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Número de publicaciónUS20100277551 A1
Tipo de publicaciónSolicitud
Número de solicitudUS 12/834,898
Fecha de publicación4 Nov 2010
Fecha de presentación13 Jul 2010
Fecha de prioridad9 Jun 1998
También publicado comoUS6247790, US6488358, US6505912, US6672708, US6712986, US6886918, US6899415, US6966633, US6969153, US6979075, US6981757, US6998062, US7021746, US7086721, US7093928, US7104631, US7131717, US7140720, US7156494, US7156498, US7179395, US7182436, US7188933, US7204582, US7284326, US7284833, US7325904, US7326357, US7334877, US7381342, US7399063, US7413671, US7438391, US7520593, US7533967, US7568790, US7637594, US7708386, US7753490, US7758161, US7857426, US7922296, US7931353, US7934809, US7942507, US7997687, US20010035896, US20020021331, US20020040887, US20020047875, US20030071876, US20030107615, US20030112296, US20030164868, US20040080580, US20040080582, US20040113982, US20040118807, US20040179067, US20050036000, US20050041066, US20050078150, US20050099461, US20050116993, US20050134650, US20050200656, US20050243132, US20050270336, US20050270337, US20060007268, US20060214990, US20060219656, US20060227176, US20060232629, US20070013743, US20070034597, US20070034598, US20070080135, US20070139471, US20070139472, US20080094449, US20080117261, US20080192091, US20080211843, US20080316269, US20090073233, US20090195621, US20090207208, US20090267993, US20100073430, US20100207997, US20100271434, US20120019601
Número de publicación12834898, 834898, US 2010/0277551 A1, US 2010/277551 A1, US 20100277551 A1, US 20100277551A1, US 2010277551 A1, US 2010277551A1, US-A1-20100277551, US-A1-2010277551, US2010/0277551A1, US2010/277551A1, US20100277551 A1, US20100277551A1, US2010277551 A1, US2010277551A1
InventoresKia Silverbrook, Gregory John McAvoy
Cesionario originalSilverbrook Research Pty Ltd
Exportar citaBiBTeX, EndNote, RefMan
Enlaces externos: USPTO, Cesión de USPTO, Espacenet
Micro-electromechanical nozzle arrangement having cantilevered actuator
US 20100277551 A1
Resumen
A micro-electromechanical nozzle arrangement for an inkjet printhead includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry; a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber; a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and a central arm which having metal and PTFE portions to provide structural support for the actuators.
Imágenes(16)
Previous page
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Reclamaciones(6)
1. A micro-electromechanical nozzle arrangement for an inkjet printhead, said arrangement comprising:
a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry;
a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber;
a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and
a central arm which having metal and PTFE portions to provide structural support for the actuators.
2. The nozzle arrangement of claim 1, further comprising a series of struts interspersed between the actuators to support the nozzle rim.
3. The nozzle arrangement of claim 1, wherein the serpentine heater element is made from gold.
4. The nozzle arrangement of claim 1, wherein the roof structure includes ink flow guide rails to minimize wicking along the nozzle rim according to surface tension effects of ink in the chamber.
5. The nozzle arrangement of claim 1, wherein the actuators include a polytetrafluoroethylene (PTFE) layer.
6. The nozzle arrangement of claim 1, wherein the ink supply channel is created by means of a deep silicon back etch of the substrate utilizing a plasma etcher.
Descripción
    CROSS REFERENCES TO RELATED APPLICATIONS
  • [0001]
    This application is a continuation of U.S. application Ser. No. 12/205,911 filed Sep. 7, 2008, which is a continuation application of U.S. Ser. No. 11/965,722 filed on Dec. 27, 2007, now issued U.S. Pat. No. 7,438,391, which is a continuation application of U.S. Ser. No. 11/442,126 filed on May 30, 2006, now issued as U.S. Pat. No. 7,326,357, which is a continuation application of U.S. Ser. No. 10/728,924 filed on Dec. 8, 2003, now issued as U.S. Pat. No. 7,179,395, which is a continuation application of U.S. Ser. No. 10/303,291 filed on Nov. 23, 2002, now U.S. Pat. No. 6,672,708, which is a continuation application of U.S. Ser. No. 09/855,093 filed on May 14, 2001, now U.S. Pat. No. 6,505,912 which is a continuation application of U.S. Ser. No. 09/112,806 filed 10 Jul. 1998, now U.S. Pat. No. 6,247,790. The disclosure of U.S. Pat. No. 6,672,708, U.S. Pat. No. 6,505,912 and U.S. Pat. No. 6,247,790 is specifically incorporated herein by reference.
  • [0000]
    CROSS-
    REFERENCED
    AUSTRALIAN US PATENT/PATENT APPLICATION
    Provisional Patent (Claiming Right of Priority from
    Application No. Australian Provisional Application) Docket No.
    PO7991 6,750,901 ART01US
    PO8505 6,476,863 ART02US
    PO7988 6,788,336 ART03US
    PO9395 6,322,181 ART04US
    PO8017 6,597,817 ART06US
    PO8014 6,227,648 ART07US
    PO8025 6,727,948 ART08US
    PO8032 6,690,419 ART09US
    PO7999 6,727,951 ART10US
    PO8030 6,196,541 ART13US
    PO7997 6,195,150 ART15US
    PO7979 6,362,868 ART16US
    PO7978 6,831,681 ART18US
    PO7982 6,431,669 ART19US
    PO7989 6,362,869 ART20US
    PO8019 6,472,052 ART21US
    PO7980 6,356,715 ART22US
    PO8018 6,894,694 ART24US
    PO7938 6,636,216 ART25US
    PO8016 6,366,693 ART26US
    PO8024 6,329,990 ART27US
    PO7939 6,459,495 ART29US
    PO8501 6,137,500 ART30US
    PO8500 6,690,416 ART31US
    PO7987 7,050,143 ART32US
    PO8022 6,398,328 ART33US
    PO8497 7,110,024 ART34US
    PO8020 6,431,704 ART38US
    PO8504 6,879,341 ART42US
    PO8000 6,415,054 ART43US
    PO7934 6,665,454 ART45US
    PO7990 6,542,645 ART46US
    PO8499 6,486,886 ART47US
    PO8502 6,381,361 ART48US
    PO7981 6,317,192 ART50US
    PO7986 6,850,274 ART51US
    PO8026 6,646,757 ART53US
    PO8028 6,624,848 ART56US
    PO9394 6,357,135 ART57US
    PO9397 6,271,931 ART59US
    PO9398 6,353,772 ART60US
    PO9399 6,106,147 ART61US
    PO9400 6,665,008 ART62US
    PO9401 6,304,291 ART63US
    PO9403 6,305,770 ART65US
    PO9405 6,289,262 ART66US
    PP0959 6,315,200 ART68US
    PP1397 6,217,165 ART69US
    PP2370 6,786,420 DOT01US
    PO8003 6,350,023 Fluid01US
    PO8005 6,318,849 Fluid02US
    PO8066 6,227,652 IJ01US
    PO8072 6,213,588 IJ02US
    PO8040 6,213,589 IJ03US
    PO8071 6,231,163 IJ04US
    PO8047 6,247,795 IJ05US
    PO8035 6,394,581 IJ06US
    PO8044 6,244,691 IJ07US
    PO8063 6,257,704 IJ08US
    PO8057 6,416,168 IJ09US
    PO8056 6,220,694 IJ10US
    PO8069 6,257,705 IJ11US
    PO8049 6,247,794 IJ12US
    PO8036 6,234,610 IJ13US
    PO8048 6,247,793 IJ14US
    PO8070 6,264,306 IJ15US
    PO8067 6,241,342 IJ16US
    PO8001 6,247,792 IJ17US
    PO8038 6,264,307 IJ18US
    PO8033 6,254,220 IJ19US
    PO8002 6,234,611 IJ20US
    PO8068 6,302,528 IJ21US
    PO8062 6,283,582 IJ22US
    PO8034 6,239,821 IJ23US
    PO8039 6,338,547 IJ24US
    PO8041 6,247,796 IJ25US
    PO8004 6,557,977 IJ26US
    PO8037 6,390,603 IJ27US
    PO8043 6,362,843 IJ28US
    PO8042 6,293,653 IJ29US
    PO8064 6,312,107 IJ30US
    PO9389 6,227,653 IJ31US
    PO9391 6,234,609 IJ32US
    PP0888 6,238,040 IJ33US
    PP0891 6,188,415 IJ34US
    PP0890 6,227,654 IJ35US
    PP0873 6,209,989 IJ36US
    PP0993 6,247,791 IJ37US
    PP0890 6,336,710 IJ38US
    PP1398 6,217,153 IJ39US
    PP2592 6,416,167 IJ40US
    PP2593 6,243,113 IJ41US
    PP3991 6,283,581 IJ42US
    PP3987 6,247,790 IJ43US
    PP3985 6,260,953 IJ44US
    PP3983 6,267,469 IJ45US
    PO7935 6,224,780 IJM01US
    PO7936 6,235,212 IJM02US
    PO7937 6,280,643 IJM03US
    PO8061 6,284,147 IJM04US
    PO8054 6,214,244 IJM05US
    PO8065 6,071,750 IJM06US
    PO8055 6,267,905 IJM07US
    PO8053 6,251,298 IJM08US
    PO8078 6,258,285 IJM09US
    PO7933 6,225,138 IJM10US
    PO7950 6,241,904 IJM11US
    PO7949 6,299,786 IJM12US
    PO8060 6,866,789 IJM13US
    PO8059 6,231,773 IJM14US
    PO8073 6,190,931 IJM15US
    PO8076 6,248,249 IJM16US
    PO8075 6,290,862 IJM17US
    PO8079 6,241,906 IJM18US
    PO8050 6,565,762 IJM19US
    PO8052 6,241,905 IJM20US
    PO7948 6,451,216 IJM21US
    PO7951 6,231,772 IJM22US
    PO8074 6,274,056 IJM23US
    PO7941 6,290,861 IJM24US
    PO8077 6,248,248 IJM25US
    PO8058 6,306,671 IJM26US
    PO8051 6,331,258 IJM27US
    PO8045 6,110,754 IJM28US
    PO7952 6,294,101 IJM29US
    PO8046 6,416,679 IJM30US
    PO9390 6,264,849 IJM31US
    PO9392 6,254,793 IJM32US
    PP0889 6,235,211 IJM35US
    PP0887 6,491,833 IJM36US
    PP0882 6,264,850 IJM37US
    PP0874 6,258,284 IJM38US
    PP1396 6,312,615 IJM39US
    PP3989 6,228,668 IJM40US
    PP2591 6,180,427 IJM41US
    PP3990 6,171,875 IJM42US
    PP3986 6,267,904 IJM43US
    PP3984 6,245,247 IJM44US
    PP3982 6,315,914 IJM45US
    PP0895 6,231,148 IR01US
    PP0869 6,293,658 IR04US
    PP0887 6,614,560 IR05US
    PP0885 6,238,033 IR06US
    PP0884 6,312,070 IR10US
    PP0886 6,238,111 IR12US
    PP0877 6,378,970 IR16US
    PP0878 6,196,739 IR17US
    PP0883 6,270,182 IR19US
    PP0880 6,152,619 IR20US
    PO8006 6,087,638 MEMS02US
    PO8007 6,340,222 MEMS03US
    PO8010 6,041,600 MEMS05US
    PO8011 6,299,300 MEMS06US
    PO7947 6,067,797 MEMS07US
    PO7944 6,286,935 MEMS09US
    PO7946 6,044,646 MEMS10US
    PP0894 6,382,769 MEMS13US
  • TECHNICAL FIELD
  • [0002]
    The present invention relates to the field of inkjet printing and, in particular, discloses an inverted radial back-curling thermoelastic ink jet printing mechanism.
  • BACKGROUND
  • [0003]
    Many different types of printing mechanisms have been invented, a large number of which are presently in use. The known forms of printers have a variety of methods for marking the print media with a relevant marking media. Commonly used forms of printing include offset printing, laser printing and copying devices, dot matrix type impact printers, thermal paper printers, film recorders, thermal wax printers, dye sublimation printers and ink jet printers both of the drop on demand and continuous flow type. Each type of printer has its own advantages and problems when considering cost, speed, quality, reliability, simplicity of construction and operation etc.
  • [0004]
    In recent years the field of ink jet printing, wherein each individual pixel of ink is derived from one or more ink nozzles, has become increasingly popular primarily due to its inexpensive and versatile nature.
  • [0005]
    Many different techniques of ink jet printing have been invented. For a survey of the field, reference is made to an article by J Moore, “Non-Impact Printing: Introduction and Historical Perspective”, Output Hard Copy Devices, Editors R Dubeck and S Sherr, pages 207-220 (1988).
  • [0006]
    Ink Jet printers themselves come in many different forms. The utilization of a continuous stream of ink in ink jet printing appears to date back to at least 1929 wherein U.S. Pat. No. 1,941,001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.
  • [0007]
    U.S. Pat. No. 3,596,275 by Sweet also discloses a process of a continuous ink jet printing including a step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also U.S. Pat. No. 3,373,437 by Sweet et al).
  • [0008]
    Piezoelectric ink jet printers are also one form of commonly utilized ink jet printing device. Piezoelectric systems are disclosed by Kyser et. al. in U.S. Pat. No. 3,946,398 (1970) which utilizes a diaphragm mode of operation, by Zolten in U.S. Pat. No. 3,683,212 (1970) which discloses a squeeze mode form of operation of a piezoelectric crystal, Stemme in U.S. Pat. No. 3,747,120 (1972) which discloses a bend mode of piezoelectric operation, Howkins in U.S. Pat. No. 4,459,601 which discloses a piezoelectric push mode actuation of the ink jet stream and Fischbeck in U.S. Pat. No. 4,584,590 which discloses a shear mode type of piezoelectric transducer element.
  • [0009]
    Recently, thermal ink jet printing has become an extremely popular form of ink jet printing. The ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in U.S. Pat. No. 4,490,728. Both the aforementioned references disclose ink jet printing techniques which rely on the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media. Printing devices utilizing the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • [0010]
    As can be seen from the foregoing, many different types of printing technologies are available. Ideally, a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction and operation, durability and consumables.
  • SUMMARY
  • [0011]
    According to an aspect of the present disclosure, a micro-electromechanical nozzle arrangement for an inkjet printhead includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry; a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber; a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and a central arm which having metal and PTFE portions to provide structural support for the actuators.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • [0012]
    Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:
  • [0013]
    FIGS. 1-3 are schematic sectional views illustrating the operational principles of the preferred embodiment;
  • [0014]
    FIG. 4( a) and FIG. 4( b) are again schematic sections illustrating the operational principles of the thermal actuator device;
  • [0015]
    FIG. 5 is a side perspective view, partly in section, of a single nozzle arrangement constructed in accordance with the preferred embodiments;
  • [0016]
    FIGS. 6-13 are side perspective views, partly in section, illustrating the manufacturing steps of the preferred embodiments;
  • [0017]
    FIG. 14 illustrates an array of ink jet nozzles formed in accordance with the manufacturing procedures of the preferred embodiment;
  • [0018]
    FIG. 15 provides a legend of the materials indicated in FIGS. 16 to 23; and
  • [0019]
    FIG. 16 to FIG. 23 illustrate sectional views of the manufacturing steps in one form of construction of a nozzle arrangement in accordance with the invention.
  • DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS
  • [0020]
    In the preferred embodiment, ink is ejected out of a nozzle chamber via an ink ejection port using a series of radially positioned thermal actuator devices that are arranged about the ink ejection port and are activated to pressurize the ink within the nozzle chamber thereby causing the ejection of ink through the ejection port.
  • [0021]
    Turning now to FIGS. 1, 2 and 3, there is illustrated the basic operational principles of the preferred embodiment. FIG. 1 illustrates a single nozzle arrangement 1 in its quiescent state. The arrangement 1 includes a nozzle chamber 2 which is normally filled with ink so as to form a meniscus 3 in an ink ejection port 4. The nozzle chamber 2 is formed within a wafer 5. The nozzle chamber 2 is supplied with ink via an ink supply channel 6 which is etched through the wafer 5 with a highly isotropic plasma etching system. A suitable etcher can be the Advance Silicon Etch (ASE) system available from Surface Technology Systems of the United Kingdom.
  • [0022]
    A top of the nozzle arrangement 1 includes a series of radially positioned actuators 8, 9. These actuators comprise a polytetrafluoroethylene (PTFE) layer and an internal serpentine copper core 17. Upon heating of the copper core 17, the surrounding PTFE expands rapidly resulting in a generally downward movement of the actuators 8, 9. Hence, when it is desired to eject ink from the ink ejection port 4, a current is passed through the actuators 8, 9 which results in them bending generally downwards as illustrated in FIG. 2. The downward bending movement of the actuators 8, 9 results in a substantial increase in pressure within the nozzle chamber 2. The increase in pressure in the nozzle chamber 2 results in an expansion of the meniscus 3 as illustrated in FIG. 2.
  • [0023]
    The actuators 8, 9 are activated only briefly and subsequently deactivated. Consequently, the situation is as illustrated in FIG. 3 with the actuators 8, 9 returning to their original positions. This results in a general inflow of ink back into the nozzle chamber 2 and a necking and breaking of the meniscus 3 resulting in the ejection of a drop 12. The necking and breaking of the meniscus 3 is a consequence of the forward momentum of the ink associated with drop 12 and the backward pressure experienced as a result of the return of the actuators 8, 9 to their original positions. The return of the actuators 8,9 also results in a general inflow of ink from the channel 6 as a result of surface tension effects and, eventually, the state returns to the quiescent position as illustrated in FIG. 1.
  • [0024]
    FIGS. 4( a) and 4(b) illustrate the principle of operation of the thermal actuator. The thermal actuator is preferably constructed from a material 14 having a high coefficient of thermal expansion. Embedded within the material 14 are a series of heater elements 15 which can be a series of conductive elements designed to carry a current. The conductive elements 15 are heated by passing a current through the elements 15 with the heating resulting in a general increase in temperature in the area around the heating elements 15. The position of the elements 15 is such that uneven heating of the material 14 occurs. The uneven increase in temperature causes a corresponding uneven expansion of the material 14. Hence, as illustrated in FIG. 4( b), the PTFE is bent generally in the direction shown.
  • [0025]
    In FIG. 5, there is illustrated a side perspective view of one embodiment of a nozzle arrangement constructed in accordance with the principles previously outlined. The nozzle chamber 2 is formed with an isotropic surface etch of the wafer 5. The wafer 5 can include a CMOS layer including all the required power and drive circuits. Further, the actuators 8, 9 each have a leaf or petal formation which extends towards a nozzle rim 28 defining the ejection port 4. The normally inner end of each leaf or petal formation is displaceable with respect to the nozzle rim 28. Each activator 8, 9 has an internal copper core 17 defining the element 15. The core 17 winds in a serpentine manner to provide for substantially unhindered expansion of the actuators 8, 9. The operation of the actuators 8, 9 is as illustrated in FIG. 4( a) and FIG. 4( b) such that, upon activation, the actuators 8 bend as previously described resulting in a displacement of each petal formation away from the nozzle rim 28 and into the nozzle chamber 2. The ink supply channel 6 can be created via a deep silicon back edge of the wafer 5 utilizing a plasma etcher or the like. The copper or aluminium core 17 can provide a complete circuit. A central arm 18 which can include both metal and PTFE portions provides the main structural support for the actuators 8, 9.
  • [0026]
    Turning now to FIG. 6 to FIG. 13, one form of manufacture of the nozzle arrangement 1 in accordance with the principles of the preferred embodiment is shown. The nozzle arrangement 1 is preferably manufactured using microelectromechanical (MEMS) techniques and can include the following construction techniques:
  • [0027]
    As shown initially in FIG. 6, the initial processing starting material is a standard semi-conductor wafer 20 having a complete CMOS level 21 to a first level of metal. The first level of metal includes portions 22 which are utilized for providing power to the thermal actuators 8, 9.
  • [0028]
    The first step, as illustrated in FIG. 7, is to etch a nozzle region down to the silicon wafer 20 utilizing an appropriate mask.
  • [0029]
    Next, as illustrated in FIG. 8, a 2 μm layer of polytetrafluoroethylene (PTFE) is deposited and etched so as to define vias 24 for interconnecting multiple levels.
  • [0030]
    Next, as illustrated in FIG. 9, the second level metal layer is deposited, masked and etched to define a heater structure 25. The heater structure 25 includes via 26 interconnected with a lower aluminium layer.
  • [0031]
    Next, as illustrated in FIG. 10, a further 2 μm layer of PTFE is deposited and etched to the depth of 1 μm utilizing a nozzle rim mask to define the nozzle rim 28 in addition to ink flow guide rails 29 which generally restrain any wicking along the surface of the PTFE layer. The guide rails 29 surround small thin slots and, as such, surface tension effects are a lot higher around these slots which in turn results in minimal outflow of ink during operation.
  • [0032]
    Next, as illustrated in FIG. 11, the PTFE is etched utilizing a nozzle and actuator mask to define a port portion 30 and slots 31 and 32.
  • [0033]
    Next, as illustrated in FIG. 12, the wafer is crystallographically etched on a <111> plane utilizing a standard crystallographic etchant such as KOH. The etching forms a chamber 33, directly below the port portion 30.
  • [0034]
    In FIG. 13, the ink supply channel 34 can be etched from the back of the wafer utilizing a highly anisotropic etcher such as the STS etcher from Silicon Technology Systems of United Kingdom. An array of ink jet nozzles can be formed simultaneously with a portion of an array 36 being illustrated in FIG. 14. A portion of the printhead is formed simultaneously and diced by the STS etching process. The array 36 shown provides for four column printing with each separate column attached to a different colour ink supply channel being supplied from the back of the wafer. Bond pads 37 provide for electrical control of the ejection mechanism.
  • [0035]
    In this manner, large pagewidth printheads can be fabricated so as to provide for a drop-on-demand ink ejection mechanism.
  • [0036]
    One form of detailed manufacturing process which can be used to fabricate monolithic ink jet printheads operating in accordance with the principles taught by the present embodiment can proceed utilizing the following steps:
      • 1. Using a double-sided polished wafer 60, complete a 0.5 micron, one poly, 2 metal CMOS process 61. This step is shown in FIG. 16. For clarity, these diagrams may not be to scale, and may not represent a cross section though any single plane of the nozzle. FIG. 15 is a key to representations of various materials in these manufacturing diagrams, and those of other cross referenced ink jet configurations.
      • 2. Etch the CMOS oxide layers down to silicon or second level metal using Mask 1. This mask defines the nozzle cavity and the edge of the chips. This step is shown in FIG. 16.
      • 3. Deposit a thin layer (not shown) of a hydrophilic polymer, and treat the surface of this polymer for PTFE adherence.
      • 4. Deposit 1.5 microns of polytetrafluoroethylene (PTFE) 62.
      • 5. Etch the PTFE and CMOS oxide layers to second level metal using Mask 2. This mask defines the contact vias for the heater electrodes. This step is shown in FIG. 17.
      • 6. Deposit and pattern 0.5 microns of gold 63 using a lift-off process using Mask 3. This mask defines the heater pattern. This step is shown in FIG. 18.
      • 7. Deposit 1.5 microns of PTFE 64.
      • 8. Etch 1 micron of PTFE using Mask 4. This mask defines the nozzle rim 65 and the rim at the edge 66 of the nozzle chamber. This step is shown in FIG. 19.
      • 9. Etch both layers of PTFE and the thin hydrophilic layer down to silicon using Mask 5. This mask defines a gap 67 at inner edges of the actuators, and the edge of the chips. It also forms the mask for a subsequent crystallographic etch. This step is shown in FIG. 20.
      • 10. Crystallographically etch the exposed silicon using KOH. This etch stops on <111> crystallographic planes 68, forming an inverted square pyramid with sidewall angles of 54.74 degrees. This step is shown in FIG. 21.
      • 11. Back-etch through the silicon wafer (with, for example, an ASE Advanced Silicon Etcher from Surface Technology Systems) using Mask 6. This mask defines the ink inlets 69 which are etched through the wafer. The wafer is also diced by this etch. This step is shown in FIG. 22.
      • 12. Mount the printheads in their packaging, which may be a molded plastic former incorporating ink channels which supply the appropriate color ink to the ink inlets 69 at the back of the wafer.
      • 13. Connect the printheads to their interconnect systems. For a low profile connection with minimum disruption of airflow, TAB may be used. Wire bonding may also be used if the printer is to be operated with sufficient clearance to the paper.
      • 14. Fill the completed print heads with ink 70 and test them. A filled nozzle is shown in FIG. 23.
  • [0051]
    The presently disclosed ink jet printing technology is potentially suited to a wide range of printing systems including: color and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable color and monochrome printers, color and monochrome copiers, color and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic “minilabs”, video printers, PHOTO CD (PHOTO CD is a registered trade mark of the Eastman Kodak Company) printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
  • [0052]
    It would be appreciated by a person skilled in the art that numerous variations and/or modifications may be made to the present invention as shown in the specific embodiments without departing from the spirit or scope of the invention as broadly described. The present embodiments are, therefore, to be considered in all respects to be illustrative and not restrictive.
Citas de patentes
Patente citada Fecha de presentación Fecha de publicación Solicitante Título
US4007464 *23 Ene 19758 Feb 1977International Business Machines CorporationInk jet nozzle
US4053807 *31 Mar 197611 Oct 1977Sony CorporationThermionic cathode and heater structure on ceramic base plate
US4350989 *13 Mar 198021 Sep 1982Hitachi, Ltd.Ink-jet printing apparatus
US4370662 *2 Dic 198025 Ene 1983Ricoh Company, Ltd.Ink jet array ultrasonic simulation
US4456804 *13 Jul 198226 Jun 1984Campbell Soup CompanyMethod and apparatus for application of paint to metal substrates
US4458255 *12 Mar 19823 Jul 1984Hewlett-Packard CompanyApparatus for capping an ink jet print head
US4553393 *26 Ago 198319 Nov 1985The United States Of America As Represented By The Administrator Of The National Aeronautics And Space AdministrationMemory metal actuator
US4575619 *8 May 198411 Mar 1986General Signal CorporationElectrical heating unit with serpentine heating element
US4665307 *7 Sep 198412 May 1987Micropore International LimitedThermal cut-out device for radiant heaters
US4672398 *31 Oct 19859 Jun 1987Hitachi Ltd.Ink droplet expelling apparatus
US4696319 *18 Nov 198529 Sep 1987Martin GantMoisture-actuated apparatus for controlling the flow of water
US4728392 *27 Sep 19851 Mar 1988Matsushita Electric Industrial Co., Ltd.Ink jet printer and method for fabricating a nozzle member
US4737802 *20 Dic 198512 Abr 1988Swedot System AbFluid jet printing device
US4812792 *1 May 198714 Mar 1989Trw Inc.High-frequency multilayer printed circuit board
US4855567 *15 Ene 19888 Ago 1989Rytec CorporationFrost control system for high-speed horizontal folding doors
US4864824 *31 Oct 198812 Sep 1989American Telephone And Telegraph Company, At&T Bell LaboratoriesThin film shape memory alloy and method for producing
US5029805 *7 Abr 19899 Jul 1991Dragerwerk AktiengesellschaftValve arrangement of microstructured components
US5113204 *19 Abr 199012 May 1992Seiko Epson CorporationInk jet head
US5258774 *14 Feb 19922 Nov 1993Dataproducts CorporationCompensation for aerodynamic influences in ink jet apparatuses having ink jet chambers utilizing a plurality of orifices
US5317869 *21 May 19937 Jun 1994Nippondenso Co., Ltd.Honeycomb heater
US5387314 *25 Ene 19937 Feb 1995Hewlett-Packard CompanyFabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
US5397628 *12 Ene 199414 Mar 1995W. L. Gore & Associates, Inc.Laminated, air impermeable cellular rubber, body protection material with porous, expanded polytetrafluoroethylene layer
US5447442 *23 Sep 19935 Sep 1995Everettt Charles Technologies, Inc.Compliant electrical connectors
US5459501 *1 Feb 199317 Oct 1995At&T Global Information Solutions CompanySolid-state ink-jet print head
US5519191 *30 Oct 199221 May 1996Corning IncorporatedFluid heater utilizing laminar heating element having conductive layer bonded to flexible ceramic foil substrate
US5612723 *8 Mar 199418 Mar 1997Fujitsu LimitedUltrasonic printer
US5666141 *8 Jul 19949 Sep 1997Sharp Kabushiki KaishaInk jet head and a method of manufacturing thereof
US5684519 *31 Mar 19954 Nov 1997Sharp Kabushiki KaishaInk jet head with buckling structure body
US5719604 *31 Jul 199517 Feb 1998Sharp Kabushiki KaishaDiaphragm type ink jet head having a high degree of integration and a high ink discharge efficiency
US5726693 *22 Jul 199610 Mar 1998Eastman Kodak CompanyInk printing apparatus using ink surfactants
US5804083 *28 May 19968 Sep 1998Sharp Kabushiki KaishaMethod of forming a microstructure
US5812159 *22 Jul 199622 Sep 1998Eastman Kodak CompanyInk printing apparatus with improved heater
US5828394 *20 Sep 199527 Oct 1998The Board Of Trustees Of The Leland Stanford Junior UniversityFluid drop ejector and method
US5838351 *26 Oct 199517 Nov 1998Hewlett-Packard CompanyValve assembly for controlling fluid flow within an ink-jet pen
US5883650 *6 Dic 199516 Mar 1999Hewlett-Packard CompanyThin-film printhead device for an ink-jet printer
US5889541 *9 Oct 199630 Mar 1999Xerox CorporationTwo-dimensional print cell array apparatus and method for delivery of toner for printing images
US5896155 *28 Feb 199720 Abr 1999Eastman Kodak CompanyInk transfer printing apparatus with drop volume adjustment
US5903380 *1 May 199711 May 1999Rockwell International Corp.Micro-electromechanical (MEM) optical resonator and method
US6019457 *6 Dic 19941 Feb 2000Canon Information Systems Research Australia Pty Ltd.Ink jet print device and print head or print apparatus using the same
US6022482 *4 Ago 19978 Feb 2000Xerox CorporationMonolithic ink jet printhead
US6041600 *10 Jul 199828 Mar 2000Silverbrook Research Pty. LtdUtilization of quantum wires in MEMS actuators
US6067797 *10 Jul 199830 May 2000Silverbrook Research Pty, Ltd.Thermal actuator
US6174050 *23 Jul 199916 Ene 2001Canon Kabushiki KaishaLiquid ejection head with a heat generating surface that is substantially flush and/or smoothly continuous with a surface upstream thereto
US6188415 *10 Jul 199813 Feb 2001Silverbrook Research Pty LtdInk jet printer having a thermal actuator comprising an external coil spring
US6213589 *10 Jul 199810 Abr 2001Silverbrook Research Pty Ltd.Planar thermoelastic bend actuator ink jet printing mechanism
US6241906 *10 Jul 19985 Jun 2001Silverbrook Research Pty Ltd.Method of manufacture of a buckle strip grill oscillating pressure ink jet printer
US6247790 *10 Jul 199819 Jun 2001Silverbrook Research Pty LtdInverted radial back-curling thermoelastic ink jet printing mechanism
US6267904 *10 Jul 199831 Jul 2001Skyerbrook Research Pty LtdMethod of manufacture of an inverted radial back-curling thermoelastic ink jet
US6283582 *10 Jul 19984 Sep 2001Silverbrook Research Pty LtdIris motion ink jet printing mechanism
US6416167 *10 Jul 19989 Jul 2002Silverbrook Research Pty LtdThermally actuated ink jet printing mechanism having a series of thermal actuator units
US6505912 *14 May 200114 Ene 2003Silverbrook Research Pty LtdInk jet nozzle arrangement
US6561627 *30 Nov 200013 May 2003Eastman Kodak CompanyThermal actuator
US6644786 *8 Jul 200211 Nov 2003Eastman Kodak CompanyMethod of manufacturing a thermally actuated liquid control device
US6652052 *12 Abr 200225 Nov 2003Silverbrook Research Pty LtdProcessing of images for high volume pagewidth printing
US6682174 *28 Jun 200227 Ene 2004Silverbrook Research Pty LtdInk jet nozzle arrangement configuration
US6685303 *14 Ago 20023 Feb 2004Eastman Kodak CompanyThermal actuator with reduced temperature extreme and method of operating same
US6866369 *4 Mar 200415 Mar 2005Silverbrook Research Pty LtdPrinter with inkjet printhead having overlapping actuator and drive circuitry
US6874866 *23 Nov 20025 Abr 2005Silverbrook Research Pty LtdInk jet nozzle having an actuator mechanism with a movable member controlled by two actuators
US6880918 *17 Nov 200319 Abr 2005Silverbrook Research Pty LtdMicro-electromechanical device that incorporates a motion-transmitting structure
US6886917 *8 Ago 20033 May 2005Silverbrook Research Pty LtdInkjet printhead nozzle with ribbed wall actuator
US7077508 *12 Dic 200518 Jul 2006Silverbrook Research Pty LtdMicro-electromechanical liquid ejection device with a thermal actuator that undergoes rectilinear motion
US7086709 *17 Nov 20038 Ago 2006Silverbrook Research Pty LtdPrint engine controller for high volume pagewidth printing
US7134740 *13 Oct 200414 Nov 2006Silverbrook Research Pty LtdPagewidth inkjet printhead assembly with actuator drive circuitry
US7134745 *9 Feb 200414 Nov 2006Silverbrook Research Pty LtdThermal ink jet printhead with low resistance connection to heater
US7156494 *2 Dic 20042 Ene 2007Silverbrook Research Pty LtdInkjet printhead chip with volume-reduction actuation
US7156495 *18 Ene 20052 Ene 2007Silverbrook Research Pty LtdInk jet printhead having nozzle arrangement with flexible wall actuator
US7179395 *8 Dic 200320 Feb 2007Silverbrook Research Pty LtdMethod of fabricating an ink jet printhead chip having actuator mechanisms located about ejection ports
US7182436 *12 Ago 200527 Feb 2007Silverbrook Research Pty LtdInk jet printhead chip with volumetric ink ejection mechanisms
US7188933 *3 Ene 200513 Mar 2007Silverbrook Research Pty LtdPrinthead chip that incorporates nozzle chamber reduction mechanisms
US7246883 *13 Jun 200224 Jul 2007Silverbrook Research Pty LtdMotion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
US7264335 *17 Nov 20034 Sep 2007Silverbrook Research Pty LtdInk jet printhead with conformally coated heater
US7287834 *14 Sep 200630 Oct 2007Silverbrook Research Pty LtdMicro-electromechanical ink ejection device with an elongate actuator
US7322679 *18 Jun 200729 Ene 2008Silverbrook Research Pty LtdInkjet nozzle arrangement with thermal bend actuator capable of differential thermal expansion
US7364271 *29 May 200729 Abr 2008Silverbrook Research Pty LtdNozzle arrangement with inlet covering cantilevered actuator
US7401902 *17 Jul 200722 Jul 2008Silverbrook Research Pty LtdInkjet nozzle arrangement incorporating a thermal bend actuator with an ink ejection paddle
US7407261 *9 Ene 20045 Ago 2008Silverbrook Research Pty LtdImage processing apparatus for a printing mechanism of a wide format pagewidth inkjet printer
US7438391 *27 Dic 200721 Oct 2008Silverbrook Research Pty LtdMicro-electromechanical nozzle arrangement with non-wicking roof structure for an inkjet printhead
US7506965 *24 Sep 200724 Mar 2009Silverbrook Research Pty LtdInkjet printhead integrated circuit with work transmitting structures
US7520594 *22 Sep 200621 Abr 2009Silverbrook Research Pty LtdInkjet printer with heater that forms symmetrical bubbles
US7533967 *15 Feb 200719 May 2009Silverbrook Research Pty LtdNozzle arrangement for an inkjet printer with multiple actuator devices
US7549731 *15 Jun 200823 Jun 2009Silverbrook Research Pty LtdInkjet printer having a printhead with a bi-layer thermal actuator coil
US7556355 *5 Jun 20077 Jul 2009Silverbrook Research Pty LtdInkjet nozzle arrangement with electro-thermally actuated lever arm
US7566114 *13 Jun 200828 Jul 2009Silverbrook Research Pty LtdInkjet printer with a pagewidth printhead having nozzle arrangements with an actuating arm having particular dimension proportions
US7568791 *21 Ene 20084 Ago 2009Silverbrook Research Pty LtdNozzle arrangement with a top wall portion having etchant holes therein
US7641314 *16 Ene 20085 Ene 2010Silverbrook Research Pty LtdPrinthead micro-electromechanical nozzle arrangement with a motion-transmitting structure
US7641315 *22 Ago 20085 Ene 2010Silverbrook Research Pty LtdPrinthead with reciprocating cantilevered thermal actuators
US7669973 *24 Nov 20082 Mar 2010Silverbrook Research Pty LtdPrinthead having nozzle arrangements with radial actuators
US7753463 *14 Jun 200213 Jul 2010Silverbrook Research Pty LtdProcessing of images for high volume pagewidth printing
US7753485 *16 Ago 200713 Jul 2010Silverbrook Research Pty LtdInk ejection nozzle with oscillator and shutter arrangement
US7753490 *2 May 200713 Jul 2010Silverbrook Research Pty LtdPrinthead with ejection orifice in flexible element
US7866797 *10 Feb 200911 Ene 2011Silverbrook Research Pty LtdInkjet printhead integrated circuit
US7891779 *9 Jul 200922 Feb 2011Silverbrook Research Pty LtdInkjet printhead with nozzle layer defining etchant holes
US7901041 *17 Nov 20088 Mar 2011Silverbrook Research Pty LtdNozzle arrangement with an actuator having iris vanes
US7901048 *31 May 20098 Mar 2011Silverbrook Research Pty LtdInkjet printhead with thermal actuator coil
US7901049 *5 Jul 20098 Mar 2011Kia SilverbrookInkjet printhead having proportional ejection ports and arms
US7922293 *17 Nov 200812 Abr 2011Silverbrook Research Pty LtdPrinthead having nozzle arrangements with magnetic paddle actuators
US7950777 *16 Ago 201031 May 2011Silverbrook Research Pty LtdEjection nozzle assembly
US7950779 *15 Nov 200931 May 2011Silverbrook Research Pty LtdInkjet printhead with heaters suspended by sloped sections of less resistance
US20020089695 *27 Ago 199711 Jul 2002Tsutomu KubotaPrint control apparatus and method and storage medium
Clasificaciones
Clasificación de EE.UU.347/63
Clasificación internacionalB41J2/04, B41J2/175, B41J2/05, B41J2/14, B41J2/16
Clasificación cooperativaY10T29/49401, Y10T29/4913, B41J2/1648, B41J2/1639, B41J2/1642, B41J2/1631, B41J2/1623, B41J2/1632, B41J2/17596, B41J2/1635, B41J2/14427, B41J2/16, B41J2/1629, B41J2/14, B41J2/1628, B41J2202/15, B41J2002/14475, Y10T29/49155, B41J2/1637, Y10T29/49128, Y10T29/49156, B41J2002/14435, B41J2002/041, B41J2/1433, B41J2002/14346
Clasificación europeaB41J2/16M1, B41J2/14G, B41J2/16M7S, B41J2/16S, B41J2/16M6, B41J2/14S, B41J2/16M4, B41J2/16M7, B41J2/16M8C, B41J2/14, B41J2/16M5, B41J2/16, B41J2/16M3W, B41J2/175P, B41J2/16M3D
Eventos legales
FechaCódigoEventoDescripción
13 Jul 2010ASAssignment
Owner name: SILVERBROOK RESEARCH PTY LTD, AUSTRALIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SILVERBROOK, KIA;MCAVOY, GREGORY JOHN;REEL/FRAME:024669/0026
Effective date: 20080806