US6647165B2 - Total internal reflection optical switch utilizing a moving droplet - Google Patents
Total internal reflection optical switch utilizing a moving droplet Download PDFInfo
- Publication number
- US6647165B2 US6647165B2 US09/871,486 US87148601A US6647165B2 US 6647165 B2 US6647165 B2 US 6647165B2 US 87148601 A US87148601 A US 87148601A US 6647165 B2 US6647165 B2 US 6647165B2
- Authority
- US
- United States
- Prior art keywords
- droplet
- trench
- gap
- waveguide
- index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related, expires
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
Abstract
Description
Claims (11)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/871,486 US6647165B2 (en) | 2001-05-31 | 2001-05-31 | Total internal reflection optical switch utilizing a moving droplet |
EP02002173A EP1262811B1 (en) | 2001-05-31 | 2002-01-29 | Total internal reflection optical switch utilizing a moving droplet |
DE60203340T DE60203340T2 (en) | 2001-05-31 | 2002-01-29 | Total reflection optical switch with moving drop |
DE60203383T DE60203383T2 (en) | 2001-05-31 | 2002-01-29 | Total reflection optical switch with moving drop |
EP03023270A EP1385036B1 (en) | 2001-05-31 | 2002-01-29 | Total internal reflection optical switch utilizing a moving droplet |
JP2002148875A JP2003107375A (en) | 2001-05-31 | 2002-05-23 | Total internal reflection optical switch utilizing moving droplet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/871,486 US6647165B2 (en) | 2001-05-31 | 2001-05-31 | Total internal reflection optical switch utilizing a moving droplet |
Publications (2)
Publication Number | Publication Date |
---|---|
US20020181835A1 US20020181835A1 (en) | 2002-12-05 |
US6647165B2 true US6647165B2 (en) | 2003-11-11 |
Family
ID=25357556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/871,486 Expired - Fee Related US6647165B2 (en) | 2001-05-31 | 2001-05-31 | Total internal reflection optical switch utilizing a moving droplet |
Country Status (4)
Country | Link |
---|---|
US (1) | US6647165B2 (en) |
EP (2) | EP1385036B1 (en) |
JP (1) | JP2003107375A (en) |
DE (2) | DE60203383T2 (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6750413B1 (en) * | 2003-04-25 | 2004-06-15 | Agilent Technologies, Inc. | Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate |
US6759610B1 (en) * | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
US6759611B1 (en) * | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
US6768068B1 (en) * | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
US20040144632A1 (en) * | 2003-01-13 | 2004-07-29 | Wong Marvin Glenn | Photoimaged channel plate for a switch |
US6774325B1 (en) * | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6777630B1 (en) * | 2003-04-30 | 2004-08-17 | Agilent Technologies, Inc. | Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates |
US6781074B1 (en) * | 2003-07-30 | 2004-08-24 | Agilent Technologies, Inc. | Preventing corrosion degradation in a fluid-based switch |
US6787720B1 (en) * | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
US6794591B1 (en) * | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
US20040200708A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US20040200707A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bent switching fluid cavity |
US6884951B1 (en) * | 2003-10-29 | 2005-04-26 | Agilent Technologies, Inc. | Fluid-based switches and methods for manufacturing and sealing fluid-based switches |
US7447397B1 (en) | 2004-06-14 | 2008-11-04 | Dynamic Method Enterprises Limited | Optical switch matrix |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6674933B2 (en) * | 2001-09-27 | 2004-01-06 | Agilent Technologies, Inc. | Optical switch controlled by selective activation and deactivation of an optical source |
US7408717B2 (en) | 2004-04-24 | 2008-08-05 | Koninklijke Philips Electronics N.V. | Liquid-based optical device, method for controlling such a device and electronic device |
ES2261083B1 (en) * | 2005-04-26 | 2007-11-16 | Consejo Superior Investi.Cientificas | OPTICAL COMPONENTS BASED ON FLUIDS OR OTHER ACTING MEANS BY ELECTROMAGNETIC FIELDS. |
DE102006035925B3 (en) * | 2006-07-31 | 2008-02-21 | Albert-Ludwigs-Universität Freiburg | Device for finely controllable movement and/or positioning of liquid drops on a surface, comprises first substrate or two flat substrates arranged between the surface, and electrode arrangement having individual electrodes |
JP6162465B2 (en) * | 2013-04-22 | 2017-07-12 | 浜松ホトニクス株式会社 | Semiconductor laser device |
EP3007819A4 (en) * | 2013-06-14 | 2017-01-18 | Advanced Liquid Logic, Inc. | Droplet actuator and methods |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE203409C (en) * | ||||
US4384761A (en) * | 1980-06-30 | 1983-05-24 | International Business Machines Corporation | Ferrofluid optical switches |
US4505539A (en) * | 1981-09-30 | 1985-03-19 | Siemens Aktiengesellschaft | Optical device or switch for controlling radiation conducted in an optical waveguide |
US4988157A (en) | 1990-03-08 | 1991-01-29 | Bell Communications Research, Inc. | Optical switch using bubbles |
US5204921A (en) | 1991-01-08 | 1993-04-20 | Nippon Telegraph And Telephone Corporation | Automated optical main distributing frame system |
US5699462A (en) | 1996-06-14 | 1997-12-16 | Hewlett-Packard Company | Total internal reflection optical switches employing thermal activation |
US5732168A (en) * | 1995-10-31 | 1998-03-24 | Hewlett Packard Company | Thermal optical switches for light |
EP0938013A2 (en) | 1998-02-18 | 1999-08-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
US6072924A (en) | 1996-09-02 | 2000-06-06 | Nippon Telegraph And Telephone Corporation | Optical switch and method for assembling the same |
US6195478B1 (en) | 1998-02-04 | 2001-02-27 | Agilent Technologies, Inc. | Planar lightwave circuit-based optical switches using micromirrors in trenches |
EP1111419A1 (en) | 1999-12-22 | 2001-06-27 | Agilent Technologies Inc | An improved total internal reflection optical switch |
-
2001
- 2001-05-31 US US09/871,486 patent/US6647165B2/en not_active Expired - Fee Related
-
2002
- 2002-01-29 DE DE60203383T patent/DE60203383T2/en not_active Expired - Lifetime
- 2002-01-29 EP EP03023270A patent/EP1385036B1/en not_active Expired - Lifetime
- 2002-01-29 EP EP02002173A patent/EP1262811B1/en not_active Expired - Lifetime
- 2002-01-29 DE DE60203340T patent/DE60203340T2/en not_active Expired - Lifetime
- 2002-05-23 JP JP2002148875A patent/JP2003107375A/en not_active Withdrawn
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE203409C (en) * | ||||
US4384761A (en) * | 1980-06-30 | 1983-05-24 | International Business Machines Corporation | Ferrofluid optical switches |
US4505539A (en) * | 1981-09-30 | 1985-03-19 | Siemens Aktiengesellschaft | Optical device or switch for controlling radiation conducted in an optical waveguide |
US4988157A (en) | 1990-03-08 | 1991-01-29 | Bell Communications Research, Inc. | Optical switch using bubbles |
US5204921A (en) | 1991-01-08 | 1993-04-20 | Nippon Telegraph And Telephone Corporation | Automated optical main distributing frame system |
US5732168A (en) * | 1995-10-31 | 1998-03-24 | Hewlett Packard Company | Thermal optical switches for light |
US5699462A (en) | 1996-06-14 | 1997-12-16 | Hewlett-Packard Company | Total internal reflection optical switches employing thermal activation |
US6072924A (en) | 1996-09-02 | 2000-06-06 | Nippon Telegraph And Telephone Corporation | Optical switch and method for assembling the same |
US6195478B1 (en) | 1998-02-04 | 2001-02-27 | Agilent Technologies, Inc. | Planar lightwave circuit-based optical switches using micromirrors in trenches |
EP0938013A2 (en) | 1998-02-18 | 1999-08-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
EP1111419A1 (en) | 1999-12-22 | 2001-06-27 | Agilent Technologies Inc | An improved total internal reflection optical switch |
Non-Patent Citations (1)
Title |
---|
Syklarov, O.K., "A Two-Position Lightguide Optical Switch", 1298 Telecommunications and Radio Engineering, 48(1993), Jul., No. 7, New York, pp. 1-3. |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040144632A1 (en) * | 2003-01-13 | 2004-07-29 | Wong Marvin Glenn | Photoimaged channel plate for a switch |
US7098413B2 (en) | 2003-01-13 | 2006-08-29 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch, and method for making a switch using same |
US6897387B2 (en) * | 2003-01-13 | 2005-05-24 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch |
US20040200708A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US6841746B2 (en) * | 2003-04-14 | 2005-01-11 | Agilent Technologies, Inc. | Bent switching fluid cavity |
US6774325B1 (en) * | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
US6768068B1 (en) * | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
US6794591B1 (en) * | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
US20040200707A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Bent switching fluid cavity |
US6818844B2 (en) * | 2003-04-14 | 2004-11-16 | Agilent Technologies, Inc. | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
US6750413B1 (en) * | 2003-04-25 | 2004-06-15 | Agilent Technologies, Inc. | Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate |
US6777630B1 (en) * | 2003-04-30 | 2004-08-17 | Agilent Technologies, Inc. | Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates |
US6759610B1 (en) * | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
US6759611B1 (en) * | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
US6781074B1 (en) * | 2003-07-30 | 2004-08-24 | Agilent Technologies, Inc. | Preventing corrosion degradation in a fluid-based switch |
US6787720B1 (en) * | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
US6884951B1 (en) * | 2003-10-29 | 2005-04-26 | Agilent Technologies, Inc. | Fluid-based switches and methods for manufacturing and sealing fluid-based switches |
US20050092587A1 (en) * | 2003-10-29 | 2005-05-05 | Wong Marvin G. | Fluid-based switches and methods for manufacturing and sealing fluid-based switches |
US7447397B1 (en) | 2004-06-14 | 2008-11-04 | Dynamic Method Enterprises Limited | Optical switch matrix |
US20090028499A1 (en) * | 2004-06-14 | 2009-01-29 | Maki Jeffery J | Optical Switch Matrix |
Also Published As
Publication number | Publication date |
---|---|
JP2003107375A (en) | 2003-04-09 |
DE60203383T2 (en) | 2006-04-20 |
EP1385036B1 (en) | 2005-03-23 |
EP1385036A1 (en) | 2004-01-28 |
DE60203340T2 (en) | 2006-02-09 |
EP1262811B1 (en) | 2005-03-23 |
US20020181835A1 (en) | 2002-12-05 |
DE60203383D1 (en) | 2005-04-28 |
EP1262811A1 (en) | 2002-12-04 |
DE60203340D1 (en) | 2005-04-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: AGILENT TECHNOLOGIES, INC., COLORADO Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HU, GONGJIAN;ROBRISH, PETER;REEL/FRAME:012147/0024 Effective date: 20010530 |
|
AS | Assignment |
Owner name: AVAGO TECHNOLOGIES GENERAL IP PTE. LTD., SINGAPORE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AGILENT TECHNOLOGIES, INC.;REEL/FRAME:017207/0020 Effective date: 20051201 |
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AS | Assignment |
Owner name: AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD., Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.;REEL/FRAME:017675/0199 Effective date: 20060127 |
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FPAY | Fee payment |
Year of fee payment: 4 |
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FPAY | Fee payment |
Year of fee payment: 8 |
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AS | Assignment |
Owner name: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD Free format text: MERGER;ASSIGNOR:AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD.;REEL/FRAME:030369/0672 Effective date: 20121030 |
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REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
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FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20151111 |
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AS | Assignment |
Owner name: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD Free format text: CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 017207 FRAME 0020. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT;ASSIGNOR:AGILENT TECHNOLOGIES, INC.;REEL/FRAME:038633/0001 Effective date: 20051201 |