US8723288B2 - Method of cutting single crystals - Google Patents
Method of cutting single crystals Download PDFInfo
- Publication number
- US8723288B2 US8723288B2 US13/226,519 US201113226519A US8723288B2 US 8723288 B2 US8723288 B2 US 8723288B2 US 201113226519 A US201113226519 A US 201113226519A US 8723288 B2 US8723288 B2 US 8723288B2
- Authority
- US
- United States
- Prior art keywords
- single crystal
- cleavage
- crack
- energy
- stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/915—Separating from substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/10—Methods
- Y10T225/12—With preliminary weakening
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
Abstract
Description
K>K C (1.1)
wherein KC is the critical stress-intensity factor specific for the material, the crack length increases until the condition
K≦K C (1.2)
is fulfilled. K>KC is the propagation condition of the separation process, which has to be maintained continually or in intervals, until the complete separation is achieved.
dU/dC=2γe −G→Min (1.3)
wherein U denotes the total energy of the system, and C denotes the surface area generated by means of crack propagation.
|∂G/∂α| α=0≦2βe /h
if
∂2 G/∂α 2≦0 (2.1)
or
|∂G/∂α|≦2βe /h∀α:α 1<α<α2. (2.2)
βe =−nk B T ln η(1+2η),
η=exp(−ε/k B T).
ε≈ΔH sub /Z,
wherein ΔHsub(T) is obtained from a calculation of the thermo-dynamic equilibrium Xs Xg with the thermo-dynamic data of the solid (s) and the gaseous (g) phase X.
ΔH sub(300 K)=451.4 kJ/mol,
Z=4
→ε≈1.17 eV;
βe≈3.31×10−10 J/m,
and
βe /h≈0.83 J/m2.
|∂G/∂α| α=0≦2βe /h (3.1)
and
∂2 G/∂α 2≦0 (3.2)
are fulfilled for both functions G−(α) and G+(α). Thereby it is ensured that for each intermediate state G(α) the conditions according to certain embodiments of the invention are satisfied as well, and the crack remains within the cleavage plane during the complete dividing process.
γs≈0.47 J/m2(ab initio Hartree-Fock calculation) and
βe≈(3.31−6.8×10−10 J/m and with h=0.32 nm:
βe /h≈(1.03−2.13) J/m2.
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/226,519 US8723288B2 (en) | 2007-11-15 | 2011-09-07 | Method of cutting single crystals |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US99639607P | 2007-11-15 | 2007-11-15 | |
DE102007056115 | 2007-11-15 | ||
DE200710056115 DE102007056115A1 (en) | 2007-11-15 | 2007-11-15 | Process for separating single crystals |
DE102007056115.8 | 2007-11-15 | ||
US12/271,245 US8097080B2 (en) | 2007-11-15 | 2008-11-14 | Method of cutting single crystals |
US13/226,519 US8723288B2 (en) | 2007-11-15 | 2011-09-07 | Method of cutting single crystals |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/271,245 Division US8097080B2 (en) | 2007-11-15 | 2008-11-14 | Method of cutting single crystals |
Publications (2)
Publication Number | Publication Date |
---|---|
US20110318221A1 US20110318221A1 (en) | 2011-12-29 |
US8723288B2 true US8723288B2 (en) | 2014-05-13 |
Family
ID=40560840
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/271,245 Active 2030-07-14 US8097080B2 (en) | 2007-11-15 | 2008-11-14 | Method of cutting single crystals |
US13/226,519 Active US8723288B2 (en) | 2007-11-15 | 2011-09-07 | Method of cutting single crystals |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/271,245 Active 2030-07-14 US8097080B2 (en) | 2007-11-15 | 2008-11-14 | Method of cutting single crystals |
Country Status (7)
Country | Link |
---|---|
US (2) | US8097080B2 (en) |
EP (2) | EP2377662A1 (en) |
JP (2) | JP5697984B2 (en) |
CN (1) | CN101861237B (en) |
AT (1) | ATE543622T1 (en) |
DE (1) | DE102007056115A1 (en) |
WO (1) | WO2009062744A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100945506B1 (en) * | 2007-06-26 | 2010-03-09 | 주식회사 하이닉스반도체 | Semiconductor substrate and method of manufacturing semiconductor package using the semiconductor substrate |
US20100310775A1 (en) * | 2009-06-09 | 2010-12-09 | International Business Machines Corporation | Spalling for a Semiconductor Substrate |
US20160008926A1 (en) * | 2014-07-14 | 2016-01-14 | Rubicon Technology, Inc. | Method of cold-cleaving sapphire material at cryogenic temperatures |
CN107922259B (en) * | 2015-09-04 | 2021-05-07 | Agc株式会社 | Method for producing glass plate, method for producing glass article, and apparatus for producing glass article |
FR3055063B1 (en) * | 2016-08-11 | 2018-08-31 | Soitec | METHOD OF TRANSFERRING A USEFUL LAYER |
JP6795811B2 (en) * | 2017-02-16 | 2020-12-02 | 国立大学法人埼玉大学 | Peeling substrate manufacturing method |
EP3795855A1 (en) * | 2019-09-20 | 2021-03-24 | Patek Philippe SA Genève | Method for producing a timepiece spring from monocrystalline material and timepiece spring obtained by said method |
CN111640687B (en) * | 2020-06-08 | 2023-03-14 | 郑州磨料磨具磨削研究所有限公司 | Method for determining optimal scribing direction of single crystal wafer |
CN114393723B (en) * | 2022-01-20 | 2023-06-13 | 中环领先半导体材料有限公司 | Method for realizing integration of positioning slotting re-inspection and self-inspection of barreling equipment |
Citations (20)
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DE2813302B1 (en) | 1978-03-28 | 1979-01-11 | Fraunhofer Ges Forschung | Method and device for straight-line cutting of flat glass with the aid of thermally induced stresses |
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WO1993020015A1 (en) | 1992-04-02 | 1993-10-14 | Fonon Technology Limited | Splitting of non-metallic materials |
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US5393707A (en) | 1992-07-31 | 1995-02-28 | Northern Telecom Limited | Semiconductor - slice cleaving |
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JP2004063860A (en) | 2002-07-30 | 2004-02-26 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacturing method |
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JPH0555143A (en) * | 1991-08-27 | 1993-03-05 | Mitsubishi Electric Corp | Method for growing crystal on circular wafer |
JPH091370A (en) * | 1995-06-20 | 1997-01-07 | Souei Tsusho Kk | Splitting method and its device |
JP3580631B2 (en) * | 1996-02-29 | 2004-10-27 | 京セラ株式会社 | Single crystal sapphire substrate, method of dividing single crystal sapphire, and single crystal sapphire body |
FR2828428B1 (en) * | 2001-08-07 | 2003-10-17 | Soitec Silicon On Insulator | DEVICE FOR PICKING UP SUBSTRATES AND ASSOCIATED METHOD |
JP2008183599A (en) * | 2007-01-31 | 2008-08-14 | Japan Steel Works Ltd:The | Method for working workpiece made of highly brittle and non-metallic material, and device therefor |
-
2007
- 2007-11-15 DE DE200710056115 patent/DE102007056115A1/en not_active Ceased
-
2008
- 2008-11-14 EP EP20110174244 patent/EP2377662A1/en not_active Ceased
- 2008-11-14 EP EP08850859A patent/EP2106331B1/en active Active
- 2008-11-14 WO PCT/EP2008/009676 patent/WO2009062744A1/en active Application Filing
- 2008-11-14 CN CN200880116181.7A patent/CN101861237B/en active Active
- 2008-11-14 US US12/271,245 patent/US8097080B2/en active Active
- 2008-11-14 JP JP2010533506A patent/JP5697984B2/en active Active
- 2008-11-14 AT AT08850859T patent/ATE543622T1/en active
-
2011
- 2011-09-07 US US13/226,519 patent/US8723288B2/en active Active
-
2014
- 2014-06-04 JP JP2014115493A patent/JP2014218428A/en active Pending
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CN1113269A (en) | 1995-01-29 | 1995-12-13 | 陈秋生 | Method for production of single alundum |
JPH09256472A (en) | 1996-03-19 | 1997-09-30 | Sumitomo Forestry Co Ltd | Housing unit and assembly method therefor |
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Also Published As
Publication number | Publication date |
---|---|
DE102007056115A1 (en) | 2009-05-20 |
JP2011503888A (en) | 2011-01-27 |
US20090283761A1 (en) | 2009-11-19 |
JP5697984B2 (en) | 2015-04-08 |
WO2009062744A1 (en) | 2009-05-22 |
CN101861237A (en) | 2010-10-13 |
JP2014218428A (en) | 2014-11-20 |
ATE543622T1 (en) | 2012-02-15 |
CN101861237B (en) | 2015-06-24 |
EP2377662A1 (en) | 2011-10-19 |
US20110318221A1 (en) | 2011-12-29 |
EP2106331A1 (en) | 2009-10-07 |
EP2106331B1 (en) | 2012-02-01 |
US8097080B2 (en) | 2012-01-17 |
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