US5811853A - Single-side oxide sealed salicide for EPROMS - Google Patents

Single-side oxide sealed salicide for EPROMS Download PDF

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US5811853A
US5811853A US08/700,571 US70057196A US5811853A US 5811853 A US5811853 A US 5811853A US 70057196 A US70057196 A US 70057196A US 5811853 A US5811853 A US 5811853A
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layer
dielectric material
floating gate
control gate
oxide
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Jung-Chun Wang
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Winbond Electronics Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

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  • the present invention generally relates to a single-side oxide sealed salicide process for the fabrication of erasable programmable read only memory (EPROM) or Flash Memory and more particularly, to a single-side oxide sealed salicide process for the fabrication of EPROM or Flash Memory that does not have the silicide bridge problem.
  • EPROM erasable programmable read only memory
  • Flash Memory Flash Memory
  • An EPROM implements non-volatile storage of data by using a storage transistor having a so-called floating gate.
  • the floating gate is located between a control gate and substrate and unlike the control gate, the floating gate is not connected to a word, bit, or any other line; and therefore it "floats".
  • the EPROM is programmed by injecting hot electrons into the floating gate to cause a substantial shift in the threshold voltage of the storage transistor. Under high gate and high drain voltages, electrons gain sufficient energy to jump the silicon-silicon dioxide energy barrier, penetrating the oxide and flowing to the floating gate, which is completely surrounded by an oxide layer.
  • the injected electrons cause a 5 to 10 volt increase in the threshold of the device, changing it from an ON to an OFF state when a nominal 5 volt read voltage is applied to the control gate. That is, if the floating gate holds electrons, it is negatively charged.
  • a salicide process is a process in which a sandwich of silicide on polysilicon approach is extended to include the formation of source and drain regions using the silicide.
  • the effect of a salicide process is to reduce the additional layer interconnect resistance, allowing the gate material to be used as a moderate long-distance interconnect.
  • the reason that a conventional salicide process cannot be used in the fabrication of EPROM or Flash Memory cells is that because of the small thickness of the sidewall dielectric spacer that is build on the floating gate, a short circuit frequently occurs between the floating gate and the source/drain regions. The short circuit or the formation of a silicide bridge destroys the functions of the memory cell.
  • FIG. 1 A split-gate EPROM cell 10 is shown in FIG. 1 having a control gate 12, a floating gate 14, a sidewall spacer 16 of a dielectric material, a VSS source region 18, a drain region 20 in a semiconductor substrate 22.
  • a VSS source region 18 is first formed in a semiconductor substrate 22.
  • a thin layer of oxide 24 is then formed on the surface of the substrate 22 by either a thermal oxidation process or a deposition process.
  • the layer of thin oxide 24 is also known as a tunneling oxide layer since it allows tunneling electrons to pass from the substrate 22 to the floating gate 14.
  • a floating gate 14 of a conductive material such as polycrystalline silicon is then formed on the tunneling oxide layer 24.
  • the pattern for the floating gate 14 is defined by a thick oxide layer which is formed like a LOCOS oxide 26.
  • a control gate 12 of a second conductive material is formed on top of the floating gate 14 and the dielectric "ONO spacer".
  • a portion 28 of the floating gate 14 can be exposed, i.e. the conductive polycrystalline silicon exposed from under the dielectric material 26.
  • a hydrofluoric acid (or B.O.E.) dip may be required in order to remove residual oxide in the silicide area.
  • the portion 28 of floating gate 14 is therefore exposed more and more. This process leads to the formation of a silicide bridge (or a short circuit) between the floating gate 14 at portion 28 and the thin oxide area 32 on the VSS source junction 18.
  • the process including the steps of forming a source region in a semiconductor substrate having a conductivity opposite to that of the substrate, forming a layer of a first dielectric material such as silicon dioxide on the semiconductor substrate including a tunnel dielectric region, forming a floating gate from a first conductive material such as polycrystalline silicon on the layer of the first dielectric material extending over the tunnel dielectric region, forming a layer of a second dielectric material such as oxide/nitride/oxide sidewall spacer on the edge of floating gate, forming a control gate from a second conductive material such as polycrystalline silicon on the second dielectric material, depositing a layer of a third dielectric material such as a CVD oxide on the control gate, coating a layer of a photoresist on the third dielectric material overlaying the source region and at least a portion of the control gate and the floating gate, etching away the layer of the third dielectric material except the area under the photoresist and the area of the sidewall spacers on the edges of the control
  • the present invention is further directed to a semiconductor device structure that is suitable for use in an electrically-erasable programmable read only memory or a Flash memory cell including the components of a semiconductor substrate having a first conductivity type, a source region that has a second conductivity type opposite the first conductivity type, at least one drain region having the second conductivity type formed in the substrate, a layer of a first dielectric material formed over the substrate including a tunnel dielectric region, at least one floating gate of a first conductive material disposed on the layer of the first dielectric material overlaying the tunnel dielectric region, a layer of a second dielectric material disposed on the at least one floating gate, at least one control gate of a second conductive material such as polycrystalline silicon formed on the layer of the second dielectric material, and a layer of a third dielectric material such as a CVD oxide disposed on a portion of the second dielectric material, on a portion of the control gate, on the source region, and on the edge of the at least one control gate as sidewall spacers, a
  • FIG. 1 is an enlarged cross-sectional view of a prior art EPROM memory cell.
  • FIG. 2 is an enlarged cross-sectional view of a present invention EPROM memory cell with a CVD oxide deposited on top.
  • FIG. 3 is an enlarged cross-sectional view of the present invention EPROM memory cell with a photoresist layer deposited on top.
  • FIG. 4 is an enlarged cross-sectional view of the present invention EPROM memory cell with the unprotected oxide layer etched away.
  • FIG. 5 is an enlarged cross-sectional view of the present invention EPROM memory cell with the photoresist layer removed.
  • FIG. 6 is an enlarged cross-sectional view of the present invention EPROM memory cell with the drain regions formed.
  • FIG. 7 is an enlarged cross-sectional view of the present invention EPROM memory cell with a layer of salicide formed.
  • FIG. 8 is an enlarged cross-sectional view of the present invention EPROM memory cell after metalization and passivation.
  • the present invention provides a method of forming a single-side oxide sealed salicide for an EPROM or Flash memory cell that does not have the occurrence of silicide bridge problems.
  • the process entails an additional photoresist step during which a CVD oxide layer deposited on top of the floating gate is protected from being etched away in an anisotropic etching process.
  • the thick CVD oxide layer provides sufficient electrical insulation of the floating gate and prevents the formation of a silicide bridge with the source region.
  • a tunneling oxide layer 42 is first formed on a top surface 40 of the semiconductor substrate 34 by a thermal oxidation process.
  • a doped polycrystalline is formed on top of the tunneling oxide 42.
  • the floating gate 44 is defined by a thick oxide mask 46 which is formed in a process similar to LOCOS.
  • An oxide/nitride/oxide spacer 41 or "ONO spacer” is then formed on the side of the floating gate 44 and channel ion implantation is carried out.
  • Control gates 48 are then formed of a conductive material such as polycrystalline silicon. This is followed by a VSS junction formation and the implantation of lightly doped drain (LDD) regions.
  • a spacer oxide layer 50 is finally deposited by a chemical vapor deposition technique to a thickness of between 150-300 nm.
  • the present invention utilized a self-aligned technique for the formation of salicide layers.
  • the technique has been a preferred method for forming integrated circuits and devices due to their simplicity and their ability to form high density components.
  • the present invention novel method forms an EPROM or flash memory cell that has low junction leakage and a low occurrence of shorting between the gates and the source/drain regions.
  • the invention further utilizes a combination of silicide and polycrystalline silicon (commonly known as polycide) instead of a conventional polycrystalline silicon for gate interconnects in VLSI devices to reduce sheet resistance.
  • silicide and polycrystalline silicon commonly known as polycide
  • the present invention utilizes a novel method of depositing a photoresist layer 58 on top of a portion of the oxide layer 50, i.e. substantially covers the area of the floating gate 44 and the source region 36.
  • a reactive ion etching (RIE) method with freon plasma is then used to anisotropically etch the oxide layer 50.
  • RIE reactive ion etching
  • FIG. 4 The only portions of the oxide layer 50 left unetched are the sidewall spacers 54 formed on the edges 56 of control gate 48 and the oxide layer 60 covered by the photoresist 58.
  • the width of the sidewall spacer 54 is in the range between 100-210 nm and provides sufficient electrical insulation to prevent shorting of the control gate 48.
  • a titanian salicide deposition process is conducted which includes the steps of a pre-Ti deposition dip with hydrofluoric acid or B.O.E. to remove native oxide, and then titanian deposition, followed by a rapid thermal annealing process at approximately 650° C., followed by the removal of unreacted titanian, and then a second rapid thermal annealing process.
  • the titanian silicide is formed by first sputtering or evaporating titanian metal on the surface of the device 30, and then forming titanian silicide at areas not covered by the spacer oxide 60.
  • FIG. 8 shows an enlarged cross-sectional view of the memory cell 30 after subsequent processing steps such as a BPSG (boron-phosphorus-silicate-glass) deposition, a BPSG flow process, a BPSG planarization process by chemical mechanical polishing or SOG (spin on glass) etch back, a contact open process, a metal deposition process, and a passivation process are completed.
  • BPSG boron-phosphorus-silicate-glass
  • SOG spin on glass
  • the present invention novel method of depositing a thick spacer oxide layer on top of the floating gate can be used to effectively prevent shorting or the formation of a silicide bridge between the floating gate and the source/drain regions in the semiconductor substrate.

Abstract

A method of forming a memory cell structure in a semiconductor substrate that does not have a shorting problem between a floating gate and a source/drain region of the substrate by depositing a thick spacer oxide layer on top of the floating gate and the source/drain region to a sufficient thickness such that electrical insulation is provided thereinbetween to prevent the occurrence of a short or the formation of a silicide bridge. The invention is also directed to a semiconductor device fabricated by the method.

Description

This is a divisional of application Ser. No. 08/575,748, filed on Dec. 20, 1995 U.S. Pat. No. 5,597,751.
FIELD OF THE INVENTION
The present invention generally relates to a single-side oxide sealed salicide process for the fabrication of erasable programmable read only memory (EPROM) or Flash Memory and more particularly, to a single-side oxide sealed salicide process for the fabrication of EPROM or Flash Memory that does not have the silicide bridge problem.
BACKGROUND
In the recent advance in semiconductor technology, specifically in the very large scale integration (VLSI) technology, a prominent objective is to increase the density, and thus the number of memory cells on a semiconductor chip to reduce costs and to increase operating speed. In particular, there has been much development into non-volatile memory devices, i.e., a type of memory device that retains stored data even after power to the device has been turned off. One of such devices is an electrically programmable ROM (EPROM).
An EPROM implements non-volatile storage of data by using a storage transistor having a so-called floating gate. The floating gate is located between a control gate and substrate and unlike the control gate, the floating gate is not connected to a word, bit, or any other line; and therefore it "floats". The EPROM is programmed by injecting hot electrons into the floating gate to cause a substantial shift in the threshold voltage of the storage transistor. Under high gate and high drain voltages, electrons gain sufficient energy to jump the silicon-silicon dioxide energy barrier, penetrating the oxide and flowing to the floating gate, which is completely surrounded by an oxide layer. The injected electrons cause a 5 to 10 volt increase in the threshold of the device, changing it from an ON to an OFF state when a nominal 5 volt read voltage is applied to the control gate. That is, if the floating gate holds electrons, it is negatively charged.
In a process of fabricating an EPROM or a Flash Memory device, a conventional salicide (self-aligned silicide) process cannot be used. A salicide process is a process in which a sandwich of silicide on polysilicon approach is extended to include the formation of source and drain regions using the silicide. The effect of a salicide process is to reduce the additional layer interconnect resistance, allowing the gate material to be used as a moderate long-distance interconnect. The reason that a conventional salicide process cannot be used in the fabrication of EPROM or Flash Memory cells is that because of the small thickness of the sidewall dielectric spacer that is build on the floating gate, a short circuit frequently occurs between the floating gate and the source/drain regions. The short circuit or the formation of a silicide bridge destroys the functions of the memory cell.
The deficiency of a conventional salicide process when used in an EPROM or Flash Memory cell is illustrated in FIG. 1. A split-gate EPROM cell 10 is shown in FIG. 1 having a control gate 12, a floating gate 14, a sidewall spacer 16 of a dielectric material, a VSS source region 18, a drain region 20 in a semiconductor substrate 22. In a conventional EPROM or flash fabrication process, a VSS source region 18 is first formed in a semiconductor substrate 22. A thin layer of oxide 24 is then formed on the surface of the substrate 22 by either a thermal oxidation process or a deposition process. The layer of thin oxide 24 is also known as a tunneling oxide layer since it allows tunneling electrons to pass from the substrate 22 to the floating gate 14. A floating gate 14 of a conductive material such as polycrystalline silicon is then formed on the tunneling oxide layer 24. The pattern for the floating gate 14 is defined by a thick oxide layer which is formed like a LOCOS oxide 26.
After the floating gate 14 is covered by a layer of oxide material or "ONO spacer", i.e. oxide/nitride/oxide (ONO) material, a control gate 12 of a second conductive material is formed on top of the floating gate 14 and the dielectric "ONO spacer". In the next step of etching the sidewall spacer 16, a portion 28 of the floating gate 14 can be exposed, i.e. the conductive polycrystalline silicon exposed from under the dielectric material 26. Prior to the formation of a salicide process, a hydrofluoric acid (or B.O.E.) dip may be required in order to remove residual oxide in the silicide area. The portion 28 of floating gate 14 is therefore exposed more and more. This process leads to the formation of a silicide bridge (or a short circuit) between the floating gate 14 at portion 28 and the thin oxide area 32 on the VSS source junction 18.
It is therefore an object of the present invention to provide a single-side oxide sealed salicide process for the fabrication of EPROM or Flash Memory cells without the drawbacks and shortcomings of the prior art methods.
It is another object of the present invention to provide a single-side oxide sealed salicide process for the fabrication of EPROM or Flash Memory cells that does not have short circuit problems between the floating gate and the source/drain regions.
It is a further object of the present invention to provide a single-side oxide sealed salicide process for the fabrication of EPROM or Flash Memory cells that does not have silicide bridge formation by the addition of a photoresist layer prior to the etching of the sidewall spacer such that the oxide layer on top of the floating gate remains unetched.
It is still another object of the present invention to provide a semiconductor structure for an EPROM or Flash Memory cell that does not have silicide bridge problems.
It is yet another object of the present invention to provide an EPROM or Flash Memory cell that does not have short circuit problems by depositing an electrically insulating CVD oxide layer on top of the floating gate.
SUMMARY OF THE INVENTION
In accordance with the present invention, a single-side oxide sealed salicide process for the fabrication of and EPROM or Flash Memory cell is provided.
In the preferred embodiment, the process including the steps of forming a source region in a semiconductor substrate having a conductivity opposite to that of the substrate, forming a layer of a first dielectric material such as silicon dioxide on the semiconductor substrate including a tunnel dielectric region, forming a floating gate from a first conductive material such as polycrystalline silicon on the layer of the first dielectric material extending over the tunnel dielectric region, forming a layer of a second dielectric material such as oxide/nitride/oxide sidewall spacer on the edge of floating gate, forming a control gate from a second conductive material such as polycrystalline silicon on the second dielectric material, depositing a layer of a third dielectric material such as a CVD oxide on the control gate, coating a layer of a photoresist on the third dielectric material overlaying the source region and at least a portion of the control gate and the floating gate, etching away the layer of the third dielectric material except the area under the photoresist and the area of the sidewall spacers on the edges of the control gate, forming a drain region in the semiconductor substrate having the second conductivity type, and forming a metal silicide layer over the control gate that is not covered by the layer of the third dielectric material and also over the drain region.
The present invention is further directed to a semiconductor device structure that is suitable for use in an electrically-erasable programmable read only memory or a Flash memory cell including the components of a semiconductor substrate having a first conductivity type, a source region that has a second conductivity type opposite the first conductivity type, at least one drain region having the second conductivity type formed in the substrate, a layer of a first dielectric material formed over the substrate including a tunnel dielectric region, at least one floating gate of a first conductive material disposed on the layer of the first dielectric material overlaying the tunnel dielectric region, a layer of a second dielectric material disposed on the at least one floating gate, at least one control gate of a second conductive material such as polycrystalline silicon formed on the layer of the second dielectric material, and a layer of a third dielectric material such as a CVD oxide disposed on a portion of the second dielectric material, on a portion of the control gate, on the source region, and on the edge of the at least one control gate as sidewall spacers, a metal silicide layer disposed on areas not covered by the layer of the third dielectric material including at least a portion of the at least one control gate, the at least one drain regions, the layer of the third dielectric material has a thickness that is sufficient to electrically insulate the at least one floating gate and the at least one control gate so as to prevent the occurrence of a silicide bridge between the at least one floating gate and the source region, and between the at least one control gate and the drain region.
BRIEF DESCRIPTION OF THE DRAWINGS
Other objects, features and advantages of the present invention will be come apparent upon consideration of the specification and the appended drawings, in which:
FIG. 1 is an enlarged cross-sectional view of a prior art EPROM memory cell.
FIG. 2 is an enlarged cross-sectional view of a present invention EPROM memory cell with a CVD oxide deposited on top.
FIG. 3 is an enlarged cross-sectional view of the present invention EPROM memory cell with a photoresist layer deposited on top.
FIG. 4 is an enlarged cross-sectional view of the present invention EPROM memory cell with the unprotected oxide layer etched away.
FIG. 5 is an enlarged cross-sectional view of the present invention EPROM memory cell with the photoresist layer removed.
FIG. 6 is an enlarged cross-sectional view of the present invention EPROM memory cell with the drain regions formed.
FIG. 7 is an enlarged cross-sectional view of the present invention EPROM memory cell with a layer of salicide formed.
FIG. 8 is an enlarged cross-sectional view of the present invention EPROM memory cell after metalization and passivation.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
The present invention provides a method of forming a single-side oxide sealed salicide for an EPROM or Flash memory cell that does not have the occurrence of silicide bridge problems. The process entails an additional photoresist step during which a CVD oxide layer deposited on top of the floating gate is protected from being etched away in an anisotropic etching process. The thick CVD oxide layer provides sufficient electrical insulation of the floating gate and prevents the formation of a silicide bridge with the source region.
Referring initially to FIG. 2, wherein an enlarged cross-sectional view of the present invention EPROM or Flash memory cell 30 is shown. A tunneling oxide layer 42 is first formed on a top surface 40 of the semiconductor substrate 34 by a thermal oxidation process. A doped polycrystalline is formed on top of the tunneling oxide 42. The floating gate 44 is defined by a thick oxide mask 46 which is formed in a process similar to LOCOS. An oxide/nitride/oxide spacer 41 or "ONO spacer" is then formed on the side of the floating gate 44 and channel ion implantation is carried out. Control gates 48 are then formed of a conductive material such as polycrystalline silicon. This is followed by a VSS junction formation and the implantation of lightly doped drain (LDD) regions. A spacer oxide layer 50 is finally deposited by a chemical vapor deposition technique to a thickness of between 150-300 nm. The above processes are well known in the art and therefore, detailed fabrication steps are not described.
The present invention utilized a self-aligned technique for the formation of salicide layers. The technique has been a preferred method for forming integrated circuits and devices due to their simplicity and their ability to form high density components. The present invention novel method forms an EPROM or flash memory cell that has low junction leakage and a low occurrence of shorting between the gates and the source/drain regions.
The invention further utilizes a combination of silicide and polycrystalline silicon (commonly known as polycide) instead of a conventional polycrystalline silicon for gate interconnects in VLSI devices to reduce sheet resistance.
Instead of etching anisotropically the thick oxide layer 50 shown in FIG. 2, the present invention utilizes a novel method of depositing a photoresist layer 58 on top of a portion of the oxide layer 50, i.e. substantially covers the area of the floating gate 44 and the source region 36. A reactive ion etching (RIE) method with freon plasma is then used to anisotropically etch the oxide layer 50. This is shown in FIG. 4. The only portions of the oxide layer 50 left unetched are the sidewall spacers 54 formed on the edges 56 of control gate 48 and the oxide layer 60 covered by the photoresist 58. The width of the sidewall spacer 54 is in the range between 100-210 nm and provides sufficient electrical insulation to prevent shorting of the control gate 48.
In the next fabrication step, photoresist 54 is removed by known processing methods to expose the spacer oxide layer 60. An N+ drain region 62 is then formed by an implantation process. A titanian salicide deposition process is conducted which includes the steps of a pre-Ti deposition dip with hydrofluoric acid or B.O.E. to remove native oxide, and then titanian deposition, followed by a rapid thermal annealing process at approximately 650° C., followed by the removal of unreacted titanian, and then a second rapid thermal annealing process. The titanian silicide is formed by first sputtering or evaporating titanian metal on the surface of the device 30, and then forming titanian silicide at areas not covered by the spacer oxide 60.
FIG. 8 shows an enlarged cross-sectional view of the memory cell 30 after subsequent processing steps such as a BPSG (boron-phosphorus-silicate-glass) deposition, a BPSG flow process, a BPSG planarization process by chemical mechanical polishing or SOG (spin on glass) etch back, a contact open process, a metal deposition process, and a passivation process are completed.
The present invention novel method of depositing a thick spacer oxide layer on top of the floating gate can be used to effectively prevent shorting or the formation of a silicide bridge between the floating gate and the source/drain regions in the semiconductor substrate.
While the present Invention has been described in an illustrative manner, it should be understood that the terminology used is intended to be in a nature of words of description rather than of limitation.
Furthermore, while the present invention has been described in terms of a preferred embodiment thereof, it is to be appreciated that those skilled in the art will readily apply these teachings to other possible variations of the invention. For instance, the present invention unique process can be used in other type of memory devices other than EPROM and Flash.

Claims (7)

The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:
1. A semiconductor structure of the type suitable for use in an electrically-erasable read only memory or a Flash memory cell, comprising:
a semiconductor substrate of a first conductivity type,
a source region having a second conductivity type opposite said first conductivity type in said substrate,
at least one drain region having said second conductivity type formed in said substrate adjacent to a surface of said substrate,
a layer of a first dielectric material formed over said substrate including a tunned dielectric region,
at least one floating gate of a first conductive material disposed on said layer of first dielectric material overlaying substantially said tunnel dielectric region,
a layer of a second dielectric material disposed on said at least one floating gate,
at least one control gate of a second conductive material formed on said layer of second dielectric material;
a layer of a third dielectric material disposed on a portion of said second dielectric material, on a portion of said control gate, on said source region, and on one edge of said at least one control gate as a sidewall spacer, and
a metal silicide layer hi substantially the same thickness disposed side-by-side with said layer of the third dielectric material on areas not covered by said layer of the third dielectric material including at least a portion of said at least one control gate and said at least one drain regions, said layer of the third dielectric material having a thickness sufficient to electrically insulate said at least one floating gate and said at least one control gate so as to prevent the occurrence of a silicide bridge between said at least one floating gate and said source region, and between said at least one control gate and said drain region.
2. A semiconductor structure according to claim 1, wherein said first conductivity type is P- type and said second conductivity type is N+ type.
3. A semiconductor structure according to claim 1, wherein said layer of first dielectric material is silicon oxide and said layer of second dielectric material is oxide/nitride/oxide.
4. A semiconductor structure according to claim 1, wherein said layer of third dielectric material is a spacer oxide layer.
5. A semiconductor structure according to claim 1, wherein said at least one floating gate and said at least one control gate are both formed of polycrystalline silicon.
6. A semiconductor structure according to claim 1, wherein said metal silicide layer is formed by the reaction of silicon and a metal selected from the group consisting of Ti, Ta and Mo.
7. A semiconductor structure according to claim 1, wherein said at least one control gate is a split gate.
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Cited By (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5950087A (en) * 1998-09-10 1999-09-07 Taiwan Semiconductor Manufacturing Company, Ltd. Method to make self-aligned source etching available in split-gate flash
US6174771B1 (en) * 1998-11-17 2001-01-16 Winbond Electronics Corp. Split gate flash memory cell with self-aligned process
US6174772B1 (en) 1999-07-06 2001-01-16 Taiwan Semiconductor Manufacturing Company Optimal process flow of fabricating nitride spacer without inter-poly oxide damage in split gate flash
US6245685B1 (en) 1999-09-01 2001-06-12 Taiwan Semiconductor Manufacturing Company Method for forming a square oxide structure or a square floating gate structure without rounding effect
US6352895B1 (en) 2000-03-15 2002-03-05 International Business Machines Corporation Method of forming merged self-aligned source and ONO capacitor for split gate non-volatile memory
US20020034846A1 (en) * 2000-09-20 2002-03-21 Wang Chih Hsin Self aligned method of forming a semiconductor memory array of floating gate memory cells with control gate spacers, and a memory array made thereby
US6380030B1 (en) 1999-04-23 2002-04-30 Taiwan Semiconductor Manufacturing Company Implant method for forming Si3N4 spacer
US6441429B1 (en) * 1998-04-06 2002-08-27 Taiwan, Semiconductor Manufacturing Company Split-gate flash memory device having floating gate electrode with sharp peak
US6475853B2 (en) 1997-04-02 2002-11-05 Kabushiki Kaisha Toshiba Stacked semiconductor integrated circuit device and manufacturing method thereof
US6525371B2 (en) 1999-09-22 2003-02-25 International Business Machines Corporation Self-aligned non-volatile random access memory cell and process to make the same
US20030053347A1 (en) * 2001-09-18 2003-03-20 Wang Chih Hsin Method of forming a semiconductor array of floating gate memory cells and strap regions, and a memory array and strap regions made thereby
US6538276B2 (en) * 1998-08-14 2003-03-25 Taiwan Semiconductor Manufacturing Company Split gate flash memory device with shrunken cell and source line array dimensions
US6541324B1 (en) 2001-11-02 2003-04-01 Silicon Storage Technology, Inc. Method of forming a semiconductor array of floating gate memory cells having strap regions and a peripheral logic device region
US6563167B2 (en) 2001-01-05 2003-05-13 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with floating gates having multiple sharp edges
US6566706B1 (en) 2001-10-31 2003-05-20 Silicon Storage Technology, Inc. Semiconductor array of floating gate memory cells and strap regions
US20030122185A1 (en) * 2001-12-27 2003-07-03 Wang Chih Hsin Self aligned method of forming a semiconductor memory array of floating gate memory cells with horizontally oriented edges, and a memory array thereby
US20030139010A1 (en) * 2002-01-24 2003-07-24 Wang Chih Hsin Method of forming a semiconductor array of floating gate memory cells having strap regions and a peripheral logic device region, and the array of memory cells formed thereby
US20030153152A1 (en) * 2002-02-07 2003-08-14 Pavel Klinger Self aligned method of forming non-volatile memory cells with flat word line
US6627946B2 (en) 2000-09-20 2003-09-30 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with control gates protruding portions
US6627942B2 (en) 2001-03-29 2003-09-30 Silicon Storage Technology, Inc Self-aligned floating gate poly for a flash E2PROM cell
US20030215999A1 (en) * 2002-05-14 2003-11-20 Chern Geeng-Chuan Michael Self aligned method of forming a semiconductor array of non-volatile memory cells
US20030223296A1 (en) * 2002-04-05 2003-12-04 Hu Yaw Wen Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried source line and floating gate, and a memory array made thereby
US20030227048A1 (en) * 2002-04-01 2003-12-11 Sohrab Kianian Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line, and a memory array made thereby
US6667509B1 (en) * 1998-01-09 2003-12-23 Taiwan Semiconductor Manufacturing Company Method of forming sharp beak of poly by oxygen/fluorine implant to improve erase speed for split-gate flash
US6727545B2 (en) 2000-09-20 2004-04-27 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling
US6746920B1 (en) * 2003-01-07 2004-06-08 Megawin Technology Co., Ltd. Fabrication method of flash memory device with L-shaped floating gate
US20040159864A1 (en) * 2001-10-17 2004-08-19 Sohrab Kianian Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor
US20040183121A1 (en) * 2002-04-05 2004-09-23 Bing Yeh Method of programming electrons onto a floating gate of a non-volatile memory cell
US20040183118A1 (en) * 2003-03-21 2004-09-23 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with burried floating gate and pointed channel region
US20040191990A1 (en) * 2002-03-20 2004-09-30 Sohrab Kianian Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line
US20040197996A1 (en) * 2003-03-21 2004-10-07 Bomy Chen Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate, pointed floating gate and pointed channel region, and a memory array made thereby
US20040212007A1 (en) * 2001-12-05 2004-10-28 Geeng-Chuan Chern Method of forming different oxide thickness for high voltage transistor and memory cell tunnel dieletric
US20050045940A1 (en) * 2003-08-28 2005-03-03 Bomy Chen Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate, and a memory array made thereby
US20050142758A1 (en) * 2003-12-31 2005-06-30 Dongbuanam Semiconductor Inc. Method of fabricating split gate flash memory device
US6967372B2 (en) 2001-04-10 2005-11-22 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with vertical control gate sidewalls and insulation spacers
US20050269622A1 (en) * 2004-06-07 2005-12-08 Pavel Klinger Semiconductor memory array of floating gate memory cells with program/erase and select gates, and methods of making and operating same
US20080100043A1 (en) * 2006-11-01 2008-05-01 Autoliv Development Ab Side airbag module with an internal guide fin
US20100127308A1 (en) * 2008-11-26 2010-05-27 Nhan Do Non-volatile memory cell with self aligned floating and erase gates, and method of making same
US8138524B2 (en) 2006-11-01 2012-03-20 Silicon Storage Technology, Inc. Self-aligned method of forming a semiconductor memory array of floating memory cells with source side erase, and a memory array made thereby
US9236389B1 (en) 2014-08-12 2016-01-12 International Business Machines Corporation Embedded flash memory fabricated in standard CMOS process with self-aligned contact

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5861340A (en) * 1996-02-15 1999-01-19 Intel Corporation Method of forming a polycide film
KR100217901B1 (en) * 1996-03-11 1999-09-01 김영환 A flash eeprom cell and manufacturing method thereof
TW357441B (en) * 1998-01-14 1999-05-01 United Semiconductor Corp Manufacturing method of split gate flash memory
US6133097A (en) 1998-08-14 2000-10-17 Taiwan Semiconductor Manufacturing Company Method for forming mirror image split gate flash memory devices by forming a central source line slot
US6309928B1 (en) 1998-12-10 2001-10-30 Taiwan Semiconductor Manufacturing Company Split-gate flash cell
US6284596B1 (en) * 1998-12-17 2001-09-04 Taiwan Semiconductor Manufacturing Company Method of forming split-gate flash cell for salicide and self-align contact
US6090668A (en) * 1999-02-11 2000-07-18 Taiwan Semiconductor Manufacturing Company Method to fabricate sharp tip of poly in split gate flash
US6358796B1 (en) 1999-04-15 2002-03-19 Taiwan Semiconductor Manufacturing Company Method to fabricate a non-smiling effect structure in split-gate flash with self-aligned isolation
US6093608A (en) * 1999-04-23 2000-07-25 Taiwan Semiconductor Manufacturing Company Source side injection programming and tip erasing P-channel split gate flash memory cell
US6165845A (en) * 1999-04-26 2000-12-26 Taiwan Semiconductor Manufacturing Company Method to fabricate poly tip in split-gate flash
US6265252B1 (en) 1999-05-03 2001-07-24 Vlsi Technology, Inc. Reducing the formation of electrical leakage pathways during manufacture of an electronic device
US6200860B1 (en) 1999-05-03 2001-03-13 Taiwan Semiconductor Manufacturing Company Process for preventing the reverse tunneling during programming in split gate flash
US6355527B1 (en) * 1999-05-19 2002-03-12 Taiwan Semiconductor Manufacturing Company Method to increase coupling ratio of source to floating gate in split-gate flash
US6265292B1 (en) * 1999-07-12 2001-07-24 Intel Corporation Method of fabrication of a novel flash integrated circuit
US6849499B2 (en) * 2000-06-28 2005-02-01 Taiwan Semiconductor Manufacturing Company Process for flash memory cell
US20030065934A1 (en) * 2001-09-28 2003-04-03 Angelo Michael F. After the fact protection of data in remote personal and wireless devices
US6607957B1 (en) * 2002-07-31 2003-08-19 Macronix International Co., Ltd. Method for fabricating nitride read only memory
US6835480B2 (en) * 2002-12-30 2004-12-28 Utc Fuel Cells, Llc Method of using a temporary dilute surfactant water solution to enhance mass transport in a fuel cell
US9502581B2 (en) 2014-07-11 2016-11-22 Atmel Corporation Non-volatile floating gate memory cells
CN114156344A (en) * 2020-09-07 2022-03-08 联华电子股份有限公司 Semiconductor structure and manufacturing method thereof

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130063A (en) * 1984-07-23 1986-02-12 Nec Corp Nonvolatile semiconductor memory device
US4853895A (en) * 1987-11-30 1989-08-01 Texas Instruments Incorporated EEPROM including programming electrode extending through the control gate electrode
US4996572A (en) * 1987-03-13 1991-02-26 Kabushiki Kaisha Toshiba Semiconductor memory device
US5036378A (en) * 1989-11-01 1991-07-30 At&T Bell Laboratories Memory device
US5041886A (en) * 1989-08-17 1991-08-20 Samsung Electronics Co., Ltd. Nonvolatile semiconductor memory device and manufacturing method thereof
US5051796A (en) * 1988-11-10 1991-09-24 Texas Instruments Incorporated Cross-point contact-free array with a high-density floating-gate structure
JPH05129612A (en) * 1991-09-30 1993-05-25 Nippon Steel Corp Manufacture of semiconductor memory device
US5494838A (en) * 1994-05-02 1996-02-27 Motorola, Inc. Process of making EEPROM memory device having a sidewall spacer floating gate electrode
US5576569A (en) * 1994-05-06 1996-11-19 United Microelectronics Corporation Electrically programmable and erasable memory device with depression in lightly-doped source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1236980B (en) * 1989-12-22 1993-05-12 Sgs Thomson Microelectronics NON-VOLATILE EPROM MEMORY CELL WITH DIVIDED GATE AND SELF-ALIGNED FIELD INSULATION PROCESS FOR OBTAINING THE ABOVE CELL
US5364806A (en) * 1991-08-29 1994-11-15 Hyundai Electronics Industries Co., Ltd. Method of making a self-aligned dual-bit split gate (DSG) flash EEPROM cell

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130063A (en) * 1984-07-23 1986-02-12 Nec Corp Nonvolatile semiconductor memory device
US4996572A (en) * 1987-03-13 1991-02-26 Kabushiki Kaisha Toshiba Semiconductor memory device
US4853895A (en) * 1987-11-30 1989-08-01 Texas Instruments Incorporated EEPROM including programming electrode extending through the control gate electrode
US5051796A (en) * 1988-11-10 1991-09-24 Texas Instruments Incorporated Cross-point contact-free array with a high-density floating-gate structure
US5041886A (en) * 1989-08-17 1991-08-20 Samsung Electronics Co., Ltd. Nonvolatile semiconductor memory device and manufacturing method thereof
US5036378A (en) * 1989-11-01 1991-07-30 At&T Bell Laboratories Memory device
JPH05129612A (en) * 1991-09-30 1993-05-25 Nippon Steel Corp Manufacture of semiconductor memory device
US5494838A (en) * 1994-05-02 1996-02-27 Motorola, Inc. Process of making EEPROM memory device having a sidewall spacer floating gate electrode
US5576569A (en) * 1994-05-06 1996-11-19 United Microelectronics Corporation Electrically programmable and erasable memory device with depression in lightly-doped source

Cited By (88)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512278B2 (en) * 1997-04-02 2003-01-28 Kabushiki Kaisha Toshiba Stacked semiconductor integrated circuit device having an inter-electrode barrier to silicide formation
US6475853B2 (en) 1997-04-02 2002-11-05 Kabushiki Kaisha Toshiba Stacked semiconductor integrated circuit device and manufacturing method thereof
US6667509B1 (en) * 1998-01-09 2003-12-23 Taiwan Semiconductor Manufacturing Company Method of forming sharp beak of poly by oxygen/fluorine implant to improve erase speed for split-gate flash
US6441429B1 (en) * 1998-04-06 2002-08-27 Taiwan, Semiconductor Manufacturing Company Split-gate flash memory device having floating gate electrode with sharp peak
US6538276B2 (en) * 1998-08-14 2003-03-25 Taiwan Semiconductor Manufacturing Company Split gate flash memory device with shrunken cell and source line array dimensions
US5950087A (en) * 1998-09-10 1999-09-07 Taiwan Semiconductor Manufacturing Company, Ltd. Method to make self-aligned source etching available in split-gate flash
US6174771B1 (en) * 1998-11-17 2001-01-16 Winbond Electronics Corp. Split gate flash memory cell with self-aligned process
US6380030B1 (en) 1999-04-23 2002-04-30 Taiwan Semiconductor Manufacturing Company Implant method for forming Si3N4 spacer
US6624466B2 (en) 1999-04-23 2003-09-23 Taiwan Semiconductor Manufacturing Company Implant method for forming Si3N4 spacer
US6465841B1 (en) 1999-07-06 2002-10-15 Taiwan Semiconductor Manufacturing Company Split gate flash memory device having nitride spacer to prevent inter-poly oxide damage
US6174772B1 (en) 1999-07-06 2001-01-16 Taiwan Semiconductor Manufacturing Company Optimal process flow of fabricating nitride spacer without inter-poly oxide damage in split gate flash
US6245685B1 (en) 1999-09-01 2001-06-12 Taiwan Semiconductor Manufacturing Company Method for forming a square oxide structure or a square floating gate structure without rounding effect
US6525371B2 (en) 1999-09-22 2003-02-25 International Business Machines Corporation Self-aligned non-volatile random access memory cell and process to make the same
US6570209B2 (en) 2000-03-15 2003-05-27 International Business Machines Corporation Merged self-aligned source and ONO capacitor for split gate non-volatile memory
US6352895B1 (en) 2000-03-15 2002-03-05 International Business Machines Corporation Method of forming merged self-aligned source and ONO capacitor for split gate non-volatile memory
US6868015B2 (en) 2000-09-20 2005-03-15 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with control gate spacer portions
US20040214395A1 (en) * 2000-09-20 2004-10-28 Wang Chih Hsin Self aligned method of forming a semiconductor memory array of floating gate memory cells with control gate spacers
US6855980B2 (en) 2000-09-20 2005-02-15 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling
US6773989B2 (en) 2000-09-20 2004-08-10 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with control gate protruding portions
US20020034846A1 (en) * 2000-09-20 2002-03-21 Wang Chih Hsin Self aligned method of forming a semiconductor memory array of floating gate memory cells with control gate spacers, and a memory array made thereby
US6627946B2 (en) 2000-09-20 2003-09-30 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with control gates protruding portions
US20040084717A1 (en) * 2000-09-20 2004-05-06 Wang Chih Hsin Semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling
US6727545B2 (en) 2000-09-20 2004-04-27 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling
KR100931815B1 (en) * 2000-09-20 2009-12-14 실리콘 스토리지 테크놀로지 인크 Self-aligned method of forming a semiconductor memory array of floating gate memory cells having control gate protrusions and a memory array fabricated thereby
US7018897B2 (en) 2000-09-20 2006-03-28 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with control gate spacers
US6563167B2 (en) 2001-01-05 2003-05-13 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with floating gates having multiple sharp edges
US20030141539A1 (en) * 2001-01-05 2003-07-31 Geeng-Chuan Chern Self aligned method of forming a semiconductor memory array of floating gate memory cells with floating gates having multiple sharp edges, and a memory array made thereby
US6750090B2 (en) 2001-01-05 2004-06-15 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with floating gates having multiple sharp edges, and a memory array made thereby
US6627942B2 (en) 2001-03-29 2003-09-30 Silicon Storage Technology, Inc Self-aligned floating gate poly for a flash E2PROM cell
US6967372B2 (en) 2001-04-10 2005-11-22 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with vertical control gate sidewalls and insulation spacers
US6743674B2 (en) 2001-09-18 2004-06-01 Silicon Storage Technology, Inc. Method of forming a semiconductor array of floating gate memory cells and strap regions, and a memory array and strap regions made thereby
US20030053347A1 (en) * 2001-09-18 2003-03-20 Wang Chih Hsin Method of forming a semiconductor array of floating gate memory cells and strap regions, and a memory array and strap regions made thereby
US20040159864A1 (en) * 2001-10-17 2004-08-19 Sohrab Kianian Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor
US7074672B2 (en) 2001-10-17 2006-07-11 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor
US6917069B2 (en) 2001-10-17 2005-07-12 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor
US20040160824A1 (en) * 2001-10-17 2004-08-19 Sohrab Kianian Method of operating a semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor
US6773974B2 (en) 2001-10-31 2004-08-10 Silicon Storage Technology, Inc. Method of forming a semiconductor array of floating gate memory cells and strap regions
US6566706B1 (en) 2001-10-31 2003-05-20 Silicon Storage Technology, Inc. Semiconductor array of floating gate memory cells and strap regions
US20030189223A1 (en) * 2001-10-31 2003-10-09 Wang Chih Hsin Method of forming a semiconductor array of floating gate memory cells and strap regions
US6541324B1 (en) 2001-11-02 2003-04-01 Silicon Storage Technology, Inc. Method of forming a semiconductor array of floating gate memory cells having strap regions and a peripheral logic device region
US20040212007A1 (en) * 2001-12-05 2004-10-28 Geeng-Chuan Chern Method of forming different oxide thickness for high voltage transistor and memory cell tunnel dieletric
US7084453B2 (en) 2001-12-05 2006-08-01 Silicon Storage Technology, Inc. Method of forming different oxide thickness for high voltage transistor and memory cell tunnel dielectric
US20030122185A1 (en) * 2001-12-27 2003-07-03 Wang Chih Hsin Self aligned method of forming a semiconductor memory array of floating gate memory cells with horizontally oriented edges, and a memory array thereby
US6882572B2 (en) 2001-12-27 2005-04-19 Silicon Storage Technology, Inc. Method of operating a semiconductor memory array of floating gate memory cells with horizontally oriented edges
US20040214396A1 (en) * 2001-12-27 2004-10-28 Wang Chih Hsin Self aligned method of forming a semiconductor memory array of floating gate memory cells with horizontally oriented edges
US20040212009A1 (en) * 2001-12-27 2004-10-28 Wang Chih Hsin Method of operating a semiconductor memory array of floating gate memory cells with horizontally oriented edges
US6756633B2 (en) 2001-12-27 2004-06-29 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with horizontally oriented floating gate edges
US6861698B2 (en) 2002-01-24 2005-03-01 Silicon Storage Technology, Inc. Array of floating gate memory cells having strap regions and a peripheral logic device region
US20030139010A1 (en) * 2002-01-24 2003-07-24 Wang Chih Hsin Method of forming a semiconductor array of floating gate memory cells having strap regions and a peripheral logic device region, and the array of memory cells formed thereby
US6878591B2 (en) 2002-02-07 2005-04-12 Silicon Storage Technology, Inc. Self aligned method of forming non-volatile memory cells with flat word line
US20030153152A1 (en) * 2002-02-07 2003-08-14 Pavel Klinger Self aligned method of forming non-volatile memory cells with flat word line
US20040191990A1 (en) * 2002-03-20 2004-09-30 Sohrab Kianian Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line
US6952033B2 (en) 2002-03-20 2005-10-04 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with buried bit-line and raised source line
US7144778B2 (en) 2002-03-20 2006-12-05 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line
US7411246B2 (en) 2002-04-01 2008-08-12 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line, and a memory array made thereby
US20030227048A1 (en) * 2002-04-01 2003-12-11 Sohrab Kianian Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line, and a memory array made thereby
US7326614B2 (en) 2002-04-01 2008-02-05 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line, and a memory array made thereby
US20050104115A1 (en) * 2002-04-01 2005-05-19 Sohrab Kianian Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line, and a memory array made thereby
US20050269624A1 (en) * 2002-04-05 2005-12-08 Hu Yaw W Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried source line and floating gate
US6891220B2 (en) 2002-04-05 2005-05-10 Silicon Storage Technology, Inc. Method of programming electrons onto a floating gate of a non-volatile memory cell
US7537996B2 (en) 2002-04-05 2009-05-26 Silicon Storage Technology, Inc. Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried source line and floating gate
US20030223296A1 (en) * 2002-04-05 2003-12-04 Hu Yaw Wen Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried source line and floating gate, and a memory array made thereby
US6952034B2 (en) 2002-04-05 2005-10-04 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with buried source line and floating gate
US20040183121A1 (en) * 2002-04-05 2004-09-23 Bing Yeh Method of programming electrons onto a floating gate of a non-volatile memory cell
US20030215999A1 (en) * 2002-05-14 2003-11-20 Chern Geeng-Chuan Michael Self aligned method of forming a semiconductor array of non-volatile memory cells
US6706592B2 (en) 2002-05-14 2004-03-16 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor array of non-volatile memory cells
US6746920B1 (en) * 2003-01-07 2004-06-08 Megawin Technology Co., Ltd. Fabrication method of flash memory device with L-shaped floating gate
US20040238874A1 (en) * 2003-03-21 2004-12-02 Bomy Chen Semiconductor memory array of floating gate memory cells with buried floating gate, pointed floating gate and pointed channel region
US6958273B2 (en) 2003-03-21 2005-10-25 Silicon Storage Technology, Inc. Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate, pointed floating gate and pointed channel region, and a memory array made thereby
US6873006B2 (en) 2003-03-21 2005-03-29 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with burried floating gate and pointed channel region
US20040197996A1 (en) * 2003-03-21 2004-10-07 Bomy Chen Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate, pointed floating gate and pointed channel region, and a memory array made thereby
US20050199914A1 (en) * 2003-03-21 2005-09-15 Bomy Chen Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate and pointed channel region
US7180127B2 (en) 2003-03-21 2007-02-20 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with buried floating gate, pointed floating gate and pointed channel region
US7208376B2 (en) 2003-03-21 2007-04-24 Silicon Storage Technology, Inc. Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate and pointed channel region
US20040183118A1 (en) * 2003-03-21 2004-09-23 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with burried floating gate and pointed channel region
US20050045940A1 (en) * 2003-08-28 2005-03-03 Bomy Chen Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate, and a memory array made thereby
US6906379B2 (en) 2003-08-28 2005-06-14 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with buried floating gate
US7208371B2 (en) * 2003-12-31 2007-04-24 Dongbu Electronics Co., Ltd. Method of fabricating split gate flash memory device
US20050142758A1 (en) * 2003-12-31 2005-06-30 Dongbuanam Semiconductor Inc. Method of fabricating split gate flash memory device
US7816723B2 (en) 2004-06-07 2010-10-19 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with program/erase and select gates
US7315056B2 (en) 2004-06-07 2008-01-01 Silicon Storage Technology, Inc. Semiconductor memory array of floating gate memory cells with program/erase and select gates
US20050269622A1 (en) * 2004-06-07 2005-12-08 Pavel Klinger Semiconductor memory array of floating gate memory cells with program/erase and select gates, and methods of making and operating same
US7829404B2 (en) 2004-06-07 2010-11-09 Silicon Storage Technology, Inc. Method of making a semiconductor memory array of floating gate memory cells with program/erase and select gates
US20080100043A1 (en) * 2006-11-01 2008-05-01 Autoliv Development Ab Side airbag module with an internal guide fin
US8138524B2 (en) 2006-11-01 2012-03-20 Silicon Storage Technology, Inc. Self-aligned method of forming a semiconductor memory array of floating memory cells with source side erase, and a memory array made thereby
US20100127308A1 (en) * 2008-11-26 2010-05-27 Nhan Do Non-volatile memory cell with self aligned floating and erase gates, and method of making same
US8148768B2 (en) 2008-11-26 2012-04-03 Silicon Storage Technology, Inc. Non-volatile memory cell with self aligned floating and erase gates, and method of making same
US9236389B1 (en) 2014-08-12 2016-01-12 International Business Machines Corporation Embedded flash memory fabricated in standard CMOS process with self-aligned contact

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