US4518630A - Method for forming silicon oxide films - Google Patents
Method for forming silicon oxide films Download PDFInfo
- Publication number
- US4518630A US4518630A US06/465,530 US46553083A US4518630A US 4518630 A US4518630 A US 4518630A US 46553083 A US46553083 A US 46553083A US 4518630 A US4518630 A US 4518630A
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- United States
- Prior art keywords
- oxidation
- temperature
- low
- oxidation temperature
- carried out
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/3165—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation
- H01L21/31654—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself
- H01L21/31658—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe
- H01L21/31662—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe of silicon in uncombined form
Definitions
- the invention relates to a method for the preparation of silicon oxide films on silicon surfaces with at least two oxidation steps, in which a first step is performed at a low oxidation temperature in an atmosphere containing a mixture of oxygen and hydrogen chloride with a low hydrogen chloride concentration, and in which a second step is carried out at a high oxidation temperature.
- High oxide quality can be obtained by very elaborate purification processes; otherwise, it is known to perform the oxidation of silicon surfaces in a gas mixture of oxygen and hydrogen chloride. In the latter method, however, low oxidation temperatures result in low defect rates and poor passivation, and high oxidation temperatures in high defect rates and good passivation.
- the quality of thin silicon oxide films may be improved by a two-step oxidation process of the type mentioned at the outset described in the article "A Method of Forming Thin and Highly Reliable Gate Oxides” by C. Hashimoto, S. Muramoto, N. Shiono and O. Nakajima, Journal of the Electrochemical Society, January 1980, pages 129-135.
- this process one works in the first oxidation step with an oxygen/hydrogen chloride mixture with a relatively low hydrogen chloride concentration and relatively low temperature, and in the second oxidation step with a relatively high temperature and a gas mixture of nitrogen, oxygen and hydrogen chloride.
- An object of the invention is to provide a method for forming thin silicon oxide films of improved quality on silicon surfaces.
- a method for forming silicon oxide layers on silicon surfaces which comprises subjecting the silicon surface to at least two oxidation steps in which in a first step the silicon surface is subjected to an atmosphere containing a mixture of oxygen and HCl with a low HCl concentration at a low oxidation temperature, and in a second step the silicon from the first step is subjected to a high oxidation temperature, the improvement comprising effecting the oxidation in the second step in a dry oxygen atmosphere.
- the silicon wafer surface is oxidized in a first step in an atmosphere of dry oxygen with a low concentration of HCl at a low oxidation temperature.
- the wafer is heated to a high oxidation temperature in an intermediate step.
- the wafer is heated in a third step at the high temperature in an atmosphere of oxygen. This is followed by a cooling down step either under a nitrogen atmosphere or a rare gas atmosphere.
- the second step is carried out in a dry oxygen atmosphere.
- a further improvement of the quality of the oxide is achieved by increasing the oxidation temperature from the low oxidation temperature in the first step to the high oxidation temperature of the later step, by means of an intermediate step in an atmosphere which contains a mixture of oxygen and hydrogen chloride with a low hydrogen chloride concentration.
- the silicon material to be oxidized for instance, silicon wafers
- a furnace such as an oxidizing tube
- the oxidizing tube is first flushed with this gas mixture, and after the flushing, the material to be oxidized including holders (trays) is placed in the oxidizing tube and likewise flushed with the gas mixture to be passed through the tube at the temperature T 1 .
- the gas mixture consists of dry oxygen with a low hydrogen chloride concentration, preferably 2.5 to 4 and in particular, 3 volume percent hydrogen chloride (HCl).
- the temperature T 1 is in the range of 700° to 900° C., preferably 750° to 850° C. and in particular, 800° C. After 15 to 45 and preferably 25 to 35 minutes (time t 1 ), an oxide thickness of less than 1 nm is obtained, with a well-cleaned silicon surface.
- the intermediate step B 2 which follows the first step B 1 and serves for heating the oxidizing tube from the low oxidizing temperature T 1 to the high oxidizing temperature T 2 , is advantageously carried out in an atmosphere corresponding to the atmosphere used in the first step B 1 . Due to the HCl content of the atmosphere, contamination of the oxide layers, especially by impurities present in the oxidizing tube, is avoided during the heating-up time.
- the length of the intermediate step B 2 (time t 2 - time t 1 ) is advantageously 15 to 30 minutes and the oxide thickness obtained is about 1 nm. However, the intermediate step B 2 can also be carried out without the admixture of HCl.
- oxidation is performed at a high oxidizing temperature T 2 in an atmosphere of pure dry oxygen.
- the length of the second step B 3 depends on the total oxide thickness desired. For gate oxide thicknesses of 45 ⁇ 3 nm, such as are required in the manufacture of 64-k RAMs, the length of time of the second step B 3 is, for instance, 25 minutes.
- the level of the high oxidizing temperature T 2 is approximately in the range between 850° and 1050° C. and preferably, between 900° and 1000° C.
- Temperatures T 2 in the lower part of the mentioned ranges are of advantage for generating small oxide thicknesses in the range between 5 and 10 nm, since at low oxidizing temperatures, oxide thicknesses desired for manufacturing reasons can be produced more accurately because of the longer oxidizing time.
- the furnace is allowed to cool down slowly to at least 850° C. (temperature T 3 ) in the following cooling step B 4 and the oxidized material is subsequently taken out (time t 4 ).
- the cooling-down phase (time t 4 minus time t 3 ) is preferably carried out in one to two hours during a cooling-down phase, using a nitrogen atmosphere.
- cooling down in an atmosphere containing a rare gas for instance, an argon atmosphere is particularly advantageous for obtaining high oxide qualities. If a rare gas atmosphere is used, the cooling-down phase is less critical.
- the oxidized material is cooled down to 700° to 800° C.
- homogeneous p-conduction silicon wafers with a diameter of about 100 mm were used as the starting material, the resistivity of which was about 10 ohm cm.
- the oxidations were carried out in a computer-controlled quartz oxidizing tube with a constant-temperature-time program corresponding to that shown in the drawing. Wafers with oxide thicknesses of 50 nm were obtained.
- the hydrogen chloride concentrations during the first step B 1 and the intermediate step B 2 were 3 volume percent; the cooling-down step B 4 took place in a nitrogen atmosphere.
- the length of the first step B 1 was 30 minutes, that of the intermediate step B 2 , 20 minutes, that of the second step B 3 , 25 minutes and that of the cooling-down step B 4 , 100 minutes.
- the time-dependent oxide breakdown was likewise measured on about 1500 capacitors. All capacitors were stressed with a field strength of 6 MV/cm. The measured failure rate due to oxide breakdowns between the beginning and the end of the stress period (10 -6 seconds to 1000 hours) was 12%, while the failure rate within the time given was about 42% in capacitors made according to the state of the art.
Abstract
Description
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823206376 DE3206376A1 (en) | 1982-02-22 | 1982-02-22 | METHOD FOR PRODUCING SILICON OXIDE LAYERS |
DE3206376 | 1982-02-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
US4518630A true US4518630A (en) | 1985-05-21 |
Family
ID=6156415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US06/465,530 Expired - Fee Related US4518630A (en) | 1982-02-22 | 1983-02-10 | Method for forming silicon oxide films |
Country Status (5)
Country | Link |
---|---|
US (1) | US4518630A (en) |
EP (1) | EP0087581B1 (en) |
JP (1) | JPS58156523A (en) |
AT (1) | ATE27206T1 (en) |
DE (2) | DE3206376A1 (en) |
Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4574466A (en) * | 1984-12-10 | 1986-03-11 | Gte Communication Systems Corporation | High quality gate oxides for VLSI devices |
US4604304A (en) * | 1985-07-03 | 1986-08-05 | Rca Corporation | Process of producing thick layers of silicon dioxide |
US4776925A (en) * | 1987-04-30 | 1988-10-11 | The Trustees Of Columbia University In The City Of New York | Method of forming dielectric thin films on silicon by low energy ion beam bombardment |
US4894353A (en) * | 1988-04-29 | 1990-01-16 | Advanced Micro Devices, Inc. | Method of fabricating passivated tunnel oxide |
US5006480A (en) * | 1988-08-08 | 1991-04-09 | Hughes Aircraft Company | Metal gate capacitor fabricated with a silicon gate MOS process |
US5057463A (en) * | 1990-02-28 | 1991-10-15 | Sgs-Thomson Microelectronics, Inc. | Thin oxide structure and method |
US5123994A (en) * | 1989-05-30 | 1992-06-23 | Motorola, Inc. | Ramped oxide formation method |
US5132244A (en) * | 1988-12-21 | 1992-07-21 | At&T Bell Laboratories | Growth-modified thermal oxidation for thin oxides |
US5153701A (en) * | 1987-12-28 | 1992-10-06 | At&T Bell Laboratories | Semiconductor device with low defect density oxide |
US5817581A (en) * | 1995-04-21 | 1998-10-06 | International Business Machines Corporation | Process for the creation of a thermal SiO2 layer with extremely uniform layer thickness |
US5854505A (en) * | 1992-12-25 | 1998-12-29 | Sony Corporation | Process for forming silicon oxide film and gate oxide film for MOS transistors |
US5960291A (en) * | 1997-08-08 | 1999-09-28 | Advanced Micro Devices, Inc. | Asymmetric channel transistor and method for making same |
DE19915156A1 (en) * | 1999-03-27 | 2000-09-28 | Inst Halbleiterphysik Gmbh | Process for the production of thin, uniform oxide layers on silicon surfaces |
US6187640B1 (en) * | 1998-11-17 | 2001-02-13 | Fujitsu Limited | Semiconductor device manufacturing method including various oxidation steps with different concentration of chlorine to form a field oxide |
WO2001020654A1 (en) * | 1999-09-14 | 2001-03-22 | Infineon Technologies North America Corp. | Process for improving the thickness uniformity of a thin oxide layer in semiconductor wafer fabrication |
US6395610B1 (en) | 1999-06-24 | 2002-05-28 | Lucent Technologies Inc. | Method of making bipolar transistor semiconductor device including graded, grown, high quality oxide layer |
US6509230B1 (en) | 1999-06-24 | 2003-01-21 | Lucent Technologies Inc. | Non-volatile memory semiconductor device including a graded, grown, high quality oxide layer and associated methods |
US6521496B1 (en) | 1999-06-24 | 2003-02-18 | Lucent Technologies Inc. | Non-volatile memory semiconductor device including a graded, grown, high quality control gate oxide layer and associated methods |
US6551946B1 (en) * | 1999-06-24 | 2003-04-22 | Agere Systems Inc. | Two-step oxidation process for oxidizing a silicon substrate wherein the first step is carried out at a temperature below the viscoelastic temperature of silicon dioxide and the second step is carried out at a temperature above the viscoelastic temperature |
US20030119337A1 (en) * | 2000-06-20 | 2003-06-26 | Agere Systems Inc. | Process for oxide fabrication using oxidation steps below and above a threshold temperature |
US20030235957A1 (en) * | 2002-06-25 | 2003-12-25 | Samir Chaudhry | Method and structure for graded gate oxides on vertical and non-planar surfaces |
US6670242B1 (en) | 1999-06-24 | 2003-12-30 | Agere Systems Inc. | Method for making an integrated circuit device including a graded, grown, high quality gate oxide layer and a nitride layer |
US20040009635A1 (en) * | 2002-06-03 | 2004-01-15 | Mayumi Nakasato | Method of fabricating semiconductor device |
US20040194707A1 (en) * | 2000-05-29 | 2004-10-07 | Yutaka Takahashi | Silicon dioxide film forming method |
US20040224531A1 (en) * | 2003-05-09 | 2004-11-11 | Samsung Electronics Co., Ltd. | Method of forming an oxide layer and method of forming an oxinitride layer |
KR100650297B1 (en) | 1999-01-12 | 2006-11-28 | 루센트 테크놀러지스 인크 | Method of making a graded grown, high quality oxide layer for a semiconductor device |
US20100081243A1 (en) * | 2008-09-26 | 2010-04-01 | Kabushiki Kaisha Toshiba | Method for manufacturing semiconductor device |
CN102938434A (en) * | 2012-11-14 | 2013-02-20 | 东方电气集团(宜兴)迈吉太阳能科技有限公司 | Wet oxidation method for preparing silica masks |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4584205A (en) * | 1984-07-02 | 1986-04-22 | Signetics Corporation | Method for growing an oxide layer on a silicon surface |
EP0214421A1 (en) * | 1985-08-09 | 1987-03-18 | Siemens Aktiengesellschaft | Production of thin oxide layers on melt grown silicon substrates |
JPH02303131A (en) * | 1989-05-18 | 1990-12-17 | Oki Electric Ind Co Ltd | Method of forming insulating film |
JPH06209049A (en) * | 1992-09-26 | 1994-07-26 | Samsung Electron Co Ltd | Manufacture of semiconductor device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US28385A (en) * | 1860-05-22 | Improvement in apparatus for clarifying cane-juice | ||
US3837905A (en) * | 1971-09-22 | 1974-09-24 | Gen Motors Corp | Thermal oxidation of silicon |
US4268538A (en) * | 1977-03-09 | 1981-05-19 | Atomel Corporation | High-pressure, high-temperature gaseous chemical method for silicon oxidation |
US4275094A (en) * | 1977-10-31 | 1981-06-23 | Fujitsu Limited | Process for high pressure oxidation of silicon |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4139658A (en) * | 1976-06-23 | 1979-02-13 | Rca Corp. | Process for manufacturing a radiation hardened oxide |
US4149905A (en) * | 1977-12-27 | 1979-04-17 | Bell Telephone Laboratories, Incorporated | Method of limiting stacking faults in oxidized silicon wafers |
-
1982
- 1982-02-22 DE DE19823206376 patent/DE3206376A1/en not_active Withdrawn
-
1983
- 1983-01-25 EP EP83100646A patent/EP0087581B1/en not_active Expired
- 1983-01-25 DE DE8383100646T patent/DE3371582D1/en not_active Expired
- 1983-01-25 AT AT83100646T patent/ATE27206T1/en not_active IP Right Cessation
- 1983-02-10 US US06/465,530 patent/US4518630A/en not_active Expired - Fee Related
- 1983-02-18 JP JP58026133A patent/JPS58156523A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US28385A (en) * | 1860-05-22 | Improvement in apparatus for clarifying cane-juice | ||
US3837905A (en) * | 1971-09-22 | 1974-09-24 | Gen Motors Corp | Thermal oxidation of silicon |
US4268538A (en) * | 1977-03-09 | 1981-05-19 | Atomel Corporation | High-pressure, high-temperature gaseous chemical method for silicon oxidation |
US4275094A (en) * | 1977-10-31 | 1981-06-23 | Fujitsu Limited | Process for high pressure oxidation of silicon |
US4293590A (en) * | 1977-10-31 | 1981-10-06 | Fujitsu Limited | Process for high pressure oxidation of silicon |
US4293589A (en) * | 1977-10-31 | 1981-10-06 | Fujitsu Limited | Process for high pressure oxidation of silicon |
Non-Patent Citations (4)
Title |
---|
Hashimoto et al., "A Method of Forming Thin & Highly Reliable Gate Oxides", pp. 129-135, J. Electrochem. Soc., Jan. 1980. |
Hashimoto et al., A Method of Forming Thin & Highly Reliable Gate Oxides , pp. 129 135, J. Electrochem. Soc., Jan. 1980. * |
Osburn, "Dielectric Breakdown Properties of SiO2 Film Grown in Halogen and Hydrogen-Containing Environments", J. Electrochem. Soc., vol. 21, No. 6, pp. 809-814, Jun. 1974. |
Osburn, Dielectric Breakdown Properties of SiO 2 Film Grown in Halogen and Hydrogen Containing Environments , J. Electrochem. Soc., vol. 21, No. 6, pp. 809 814, Jun. 1974. * |
Cited By (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4574466A (en) * | 1984-12-10 | 1986-03-11 | Gte Communication Systems Corporation | High quality gate oxides for VLSI devices |
US4604304A (en) * | 1985-07-03 | 1986-08-05 | Rca Corporation | Process of producing thick layers of silicon dioxide |
US4776925A (en) * | 1987-04-30 | 1988-10-11 | The Trustees Of Columbia University In The City Of New York | Method of forming dielectric thin films on silicon by low energy ion beam bombardment |
US5153701A (en) * | 1987-12-28 | 1992-10-06 | At&T Bell Laboratories | Semiconductor device with low defect density oxide |
US4894353A (en) * | 1988-04-29 | 1990-01-16 | Advanced Micro Devices, Inc. | Method of fabricating passivated tunnel oxide |
US5006480A (en) * | 1988-08-08 | 1991-04-09 | Hughes Aircraft Company | Metal gate capacitor fabricated with a silicon gate MOS process |
US5132244A (en) * | 1988-12-21 | 1992-07-21 | At&T Bell Laboratories | Growth-modified thermal oxidation for thin oxides |
US5123994A (en) * | 1989-05-30 | 1992-06-23 | Motorola, Inc. | Ramped oxide formation method |
US5057463A (en) * | 1990-02-28 | 1991-10-15 | Sgs-Thomson Microelectronics, Inc. | Thin oxide structure and method |
US5854505A (en) * | 1992-12-25 | 1998-12-29 | Sony Corporation | Process for forming silicon oxide film and gate oxide film for MOS transistors |
US5817581A (en) * | 1995-04-21 | 1998-10-06 | International Business Machines Corporation | Process for the creation of a thermal SiO2 layer with extremely uniform layer thickness |
US6579769B2 (en) | 1996-10-18 | 2003-06-17 | Fujitsu Ltd. | Semiconductor device manufacturing method including forming FOX with dual oxidation |
US5960291A (en) * | 1997-08-08 | 1999-09-28 | Advanced Micro Devices, Inc. | Asymmetric channel transistor and method for making same |
US6187640B1 (en) * | 1998-11-17 | 2001-02-13 | Fujitsu Limited | Semiconductor device manufacturing method including various oxidation steps with different concentration of chlorine to form a field oxide |
KR100650297B1 (en) | 1999-01-12 | 2006-11-28 | 루센트 테크놀러지스 인크 | Method of making a graded grown, high quality oxide layer for a semiconductor device |
DE19915156A1 (en) * | 1999-03-27 | 2000-09-28 | Inst Halbleiterphysik Gmbh | Process for the production of thin, uniform oxide layers on silicon surfaces |
US6670242B1 (en) | 1999-06-24 | 2003-12-30 | Agere Systems Inc. | Method for making an integrated circuit device including a graded, grown, high quality gate oxide layer and a nitride layer |
US6395610B1 (en) | 1999-06-24 | 2002-05-28 | Lucent Technologies Inc. | Method of making bipolar transistor semiconductor device including graded, grown, high quality oxide layer |
US6509230B1 (en) | 1999-06-24 | 2003-01-21 | Lucent Technologies Inc. | Non-volatile memory semiconductor device including a graded, grown, high quality oxide layer and associated methods |
US6521496B1 (en) | 1999-06-24 | 2003-02-18 | Lucent Technologies Inc. | Non-volatile memory semiconductor device including a graded, grown, high quality control gate oxide layer and associated methods |
US6551946B1 (en) * | 1999-06-24 | 2003-04-22 | Agere Systems Inc. | Two-step oxidation process for oxidizing a silicon substrate wherein the first step is carried out at a temperature below the viscoelastic temperature of silicon dioxide and the second step is carried out at a temperature above the viscoelastic temperature |
US6537926B1 (en) | 1999-09-14 | 2003-03-25 | Infineon Technologies, Ag | Process for improving the thickness uniformity of a thin oxide layer in semiconductor wafer fabrication |
WO2001020654A1 (en) * | 1999-09-14 | 2001-03-22 | Infineon Technologies North America Corp. | Process for improving the thickness uniformity of a thin oxide layer in semiconductor wafer fabrication |
US7169714B2 (en) | 2000-01-11 | 2007-01-30 | Agere Systems, Inc. | Method and structure for graded gate oxides on vertical and non-planar surfaces |
US20050164516A1 (en) * | 2000-01-11 | 2005-07-28 | Agere Systems Inc. | Method and structure for graded gate oxides on vertical and non-planar surfaces |
US20040194707A1 (en) * | 2000-05-29 | 2004-10-07 | Yutaka Takahashi | Silicon dioxide film forming method |
US7211295B2 (en) * | 2000-05-29 | 2007-05-01 | Tokyo Electron Limited | Silicon dioxide film forming method |
US20030119337A1 (en) * | 2000-06-20 | 2003-06-26 | Agere Systems Inc. | Process for oxide fabrication using oxidation steps below and above a threshold temperature |
US20030143863A1 (en) * | 2000-06-20 | 2003-07-31 | Agere Systems Inc. | Process for oxide fabrication using oxidation steps below and above a threshold temperature |
US7148153B2 (en) * | 2000-06-20 | 2006-12-12 | Agere Systems Inc. | Process for oxide fabrication using oxidation steps below and above a threshold temperature |
US6890831B2 (en) * | 2002-06-03 | 2005-05-10 | Sanyo Electric Co., Ltd. | Method of fabricating semiconductor device |
US20040009635A1 (en) * | 2002-06-03 | 2004-01-15 | Mayumi Nakasato | Method of fabricating semiconductor device |
US20030235957A1 (en) * | 2002-06-25 | 2003-12-25 | Samir Chaudhry | Method and structure for graded gate oxides on vertical and non-planar surfaces |
US20040224531A1 (en) * | 2003-05-09 | 2004-11-11 | Samsung Electronics Co., Ltd. | Method of forming an oxide layer and method of forming an oxinitride layer |
US7297620B2 (en) * | 2003-05-09 | 2007-11-20 | Samsung Electronics Co., Ltd. | Method of forming an oxide layer including increasing the temperature during oxidation |
US20080090424A1 (en) * | 2003-05-09 | 2008-04-17 | Samsung Electronics Co., Ltd. | Method of forming an oxinitride layer |
US7521375B2 (en) | 2003-05-09 | 2009-04-21 | Samsung Electronics Co., Ltd. | Method of forming an oxinitride layer |
US20100081243A1 (en) * | 2008-09-26 | 2010-04-01 | Kabushiki Kaisha Toshiba | Method for manufacturing semiconductor device |
US8932926B2 (en) * | 2008-09-26 | 2015-01-13 | Kabushiki Kaisha Toshiba | Method for forming gate oxide film of sic semiconductor device using two step oxidation process |
CN102938434A (en) * | 2012-11-14 | 2013-02-20 | 东方电气集团(宜兴)迈吉太阳能科技有限公司 | Wet oxidation method for preparing silica masks |
CN102938434B (en) * | 2012-11-14 | 2014-12-10 | 东方电气集团(宜兴)迈吉太阳能科技有限公司 | Wet oxidation method for preparing silica masks |
Also Published As
Publication number | Publication date |
---|---|
EP0087581B1 (en) | 1987-05-13 |
JPS58156523A (en) | 1983-09-17 |
DE3371582D1 (en) | 1987-06-19 |
ATE27206T1 (en) | 1987-05-15 |
EP0087581A1 (en) | 1983-09-07 |
DE3206376A1 (en) | 1983-09-01 |
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