US3926832A - Gettering structure - Google Patents
Gettering structure Download PDFInfo
- Publication number
- US3926832A US3926832A US383677A US38367773A US3926832A US 3926832 A US3926832 A US 3926832A US 383677 A US383677 A US 383677A US 38367773 A US38367773 A US 38367773A US 3926832 A US3926832 A US 3926832A
- Authority
- US
- United States
- Prior art keywords
- zirconium
- particles
- aluminum alloy
- particulate
- evaporable getter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/52—Means for obtaining or maintaining the desired pressure within the vessel
- H01K1/54—Means for absorbing or absorbing gas, or for preventing or removing efflorescence, e.g. by gettering
- H01K1/56—Means for absorbing or absorbing gas, or for preventing or removing efflorescence, e.g. by gettering characterised by the material of the getter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
Abstract
A non-evaporating getter device and composition and process for producing such which is optionally heatable employing a getter material comprising at least one non-evaporable getter metal preferably selected from the group consisting of Zr, Ta, Hf, Nb, Ti, Th and U in intimate mixture with a zirconium-aluminum alloy.
Claims (11)
1. A GETTING STRUCTURE COMPRISING: A. A SINTERED PARTICULE NON-EVAPORABLE GETTER METAL SELECTED FROM THE GROUP CONSISTING OF ZR, TA, HF, NB, TI, TH AND U, B. A PARTICULATE ZIRCONIUM-ALUMINUM ALLOY COMPRISING 5 TO 30 WEIGHT PERCENT ALUMINUM BALANCE ZIRCONIUM WHEREIN THE PARTICLES OF THE ZIRCONIUM-ALUMINUM ALLOY ARE LARGER THAN THE PARTICLES OF THE NON-EVAPORABLE GETTER METAL AND ARE DISTRIBUTED THROUGHOUT THE NON-EVAPORABLE GETTER METAL WHEREIN THE WEIGHT RATION A:B IS FROM 19:1 TO 2:3 AND WHEREIN SAID PARTICLES OF ZIRCONIUM-ALUMINUM ALLOY ARE GENERALLY SPACED OUT OF CONTACT WITH EACH OTHER.
2. A gettering structure comprising: A. a sintered particulate non-evaporable getter metal, selected from the group consisting of Zr, Ta, Hf, Nb, Ti, Th and U, B. a particulate zirconium-aluminum alloy comprising 5 to 30 weight percent aluminum balance zirconium wherein the particles of zirconium-aluminum alloy are larger than the particles of the non-evaporable getter metal and are distributed throughout the non-evaporable getter metal, wherein the sintered non-evaporable getter metal has a surface area after sintering substantially equal to its surface area prior to sintering wherein the weight ratio A:B is from 19:1 to 2:3 and wherein said particles of zirconium-aluminum alloy are generally spaced out of contact with each other.
2. the composition exhibits a compressive strength of at least 300 kg/cm2,
3. A gettering structure comprising: A. particulate zirconium, the particles of which pass through a U.S. standard screen of 200 mesh per inch, B. a particulate alloy of 84 weight percent zirconium and 16 weight percent aluminum, the particles of which pass through a U.S. standard screen of 60 mesh per inch and are retained on a U.S. standard screen of 100 mesh per inch with the provisos that:
3. the total surface area of the zirconium particles after sintering is equal to at least 95% of their surface area before sintering;
4. the particles of zirconium are in contact with one another,
4. A gettering structure comprising: A. sintered particulate zirconium, B. A particulate zirconium-aluminum alloy comprising 5 to 30 weight percent aluminum balance zirconium wherein the particles of the zirconium-aluminum alloy are larger than the particles of zirconium and are distributed throughout the particles of zirconium in an amount such that the particles of zirconium-aluminum alloy are generally spaced out of contact with each other.
5. A gettering structure comprising: A. sintered particulate zirconium, B. a particulate zirconium-aluminum alloy comprising 5 to 30 weight percent aluminum, balance zirconium wherein the particles of the zirconium-aluminum alloy are larger than the particles of zirconium and are distributed throughout the particles of zirconium wherein the weight ratio A:B is from 19: 1 to 2:3 and wherein said particles of zirconium-aluminum alloy are generally spaced out of contact with each other.
5. the particles of the alloy are distributed evenly throughout the particles of zirconium,
6. the particles of the alloy are generally spaced out of contact with one another,
7. the weight ratio of A:B is 10:1 to 1:1.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT28053/72A IT963874B (en) | 1972-08-10 | 1972-08-10 | IMPROVED GETTER DEVICE CONTAINING NON-EVAPORABLE MATERIAL |
Publications (2)
Publication Number | Publication Date |
---|---|
US3926832A true US3926832A (en) | 1975-12-16 |
US3926832B1 US3926832B1 (en) | 1984-12-18 |
Family
ID=11222826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US383677A Expired - Lifetime US3926832A (en) | 1972-08-10 | 1973-07-30 | Gettering structure |
Country Status (10)
Country | Link |
---|---|
US (1) | US3926832A (en) |
JP (1) | JPS531141B2 (en) |
CA (1) | CA988911A (en) |
DE (1) | DE2340102C3 (en) |
ES (1) | ES417664A1 (en) |
FR (1) | FR2327817A1 (en) |
GB (1) | GB1432030A (en) |
IT (1) | IT963874B (en) |
NL (1) | NL154613B (en) |
SU (1) | SU640685A3 (en) |
Cited By (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2360844A1 (en) * | 1976-08-05 | 1978-03-03 | Philips Nv | SOLAR COLLECTOR REPRESENTING AN VACUUM AIR COVER |
US4131511A (en) * | 1977-02-04 | 1978-12-26 | Combustion Engineering, Inc. | Nuclear fuel element |
US4146497A (en) * | 1972-12-14 | 1979-03-27 | S.A.E.S. Getters S.P.A. | Supported getter |
US4210471A (en) * | 1976-02-10 | 1980-07-01 | Tdk Electronics, Co., Ltd. | Permanent magnet material and process for producing the same |
US4213803A (en) * | 1976-08-31 | 1980-07-22 | Tdk Electronics Company Limited | R2 Co17 Rare type-earth-cobalt, permanent magnet material and process for producing the same |
FR2484138A1 (en) * | 1980-06-04 | 1981-12-11 | Getters Spa | COMPOSITION AND DEGASSING STRUCTURE, PARTICULARLY USEFUL AT LOW TEMPERATURE, AND THEIR USE IN THE MANUFACTURE OF VACUUM CONTAINERS OR CONTAINING RARE GASES |
DE3318524A1 (en) * | 1982-05-20 | 1983-11-24 | S.A.E.S. Getters S.p.A., Milano | VACUUM SEALED FLUID TRANSPORT PIPELINE SECTION |
DE3316454A1 (en) * | 1983-05-05 | 1984-11-22 | kabelmetal electro GmbH, 3000 Hannover | PIPE SYSTEM CONTAINING TWO OR SEVERAL CONCENTRIC TUBES |
DE3509465A1 (en) * | 1984-03-16 | 1985-09-19 | S.A.E.S. Getters S.P.A., Mailand/Milano | METHOD FOR PRODUCING POROESIS, NON-VAPORIZED GETTER DEVICES AND GETTER DEVICES MADE THEREOF |
FR2561442A1 (en) * | 1984-02-02 | 1985-09-20 | Gen Electric | GETTER FOR INCANDESCENT LAMPS AND HIGH INTENSITY DISCHARGE LAMPS |
GB2157073A (en) * | 1984-03-16 | 1985-10-16 | Getters Spa | Cathode ray tube with an electrophoretic getter |
EP0162673A2 (en) * | 1984-05-19 | 1985-11-27 | THORN EMI plc | Improvements in tungsten halogen incandescent lamps |
US4559471A (en) * | 1982-04-28 | 1985-12-17 | U.S. Philips Corporation | Device provided with a evacuated bulb comprising a getter and a getter auxiliary means |
FR2586138A1 (en) * | 1985-08-09 | 1987-02-13 | Getters Spa | GETTER FOR PUMPING TUBING |
US4691141A (en) * | 1985-10-11 | 1987-09-01 | Gte Laboratories Incorporated | Dosing composition for high pressure sodium lamps |
US4806828A (en) * | 1986-07-02 | 1989-02-21 | Thorn Emi Plc | High pressure sodium discharge lamps with hydrogen getter |
US4898147A (en) * | 1987-11-24 | 1990-02-06 | Saes Getters Spa | Domestic oven observation window having a low temperature external surface |
US5130047A (en) * | 1989-05-17 | 1992-07-14 | Tungsram Tr. | Getter-composition for lightsources |
US5238469A (en) * | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
US5320496A (en) * | 1992-07-17 | 1994-06-14 | Saes Getters Spa | High-capacity getter pump |
US5382303A (en) * | 1992-04-13 | 1995-01-17 | Sps Technologies, Inc. | Permanent magnets and methods for their fabrication |
US5401298A (en) * | 1993-09-17 | 1995-03-28 | Leybold Inficon, Inc. | Sorption pump |
US5456740A (en) * | 1994-06-22 | 1995-10-10 | Millipore Corporation | High-efficiency metal membrane getter element and process for making |
US5508586A (en) * | 1993-06-17 | 1996-04-16 | Saes Getters S.P.A. | Integrated getter device suitable for flat displays |
US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
WO1998003987A1 (en) * | 1996-07-23 | 1998-01-29 | Saes Getters S.P.A. | Method for the manufacture of supported thin layers of non-evaporable getter material and getter devices thereby manufactured |
US5865658A (en) * | 1995-09-28 | 1999-02-02 | Micron Display Technology, Inc. | Method for efficient positioning of a getter |
US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
US5931713A (en) * | 1997-03-19 | 1999-08-03 | Micron Technology, Inc. | Display device with grille having getter material |
US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
US6013195A (en) * | 1996-02-09 | 2000-01-11 | Saes Getters S.P.A. | Getter materials capable of being activated at low applied temperatures |
US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
US6322912B1 (en) | 1998-09-16 | 2001-11-27 | Cabot Corporation | Electrolytic capacitor anode of valve metal oxide |
US6373685B1 (en) | 1998-09-16 | 2002-04-16 | Cabot Corporation | Methods to partially reduce a niobium metal oxide and oxygen reduced niobium oxides |
US6391275B1 (en) | 1998-09-16 | 2002-05-21 | Cabot Corporation | Methods to partially reduce a niobium metal oxide and oxygen reduced niobium oxides |
US6462934B2 (en) | 1998-09-16 | 2002-10-08 | Cabot Corporation | Methods to partially reduce a niobium metal oxide and oxygen reduced niobium oxides |
US6489720B1 (en) * | 1998-09-07 | 2002-12-03 | Canon Kabushiki Kaisha | Image-forming apparatus and fabrication method therefor |
US6576099B2 (en) | 2000-03-23 | 2003-06-10 | Cabot Corporation | Oxygen reduced niobium oxides |
US6620297B2 (en) * | 2000-09-27 | 2003-09-16 | Saes Getters, S.P.A. | Porous getter devices with reduced particle loss and method for manufacturing same |
US6639787B2 (en) | 2000-11-06 | 2003-10-28 | Cabot Corporation | Modified oxygen reduced valve metal oxides |
US20040169469A1 (en) * | 2001-07-06 | 2004-09-02 | Yoji Hasegawa | Non-evaporation type getter, display unit and production method for them |
US20040226630A1 (en) * | 2003-05-16 | 2004-11-18 | Koenitzer John W. | Controlled oxygen addition for metal material |
US20050008564A1 (en) * | 2003-02-26 | 2005-01-13 | Reed David M. | Phase formation of oxygen reduced valve metal oxides and granulation methods |
US20050018956A1 (en) * | 2003-07-23 | 2005-01-27 | Tyler Sims | Clean and test for fluid within a reflection optical switch system |
US20050025699A1 (en) * | 2003-05-19 | 2005-02-03 | Reed David M. | Methods of making a niobium metal oxide and oxygen reduced niobium oxides |
US7465692B1 (en) | 2000-03-16 | 2008-12-16 | Pall Corporation | Reactive media, methods of use and assemblies for purifying |
WO2013054251A1 (en) | 2011-10-14 | 2013-04-18 | Saes Getters S.P.A. | Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature |
US20140126683A1 (en) * | 2012-11-07 | 2014-05-08 | Westinghouse Electric Company Llc | Deposition of integrated protective material into zirconium cladding for nuclear reactors by high-velocity thermal application |
WO2014091355A1 (en) | 2012-12-10 | 2014-06-19 | Saes Getters S.P.A. | Non-evaporable getter alloys reactivable after exposure to reactive gases |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52146478U (en) * | 1976-04-30 | 1977-11-07 | ||
US4428856A (en) | 1982-09-30 | 1984-01-31 | Boyarina Maya F | Non-evaporable getter |
CA1239980A (en) * | 1983-03-10 | 1988-08-02 | Gte Products Corporation | Arc tube dosing process for unsaturated high pressure sodium lamp |
DE3332608A1 (en) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | GETTER PUMP FOR HIGH VACUUM AND GAS DISCHARGE SYSTEMS |
DE3332660A1 (en) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | GETTER SORPTION PUMP WITH HEAT STORAGE FOR HIGH VACUUM AND GAS DISCHARGE SYSTEMS |
DE102007050289A1 (en) * | 2007-10-18 | 2009-04-23 | Heraeus Noblelight Gmbh | Carbon emitter with getter |
DE102009024055A1 (en) | 2009-06-05 | 2010-12-09 | Netzsch-Gerätebau GmbH | Thermal analysis device and thermal analysis method |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2855368A (en) * | 1953-09-30 | 1958-10-07 | Philips Corp | Method of producing a non-vaporizing getter |
US2966736A (en) * | 1958-03-27 | 1961-01-03 | Aluminum Co Of America | Aluminum base alloy powder product |
US2967351A (en) * | 1956-12-14 | 1961-01-10 | Kaiser Aluminium Chem Corp | Method of making an aluminum base alloy article |
US3203901A (en) * | 1962-02-15 | 1965-08-31 | Porta Paolo Della | Method of manufacturing zirconiumaluminum alloy getters |
US3584253A (en) * | 1968-04-01 | 1971-06-08 | Siemens Ag | Getter structure for electrical discharge and method of making the same |
US3652317A (en) * | 1970-05-01 | 1972-03-28 | Getters Spa | Method of producing substrate having a particulate metallic coating |
US3733194A (en) * | 1969-10-20 | 1973-05-15 | Getters Spa | Mercury generation |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2368060A (en) * | 1942-01-01 | 1945-01-23 | Bell Telephone Labor Inc | Coating of electron discharge device parts |
NL93264C (en) * | 1953-09-30 | |||
US3672789A (en) * | 1970-09-21 | 1972-06-27 | Gen Electric | Hydrocarbon responsive getter ion pump |
-
1972
- 1972-08-10 IT IT28053/72A patent/IT963874B/en active
-
1973
- 1973-07-30 US US383677A patent/US3926832A/en not_active Expired - Lifetime
- 1973-08-08 ES ES417664A patent/ES417664A1/en not_active Expired
- 1973-08-08 JP JP8857673A patent/JPS531141B2/ja not_active Expired
- 1973-08-08 DE DE2340102A patent/DE2340102C3/en not_active Expired
- 1973-08-09 FR FR7329199A patent/FR2327817A1/en active Granted
- 1973-08-09 CA CA178,387A patent/CA988911A/en not_active Expired
- 1973-08-09 SU SU731946353A patent/SU640685A3/en active
- 1973-08-10 GB GB3799473A patent/GB1432030A/en not_active Expired
- 1973-08-10 NL NL737311090A patent/NL154613B/en not_active IP Right Cessation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2855368A (en) * | 1953-09-30 | 1958-10-07 | Philips Corp | Method of producing a non-vaporizing getter |
US2967351A (en) * | 1956-12-14 | 1961-01-10 | Kaiser Aluminium Chem Corp | Method of making an aluminum base alloy article |
US2966736A (en) * | 1958-03-27 | 1961-01-03 | Aluminum Co Of America | Aluminum base alloy powder product |
US3203901A (en) * | 1962-02-15 | 1965-08-31 | Porta Paolo Della | Method of manufacturing zirconiumaluminum alloy getters |
US3584253A (en) * | 1968-04-01 | 1971-06-08 | Siemens Ag | Getter structure for electrical discharge and method of making the same |
US3733194A (en) * | 1969-10-20 | 1973-05-15 | Getters Spa | Mercury generation |
US3652317A (en) * | 1970-05-01 | 1972-03-28 | Getters Spa | Method of producing substrate having a particulate metallic coating |
Cited By (100)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4146497A (en) * | 1972-12-14 | 1979-03-27 | S.A.E.S. Getters S.P.A. | Supported getter |
US4210471A (en) * | 1976-02-10 | 1980-07-01 | Tdk Electronics, Co., Ltd. | Permanent magnet material and process for producing the same |
US4142509A (en) * | 1976-08-05 | 1979-03-06 | U.S. Philips Corporation | Solar collector comprising an evacuated cover |
FR2360844A1 (en) * | 1976-08-05 | 1978-03-03 | Philips Nv | SOLAR COLLECTOR REPRESENTING AN VACUUM AIR COVER |
US4213803A (en) * | 1976-08-31 | 1980-07-22 | Tdk Electronics Company Limited | R2 Co17 Rare type-earth-cobalt, permanent magnet material and process for producing the same |
US4131511A (en) * | 1977-02-04 | 1978-12-26 | Combustion Engineering, Inc. | Nuclear fuel element |
FR2484138A1 (en) * | 1980-06-04 | 1981-12-11 | Getters Spa | COMPOSITION AND DEGASSING STRUCTURE, PARTICULARLY USEFUL AT LOW TEMPERATURE, AND THEIR USE IN THE MANUFACTURE OF VACUUM CONTAINERS OR CONTAINING RARE GASES |
US4559471A (en) * | 1982-04-28 | 1985-12-17 | U.S. Philips Corporation | Device provided with a evacuated bulb comprising a getter and a getter auxiliary means |
US4546798A (en) * | 1982-05-20 | 1985-10-15 | S.A.E.S. Getters S.P.A. | Vacuum insulated fluid transport pipes and method of construction |
DE3318524A1 (en) * | 1982-05-20 | 1983-11-24 | S.A.E.S. Getters S.p.A., Milano | VACUUM SEALED FLUID TRANSPORT PIPELINE SECTION |
DE3316454A1 (en) * | 1983-05-05 | 1984-11-22 | kabelmetal electro GmbH, 3000 Hannover | PIPE SYSTEM CONTAINING TWO OR SEVERAL CONCENTRIC TUBES |
FR2561442A1 (en) * | 1984-02-02 | 1985-09-20 | Gen Electric | GETTER FOR INCANDESCENT LAMPS AND HIGH INTENSITY DISCHARGE LAMPS |
US4940300A (en) * | 1984-03-16 | 1990-07-10 | Saes Getters Spa | Cathode ray tube with an electrophoretic getter |
GB2157073A (en) * | 1984-03-16 | 1985-10-16 | Getters Spa | Cathode ray tube with an electrophoretic getter |
NL8500751A (en) * | 1984-03-16 | 1985-10-16 | Getters Spa | IMAGE AMPLIFIER WITH AN ELECTROPHORETIC GETTERING DEVICE. |
NL8500750A (en) * | 1984-03-16 | 1985-10-16 | Getters Spa | CATHODE JET TUBE WITH AN ELECTROPHORETIC GETTING DEVICE. |
DE3509465A1 (en) * | 1984-03-16 | 1985-09-19 | S.A.E.S. Getters S.P.A., Mailand/Milano | METHOD FOR PRODUCING POROESIS, NON-VAPORIZED GETTER DEVICES AND GETTER DEVICES MADE THEREOF |
DE3509465C2 (en) * | 1984-03-16 | 1998-11-12 | Getters Spa | Process for the production of porous, non-evaporable getter devices, getter devices thus produced and their use |
EP0162673A2 (en) * | 1984-05-19 | 1985-11-27 | THORN EMI plc | Improvements in tungsten halogen incandescent lamps |
EP0162673A3 (en) * | 1984-05-19 | 1987-04-22 | THORN EMI plc | Improvements in tungsten halogen incandescent lamps |
FR2586138A1 (en) * | 1985-08-09 | 1987-02-13 | Getters Spa | GETTER FOR PUMPING TUBING |
US4874339A (en) * | 1985-08-09 | 1989-10-17 | Saes Getters S.P.A. | Pumping tubulation getter |
US4691141A (en) * | 1985-10-11 | 1987-09-01 | Gte Laboratories Incorporated | Dosing composition for high pressure sodium lamps |
US4806828A (en) * | 1986-07-02 | 1989-02-21 | Thorn Emi Plc | High pressure sodium discharge lamps with hydrogen getter |
US4898147A (en) * | 1987-11-24 | 1990-02-06 | Saes Getters Spa | Domestic oven observation window having a low temperature external surface |
US5130047A (en) * | 1989-05-17 | 1992-07-14 | Tungsram Tr. | Getter-composition for lightsources |
USRE35725E (en) * | 1992-04-02 | 1998-02-10 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
US5238469A (en) * | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
US5781843A (en) * | 1992-04-13 | 1998-07-14 | The Arnold Engineering Company | Permanent magnets and methods for their fabrication |
US5382303A (en) * | 1992-04-13 | 1995-01-17 | Sps Technologies, Inc. | Permanent magnets and methods for their fabrication |
US5324172A (en) * | 1992-07-17 | 1994-06-28 | Saes Getters S.P.A. | High-capacity getter pump |
US5320496A (en) * | 1992-07-17 | 1994-06-14 | Saes Getters Spa | High-capacity getter pump |
US5508586A (en) * | 1993-06-17 | 1996-04-16 | Saes Getters S.P.A. | Integrated getter device suitable for flat displays |
US5401298A (en) * | 1993-09-17 | 1995-03-28 | Leybold Inficon, Inc. | Sorption pump |
US5456740A (en) * | 1994-06-22 | 1995-10-10 | Millipore Corporation | High-efficiency metal membrane getter element and process for making |
US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
US5997255A (en) * | 1994-10-31 | 1999-12-07 | Saes Getters S.P.A. | Method for pumping a chamber using an in situ getter pump |
US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
US6165328A (en) * | 1994-10-31 | 2000-12-26 | Saes Getters S.P.A. | Method for processing wafers with in situ gettering |
US5879134A (en) * | 1994-10-31 | 1999-03-09 | Saes Pure Gas, Inc. | In situ getter pump system and method |
US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
US6043137A (en) * | 1994-10-31 | 2000-03-28 | Saes Getters S.P.A. | Getter pump module and system |
US5980213A (en) * | 1994-10-31 | 1999-11-09 | Saes Getters S.P.A. | Getter pump module and system |
US5993165A (en) * | 1994-10-31 | 1999-11-30 | Saes Pure Gas, Inc. | In Situ getter pump system and method |
US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
US5973445A (en) * | 1995-09-28 | 1999-10-26 | Micron Technology, Inc. | Device and method for efficient positioning of a getter |
US5865658A (en) * | 1995-09-28 | 1999-02-02 | Micron Display Technology, Inc. | Method for efficient positioning of a getter |
US6013195A (en) * | 1996-02-09 | 2000-01-11 | Saes Getters S.P.A. | Getter materials capable of being activated at low applied temperatures |
US6514430B1 (en) * | 1996-02-09 | 2003-02-04 | Saes Getters S.P.A. | Getter materials capable of being activated at low applied temperatures |
US6506319B1 (en) | 1996-02-09 | 2003-01-14 | Saes Getters, S.P.A. | Getter materials capable of being activated at low applied temperatures |
US6016034A (en) * | 1996-07-23 | 2000-01-18 | Saes Getters S.P.A. | Method for forming supported thin layers of non-evaporable getter material and getter devices formed thereby |
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Also Published As
Publication number | Publication date |
---|---|
ES417664A1 (en) | 1976-06-01 |
NL7311090A (en) | 1974-02-12 |
JPS531141B2 (en) | 1978-01-14 |
GB1432030A (en) | 1976-04-14 |
IT963874B (en) | 1974-01-21 |
SU640685A3 (en) | 1978-12-30 |
FR2327817B1 (en) | 1978-05-05 |
DE2340102C3 (en) | 1985-01-31 |
NL154613B (en) | 1977-09-15 |
JPS5036068A (en) | 1975-04-04 |
FR2327817A1 (en) | 1977-05-13 |
DE2340102B2 (en) | 1978-03-09 |
CA988911A (en) | 1976-05-11 |
DE2340102A1 (en) | 1974-02-21 |
US3926832B1 (en) | 1984-12-18 |
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