US20110241116A1 - FET with FUSI Gate and Reduced Source/Drain Contact Resistance - Google Patents
FET with FUSI Gate and Reduced Source/Drain Contact Resistance Download PDFInfo
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- US20110241116A1 US20110241116A1 US12/754,881 US75488110A US2011241116A1 US 20110241116 A1 US20110241116 A1 US 20110241116A1 US 75488110 A US75488110 A US 75488110A US 2011241116 A1 US2011241116 A1 US 2011241116A1
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- 241000027294 Fusi Species 0.000 title 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 110
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 85
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 39
- 239000010703 silicon Substances 0.000 claims abstract description 39
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 33
- 229920005591 polysilicon Polymers 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 22
- 239000002019 doping agent Substances 0.000 claims abstract description 18
- 230000005669 field effect Effects 0.000 claims abstract description 7
- 238000004151 rapid thermal annealing Methods 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 11
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 7
- 229910052796 boron Inorganic materials 0.000 claims description 6
- PCLURTMBFDTLSK-UHFFFAOYSA-N nickel platinum Chemical compound [Ni].[Pt] PCLURTMBFDTLSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 4
- 229910052785 arsenic Inorganic materials 0.000 claims description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 4
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 3
- 229910005883 NiSi Inorganic materials 0.000 claims description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000002513 implantation Methods 0.000 description 12
- 125000006850 spacer group Chemical group 0.000 description 10
- 230000008021 deposition Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000004913 activation Effects 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28097—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a metallic silicide
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
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- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
- H01L29/4975—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2 being a silicide layer, e.g. TiSi2
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
- H01L29/66507—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide providing different silicide thicknesses on the gate and on source or drain
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/7839—Field effect transistors with field effect produced by an insulated gate with Schottky drain or source contact
Definitions
- This disclosure relates generally to the field of field effect transistor (FET) fabrication.
- a field effect transistor comprises source/drain regions and a gate region.
- the gate, source and drain regions may comprise doped silicon (Si), and be contacted by metal silicide contacts, or the source and drain Si can be fully silicided to form a Schottky junction FET .
- the contact resistance of the metal silicide to Si at the source/drain must also be commensurately reduced.
- One way to reduce the contact resistance is to reduce the Schottky barrier height (SBH) of the respective silicon-metal silicide interfaces.
- the gate silicon may be fully silicided (FUSI) to eliminate the poly-depletion effect. The workfunction of the FUSI gate needs to be tuned to set an appropriate threshold voltage (V t ) for the FET.
- a method for forming a field effect transistor includes forming a gate stack on a silicon layer, the gate stack comprising a gate polysilicon on top of a gate oxide layer; forming a fully silicided gate from the gate polysilicon and forming source/drain silicide regions in the silicon layer; implanting the gate silicide and the source/drain silicide with dopants; and performing rapid thermal annealing to form a gate interfacial layer in between the gate silicide and the gate oxide layer, and source/drain interfacial layers between the source/drain silicide regions and the silicon layer.
- FET field effect transistor
- a field effect transistor includes source/drain silicide regions located in a silicon layer; source/drain interfacial layers located in between the source/drain silicide regions and the silicon layer; and a fully silicided gate stack comprising a gate oxide layer located on the silicon layer, a gate interfacial layer located on the gate oxide layer, and a gate silicide located on the gate interfacial layer.
- FIG. 1 illustrates an embodiment of a method of fabricating a doped source/drain FET with a FUSI gate and reduced source/drain contact resistance.
- FIG. 2 illustrates an embodiment of gate stack deposition on silicon.
- FIG. 3 illustrates an embodiment of the device of FIG. 2 after gate stack patterning and spacer formation.
- FIG. 4 illustrates an embodiment of implantation of the device of FIG. 3 .
- FIG. 5 illustrates an embodiment of the device of FIG. 4 after activation.
- FIG. 6 illustrates an embodiment of the device of FIG. 3 after removal of the sacrificial layer.
- FIG. 7 illustrates an embodiment of the device of FIG. 4 after formation of gate and source/drain silicide.
- FIG. 8 illustrates an embodiment of the device of FIG. 5 during implantation of the gate and source/drain silicide.
- FIG. 9 illustrates an embodiment of a FET with a FUSI gate and reduced source/drain contact resistance.
- FIG. 10 illustrates an embodiment of a method of fabricating a Schottky source/drain FET with a FUSI gate and reduced source/drain contact resistance.
- FIG. 11 illustrates an embodiment of gate stack deposition on extremely thin silicon on insulator (ETSOI).
- FIG. 12 illustrates an embodiment of the device of FIG. 11 after gate stack patterning and spacer formation.
- FIG. 13 illustrates an embodiment of the device of FIG. 12 after removal of the sacrificial layer.
- FIG. 14 illustrates an embodiment of the device of FIG. 13 after formation of gate and source/drain silicide.
- FIG. 15 illustrates an embodiment of the device of FIG. 14 during implantation of the gate and source/drain silicide.
- FIG. 16 illustrates an embodiment of a Schottky source/drain FET with a FUSI gate and reduced source/drain contact resistance.
- Embodiments of systems and methods for a FET with a fully silicided (FUSI) gate and reduced source/drain contact resistance are provided, with exemplary embodiments being discussed below in detail.
- the FET gate may comprise silicide; the source/drain regions of the FET may also comprise silicide.
- the gate and source/drain silicide that are formed simultaneously, and may have approximately equal thickness. After silicide formation, the SBH of the silicon-metal silicide interfaces at the source/drain regions, and the workfunction of the FUSI gate, may be modified by formation of segregated interfacial layers.
- the segregated interfacial layers may be formed by implanting dopants into the gate and source/drain silicide, followed by a low temperature anneal to diffuse the implanted dopants to the silicide/Si interface at the source/drain, or to the silicide/oxide interface at the gate.
- FIG. 1 illustrates a method of fabricating a FET with a FUSI gate and reduced source/drain contact resistance.
- FIG. 1 is discussed with reference to FIGS. 2-9 .
- gate stack deposition is performed on silicon 204 , as shown in FIG. 2 .
- Gate stack deposition comprises formation of gate oxide layer 203 , polysilicon layer 202 , and sacrificial layer 201 .
- Sacrificial layer 201 may comprise silicon germanium (SiGe) in some embodiments.
- the thickness of polysilicon 202 may be less than or equal to the amount of silicon that will be consumed in the silicide process, which is discussed below with respect to block 104 .
- sacrificial layer 201 , polysilicon layer 202 , and gate oxide layer 203 are patterned to form the FET gate stack, and spacers 301 A-B are formed adjacent to the FET gate stack, as shown in FIG. 3 .
- Spacers 301 A-B may comprise a nitride in some embodiments.
- Implantation 401 of dopants is performed, as is shown in FIG. 4 .
- Implantation 401 may comprise shallow implantation of n-type dopants, including but not limited to arsenic or phosphorous, to form an n-FET, or p-type dopants, including but not limited to boron, indium, or aluminum, to form a p-FET.
- the implanted device 400 is activated to form highly doped source/drain regions 501 A-B in silicon 204 , as shown in FIG. 5 .
- Activation may comprise annealing.
- the sacrificial layer 201 is removed, as shown in FIG. 6 .
- the sacrificial layer 201 may be removed using a wet etch in some embodiments.
- the gate and source/drain silicide are formed simultaneously on device 600 of FIG. 6 .
- the silicide may be formed by depositing a layer of a metal on device 600 such that the metal layer covers polysilicon layer 202 and the exposed portion of silicon 204 , then annealing device 600 after the metal deposition to cause the metal to react with the silicon to form silicide, and then removing any unreacted metal, resulting in gate silicide 701 and source/drain silicide 702 A-B, as shown in FIG. 7 .
- Source/drain silicide 702 A-B are located in high doped source/drain regions 501 A-B.
- the deposited metal may comprise nickel (Ni) or nickel platinum (NiPt) in some embodiments.
- the material comprising spacers 301 A-B may be selected such that spacers 301 A-B do not react with the deposited metal.
- the thickness of the deposited metal may be determined based on the thickness of polysilicon layer 202 , so that all of the polysilicon 202 is converted into gate silicide 701 , resulting in a FUSI gate.
- the ratio of the thickness of polysilicon layer 202 to the thickness of the deposited Ni may be about 1.8 or lower to guarantee formation of a FUSI gate.
- polysilicon layer 202 is about 18 nm thick, deposition of an Ni layer having a thickness of about 10 nm may allow all of polysilicon 202 to be consumed in the silicide process, resulting in a gate silicide 701 that comprises NiSi having a thickness of about 22 nm. Gate silicide 701 and source/drain silicide regions 702 A-B may have approximately the same thickness.
- gate silicide 701 and source drain silicide 702 A-B are implanted with dopants, as shown in FIG. 8 .
- Implantation 801 may comprise shallow implantation of n-type dopants, including but not limited to arsenic or phosphorous, to form an n-FET, or p-type dopants, including but not limited to boron, indium, or aluminum, to form a p-FET.
- low-temperature RTA is performed on device 800 in block 107 , resulting in FET 900 as shown in FIG. 9 .
- the RTA acts to drive the dopants implanted in block 106 into the silicide regions 701 and 701 A-B, forming gate interface layer 901 between gate silicide 701 and gate oxide 203 , and source/drain interface layers 902 A-B between source/drain silicide regions 702 A-B and highly doped source/drain regions 501 A-B.
- Gate interface layer 901 comprises a segregated interfacial layer, and acts set the gate workfunction for FET 900 .
- Source/drain interface layers 902 A-B comprise segregated interfacial layers, and act to reduce the source/drain contact resistance of FET 900 .
- FIG. 10 illustrates a method of fabricating a Schottky source/drain FET with a FUSI gate and reduced source/drain contact resistance.
- FIG. 10 is discussed with reference to FIGS. 11-16 .
- gate stack deposition is performed on extremely thin silicon on insulator (ETSOI), comprising silicon layer 1104 on insulator layer 1105 , as shown in FIG. 11 .
- Gate stack deposition comprises formation of gate oxide layer 1103 , polysilicon layer 1102 , and sacrificial layer 1101 .
- Sacrificial layer 1101 may comprise silicon germanium (SiGe) in some embodiments.
- the thickness of polysilicon 1102 may be less than or equal to the amount of silicon that will be consumed in the silicide process, which is discussed below with respect to block 1004 .
- sacrificial layer 1101 , polysilicon layer 1102 , and gate oxide layer 1103 are patterned to form the FET gate stack, and spacers 1201 A-B are formed adjacent to the FET gate stack, as shown in FIG. 12 .
- Spacers 1201 A-B may comprise a nitride in some embodiments.
- the sacrificial layer 1101 is removed, as shown in FIG. 13 .
- the sacrificial layer 1101 may be removed using a wet etch in some embodiments.
- the gate and source/drain silicide are formed simultaneously on device 1300 of FIG. 13 .
- the silicide may be formed by depositing a layer of a metal on device 1400 such that the metal layer covers polysilicon layer 1102 and the exposed portion of SOI 1104 , then annealing device 1300 after the metal deposition to cause the metal to react with the silicon to form silicide, and then removing any unreacted metal, resulting in gate silicide 1401 and source/drain silicide 1402 A-B, as shown in FIG. 14 .
- the deposited metal may comprise nickel (Ni) or nickel platinum (NiPt) in some embodiments.
- the material comprising spacers 1201 A-B may be selected such that spacers 1201 A-B do not react with the deposited metal.
- the thickness of the deposited metal may be determined based on the thickness of polysilicon layer 1102 , so that all of the polysilicon 1102 is converted into gate silicide 1401 , resulting in a FUSI gate.
- the ratio of the thickness of polysilicon layer 1102 to the thickness of the deposited Ni may be about 1.8 or lower to guarantee formation of a FUSI gate.
- polysilicon layer 1102 is about 18 nm thick
- deposition of an Ni layer having a thickness of about 10 nm may allow all of polysilicon 1102 to be consumed in the silicide process, resulting in a gate silicide 1401 that comprises NiSi having a thickness of about 22 nm.
- Gate silicide 1401 and source/drain silicide regions 1402 A-B may have approximately the same thickness.
- gate silicide 1401 and source drain silicide 1402 A-B are implanted with dopants, as shown in FIG. 15 .
- Implantation 1501 may comprise shallow implantation of n-type dopants, including but not limited to arsenic or phosphorous, to form an n-FET, or p-type dopants, including but not limited to boron, indium, or aluminum, to form a p-FET.
- low-temperature RTA is performed on device 1500 in block 1006 , resulting in Schottky source/drain FET 1600 as shown in FIG. 16 .
- the RTA acts to drive the dopants implanted in block 1005 into the silicide regions 1401 and 1401 A-B, forming gate interface layer 1601 between gate silicide 1401 and gate oxide 1103 , and source/drain interface layers 1602 A-B between source/drain silicide regions 1402 A-B and SOI 1104 .
- Gate interface layer 1601 comprises a segregated interfacial layer, and acts set the gate workfunction for FET 1600 .
- Source/drain interface layers 1602 A-B comprise segregated interfacial layers, and act to reduce the source/drain contact resistance of FET 1600 .
- FET 1600 comprises a FUSI gate.
- the technical effects and benefits of exemplary embodiments include simultaneous formation of gate and source/ silicide regions, resulting in a FET with a FUSI gate having an appropriate workfunction, and reduced source/drain contact resistance.
Abstract
Description
- This disclosure relates generally to the field of field effect transistor (FET) fabrication.
- A field effect transistor (FET) comprises source/drain regions and a gate region. The gate, source and drain regions may comprise doped silicon (Si), and be contacted by metal silicide contacts, or the source and drain Si can be fully silicided to form a Schottky junction FET . As FETs are made increasingly smaller, the contact resistance of the metal silicide to Si at the source/drain must also be commensurately reduced. One way to reduce the contact resistance is to reduce the Schottky barrier height (SBH) of the respective silicon-metal silicide interfaces. The gate silicon may be fully silicided (FUSI) to eliminate the poly-depletion effect. The workfunction of the FUSI gate needs to be tuned to set an appropriate threshold voltage (Vt) for the FET.
- In one aspect, a method for forming a field effect transistor (FET) includes forming a gate stack on a silicon layer, the gate stack comprising a gate polysilicon on top of a gate oxide layer; forming a fully silicided gate from the gate polysilicon and forming source/drain silicide regions in the silicon layer; implanting the gate silicide and the source/drain silicide with dopants; and performing rapid thermal annealing to form a gate interfacial layer in between the gate silicide and the gate oxide layer, and source/drain interfacial layers between the source/drain silicide regions and the silicon layer.
- In one aspect, a field effect transistor (FET) includes source/drain silicide regions located in a silicon layer; source/drain interfacial layers located in between the source/drain silicide regions and the silicon layer; and a fully silicided gate stack comprising a gate oxide layer located on the silicon layer, a gate interfacial layer located on the gate oxide layer, and a gate silicide located on the gate interfacial layer.
- Additional features are realized through the techniques of the present exemplary embodiment. Other embodiments are described in detail herein and are considered a part of what is claimed. For a better understanding of the features of the exemplary embodiment, refer to the description and to the drawings.
- Referring now to the drawings wherein like elements are numbered alike in the several FIGURES:
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FIG. 1 illustrates an embodiment of a method of fabricating a doped source/drain FET with a FUSI gate and reduced source/drain contact resistance. -
FIG. 2 illustrates an embodiment of gate stack deposition on silicon. -
FIG. 3 illustrates an embodiment of the device ofFIG. 2 after gate stack patterning and spacer formation. -
FIG. 4 illustrates an embodiment of implantation of the device ofFIG. 3 . -
FIG. 5 illustrates an embodiment of the device ofFIG. 4 after activation. -
FIG. 6 illustrates an embodiment of the device ofFIG. 3 after removal of the sacrificial layer. -
FIG. 7 illustrates an embodiment of the device ofFIG. 4 after formation of gate and source/drain silicide. -
FIG. 8 illustrates an embodiment of the device ofFIG. 5 during implantation of the gate and source/drain silicide. -
FIG. 9 illustrates an embodiment of a FET with a FUSI gate and reduced source/drain contact resistance. -
FIG. 10 illustrates an embodiment of a method of fabricating a Schottky source/drain FET with a FUSI gate and reduced source/drain contact resistance. -
FIG. 11 illustrates an embodiment of gate stack deposition on extremely thin silicon on insulator (ETSOI). -
FIG. 12 illustrates an embodiment of the device ofFIG. 11 after gate stack patterning and spacer formation. -
FIG. 13 illustrates an embodiment of the device ofFIG. 12 after removal of the sacrificial layer. -
FIG. 14 illustrates an embodiment of the device ofFIG. 13 after formation of gate and source/drain silicide. -
FIG. 15 illustrates an embodiment of the device ofFIG. 14 during implantation of the gate and source/drain silicide. -
FIG. 16 illustrates an embodiment of a Schottky source/drain FET with a FUSI gate and reduced source/drain contact resistance. - Embodiments of systems and methods for a FET with a fully silicided (FUSI) gate and reduced source/drain contact resistance are provided, with exemplary embodiments being discussed below in detail. The FET gate may comprise silicide; the source/drain regions of the FET may also comprise silicide. The gate and source/drain silicide that are formed simultaneously, and may have approximately equal thickness. After silicide formation, the SBH of the silicon-metal silicide interfaces at the source/drain regions, and the workfunction of the FUSI gate, may be modified by formation of segregated interfacial layers. The segregated interfacial layers may be formed by implanting dopants into the gate and source/drain silicide, followed by a low temperature anneal to diffuse the implanted dopants to the silicide/Si interface at the source/drain, or to the silicide/oxide interface at the gate.
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FIG. 1 illustrates a method of fabricating a FET with a FUSI gate and reduced source/drain contact resistance.FIG. 1 is discussed with reference toFIGS. 2-9 . Inblock 101, gate stack deposition is performed onsilicon 204, as shown inFIG. 2 . Gate stack deposition comprises formation ofgate oxide layer 203,polysilicon layer 202, andsacrificial layer 201.Sacrificial layer 201 may comprise silicon germanium (SiGe) in some embodiments. The thickness ofpolysilicon 202 may be less than or equal to the amount of silicon that will be consumed in the silicide process, which is discussed below with respect toblock 104. - In
block 102,sacrificial layer 201,polysilicon layer 202, andgate oxide layer 203 are patterned to form the FET gate stack, andspacers 301A-B are formed adjacent to the FET gate stack, as shown inFIG. 3 .Spacers 301A-B may comprise a nitride in some embodiments. - In
block 103,implantation 401 of dopants is performed, as is shown inFIG. 4 .Implantation 401 may comprise shallow implantation of n-type dopants, including but not limited to arsenic or phosphorous, to form an n-FET, or p-type dopants, including but not limited to boron, indium, or aluminum, to form a p-FET. Then, the implanteddevice 400 is activated to form highly doped source/drain regions 501A-B insilicon 204, as shown inFIG. 5 . Activation may comprise annealing. Inblock 104, thesacrificial layer 201 is removed, as shown inFIG. 6 . Thesacrificial layer 201 may be removed using a wet etch in some embodiments. For example, a SiGe sacrificial layer may be etched using a H2O:NH4OH:H2O2=5:1:1 solution at 85° C., which has good selectivity topolysilicon layer 202. - In
block 105, the gate and source/drain silicide are formed simultaneously ondevice 600 ofFIG. 6 . The silicide may be formed by depositing a layer of a metal ondevice 600 such that the metal layer coverspolysilicon layer 202 and the exposed portion ofsilicon 204, then annealingdevice 600 after the metal deposition to cause the metal to react with the silicon to form silicide, and then removing any unreacted metal, resulting ingate silicide 701 and source/drain silicide 702A-B, as shown inFIG. 7 . Source/drain silicide 702A-B are located in high doped source/drain regions 501A-B. The deposited metal may comprise nickel (Ni) or nickel platinum (NiPt) in some embodiments. Thematerial comprising spacers 301A-B may be selected such thatspacers 301A-B do not react with the deposited metal. The thickness of the deposited metal may be determined based on the thickness ofpolysilicon layer 202, so that all of thepolysilicon 202 is converted intogate silicide 701, resulting in a FUSI gate. In embodiments in which the deposited metal comprises Ni, the ratio of the thickness ofpolysilicon layer 202 to the thickness of the deposited Ni may be about 1.8 or lower to guarantee formation of a FUSI gate. Therefore, ifpolysilicon layer 202 is about 18 nm thick, deposition of an Ni layer having a thickness of about 10 nm may allow all ofpolysilicon 202 to be consumed in the silicide process, resulting in agate silicide 701 that comprises NiSi having a thickness of about 22 nm.Gate silicide 701 and source/drain silicide regions 702A-B may have approximately the same thickness. - In
block 106,gate silicide 701 andsource drain silicide 702A-B are implanted with dopants, as shown inFIG. 8 .Implantation 801 may comprise shallow implantation of n-type dopants, including but not limited to arsenic or phosphorous, to form an n-FET, or p-type dopants, including but not limited to boron, indium, or aluminum, to form a p-FET. After implantation, low-temperature RTA is performed ondevice 800 inblock 107, resulting inFET 900 as shown inFIG. 9 . The RTA acts to drive the dopants implanted inblock 106 into thesilicide regions 701 and 701A-B, forminggate interface layer 901 betweengate silicide 701 andgate oxide 203, and source/drain interface layers 902A-B between source/drain silicide regions 702A-B and highly doped source/drain regions 501A-B.Gate interface layer 901 comprises a segregated interfacial layer, and acts set the gate workfunction forFET 900. Source/drain interface layers 902A-B comprise segregated interfacial layers, and act to reduce the source/drain contact resistance ofFET 900. -
FIG. 10 illustrates a method of fabricating a Schottky source/drain FET with a FUSI gate and reduced source/drain contact resistance.FIG. 10 is discussed with reference toFIGS. 11-16 . Inblock 1001, gate stack deposition is performed on extremely thin silicon on insulator (ETSOI), comprisingsilicon layer 1104 oninsulator layer 1105, as shown inFIG. 11 . Gate stack deposition comprises formation ofgate oxide layer 1103,polysilicon layer 1102, andsacrificial layer 1101.Sacrificial layer 1101 may comprise silicon germanium (SiGe) in some embodiments. The thickness ofpolysilicon 1102 may be less than or equal to the amount of silicon that will be consumed in the silicide process, which is discussed below with respect to block 1004. - In
block 1002,sacrificial layer 1101,polysilicon layer 1102, andgate oxide layer 1103 are patterned to form the FET gate stack, andspacers 1201A-B are formed adjacent to the FET gate stack, as shown inFIG. 12 .Spacers 1201A-B may comprise a nitride in some embodiments. Inblock 1003, thesacrificial layer 1101 is removed, as shown inFIG. 13 . Thesacrificial layer 1101 may be removed using a wet etch in some embodiments. For example, a SiGe sacrificial layer may be etched using a H2O:NH4OH:H2O2=5:1:1 solution at 85° C., which has good selectivity topolysilicon layer 1102. - In
block 1004, the gate and source/drain silicide are formed simultaneously ondevice 1300 ofFIG. 13 . The silicide may be formed by depositing a layer of a metal ondevice 1400 such that the metal layer coverspolysilicon layer 1102 and the exposed portion ofSOI 1104, then annealingdevice 1300 after the metal deposition to cause the metal to react with the silicon to form silicide, and then removing any unreacted metal, resulting ingate silicide 1401 and source/drain silicide 1402A-B, as shown inFIG. 14 . The deposited metal may comprise nickel (Ni) or nickel platinum (NiPt) in some embodiments. Thematerial comprising spacers 1201A-B may be selected such thatspacers 1201A-B do not react with the deposited metal. The thickness of the deposited metal may be determined based on the thickness ofpolysilicon layer 1102, so that all of thepolysilicon 1102 is converted intogate silicide 1401, resulting in a FUSI gate. In embodiments in which the deposited metal comprises Ni, the ratio of the thickness ofpolysilicon layer 1102 to the thickness of the deposited Ni may be about 1.8 or lower to guarantee formation of a FUSI gate. Therefore, ifpolysilicon layer 1102 is about 18 nm thick, deposition of an Ni layer having a thickness of about 10 nm may allow all ofpolysilicon 1102 to be consumed in the silicide process, resulting in agate silicide 1401 that comprises NiSi having a thickness of about 22 nm.Gate silicide 1401 and source/drain silicide regions 1402A-B may have approximately the same thickness. - In
block 1005,gate silicide 1401 andsource drain silicide 1402A-B are implanted with dopants, as shown inFIG. 15 .Implantation 1501 may comprise shallow implantation of n-type dopants, including but not limited to arsenic or phosphorous, to form an n-FET, or p-type dopants, including but not limited to boron, indium, or aluminum, to form a p-FET. After implantation, low-temperature RTA is performed ondevice 1500 inblock 1006, resulting in Schottky source/drain FET 1600 as shown inFIG. 16 . The RTA acts to drive the dopants implanted inblock 1005 into thesilicide regions 1401 and 1401A-B, forminggate interface layer 1601 betweengate silicide 1401 andgate oxide 1103, and source/drain interface layers 1602A-B between source/drain silicide regions 1402A-B andSOI 1104.Gate interface layer 1601 comprises a segregated interfacial layer, and acts set the gate workfunction forFET 1600. Source/drain interface layers 1602A-B comprise segregated interfacial layers, and act to reduce the source/drain contact resistance ofFET 1600.FET 1600 comprises a FUSI gate. - The technical effects and benefits of exemplary embodiments include simultaneous formation of gate and source/ silicide regions, resulting in a FET with a FUSI gate having an appropriate workfunction, and reduced source/drain contact resistance.
- The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an”, and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
- The corresponding structures, materials, acts, and equivalents of all means or step plus function elements in the claims below are intended to include any structure, material, or act for performing the function in combination with other claimed elements as specifically claimed. The description of the present invention has been presented for purposes of illustration and description, but is not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the invention. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
Claims (19)
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US12/754,881 US20110241116A1 (en) | 2010-04-06 | 2010-04-06 | FET with FUSI Gate and Reduced Source/Drain Contact Resistance |
US13/569,741 US8664721B2 (en) | 2010-04-06 | 2012-08-08 | FET with FUSI gate and reduced source/drain contact resistance |
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US12/754,881 US20110241116A1 (en) | 2010-04-06 | 2010-04-06 | FET with FUSI Gate and Reduced Source/Drain Contact Resistance |
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US8664721B2 (en) | 2014-03-04 |
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