US6594422B2 - Opto-coupling device structure and method therefor - Google Patents
Opto-coupling device structure and method therefor Download PDFInfo
- Publication number
- US6594422B2 US6594422B2 US09/846,087 US84608701A US6594422B2 US 6594422 B2 US6594422 B2 US 6594422B2 US 84608701 A US84608701 A US 84608701A US 6594422 B2 US6594422 B2 US 6594422B2
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- US
- United States
- Prior art keywords
- silicon
- layer
- pattern
- photoresist
- semiconductor
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- Expired - Fee Related, expires
Links
- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000010168 coupling process Methods 0.000 title claims abstract description 17
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 56
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 56
- 239000010703 silicon Substances 0.000 claims abstract description 56
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 31
- 238000005530 etching Methods 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 150000004767 nitrides Chemical class 0.000 claims description 33
- 239000004065 semiconductor Substances 0.000 claims description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000969 carrier Substances 0.000 claims description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 7
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
- 238000007788 roughening Methods 0.000 claims description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 3
- 238000001312 dry etching Methods 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 229910052700 potassium Inorganic materials 0.000 claims 1
- 239000011591 potassium Substances 0.000 claims 1
- 238000000992 sputter etching Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 abstract description 15
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 16
- 230000008901 benefit Effects 0.000 description 11
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
Abstract
Description
Claims (26)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/846,087 US6594422B2 (en) | 2001-05-02 | 2001-05-02 | Opto-coupling device structure and method therefor |
KR1020037014315A KR100926243B1 (en) | 2001-05-02 | 2002-03-27 | A method of manufacturing an opto-coupling device |
PCT/US2002/011169 WO2002091486A1 (en) | 2001-05-02 | 2002-03-27 | An opto-coupling device structure and method therefor |
JP2002588642A JP4326805B2 (en) | 2001-05-02 | 2002-03-27 | Method for forming optical coupling element structure |
KR1020097010709A KR100926249B1 (en) | 2001-05-02 | 2002-03-27 | A method of manufacturing an opto-coupling device |
CNB02809266XA CN1286189C (en) | 2001-05-02 | 2002-03-27 | An opto-coupling device structure and method therefor |
TW091106847A TW554545B (en) | 2001-05-02 | 2002-04-04 | An opto-coupling device structure and method therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/846,087 US6594422B2 (en) | 2001-05-02 | 2001-05-02 | Opto-coupling device structure and method therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
US20020164122A1 US20020164122A1 (en) | 2002-11-07 |
US6594422B2 true US6594422B2 (en) | 2003-07-15 |
Family
ID=25296902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/846,087 Expired - Fee Related US6594422B2 (en) | 2001-05-02 | 2001-05-02 | Opto-coupling device structure and method therefor |
Country Status (6)
Country | Link |
---|---|
US (1) | US6594422B2 (en) |
JP (1) | JP4326805B2 (en) |
KR (2) | KR100926249B1 (en) |
CN (1) | CN1286189C (en) |
TW (1) | TW554545B (en) |
WO (1) | WO2002091486A1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1295522C (en) * | 2003-12-19 | 2007-01-17 | 上海交通大学 | High precision combined optical grating device for optical 3D measurement |
US20080021484A1 (en) * | 2005-05-20 | 2008-01-24 | Neotract, Inc. | Apparatus and method for manipulating or retracting tissue and anatomical structure |
US20080099793A1 (en) * | 2006-10-13 | 2008-05-01 | David Fattal | Photodiode module and apparatus including multiple photodiode modules |
US20090140362A1 (en) * | 2007-11-29 | 2009-06-04 | Matthias Fertig | Photo detector |
US20090273049A1 (en) * | 2008-04-30 | 2009-11-05 | David Fattal | WDM Signal Detector |
US20110215231A1 (en) * | 2003-10-31 | 2011-09-08 | Fattal David A | Photodiode module and apparatus including multiple photodiode modules |
US9055681B2 (en) | 2005-08-31 | 2015-06-09 | International Business Machines Corporation | Method for attaching a flexible structure to a device and a device having a flexible structure |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7169654B2 (en) * | 2004-11-15 | 2007-01-30 | Freescale Semiconductor, Inc. | Method of forming a semiconductor device |
US7109051B2 (en) * | 2004-11-15 | 2006-09-19 | Freescale Semiconductor, Inc. | Method of integrating optical devices and electronic devices on an integrated circuit |
US7098090B2 (en) * | 2004-11-15 | 2006-08-29 | Freescale Semiconductor, Inc. | Method of forming a semiconductor device |
US7309628B2 (en) * | 2004-11-15 | 2007-12-18 | Omar Zia | Method of forming a semiconductor device |
US7067342B2 (en) * | 2004-11-15 | 2006-06-27 | Freescale Semiconductor, Inc. | Method of integrating optical devices and electronic devices on an integrated circuit |
CN102776566A (en) * | 2011-05-11 | 2012-11-14 | 深圳光启高等理工研究院 | Preparation method of meta-material based on polysilicon, and meta-material based on polysilicon |
CN102800971B (en) * | 2011-06-01 | 2014-11-26 | 深圳光启高等理工研究院 | Meta-material preparation method based on semiconductor and meta-material based on semiconductor |
EP3304578B1 (en) | 2015-06-03 | 2022-01-12 | OSI Optoelectronics, Inc. | Photoresistor on silicon-on-insulator substrate and photodetectors incorporating same |
CN111668338B (en) * | 2019-03-06 | 2023-09-22 | 苏州旭创科技有限公司 | Grating type plane incidence type optical detector |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3982810A (en) | 1975-07-09 | 1976-09-28 | The United States Of America As Represented By The Secretary Of The Navy | Directional radiation by asymmetrical dielectric gratings |
US4006432A (en) | 1974-10-15 | 1977-02-01 | Xerox Corporation | Integrated grating output coupler in diode lasers |
US4725524A (en) * | 1984-12-24 | 1988-02-16 | Basf Aktiengesellschaft | Dry film resist and production of resist images |
EP0383627A2 (en) | 1989-02-17 | 1990-08-22 | Sharp Kabushiki Kaisha | A grating coupler |
US5026148A (en) | 1989-12-26 | 1991-06-25 | Hughes Aircraft Company | High efficiency multiple quantum well structure and operating method |
US5101459A (en) | 1990-06-06 | 1992-03-31 | Fuji Photo Film Co., Ltd. | Optical waveguide grating coupler device |
EP0481552A1 (en) | 1990-10-17 | 1992-04-22 | Gec-Marconi Limited | Infrared detector devices |
EP0488868A2 (en) | 1990-11-30 | 1992-06-03 | Rhone-Poulenc Chimie | Alcaline metal silicate based builder for detergent compositions |
US5315676A (en) | 1992-09-09 | 1994-05-24 | Fuji Photo Film Co., Ltd. | Optical waveguide device |
EP0616373A2 (en) | 1993-03-16 | 1994-09-21 | Seiko Instruments Inc. | Photoelectric conversion semiconductor device and method of manufacturing the same |
US5657407A (en) | 1995-06-07 | 1997-08-12 | Biota Corp. | Optical waveguide coupling device having a parallelogramic grating profile |
US6043936A (en) | 1995-12-06 | 2000-03-28 | De La Rue International Limited | Diffractive structure on inclined facets |
US6087707A (en) * | 1996-04-16 | 2000-07-11 | Micron Technology, Inc. | Structure for an antifuse cell |
US6433399B1 (en) * | 1998-10-09 | 2002-08-13 | Stmicroelectronics S.R.L. | Infrared detector device of semiconductor material and manufacturing process thereof |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5056889A (en) * | 1989-12-29 | 1991-10-15 | At&T Bell Laboratories | Optical device including a grating |
JPH0643312A (en) * | 1992-07-24 | 1994-02-18 | Mitsubishi Electric Corp | Production of diffraction grating |
-
2001
- 2001-05-02 US US09/846,087 patent/US6594422B2/en not_active Expired - Fee Related
-
2002
- 2002-03-27 KR KR1020097010709A patent/KR100926249B1/en not_active IP Right Cessation
- 2002-03-27 KR KR1020037014315A patent/KR100926243B1/en not_active IP Right Cessation
- 2002-03-27 WO PCT/US2002/011169 patent/WO2002091486A1/en active Application Filing
- 2002-03-27 JP JP2002588642A patent/JP4326805B2/en not_active Expired - Fee Related
- 2002-03-27 CN CNB02809266XA patent/CN1286189C/en not_active Expired - Fee Related
- 2002-04-04 TW TW091106847A patent/TW554545B/en not_active IP Right Cessation
Patent Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4006432A (en) | 1974-10-15 | 1977-02-01 | Xerox Corporation | Integrated grating output coupler in diode lasers |
US3982810A (en) | 1975-07-09 | 1976-09-28 | The United States Of America As Represented By The Secretary Of The Navy | Directional radiation by asymmetrical dielectric gratings |
US4725524A (en) * | 1984-12-24 | 1988-02-16 | Basf Aktiengesellschaft | Dry film resist and production of resist images |
US5033812B1 (en) | 1989-02-17 | 1993-10-12 | Sharp Kabushiki Kaisha | Grating coupler with a tapering waveguide for changing a coupling coefficient |
EP0383627A2 (en) | 1989-02-17 | 1990-08-22 | Sharp Kabushiki Kaisha | A grating coupler |
US5033812A (en) | 1989-02-17 | 1991-07-23 | Sharp Kabushiki Kaisha | Grating coupler |
US5026148A (en) | 1989-12-26 | 1991-06-25 | Hughes Aircraft Company | High efficiency multiple quantum well structure and operating method |
US5101459A (en) | 1990-06-06 | 1992-03-31 | Fuji Photo Film Co., Ltd. | Optical waveguide grating coupler device |
EP0481552A1 (en) | 1990-10-17 | 1992-04-22 | Gec-Marconi Limited | Infrared detector devices |
EP0488868A2 (en) | 1990-11-30 | 1992-06-03 | Rhone-Poulenc Chimie | Alcaline metal silicate based builder for detergent compositions |
US5315676A (en) | 1992-09-09 | 1994-05-24 | Fuji Photo Film Co., Ltd. | Optical waveguide device |
EP0616373A2 (en) | 1993-03-16 | 1994-09-21 | Seiko Instruments Inc. | Photoelectric conversion semiconductor device and method of manufacturing the same |
US5657407A (en) | 1995-06-07 | 1997-08-12 | Biota Corp. | Optical waveguide coupling device having a parallelogramic grating profile |
US6043936A (en) | 1995-12-06 | 2000-03-28 | De La Rue International Limited | Diffractive structure on inclined facets |
US6087707A (en) * | 1996-04-16 | 2000-07-11 | Micron Technology, Inc. | Structure for an antifuse cell |
US6433399B1 (en) * | 1998-10-09 | 2002-08-13 | Stmicroelectronics S.R.L. | Infrared detector device of semiconductor material and manufacturing process thereof |
Non-Patent Citations (11)
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110215231A1 (en) * | 2003-10-31 | 2011-09-08 | Fattal David A | Photodiode module and apparatus including multiple photodiode modules |
US8202755B2 (en) | 2003-10-31 | 2012-06-19 | Hewlett-Packard Development Company, L.P. | Photodiode module and apparatus including multiple photodiode modules |
CN1295522C (en) * | 2003-12-19 | 2007-01-17 | 上海交通大学 | High precision combined optical grating device for optical 3D measurement |
US20080021484A1 (en) * | 2005-05-20 | 2008-01-24 | Neotract, Inc. | Apparatus and method for manipulating or retracting tissue and anatomical structure |
US9055681B2 (en) | 2005-08-31 | 2015-06-09 | International Business Machines Corporation | Method for attaching a flexible structure to a device and a device having a flexible structure |
US20080099793A1 (en) * | 2006-10-13 | 2008-05-01 | David Fattal | Photodiode module and apparatus including multiple photodiode modules |
US7964925B2 (en) * | 2006-10-13 | 2011-06-21 | Hewlett-Packard Development Company, L.P. | Photodiode module and apparatus including multiple photodiode modules |
US20090140362A1 (en) * | 2007-11-29 | 2009-06-04 | Matthias Fertig | Photo detector |
US7821091B2 (en) * | 2007-11-29 | 2010-10-26 | International Business Machines Corporation | Photo detector |
US20090273049A1 (en) * | 2008-04-30 | 2009-11-05 | David Fattal | WDM Signal Detector |
US7692135B2 (en) * | 2008-04-30 | 2010-04-06 | Hewlett-Packard Development Company, L.P. | WDM signal detector |
Also Published As
Publication number | Publication date |
---|---|
TW554545B (en) | 2003-09-21 |
WO2002091486A1 (en) | 2002-11-14 |
JP4326805B2 (en) | 2009-09-09 |
KR100926243B1 (en) | 2009-11-12 |
US20020164122A1 (en) | 2002-11-07 |
CN1286189C (en) | 2006-11-22 |
CN1505842A (en) | 2004-06-16 |
KR100926249B1 (en) | 2009-11-12 |
KR20030092125A (en) | 2003-12-03 |
KR20090068383A (en) | 2009-06-26 |
JP2004535667A (en) | 2004-11-25 |
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