US6448695B2 - Bulk acoustic wave device - Google Patents
Bulk acoustic wave device Download PDFInfo
- Publication number
- US6448695B2 US6448695B2 US09/884,218 US88421801A US6448695B2 US 6448695 B2 US6448695 B2 US 6448695B2 US 88421801 A US88421801 A US 88421801A US 6448695 B2 US6448695 B2 US 6448695B2
- Authority
- US
- United States
- Prior art keywords
- resonator
- resonators
- filter
- lower electrode
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008878 coupling Effects 0.000 claims abstract description 25
- 238000010168 coupling process Methods 0.000 claims abstract description 25
- 238000005859 coupling reaction Methods 0.000 claims abstract description 25
- 230000004044 response Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 230000010355 oscillation Effects 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910021426 porous silicon Inorganic materials 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 3
- 238000013461 design Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (13)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0014963.3A GB0014963D0 (en) | 2000-06-20 | 2000-06-20 | A bulk acoustic wave device |
GB0014963 | 2000-06-20 | ||
GB0014963.3 | 2000-06-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
US20010052739A1 US20010052739A1 (en) | 2001-12-20 |
US6448695B2 true US6448695B2 (en) | 2002-09-10 |
Family
ID=9893950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/884,218 Expired - Lifetime US6448695B2 (en) | 2000-06-20 | 2001-06-19 | Bulk acoustic wave device |
Country Status (7)
Country | Link |
---|---|
US (1) | US6448695B2 (en) |
EP (1) | EP1297625A1 (en) |
JP (1) | JP5296282B2 (en) |
KR (1) | KR100859086B1 (en) |
CN (1) | CN1205745C (en) |
GB (1) | GB0014963D0 (en) |
WO (1) | WO2001099276A1 (en) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10251876A1 (en) * | 2002-11-07 | 2004-05-19 | Infineon Technologies Ag | Acoustic reflector for a BAW resonator |
WO2004045073A1 (en) * | 2002-11-11 | 2004-05-27 | Eidgenössische Technische Hochschule Zürich | Device for filtering electrical high frequency signals |
US20050012570A1 (en) * | 2003-04-30 | 2005-01-20 | Christian Korden | Component functioning with bulk acoustic waves having coupled resonators |
US20050030126A1 (en) * | 2003-08-04 | 2005-02-10 | Tdk Corporation | Filter device and branching filter using same |
WO2005034349A1 (en) * | 2003-10-06 | 2005-04-14 | Philips Intellectual Property & Standards Gmbh | Ladder-type thin-film bulk acoustic wave filter |
US20100039000A1 (en) * | 2005-05-27 | 2010-02-18 | Nxp B.V. | Bulk acoustic wave resonator device |
US20100163410A1 (en) * | 2008-12-30 | 2010-07-01 | Stmicroeletronics S.R.I. | Electronic detection of biological materials |
EP2204641A1 (en) | 2008-12-30 | 2010-07-07 | STMicroelectronics Srl | Integrated electronic microbalance, in particular integrated chemical sensor for detecting odorous matters |
US20100244988A1 (en) * | 2009-03-30 | 2010-09-30 | Nxp B.V. | Device with an electroacoustic balun |
US7855618B2 (en) | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
US20100327995A1 (en) * | 2009-06-30 | 2010-12-30 | Commissariat a L'Energie Atomique at aux Energies Alternatives | Guided Acoustic Wave Resonant Device and Method for Producing the Device |
EP2352024A1 (en) | 2010-01-29 | 2011-08-03 | STMicroelectronics S.r.l. | Integrated odour sensor |
US20120062068A1 (en) * | 2010-09-09 | 2012-03-15 | Georgia Tech Research Corpoation | Multi-mode bulk-acoustic-wave resonators |
US20130057360A1 (en) * | 2010-04-23 | 2013-03-07 | Teknologian Tutkimuskeskus Vtt | Wide-band acoustically coupled thin-film baw filter |
JP2013539946A (en) * | 2010-10-14 | 2013-10-28 | テクノロジアン テュトキムスケスクス ヴェーテーテー | Broadband acoustic coupling thin film BAW filter |
US8650953B2 (en) | 2010-12-30 | 2014-02-18 | Stmicroelectronics Pte Ltd. | Chemical sensor with replaceable sample collection chip |
US20140312994A1 (en) * | 2011-11-11 | 2014-10-23 | Teknologian tutkimuskeskut VTT | Laterally coupled bulk acoustic wave filter with improved passband characteristics |
US9019688B2 (en) | 2011-12-02 | 2015-04-28 | Stmicroelectronics Pte Ltd. | Capacitance trimming with an integrated heater |
US9027400B2 (en) | 2011-12-02 | 2015-05-12 | Stmicroelectronics Pte Ltd. | Tunable humidity sensor with integrated heater |
US9180451B2 (en) | 2010-06-28 | 2015-11-10 | Stmicroelectronics S.R.L. | Fluidic cartridge for detecting chemicals in samples, in particular for performing biochemical analyses |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100566152C (en) * | 2002-09-12 | 2009-12-02 | Nxp股份有限公司 | Has the bulk acoustic wave resonator that suppresses the device of passband ripple in the bulk accoustic wave filter |
TWI243496B (en) * | 2003-12-15 | 2005-11-11 | Canon Kk | Piezoelectric film element, method of manufacturing the same, and liquid discharge head |
JP4230347B2 (en) * | 2003-12-19 | 2009-02-25 | 富士通メディアデバイス株式会社 | Surface acoustic wave filter |
US7161448B2 (en) | 2004-06-14 | 2007-01-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancements using recessed region |
DE102004035812A1 (en) * | 2004-07-23 | 2006-03-16 | Epcos Ag | Resonant bulk acoustic wave resonator |
DE102004049499B4 (en) | 2004-10-11 | 2017-12-21 | Snaptrack, Inc. | Circuit operating with bulk acoustic waves and device with the circuit |
DE102004049498A1 (en) | 2004-10-11 | 2006-04-13 | Epcos Ag | Acoustic wave device and method of making the same |
US7098758B2 (en) | 2004-11-03 | 2006-08-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustically coupled thin-film resonators having an electrode with a tapered edge |
US8981876B2 (en) | 2004-11-15 | 2015-03-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters having frame elements |
US7202560B2 (en) | 2004-12-15 | 2007-04-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Wafer bonding of micro-electro mechanical systems to active circuitry |
US7791434B2 (en) | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
US20060245485A1 (en) * | 2005-04-28 | 2006-11-02 | Intel Corporation | Continuous-time equalizer |
JP4838093B2 (en) * | 2006-10-25 | 2011-12-14 | 太陽誘電株式会社 | Piezoelectric thin film resonator and filter |
US8902023B2 (en) | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
US9243316B2 (en) | 2010-01-22 | 2016-01-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of fabricating piezoelectric material with selected c-axis orientation |
US8962443B2 (en) | 2011-01-31 | 2015-02-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor device having an airbridge and method of fabricating the same |
US9048812B2 (en) | 2011-02-28 | 2015-06-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer |
US9083302B2 (en) | 2011-02-28 | 2015-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator |
US9154112B2 (en) | 2011-02-28 | 2015-10-06 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge |
US9136818B2 (en) | 2011-02-28 | 2015-09-15 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked acoustic resonator comprising a bridge |
US9148117B2 (en) | 2011-02-28 | 2015-09-29 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge and frame elements |
US9203374B2 (en) | 2011-02-28 | 2015-12-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator comprising a bridge |
US9425764B2 (en) | 2012-10-25 | 2016-08-23 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having composite electrodes with integrated lateral features |
US9444426B2 (en) | 2012-10-25 | 2016-09-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having integrated lateral feature and temperature compensation feature |
US8922302B2 (en) | 2011-08-24 | 2014-12-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator formed on a pedestal |
KR101918282B1 (en) | 2012-03-23 | 2018-11-13 | 삼성전자주식회사 | Radio frequency filter and radio frequency transceiver using bulk acoustic wave resonator |
US9038005B2 (en) | 2013-03-15 | 2015-05-19 | Resonant Inc. | Network synthesis design of microwave acoustic wave filters |
US8990742B2 (en) * | 2013-03-15 | 2015-03-24 | Resonant Inc. | Network synthesis design of microwave acoustic wave filters |
US9208274B2 (en) | 2013-03-15 | 2015-12-08 | Resonant Inc. | Network synthesis design of microwave acoustic wave filters |
US9147024B1 (en) * | 2014-11-06 | 2015-09-29 | Xilinx, Inc. | Hardware and software cosynthesis performance estimation |
CN107346962A (en) * | 2016-05-06 | 2017-11-14 | 稳懋半导体股份有限公司 | The resonant structure of bulk acoustic wave resonator |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3656180A (en) * | 1970-08-12 | 1972-04-11 | Bell Telephone Labor Inc | Crystal filter |
US3942139A (en) * | 1974-11-08 | 1976-03-02 | Westinghouse Electric Corporation | Broadband microwave bulk acoustic delay device |
US4320365A (en) * | 1980-11-03 | 1982-03-16 | United Technologies Corporation | Fundamental, longitudinal, thickness mode bulk wave resonator |
US4329666A (en) * | 1980-08-11 | 1982-05-11 | Motorola, Inc. | Two-pole monolithic crystal filter |
US4427913A (en) * | 1981-06-01 | 1984-01-24 | The United States Of America As Represented By The Secretary Of The Army | Acoustic diffractometer |
US4692653A (en) * | 1984-03-23 | 1987-09-08 | Hitachi, Ltd. | Acoustic transducers utilizing ZnO thin film |
WO1998016957A1 (en) | 1996-10-17 | 1998-04-23 | Nokia Mobile Phones Limited | A resonator having an acoustic mirror |
US5872493A (en) * | 1997-03-13 | 1999-02-16 | Nokia Mobile Phones, Ltd. | Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2644855B2 (en) * | 1988-10-24 | 1997-08-25 | 株式会社日立製作所 | Elastic wave filter and antenna duplexer using the same |
US5233259A (en) * | 1991-02-19 | 1993-08-03 | Westinghouse Electric Corp. | Lateral field FBAR |
JPH09107267A (en) * | 1995-10-11 | 1997-04-22 | Toyo Commun Equip Co Ltd | Triple mode piezoelectric filter |
US5646583A (en) * | 1996-01-04 | 1997-07-08 | Rockwell International Corporation | Acoustic isolator having a high impedance layer of hafnium oxide |
US5714917A (en) | 1996-10-02 | 1998-02-03 | Nokia Mobile Phones Limited | Device incorporating a tunable thin film bulk acoustic resonator for performing amplitude and phase modulation |
JP3839492B2 (en) * | 1997-04-24 | 2006-11-01 | 三菱電機株式会社 | Thin film piezoelectric element |
US5939815A (en) * | 1997-07-23 | 1999-08-17 | The United States Of America As Represented By The Secretary Of The Army | Field trapping electrodes |
US6396200B2 (en) * | 1998-01-16 | 2002-05-28 | Mitsubishi Denki Kabushiki Kaisha | Thin film piezoelectric element |
DE69922311T2 (en) * | 1998-09-11 | 2005-12-01 | Texas Instruments Inc., Dallas | Integrated acoustic thin-film resonator |
-
2000
- 2000-06-20 GB GBGB0014963.3A patent/GB0014963D0/en not_active Ceased
-
2001
- 2001-06-07 KR KR1020027002126A patent/KR100859086B1/en not_active IP Right Cessation
- 2001-06-07 EP EP01947349A patent/EP1297625A1/en not_active Withdrawn
- 2001-06-07 WO PCT/EP2001/006442 patent/WO2001099276A1/en active Application Filing
- 2001-06-07 CN CNB018023711A patent/CN1205745C/en not_active Expired - Fee Related
- 2001-06-07 JP JP2002504018A patent/JP5296282B2/en not_active Expired - Fee Related
- 2001-06-19 US US09/884,218 patent/US6448695B2/en not_active Expired - Lifetime
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3656180A (en) * | 1970-08-12 | 1972-04-11 | Bell Telephone Labor Inc | Crystal filter |
US3942139A (en) * | 1974-11-08 | 1976-03-02 | Westinghouse Electric Corporation | Broadband microwave bulk acoustic delay device |
US4329666A (en) * | 1980-08-11 | 1982-05-11 | Motorola, Inc. | Two-pole monolithic crystal filter |
US4320365A (en) * | 1980-11-03 | 1982-03-16 | United Technologies Corporation | Fundamental, longitudinal, thickness mode bulk wave resonator |
US4427913A (en) * | 1981-06-01 | 1984-01-24 | The United States Of America As Represented By The Secretary Of The Army | Acoustic diffractometer |
US4692653A (en) * | 1984-03-23 | 1987-09-08 | Hitachi, Ltd. | Acoustic transducers utilizing ZnO thin film |
WO1998016957A1 (en) | 1996-10-17 | 1998-04-23 | Nokia Mobile Phones Limited | A resonator having an acoustic mirror |
US5873154A (en) * | 1996-10-17 | 1999-02-23 | Nokia Mobile Phones Limited | Method for fabricating a resonator having an acoustic mirror |
US5872493A (en) * | 1997-03-13 | 1999-02-16 | Nokia Mobile Phones, Ltd. | Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror |
Cited By (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040140869A1 (en) * | 2002-11-07 | 2004-07-22 | Stephan Marksteiner | Acoustic reflector for a BAW resonator |
DE10251876A1 (en) * | 2002-11-07 | 2004-05-19 | Infineon Technologies Ag | Acoustic reflector for a BAW resonator |
DE10251876B4 (en) * | 2002-11-07 | 2008-08-21 | Infineon Technologies Ag | BAW resonator with acoustic reflector and filter circuit |
US6933807B2 (en) | 2002-11-07 | 2005-08-23 | Infineon Technologies Ag | Acoustic reflector for a BAW resonator providing specified reflection of both shear waves and longitudinal waves |
WO2004045073A1 (en) * | 2002-11-11 | 2004-05-27 | Eidgenössische Technische Hochschule Zürich | Device for filtering electrical high frequency signals |
US7057478B2 (en) | 2003-04-30 | 2006-06-06 | Epcos Ag | Component functioning with bulk acoustic waves having coupled resonators |
US20050012570A1 (en) * | 2003-04-30 | 2005-01-20 | Christian Korden | Component functioning with bulk acoustic waves having coupled resonators |
US7212083B2 (en) * | 2003-08-04 | 2007-05-01 | Tdk Corporation | Filter device utilizing stacked resonators and acoustic coupling and branching filter using same |
US20050030126A1 (en) * | 2003-08-04 | 2005-02-10 | Tdk Corporation | Filter device and branching filter using same |
WO2005034349A1 (en) * | 2003-10-06 | 2005-04-14 | Philips Intellectual Property & Standards Gmbh | Ladder-type thin-film bulk acoustic wave filter |
US8058768B2 (en) | 2005-05-27 | 2011-11-15 | Triquint Semiconductor, Inc. | Bulk acoustic wave resonator device |
US20100039000A1 (en) * | 2005-05-27 | 2010-02-18 | Nxp B.V. | Bulk acoustic wave resonator device |
US7855618B2 (en) | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
US20100163410A1 (en) * | 2008-12-30 | 2010-07-01 | Stmicroeletronics S.R.I. | Electronic detection of biological materials |
EP2204641A1 (en) | 2008-12-30 | 2010-07-07 | STMicroelectronics Srl | Integrated electronic microbalance, in particular integrated chemical sensor for detecting odorous matters |
US8586351B2 (en) | 2008-12-30 | 2013-11-19 | Stmicroelectronics S.R.L. | Electronic detection of biological materials |
US20100244988A1 (en) * | 2009-03-30 | 2010-09-30 | Nxp B.V. | Device with an electroacoustic balun |
EP2237416A1 (en) | 2009-03-30 | 2010-10-06 | Nxp B.V. | Device comprising an electroacoustic balun |
US8138855B2 (en) | 2009-03-30 | 2012-03-20 | Nxp B.V. | Device with an electroacoustic balun |
US8692630B2 (en) * | 2009-06-30 | 2014-04-08 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Guided acoustic wave resonant device and method for producing the device |
US20100327995A1 (en) * | 2009-06-30 | 2010-12-30 | Commissariat a L'Energie Atomique at aux Energies Alternatives | Guided Acoustic Wave Resonant Device and Method for Producing the Device |
US20110209524A1 (en) * | 2010-01-29 | 2011-09-01 | Stmicroelectronics S.R.L. | Integrated chemical sensor for detecting odorous matters |
US8499613B2 (en) | 2010-01-29 | 2013-08-06 | Stmicroelectronics S.R.L. | Integrated chemical sensor for detecting odorous matters |
EP2352024A1 (en) | 2010-01-29 | 2011-08-03 | STMicroelectronics S.r.l. | Integrated odour sensor |
US20130057360A1 (en) * | 2010-04-23 | 2013-03-07 | Teknologian Tutkimuskeskus Vtt | Wide-band acoustically coupled thin-film baw filter |
US10320361B2 (en) | 2010-04-23 | 2019-06-11 | Teknologian Tutkimuskeskus Vtt Oy | Wide-band acoustically coupled thin-film BAW filter |
US9294069B2 (en) * | 2010-04-23 | 2016-03-22 | Teknologian Tutkimuskeskus Vtt | Wide-band acoustically coupled thin-film BAW filter |
US9180451B2 (en) | 2010-06-28 | 2015-11-10 | Stmicroelectronics S.R.L. | Fluidic cartridge for detecting chemicals in samples, in particular for performing biochemical analyses |
US20120062068A1 (en) * | 2010-09-09 | 2012-03-15 | Georgia Tech Research Corpoation | Multi-mode bulk-acoustic-wave resonators |
US8810108B2 (en) * | 2010-09-09 | 2014-08-19 | Georgia Tech Research Corporation | Multi-mode bulk-acoustic-wave resonators |
JP2013539946A (en) * | 2010-10-14 | 2013-10-28 | テクノロジアン テュトキムスケスクス ヴェーテーテー | Broadband acoustic coupling thin film BAW filter |
US9140683B2 (en) | 2010-12-30 | 2015-09-22 | Stmicroelectronics Pte Ltd. | Single chip having the chemical sensor and electronics on the same die |
US8860152B2 (en) | 2010-12-30 | 2014-10-14 | Stmicroelectronics Pte Ltd. | Integrated chemical sensor |
US8650953B2 (en) | 2010-12-30 | 2014-02-18 | Stmicroelectronics Pte Ltd. | Chemical sensor with replaceable sample collection chip |
US20140312994A1 (en) * | 2011-11-11 | 2014-10-23 | Teknologian tutkimuskeskut VTT | Laterally coupled bulk acoustic wave filter with improved passband characteristics |
US9219466B2 (en) * | 2011-11-11 | 2015-12-22 | Teknologian Tutkimuskeskus Vtt Oy | Laterally coupled bulk acoustic wave filter with improved passband characteristics |
US9019688B2 (en) | 2011-12-02 | 2015-04-28 | Stmicroelectronics Pte Ltd. | Capacitance trimming with an integrated heater |
US9027400B2 (en) | 2011-12-02 | 2015-05-12 | Stmicroelectronics Pte Ltd. | Tunable humidity sensor with integrated heater |
Also Published As
Publication number | Publication date |
---|---|
CN1389018A (en) | 2003-01-01 |
WO2001099276A1 (en) | 2001-12-27 |
EP1297625A1 (en) | 2003-04-02 |
CN1205745C (en) | 2005-06-08 |
JP2003536341A (en) | 2003-12-02 |
GB0014963D0 (en) | 2000-08-09 |
JP5296282B2 (en) | 2013-09-25 |
KR100859086B1 (en) | 2008-09-17 |
KR20020029927A (en) | 2002-04-20 |
US20010052739A1 (en) | 2001-12-20 |
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