US6852563B1 - Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes - Google Patents
Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes Download PDFInfo
- Publication number
- US6852563B1 US6852563B1 US10/762,030 US76203004A US6852563B1 US 6852563 B1 US6852563 B1 US 6852563B1 US 76203004 A US76203004 A US 76203004A US 6852563 B1 US6852563 B1 US 6852563B1
- Authority
- US
- United States
- Prior art keywords
- polymer
- thin film
- metal thin
- nonlinear optical
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material
- G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
Claims (24)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/762,030 US6852563B1 (en) | 2004-01-21 | 2004-01-21 | Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes |
PCT/US2005/001747 WO2005070547A2 (en) | 2004-01-21 | 2005-01-20 | Polymer sustained microelectrodes, processes for fabricating same, processes for fabricating electro-optic polymer devices incorporating same, and fluorinated sol-gel electro-optic materials |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/762,030 US6852563B1 (en) | 2004-01-21 | 2004-01-21 | Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes |
Publications (1)
Publication Number | Publication Date |
---|---|
US6852563B1 true US6852563B1 (en) | 2005-02-08 |
Family
ID=34104891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/762,030 Expired - Fee Related US6852563B1 (en) | 2004-01-21 | 2004-01-21 | Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes |
Country Status (1)
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US (1) | US6852563B1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050158849A1 (en) * | 2004-01-21 | 2005-07-21 | Raluca Dinu | Process of fabricating polymer sustained microelectrodes |
US7197222B1 (en) | 2005-12-09 | 2007-03-27 | Lumera Corporation | Waveguide interface |
US20100321756A1 (en) * | 2009-06-18 | 2010-12-23 | U.S.Government as represented by the Secretary of the Army | Large Aperture Polymer Electro-Optic Shutter Device and Method of Manufacturing Same |
JP2018018015A (en) * | 2016-07-29 | 2018-02-01 | 住友電気工業株式会社 | Method for fabricating mach-zehnder modulator and mach-zehnder modulator |
CN109974758A (en) * | 2019-04-11 | 2019-07-05 | 东北大学 | The fibre optical sensor and preparation method measured simultaneously for deep three parameters of seawater thermohaline |
Citations (40)
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US5120339A (en) | 1991-04-04 | 1992-06-09 | International Business Machines Corporation | Method for fabricating a low thermal expansion coefficient glass fiber-reinforced polymer matrix composite substrate and composite substrate |
JPH04238305A (en) | 1991-01-22 | 1992-08-26 | Nippon Telegr & Teleph Corp <Ntt> | Polymer-coated glass core optical waveguide |
US5143577A (en) * | 1991-02-08 | 1992-09-01 | Hoechst Celanese Corporation | Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss |
US5198513A (en) | 1989-06-09 | 1993-03-30 | The Dow Chemical Company | Reactive compounds containing perfluorovinyl groups |
US5219788A (en) | 1991-02-25 | 1993-06-15 | Ibm Corporation | Bilayer metallization cap for photolithography |
US5223356A (en) | 1990-08-24 | 1993-06-29 | University Of Lowell | Photocrosslinked second order nonlinear optical polymers |
US5370969A (en) | 1992-07-28 | 1994-12-06 | Sharp Kabushiki Kaisha | Trilayer lithographic process |
US5433895A (en) | 1992-09-23 | 1995-07-18 | University Of Massachusetts Lowell | Silicon-containing networked non-linear optical compositions |
US5480687A (en) | 1991-09-18 | 1996-01-02 | Schott Glaswerke | Optical waveguide with a substantially planar substrate and process for its production |
US5497445A (en) | 1993-09-27 | 1996-03-05 | Hitachi Cable, Inc. | Polymer core optical wave-guide and fabrication method thereof |
US5635576A (en) | 1994-09-16 | 1997-06-03 | France Telecom | Crosslinkable material which may be used in opto-electronics, process for producing this material, and monomer allowing this material to be obtained |
JPH09258151A (en) | 1996-03-19 | 1997-10-03 | Nippon Telegr & Teleph Corp <Ntt> | Polling method for optical waveguide |
US5714304A (en) | 1992-02-05 | 1998-02-03 | Hercules Incorporated | Nonlinear optical media of organosilicon crosslinked polymer |
JPH1049443A (en) | 1996-08-02 | 1998-02-20 | Nippon Telegr & Teleph Corp <Ntt> | Information processing system |
US5729641A (en) * | 1996-05-30 | 1998-03-17 | Sdl, Inc. | Optical device employing edge-coupled waveguide geometry |
US5776374A (en) | 1995-11-07 | 1998-07-07 | The Dow Chemical Company | Crosslinkable thermoplastic and crosslinked thermoset nonlinear optical polymeric compositions derived from aromatic dihydroxy compounds |
US5783319A (en) | 1993-11-26 | 1998-07-21 | Yissum Research Development Company Of The Hebrew University Of Jerusalem | Waveguide tunable lasers and processes for the production thereof |
JPH10232323A (en) | 1997-02-19 | 1998-09-02 | Hitachi Cable Ltd | Polymer waveguide and its manufacture |
US5811507A (en) | 1993-10-21 | 1998-09-22 | Flamel Technologies | Polyesterimides for use in linear and/or non-linear optics, and one method for preparing same |
US5861976A (en) | 1995-06-28 | 1999-01-19 | Akzo Nobel Nv | At Least penta-layered optical device |
US5887116A (en) | 1997-06-11 | 1999-03-23 | The United States Of America As Represented By The Secretary Of The Air Force | Integrated circuit compatible electro-optic device using conductive polymer cladding layers |
EP0961139A1 (en) | 1997-02-19 | 1999-12-01 | Hitachi, Ltd. | Polymer optical waveguide, optical integrated circuit, optical module and optical communication apparatus |
US6002828A (en) | 1996-10-18 | 1999-12-14 | Telefonaktiebolaget Lm Ericsson | Polymer optical guide made from a monomer with at least one epoxy group and a vinyl type monomer |
US6019906A (en) | 1998-05-29 | 2000-02-01 | Taiwan Semiconductor Manufacturing Company | Hard masking method for forming patterned oxygen containing plasma etchable layer |
US6031945A (en) | 1997-02-26 | 2000-02-29 | Samsung Electronics Co., Ltd. | Low-loss optically active device and manufacturing method therefor |
US6060170A (en) | 1998-02-25 | 2000-05-09 | Air Products And Chemicals, Inc. | Functional groups for thermal crosslinking of polymeric systems |
US6117967A (en) | 1999-06-04 | 2000-09-12 | Xerox Corporation | Arylene ether alcohol polymers |
US6126867A (en) | 1998-03-09 | 2000-10-03 | Siemens Aktiengesellschaft | Nonlinear-optically active copolymers, polymer materials produced from them, and electrooptical and photonic components constructed therefrom |
JP2001255426A (en) | 2000-03-08 | 2001-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide |
US6294573B1 (en) | 1997-08-06 | 2001-09-25 | Abbott Laboratories | Reverse hydroxamate inhibitors of matrix metalloproteinases |
US6303730B1 (en) | 1997-02-19 | 2001-10-16 | Institut Fur Neue Materialien Gemeinnutzige Gmbh | Organic/inorganic composites with low hydroxyl group content, method for their production and application |
US6306563B1 (en) | 1999-06-21 | 2001-10-23 | Corning Inc. | Optical devices made from radiation curable fluorinated compositions |
US6323361B1 (en) | 1997-04-17 | 2001-11-27 | Corning Inc. | Photocurable halofluorinated acrylates |
US6335149B1 (en) | 1997-04-08 | 2002-01-01 | Corning Incorporated | High performance acrylate materials for optical interconnects |
US6419989B1 (en) | 1998-09-23 | 2002-07-16 | Basf Coatings Ag | Scratch-resistant sol-gel coating for clear powder-slurry lacquer |
US6449417B1 (en) * | 1997-03-11 | 2002-09-10 | Lightwave Microsystems, Corp. | Optical interconnects with hybrid construction |
US6466707B1 (en) | 2000-08-21 | 2002-10-15 | Corning Incorporated | Phasar athermalization using a slab waveguide |
US6473551B2 (en) | 2000-11-28 | 2002-10-29 | Photon-X, Inc. | Thin film optical waveguides |
US6632741B1 (en) * | 2000-07-19 | 2003-10-14 | International Business Machines Corporation | Self-trimming method on looped patterns |
US20040067449A1 (en) * | 2002-10-03 | 2004-04-08 | Raluca Dinu | Method for manufacturing polymer microstructures and polymer waveguides |
-
2004
- 2004-01-21 US US10/762,030 patent/US6852563B1/en not_active Expired - Fee Related
Patent Citations (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5198513A (en) | 1989-06-09 | 1993-03-30 | The Dow Chemical Company | Reactive compounds containing perfluorovinyl groups |
US5223356A (en) | 1990-08-24 | 1993-06-29 | University Of Lowell | Photocrosslinked second order nonlinear optical polymers |
JPH04238305A (en) | 1991-01-22 | 1992-08-26 | Nippon Telegr & Teleph Corp <Ntt> | Polymer-coated glass core optical waveguide |
US5143577A (en) * | 1991-02-08 | 1992-09-01 | Hoechst Celanese Corporation | Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss |
US5219788A (en) | 1991-02-25 | 1993-06-15 | Ibm Corporation | Bilayer metallization cap for photolithography |
US5120339A (en) | 1991-04-04 | 1992-06-09 | International Business Machines Corporation | Method for fabricating a low thermal expansion coefficient glass fiber-reinforced polymer matrix composite substrate and composite substrate |
US5480687A (en) | 1991-09-18 | 1996-01-02 | Schott Glaswerke | Optical waveguide with a substantially planar substrate and process for its production |
US5714304A (en) | 1992-02-05 | 1998-02-03 | Hercules Incorporated | Nonlinear optical media of organosilicon crosslinked polymer |
US5370969A (en) | 1992-07-28 | 1994-12-06 | Sharp Kabushiki Kaisha | Trilayer lithographic process |
US5433895A (en) | 1992-09-23 | 1995-07-18 | University Of Massachusetts Lowell | Silicon-containing networked non-linear optical compositions |
US5497445A (en) | 1993-09-27 | 1996-03-05 | Hitachi Cable, Inc. | Polymer core optical wave-guide and fabrication method thereof |
US5811507A (en) | 1993-10-21 | 1998-09-22 | Flamel Technologies | Polyesterimides for use in linear and/or non-linear optics, and one method for preparing same |
US5783319A (en) | 1993-11-26 | 1998-07-21 | Yissum Research Development Company Of The Hebrew University Of Jerusalem | Waveguide tunable lasers and processes for the production thereof |
US5635576A (en) | 1994-09-16 | 1997-06-03 | France Telecom | Crosslinkable material which may be used in opto-electronics, process for producing this material, and monomer allowing this material to be obtained |
US5861976A (en) | 1995-06-28 | 1999-01-19 | Akzo Nobel Nv | At Least penta-layered optical device |
US5776374A (en) | 1995-11-07 | 1998-07-07 | The Dow Chemical Company | Crosslinkable thermoplastic and crosslinked thermoset nonlinear optical polymeric compositions derived from aromatic dihydroxy compounds |
JPH09258151A (en) | 1996-03-19 | 1997-10-03 | Nippon Telegr & Teleph Corp <Ntt> | Polling method for optical waveguide |
US5729641A (en) * | 1996-05-30 | 1998-03-17 | Sdl, Inc. | Optical device employing edge-coupled waveguide geometry |
JPH1049443A (en) | 1996-08-02 | 1998-02-20 | Nippon Telegr & Teleph Corp <Ntt> | Information processing system |
US6002828A (en) | 1996-10-18 | 1999-12-14 | Telefonaktiebolaget Lm Ericsson | Polymer optical guide made from a monomer with at least one epoxy group and a vinyl type monomer |
JPH10232323A (en) | 1997-02-19 | 1998-09-02 | Hitachi Cable Ltd | Polymer waveguide and its manufacture |
US6229949B1 (en) | 1997-02-19 | 2001-05-08 | Hitachi, Ltd. | Polymer optical waveguide, optical integrated circuit, optical module and optical communication apparatus |
EP0961139A1 (en) | 1997-02-19 | 1999-12-01 | Hitachi, Ltd. | Polymer optical waveguide, optical integrated circuit, optical module and optical communication apparatus |
US6303730B1 (en) | 1997-02-19 | 2001-10-16 | Institut Fur Neue Materialien Gemeinnutzige Gmbh | Organic/inorganic composites with low hydroxyl group content, method for their production and application |
US6031945A (en) | 1997-02-26 | 2000-02-29 | Samsung Electronics Co., Ltd. | Low-loss optically active device and manufacturing method therefor |
US6449417B1 (en) * | 1997-03-11 | 2002-09-10 | Lightwave Microsystems, Corp. | Optical interconnects with hybrid construction |
US6335149B1 (en) | 1997-04-08 | 2002-01-01 | Corning Incorporated | High performance acrylate materials for optical interconnects |
US6323361B1 (en) | 1997-04-17 | 2001-11-27 | Corning Inc. | Photocurable halofluorinated acrylates |
US5887116A (en) | 1997-06-11 | 1999-03-23 | The United States Of America As Represented By The Secretary Of The Air Force | Integrated circuit compatible electro-optic device using conductive polymer cladding layers |
US6294573B1 (en) | 1997-08-06 | 2001-09-25 | Abbott Laboratories | Reverse hydroxamate inhibitors of matrix metalloproteinases |
US6060170A (en) | 1998-02-25 | 2000-05-09 | Air Products And Chemicals, Inc. | Functional groups for thermal crosslinking of polymeric systems |
US6126867A (en) | 1998-03-09 | 2000-10-03 | Siemens Aktiengesellschaft | Nonlinear-optically active copolymers, polymer materials produced from them, and electrooptical and photonic components constructed therefrom |
US6019906A (en) | 1998-05-29 | 2000-02-01 | Taiwan Semiconductor Manufacturing Company | Hard masking method for forming patterned oxygen containing plasma etchable layer |
US6419989B1 (en) | 1998-09-23 | 2002-07-16 | Basf Coatings Ag | Scratch-resistant sol-gel coating for clear powder-slurry lacquer |
US6117967A (en) | 1999-06-04 | 2000-09-12 | Xerox Corporation | Arylene ether alcohol polymers |
US6306563B1 (en) | 1999-06-21 | 2001-10-23 | Corning Inc. | Optical devices made from radiation curable fluorinated compositions |
JP2001255426A (en) | 2000-03-08 | 2001-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide |
US6632741B1 (en) * | 2000-07-19 | 2003-10-14 | International Business Machines Corporation | Self-trimming method on looped patterns |
US6466707B1 (en) | 2000-08-21 | 2002-10-15 | Corning Incorporated | Phasar athermalization using a slab waveguide |
US6473551B2 (en) | 2000-11-28 | 2002-10-29 | Photon-X, Inc. | Thin film optical waveguides |
US20040067449A1 (en) * | 2002-10-03 | 2004-04-08 | Raluca Dinu | Method for manufacturing polymer microstructures and polymer waveguides |
Non-Patent Citations (10)
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050158849A1 (en) * | 2004-01-21 | 2005-07-21 | Raluca Dinu | Process of fabricating polymer sustained microelectrodes |
US7241394B2 (en) * | 2004-01-21 | 2007-07-10 | Lumera Corporation | Process of fabricating polymer sustained microelectrodes |
US7197222B1 (en) | 2005-12-09 | 2007-03-27 | Lumera Corporation | Waveguide interface |
US20100321756A1 (en) * | 2009-06-18 | 2010-12-23 | U.S.Government as represented by the Secretary of the Army | Large Aperture Polymer Electro-Optic Shutter Device and Method of Manufacturing Same |
US8159738B2 (en) | 2009-06-18 | 2012-04-17 | The United States Of America As Represented By The Secretary Of The Army | Large aperture polymer electro-optic shutter device and method of manufacturing same |
JP2018018015A (en) * | 2016-07-29 | 2018-02-01 | 住友電気工業株式会社 | Method for fabricating mach-zehnder modulator and mach-zehnder modulator |
CN109974758A (en) * | 2019-04-11 | 2019-07-05 | 东北大学 | The fibre optical sensor and preparation method measured simultaneously for deep three parameters of seawater thermohaline |
CN109974758B (en) * | 2019-04-11 | 2020-03-24 | 东北大学 | Optical fiber sensor for simultaneously measuring three parameters of sea water temperature, salt depth and preparation method thereof |
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Legal Events
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Owner name: LUMERA CORPORATION, WASHINGTON Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DINU, RALUCA;KRESSBACH, JEFFREY K.;JIN, DAN L.;REEL/FRAME:014917/0660;SIGNING DATES FROM 20040112 TO 20040114 |
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Owner name: SILICON VALLEY BANK, CALIFORNIA Free format text: SECURITY AGREEMENT;ASSIGNOR:LUMERA CORPORATION;REEL/FRAME:026179/0007 Effective date: 20100423 |
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Effective date: 20130208 |