US3858307A - Electrostatic transducer - Google Patents
Electrostatic transducer Download PDFInfo
- Publication number
- US3858307A US3858307A US337843A US33784373A US3858307A US 3858307 A US3858307 A US 3858307A US 337843 A US337843 A US 337843A US 33784373 A US33784373 A US 33784373A US 3858307 A US3858307 A US 3858307A
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- US
- United States
- Prior art keywords
- vibratile
- film
- polarizing
- saturation
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Definitions
- This invention relates to electrostatic type transducers and particularly to a method of polarizing vibratile films of electrostatic type transducers, the vibratile films being permanently polarized after assembly into housings of the transducers.
- the electrostatic type speaker which is a typical example of the electrostatic type transducer, is usually of a construction as shown in FIG. 1 of the accompanying drawing. It comprises a vibratile film 1 of a dielectric material, a vibratile electrode 2 formed by depositing or applying a thin film of such material as aluminum and silver on one surface of the dielectric film l and vibrating therewith, and a stationary electrode 3 of a punched or perforate metal plate extending parallel to the vibratile film 1 to form a capacitor therewith.
- the stationary electrode 3 and vibrating film 1 are spaced apart a certain distance conforming to the required acoustic characteristics of the speaker by a spacer 5 defining an air layer 6 between them.
- the speaker unit should include a high voltage generator and an amplifier as well as requiring a signal input terminal and a bias voltage terminal, which imposes restriction on the speaker design and leads to increased manufacturing cost.
- the high d-c bias voltage will cause ionization of the air layer between the electrodes, thus rendering the speaker sensitivity unstable resulting in various practical problems. Further, the use of high d-c voltage is quite hazardous to the user.
- an object of the invention is to provide an electrostatic type transducer, which is free from the drawbacks inherent in the conventional transducers of these types and can be readily manufactured.
- Another object of the invention is to provide an electro-static transducer for use in speakers, microphones, pickups and the like, which uses a vibratile film of a dielectric material such as a plastic film capable of readily undergoing permanent polarization by the forced induction and charge attraction phenomena therein and does not require any d-c bias voltage for operation.
- a vibratile film of a dielectric material such as a plastic film capable of readily undergoing permanent polarization by the forced induction and charge attraction phenomena therein and does not require any d-c bias voltage for operation.
- a permanent electrostatic charge can be built up on the vibratile film by applying a saturation polarizing voltage thereto for several seconds, so that it is possible to manufacture an electrostatic transducer without requiring any d-c bias voltage for its operation.
- a saturation polarizing voltage thereto for several seconds, so that it is possible to manufacture an electrostatic transducer without requiring any d-c bias voltage for its operation.
- the ionization of the air layer between the electrodes can be eliminated to greatly improve the sensitivity and other characteristics of the transducer.
- the saturation polarizing voltage maybe applied after the vibrating film is assembled into a housing of the transducer such as a speaker, microphone and the like. By so doing, the initially built-up charge may be prevented from being otherwise neutralized during the assemblage.
- FIG. 1 is a schematic representation of a prior-art electrostatic transducer
- FIG. 2 is a schematic representation of the principles underlying the invention.
- FIG. 3 is a graph representing a hysteresis characteristic showing the relationship between the polarizing voltage E applied on the vibrating film and the residual sound pressure after the removal of the polarizing voltage E,,, which is obtained when the vibratile film according to the invention is applied to a speaker.
- Aluminum was deposited on one surface of an unpolarized film of polyethylene terephthalate known commercially by the trademark Tetron" and assembled, as a vibratile film, into a housing of an electrostatic speaker, opposite to a stationary electrode and spaced therefrom so as to define an air layer. It was found that a capacitor consisting of the deposited aluminum layer, Tetron film, air layer and the stationary electrode exhibits a hysteresis phenomenon due to absorbed surface charges. This phenomenon is thought to correspond to a ferroelectric phenomenon of a ferroelectric substance and is called a hysteresis of the condenser speaker with absorbed surface charges.
- reference numeral 7 designates a vibratile dielectric thin film made of such plastic material as Tetron and Mylar trademarks for polyethylene terephthalate, polymide or a fluorine compound resin, for instance ethylene tetrafluoride'or polyvinylidene fluoride, capable of readily undergoing permanent polarization.
- the vibratile film initially undergoes no polarization.
- the vibratile film is provided on one side with a vibratile electrode 8 as in the conventional transducer. It faces a stationary electrode 9 formed with a plurality of small pores 10.
- the stationary electrode 9 and the vibrating film 7 define an air layer 11 therebetween.
- a capacitor consisting of the electrodes 8 and 9 in between which the vibratile film 7 and the air layer 11 are sandwiched is formed.
- a saturation polarizing voltage E is applied between the electrodes 8 and 9 such that the residual charge on the vibratile film 7 is maximum, thereby causing the ferroelectric phenomenon in the vibratile film 7 due to absorbed surface charges and thereby polarizing permanently the vibratile film 7.
- the direction of polarization when the polarizing voltage E is applied between the electrodes 8 and 9 is shown in FIG. 2. Even when the polarizing voltage E is removed, the vibratile film 7 still remains polarized. This is thought to be due to spontaneous polarization for permanent superficial charge attraction. That is, spontaneous polarization is induced in the vibratile film 7 and permanent superficial charge attraction consequently occurs in opposite surfaces of the vibratile film 7.
- FIG. 3 shows a hysteresis of the output residual sound pressure p, which is obtained by using a Tetron film 15 microns thick as the vibratile film 7 and applying input signal e after the application of polarizing voltage E for several seconds without heating the vibratile film 7.
- the sound pressure would follow the dashed plot in FIG. 3. Actually, the plastic film usually bears a slight negative charge. Due to the natural charging of the film and the application of the polarizing voltage, the output sound pressure will start to follow segment 1 of the plot and then follow through segments 2, 3, 4, 5 and 6 of the hysteresis curve in the mentioned order back to segment 2 as the polarizing voltage on the non-polarized film is increased in small steps to a positive maximum, then reduced to a negative maximum and back to the positive maximum.
- the saturation polarizing voltage E is determined by the speaker construction, the thickness of the air layer 11 and the material of the vibratile film 7. After removal of the saturation polarizing voltage a residual sound pressure of about 98 db may be obtained, so that the bias voltage becomes unnecessary.
- plastic material is selected from a group consisting of polyethylene terephthalate, a polyimide resin and fluorine compound resin.
Abstract
A method of permanently polarizing a vibratile film of an electrostatic transducer wherein an unpolarized film having a vibratile electrode on one side is disposed in a housing opposite a stationary electrode. A saturation polarizing voltage is applied across the vibratile and stationary electrodes to cause a ferroelectric phenomenon due to absorbed surface charges to occur in the vibratile film thereby permanently polarizing the vibratile film.
Description
United States Patent 1 Yoshimura et al.
[ ELECTROSTATIC TRANSDUCER [75] Inventors: Hisashi Yoshimura, Minoo;
Nobuhisa Atoji, Shijonawate, both of Japan Matsushita Electric Industrial Co., Ltd., Osaka, Japan [22] Filed: Mar. 5, 1973 [21] Appl. No.: 337,843
Related US. Application Data [63] Continuation of Ser. No. 95,856, Dec. 7, 1970,
abandoned.
[73] Assignee:
[30] Foreign Application Priority Data Dec. 11, 1969 Japan 44-99939 [52] US. Cl. 29/594, 29/592, 179/100.4l B, 179/111 E, 307/88 ET, 317/262 A [51] Int. Cl H04r 31/00 [58] Field of'Search 29/592, 594; 317/262; 307/88 ET; 179/111 E, 100.4 B, DIG. 10
[ Jan. 7, 1975 [56] References Cited UNITED STATES PATENTS 3,705,312 12/1972 Sessler et al. 307/88 ET Primary Examiner-C. W. Lanham Assistant Examiner-Joseph A. Walkowski Attorney, Agent, or Firm-Stevens, Davis, Miller & Mosher [5 7] ABSTRACT Patented Jan. 7, 1975 3,858,307
2 Sheets-Sheet 2 -/000 -600f 00 200 1600 /000 5PM I-IOU 1 ELECTROSTATIC TRANSDUCER This is a continuation of application Ser. No. 95,856, filed Dec. 7, 1970.
This invention relates to electrostatic type transducers and particularly to a method of polarizing vibratile films of electrostatic type transducers, the vibratile films being permanently polarized after assembly into housings of the transducers.
The electrostatic type speaker, which is a typical example of the electrostatic type transducer, is usually of a construction as shown in FIG. 1 of the accompanying drawing. It comprises a vibratile film 1 of a dielectric material, a vibratile electrode 2 formed by depositing or applying a thin film of such material as aluminum and silver on one surface of the dielectric film l and vibrating therewith, and a stationary electrode 3 of a punched or perforate metal plate extending parallel to the vibratile film 1 to form a capacitor therewith. The stationary electrode 3 and vibrating film 1 are spaced apart a certain distance conforming to the required acoustic characteristics of the speaker by a spacer 5 defining an air layer 6 between them.
In the speaker of the above construction, when a-c signal e is superimposed upon a high d-c bias voltage E between both the electrodes 2 and 3, the vibratile film 1 is vibrated to produce sound pressure.
Since the prior-art transducer of the above type requires a high d-c bias voltage E for its operation, the speaker unit should include a high voltage generator and an amplifier as well as requiring a signal input terminal and a bias voltage terminal, which imposes restriction on the speaker design and leads to increased manufacturing cost. Besides, the high d-c bias voltage will cause ionization of the air layer between the electrodes, thus rendering the speaker sensitivity unstable resulting in various practical problems. Further, the use of high d-c voltage is quite hazardous to the user.
To overcome the above drawbacks inherent in the electrostatic type transducer requiring a high d-c bias voltage, it has been proposed to use the Electret film of a plastic material, which is pre-polarized and carries a permanent electostatic charge, as the vibratile film of the transducer. To pre-polarize the plastic film, however, it is usually necessary to heat the film by placing it in a strong d-c electric field up to its softening point, maintaining it at this temperature for a certain period of time and then cooling it down to room temperature in a certain period of time, thereby to freeze or thermoset its polarization. However, this requires not only special equipment but also complicated manufacturing steps, and a long time (1 to 0.5 hours) so that the productivity is inferior and the manufacturing cost is high.
Accordingly, an object of the invention is to provide an electrostatic type transducer, which is free from the drawbacks inherent in the conventional transducers of these types and can be readily manufactured.
Another object of the invention is to provide an electro-static transducer for use in speakers, microphones, pickups and the like, which uses a vibratile film of a dielectric material such as a plastic film capable of readily undergoing permanent polarization by the forced induction and charge attraction phenomena therein and does not require any d-c bias voltage for operation.
According to the invention, a permanent electrostatic charge can be built up on the vibratile film by applying a saturation polarizing voltage thereto for several seconds, so that it is possible to manufacture an electrostatic transducer without requiring any d-c bias voltage for its operation. Thus, it is possible to provide an electrostatic transducer requiring no high voltage generator nor any bias voltage terminal. Also, the ionization of the air layer between the electrodes can be eliminated to greatly improve the sensitivity and other characteristics of the transducer.
Further, the saturation polarizing voltage maybe applied after the vibrating film is assembled into a housing of the transducer such as a speaker, microphone and the like. By so doing, the initially built-up charge may be prevented from being otherwise neutralized during the assemblage.
The above and other objects, features and advantages of the invention will become more apparent from the following description with reference to the accompanying, drawing, in which;
FIG. 1 is a schematic representation of a prior-art electrostatic transducer;
FIG. 2 is a schematic representation of the principles underlying the invention; and
FIG. 3 is a graph representing a hysteresis characteristic showing the relationship between the polarizing voltage E applied on the vibrating film and the residual sound pressure after the removal of the polarizing voltage E,,, which is obtained when the vibratile film according to the invention is applied to a speaker.
Aluminum was deposited on one surface of an unpolarized film of polyethylene terephthalate known commercially by the trademark Tetron" and assembled, as a vibratile film, into a housing of an electrostatic speaker, opposite to a stationary electrode and spaced therefrom so as to define an air layer. It was found that a capacitor consisting of the deposited aluminum layer, Tetron film, air layer and the stationary electrode exhibits a hysteresis phenomenon due to absorbed surface charges. This phenomenon is thought to correspond to a ferroelectric phenomenon of a ferroelectric substance and is called a hysteresis of the condenser speaker with absorbed surface charges.
Referring now to FIG. 2, which shows the principles underlying the invention, reference numeral 7 designates a vibratile dielectric thin film made of such plastic material as Tetron and Mylar trademarks for polyethylene terephthalate, polymide or a fluorine compound resin, for instance ethylene tetrafluoride'or polyvinylidene fluoride, capable of readily undergoing permanent polarization. It should be noted that the vibratile film initially undergoes no polarization. The vibratile film is provided on one side with a vibratile electrode 8 as in the conventional transducer. It faces a stationary electrode 9 formed with a plurality of small pores 10. The stationary electrode 9 and the vibrating film 7 define an air layer 11 therebetween. Thus, a capacitor consisting of the electrodes 8 and 9 in between which the vibratile film 7 and the air layer 11 are sandwiched is formed.
With the above construction, a saturation polarizing voltage E, is applied between the electrodes 8 and 9 such that the residual charge on the vibratile film 7 is maximum, thereby causing the ferroelectric phenomenon in the vibratile film 7 due to absorbed surface charges and thereby polarizing permanently the vibratile film 7. The direction of polarization when the polarizing voltage E is applied between the electrodes 8 and 9 is shown in FIG. 2. Even when the polarizing voltage E is removed, the vibratile film 7 still remains polarized. This is thought to be due to spontaneous polarization for permanent superficial charge attraction. That is, spontaneous polarization is induced in the vibratile film 7 and permanent superficial charge attraction consequently occurs in opposite surfaces of the vibratile film 7.
FIG. 3 shows a hysteresis of the output residual sound pressure p, which is obtained by using a Tetron film 15 microns thick as the vibratile film 7 and applying input signal e after the application of polarizing voltage E for several seconds without heating the vibratile film 7.
If the plastic film is absolutely non-polarized, the sound pressure would follow the dashed plot in FIG. 3. Actually, the plastic film usually bears a slight negative charge. Due to the natural charging of the film and the application of the polarizing voltage, the output sound pressure will start to follow segment 1 of the plot and then follow through segments 2, 3, 4, 5 and 6 of the hysteresis curve in the mentioned order back to segment 2 as the polarizing voltage on the non-polarized film is increased in small steps to a positive maximum, then reduced to a negative maximum and back to the positive maximum.
When the transducer according to the invention is applied to a speaker, the saturation polarizing voltage E,,, which may be applied for several seconds, is determined by the speaker construction, the thickness of the air layer 11 and the material of the vibratile film 7. After removal of the saturation polarizing voltage a residual sound pressure of about 98 db may be obtained, so that the bias voltage becomes unnecessary.
What is claimed is:
l. A method of polarizing a vibratile film of an electrostatic transducer, the vibratile film being permanently polarized after assembly into a housing of the transducer, comprising the steps of:
preparing an unpolarized vibratile film of a plastic material capable of readily undergoing permanent polarization,
depositing a vibratile electrode of metal on one surface of said vibratile film, said vibratile electrode being vibratile with said vibratile film,
assembling into a housing of the transducer said vibratile film on which said vibratile electrode is deposited,
disposing in said housing a stationary electrode of metal opposite to said vibratile film and spaced therefrom so as to define an air layer, and
then applying across said vibratile and stationary electrodes a saturation polarizing voltage without heating said vibratile film, said saturation polarizing voltage causing ferroelectric phenomena in said vibratile film due to absorbed surface changes to maximize the residual charge on said vibratile film after the removal of said saturation polarizing voltage, thereby polarizing permanently said vibratile film.
2. A method according to claim 1, wherein the plastic material is selected from a group consisting of polyethylene terephthalate, a polyimide resin and fluorine compound resin.
3. A method according to claim I, wherein the saturation polarizing voltage is applied for several seconds.
Claims (3)
1. A method of polarizing a vibratile film of an electrostatic transducer, the vibratile film being permanently polarized after assembly into a housing of the transducer, comprising the steps of: preparing an unpolarized vibratile film of a plastic material capable of readily undergoing permanent polarization, depositing a vibratile electrode of metal on one surface of said vibratile film, said vibratile electrode being vibratile with said vibratile film, assembling into a housing of the transducer said vibratile film on which said vibratile electrode is deposited, disposing in said housing a stationary electrode of metal opposite to said vibratile film and spaced therefrom so as to define an air layer, and then applying across said vibratile and stationary electrodes a saturation polarizing voltage without heating said vibratile film, said saturation polarizing voltage causing ferroelectric phenomena in said vibratile film due to absorbed surface changes to maximize the residual charge on said vibratile film after the removal of said saturation polarizing voltage, thereby polarizing permanently said vibratile film.
2. A method according to claim 1, wherein the plastic material is selected from a group consisting of polyethylene terephthalate, a polyimide resin and fluorine compound resin.
3. A method according to claim 1, wherein the saturation polarizing voltage is applied for several seconds.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP44099939A JPS5220851B1 (en) | 1969-12-11 | 1969-12-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3858307A true US3858307A (en) | 1975-01-07 |
Family
ID=14260671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US337843A Expired - Lifetime US3858307A (en) | 1969-12-11 | 1973-03-05 | Electrostatic transducer |
Country Status (5)
Country | Link |
---|---|
US (1) | US3858307A (en) |
JP (1) | JPS5220851B1 (en) |
CA (1) | CA944473A (en) |
DE (1) | DE2061210A1 (en) |
FR (1) | FR2070812B1 (en) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3945112A (en) * | 1975-03-21 | 1976-03-23 | Bell Telephone Laboratories, Incorporated | Technique for fabrication of foil electret |
US4062105A (en) * | 1976-12-20 | 1977-12-13 | The United States Of America As Represented By The Secretary Of The Navy | Method for fabricating ferroelectric ultrasonic transducers |
US4191193A (en) * | 1976-02-29 | 1980-03-04 | Mitsubishi Petrochemical Co. Ltd. | Catheter head-type transducer |
US5267076A (en) * | 1988-06-10 | 1993-11-30 | Thomson-Csf | Process for obtaining a structure generating non-linear electrooptical effects, structure obtained and applications thereof |
US20020131228A1 (en) * | 2001-03-13 | 2002-09-19 | Potter Michael D. | Micro-electro-mechanical switch and a method of using and making thereof |
US20020182091A1 (en) * | 2001-05-31 | 2002-12-05 | Potter Michael D. | Micro fluidic valves, agitators, and pumps and methods thereof |
EP1282339A2 (en) * | 2001-07-31 | 2003-02-05 | Matsushita Electric Industrial Co., Ltd. | Condenser microphone and production method thereof |
US6688179B2 (en) | 2001-10-26 | 2004-02-10 | Nth Tech Corporation | Electrostatic pressure transducer and a method thereof |
US20040145271A1 (en) * | 2001-10-26 | 2004-07-29 | Potter Michael D | Electrostatic based power source and methods thereof |
US20050044955A1 (en) * | 2003-08-29 | 2005-03-03 | Potter Michael D. | Methods for distributed electrode injection and systems thereof |
US20050205966A1 (en) * | 2004-02-19 | 2005-09-22 | Potter Michael D | High Temperature embedded charge devices and methods thereof |
US20070074731A1 (en) * | 2005-10-05 | 2007-04-05 | Nth Tech Corporation | Bio-implantable energy harvester systems and methods thereof |
US7211923B2 (en) | 2001-10-26 | 2007-05-01 | Nth Tech Corporation | Rotational motion based, electrostatic power source and methods thereof |
US7217582B2 (en) | 2003-08-29 | 2007-05-15 | Rochester Institute Of Technology | Method for non-damaging charge injection and a system thereof |
US20090086613A1 (en) * | 2007-10-02 | 2009-04-02 | Seagate Technology Llc | Non-Destructive Readback For Ferroelectric Material |
EP2019298A4 (en) * | 2006-04-27 | 2016-03-02 | Univ Saitama Nat Univ Corp | Mechanical-electrical converting device and its manufacturing method |
US20170170674A1 (en) * | 2015-12-09 | 2017-06-15 | Nth Tech Corporation | Methods for trapping electrons at an interface of insulators each having an arbitrary thickness and devices thereof |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2330800C3 (en) * | 1973-06-16 | 1981-10-01 | Sennheiser Electronic Kg, 3002 Wedemark | Electroacoustic transducer based on the electrostatic principle and process for its manufacture |
GB2079056B (en) * | 1980-06-30 | 1985-04-17 | Tokyo Shibaura Electric Co | Electret device |
DE4115221C2 (en) * | 1991-05-10 | 1994-09-01 | Sennheiser Electronic | Electroacoustic transducer based on the electrostatic principle |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3705312A (en) * | 1970-11-02 | 1972-12-05 | Bell Telephone Labor Inc | Preparation of electret transducer elements by application of controlled breakdown electric field |
-
1969
- 1969-12-11 JP JP44099939A patent/JPS5220851B1/ja active Pending
-
1970
- 1970-12-10 CA CA100,299A patent/CA944473A/en not_active Expired
- 1970-12-10 FR FR707044528A patent/FR2070812B1/fr not_active Expired
- 1970-12-11 DE DE19702061210 patent/DE2061210A1/en active Pending
-
1973
- 1973-03-05 US US337843A patent/US3858307A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3705312A (en) * | 1970-11-02 | 1972-12-05 | Bell Telephone Labor Inc | Preparation of electret transducer elements by application of controlled breakdown electric field |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3945112A (en) * | 1975-03-21 | 1976-03-23 | Bell Telephone Laboratories, Incorporated | Technique for fabrication of foil electret |
US4191193A (en) * | 1976-02-29 | 1980-03-04 | Mitsubishi Petrochemical Co. Ltd. | Catheter head-type transducer |
US4062105A (en) * | 1976-12-20 | 1977-12-13 | The United States Of America As Represented By The Secretary Of The Navy | Method for fabricating ferroelectric ultrasonic transducers |
US5267076A (en) * | 1988-06-10 | 1993-11-30 | Thomson-Csf | Process for obtaining a structure generating non-linear electrooptical effects, structure obtained and applications thereof |
US20020131228A1 (en) * | 2001-03-13 | 2002-09-19 | Potter Michael D. | Micro-electro-mechanical switch and a method of using and making thereof |
US7280014B2 (en) | 2001-03-13 | 2007-10-09 | Rochester Institute Of Technology | Micro-electro-mechanical switch and a method of using and making thereof |
US7195393B2 (en) | 2001-05-31 | 2007-03-27 | Rochester Institute Of Technology | Micro fluidic valves, agitators, and pumps and methods thereof |
US20020182091A1 (en) * | 2001-05-31 | 2002-12-05 | Potter Michael D. | Micro fluidic valves, agitators, and pumps and methods thereof |
EP1282339A2 (en) * | 2001-07-31 | 2003-02-05 | Matsushita Electric Industrial Co., Ltd. | Condenser microphone and production method thereof |
EP1282339A3 (en) * | 2001-07-31 | 2004-01-14 | Matsushita Electric Industrial Co., Ltd. | Condenser microphone and production method thereof |
US6731766B2 (en) | 2001-07-31 | 2004-05-04 | Matsushita Electric Industrial Co., Ltd. | Condenser microphone and production method thereof |
US7211923B2 (en) | 2001-10-26 | 2007-05-01 | Nth Tech Corporation | Rotational motion based, electrostatic power source and methods thereof |
US20040145271A1 (en) * | 2001-10-26 | 2004-07-29 | Potter Michael D | Electrostatic based power source and methods thereof |
US7378775B2 (en) | 2001-10-26 | 2008-05-27 | Nth Tech Corporation | Motion based, electrostatic power source and methods thereof |
US6688179B2 (en) | 2001-10-26 | 2004-02-10 | Nth Tech Corporation | Electrostatic pressure transducer and a method thereof |
US20070152776A1 (en) * | 2003-08-29 | 2007-07-05 | Nth Tech Corporation | Method for non-damaging charge injection and system thereof |
US7217582B2 (en) | 2003-08-29 | 2007-05-15 | Rochester Institute Of Technology | Method for non-damaging charge injection and a system thereof |
US7287328B2 (en) | 2003-08-29 | 2007-10-30 | Rochester Institute Of Technology | Methods for distributed electrode injection |
US20050044955A1 (en) * | 2003-08-29 | 2005-03-03 | Potter Michael D. | Methods for distributed electrode injection and systems thereof |
US7408236B2 (en) | 2003-08-29 | 2008-08-05 | Nth Tech | Method for non-damaging charge injection and system thereof |
US20050205966A1 (en) * | 2004-02-19 | 2005-09-22 | Potter Michael D | High Temperature embedded charge devices and methods thereof |
US8581308B2 (en) | 2004-02-19 | 2013-11-12 | Rochester Institute Of Technology | High temperature embedded charge devices and methods thereof |
US20070074731A1 (en) * | 2005-10-05 | 2007-04-05 | Nth Tech Corporation | Bio-implantable energy harvester systems and methods thereof |
EP2019298A4 (en) * | 2006-04-27 | 2016-03-02 | Univ Saitama Nat Univ Corp | Mechanical-electrical converting device and its manufacturing method |
US20090086613A1 (en) * | 2007-10-02 | 2009-04-02 | Seagate Technology Llc | Non-Destructive Readback For Ferroelectric Material |
US7876661B2 (en) * | 2007-10-02 | 2011-01-25 | Seagate Technology Llc | Non-destructive readback for ferroelectric material |
US20170170674A1 (en) * | 2015-12-09 | 2017-06-15 | Nth Tech Corporation | Methods for trapping electrons at an interface of insulators each having an arbitrary thickness and devices thereof |
Also Published As
Publication number | Publication date |
---|---|
FR2070812B1 (en) | 1974-02-15 |
DE2061210A1 (en) | 1971-06-24 |
FR2070812A1 (en) | 1971-09-17 |
CA944473A (en) | 1974-03-26 |
JPS5220851B1 (en) | 1977-06-07 |
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