US3676963A - Method for the removal of unwanted portions of an article - Google Patents
Method for the removal of unwanted portions of an article Download PDFInfo
- Publication number
- US3676963A US3676963A US122152A US3676963DA US3676963A US 3676963 A US3676963 A US 3676963A US 122152 A US122152 A US 122152A US 3676963D A US3676963D A US 3676963DA US 3676963 A US3676963 A US 3676963A
- Authority
- US
- United States
- Prior art keywords
- ice particles
- ice
- particles
- article
- cooling agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
- B24C1/083—Deburring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12215271A | 1971-03-08 | 1971-03-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3676963A true US3676963A (en) | 1972-07-18 |
Family
ID=22401001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US122152A Expired - Lifetime US3676963A (en) | 1971-03-08 | 1971-03-08 | Method for the removal of unwanted portions of an article |
Country Status (1)
Country | Link |
---|---|
US (1) | US3676963A (en) |
Cited By (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3745722A (en) * | 1971-09-13 | 1973-07-17 | Roto Finish Co | Finishing method |
DE2543019A1 (en) * | 1974-09-27 | 1976-04-08 | Lockheed Aircraft Corp | SANDBASING METHOD AND EQUIPMENT FOR IMPLEMENTING IT |
FR2341404A1 (en) * | 1976-02-23 | 1977-09-16 | Gen Electric | METHOD FOR REMOVING FOREIGN BODIES FROM THE SURFACE OF AN OBJECT |
DE2948380A1 (en) * | 1979-12-01 | 1981-07-09 | Alexandr Vladimirovič Saratov Lizin | Flash blasted from duroplastic component - using straight and helical air streams and crushed fruit stones |
FR2475425A1 (en) * | 1980-02-08 | 1981-08-14 | Reel Sa | Cleaner for external aircraft surfaces - combines compressed air with water and coolant to produce stream of ice particles |
EP0041797A1 (en) * | 1980-06-05 | 1981-12-16 | Parfloor Limited | Surface treatment |
EP0043534A2 (en) * | 1980-07-03 | 1982-01-13 | Air Products And Chemicals, Inc. | Improved in-line slush making process |
EP0043533A2 (en) * | 1980-07-03 | 1982-01-13 | Air Products And Chemicals, Inc. | In-line lin slush making for concrete cooling |
FR2494160A1 (en) * | 1980-11-17 | 1982-05-21 | Chausson Usines Sa | Abrasive surface treatment for polishing vehicle - forms ice crystals projected onto work in cold air stream |
US4389820A (en) * | 1980-12-29 | 1983-06-28 | Lockheed Corporation | Blasting machine utilizing sublimable particles |
FR2551368A1 (en) * | 1983-09-01 | 1985-03-08 | Doryokuro Kakunenryo | CLEANING METHOD AND APPARATUS |
FR2552004A1 (en) * | 1983-09-19 | 1985-03-22 | Ishikawajima Harima Heavy Ind | CLEANING METHOD AND APPARATUS |
US4519812A (en) * | 1983-10-28 | 1985-05-28 | Aga Ab | Cryogen shot blast deflashing system with jointed supply conduit |
EP0164914A1 (en) * | 1984-05-15 | 1985-12-18 | N.I.S. Engineering Limited | Jet cleaning operation |
WO1986000833A1 (en) * | 1984-07-31 | 1986-02-13 | Cryoblast Inc. | Cleaning method and apparatus |
US4598501A (en) * | 1983-10-28 | 1986-07-08 | Aga Ab | Cryogen shot blast deflashing system with bellows return conduit |
EP0194121A1 (en) * | 1985-03-02 | 1986-09-10 | Kue Engineering Limited | Blast cleaning |
US4631250A (en) * | 1985-03-13 | 1986-12-23 | Research Development Corporation Of Japan | Process for removing covering film and apparatus therefor |
US4648214A (en) * | 1983-10-28 | 1987-03-10 | Aga Ab | Cryogen shot blast deflashing system |
US4703590A (en) * | 1984-11-20 | 1987-11-03 | Westergaard Knud E | Method and apparatus for particle blasting using particles of a material that changes its state |
US4744181A (en) * | 1986-11-17 | 1988-05-17 | Moore David E | Particle-blast cleaning apparatus and method |
US4747421A (en) * | 1985-03-13 | 1988-05-31 | Research Development Corporation Of Japan | Apparatus for removing covering film |
DE3804694A1 (en) * | 1987-06-23 | 1989-01-05 | Taiyo Sanso Co Ltd | METHOD FOR SURFACE PROCESSING FOR SEMICONDUCTOR WAFERS AND DEVICE FOR IMPLEMENTING THE METHOD |
DE3720992A1 (en) * | 1987-06-25 | 1989-01-05 | Nusec Gmbh | Method and facility for abrasive blasting of surfaces, in particular of contaminated surfaces |
EP0316264A2 (en) * | 1987-11-11 | 1989-05-17 | Werner & Zeisse GmbH & Co. | Method and device for stripping enamel and for removing layers from surfaces |
US4947592A (en) * | 1988-08-01 | 1990-08-14 | Cold Jet, Inc. | Particle blast cleaning apparatus |
US5063015A (en) * | 1989-03-13 | 1991-11-05 | Cold Jet, Inc. | Method for deflashing articles |
US5111984A (en) * | 1990-10-15 | 1992-05-12 | Ford Motor Company | Method of cutting workpieces having low thermal conductivity |
DE4112890A1 (en) * | 1991-04-19 | 1992-10-22 | Abony Szuecs Eva | METHOD AND DEVICE FOR CLEANING SURFACES, ESPECIALLY SENSITIVE SURFACES |
US5222332A (en) * | 1991-04-10 | 1993-06-29 | Mains Jr Gilbert L | Method for material removal |
US5257742A (en) * | 1991-05-08 | 1993-11-02 | Fimatec Ltd. | Ultrafine grinding mill of which fed material flows down through an agitated bed composed of small grinding medium |
US5271234A (en) * | 1992-12-18 | 1993-12-21 | David L. Carter | Apparatus for and method of removing tile from a floor |
GB2270486A (en) * | 1990-09-27 | 1994-03-16 | Waste Minimization & Containme | Carbon dioxide blast cleaning system |
US5318636A (en) * | 1991-04-19 | 1994-06-07 | Eva Abony Szucs | Method for cleaning surfaces, in particular sensitive surfaces |
US5343491A (en) * | 1991-11-28 | 1994-08-30 | Carbagas And Von Roll Ag | Method of suppressing dust and fumes during electric steel production |
WO1994023896A1 (en) * | 1993-04-16 | 1994-10-27 | Ice Blast International, Inc. | Ice blast particle transport system for ice fracturing system |
US5364474A (en) * | 1993-07-23 | 1994-11-15 | Williford Jr John F | Method for removing particulate matter |
US5367838A (en) * | 1992-06-01 | 1994-11-29 | Ice Blast International, Inc. | Particle blasting using crystalline ice |
US5415584A (en) * | 1993-09-21 | 1995-05-16 | Tomco2 Equipment Company | Particle blast cleaning apparatus |
US5472369A (en) * | 1993-04-29 | 1995-12-05 | Martin Marietta Energy Systems, Inc. | Centrifugal accelerator, system and method for removing unwanted layers from a surface |
US5545073A (en) * | 1993-04-05 | 1996-08-13 | Ford Motor Company | Silicon micromachined CO2 cleaning nozzle and method |
US5599223A (en) * | 1991-04-10 | 1997-02-04 | Mains Jr.; Gilbert L. | Method for material removal |
US5616067A (en) * | 1996-01-16 | 1997-04-01 | Ford Motor Company | CO2 nozzle and method for cleaning pressure-sensitive surfaces |
US5679062A (en) * | 1995-05-05 | 1997-10-21 | Ford Motor Company | CO2 cleaning nozzle and method with enhanced mixing zones |
US5718619A (en) * | 1996-10-09 | 1998-02-17 | Cmi International, Inc. | Abrasive machining assembly |
US5931721A (en) * | 1994-11-07 | 1999-08-03 | Sumitomo Heavy Industries, Ltd. | Aerosol surface processing |
US5961732A (en) * | 1997-06-11 | 1999-10-05 | Fsi International, Inc | Treating substrates by producing and controlling a cryogenic aerosol |
US5967156A (en) * | 1994-11-07 | 1999-10-19 | Krytek Corporation | Processing a surface |
EP0953410A1 (en) * | 1998-04-16 | 1999-11-03 | de Schaetzen van Brienen, Norbert | Method and device for cleaning by blasting with particles |
US6036786A (en) * | 1997-06-11 | 2000-03-14 | Fsi International Inc. | Eliminating stiction with the use of cryogenic aerosol |
US6039059A (en) * | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
US6168501B1 (en) * | 1998-07-29 | 2001-01-02 | Tdk Corporation | Grinding method of microelectronic device |
US6572457B2 (en) | 1998-09-09 | 2003-06-03 | Applied Surface Technologies | System and method for controlling humidity in a cryogenic aerosol spray cleaning system |
EP1317995A1 (en) * | 2001-12-05 | 2003-06-11 | Siemens Aktiengesellschaft | Method and apparatus for smoothing the surface of a gas turbine airfoil |
US20040224618A1 (en) * | 2000-09-08 | 2004-11-11 | Rivir Michael E. | Particle blast apparatus |
US20050107006A1 (en) * | 2003-11-19 | 2005-05-19 | Shinichi Makino | Ice blasting apparatus and trimming method for film insert molding |
US20050123418A1 (en) * | 2003-12-08 | 2005-06-09 | Manole Dan M. | Compact compressors and refrigeration systems |
US20080171151A1 (en) * | 2007-01-16 | 2008-07-17 | Alstom Technology Ltd | Process for extending the cylic service life of thermal barrier coatings, in particular on gas turbine components |
WO2012117077A1 (en) * | 2011-03-01 | 2012-09-07 | Boehm Wilfried | Method and device for preparing a dry ice/water ice mixture as a blasting agent |
WO2021259424A1 (en) * | 2020-06-22 | 2021-12-30 | Mycon Gmbh | Method for cooling and/or separating adhesively bonded components and/or removing adhesive residues from surfaces and jet apparatus herefor |
US11420229B2 (en) | 2017-06-13 | 2022-08-23 | Hymmen GmbH Maschinen—und Anlagenbau | Method and apparatus for producing a decorative surface |
WO2022268244A1 (en) * | 2021-06-22 | 2022-12-29 | Mycon Gmbh | Method for lowering the temperature of and/or maintaining low temperatures of an object by means of a liquid gas, especially by means of liquid carbon dioxide, and apparatus suitable for this purpose |
US11559824B2 (en) | 2019-05-03 | 2023-01-24 | Hymmen Gmbh Maschinen-Und Anlagenbau | Method for producing a structure on a surface |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2380653A (en) * | 1944-03-02 | 1945-07-31 | Crane Packing Co | Method of removing fins from molded products |
US2600282A (en) * | 1950-12-07 | 1952-06-10 | Goodrich Co B F | Apparatus for tumbling rubber articles |
US2682732A (en) * | 1952-01-18 | 1954-07-06 | Cardox Corp | Apparatus for removing fins from molded products |
US2881571A (en) * | 1955-10-18 | 1959-04-14 | Air Reduction | Removing fins from molded products |
US2996846A (en) * | 1959-07-29 | 1961-08-22 | Bell Intercontrinental Corp | Method and means for deflashing or trimming molded rubber parts |
US3110983A (en) * | 1962-12-06 | 1963-11-19 | Pangborn Corp | Method and apparatus for deflashing molded resilient pieces |
US3137101A (en) * | 1962-12-03 | 1964-06-16 | Bell Intercontinental Corp | Method and apparatus for deflashing parts |
US3160993A (en) * | 1963-08-05 | 1964-12-15 | Pangborn Corp | Method and apparatus for deflashing molded resilient pieces |
US3324605A (en) * | 1964-06-09 | 1967-06-13 | Lester Castings Inc | Tumble-finishing process and media therefor |
-
1971
- 1971-03-08 US US122152A patent/US3676963A/en not_active Expired - Lifetime
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2380653A (en) * | 1944-03-02 | 1945-07-31 | Crane Packing Co | Method of removing fins from molded products |
US2600282A (en) * | 1950-12-07 | 1952-06-10 | Goodrich Co B F | Apparatus for tumbling rubber articles |
US2682732A (en) * | 1952-01-18 | 1954-07-06 | Cardox Corp | Apparatus for removing fins from molded products |
US2881571A (en) * | 1955-10-18 | 1959-04-14 | Air Reduction | Removing fins from molded products |
US2996846A (en) * | 1959-07-29 | 1961-08-22 | Bell Intercontrinental Corp | Method and means for deflashing or trimming molded rubber parts |
US3137101A (en) * | 1962-12-03 | 1964-06-16 | Bell Intercontinental Corp | Method and apparatus for deflashing parts |
US3110983A (en) * | 1962-12-06 | 1963-11-19 | Pangborn Corp | Method and apparatus for deflashing molded resilient pieces |
US3160993A (en) * | 1963-08-05 | 1964-12-15 | Pangborn Corp | Method and apparatus for deflashing molded resilient pieces |
US3324605A (en) * | 1964-06-09 | 1967-06-13 | Lester Castings Inc | Tumble-finishing process and media therefor |
Cited By (103)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3745722A (en) * | 1971-09-13 | 1973-07-17 | Roto Finish Co | Finishing method |
DE2543019A1 (en) * | 1974-09-27 | 1976-04-08 | Lockheed Aircraft Corp | SANDBASING METHOD AND EQUIPMENT FOR IMPLEMENTING IT |
US4038786A (en) * | 1974-09-27 | 1977-08-02 | Lockheed Aircraft Corporation | Sandblasting with pellets of material capable of sublimation |
FR2341404A1 (en) * | 1976-02-23 | 1977-09-16 | Gen Electric | METHOD FOR REMOVING FOREIGN BODIES FROM THE SURFACE OF AN OBJECT |
DE2948380A1 (en) * | 1979-12-01 | 1981-07-09 | Alexandr Vladimirovič Saratov Lizin | Flash blasted from duroplastic component - using straight and helical air streams and crushed fruit stones |
FR2475425A1 (en) * | 1980-02-08 | 1981-08-14 | Reel Sa | Cleaner for external aircraft surfaces - combines compressed air with water and coolant to produce stream of ice particles |
EP0041797A1 (en) * | 1980-06-05 | 1981-12-16 | Parfloor Limited | Surface treatment |
EP0043533A2 (en) * | 1980-07-03 | 1982-01-13 | Air Products And Chemicals, Inc. | In-line lin slush making for concrete cooling |
EP0043534A2 (en) * | 1980-07-03 | 1982-01-13 | Air Products And Chemicals, Inc. | Improved in-line slush making process |
EP0043533A3 (en) * | 1980-07-03 | 1984-07-04 | Air Products And Chemicals, Inc. | In-line lin slush making for concrete cooling |
EP0043534A3 (en) * | 1980-07-03 | 1984-07-04 | Air Products And Chemicals, Inc. | Improved in-line slush making process |
FR2494160A1 (en) * | 1980-11-17 | 1982-05-21 | Chausson Usines Sa | Abrasive surface treatment for polishing vehicle - forms ice crystals projected onto work in cold air stream |
US4389820A (en) * | 1980-12-29 | 1983-06-28 | Lockheed Corporation | Blasting machine utilizing sublimable particles |
FR2551368A1 (en) * | 1983-09-01 | 1985-03-08 | Doryokuro Kakunenryo | CLEANING METHOD AND APPARATUS |
US4655847A (en) * | 1983-09-01 | 1987-04-07 | Tsuyoshi Ichinoseki | Cleaning method |
FR2552004A1 (en) * | 1983-09-19 | 1985-03-22 | Ishikawajima Harima Heavy Ind | CLEANING METHOD AND APPARATUS |
US4648214A (en) * | 1983-10-28 | 1987-03-10 | Aga Ab | Cryogen shot blast deflashing system |
US4598501A (en) * | 1983-10-28 | 1986-07-08 | Aga Ab | Cryogen shot blast deflashing system with bellows return conduit |
US4519812A (en) * | 1983-10-28 | 1985-05-28 | Aga Ab | Cryogen shot blast deflashing system with jointed supply conduit |
EP0164914A1 (en) * | 1984-05-15 | 1985-12-18 | N.I.S. Engineering Limited | Jet cleaning operation |
WO1986000833A1 (en) * | 1984-07-31 | 1986-02-13 | Cryoblast Inc. | Cleaning method and apparatus |
US4617064A (en) * | 1984-07-31 | 1986-10-14 | Cryoblast, Inc. | Cleaning method and apparatus |
US4703590A (en) * | 1984-11-20 | 1987-11-03 | Westergaard Knud E | Method and apparatus for particle blasting using particles of a material that changes its state |
US4965968A (en) * | 1985-03-02 | 1990-10-30 | Kue Engineering Limited | Blast cleaning |
EP0194121A1 (en) * | 1985-03-02 | 1986-09-10 | Kue Engineering Limited | Blast cleaning |
WO1986005136A1 (en) * | 1985-03-02 | 1986-09-12 | Kue Engineering Limited | Blast cleaning |
US4747421A (en) * | 1985-03-13 | 1988-05-31 | Research Development Corporation Of Japan | Apparatus for removing covering film |
US4631250A (en) * | 1985-03-13 | 1986-12-23 | Research Development Corporation Of Japan | Process for removing covering film and apparatus therefor |
US4744181A (en) * | 1986-11-17 | 1988-05-17 | Moore David E | Particle-blast cleaning apparatus and method |
DE3804694A1 (en) * | 1987-06-23 | 1989-01-05 | Taiyo Sanso Co Ltd | METHOD FOR SURFACE PROCESSING FOR SEMICONDUCTOR WAFERS AND DEVICE FOR IMPLEMENTING THE METHOD |
DE3844649C2 (en) * | 1987-06-23 | 1992-04-23 | Taiyo Sanso Co. Ltd., Osaka, Jp | |
DE3844648C2 (en) * | 1987-06-23 | 1992-02-20 | Taiyo Sanso Co. Ltd., Osaka, Jp | |
DE3720992A1 (en) * | 1987-06-25 | 1989-01-05 | Nusec Gmbh | Method and facility for abrasive blasting of surfaces, in particular of contaminated surfaces |
EP0316264A2 (en) * | 1987-11-11 | 1989-05-17 | Werner & Zeisse GmbH & Co. | Method and device for stripping enamel and for removing layers from surfaces |
EP0316264A3 (en) * | 1987-11-11 | 1989-12-13 | Howaldtswerke-Deutsche Werft Ag | Method and device for stripping enamel and for removing layers from surfaces |
US4947592A (en) * | 1988-08-01 | 1990-08-14 | Cold Jet, Inc. | Particle blast cleaning apparatus |
US5063015A (en) * | 1989-03-13 | 1991-11-05 | Cold Jet, Inc. | Method for deflashing articles |
GB2270486A (en) * | 1990-09-27 | 1994-03-16 | Waste Minimization & Containme | Carbon dioxide blast cleaning system |
EP0596168A1 (en) * | 1990-09-27 | 1994-05-11 | WASTE MINIMIZATION & CONTAINMENT SERVICES INC. | Blast cleaning system |
US5111984A (en) * | 1990-10-15 | 1992-05-12 | Ford Motor Company | Method of cutting workpieces having low thermal conductivity |
US5222332A (en) * | 1991-04-10 | 1993-06-29 | Mains Jr Gilbert L | Method for material removal |
US5599223A (en) * | 1991-04-10 | 1997-02-04 | Mains Jr.; Gilbert L. | Method for material removal |
DE4112890A1 (en) * | 1991-04-19 | 1992-10-22 | Abony Szuecs Eva | METHOD AND DEVICE FOR CLEANING SURFACES, ESPECIALLY SENSITIVE SURFACES |
US5318636A (en) * | 1991-04-19 | 1994-06-07 | Eva Abony Szucs | Method for cleaning surfaces, in particular sensitive surfaces |
US5257742A (en) * | 1991-05-08 | 1993-11-02 | Fimatec Ltd. | Ultrafine grinding mill of which fed material flows down through an agitated bed composed of small grinding medium |
US5343491A (en) * | 1991-11-28 | 1994-08-30 | Carbagas And Von Roll Ag | Method of suppressing dust and fumes during electric steel production |
US5367838A (en) * | 1992-06-01 | 1994-11-29 | Ice Blast International, Inc. | Particle blasting using crystalline ice |
US5271234A (en) * | 1992-12-18 | 1993-12-21 | David L. Carter | Apparatus for and method of removing tile from a floor |
US5545073A (en) * | 1993-04-05 | 1996-08-13 | Ford Motor Company | Silicon micromachined CO2 cleaning nozzle and method |
WO1994023896A1 (en) * | 1993-04-16 | 1994-10-27 | Ice Blast International, Inc. | Ice blast particle transport system for ice fracturing system |
US5472369A (en) * | 1993-04-29 | 1995-12-05 | Martin Marietta Energy Systems, Inc. | Centrifugal accelerator, system and method for removing unwanted layers from a surface |
US5666821A (en) * | 1993-04-29 | 1997-09-16 | Lockheed Martin Energy Systems, Inc. | Method for producing pellets for use in a cryoblasting process |
US5558110A (en) * | 1993-07-23 | 1996-09-24 | Williford, Jr.; John F. | Apparatus for removing particulate matter |
US5364474A (en) * | 1993-07-23 | 1994-11-15 | Williford Jr John F | Method for removing particulate matter |
US5415584A (en) * | 1993-09-21 | 1995-05-16 | Tomco2 Equipment Company | Particle blast cleaning apparatus |
US5967156A (en) * | 1994-11-07 | 1999-10-19 | Krytek Corporation | Processing a surface |
US5931721A (en) * | 1994-11-07 | 1999-08-03 | Sumitomo Heavy Industries, Ltd. | Aerosol surface processing |
US6203406B1 (en) | 1994-11-07 | 2001-03-20 | Sumitomo Heavy Industries, Ltd. | Aerosol surface processing |
US5679062A (en) * | 1995-05-05 | 1997-10-21 | Ford Motor Company | CO2 cleaning nozzle and method with enhanced mixing zones |
US5616067A (en) * | 1996-01-16 | 1997-04-01 | Ford Motor Company | CO2 nozzle and method for cleaning pressure-sensitive surfaces |
US6681782B2 (en) | 1996-09-30 | 2004-01-27 | Verteq, Inc. | Wafer cleaning |
US7518288B2 (en) | 1996-09-30 | 2009-04-14 | Akrion Technologies, Inc. | System for megasonic processing of an article |
US20060180186A1 (en) * | 1996-09-30 | 2006-08-17 | Bran Mario E | Transducer assembly for megasonic processing of an article |
US6039059A (en) * | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
US6140744A (en) * | 1996-09-30 | 2000-10-31 | Verteq, Inc. | Wafer cleaning system |
US20060175935A1 (en) * | 1996-09-30 | 2006-08-10 | Bran Mario E | Transducer assembly for megasonic processing of an article |
US7211932B2 (en) | 1996-09-30 | 2007-05-01 | Akrion Technologies, Inc. | Apparatus for megasonic processing of an article |
US6295999B1 (en) | 1996-09-30 | 2001-10-02 | Verteq, Inc. | Wafer cleaning method |
US6463938B2 (en) | 1996-09-30 | 2002-10-15 | Verteq, Inc. | Wafer cleaning method |
US7268469B2 (en) | 1996-09-30 | 2007-09-11 | Akrion Technologies, Inc. | Transducer assembly for megasonic processing of an article and apparatus utilizing the same |
US8771427B2 (en) | 1996-09-30 | 2014-07-08 | Akrion Systems, Llc | Method of manufacturing integrated circuit devices |
US8257505B2 (en) | 1996-09-30 | 2012-09-04 | Akrion Systems, Llc | Method for megasonic processing of an article |
US7117876B2 (en) | 1996-09-30 | 2006-10-10 | Akrion Technologies, Inc. | Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate |
US6684891B2 (en) | 1996-09-30 | 2004-02-03 | Verteq, Inc. | Wafer cleaning |
US20040206371A1 (en) * | 1996-09-30 | 2004-10-21 | Bran Mario E. | Wafer cleaning |
US5718619A (en) * | 1996-10-09 | 1998-02-17 | Cmi International, Inc. | Abrasive machining assembly |
US5961732A (en) * | 1997-06-11 | 1999-10-05 | Fsi International, Inc | Treating substrates by producing and controlling a cryogenic aerosol |
US6036786A (en) * | 1997-06-11 | 2000-03-14 | Fsi International Inc. | Eliminating stiction with the use of cryogenic aerosol |
EP0953410A1 (en) * | 1998-04-16 | 1999-11-03 | de Schaetzen van Brienen, Norbert | Method and device for cleaning by blasting with particles |
US6168501B1 (en) * | 1998-07-29 | 2001-01-02 | Tdk Corporation | Grinding method of microelectronic device |
US6572457B2 (en) | 1998-09-09 | 2003-06-03 | Applied Surface Technologies | System and method for controlling humidity in a cryogenic aerosol spray cleaning system |
US7950984B2 (en) | 2000-09-08 | 2011-05-31 | Cold Jet, Inc. | Particle blast apparatus |
US20040224618A1 (en) * | 2000-09-08 | 2004-11-11 | Rivir Michael E. | Particle blast apparatus |
EP1317995A1 (en) * | 2001-12-05 | 2003-06-11 | Siemens Aktiengesellschaft | Method and apparatus for smoothing the surface of a gas turbine airfoil |
CN100346929C (en) * | 2001-12-05 | 2007-11-07 | 西门子公司 | Method and device for polishing the surface of a gas turbine blade |
WO2003047814A1 (en) * | 2001-12-05 | 2003-06-12 | Siemens Aktiengesellschaft | Method and device for polishing the surface of a gas turbine blade |
US20050107006A1 (en) * | 2003-11-19 | 2005-05-19 | Shinichi Makino | Ice blasting apparatus and trimming method for film insert molding |
US7040962B2 (en) * | 2003-11-19 | 2006-05-09 | Fuji Seiki Machine Works, Ltd. | Ice blasting apparatus and trimming method for film insert molding |
US20050123418A1 (en) * | 2003-12-08 | 2005-06-09 | Manole Dan M. | Compact compressors and refrigeration systems |
US20080171151A1 (en) * | 2007-01-16 | 2008-07-17 | Alstom Technology Ltd | Process for extending the cylic service life of thermal barrier coatings, in particular on gas turbine components |
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