|
| US4209402 | 12 Jul 1977 | 24 Jun 1980 | | Kidney dialysis filter washing process |
| US4294271 | 30 Nov 1979 | 13 Oct 1981 | Dexon, Inc. | Apparatus for removing deposited matter from a diffusion tube |
| US4325746 | 19 Feb 1981 | 20 Abr 1982 | Olin Corporation | System for cleaning metal strip |
| US4364799 | 4 May 1979 | 21 Dic 1982 | | Method and apparatus for contacting work surfaces with liquids |
| US4396435 | 16 Feb 1982 | 2 Ago 1983 | General Electric Company | Fluid handling system |
| US4406297 | 23 Nov 1981 | 27 Sep 1983 | | Pipet washer |
| US4917123 | 3 Oct 1988 | 17 Abr 1990 | CFM Technologies Limited Partnership | Apparatus for treating wafers with process fluids |
| US5090221 | 30 Nov 1988 | 25 Feb 1992 | Westinghouse Electric Corp. | Continuous circulation water wash apparatus and method for cleaning radioactively contaminated garments |
| US5139039 | 24 Sep 1991 | 18 Ago 1992 | | Apparatus for counterflow spray rinsing within a plating barrel |
| US5246025 | 28 Mar 1991 | 21 Sep 1993 | | Controlled fluid agitation method and apparatus |
| US5286657 | 18 Dic 1991 | 15 Feb 1994 | Verteq, Inc. | Single wafer megasonic semiconductor wafer processing system |
| US6073640 | 24 Abr 1998 | 13 Jun 2000 | Valiant Machine & Tool Inc. | Part washer |
| US6143087 | 19 Feb 1999 | 7 Nov 2000 | CFMT, Inc. | Methods for treating objects |
| US6348101 | 26 Sep 2000 | 19 Feb 2002 | CFMT, Inc. | Methods for treating objects |
| US7518288 | 16 Ago 2007 | 14 Abr 2009 | | System for megasonic processing of an article |
| US7857909 | 22 Ene 2009 | 28 Dic 2010 | Dürr Ecoclean GmbH | Cleaning device including a flood chamber |