US20100304540A1 - Semiconductor device and method of forming the same - Google Patents
Semiconductor device and method of forming the same Download PDFInfo
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- US20100304540A1 US20100304540A1 US12/855,371 US85537110A US2010304540A1 US 20100304540 A1 US20100304540 A1 US 20100304540A1 US 85537110 A US85537110 A US 85537110A US 2010304540 A1 US2010304540 A1 US 2010304540A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 239000010410 layer Substances 0.000 claims description 194
- 125000006850 spacer group Chemical group 0.000 claims description 132
- 238000009413 insulation Methods 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 47
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 19
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims description 13
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- 239000011229 interlayer Substances 0.000 claims description 5
- 239000012535 impurity Substances 0.000 description 17
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- 238000000206 photolithography Methods 0.000 description 6
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- 238000010586 diagram Methods 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
- H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/90—MOSFET type gate sidewall insulating spacer
Definitions
- the present invention relates to a semiconductor device and a method of forming the same, and more particularly, to a nonvolatile memory device and a method of forming the same. Further, the invention relates to an electrically erasable and programmable read only memory (EEPROM) device in various types of non-volatile memory devices retaining data even when a power source is cut off, and a method of forming the same.
- EEPROM electrically erasable and programmable read only memory
- the semiconductor memory device can be largely classified into a random access memory (RAM) and a read only memory (ROM).
- the RAM is a volatile memory device in which stored data disappears when a power supply is interrupted.
- the ROM is a nonvolatile memory device in which stored data is retained even if the power supply is interrupted.
- the ROM includes an EEPROM device capable of electrically programming and erasing information.
- FIG. 1 is a sectional view of a related art EEPROM in which a unit cell includes a non-volatile memory device and a selection device.
- a memory device 20 and a selection device 30 have stacked gate structures 19 a and 19 b , respectively. That is, the stacked gate structure 19 a of the memory device 20 includes a floating gate 14 a , an inter-gate insulation layer 16 a , and a control gate 18 a sequentially stacked on a substrate 10 having a silicon oxide layer 22 formed thereon.
- the stacked gate structure 19 b of the selection device 30 includes a bottom electrode 14 b , an inter-gate insulation layer 16 b , and a top electrode 18 b sequentially stacked on the substrate 10 having the silicon oxide layer 22 .
- the top electrode 18 b and the bottom electrode 14 b are electrically connected to each other by a butting contact.
- a floating junction 24 is formed in the substrate 10 between the stacked gate structure 19 a of the memory device 20 and the stacked gate structure 19 b of the selection device 30 to connect the memory device 20 and the selection device 30 .
- a drain region 13 of the memory device 20 is formed as a bit line junction at a side of the stacked gate structure 19 a opposite to the floating junction 24 . Additionally, a source region 12 is formed as a source junction of the selection device 30 at a side of the stacked gate structure 19 b opposite to the floating junction 24 .
- programming and erasing may be performed using Fowler-Nordheim (FN) tunneling.
- the selection device 30 is formed to select a memory device or to prevent over-erasing of the memory device.
- a silicon oxide layer, a polysilicon layer, an inter-gate insulation layer, and a polysilicon layer are sequentially stacked on the substrate 10 .
- photolithography is performed to form the stacked gate structures 19 a and 19 b , which are spaced apart from each other.
- An ion implantation process is performed to form the floating junction 24 between the stacked gate structures 19 a and 19 b , and to form the drain region 13 and the source region 12 outside the stacked gate structure.
- the distance between the memory device 20 and the selection device 30 is determined by the resolution of photolithography equipment. Accordingly, there is a limitation in reducing a unit cell size. Additionally, unlike in the stacked gate structure 19 a of the memory device 20 , it is necessary to connect electrically the bottom electrode 14 b and the top electrode 18 b in the stacked gate structure 19 b of the selection device 30 . To accomplish this, a butting contact process is required which limits reducing the chip size and complicates the overall fabrication.
- Exemplary embodiments of the present invention provide a semiconductor device of which size can be reduced by a self-alignment method, and a method of forming the same.
- Exemplary embodiments of the present invention also provide a semiconductor device having a gate of the selection device formed by the self-alignment method, and a method of forming the same.
- Exemplary embodiments of the present invention also provide an EEPROM in which a unit cell includes one non-volatile memory device and at least one selection device.
- the present invention is directed to a semiconductor device comprising a non-volatile memory device formed on a substrate, a first selection device formed on the substrate at one side of the non-volatile memory device, and a floating junction formed in the substrate between the non-volatile memory device and the first selection device.
- a gate of the first selection device is formed of a single-layered conductive layer.
- the non-volatile memory device comprises a stacked gate structure having a floating gate, a control gate, and an insulation layer formed between the floating gate and the control gate.
- the floating gate of the non-volatile memory device and the gate of the first selection device are formed of the same material.
- the device further comprises a drain formed in the substrate outside the non-volatile memory device opposite to the floating junction, and a source formed in the substrate outside the first selection device opposite to the floating junction.
- the insulation layer of the non-volatile memory device comprises a silicon oxide layer, a silicon nitride layer, or a silicon oxide layer.
- the device further comprises a spacer formed on one sidewall of the stacked gate structure in the non-volatile memory device adjacent to the gate of the first selection device, covering the floating junction and extending toward a sidewall of the gate in the first selection device.
- the device further comprises a second spacer formed on the other sidewall in the gate of the first selection device opposite to the spacer, the spacer formed on the one sidewall of the non-volatile memory device having a height higher than that of the second spacer formed on the other sidewall.
- a drain of the non-volatile memory device is connected to a bit line and a source of the selection device is electrically connected to a common source line.
- the gate of the first selection device and the floating gate of the stacked gate structure of the non-volatile memory device are formed of the same material and have a substantially identical height.
- the device further comprises an oxide layer between the spacer and the stacked gate structure of the non-volatile memory device.
- the device further comprises: a second selection device formed on the substrate at the other side of the non-volatile memory device, and including a gate formed of a single-layered conductive layer; and a second floating junction formed on the substrate between the gate of the second selection device and the non-volatile memory device.
- the device further comprises a first spacer formed on sidewalls of the stacked gate structure in the non-volatile memory device, covering the first and second floating junction; and a second spacer formed on a sidewall of the first and second selection devices having a height lower than that of the first spacer.
- the present invention is directed to a method of forming a semiconductor device comprising forming a first conductive layer pattern on a substrate, forming a stacked pattern including an inter-gate insulation layer pattern and a second conductive layer pattern on the first conductive layer pattern, forming a mask insulation layer pattern on the first conductive layer pattern spaced apart from the stacked pattern, removing the first conductive layer pattern outside the stacked pattern and the mask insulation layer pattern to form a floating gate below the stacked pattern and to form a selection gate below the mask insulation layer pattern, and forming a floating junction on the substrate between the floating gate and the selection gate.
- the forming of the mask insulation layer comprises: forming a spacer on at least one sidewall of the stacked pattern; forming the mask insulation layer pattern on the first conductive layer pattern exposed outside the spacer; and removing the spacer.
- the forming of the spacer on at least one sidewall of the stacked pattern comprises: forming an insulation layer for the spacer; forming a photoresist pattern exposing a sidewall of the stacked pattern with the spacer thereon; and etching the insulation layer for a spacer exposed by the photoresist pattern.
- the forming of the spacer on at least one sidewall of the stacked pattern comprises: forming an insulation layer for the spacer; and etching the insulation layer for the spacer, and the spacer is formed on both sidewalls of the stacked pattern, the selection gate is formed on the substrate in both sides of the floating gate, the floating junction is formed between the floating gate and the selection gates on both sides of the floating gate.
- the forming of the spacer on at least one sidewall of the stacked pattern comprises: forming an insulation layer for the spacer; etching the insulation layer for a spacer to form spacers on both sidewalls of the stacked pattern; forming a mask pattern covering one of the spacers and exposing another spacer; removing the spacer exposed by the mask pattern; and removing the mask pattern.
- the method further comprises forming an oxide layer on the both sidewalls of the stacked pattern before the forming of the insulation for the spacer.
- the insulation layer for the spacer is formed of a silicon nitride layer.
- the method further comprises forming an oxide layer on the both sidewall of the stacked pattern before the forming the insulation layer for the spacer.
- the mask insulation layer pattern is formed using a thermal oxidation process on the first conductive layer pattern exposed outside the spacer.
- the method further comprises: forming a spacer on the stacked pattern and the selection gate sidewall after the forming of the impurity junction; and forming a drain on a sidewall of the stacked pattern not adjacent to the floating junction, and a source on a sidewall of the selection gate not adjacent to the floating junction through an ion implantation process, and the spacer in a stacked gate sidewall adjacent to the floating junction covers the floating junction, and is extended toward the selection gate sidewall.
- the method further comprises forming an oxide layer on both sidewalls of the stacked pattern before the forming of the spacer.
- the inter-layer insulation layer includes a silicon oxide layer, a silicon nitride layer, and a silicon oxide layer.
- the forming of the mask insulation layer pattern comprises performing a thermal oxidation process on the conductive layer pattern exposed outside the spacer.
- the spacer is formed on both sidewalls of the stacked pattern; the selection gate is formed on the substrate in both sides of the floating gate; and the floating junction region is formed between the floating gate and the selection gates in the both sides of the floating gate.
- the present invention is directed to a semiconductor device comprising a non-volatile memory device including a gate insulation layer, a floating gate, an inter-layer insulation layer, and a control gate on a substrate, a selection device formed at one side of the non-volatile memory device, a floating junction shared between the non-volatile memory device and the selection device, a first sidewall spacer formed on a sidewall of the non-volatile memory device, and a second sidewall spacer formed on a sidewall of the selection device and having a height lower than that of the first sidewall spacer.
- the selection device comprises a selection gate formed of a material identical to that of the floating gate of the memory device and having a height identical to that of the first sidewall spacer.
- the non-volatile memory device and the selection device further comprise a source and a drain.
- a drain of the non-volatile memory device is connected to the bit line and a source of the selection device is connected to a common source line.
- the device further comprises another selection device connected electrically to the common source line, and another non-volatile memory device with a drain connected electrically to the bit line.
- the device further comprises another selection device formed on the other side of the non-volatile memory device.
- FIG. 1 is a sectional view of a semiconductor with a non-volatile memory device and a selection device according to related art.
- FIG. 2 is a plan view of a semiconductor device in which a unit memory cell includes one memory device and one selection device according to an exemplary embodiment of the present invention.
- FIG. 3 is a sectional view taken along line I-I′ of FIG. 2 .
- FIG. 4 is a sectional view of a semiconductor device in which a unit memory cell includes two memory devices and one selection device according to an exemplary embodiment of the present invention.
- FIG. 5 is a circuit diagram of a memory array with a non-volatile memory device and a selection device according to an exemplary embodiment of the present invention.
- FIGS. 6 to 14 are sectional views illustrating a method of forming the semiconductor device of FIG. 3 according to an exemplary embodiment of the present invention.
- FIGS. 15 to 18 are sectional views illustrating a method of forming the semiconductor device of FIG. 4 according to an exemplary embodiment of the present invention.
- FIGS. 19 to 21 are sectional views illustrating a method of forming the semiconductor device of FIG. 3 according to an exemplary embodiment of the present invention.
- a self-align method may indicate that a layer is etched using a previously deposited material without an additional mask when the layer is patterned.
- FIG. 2 is a plan view of a semiconductor device in which a unit memory cell includes one memory device and one selection device according to an exemplary embodiment of the preset invention.
- FIG. 3 is a sectional view taken along line I-I′ of FIG. 2 .
- reference numerals 201 and 203 represent an active region and a device isolation region, respectively.
- a memory device 140 includes a stacked gate structure 109 , and a first impurity diffusion region 134 (or drain region) formed in a substrate 100 at one side of the stacked gate structure 109 .
- the stacked gate structure 109 of the memory device 140 includes a floating gate 104 p 2 , an inter-gate insulation layer 106 , and a control gate 108 , which are sequentially stacked on the substrate 100 having a gate insulation layer 102 thereon.
- a selection device 142 is formed of the same material as the floating gate 104 p 2 .
- the selection device 142 further includes a selection gate 104 p 3 with the same material and a substantially same thickness as the floating gate 104 p 2 and a second impurity diffusion region 136 (or source region) formed in the substrate 100 at one side of the selection gate 104 p 3 .
- the selection gate 104 p 3 of the selection device 142 is formed concurrently when the floating gate 104 p 2 of the memory device 140 is formed.
- the height of the selection gate 104 p 3 may be different from that of the floating gate 104 p 2 .
- the stacked gate structure 109 of the memory device 140 , and the selection gate 104 p 3 of the selection device 142 are spaced apart from each other.
- the distance therebetween can be determined by a spacer process, and have a width narrower than the minimum distance that can be defined by photolithography. Additionally, the distance between the stacked gate structure 109 and the selection gate 104 p 3 will be described in more detail with reference to FIGS. 6 to 14 .
- Spacers 130 p 1 , 130 p 2 , and 130 p 3 are disposed on sidewalls of the stacked gate structure 109 and the selection gate 104 p 3 .
- the spacer 130 p 1 and the spacer 130 p 3 are respectively disposed on one sidewall of the stacked gate structure 109 and one sidewall of the selection gate 104 p 3 opposite to each other.
- the spacer 130 p 2 is disposed on the other sidewall of the stacked gate structure 109 , and also extended toward the other sidewall of the selection gate 104 p 3 . That is, the spacer 130 p 2 is disposed between the other sidewall of the stacked gate structure 109 and the other sidewall of the selection gate 104 p 3 .
- the spacer 130 p 2 is disposed in the space between the stacked gate structure 109 and the selection gate 104 p 3 .
- the spaced distance between the stacked gate structure 109 and the selection gate 104 p 3 can be determined by the width of the spacer 130 p 2 .
- the spacers 130 p 1 and 13 - p 2 on the one and the other sidewalls of the stacked gate structure 109 have a height higher than that of the spacer 130 p 3 on the sidewall of the selection gate 104 p 3 .
- the floating junction 128 connecting the memory device 140 and the selection device 142 is formed on the substrate 100 between the stacked gate structure 109 and the selection gate 104 p 3 .
- the floating junction 128 is disposed below the spacer 130 p 2 .
- a first high concentration impurity region 134 serving as a drain region of the memory device 140 is formed on the substrate 100 outside the spacer 130 p 1 on one sidewall of the stacked gate structure 109 .
- a second high concentration second impurity region 136 serving as a source region of the selection device 142 is formed on the substrate 100 outside the spacer 130 p 3 on the other sidewall of the selection gate 104 p 3 .
- the first and second high concentration impurity region 134 and 136 serve as a drain and source of the unit memory cell.
- a first low concentration impurity region 124 is additionally disposed on the substrate 100 outside the stacked gate structure 109 , and also a second low concentration impurity region 126 is additionally disposed on the substrate 100 outside the selection gate 130 p 3 .
- the substrate 100 can be formed of a semiconductor silicon substrate or an organic compound that can be conductive using impurity.
- a hard mask 110 can be additionally disposed on the control gate 108 of the stacked gate structure 109 . Additionally, an insulation layer can be additionally disposed between the stacked gate structure 109 and the spacers 130 p 1 and 130 p 2 on the both sidewalls. Likewise, an insulation layer can be additionally disposed between the selection gate 130 p 3 and the spacer 130 p 3 on the one sidewall of the selection gate 130 p 3 .
- FIG. 4 is a sectional view of a semiconductor device in which a unit memory cell includes two memory devices and one selection device. Unlike the selection device of FIG. 3 , the unit memory cell of FIG. 4 includes the two selection devices.
- a memory device 140 is disposed between a first selection device 142 and a second selection device 144 . Moreover, the first selection device 142 and the second selection device 144 can be symmetrically disposed on both sides of the memory device 140 .
- the stacked gate structure of the memory device 140 and the selection gate structures of the selection devices 142 and 144 are identical to those of the semiconductor device as illustrated in FIGS. 2 and 3 .
- the spacers 130 p 1 and 130 p 2 are disposed on both sides of the stacked gate structure 109 in the memory device 140 . Additionally, the selection gate 104 p 4 of the second selection device 144 and the selection gate 104 p 3 of the first selection device 142 are, respectively, adjacent to the spacer 130 p 1 and the spacer 130 p 2 . A first floating junction 128 and a second floating junction 129 are, respectively, disposed between the stacked gate structure 109 and the selection gates 104 p 3 and 104 p 4 . The spacer 130 p 3 is disposed on a sidewall of the selection gate 104 p 3 in the first selection device 142 .
- the spacer 130 p 4 is disposed on a sidewall of the selection gate 104 p 4 in the second selection device 144 .
- High concentration impurity regions 134 and 136 serving as a source and a drain of the unit memory cell, respectively, are disposed on the substrate 100 outside the spacer 130 p 4 and the spacer 130 p 3 .
- low concentration impurity regions 124 and 126 are additionally formed below the spacer 130 p 4 and 130 p 3 .
- FIG. 5 is a circuit diagram of a memory array with a non-volatile memory device and a selection device.
- a unit cell 160 includes one non-volatile memory device 140 and one selection device 142 .
- a memory array of the unit cells constitutes an EEPROM.
- FIG. 5 is a circuit diagram of an exemplary byte erasable EEPROM.
- bit lines B 1 to Bn are electrically connected to drains of the non-volatile memory device 140 .
- Sources of the selection device 142 are connected to a common source CS 1 .
- the impurity junction region 134 (drain) of the second selection device 144 is connected to bit lines B 1 to Bn.
- the impurity junction region 136 (source) of the first selection device 142 is connected to the common source CS 1 .
- the non-volatile memory devices 140 are electrically connected through the first and second floating junctions 128 and 129 between the first and second selection devices 142 and 144 .
- the memory devices 140 in a column are electrically connected to an identical word line WL, and also the selection devices in a column are electrically connected to selection line SL.
- the control gate of the memory device can serve as a word line
- the selection gate of the selection device can serve as a select line.
- a unit cell including one non-volatile memory device and one selection device will be described in more detail. However, it is apparent for those in the art that a method of forming a unit cell of FIG. 4 with one non-volatile memory device and two selection devices is clear with reference to FIGS. 6 to 14 .
- a gate insulation layer 102 (e.g., a silicon oxide layer, a silicon nitride layer, combinations of the silicon oxide layer and the silicon nitride layer, etc.) is formed on the substrate 100 (e.g., a silicon substrate).
- a first conductive layer 104 used as a floating gate is formed on the gate insulation layer 102 .
- An inter-gate insulation layer 106 (e.g., a silicon oxide layer/silicon nitride layer/silicon oxide layer (ONO)) is formed on the resultant structure.
- the first conductive layer 104 can be formed of a polysilicon, and is patterned to be separated from adjacent memory cells in a word line direction.
- a second conductive layer 108 used as a control gate (word line) is formed on the inter-gate insulation layer 106 .
- the second conductive layer 108 can be formed of a polysilicon. Additionally, the second conductive layer 108 can be formed of combinations of a polysilicon and a low-resistivity metal.
- a capping insulation layer 110 such as a silicon oxide layer is formed on the second conductive layer 108 .
- the substrate 100 can be an N-type or a P-type.
- a well can be formed by ion-injecting an N-type impurity with about 1.0 to 1.5 Me Volt.
- the gate insulation layer 102 can be formed with a thickness of 60 to 80 ⁇ .
- the first conductive layer 104 and the second conductive layer 108 can be formed with a thickness of about 1500 ⁇ .
- the capping insulation layer 110 , the second conductive layer 108 , and the inter-gate insulation layer 106 are patterned until the first conductive layer 104 is exposed to form a capping insulation layer pattern 110 a , a second conductive layer pattern 108 a , and an inter-gate insulation layer pattern 106 a on the capping insulation layer 110 by a photolithography and an etching process using a photoresist.
- the second conductive layer pattern 108 a serves as a control gate (or a word line) of the memory device.
- a sequentially stacked inter-gate insulation layer pattern 106 a , a second conductive layer pattern 108 a , and an optional capping insulation layer pattern 110 a structure will be referred to as a top stacked pattern 113 a .
- a silicon oxide layer 111 is formed with a thickness of about 2000 to 3000 ⁇ on sidewalls of the top stacked pattern 113 a .
- a silicon nitride layer is formed with a thickness of about 2000 to 3000 ⁇ , and then a sidewall spacer 112 of the silicon nitride layer is formed on both sidewalls of the top stacked pattern 113 a by performing an etching process.
- the first conductive layer 104 on both sides of the top stacked pattern 113 a is etched to from a first conductive layer pattern 104 p 1 .
- the first conductive layer pattern 104 p 1 can be used as a material for a floating gate of the memory device and a selection gate of the selection device.
- the sidewall spacer 112 is removed.
- the removing of the sidewall spacer 112 can be performed using a wet etching method.
- the silicon oxide layer 111 prevents a nitride layer of the inter-gate insulation layer from being etched during the removing of the sidewall spacer 112 .
- a spacer 116 p 2 is formed on one sidewall of the top stacked pattern 113 a such that a portion of the first conductive layer pattern 104 p 1 is exposed at one side of the top stacked pattern 113 a .
- the spacer 116 p 2 can be formed of a silicon nitride layer.
- the silicon nitride layer having a thickness of 400 to 600 ⁇ is formed, and then a photoresist is applied to an entire surface of the silicon nitride layer.
- the photoresist forms a photoresist pattern 118 using a photolithography and an etching process.
- the photoresist pattern 118 is formed to expose one sidewall and cover the other sidewall of the top stacked pattern 113 a .
- An etching process is performed on the silicon nitride layer exposed by the photoresist pattern 118 to form a spacer 116 p 2 on one sidewall of the top stacked pattern 113 a .
- the first conductive layer pattern 104 p 1 outside the spacer 116 p 2 is exposed, and then a spacer 116 p 3 is formed on a sidewall of the first conductive layer pattern 104 p 1 .
- the spaced distance between the stacked gate structure of the memory device and the selection gate of the selection device is determined by the width of the spacer 116 p 2 in one sidewall of the top stacked pattern 113 a . This spaced distance is narrower than the minimum distance that can be formed by photolithography.
- an oxide layer pattern 120 is formed on the first conductive layer pattern 104 p 1 exposed outside the spacer 116 p 2 of the top stacked pattern 113 a .
- the oxidation pattern 120 is formed in a self-align method in the presence of the spacer 116 p 2 to define a selection gate for the selection device.
- the oxide layer pattern 120 can be formed with a thickness of about 100 to 200 ⁇ by a thermal oxidation process.
- an etching for the silicon nitride layer is performed to form spacers on both sidewalls of the top stacked pattern 113 a without forming the photoresist pattern 118 , which will be described in more detail with reference to FIGS. 15 to 18 .
- the spacers 116 p 2 and 116 p 3 and a remaining silicon nitride layer 116 p 1 are removed through a wet etching process that makes use of a different etching speed.
- the exposed first conductive layer pattern 104 p 1 is etched to form the floating gate 104 p 2 of the memory device and the selection gate 104 p 3 of the selection device. Therefore, the stacked gate structure 109 of the memory device including the floating gate 104 p 3 , the inter-gate insulation layer pattern 106 a , and the second conductive layer pattern 108 a is formed, and also the selection gate 104 p 3 of the selection device is formed.
- a silicon oxide layer 121 is formed on both sidewalls of the floating gate 104 p 2 and both sidewalls of the selection gate 104 p 3 .
- Low concentration source and drain 124 and 126 of a unit memory cell are formed in about 1E 17-18 ions/cm 3 by ion-injecting N-type impurity (e.g., P 122 ). At this point, a floating junction 128 is formed on the substrate 100 between the stacked gate structure 109 and the selection gate 104 p 3 .
- an insulation layer such as a silicon oxide layer and a silicon nitride layer is applied using a chemical vapor deposition (CVD) method.
- the insulation layer is etched to form spacer 130 p 1 and 130 p 2 on both sidewalls of the stacked gate structure 109 , and to form a spacer 130 p 3 on the other sidewall of the selection gate 104 p 3 .
- the spacer 130 p 2 in one sidewall of the stacked gate structure 109 is extended toward one sidewall of the selection gate 104 p 3 to protect a bottom floating junction 128 .
- High concentration source and drain 134 and 136 of a unit memory cell are formed in about 1E 19-20 ions/cm 3 by ion-injecting N-type impurity (e.g., P 132 ).
- a high concentration drain 134 is formed on the substrate 100 outside the spacer 130 p 1 in the other sidewall of the stacked gate structure 109 .
- a high concentration source 136 is formed on the substrate 100 outside the spacer 130 p 3 in the other sidewall of the selection gate 104 p 3 .
- the floating junction 128 is protected from impurity injections for high concentration source and drain.
- the concentration of a well (not shown) having the non-volatile memory device 140 and the selection device 142 can be about 1E 16-17 ions/cm 3 .
- a method of forming a semiconductor device including a unit memory cell with one memory device and two selection devices will be described in more detail with reference to FIGS. 15 to 18 .
- a silicon nitride layer 116 is formed as illustrated in FIG. 15 .
- an etching process for the silicon nitride layer 116 is performed to form spacers 116 p 1 and 116 p 2 on both sidewalls of the top stacked pattern 113 a , and spacers 116 p 3 and 116 p 4 on both sidewalls of the first conductive layer pattern 104 p 1 .
- a spaced distance between the memory device and the selection device is determined by the width of the spacers 116 p 1 and 116 p 2 on a sidewall of the top stacked pattern 113 a.
- an oxide layer pattern 120 is formed on the first conductive layer pattern outside the spacer 116 p 1 and 116 p 2 .
- the oxide layer pattern 120 can be formed by a thermal oxidation process.
- the first conductive layer pattern exposed by the removing of the spacers 116 p 1 and 116 p 2 is etched to form the floating gate 104 p 2 of the memory device, and first and second selection gates 104 p 3 and 104 p 4 of the first and second selection devices on both sides of the floating gate 104 p 2 .
- a semiconductor device having a unit memory cell with one memory device and two selection devices of FIG. 5 is formed by performing the processes (e.g., an ion-implantation process, and a spacer process) of FIGS. 13 and 14 .
- the semiconductor device including a unit memory cell with one memory device and one selection device will be formed. This will be described in more detail with reference to FIGS. 19 to 21 .
- a mask pattern 118 covering the spacer 116 p 1 on the other sidewall of the top stacked pattern 113 a and the spacer 116 p 3 on the first conductive layer pattern 104 p 1 is formed.
- the mask pattern 118 can be formed through exposing and developing processes after applying the photoresist.
- an oxidation layer pattern 120 is formed on the first conductive pattern outside the spacer 116 p 2 in one sidewall of the top stacked pattern 113 a by a thermal oxidation process.
- the exposed first conductive layer pattern is etched to form the floating gate 104 p 2 of the memory device and the selection gate 104 p 3 of the selection device using the capping insulation pattern 110 a and the oxidation layer pattern 120 of the top stacked pattern as an etching mask.
- a semiconductor device having a small-sized chip, and a method of forming the same.
- a semiconductor device including a small-sized unit cell with one stacked structure non-volatile memory device and at least one selection device, and a method of forming the same.
- an EEPROM having a unit cell formed by separating the floating gate of the non-volatile memory device from the gate of the selection device in a self-alignment by a selectively formed layer.
Abstract
There is provided a semiconductor device and a method of forming the same. The semiconductor device includes a memory device and a self-aligned selection device. A floating junction is formed between the self-aligned selection device and the memory device.
Description
- This application is a divisional application of U.S. patent application Ser. No. 11/600,499, filed on Nov. 16, 2006, which claims the benefit of Korean patent application number 10-2005-0109998, filed on Nov. 17, 2005, in the Korean Intellectual Property Office, the contents of which applications are incorporated herein in their entirety by reference.
- 1. Field of the Invention
- The present invention relates to a semiconductor device and a method of forming the same, and more particularly, to a nonvolatile memory device and a method of forming the same. Further, the invention relates to an electrically erasable and programmable read only memory (EEPROM) device in various types of non-volatile memory devices retaining data even when a power source is cut off, and a method of forming the same.
- 2. Description of the Related Art
- The semiconductor memory device can be largely classified into a random access memory (RAM) and a read only memory (ROM). The RAM is a volatile memory device in which stored data disappears when a power supply is interrupted. The ROM is a nonvolatile memory device in which stored data is retained even if the power supply is interrupted. The ROM includes an EEPROM device capable of electrically programming and erasing information.
-
FIG. 1 is a sectional view of a related art EEPROM in which a unit cell includes a non-volatile memory device and a selection device. In the related art EEPROM, amemory device 20 and aselection device 30 have stackedgate structures 19 a and 19 b, respectively. That is, thestacked gate structure 19 a of thememory device 20 includes afloating gate 14 a, aninter-gate insulation layer 16 a, and acontrol gate 18 a sequentially stacked on asubstrate 10 having asilicon oxide layer 22 formed thereon. Likewise, the stacked gate structure 19 b of theselection device 30 includes abottom electrode 14 b, an inter-gate insulation layer 16 b, and atop electrode 18 b sequentially stacked on thesubstrate 10 having thesilicon oxide layer 22. In the stacked gate structure 19 b of theselection device 30, thetop electrode 18 b and thebottom electrode 14 b are electrically connected to each other by a butting contact. Afloating junction 24 is formed in thesubstrate 10 between thestacked gate structure 19 a of thememory device 20 and the stacked gate structure 19 b of theselection device 30 to connect thememory device 20 and theselection device 30. Adrain region 13 of thememory device 20 is formed as a bit line junction at a side of thestacked gate structure 19 a opposite to thefloating junction 24. Additionally, asource region 12 is formed as a source junction of theselection device 30 at a side of the stacked gate structure 19 b opposite to thefloating junction 24. In thememory device 20, programming and erasing may be performed using Fowler-Nordheim (FN) tunneling. Theselection device 30 is formed to select a memory device or to prevent over-erasing of the memory device. - In a manufacturing process of the related art EEPROM, a silicon oxide layer, a polysilicon layer, an inter-gate insulation layer, and a polysilicon layer are sequentially stacked on the
substrate 10. Then, photolithography is performed to form the stackedgate structures 19 a and 19 b, which are spaced apart from each other. An ion implantation process is performed to form thefloating junction 24 between the stackedgate structures 19 a and 19 b, and to form thedrain region 13 and thesource region 12 outside the stacked gate structure. - In the related art EEPROM structure, the distance between the
memory device 20 and theselection device 30 is determined by the resolution of photolithography equipment. Accordingly, there is a limitation in reducing a unit cell size. Additionally, unlike in thestacked gate structure 19 a of thememory device 20, it is necessary to connect electrically thebottom electrode 14 b and thetop electrode 18 b in the stacked gate structure 19 b of theselection device 30. To accomplish this, a butting contact process is required which limits reducing the chip size and complicates the overall fabrication. - Exemplary embodiments of the present invention provide a semiconductor device of which size can be reduced by a self-alignment method, and a method of forming the same.
- Exemplary embodiments of the present invention also provide a semiconductor device having a gate of the selection device formed by the self-alignment method, and a method of forming the same.
- Exemplary embodiments of the present invention also provide an EEPROM in which a unit cell includes one non-volatile memory device and at least one selection device.
- According to a first aspect, the present invention is directed to a semiconductor device comprising a non-volatile memory device formed on a substrate, a first selection device formed on the substrate at one side of the non-volatile memory device, and a floating junction formed in the substrate between the non-volatile memory device and the first selection device. A gate of the first selection device is formed of a single-layered conductive layer.
- In one embodiment, the non-volatile memory device comprises a stacked gate structure having a floating gate, a control gate, and an insulation layer formed between the floating gate and the control gate. In one embodiment, the floating gate of the non-volatile memory device and the gate of the first selection device are formed of the same material. In one embodiment, the device further comprises a drain formed in the substrate outside the non-volatile memory device opposite to the floating junction, and a source formed in the substrate outside the first selection device opposite to the floating junction. In one embodiment, the insulation layer of the non-volatile memory device comprises a silicon oxide layer, a silicon nitride layer, or a silicon oxide layer. In one embodiment, the device further comprises a spacer formed on one sidewall of the stacked gate structure in the non-volatile memory device adjacent to the gate of the first selection device, covering the floating junction and extending toward a sidewall of the gate in the first selection device. In one embodiment, the device further comprises a second spacer formed on the other sidewall in the gate of the first selection device opposite to the spacer, the spacer formed on the one sidewall of the non-volatile memory device having a height higher than that of the second spacer formed on the other sidewall. In one embodiment, a drain of the non-volatile memory device is connected to a bit line and a source of the selection device is electrically connected to a common source line. In one embodiment, the gate of the first selection device and the floating gate of the stacked gate structure of the non-volatile memory device are formed of the same material and have a substantially identical height. In one embodiment, the device further comprises an oxide layer between the spacer and the stacked gate structure of the non-volatile memory device. In one embodiment, the device further comprises: a second selection device formed on the substrate at the other side of the non-volatile memory device, and including a gate formed of a single-layered conductive layer; and a second floating junction formed on the substrate between the gate of the second selection device and the non-volatile memory device. In one embodiment, the device further comprises a first spacer formed on sidewalls of the stacked gate structure in the non-volatile memory device, covering the first and second floating junction; and a second spacer formed on a sidewall of the first and second selection devices having a height lower than that of the first spacer.
- According to another aspect, the present invention is directed to a method of forming a semiconductor device comprising forming a first conductive layer pattern on a substrate, forming a stacked pattern including an inter-gate insulation layer pattern and a second conductive layer pattern on the first conductive layer pattern, forming a mask insulation layer pattern on the first conductive layer pattern spaced apart from the stacked pattern, removing the first conductive layer pattern outside the stacked pattern and the mask insulation layer pattern to form a floating gate below the stacked pattern and to form a selection gate below the mask insulation layer pattern, and forming a floating junction on the substrate between the floating gate and the selection gate.
- In one embodiment, the forming of the mask insulation layer comprises: forming a spacer on at least one sidewall of the stacked pattern; forming the mask insulation layer pattern on the first conductive layer pattern exposed outside the spacer; and removing the spacer.
- In one embodiment, the forming of the spacer on at least one sidewall of the stacked pattern comprises: forming an insulation layer for the spacer; forming a photoresist pattern exposing a sidewall of the stacked pattern with the spacer thereon; and etching the insulation layer for a spacer exposed by the photoresist pattern. In one embodiment, the forming of the spacer on at least one sidewall of the stacked pattern comprises: forming an insulation layer for the spacer; and etching the insulation layer for the spacer, and the spacer is formed on both sidewalls of the stacked pattern, the selection gate is formed on the substrate in both sides of the floating gate, the floating junction is formed between the floating gate and the selection gates on both sides of the floating gate. In one embodiment, the forming of the spacer on at least one sidewall of the stacked pattern comprises: forming an insulation layer for the spacer; etching the insulation layer for a spacer to form spacers on both sidewalls of the stacked pattern; forming a mask pattern covering one of the spacers and exposing another spacer; removing the spacer exposed by the mask pattern; and removing the mask pattern. In one embodiment, the method further comprises forming an oxide layer on the both sidewalls of the stacked pattern before the forming of the insulation for the spacer. In one embodiment, the insulation layer for the spacer is formed of a silicon nitride layer. In one embodiment, the method further comprises forming an oxide layer on the both sidewall of the stacked pattern before the forming the insulation layer for the spacer. In one embodiment, the mask insulation layer pattern is formed using a thermal oxidation process on the first conductive layer pattern exposed outside the spacer.
- In one embodiment, the method further comprises: forming a spacer on the stacked pattern and the selection gate sidewall after the forming of the impurity junction; and forming a drain on a sidewall of the stacked pattern not adjacent to the floating junction, and a source on a sidewall of the selection gate not adjacent to the floating junction through an ion implantation process, and the spacer in a stacked gate sidewall adjacent to the floating junction covers the floating junction, and is extended toward the selection gate sidewall.
- According to another aspect, the present invention is directed to a method of forming a semiconductor device comprises forming a conductive layer pattern on a substrate, forming a stacked pattern including an inter-layer insulation layer and a control gate on the conductive layer pattern, forming a spacer on at least one sidewall of the stacked pattern, forming a mask insulation layer pattern on the conductive layer pattern exposed outside of the spacer, removing the spacer, etching the conductive layer pattern outside the stacked pattern to form a floating gate below the stacked pattern and to form a selection gate below the mask insulation layer pattern, and performing an ion implantation process to form a floating junction on a substrate between the floating gate and the selection gate, and to form a source and a drain on the substrate outside the floating gate and the selection gate not adjacent to, for example, opposite to, the floating junction.
- In one embodiment, the method further comprises forming an oxide layer on both sidewalls of the stacked pattern before the forming of the spacer. In one embodiment, the inter-layer insulation layer includes a silicon oxide layer, a silicon nitride layer, and a silicon oxide layer. In one embodiment, the forming of the mask insulation layer pattern comprises performing a thermal oxidation process on the conductive layer pattern exposed outside the spacer. In one embodiment, the spacer is formed on both sidewalls of the stacked pattern; the selection gate is formed on the substrate in both sides of the floating gate; and the floating junction region is formed between the floating gate and the selection gates in the both sides of the floating gate.
- According to another aspect, the present invention is directed to a semiconductor device comprising a non-volatile memory device including a gate insulation layer, a floating gate, an inter-layer insulation layer, and a control gate on a substrate, a selection device formed at one side of the non-volatile memory device, a floating junction shared between the non-volatile memory device and the selection device, a first sidewall spacer formed on a sidewall of the non-volatile memory device, and a second sidewall spacer formed on a sidewall of the selection device and having a height lower than that of the first sidewall spacer. In one embodiment, the selection device comprises a selection gate formed of a material identical to that of the floating gate of the memory device and having a height identical to that of the first sidewall spacer. In one embodiment, the non-volatile memory device and the selection device further comprise a source and a drain. In one embodiment, a drain of the non-volatile memory device is connected to the bit line and a source of the selection device is connected to a common source line. In one embodiment, the device further comprises another selection device connected electrically to the common source line, and another non-volatile memory device with a drain connected electrically to the bit line. In one embodiment, the device further comprises another selection device formed on the other side of the non-volatile memory device.
- The foregoing and other objects, features and advantages of the invention will be apparent from the more particular description of preferred aspects of the invention, as illustrated in the accompanying drawings in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention. In the drawings, the thickness of layers and regions are exaggerated for clarity.
-
FIG. 1 is a sectional view of a semiconductor with a non-volatile memory device and a selection device according to related art. -
FIG. 2 is a plan view of a semiconductor device in which a unit memory cell includes one memory device and one selection device according to an exemplary embodiment of the present invention. -
FIG. 3 is a sectional view taken along line I-I′ ofFIG. 2 . -
FIG. 4 is a sectional view of a semiconductor device in which a unit memory cell includes two memory devices and one selection device according to an exemplary embodiment of the present invention. -
FIG. 5 is a circuit diagram of a memory array with a non-volatile memory device and a selection device according to an exemplary embodiment of the present invention. -
FIGS. 6 to 14 are sectional views illustrating a method of forming the semiconductor device ofFIG. 3 according to an exemplary embodiment of the present invention. -
FIGS. 15 to 18 are sectional views illustrating a method of forming the semiconductor device ofFIG. 4 according to an exemplary embodiment of the present invention. -
FIGS. 19 to 21 are sectional views illustrating a method of forming the semiconductor device ofFIG. 3 according to an exemplary embodiment of the present invention. - The present invention will now be described more fully with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. It will be understood that, although the terms first, second, third, and the like may be used herein to describe various regions, layers, and the like, these regions, layers, and the likes should not be limited by these terms. These terms are only used to distinguish one region, layer, and the like from another region, layer, and the like. Thus, a first layer mentioned in one embodiment could be termed a second layer in another embodiment without departing from the teachings of the present invention.
- It will be also understood that when a layer (or pattern) is referred to as being “on” another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present.
- In the specification ‘a self-align method’ may indicate that a layer is etched using a previously deposited material without an additional mask when the layer is patterned.
-
FIG. 2 is a plan view of a semiconductor device in which a unit memory cell includes one memory device and one selection device according to an exemplary embodiment of the preset invention.FIG. 3 is a sectional view taken along line I-I′ ofFIG. 2 . InFIG. 2 ,reference numerals - Referring to
FIGS. 2 and 3 , amemory device 140 includes astacked gate structure 109, and a first impurity diffusion region 134 (or drain region) formed in asubstrate 100 at one side of thestacked gate structure 109. Thestacked gate structure 109 of thememory device 140 includes a floating gate 104 p 2, aninter-gate insulation layer 106, and acontrol gate 108, which are sequentially stacked on thesubstrate 100 having agate insulation layer 102 thereon. On the other hand, aselection device 142 is formed of the same material as the floating gate 104 p 2. Theselection device 142 further includes a selection gate 104 p 3 with the same material and a substantially same thickness as the floating gate 104 p 2 and a second impurity diffusion region 136 (or source region) formed in thesubstrate 100 at one side of the selection gate 104 p 3. In terms of manufacturing processes, the selection gate 104 p 3 of theselection device 142 is formed concurrently when the floating gate 104 p 2 of thememory device 140 is formed. Depending on a bottom structure or within an allowable variation in processes, the height of the selection gate 104 p 3 may be different from that of the floating gate 104 p 2. Thestacked gate structure 109 of thememory device 140, and the selection gate 104 p 3 of theselection device 142 are spaced apart from each other. The distance therebetween can be determined by a spacer process, and have a width narrower than the minimum distance that can be defined by photolithography. Additionally, the distance between thestacked gate structure 109 and the selection gate 104 p 3 will be described in more detail with reference toFIGS. 6 to 14 . - Spacers 130
p 1, 130 p 2, and 130 p 3 are disposed on sidewalls of thestacked gate structure 109 and the selection gate 104 p 3. The spacer 130p 1 and the spacer 130 p 3 are respectively disposed on one sidewall of thestacked gate structure 109 and one sidewall of the selection gate 104 p 3 opposite to each other. The spacer 130 p 2 is disposed on the other sidewall of thestacked gate structure 109, and also extended toward the other sidewall of the selection gate 104 p 3. That is, the spacer 130 p 2 is disposed between the other sidewall of thestacked gate structure 109 and the other sidewall of the selection gate 104 p 3. The spacer 130 p 2 is disposed in the space between thestacked gate structure 109 and the selection gate 104 p 3. Thus, the spaced distance between thestacked gate structure 109 and the selection gate 104 p 3 can be determined by the width of the spacer 130 p 2. The spacers 130p 1 and 13-p 2 on the one and the other sidewalls of thestacked gate structure 109 have a height higher than that of the spacer 130 p 3 on the sidewall of the selection gate 104 p 3. The floatingjunction 128 connecting thememory device 140 and theselection device 142 is formed on thesubstrate 100 between thestacked gate structure 109 and the selection gate 104 p 3. The floatingjunction 128 is disposed below the spacer 130 p 2. A first highconcentration impurity region 134 serving as a drain region of thememory device 140 is formed on thesubstrate 100 outside the spacer 130p 1 on one sidewall of thestacked gate structure 109. A second high concentrationsecond impurity region 136 serving as a source region of theselection device 142 is formed on thesubstrate 100 outside the spacer 130 p 3 on the other sidewall of the selection gate 104 p 3. The first and second highconcentration impurity region concentration impurity region 124 is additionally disposed on thesubstrate 100 outside thestacked gate structure 109, and also a second lowconcentration impurity region 126 is additionally disposed on thesubstrate 100 outside the selection gate 130 p 3. Thesubstrate 100 can be formed of a semiconductor silicon substrate or an organic compound that can be conductive using impurity. - A
hard mask 110 can be additionally disposed on thecontrol gate 108 of thestacked gate structure 109. Additionally, an insulation layer can be additionally disposed between thestacked gate structure 109 and the spacers 130p 1 and 130 p 2 on the both sidewalls. Likewise, an insulation layer can be additionally disposed between the selection gate 130 p 3 and the spacer 130 p 3 on the one sidewall of the selection gate 130 p 3. -
FIG. 4 is a sectional view of a semiconductor device in which a unit memory cell includes two memory devices and one selection device. Unlike the selection device ofFIG. 3 , the unit memory cell ofFIG. 4 includes the two selection devices. Referring toFIG. 4 , amemory device 140 is disposed between afirst selection device 142 and asecond selection device 144. Moreover, thefirst selection device 142 and thesecond selection device 144 can be symmetrically disposed on both sides of thememory device 140. The stacked gate structure of thememory device 140 and the selection gate structures of theselection devices FIGS. 2 and 3 . The spacers 130p 1 and 130 p 2 are disposed on both sides of thestacked gate structure 109 in thememory device 140. Additionally, the selection gate 104p 4 of thesecond selection device 144 and the selection gate 104 p 3 of thefirst selection device 142 are, respectively, adjacent to the spacer 130p 1 and the spacer 130 p 2. A first floatingjunction 128 and a second floatingjunction 129 are, respectively, disposed between thestacked gate structure 109 and the selection gates 104 p 3 and 104p 4. The spacer 130 p 3 is disposed on a sidewall of the selection gate 104 p 3 in thefirst selection device 142. The spacer 130p 4 is disposed on a sidewall of the selection gate 104p 4 in thesecond selection device 144. Highconcentration impurity regions substrate 100 outside the spacer 130p 4 and the spacer 130 p 3. To reduce a short channel effect, lowconcentration impurity regions p 4 and 130 p 3. -
FIG. 5 is a circuit diagram of a memory array with a non-volatile memory device and a selection device. Referring toFIG. 5 , aunit cell 160 includes onenon-volatile memory device 140 and oneselection device 142. A memory array of the unit cells constitutes an EEPROM. Specifically,FIG. 5 is a circuit diagram of an exemplary byte erasable EEPROM. In more detail, bit lines B1 to Bn are electrically connected to drains of thenon-volatile memory device 140. Sources of theselection device 142 are connected to a common source CS1. In a case ofnon-volatile memory device 140 and the first andsecond selection devices FIG. 4 , the impurity junction region 134 (drain) of thesecond selection device 144 is connected to bit lines B1 to Bn. The impurity junction region 136 (source) of thefirst selection device 142 is connected to the common source CS1. It is apparent for those in the art that thenon-volatile memory devices 140 are electrically connected through the first and second floatingjunctions second selection devices memory devices 140 in a column are electrically connected to an identical word line WL, and also the selection devices in a column are electrically connected to selection line SL. Here, the control gate of the memory device can serve as a word line, and also the selection gate of the selection device can serve as a select line. A unit cell including one non-volatile memory device and one selection device will be described in more detail. However, it is apparent for those in the art that a method of forming a unit cell ofFIG. 4 with one non-volatile memory device and two selection devices is clear with reference toFIGS. 6 to 14 . - Referring to
FIG. 6 , a gate insulation layer 102 (e.g., a silicon oxide layer, a silicon nitride layer, combinations of the silicon oxide layer and the silicon nitride layer, etc.) is formed on the substrate 100 (e.g., a silicon substrate). A firstconductive layer 104 used as a floating gate is formed on thegate insulation layer 102. An inter-gate insulation layer 106 (e.g., a silicon oxide layer/silicon nitride layer/silicon oxide layer (ONO)) is formed on the resultant structure. The firstconductive layer 104 can be formed of a polysilicon, and is patterned to be separated from adjacent memory cells in a word line direction. A secondconductive layer 108 used as a control gate (word line) is formed on theinter-gate insulation layer 106. The secondconductive layer 108 can be formed of a polysilicon. Additionally, the secondconductive layer 108 can be formed of combinations of a polysilicon and a low-resistivity metal. A cappinginsulation layer 110 such as a silicon oxide layer is formed on the secondconductive layer 108. Thesubstrate 100 can be an N-type or a P-type. A well can be formed by ion-injecting an N-type impurity with about 1.0 to 1.5 Me Volt. Thegate insulation layer 102 can be formed with a thickness of 60 to 80 Å. The firstconductive layer 104 and the secondconductive layer 108 can be formed with a thickness of about 1500 Å. - Referring to
FIG. 7 , the cappinginsulation layer 110, the secondconductive layer 108, and theinter-gate insulation layer 106 are patterned until the firstconductive layer 104 is exposed to form a cappinginsulation layer pattern 110 a, a secondconductive layer pattern 108 a, and an inter-gateinsulation layer pattern 106 a on thecapping insulation layer 110 by a photolithography and an etching process using a photoresist. The secondconductive layer pattern 108 a serves as a control gate (or a word line) of the memory device. Hereinafter, for convenience of description, a sequentially stacked inter-gateinsulation layer pattern 106 a, a secondconductive layer pattern 108 a, and an optional cappinginsulation layer pattern 110 a structure will be referred to as a topstacked pattern 113 a. Asilicon oxide layer 111 is formed with a thickness of about 2000 to 3000 Å on sidewalls of the topstacked pattern 113 a. A silicon nitride layer is formed with a thickness of about 2000 to 3000 Å, and then asidewall spacer 112 of the silicon nitride layer is formed on both sidewalls of the topstacked pattern 113 a by performing an etching process. - Referring to
FIG. 8 , using thesidewall spacer 112 as an etching mask, the firstconductive layer 104 on both sides of the topstacked pattern 113 a is etched to from a first conductive layer pattern 104p 1. The first conductive layer pattern 104p 1 can be used as a material for a floating gate of the memory device and a selection gate of the selection device. - Referring to
FIG. 9 , thesidewall spacer 112 is removed. The removing of thesidewall spacer 112 can be performed using a wet etching method. Here, thesilicon oxide layer 111 prevents a nitride layer of the inter-gate insulation layer from being etched during the removing of thesidewall spacer 112. - Referring to
FIG. 10 , a spacer 116 p 2 is formed on one sidewall of the topstacked pattern 113 a such that a portion of the first conductive layer pattern 104p 1 is exposed at one side of the topstacked pattern 113 a. The spacer 116 p 2 can be formed of a silicon nitride layer. In more detail, the silicon nitride layer having a thickness of 400 to 600 Å is formed, and then a photoresist is applied to an entire surface of the silicon nitride layer. The photoresist forms aphotoresist pattern 118 using a photolithography and an etching process. Thephotoresist pattern 118 is formed to expose one sidewall and cover the other sidewall of the topstacked pattern 113 a. An etching process is performed on the silicon nitride layer exposed by thephotoresist pattern 118 to form a spacer 116 p 2 on one sidewall of the topstacked pattern 113 a. At this point, the first conductive layer pattern 104p 1 outside the spacer 116 p 2 is exposed, and then a spacer 116 p 3 is formed on a sidewall of the first conductive layer pattern 104p 1. The spaced distance between the stacked gate structure of the memory device and the selection gate of the selection device is determined by the width of the spacer 116 p 2 in one sidewall of the topstacked pattern 113 a. This spaced distance is narrower than the minimum distance that can be formed by photolithography. - Referring to
FIG. 11 , after removing thephotoresist pattern 118, anoxide layer pattern 120 is formed on the first conductive layer pattern 104p 1 exposed outside the spacer 116 p 2 of the topstacked pattern 113 a. Theoxidation pattern 120 is formed in a self-align method in the presence of the spacer 116 p 2 to define a selection gate for the selection device. For example, theoxide layer pattern 120 can be formed with a thickness of about 100 to 200 Å by a thermal oxidation process. - Herein, in order to form a memory device with one non-volatile memory device and two selection devices, an etching for the silicon nitride layer is performed to form spacers on both sidewalls of the top
stacked pattern 113 a without forming thephotoresist pattern 118, which will be described in more detail with reference toFIGS. 15 to 18 . - Referring to
FIG. 12 , the spacers 116 p 2 and 116 p 3 and a remaining silicon nitride layer 116p 1 are removed through a wet etching process that makes use of a different etching speed. - Referring to
FIG. 13 , using thecapping insulation layer 110 a and theoxide layer pattern 120 as an etching mask, the exposed first conductive layer pattern 104p 1 is etched to form the floating gate 104 p 2 of the memory device and the selection gate 104 p 3 of the selection device. Therefore, thestacked gate structure 109 of the memory device including the floating gate 104 p 3, the inter-gateinsulation layer pattern 106 a, and the secondconductive layer pattern 108 a is formed, and also the selection gate 104 p 3 of the selection device is formed. By a thermal oxidation process, asilicon oxide layer 121 is formed on both sidewalls of the floating gate 104 p 2 and both sidewalls of the selection gate 104 p 3. Low concentration source and drain 124 and 126 of a unit memory cell are formed in about 1E17-18 ions/cm3 by ion-injecting N-type impurity (e.g., P 122). At this point, a floatingjunction 128 is formed on thesubstrate 100 between thestacked gate structure 109 and the selection gate 104 p 3. - Referring to
FIG. 14 , an insulation layer such as a silicon oxide layer and a silicon nitride layer is applied using a chemical vapor deposition (CVD) method. The insulation layer is etched to form spacer 130p 1 and 130 p 2 on both sidewalls of thestacked gate structure 109, and to form a spacer 130 p 3 on the other sidewall of the selection gate 104 p 3. The spacer 130 p 2 in one sidewall of thestacked gate structure 109 is extended toward one sidewall of the selection gate 104 p 3 to protect abottom floating junction 128. High concentration source and drain 134 and 136 of a unit memory cell are formed in about 1E19-20 ions/cm3 by ion-injecting N-type impurity (e.g., P 132). Ahigh concentration drain 134 is formed on thesubstrate 100 outside the spacer 130p 1 in the other sidewall of thestacked gate structure 109. Ahigh concentration source 136 is formed on thesubstrate 100 outside the spacer 130 p 3 in the other sidewall of the selection gate 104 p 3. At this point, the floatingjunction 128 is protected from impurity injections for high concentration source and drain. When the concentration of the floatingjunction 129 is too high, short channel effect can occur in the device. The concentration of a well (not shown) having thenon-volatile memory device 140 and theselection device 142 can be about 1E16-17 ions/cm3. - A method of forming a semiconductor device including a unit memory cell with one memory device and two selection devices will be described in more detail with reference to
FIGS. 15 to 18 . After forming the topstacked pattern 113 a and the first conductive layer pattern 104p 1 by performing the processes ofFIGS. 6 to 9 , asilicon nitride layer 116 is formed as illustrated inFIG. 15 . - Referring to
FIG. 16 , an etching process for thesilicon nitride layer 116 is performed to form spacers 116p 1 and 116 p 2 on both sidewalls of the topstacked pattern 113 a, and spacers 116 p 3 and 116p 4 on both sidewalls of the first conductive layer pattern 104p 1. A spaced distance between the memory device and the selection device is determined by the width of the spacers 116p 1 and 116 p 2 on a sidewall of the topstacked pattern 113 a. - Referring to
FIG. 17 , anoxide layer pattern 120 is formed on the first conductive layer pattern outside the spacer 116p 1 and 116 p 2. Theoxide layer pattern 120 can be formed by a thermal oxidation process. - Referring to
FIG. 18 , after removing the spacers 116p 1 to 116p 4, using the cappinginsulation layer pattern 110 a and theoxide layer pattern 120 as an etching mask, the first conductive layer pattern exposed by the removing of the spacers 116p 1 and 116 p 2 is etched to form the floating gate 104 p 2 of the memory device, and first and second selection gates 104 p 3 and 104p 4 of the first and second selection devices on both sides of the floating gate 104 p 2. - A semiconductor device having a unit memory cell with one memory device and two selection devices of
FIG. 5 is formed by performing the processes (e.g., an ion-implantation process, and a spacer process) ofFIGS. 13 and 14 . - After forming the spacers 116
p 1 to 116p 4, in case a mask pattern covering the one spacer on sidewalls of the topstacked structure 109 is formed and then a thermal oxidation process is performed, the semiconductor device including a unit memory cell with one memory device and one selection device will be formed. This will be described in more detail with reference toFIGS. 19 to 21 . - As illustrated in
FIG. 19 , after forming spacers 116p 1 to 116p 4 on the both sidewalls of the topstacked structure 113 a and the both sidewalls of the first conductive layer pattern 104 p 2, amask pattern 118 covering the spacer 116p 1 on the other sidewall of the topstacked pattern 113 a and the spacer 116 p 3 on the first conductive layer pattern 104p 1 is formed. Themask pattern 118 can be formed through exposing and developing processes after applying the photoresist. - Referring to
FIG. 20 , anoxidation layer pattern 120 is formed on the first conductive pattern outside the spacer 116 p 2 in one sidewall of the topstacked pattern 113 a by a thermal oxidation process. - Referring to
FIG. 21 , after removing themask pattern 118 and the spacers 116p 1 to 116p 4, the exposed first conductive layer pattern is etched to form the floating gate 104 p 2 of the memory device and the selection gate 104 p 3 of the selection device using thecapping insulation pattern 110 a and theoxidation layer pattern 120 of the top stacked pattern as an etching mask. - According to the present invention, there are provided a semiconductor device having a small-sized chip, and a method of forming the same.
- Additionally, there are provided a semiconductor device including a small-sized unit cell with one stacked structure non-volatile memory device and at least one selection device, and a method of forming the same.
- Moreover, there are provided an EEPROM having a unit cell formed by separating the floating gate of the non-volatile memory device from the gate of the selection device in a self-alignment by a selectively formed layer.
- It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention. Thus, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.
Claims (16)
1. A method of forming a semiconductor device, comprising:
forming a first conductive layer pattern on a substrate;
forming a stacked pattern including an inter-gate insulation layer pattern and a second conductive layer pattern on the first conductive layer pattern;
forming a mask insulation layer pattern on the first conductive layer pattern spaced apart from the stacked pattern;
removing the first conductive layer pattern outside the stacked pattern and the mask insulation layer pattern to form a floating gate below the stacked pattern, and to form a selection gate below the mask insulation layer pattern;
forming a floating junction on the substrate between the floating gate and the selection gate; and
forming a spacer on one sidewall of the stacked pattern adjacent to the selection gate after the forming of the floating junction,
wherein the spacer completely covers the floating junction between the floating gate and the selection gate, and extends toward a sidewall of the selection gate.
2. The method of claim 1 , wherein the forming of the mask insulation layer comprises:
forming a spacer on at least one sidewall of the stacked pattern;
forming the mask insulation layer pattern on the first conductive layer pattern exposed outside the spacer; and
removing the spacer.
3. The method of claim 2 , wherein the forming of the spacer on at least one sidewall of the stacked pattern comprises:
forming an insulation layer for the spacer;
forming a photoresist pattern exposing a sidewall of the stacked pattern with the spacer thereon; and
etching the insulation layer for a spacer exposed by the photoresist pattern.
4. The method of claim 2 , wherein the forming of the spacer on at least one sidewall of the stacked pattern comprises:
forming an insulation layer for the spacer; and
etching the insulation layer for the spacer,
wherein the spacer is formed on both sidewalls of the stacked pattern, the selection gate is formed on the substrate in both sides of the floating gate, the floating junction is formed between the floating gate and the selection gates on both sides of the floating gate.
5. The method of claim 2 , wherein the forming of the spacer on at least one sidewall of the stacked pattern comprises:
forming an insulation layer for the spacer;
etching the insulation layer for a spacer to form spacers on both sidewalls of the stacked pattern;
forming a mask pattern covering one of the spacers and exposing another spacer;
removing the spacer exposed by the mask pattern; and
removing the mask pattern.
6. The method of claim 3 , further comprising forming an oxide layer on the both sidewalls of the stacked pattern before the forming of the insulation for the spacer.
7. The method of claim 3 , wherein the insulation layer for the spacer is formed of a silicon nitride layer.
8. The method of claim 7 , further comprising forming an oxide layer on the both sidewall of the stacked pattern before the forming the insulation layer for the spacer.
9. The method of claim 2 , wherein the mask insulation layer pattern is formed using a thermal oxidation process on the first conductive layer pattern exposed outside the spacer.
10. The method of claim 1 , further comprising:
forming a drain in the substrate outside the stacked pattern not adjacent to the floating junction, and a source in the substrate outside the selection gate not adjacent to the floating junction through an ion implantation process.
11. A method of forming a semiconductor device, comprising:
forming a conductive layer pattern on a substrate;
forming a stacked pattern including an inter-layer insulation layer and a control gate on the conductive layer pattern;
forming a spacer on at least one sidewall of the stacked pattern;
forming a mask insulation layer pattern on the conductive layer pattern exposed outside of the spacer;
removing the spacer;
etching the conductive layer pattern outside the stacked pattern to form a floating gate below the stacked pattern and to form a selection gate below the mask insulation layer pattern;
performing a first ion implantation process to form a floating junction on a substrate between the floating gate and the selection gate; and
performing a second ion implantation process to form a source and a drain on the substrate outside the floating gate and the selection gate not adjacent to the floating junction.
12. The method of claim 11 , further comprising forming an oxide layer on both sidewalls of the stacked pattern before the forming of the spacer.
13. The method of claim 11 , wherein the inter-layer insulation layer includes silicon oxide layer/silicon nitride layer/silicon oxide layer (ONO).
14. The method of claim 11 , wherein the forming of the mask insulation layer pattern comprises performing a thermal oxidation process on the conductive layer pattern exposed outside the spacer.
15. The method of claim 11 , wherein the spacer is formed on both sidewalls of the stacked pattern;
the selection gate is formed on the substrate in both sides of the floating gate; and
the floating junction region is formed between the floating gate and the selection gates in the both sides of the floating gate.
16. The method of claim 11 , further comprising forming a second spacer on one
sidewall of the stacked pattern adjacent to the selection gate after the performing of the first ion implantation process to form the floating junction,
wherein the second spacer completely covers the floating junction, and extends toward a sidewall of the selection gate sidewall.
Priority Applications (1)
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US12/855,371 US20100304540A1 (en) | 2005-11-17 | 2010-08-12 | Semiconductor device and method of forming the same |
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KR1020050109998A KR100669347B1 (en) | 2005-11-17 | 2005-11-17 | Semiconductor devices and methods for forming the same |
KR10-2005-0109998 | 2005-11-17 | ||
US11/600,499 US7800158B2 (en) | 2005-11-17 | 2006-11-16 | Semiconductor device and method of forming the same |
US12/855,371 US20100304540A1 (en) | 2005-11-17 | 2010-08-12 | Semiconductor device and method of forming the same |
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US11/600,499 Division US7800158B2 (en) | 2005-11-17 | 2006-11-16 | Semiconductor device and method of forming the same |
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US11/600,499 Expired - Fee Related US7800158B2 (en) | 2005-11-17 | 2006-11-16 | Semiconductor device and method of forming the same |
US12/855,371 Abandoned US20100304540A1 (en) | 2005-11-17 | 2010-08-12 | Semiconductor device and method of forming the same |
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CN105845629A (en) * | 2014-12-29 | 2016-08-10 | 力晶科技股份有限公司 | Method for manufacturing non-volatile memory |
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KR100669347B1 (en) * | 2005-11-17 | 2007-01-16 | 삼성전자주식회사 | Semiconductor devices and methods for forming the same |
KR102088319B1 (en) | 2013-09-06 | 2020-03-13 | 에스케이하이닉스 주식회사 | Nonvolatile memory device |
CN107768373B (en) * | 2016-08-15 | 2022-05-10 | 华邦电子股份有限公司 | Memory element and method for manufacturing the same |
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US7800158B2 (en) | 2010-09-21 |
KR100669347B1 (en) | 2007-01-16 |
DE102006054969A1 (en) | 2007-07-05 |
US20070126048A1 (en) | 2007-06-07 |
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