mmol) of zinc (about 99.7%) in about 20 mL of acetonitrile.
  • The mixture was refluxed at about 115° C.) for about fourteen hours under nitrogen.
  • Another about 0.27 g of zinc and about 5 mL of acetonitrile were added.
  • The mixture was refluxed for another four hours to reach about 100% conversion.
  • The reaction mixture was hot filtered and washed several times with acetonitrile and acetone.
  • The combined filtrate was dried by rotary evaporation.
  • The crude mixture was flash chromatographed with hexane through silica gel as the stationary phase to yield about 0.4 g of crude product.
  • The crude product was recrystallized with dichloromethane twice, and also with acetone to yield about 0.3 g (about 25%) of product with a purity of about 95%.
  • The crude product was analyzed and determined to have a melting point in a range of about 195 to 196° C.; a 19F NMR resonance in CDCl3 of δ −102.81 (s, 4F), −132.40 (s, 4F). The crude product was further analyzed by mass spectrometry to be 496 of C16F16, and 248 of C8F8.
  • The insoluble residue was then treated with about 4M HCl until bubbling stopped. The AF8 product was then collected and extracted in a Soxhlet extractor with acetone as the solvent. GPC analysis showed that the solution contained some oligomers with a Mn of about 2,000.
  • The overall reaction scheme (8) is illustrated below.
  • Figure US20100260934A9-20101014-C00011
  • In addition to the reaction product (II), zinc reduction of α,α′-dichloro-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene (PFPX-dichloride) in scheme (8) can result in the byproducts (III) and (IV).
  • Figure US20100260934A9-20101014-C00012
  • Other solvents that may be utilized instead of, or in combination with the solvents listed above include, but are not limited to, acetonitrile, anisole, 2-butanone, 1,4-dioxane, benzonitrile, succinonitrile, and acetic anhydride. Alternative reducing agents may be used including, for example, trimethylsilyltributyltin (TMSTBT, Me3SiSnBu3).
  • Table 1 below shows the results utilizing various reducing agents and solvents in scheme (8).
  • TABLE 1
    Solvent Reaction Conditions Observations
    anisole 170° C. about 5% AF8 product
    20 hours about 90% SM byproduct
    2-butanone 110° C. about 10% AF8
    20 hours about 10% SM
    80% impurities
    1,4-dioxane 130° C. about 8% AF8
     5 hours about 82% SM
    1,4-dioxane 130° C. all byproduct
    13 hours
    benzonitrile 110° C. AF8 product
    overnight
    sulpholane 100° C. no reaction
     7 hours
    sulpholane 150° C. SM byproduct
    15 hours
    TiCl4(5 mol %)  0° C. no reaction
    1,4-dioxane  2 hours
    TiCl4(5 mol %) room temperature no reaction
    1,4-dioxane  2 hours
    TiCl4(5 mol %) 130° C. no reaction
    1,4-dioxane  2 hours
    TiCl4(5 mol %) 130° C. 100% byproduct
    1,4-dioxane 20 hours
    succinonitrile 140° C. black, solidified
    18 hours trace amount of SM byproduct
    TMSTBT, CsF  70° C. CF3 peak observed
    DMSO/THF (1:4) 48 hours SM byproduct
    Zn—Cu couple 130° C. trace AF8 product
    acetonitrile 20 hours
    DMA (8%)/AN  80° C. no reaction
     1 hour
    DMA (8%)/AN  80° C. decomposed
    18 hours
    NaI room temperature SM byproduct
    DME 18 hours
    NaI  80° C. SM byproduct
    DME 18 hours
    Diglycol dimethyl 160° C. no product
    20 hours
    HgCl2 (5 mol %) 20 hours trace AF8 product
    then Ag(OTf)2/AN SM byproduct and impurities
    Ag(OAc) 140° C. no product
    toluene
    Ac2O  80° C. hydrolyzed reactants
  • Example 6 Synthesis of Perfluoro-Paraxylene Monomer
  • In each of the following reduction reactions, about 5 mL of the indicated solvent was used.
  • (a) About 1 g of α,α′-dichloro-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene was reduced 100% to perfluoro-paraxylene product by zinc (4 eq) at a temperature of about 100° C. in dimethylacetamide (DMA) and the product was further brominated overnight according to the reaction scheme (9) below.
  • The monomer peak was observed at −101.536 ppm. 4F peak was noted at −146.377 ppm.
  • Figure US20100260934A9-20101014-C00013
  • (b) Dichloro-tetrafluoro-paraxlylene was 100% reduced to the monomer product by zinc in 1,3-dimethyl-2-imidazolidinone (DMI), instead of DMA, at a temperature of about 80° C. to about 90° C. for about thirty minutes as in scheme (9).
  • A CF3 byproduct peak was noted at −57.5 ppm.
  • (c) Dichloro-tetrafluoro-paraxylene was also reduced by zinc in hexamethlyphosphoramide (HMPA), instead of DMA, at a temperature of about 80° C. to about 90° C. for about thirty minutes, to the perfluoro-paraxlylene product as in scheme (9). Byproduct peaks were noted at −82.326 ppm, −85.677 ppm, and −141.781 ppm.
  • (d) N-methylpyrrolidone (NMP) was used as a solvent instead of DMA in scheme (9) to facilitate zinc reduction of α,α′-dichloro-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene into perfluoro-paraxlylene monomer. The reaction was also performed at 80° C. for about thirty minutes.
  • (e) α,α′-dichloro-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluoroxylene was 100% reduced by zinc overnight at room temperature in dimethyl sulfoxide (DMSO) to a solvent stabilized perfluoro-paraxylene monomer, 19F NMR −101.54 ppm, 4F; −146.38 ppm, 4F, absorption maximum at 290 nm in DMSO solution.
  • The monomer was observed to be stable at room temperature in the NMR tube even after one week.
  • The monomer was preserved or trapped by slow addition of bromine to form α,α′-dibromo-α,α,α′,α′-tetrafluoro-2,3,5,6-tetrafluorooxylene, −43.773 ppm, m, 4F; −137.852 ppm, m, 4F and M/Z:M-Br, 327, M-2Br, 248.
  • Having now described various embodiments of the invention, it should be apparent to those skilled in the art that the foregoing is merely illustrative and not limiting. Numerous modifications and other embodiments are within the scope of one of ordinary skill in the art and are contemplated as falling within the scope of the invention. Although many of the examples presented herein involve specific combinations of method acts or features, it should be understood that those acts and those features may be combined in other ways to accomplish the same objectives. However, acts, elements, and features discussed only in connection with one embodiment are not intended to be excluded from a similar role in other embodiments. Moreover, it should also be appreciated that the invention is directed to each feature, system, subsystem, or technique described herein and any combination of two or more features, systems, subsystems, or techniques described herein and any combination of two or more features, systems, subsystems, and/or methods, if such features, systems, subsystems, and techniques are not mutually inconsistent, is considered to be within the scope of the invention as embodied in the claims.
  • Use of ordinal terms such as “first,” “second,” “third,” and the like in the claims to modify a claim element does not by itself connote any priority, precedence, or order of one claim element over another or the temporal order in which acts of a method are performed, but are used merely as labels to distinguish one claim element having a certain name from another element having a same name (but for use of the ordinal term) to distinguish the claim elements. As used herein, the term “plurality” refers to two or more items or components. The terms “comprising,” “including,” “carrying,” “having,” “containing,” and “involving,” whether in the written description or the claims and the like, are open-ended terms, i.e., to mean “including but not limited to.” Thus, the use of such terms is meant to encompass the items listed thereafter, and equivalents thereof, as well as additional items. Only the transitional phrases “consisting of” and “consisting essentially of,” are closed or semi-closed transitional phrases, respectively, with respect to the claims.
  • Those skilled in the art should appreciate that the parameters and configurations described herein are exemplary and that actual parameters and/or configurations will depend on the specific application in which the systems and techniques of the invention are used. Those skilled in the art should also recognize or be able to ascertain, using no more than routine experimentation, equivalents to the specific embodiments of the invention. It is therefore to be understood that the embodiments described herein are presented by way of example only and that, within the scope of the appended claims and equivalents thereto; the invention may be practiced otherwise than as specifically described.

Claims (18)

1. A composition comprising perfluoro-[2,2]-paracyclophane represented by the formula,
Figure US20100260934A9-20101014-C00014
2. (canceled)
3. (canceled)
4. (canceled)
5. (canceled)
6. (canceled)
7. (canceled)
8. (canceled)
9. (canceled)
10. (canceled)
11. (canceled)
12. (canceled)
13. (canceled)
14. A method of coating a surface with a perfluoroparylene coating, comprising:
polymerizing a perfluoroparacyclophane represented by the formula,
Figure US20100260934A9-20101014-C00015
on at least a portion of the surface to produce the perfluoroparylene coating represented by the formula,
Figure US20100260934A9-20101014-C00016
where n is at least 2.
15. The method of claim 14, wherein the surface is a portion of an electronic component.
16. The method of claim 14, wherein polymerizing the perfluoroparacylene comprises polymerizing the perfluoroparacyclophane on at least a portion of a surface to be exposed to a biological environment.
17. The method of claim 14, wherein polymerizing the perfluoroparacyclophane comprises vapor depositing the perfluoroparacyclophane on the at least a portion of the surface.
18. A compound comprising a perfluoroparaxylene monomer represented by the formula,
Figure US20100260934A9-20101014-C00017
US12/510,038 2007-02-26 2009-07-27 Perfluoroparacyclophane and related methods therefor Abandoned US20100260934A9 (en)

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Citations (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3246627A (en) * 1962-10-05 1966-04-19 Union Carbide Corp Apparatus for vapor deposition
US3268599A (en) * 1963-09-23 1966-08-23 Union Carbide Corp Process for the preparation of cyclo
US3274267A (en) * 1963-09-23 1966-09-20 Union Carbide Corp Cyclic alpha-perfluoro-di-p-xylylenes
US3280202A (en) * 1964-07-09 1966-10-18 Union Carbide Corp Process for producing p-xylylene-containing compositions
US3297591A (en) * 1962-10-22 1967-01-10 Union Carbide Corp Process for the preparation of alpha-perfluoro-p-xylylene poluymers
US3301707A (en) * 1962-12-27 1967-01-31 Union Carbide Corp Thin film resistors and methods of making thereof
US3342754A (en) * 1966-02-18 1967-09-19 Union Carbide Corp Para-xylylene polymers
US3405117A (en) * 1964-12-24 1968-10-08 Union Carbide Corp alpha-chloro-di-p-xylylenes
US3749601A (en) * 1971-04-01 1973-07-31 Hughes Aircraft Co Encapsulated packaged electronic assembly
US4176209A (en) * 1978-01-09 1979-11-27 Raytheon Corporation Process for forming polymeric paraxylylene coatings and films possessing improved oxidation resistance
US4429153A (en) * 1979-12-21 1984-01-31 Imperial Chemical Industries Plc Halogenated esters
US4734503A (en) * 1986-02-07 1988-03-29 E. I. Du Pont De Nemours And Company Catalytic transhalogenation of haloaromatics
US4734533A (en) * 1985-12-19 1988-03-29 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4761269A (en) * 1986-06-12 1988-08-02 Crystal Specialties, Inc. Apparatus for depositing material on a substrate
US4783561A (en) * 1985-10-30 1988-11-08 Montedison S.P.A. Process for the preparation of halogenated (2,2)-paracyclophanes and mixtures of resultant halogenated (2,2)-paracyclophanes
US4795838A (en) * 1986-06-27 1989-01-03 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4816608A (en) * 1986-06-27 1989-03-28 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4846998A (en) * 1985-03-22 1989-07-11 Merck Patent Gesellschaft Mit Beschrankter Haftung Cyclohexane derivatives
US4853488A (en) * 1987-04-10 1989-08-01 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4886923A (en) * 1987-09-18 1989-12-12 Montedison S.P.A. Process for the preparation of tricyclo 8.2.2.2 hexadeca 4,6,10,12,13,15 hexaene chlorinated in the benzene rings
US4924014A (en) * 1988-03-02 1990-05-08 Hoechst Aktiengesellschaft Process for the preparation of halogen-containing aromatic compounds
US5069972A (en) * 1988-09-12 1991-12-03 Versic Ronald J Moldable microcapsule that contains a high percentage of solid core material, and method of manufacture thereof
US5094906A (en) * 1988-08-15 1992-03-10 Exxon Research And Engineering Company Ceramic microtubular materials and method of making same
US5210341A (en) * 1991-12-20 1993-05-11 Union Carbide Chemicals & Plastics Technology Corporation Processes for the preparation of octafluoro-[2,2]paracyclophane
US5266349A (en) * 1991-02-25 1993-11-30 Specialty Coating Systems Inc. Method of discrete conformal coating
US5268202A (en) * 1992-10-09 1993-12-07 Rensselaer Polytechnic Institute Vapor deposition of parylene-F using 1,4-bis (trifluoromethyl) benzene
US5288504A (en) * 1988-09-09 1994-02-22 The Ronald T. Dodge Company Pharmaceuticals microencapsulated by vapor deposited polymers and method
US5302767A (en) * 1993-03-26 1994-04-12 Union Carbide Chemicals & Plastics Technology Corporation [2.2] paracyclophane and derivatives thereof
US5368645A (en) * 1993-09-24 1994-11-29 Specialty Coating Systems Inc. Vacuum chuck for coating apparatus
US5424097A (en) * 1993-09-30 1995-06-13 Specialty Coating Systems, Inc. Continuous vapor deposition apparatus
US5534068A (en) * 1995-10-27 1996-07-09 Specialty Coating Systems, Inc. Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement
US5536321A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter
US5536322A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device
US5536319A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including an atmospheric shroud and inert gas source
US5536892A (en) * 1995-10-18 1996-07-16 Specialty Coating Systems, Inc. Processes for the preparation of octafluoro-[2,2]paracyclophane
US5536317A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a quartz crystal thickness/rate controller
US5538758A (en) * 1995-10-27 1996-07-23 Specialty Coating Systems, Inc. Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers
US5556473A (en) * 1995-10-27 1996-09-17 Specialty Coating Systems, Inc. Parylene deposition apparatus including dry vacuum pump system and downstream cold trap
US5669971A (en) * 1994-04-06 1997-09-23 Specialty Coating Systems, Inc. Selective coating apparatus
US5689027A (en) * 1994-11-18 1997-11-18 Mobil Oil Corporation Selective ethylbenzene conversion
US5709753A (en) * 1995-10-27 1998-01-20 Specialty Coating Sysetms, Inc. Parylene deposition apparatus including a heated and cooled dimer crucible
US5789068A (en) * 1995-06-29 1998-08-04 Fry's Metals, Inc. Preformed solder parts coated with parylene in a thickness effective to exhibit predetermined interference colors
US5828132A (en) * 1997-03-21 1998-10-27 Texas Instruments Incorporated Semiconductor device having perfluorinated and non-fluorinated parylene intermetal dielectric
US5841005A (en) * 1997-03-14 1998-11-24 Dolbier, Jr.; William R. Parylene AF4 synthesis
US5849962A (en) * 1995-10-18 1998-12-15 Specialty Coating Systems, Inc. Process for the preparation of octafluoro-(2,2) paracyclophane
US5879808A (en) * 1995-10-27 1999-03-09 Alpha Metals, Inc. Parylene polymer layers
US5886026A (en) * 1993-07-19 1999-03-23 Angiotech Pharmaceuticals Inc. Anti-angiogenic compositions and methods of use
US5888905A (en) * 1997-11-06 1999-03-30 Texas Instruments Incorporated Integrated circuit insulator and method
US6030706A (en) * 1996-11-08 2000-02-29 Texas Instruments Incorporated Integrated circuit insulator and method
US6130096A (en) * 1995-06-06 2000-10-10 British Nuclear Fuels Plc Chemical complexes
US6150499A (en) * 1998-01-06 2000-11-21 Specialty Coating Systems, Inc. Process for preparation of TFPX-dichloride
US6184425B1 (en) * 1996-08-07 2001-02-06 Aventis Research & Technologies Gmbh & Co. Process for preparing fluorine-containing compounds
US6245760B1 (en) * 1997-05-28 2001-06-12 Aventis Pharmaceuticals Products, Inc Quinoline and quinoxaline compounds which inhibit platelet-derived growth factor and/or p56lck tyrosine kinases
US6284933B1 (en) * 1996-10-23 2001-09-04 William R. Dolbier, Jr. TFPX synthesis
US6362115B1 (en) * 1998-12-09 2002-03-26 Applied Materials, Inc. In-situ generation of p-xylyiene from liquid precursors
US6380415B2 (en) * 2000-02-14 2002-04-30 Central Glass Company, Limited Process for producing octafluoro[2,2]paracyclophane
US6392097B1 (en) * 2000-03-20 2002-05-21 Specialty Coating Systems, Inc. Process for the preparation of derivatives of octafluoro-[2,2] paracylophane
US6464740B1 (en) * 1998-06-11 2002-10-15 Honeywell International Inc. Reactive aqueous metal oxide sols as polishing slurries for low dielectric constant materials
US6549327B2 (en) * 2001-05-24 2003-04-15 Xerox Corporation Photochromic gyricon display
US6559474B1 (en) * 2000-09-18 2003-05-06 Cornell Research Foundation, Inc, Method for topographical patterning of materials
US6602932B2 (en) * 1999-12-15 2003-08-05 North Carolina State University Nanoparticle composites and nanocapsules for guest encapsulation and methods for synthesizing same
US20030165613A1 (en) * 2001-12-21 2003-09-04 Chappa Ralph A. Reagent and method for providing coatings on surfaces
US6646150B1 (en) * 1999-12-16 2003-11-11 Dainippon Pharmaceutical Co., Ltd. Processes for producing (aminomethyl)trifluorocarbinol derivatives
US20030228411A1 (en) * 2002-03-19 2003-12-11 Yu-Chong Tai Method for integrating micro- and nanoparticles into MEMS and apparatus including the same
US6667099B1 (en) * 1999-07-29 2003-12-23 Creavis Gesellschaft Fuer Technologie Und Innovation Mbh Meso-and nanotubes
US6723143B2 (en) * 1998-06-11 2004-04-20 Honeywell International Inc. Reactive aqueous metal oxide sols as polishing slurries for low dielectric constant materials
US6763576B2 (en) * 2001-05-10 2004-07-20 Parker-Hannifin Corporation Manufacture of electronics enclosure having a metallized shielding layer
US6770789B2 (en) * 2002-03-13 2004-08-03 University Of Florida Research Foundation Process for trifluoromethylation of sulfates
US6780561B2 (en) * 2001-11-26 2004-08-24 Kansai Paint Co., Ltd. Polybenzoxazole precursor and coating composition using the same
US6869698B2 (en) * 2002-12-04 2005-03-22 Canon Kabushiki Kaisha Organic light-emitting device using paracyclophane
US6919484B2 (en) * 2002-07-25 2005-07-19 University Of Florida Method for incorporation of pentafluorosulfanyl (SF5) substituents into aliphatic and aromatic compounds
US6943232B2 (en) * 2002-02-04 2005-09-13 E. I. Du Pont De Nemours And Company Halogenated optical polymer composition
US7012165B2 (en) * 2003-10-31 2006-03-14 University Of Florida Oxidative fluorination of aromatic and chloroaromatic derivatives
US20060083770A1 (en) * 2004-10-15 2006-04-20 Specialty Coating Systems, Inc. Medical devices and methods of preparation and use
US20070009738A1 (en) * 2005-07-07 2007-01-11 Specialty Coating Systems, Inc. Nanoscale structures and methods of preparation and use
US7173159B2 (en) * 2005-03-21 2007-02-06 Yuan-Shin Materials Technology Corp. Method for synthesizing TFPX
US20070099019A1 (en) * 2005-10-31 2007-05-03 Specialty Coating Systems, Inc. Parylene variants and methods of synthesis and use
US20070148390A1 (en) * 2005-12-27 2007-06-28 Specialty Coating Systems, Inc. Fluorinated coatings
US20070228606A1 (en) * 2005-07-07 2007-10-04 Specialty Coating Systems, Inc. Nanoscale structures and methods of preparation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3771302B2 (en) 1995-07-14 2006-04-26 第三化成株式会社 Tetrafluoro- [2,2] -paracyclophane and process for producing the same
JP2001213818A (en) * 2000-01-31 2001-08-07 Nippon Shokubai Co Ltd Method of production for cyclophane derivative
JP2001213819A (en) * 2000-01-31 2001-08-07 Nippon Shokubai Co Ltd Method of production for cyclophane derivative
JP2002080412A (en) * 2000-06-30 2002-03-19 Nippon Shokubai Co Ltd Method for producing paracyclophane derivative
NL1019781C2 (en) 2002-01-18 2003-07-21 Tno Coating as well as methods and devices for the manufacture thereof.
MXPA05007509A (en) 2003-01-17 2005-09-21 Ciba Sc Holding Ag A process for the production of porous inorganic materials or a matrix material containing nanoparticles.
JP2005183729A (en) 2003-12-19 2005-07-07 Toshiba Corp Method of forming organic thin film

Patent Citations (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3246627A (en) * 1962-10-05 1966-04-19 Union Carbide Corp Apparatus for vapor deposition
US3297591A (en) * 1962-10-22 1967-01-10 Union Carbide Corp Process for the preparation of alpha-perfluoro-p-xylylene poluymers
US3301707A (en) * 1962-12-27 1967-01-31 Union Carbide Corp Thin film resistors and methods of making thereof
US3268599A (en) * 1963-09-23 1966-08-23 Union Carbide Corp Process for the preparation of cyclo
US3274267A (en) * 1963-09-23 1966-09-20 Union Carbide Corp Cyclic alpha-perfluoro-di-p-xylylenes
US3332891A (en) * 1963-09-23 1967-07-25 Union Carbide Corp Process for the preparation of alpha-per-fluoro-p-xylylene polymers
US3280202A (en) * 1964-07-09 1966-10-18 Union Carbide Corp Process for producing p-xylylene-containing compositions
US3405117A (en) * 1964-12-24 1968-10-08 Union Carbide Corp alpha-chloro-di-p-xylylenes
US3342754A (en) * 1966-02-18 1967-09-19 Union Carbide Corp Para-xylylene polymers
US3749601A (en) * 1971-04-01 1973-07-31 Hughes Aircraft Co Encapsulated packaged electronic assembly
US4176209A (en) * 1978-01-09 1979-11-27 Raytheon Corporation Process for forming polymeric paraxylylene coatings and films possessing improved oxidation resistance
US4429153A (en) * 1979-12-21 1984-01-31 Imperial Chemical Industries Plc Halogenated esters
US4846998A (en) * 1985-03-22 1989-07-11 Merck Patent Gesellschaft Mit Beschrankter Haftung Cyclohexane derivatives
US4783561A (en) * 1985-10-30 1988-11-08 Montedison S.P.A. Process for the preparation of halogenated (2,2)-paracyclophanes and mixtures of resultant halogenated (2,2)-paracyclophanes
US4734533A (en) * 1985-12-19 1988-03-29 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4734503A (en) * 1986-02-07 1988-03-29 E. I. Du Pont De Nemours And Company Catalytic transhalogenation of haloaromatics
US4761269A (en) * 1986-06-12 1988-08-02 Crystal Specialties, Inc. Apparatus for depositing material on a substrate
US4795838A (en) * 1986-06-27 1989-01-03 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4816608A (en) * 1986-06-27 1989-03-28 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4853488A (en) * 1987-04-10 1989-08-01 Montedison S.P.A. Process for the preparation of (2,2)-paracyclophane and derivatives thereof
US4886923A (en) * 1987-09-18 1989-12-12 Montedison S.P.A. Process for the preparation of tricyclo 8.2.2.2 hexadeca 4,6,10,12,13,15 hexaene chlorinated in the benzene rings
US4924014A (en) * 1988-03-02 1990-05-08 Hoechst Aktiengesellschaft Process for the preparation of halogen-containing aromatic compounds
US5094906A (en) * 1988-08-15 1992-03-10 Exxon Research And Engineering Company Ceramic microtubular materials and method of making same
US5288504A (en) * 1988-09-09 1994-02-22 The Ronald T. Dodge Company Pharmaceuticals microencapsulated by vapor deposited polymers and method
US5069972A (en) * 1988-09-12 1991-12-03 Versic Ronald J Moldable microcapsule that contains a high percentage of solid core material, and method of manufacture thereof
US5266349A (en) * 1991-02-25 1993-11-30 Specialty Coating Systems Inc. Method of discrete conformal coating
US5210341A (en) * 1991-12-20 1993-05-11 Union Carbide Chemicals & Plastics Technology Corporation Processes for the preparation of octafluoro-[2,2]paracyclophane
US5268202A (en) * 1992-10-09 1993-12-07 Rensselaer Polytechnic Institute Vapor deposition of parylene-F using 1,4-bis (trifluoromethyl) benzene
US5302767A (en) * 1993-03-26 1994-04-12 Union Carbide Chemicals & Plastics Technology Corporation [2.2] paracyclophane and derivatives thereof
US5886026A (en) * 1993-07-19 1999-03-23 Angiotech Pharmaceuticals Inc. Anti-angiogenic compositions and methods of use
US5368645A (en) * 1993-09-24 1994-11-29 Specialty Coating Systems Inc. Vacuum chuck for coating apparatus
US5424097A (en) * 1993-09-30 1995-06-13 Specialty Coating Systems, Inc. Continuous vapor deposition apparatus
US5908506A (en) * 1993-09-30 1999-06-01 Specialty Coating Systems, Inc. Continuous vapor deposition apparatus
US5669971A (en) * 1994-04-06 1997-09-23 Specialty Coating Systems, Inc. Selective coating apparatus
US5689027A (en) * 1994-11-18 1997-11-18 Mobil Oil Corporation Selective ethylbenzene conversion
US6130096A (en) * 1995-06-06 2000-10-10 British Nuclear Fuels Plc Chemical complexes
US5789068A (en) * 1995-06-29 1998-08-04 Fry's Metals, Inc. Preformed solder parts coated with parylene in a thickness effective to exhibit predetermined interference colors
US5536892A (en) * 1995-10-18 1996-07-16 Specialty Coating Systems, Inc. Processes for the preparation of octafluoro-[2,2]paracyclophane
US5849962A (en) * 1995-10-18 1998-12-15 Specialty Coating Systems, Inc. Process for the preparation of octafluoro-(2,2) paracyclophane
US5536321A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter
US5534068A (en) * 1995-10-27 1996-07-09 Specialty Coating Systems, Inc. Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement
US5709753A (en) * 1995-10-27 1998-01-20 Specialty Coating Sysetms, Inc. Parylene deposition apparatus including a heated and cooled dimer crucible
US5536319A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including an atmospheric shroud and inert gas source
US5536317A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a quartz crystal thickness/rate controller
US5536322A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device
US5556473A (en) * 1995-10-27 1996-09-17 Specialty Coating Systems, Inc. Parylene deposition apparatus including dry vacuum pump system and downstream cold trap
US5879808A (en) * 1995-10-27 1999-03-09 Alpha Metals, Inc. Parylene polymer layers
US5538758A (en) * 1995-10-27 1996-07-23 Specialty Coating Systems, Inc. Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers
US6184425B1 (en) * 1996-08-07 2001-02-06 Aventis Research & Technologies Gmbh & Co. Process for preparing fluorine-containing compounds
US6284933B1 (en) * 1996-10-23 2001-09-04 William R. Dolbier, Jr. TFPX synthesis
US6030706A (en) * 1996-11-08 2000-02-29 Texas Instruments Incorporated Integrated circuit insulator and method
US5841005A (en) * 1997-03-14 1998-11-24 Dolbier, Jr.; William R. Parylene AF4 synthesis
US5828132A (en) * 1997-03-21 1998-10-27 Texas Instruments Incorporated Semiconductor device having perfluorinated and non-fluorinated parylene intermetal dielectric
US6245760B1 (en) * 1997-05-28 2001-06-12 Aventis Pharmaceuticals Products, Inc Quinoline and quinoxaline compounds which inhibit platelet-derived growth factor and/or p56lck tyrosine kinases
US5888905A (en) * 1997-11-06 1999-03-30 Texas Instruments Incorporated Integrated circuit insulator and method
US6150499A (en) * 1998-01-06 2000-11-21 Specialty Coating Systems, Inc. Process for preparation of TFPX-dichloride
US6723143B2 (en) * 1998-06-11 2004-04-20 Honeywell International Inc. Reactive aqueous metal oxide sols as polishing slurries for low dielectric constant materials
US6464740B1 (en) * 1998-06-11 2002-10-15 Honeywell International Inc. Reactive aqueous metal oxide sols as polishing slurries for low dielectric constant materials
US6362115B1 (en) * 1998-12-09 2002-03-26 Applied Materials, Inc. In-situ generation of p-xylyiene from liquid precursors
US6667099B1 (en) * 1999-07-29 2003-12-23 Creavis Gesellschaft Fuer Technologie Und Innovation Mbh Meso-and nanotubes
US6602932B2 (en) * 1999-12-15 2003-08-05 North Carolina State University Nanoparticle composites and nanocapsules for guest encapsulation and methods for synthesizing same
US6646150B1 (en) * 1999-12-16 2003-11-11 Dainippon Pharmaceutical Co., Ltd. Processes for producing (aminomethyl)trifluorocarbinol derivatives
US6380415B2 (en) * 2000-02-14 2002-04-30 Central Glass Company, Limited Process for producing octafluoro[2,2]paracyclophane
US6392097B1 (en) * 2000-03-20 2002-05-21 Specialty Coating Systems, Inc. Process for the preparation of derivatives of octafluoro-[2,2] paracylophane
US6559474B1 (en) * 2000-09-18 2003-05-06 Cornell Research Foundation, Inc, Method for topographical patterning of materials
US6763576B2 (en) * 2001-05-10 2004-07-20 Parker-Hannifin Corporation Manufacture of electronics enclosure having a metallized shielding layer
US6549327B2 (en) * 2001-05-24 2003-04-15 Xerox Corporation Photochromic gyricon display
US6780561B2 (en) * 2001-11-26 2004-08-24 Kansai Paint Co., Ltd. Polybenzoxazole precursor and coating composition using the same
US20030165613A1 (en) * 2001-12-21 2003-09-04 Chappa Ralph A. Reagent and method for providing coatings on surfaces
US6943232B2 (en) * 2002-02-04 2005-09-13 E. I. Du Pont De Nemours And Company Halogenated optical polymer composition
US6770789B2 (en) * 2002-03-13 2004-08-03 University Of Florida Research Foundation Process for trifluoromethylation of sulfates
US20030228411A1 (en) * 2002-03-19 2003-12-11 Yu-Chong Tai Method for integrating micro- and nanoparticles into MEMS and apparatus including the same
US6919484B2 (en) * 2002-07-25 2005-07-19 University Of Florida Method for incorporation of pentafluorosulfanyl (SF5) substituents into aliphatic and aromatic compounds
US6869698B2 (en) * 2002-12-04 2005-03-22 Canon Kabushiki Kaisha Organic light-emitting device using paracyclophane
US7012165B2 (en) * 2003-10-31 2006-03-14 University Of Florida Oxidative fluorination of aromatic and chloroaromatic derivatives
US20060083770A1 (en) * 2004-10-15 2006-04-20 Specialty Coating Systems, Inc. Medical devices and methods of preparation and use
US7173159B2 (en) * 2005-03-21 2007-02-06 Yuan-Shin Materials Technology Corp. Method for synthesizing TFPX
US20070009738A1 (en) * 2005-07-07 2007-01-11 Specialty Coating Systems, Inc. Nanoscale structures and methods of preparation and use
US20070228606A1 (en) * 2005-07-07 2007-10-04 Specialty Coating Systems, Inc. Nanoscale structures and methods of preparation
US20070099019A1 (en) * 2005-10-31 2007-05-03 Specialty Coating Systems, Inc. Parylene variants and methods of synthesis and use
US20070148390A1 (en) * 2005-12-27 2007-06-28 Specialty Coating Systems, Inc. Fluorinated coatings

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