US9023589B2 - Photosensitive resin composition and applications thereof - Google Patents

Photosensitive resin composition and applications thereof Download PDF

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US9023589B2
US9023589B2 US14/027,374 US201314027374A US9023589B2 US 9023589 B2 US9023589 B2 US 9023589B2 US 201314027374 A US201314027374 A US 201314027374A US 9023589 B2 US9023589 B2 US 9023589B2
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acrylate
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US20140087307A1 (en
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Kai-Min Chen
Chun-An Shih
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Chi Mei Corp
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Chi Mei Corp
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors

Definitions

  • the invention relates to a photosensitive resin composition, more particularly to a photosensitive resin composition for forming a protective film having a good cross-sectional shape and a low linear thermal expansion coefficient.
  • This invention also relates to a protective film formed from the photosensitive resin composition, and an element containing the protective film.
  • an optical device such as a liquid crystal display or a solid state imaging device
  • processing procedures such as soaking in acid or alkaline solutions and sputtering, and heat generated during the processing procedures may damage the optical device. Therefore, a protective film is usually needed for protecting the optical device.
  • the protective film is not only required to have superior resistance to chemicals, water, and solvents so as to provide sufficient protection against the aforementioned conditions, but also to have good adhesion to a substrate, high transparency and good thermal and light resistances so as to prevent whitening or yellowing problems after being used for a long period of time.
  • JP 2001-354822 discloses a radiation-sensitive resin composition which includes: (A) a copolymer of an unsaturated carboxylic acid and/or an unsaturated carboxylic acid anhydride, an epoxy-containing unsaturated compound, a maleimide monomer, and other olefinic unsaturated compound; and (B) 1,2-quinonediazide compound, wherein the amount of the 1,2-quinonediazide compound (B) ranges from 5 to 100 parts by weight based on 100 parts by weight of the copolymer (A).
  • Such radiation-sensitive resin composition has good sensitivity and the protective film formed therefrom has good thermal and solvent resistances.
  • the protective film has relatively high linear thermal expansion coefficient and inferior cross-sectional shape, thereby adversely affecting accuracy of the following process such as forming a wiring electrode layer on the protective film.
  • a first object of the present invention is to provide a photosensitive resin composition for forming a protective film having a good cross-sectional shape and a low linear thermal expansion coefficient.
  • a second object of the present invention is to provide a protective film formed from the photosensitive resin composition.
  • a third object of the present invention is to provide an element containing the protective film.
  • a photosensitive resin composition including an alkali-soluble resin, an o-naphthoquinonediazidesulfonic acid ester, a urethane(meth)acrylate compound having at least six (meth)acryloyl groups in a molecule, and a solvent.
  • a protective film formed from the photosensitive resin composition is provided.
  • an element including the protective film there is provided an element including the protective film.
  • (meth)acrylic acid means acrylic acid and/or methacrylic acid.
  • (meth)acryloyl means acryloyl and/or methacryloyl, and the term “(meth)acrylate” means acrylate and/or methacrylate.
  • the photosensitive resin composition includes an alkali-soluble resin (A), an o-naphthoquinonediazidesulfonic acid ester (B), a urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule, and a solvent (D).
  • the alkali-soluble resin (A) is a resin that is soluble in an alkali solution, and the chemical structure of the alkali-soluble resin (A) is not limited hereto in the present invention.
  • the alkali-soluble resin (A) is a carboxyl-containing resin or a phenol-novolac resin.
  • the alkali-soluble resin (A) is obtained by subjecting a mixture to copolymerization in the presence of a polymerization initiator.
  • the mixture can include: (i) an unsaturated carboxylic acid compound and/or an unsaturated carboxylic anhydride compound (a1) and a first unsaturated compound (a2) having an epoxy group; (ii) the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1), the first unsaturated compound (a2), and a second unsaturated compound (a3) that is different from the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) and the first unsaturated compound (a2); or (iii) the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) and the second unsaturated compound (a3).
  • the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) may be used in an amount ranging from 5 to 50 parts by weight, preferably from 8 to 45 parts by weight, and more preferably from 10 to 40 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition of the present invention.
  • the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) may refer to a compound having an unsaturated group and a carboxylic group or carboxylic anhydride group.
  • Examples of the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) may include, but are not limited to, an unsaturated monocarboxylic acid compound, an unsaturated dicarboxylic acid compound, an unsaturated carboxylic anhydride compound, a polycyclic unsaturated monocarboxylic acid compound, a polycyclic unsaturated dicarboxylic acid compound, and a polycyclic unsaturated carboxylic anhydride compound.
  • Examples of the unsaturated monocarboxylic acid compound may include, but are not limited to, (meth)acrylic acid, crotonic acid, ⁇ -chloroacrylic acid, ethacrylic acid, cinnamic acid, 2-(meth)acryloyloxyethyl succinate monoester, 2-(meth)acryloyloxyethyl hexahydrophthalate, 2-(meth)acryloyloxyethyl phthalate, and omega-carboxypolycaprolactone polyol monoacrylate (commercially available from TOAGOSEI Co., Ltd, Product name: ARONIX M-5300).
  • Examples of the unsaturated dicarboxylic acid compound may include, but are not limited to, maleic acid, fumaric acid, methylfumaric acid, itaconic acid, and citraconic acid.
  • Examples of the unsaturated carboxylic anhydride compound may include, but are not limited to, anhydrides of the aforementioned examples of the unsaturated dicarboxylic acid compound.
  • Examples of the polycyclic unsaturated monocarboxylic acid compound may include, but are not limited to, 5-carboxy-bicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methyl-bicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethyl-bicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methyl-bicyclo[2.2.1]hept-2-ene, and 5-carboxy-6-ethyl-bicyclo[2.2.1]hept-2-ene.
  • polycyclic unsaturated dicarboxylic acid compound is 5,6-dicarboxy-bicyclo[2.2.1]hept-2-ene.
  • a non-limiting example of the polycyclic unsaturated dicarboxylic anhydride compound is an anhydride compound of the aforementioned example of the polycyclic unsaturated dicarboxylic acid compound.
  • the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) is selected from the group consisting of acrylic acid, methacrylic acid, maleic anhydride, 2-methacryloyloxyethyl succinate monoester, 2-methacryloyloxyethyl hexahydrophthalate, and combinations thereof.
  • the first unsaturated compound (a2) having an epoxy group may be used in an amount ranging from 10 to 70 parts by weight, preferably from 20 to 70 parts by weight, and more preferably from 25 to 65 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition of the present invention.
  • Examples of the first unsaturated compound (a2) having an epoxy group may include, but are not limited to, epoxy-group-containing (meth)acrylates, epoxy-group-containing ⁇ -alkylacrylates, and glycidyl ethers.
  • epoxy-group-containing (meth)acrylates may include, but are not limited to, glycidyl(meth)acrylate, 2-methylglycidyl(meth)acrylate, 3,4-epoxybutyl(meth)acrylate, 6,7-epoxyheptyl(meth)acrylates, 3,4-epoxycyclohexyl(meth)acrylate, and 3,4-epoxycyclohexylmethyl(meth)acrylate.
  • Examples of the epoxy-group-containing ⁇ -alkylacrylates may include, but are not limited to, glycidyl ⁇ -ethylacrylate, glycidyl ⁇ -n-propylacrylate, glycidyl ⁇ -n-butylacrylate, and 6,7-epoxyheptyl ⁇ -ethylacrylate.
  • glycidyl ethers may include, but are not limited to, o-vinylbenzylglycidyl ether, m-vinylbenzylglycidyl ether, and p-vinylbenzylglycidyl ether.
  • the first unsaturated compound (a2) containing an epoxy group is selected from the group consisting of glycidyl methacrylate, 3,4-epoxycyclohexylmethyl methacrylate, 6,7-epoxyheptyl methacrylate, o-vinylbenzylglycidyl ether, m-vinylbenzylglycidyl ether, and p-vinylbenzylglycidyl ether.
  • the second unsaturated compound (a3) may be used in an amount ranging from 0 to 70 parts by weight, preferably from 0 to 60 parts by weight, and more preferably from 0 to 55 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition of the present invention.
  • Examples of the second unsaturated compound (a3) may include, but are not limited to, alkyl(meth)acrylate, alicyclic(meth)acrylate, aryl(meth)acrylate, unsaturated dicarboxylic acid diester, hydroxyalkyl(meth)acrylate, (meth)acrylate polyether, and aryl vinyl compound.
  • alkyl(meth)acrylate may include, but are not limited to, methyl(meth)acrylate, ethyl(meth)acrylate, n-propyl(meth)acrylate, isopropyl(meth)acrylate, n-butyl(meth)acrylate, isobutyl(meth)acrylate, sec-butyl(meth)acrylate, and tert-butyl(meth)acrylate.
  • alicyclic(meth)acrylate may include, but are not limited to, cyclohexyl(meth)acrylate, 2-methylcyclohexyl(meth)acrylate, dicyclopentanyl(meth)acrylate, dicyclopentyloxyethyl(meth)acrylate, isobornyl(meth)acrylate, and tetrahydrofurfuryl(meth)acrylate.
  • aryl(meth)acrylate may include, but are not limited to, phenyl(meth)acrylate and benzyl(meth)acrylate.
  • Examples of the unsaturated dicarboxylic acid diester may include, but are not limited to, diethyl maleate, diethyl fumarate, and diethyl itaconate.
  • hydroxyalkyl(meth)acrylate may include, but are not limited to, 2-hydroxyethyl(meth)acrylate, and 2-hydroxypropyl(meth)acrylate.
  • Examples of the (meth)acrylate polyether may include, but are not limited to, poly(ethylene glycol)mono(meth)acrylate, and poly(propylene glycol)mono(meth)acrylate.
  • aryl vinyl compound may include, but are not limited to, styrene, ⁇ -methyl styrene, m-methylstyrene, p-methylstyrene, and p-methoxystyrene.
  • Examples of the second unsaturated compound (a3) may also include, but are not limited to, acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride, acrylamide, methacrylamide, vinyl acetate, 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, N-cyclohexylmaleimide, N-phenylmaleimide, N-benzylmaleimide, N-succinimidyl-3-maleimidobenzoate, N-succinimidyl-4-maleimidobutyrate, N-succinimidyl-6-maleimidohexanoate, N-succinimidyl-3-maleimidopropionate, and N-(9-acridinyl)maleimide.
  • the second unsaturated compound (a3) is selected from the group consisting of methyl(meth)acrylate, butyl(meth)acrylate, 2-hydroxyethyl methacrylate, tert-butyl(meth)acrylate, benzyl(meth)acrylate, dicyclopentanyl(meth)acrylate, dicyclopentyloxyethyl(meth)acrylate, styrene, p-methoxystyrene, and combinations thereof.
  • solvents for preparing the alkali-soluble resin (A) may include, but are not limited to:
  • alcohols such as methanol, ethanol, benzyl alcohol, 2-phenylethanol, and 3-phenyl-1-propanol;
  • ethylene glycol ethers such as ethylene glycol monopropyl ether, ethylene glycol monomethyl ether, and ethylene glycol monoethyl ether;
  • ethylene glycol alkyl ether acetates such as ethylene glycol butyl ether acetate, ethylene glycol ethyl ether acetate, and ethylene glycol methyl ether acetate;
  • diethylene glycol ethers such as diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, and diethylene glycol methyl ethyl ether;
  • dipropylene glycol ethers such as dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, and dipropylene glycol methyl ethyl ether;
  • propylene glycol monoalkyl ethers such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, and propylene glycol monobutyl ether;
  • propylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, and propylene glycol monobutyl ether acetate;
  • propylene glycol alkyl ether propionates such as propylene glycol monomethyl ether propionate, propylene glycol monoethyl ether propionate, propylene glycol monopropyl ether propionate, and propylene glycol monobutyl ether propionate;
  • aromatic hydrocarbons such as benzene and xylene
  • ketones such as methylethyl ketone, cyclohexanone, and diacetone alcohol
  • esters such as methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl lactate, methyl 2-hydroxy-isobutyrate, ethyl 2-hydroxy-isobutyrate, methyl glycolate, ethyl glycolate, butyl glycolate, methyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropanoate, ethyl 3-hydroxypropanoate, propyl 3-hydroxypropanoate, butyl 3-hydroxypropanoate, methyl 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, propyl ethoxyacetate, butyl ethoxyacetate, methyl propoxyacetate, ethyl propoxyacetate, butyl ethoxyacetate, butyl
  • the solvent for preparing the alkali-soluble resin (A) is selected from the group consisting of diethylene glycol dimethyl ether, propylene glycol monomethyl ether acetate, and the combination thereof.
  • the aforesaid examples of the solvent for preparing the alkali-soluble resin (A) can be used alone or as a mixture of two or more.
  • An initiator for preparing the alkali-soluble resin (A) may include, but is not limited to, azo compounds and peroxide compounds.
  • azo compounds may include, but are not limited to, 2,2′-azobisisobutyronitrile, 2,2′-azobis(2,4-dimethylvaleronitrile), 2,2′-azobis(4-methoxy-2,4-dimethylvaleronitrile), 2,2′-azobis(2-methylbutyronitrile), 4,4′-azobis(4-cyanovaleric acid), dimethyl-2,2′-azobis(2-methylpropionate), and 2,2′-azobis(4-methoxy-2,4-dimethylvaleronitrile).
  • peroxide compounds may include, but are not limited to, benzoyl peroxide, lauroyl peroxide, tert-butyl peroxypivalate, 1,1-di(tert-butylperoxy)cyclohexane, and hydrogen peroxide.
  • the molecular weight of the alkali-soluble resin (A) is adjusted by using a single resin or using two or more resins.
  • the molecular weight of the alkali-soluble resin (A) ranges from 3,000 to 100,000, more preferably from 4,000 to 80,000, and even more preferably from 5,000 to 60,000.
  • O-naphthoquinonediazidesulfonic acid ester (B) for the photosensitive resin composition according to the present invention.
  • the o-naphthoquinonediazidesulfonic acid ester (B) may be a partially or completely esterified compound.
  • the o-naphthoquinonediazidesulfonic acid ester (B) is obtained via a reaction of o-naphthoquinonediazidesulfonic acid or salt thereof with a hydroxyl compound.
  • the o-naphthoquinonediazidesulfonic acid ester (B) is obtained via a reaction of o-naphthoquinonediazidesulfonic acid or salt thereof with a polyhydroxyl compound.
  • Examples of the o-naphthoquinonediazidesulfonic acid may include, but are not limited to, o-naphthoquinonediazide-4-sulfonic acid, o-naphthoquinonediazide-5-sulfonic acid, and o-naphthoquinonediazide-6-sulfonic acid.
  • a non-limiting example of the salt of o-naphthoquinonediazidesulfonic acid is halide of o-naphthoquinonediazidesulfonic acid.
  • hydroxyl compound examples include, but are not limited to:
  • (1)hydroxybenzophenones such as 2,3,4-trihydroxybenzophenone, 2,4,4′-trihydroxybenzophenone, 2,4,6-trihydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2,4,2′,4′-tetrahydroxybenzophenone, 2,4,6,3′,4′-pentahydroxybenzophenone, 2,3,4,2′-pentahydroxybenzophenone, 2,3,4,2′,5′-pentahydroxybenzophenone, 2,4,5,3′,5′-pentahydroxybenzophenone, and 2,3,4,3′,4′,5′-hexahydroxybenzophenone.
  • hydroxyaryl compounds a non-limiting example of the hydroxyaryl compound is represented by Formula (a):
  • R m , R n , and R o independently represent a hydrogen atom or a C 1 -C 6 alkyl group
  • R p , R q , R r , R s , R t , and R u independently represent a hydrogen atom, a halogen atom, a C 1 -C 6 alkyl group, a C 1 -C 6 alkoxy group, a C 1 -C 6 alkenyl group, or a cycloalkyl group;
  • R v and R w independently represent a hydrogen atom, a halogen atom, or a C 1 -C 6 alkyl group
  • x, y, and z independently denote an integer ranging from 1 to 3;
  • k 0 or 1.
  • Examples of the hydroxyaryl compound represented by Formula (a) include, but are not limited to, tri(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dimethylphenyl)-4-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-3-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-2-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-4-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-3-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-2-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-3,4-dihydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-3,4-dihydroxyphenylmethane, bis(4
  • R x and R y independently represent a hydrogen atom or a C 1 -C 6 alkyl group
  • x′ and y′ independently represent an integer ranging from 1 to 3.
  • Examples of the (hydroxyphenyl)hydrocarbon compound represented by Formula (b) may include, but are not limited to, 2-(2,3,4-trihydroxyphenyl)-2-(2′,3′,4′-trihydroxyphenyl)propane, 2-(2,4-dihydroxyphenyl)-2-(2′,4′-dihydroxyphenyl)propane, 2-(4-hydroxyphenyl)-2-(4′-hydroxyphenyl)propane, bis(2,3,4-trihydroxyphenyl)methane, and bis(2,4-dihydroxyphenyl)methane.
  • aromatic hydroxyl compounds such as phenol, p-methoxyphenol, dimethylphenol, hydroquinone, bisphenol A, naphthol, pyrocatechol, pyrogallol monomethyl ether, pyrogallol-1,3-dimethyl ether, gallic acid, and partially esterified or partially etherified gallic acid.
  • hydroxyl compounds can be used alone or as a mixture of two or more.
  • the hydroxyl compounds are selected from the group consisting of 1-[1-(4-hydroxyphenyl)isopropyl]-4-[1,1-bis(4-hydroxyphenyl)ethyl]benzene, 2,3,4-trihydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, and combinations thereof.
  • reaction of o-naphthoquinonediazidesulfonic acid or salt thereof with the hydroxyl compound is often conducted in an organic solvent such as dioxane, N-pyrrolidone, acetamide, and the like, in the presence of an alkali condensation agent such as triethanolamine, alkali carbonate, alkali hydrogen carbonate, and the like.
  • organic solvent such as dioxane, N-pyrrolidone, acetamide, and the like
  • an alkali condensation agent such as triethanolamine, alkali carbonate, alkali hydrogen carbonate, and the like.
  • the esterification rate of the o-naphthoquinonediazidesulfonic acid ester (B) is greater than 50%. That is, more than 50% by mole of the hydroxyl groups contained in the hydroxyl compound undergoes an esterification reaction with o-naphthoquinonediazidesulfonic acid or salt thereof, based on 100% by mole of the total hydroxyl groups contained in the hydroxyl compound. More preferably, the esterification rate of the o-naphthoquinonediazide sulfonate compound (B) is greater than 60%.
  • the o-naphthoquinonediazidesulfonic acid ester (B) is used in an amount ranging from 10 parts by weight to 50 parts by weight, preferably from 15 parts by weight to 50 parts by weight, and more preferably from 15 parts by weight to 45 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition according to the present invention.
  • the urethane(meth)acrylate compound (C) which has at least six (meth)acryloyl groups in a molecule is capable of increasing the amount of the unsaturated bond in the photosensitive resin composition, so as to improve crosslinking degree after exposure to light and post-baking, resulting in better adhesion to a substrate and a better cross-sectional shape of the protective film. Moreover, the urethane group in the urethane(meth)acrylate compound (C) is capable of increasing the flexibility of the protective film that is made from the photosensitive resin composition, so as to lower the linear thermal expansion coefficient thereof.
  • the urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule can be prepared by known methods.
  • a non-limiting exemplary method for producing the urethane(meth)acrylate compound (C) may include steps of reacting a polyol compound with a polyisocyanate compound, followed by further reacting with a hydroxyl-containing (meth)acrylate compound, so as to obtain the urethane(meth)acrylate compound (C).
  • the urethane(meth)acrylate compound (C) may be prepared by reacting the polyisocyanate compound with the hydroxyl-containing (meth)acrylate compound, followed by further reacting with the polyol compound.
  • the urethane(meth)acrylate compound (C) is prepared by reacting a difunctional polyol compound with a difunctional polyisocyanate compound, followed by reacting with pentaerythritol tri(meth)acrylate. More preferably, such reaction is conducted under the presence of a catalyst.
  • the catalyst may include, but are not limited to, di-n-butyltin dilaurate and other conventional catalysts for esterification of urethane.
  • hydroxyl-containing (meth)acrylate compound may include, but are not limited to, 2-hydroxyethyl(meth)acrylate, hydroxymethyl(meth)acrylate, 2-hydroxypropyl(meth)acrylate, glycidol di(meth)acrylate, triglycerol di(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol tetra(meth)acrylate, dipentaerythritol tri(meth)acrylate, dipentaerythritol di(meth)acrylate, trimethylolpropane di(meth)acrylate, and epoxy acrylate.
  • hydroxyl-containing (meth)acrylate compound may be used alone or in a mixture of two or more.
  • the hydroxyl-containing (meth)acrylate compound is pentaerythritol tri(meth)acrylate.
  • the polyisocyanate compound has at least two isocyanate groups in a molecule.
  • the polyisocyanate compound may include, but are not limited to, tolylene diisocyanate, diphenylmethane diisocyanate, polymethylene polyphenyl polyisocyanate, toluidine diisocyanate, naphthalene diisocyanate, hexamethylene diisocyanate, isophorone diisocyanate, xylylene diisocyanate, hydrogenated xylylene diisocyanate, and dicyclohexylmethane diisocyanate.
  • the aforementioned examples of the polyisocyanate compound may be used alone or in a mixture of two or more.
  • examples of the polyol compound may include, but are not limited to, poly(propylene oxide)diol, polypropylene oxide)triol, co-poly(ethylene oxide-propylene oxide)diol, poly(tetramethylene oxide)diol, ethoxylated bisphenol A, ethoxylated bisphenol S, spiro glycol, caprolactone-modified diol, carbonate diol, trimethylolpropane, and pentaerythritol.
  • the aforementioned examples of the polyol compound may be used alone or in a mixture of two or more.
  • the molecular weight of the urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule ranges from 1,000 to 200,000, more preferably from 1,200 to 100,000, and even more preferably from 1,500 to 50,000.
  • urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule may include, but are not limited to, Shiko UV-1400B, Shiko UV-1700B, Shiko UV-6300B, Shiko UV-7600B, Shiko UV-7605B, Shiko UV-7610B, and Shiko UV-7620EA available from Nippon Synthetic Chemical Industry Co., Ltd.; Art Resin UV-7630B, Art Resin UV-7640B, Art Resin UN-9000H, Art Resin UN-3320HA, Art Resin UN-3320HC, Art Resin UN-3320HS, and Art Resin UN-901T available from Negami Industry Co., Ltd.; NK Oligo U-6HA, NK Oligo U-6LPA, NK Oligo U-15HA, NK Oligo UA-32P, NK Oligo U-324A, and NK Oligo U-6H available from Shin-Nakamura Chemical Industry Co., Ltd.; EBECRYL 1290
  • the aforementioned commercially available examples of the urethane(meth)acrylate compound (C) can be used alone or in a mixture of two or more.
  • the preferred commercially available products are Shiko UV-1700B, Shiko UV-6300B, and Shiko UV-7605B available from Nippon Synthetic Chemical Industry Co., Ltd.; NK Oligo U-6HA available from Shin-Nakamura Chemical Industry Co., Ltd.; and Art Resin UN-3320HC and Art Resin UN-3320HS available from Negami Industry Co., Ltd.
  • the amount of the urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule used in the photosensitive resin composition of the present invention ranges generally from 1 to 30 parts by weight, preferably from 3 to 25 parts by weight, and more preferably from 5 to 25 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition.
  • the solvent (D) for the photosensitive resin composition of the present invention, so long as the solvent (D) can dissolve other components in the photosensitive resin composition and is highly volatile so as to be evaporated easily under atmospheric pressure with a small amount of provided heat.
  • the solvent (D) has a boiling temperature that is lower than 150° C. under atmospheric pressure.
  • Examples of the solvent (D) may include, but are not limited to:
  • aromatic solvents such as benzene, toluene, and xylene
  • alcohols such as methanol and ethanol
  • ethers such as ethylene glycol monopropyl ether, diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol methyl ether, diethylene glycol ethyl ether, and diethylene glycol butyl ether;
  • esters such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, and ethyl 3-ethoxypropionate (abbreviated as EEP); and
  • ketones such as methyl ethyl ketone, and acetone.
  • the solvent (D) is selected from the group consisting of diethylene glycol dimethyl ether, propylene glycol monomethyl ether acetate, ethyl 3-ethoxypropionate, and combinations thereof in view of the storage stability of the photosensitive resin composition of the present invention.
  • the solvent (D) is used in an amount ranging generally from 100 parts by weight to 800 parts by weight, preferably from 150 parts by weight to 750 parts by weight, and more preferably from 200 parts by weight to 600 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition according to the present invention.
  • the photosensitive resin composition of the present invention may further optionally include additives (E).
  • additives (E) may include, but are not limited to, a filler, a polymer other than the alkali-soluble resin (A), a UV absorber, an anticoagulant, a surfactant, an adhesion promoter, a stabilizer, a thermal resistance enhancer, a curing accelerator, and combinations thereof.
  • the filler is aluminum or a glass material.
  • the polymer other than the alkali-soluble resin (A) is polyvinyl alcohol, polyethylene glycol monoalkyl ether, or polyfluoroalkyl acrylate.
  • the UV absorber there is no specific requirement for the species thereof.
  • the UV absorber is 2-(3-tert-butyl-5-methyl-2-hydroxyphenyl)-5-chlorophenyl azide or alkoxy phenyl ketone.
  • the anticoagulant is, but not limited to, sodium polyacrylate.
  • the surfactant may include, but are not limited to, a fluorine surfactant or a silicone surfactant which may be used alone or in combination.
  • the surfactant is used to enhance the coating property of the photosensitive resin composition of the present invention.
  • the fluorine surfactant is a compound having a fluoroalkyl or fluoroalkenyl group at a terminal, main chain, and/or side chain.
  • the fluorine surfactant may include, but are not limited to, 1,1,2,2-tetrafluorooctyl(1,1,2,2-tetrafluoropropyl)ether, 1,1,2,2-tetrafluorooctylhexyl ether, octaethylene glycol di(1,1,2,2-tetrafluorobutyl)ether, hexaethylene glycol (1,1,2,2,3,3-hexafluoropentyl)ether, octapropylene glycol di(1,1,2,2,-tetrafluorobutyl)ether, hexapropylene glycol (1,1,2,2,3,3-hexafluoropentyl)ether, sodium perfluorododecyl sulfate, 1,1,2,2,8,8,9,9
  • Fluorad FC170C Fluorad FC-171, Fluorad FC-430 and Fluorad FC-431 available from Sumitomo 3M Limited
  • Surflon S-112, Surflon S-113, Surflon S-131, Surflon S-141, Surflon S-145, Surflon S-382, Surflon SC-101, Surflon SC-102, Surflon SC-103, Surflon SC-104, Surflon SC-105 and Surflon SC-106 available from Asahi Glass Co., Ltd.
  • F-TOP EF301 F-TOP EF303
  • silicone surfactant examples include, but are not limited to, Toray Silicon DC3PA, DC7PA, SH11PA, SH21PA, SH28PA, SH29PA, SH30PA, SH-190, SH-193, SZ-6032, SF-8427, SF-8428, DC-57 and DC-190 available from Dow Corning Toray silicone Co., Ltd.; TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, and TSF-4452 available from GE Toshiba Silicone Co., Ltd.
  • examples of the surfactant which can be used in the photosensitive resin composition of the present invention can also include: (i) polyoxyethylene alkylethers, such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, and polyoxyethylene oleyl ether; (ii) polyoxyethylene aryl ethers, such as polyoxyethylene n-octylphenyl ether and polyoxyethylene n-nonylphenol ether; (iii) polyoxyethylene dialkylesters, such as polyoxyethylene dilaurate and polyoxyethylene distearate; and (iv) non-ionic surfactants, such as KP341 available from Shietsu Chemical Co., Ltd., and Polyflow No. 57 and Polyflow No. 95 available from Kyoeisya Chemical Co., Ltd.
  • non-ionic surfactants such as KP341 available from Shietsu Chemical Co., Ltd., and Polyflow No. 57 and Polyflow No. 95 available from Kyoe
  • the adhesion promoter can be used for further improving adhesion of the protective film made from the photosensitive resin composition of the present invention to a substrate.
  • the adhesion promoter may include, but is not limited to, functional silane compounds which preferably contain a carboxyl group, an alkenyl group, an isocyanate group, an epoxy group, an amino group, a mercapto group, or halogen.
  • silane compound may include, but are not limited to, p-hydroxyphenyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-acryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinyltri(2-methoxyethoxy)silane, ⁇ -isocyanatopropyltriethoxysilane, 3-glycidylpropyltrimethyoxysilane (such as KBM403, commercially available from Shietsu Chemical Co., Ltd.), 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-glycidyl propyldimethylmethoxysilane, 3-amimopropyltrimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, N-(2-amino
  • the stabilizer may include sulfides, quinones, hydroquinones, polyoxy compounds, amines, nitro compounds, nitroso compounds, and the like.
  • examples of the stabilizer may include, but are not limited to, 4-methoxyphenol, N-nitroso-N-phenylhydroxylamine aluminum, 2,2′-thio-bis(4-methyl-6-tert-butylphenol), and 2,6-di-tert-butylphenol.
  • the thermal resistance enhancer may include an N-(alkoxymethyl)glycoluril compound, an N-(alkoxymethyl)melamine compound, and the like.
  • the N-(alkoxymethyl)glycoluril compound may include, but are not limited to, N,N,N′,N′-tetra(methoxymethyl)glycoluril, N,N,N′,N′-tetra(ethoxymethyl)glycoluril, N,N,N′,N′-tetra(n-propoxymethyl)glycoluril, N,N,N′,N′-tetra(i-propoxymethyl)glycoluril, N,N,N′,N′-tetra(n-butoxymethyl)glycoluril, and N,N,N′,N′-tetra(t-butoxymethyl)glycoluril, and N,N,N′,N′-tetra(methoxymethyl)glycoluril is preferred.
  • N-(alkoxymethyl)melamine compound may include, but are not limited to, N,N,N′,N′,N′′,N′′-hexa(methoxymethyl)melamine, N,N,N′,N′,N′′,N′′-hexa(ethoxymethyl)melamine, N,N,N′,N′,N′′,N′′-hexa(n-propoxymethyl)melamine, N,N,N′,N′,N′′,N′′-hexa(i-propoxymethyl)melamine, N,N,N′,N′,N′′,N′′-hexa(n-butoxymethyl)melamine, and N,N,N′,N′,N′′,N′′-hexa(t-butoxymethyl)melamine, and N,N,N′,N′,N′′,N′′-hexa(methoxymethyl)melamine is preferred.
  • Commercially available products of the N-(alkoxymethyl)melamine compound include N IKARAKKU N-2702
  • the curing accelerator is adopted for lowering the linear thermal expansion coefficient of products made from the photosensitive resin composition according to the present invention.
  • the curing accelerator may include, but are not limited to: (1) thiol group-containing silsesquioxane, commercially available products of which may include, but are not limited to, COMPOCERAN SQ-101, COMPOCERAN SQ-102, COMPOCERAN SQ-102-1, COMPOCERAN SQ-103, COMPOCERAN SQ105, COMPOCERAN SQ105-1, and COMPOCERAN SQ105-7 available from Arakawa Chemical Industries, Ltd.; (2) an epoxy-containing compound, for example, but not limited to, bisphenol diglycidyl ethers, such as bisphenol A diglycidyl ether, bisphenol F diglycidyl ether, bisphenol S diglycidyl ether, hydrogenated bisphenol A diglycidyl ether, hydrogenated bisphenol F diglycidyl ether, hydrogenated bisphenol AD diglycidyl ether, brominated bisphenol
  • the amount of the additives (E) used in the photosensitive resin composition of the present invention may be adjusted based on the knowledge of people having ordinary skill in the art, so long as the intended properties of the photosensitive resin composition are not impaired.
  • the amount of the additive (E) used in the photosensitive resin composition ranges preferably from 0 to 30 parts by weight, more preferably from 0 to 25 parts by weight, and even more preferably from 0 to 20 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition.
  • the alkali-soluble resin (A), the o-naphthoquinonediazidesulfonic acid ester (B), the urethane(meth)acrylate compound (C), the solvent (D), and optionally the additives (E) are placed into a stirrer and are stirred until a uniform solution is formed.
  • a protective film of the present invention is formed by coating the photosensitive resin composition onto a substrate, followed by pre-baking, exposing, developing, and post-baking treatments.
  • the photosensitive resin composition is applied onto the substrate by spray-coating, roller-coating, spin-coating, slit-coating, bar-coating, or the like (preferably by spin-coating or slit-coating), and then is subjected to the pre-baking treatment to remove the solvent therein so as to form a prebaked film.
  • the conditions of the pre-baking treatment depend on the types and the formulating ratio of the components in the photosensitive resin composition according to the present invention. However, the prebaking treatment is usually conducted at a temperature ranging from 60° C. to 110° C. for 30 seconds to 15 minutes. Preferably, the prebaked film has a thickness ranging from 3 to 6 ⁇ m.
  • the prebaked film is subjected to the exposing treatment via a photomask by using, for example, UV light, far-UV light, X ray, charged particle beam, or the like.
  • the UV light may be g-line (wavelength of 436 nm), h-line, or i-line (wavelength of 365 nm)
  • the far-UV light may be KrF excimer laser
  • the X ray may be synchrotron radiation
  • the charged particle beam may be an electron beam.
  • the UV light is adopted, and more preferably, the g-line or the i-line is adopted.
  • Examples of a device for providing the UV light may include, but are not limited to, a high pressure mercury lamp, an ultra-high pressure mercury lamp, and a metal halide lamp.
  • the exposure dose ranges from 50 to 1500 J/m 2 .
  • the developing treatment is conducted by immersing the prebaked film into a developing solution for 30 seconds to 2 minutes, so as to obtain a developed film that is formed with a desired pattern.
  • the developing solution include: (1) inorganic alkali compounds, such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia; (2) primary aliphatic amines, such as ethylamine, and n-propylamine; (3) secondary aliphatic amines, such as diethylamine, and di(n-propyl)amine; (4) tertiary aliphatic amines, such as trimethylamine, N,N-diethylmethylamine, N,N-dimethylethylamine, and triethylamine; (5) tertiary alicyclic acids, such as pyrrole, piperidine, N-methyl piperidine, N-methyl-1,8-diazabicyclo[5.4.0]und
  • water-soluble organic solvents and/or surfactants such as methanol and ethanol
  • examples of the method of the developing treatment may be, but not limited to, puddle developing, impregnation developing (with or without sonication), and rinse developing.
  • the developing solution is removed by rinsing the developed film on the substrate with water, followed by drying with compressed air or nitrogen gas.
  • a post-exposure treatment is conducted using a high pressure mercury lamp for decomposing the residue of the o-naphthoquinonediazidesulfonic acid ester (B) in a developed film. More preferably, the exposure dose of the post-exposure treatment ranges from 2000 to 5000 J/m 2 .
  • the post-baking treatment is conducted via a heating device, such as a heating plate or an oven, with a temperature ranging from 120° C. to 250° C., so as to form the protective film of the present invention.
  • the baking period of the post-baking treatment may vary depending on the heating device.
  • the heating time of the post-baking treatment ranges from 5 minutes to 30 minutes.
  • the heating time ranges from 30 minutes to 90 minutes.
  • Examples of the substrate suitable for the present invention include an alkali-free glass, a soda-lime glass, a Pyrex glass, a quartz glass, a glass coated with a transparent conductive film thereon, and the like, which are commonly used in a liquid crystal display; and a photoelectric conversion substrate (for example, a silicon substrate) used in a solid-state image sensor.
  • a photoelectric conversion substrate for example, a silicon substrate
  • An element including the substrate and the protective film formed from the photosensitive resin composition of the present invention can be used in a display device, a semiconductor device, an optical waveguide device, and the like.
  • a 1000 ml four-necked flask which is equipped with a nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer, was introduced with nitrogen gas and was added with methacrylic acid (referred as MMA, 10 parts by weight), glycidyl methacrylate (referred as GMA, 65 parts by weight), dicyclopentanyl methacrylate (referred as FA-513M, 15 parts by weight), styrene (referred as SM, 10 parts by weight), and diethylene glycol dimethyl ether as a solvent (referred as Diglyme, 240 parts by weight) to form a mixture.
  • MMA methacrylic acid
  • GMA glycidyl methacrylate
  • FA-513M dicyclopentanyl methacrylate
  • SM styrene
  • Diglyme diethylene glycol dimethyl ether as a solvent
  • a catalyst solution (3.0 parts by weight of 2,2′-azobis(2,4-dimethylvaleronitrile) (referred as ADVN) dissolved in 20 parts by weight of Diglyme) was divided into 5 parts and was added sequentially into the four-necked flask part by part within an hour for inducing a polymerization reaction. The polymerization reaction was then conducted at 70° C. for 5 hours. After the polymerization reaction was completed, the product was taken out of the flask, followed by devolatilizing the solvent, so as to obtain an alkali-soluble resin (A-1).
  • ADVN 2,2′-azobis(2,4-dimethylvaleronitrile)
  • a 1000 ml four-necked flask which is equipped with a nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer, was introduced with nitrogen gas and was added with 2-methacryloyloxyethyl succinate monoester (referred as HOMS, 40 parts by weight), 3,4-epoxycyclohexylmethyl methacrylate (referred as EC-MAA, 25 parts by weight), 2-hydroxyethyl methacrylate (referred as HEMA, 5 parts by weight), FA-513M (10 parts by weight), SM (20 parts by weight), and propylene glycol monomethyl ether acetate as a solvent (referred as PGMEA, 240 parts by weight) to form a mixture.
  • HOMS 2-methacryloyloxyethyl succinate monoester
  • EC-MAA 3,4-epoxycyclohexylmethyl methacrylate
  • HEMA 2-hydroxyethyl methacrylate
  • a 1000 ml four-necked flask which is equipped with a nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer, was introduced with nitrogen gas and was added with MMA (25 parts by weight), GMA (20 parts by weight), EC-MMA (20 parts by weight), HEMA (10 parts by weight), FA-513M (10 parts by weight), benzyl methacrylate (referred as BzMA, 15 parts by weight), Diglyme (as a solvent, 200 parts by weight), and PGMEA (as a solvent, 40 parts by weight) to form a mixture.
  • a catalyst solution (3 parts by weight of 2,2′-azobis(2-methylbutyronitrile) (referred as AMBN) dissolved in 20 parts by weight of Diglyme) was divided into 5 parts and was added sequentially into the four-necked flask part by part within an hour for inducing a polymerization reaction.
  • the polymerization reaction was conducted at 70° C. for 5 hours. After the polymerization reaction was completed, the product was taken out of the flask, followed by devolatilizing the solvent so as to obtain an alkali-soluble resin (A-3).
  • a 500 ml three-necked flask was added with the alkali-soluble resin (A-1) (100 parts by weight), an o-naphthoquinonediazidesulfonic acid ester (DPAP200, commercially available from DKC with 67% of average degree of esterification, 30 parts by weight) that is obtained by reacting o-naphthoquinonediazide-5-sulfonic acid with 1-[1-(4-hydroxyphenyl)isopropyl]-4-[1,1-bis(4-hydroxyphenyl)ethyl]benzene, NK Oligo U-6HA (10 parts by weight, commercially available from Shin-Nakamura Chemical Industry Co., Ltd.), Shiko UV-7605B (5 parts by weight, commercially available from Nippon Synthetic Chemical Industry Co., Ltd), PGMEA (400 parts by weight), and COMPOCERAN SQ-101 (3 parts by weight, commercially available from Arakawa Chemical Industries, Ltd.). Stirring was conducted using a shake
  • the method for preparing the photosensitive resin composition of each of Examples 2 to 8 and Comparative Examples 1 to 3 is similar to that of Example 1. The only difference resides in the components and the amounts thereof in the photosensitive resin composition, which are shown in Table 2.
  • the photosensitive resin composition of each of Examples 2 to 8 and Comparative Examples 1 to 3 was subjected to the following evaluations and the results are listed in Table 2.
  • the photosensitive resin composition of Example 1 was spin-coated on a 100 ⁇ 100 ⁇ 0.7 mm 3 glass substrate to obtain a coated film that has a thickness of about 2 ⁇ m. Thereafter, the coated film was prebaked at 110° C. for 2 minutes, followed by exposure to UV of 200 mJ/cm 2 exposure dose (AG500-4N, manufactured by M&R Nano Technology) through a pattern mask and immersing in a developing solution (0.4 wt % of tetramethylammonium hydroxide) at 23° C. for one minute to remove the exposed part of the coated film. The coated film was then rinsed with water, exposed with UV once again with an exposure dose of 300 mJ/cm 2 and post-baked at 230° C. for 60 minutes, so as to obtain a patterned protective film.
  • AUV/cm 2 exposure dose AG500-4N, manufactured by M&R Nano Technology
  • the patterned protective film of each of the Application Examples and Comparative Application Examples was subjected to investigation using a Scanning electron microscope (SEM), and the cross-sectional shape of the patterned protective film was evaluated using the following standards:
  • TMA120C thermal mechanical analyzer
  • the photosensitive resin composition of each of Examples 1 to 8 contains the alkali-soluble resin (A), the o-naphthoquinonediazidesulfonic acid ester (B), the urethane(meth)acrylate Compound (C) and the solvent, and the resulting patterned protective film of each of Application Examples 1 to 8 has a good cross-sectional shape and a low linear thermal expansion coefficient.
  • the photosensitive resin compositions of Examples 1, 5, and 7 further contain the additives (E), such as silsesquioxane and bisphenol A diglycidyl ether, so as to further lower the linear thermal expansion coefficients of the corresponding patterned protective films.
  • E additives
  • Comparative Examples 1 and 2 do not include the urethane(meth)acrylate compound (C) that has at least six (meth)acryloyl groups in a molecule, thereby resulting in an unsatisfactory cross-sectional shape and high linear thermal expansion coefficient.
  • Comparative Example 3 including urethane(meth)acrylate compound which merely has two (meth)acryloyl groups in a molecule also results in an unsatisfactory cross-sectional shape and high linear thermal expansion coefficient.

Abstract

A photosensitive resin composition includes: an alkali-soluble resin; an o-naphthoquinonediazidesulfonic acid ester; a urethane(meth)acrylate compound having at least six (meth)acryloyl groups in a molecule; and a solvent. A protective film which is formed from the photosensitive resin composition and an element which includes the protective film are also provided.

Description

CROSS-REFERENCE TO RELATED APPLICATION
This application claims priority of Taiwanese Patent Application No. 101135626, filed on Sep. 27, 2012.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The invention relates to a photosensitive resin composition, more particularly to a photosensitive resin composition for forming a protective film having a good cross-sectional shape and a low linear thermal expansion coefficient. This invention also relates to a protective film formed from the photosensitive resin composition, and an element containing the protective film.
2. Description of the Related Art
While manufacturing an optical device such as a liquid crystal display or a solid state imaging device, processing procedures such as soaking in acid or alkaline solutions and sputtering, and heat generated during the processing procedures may damage the optical device. Therefore, a protective film is usually needed for protecting the optical device.
The protective film is not only required to have superior resistance to chemicals, water, and solvents so as to provide sufficient protection against the aforementioned conditions, but also to have good adhesion to a substrate, high transparency and good thermal and light resistances so as to prevent whitening or yellowing problems after being used for a long period of time.
JP 2001-354822 discloses a radiation-sensitive resin composition which includes: (A) a copolymer of an unsaturated carboxylic acid and/or an unsaturated carboxylic acid anhydride, an epoxy-containing unsaturated compound, a maleimide monomer, and other olefinic unsaturated compound; and (B) 1,2-quinonediazide compound, wherein the amount of the 1,2-quinonediazide compound (B) ranges from 5 to 100 parts by weight based on 100 parts by weight of the copolymer (A). Such radiation-sensitive resin composition has good sensitivity and the protective film formed therefrom has good thermal and solvent resistances. However, the protective film has relatively high linear thermal expansion coefficient and inferior cross-sectional shape, thereby adversely affecting accuracy of the following process such as forming a wiring electrode layer on the protective film.
Therefore, there is a need in the art to provide a protective film that has a good cross-sectional shape and a low linear thermal expansion coefficient.
SUMMARY OF THE INVENTION
Therefore, a first object of the present invention is to provide a photosensitive resin composition for forming a protective film having a good cross-sectional shape and a low linear thermal expansion coefficient.
A second object of the present invention is to provide a protective film formed from the photosensitive resin composition.
A third object of the present invention is to provide an element containing the protective film.
According to a first aspect of the present invention, there is provided a photosensitive resin composition including an alkali-soluble resin, an o-naphthoquinonediazidesulfonic acid ester, a urethane(meth)acrylate compound having at least six (meth)acryloyl groups in a molecule, and a solvent.
According to a second aspect of the present invention, there is provided a protective film formed from the photosensitive resin composition.
According to a third aspect of the present invention, there is provided an element including the protective film.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
As used herein, the term “(meth)acrylic acid” means acrylic acid and/or methacrylic acid. Likewise, the term “(meth)acryloyl” means acryloyl and/or methacryloyl, and the term “(meth)acrylate” means acrylate and/or methacrylate.
According to the present invention, the photosensitive resin composition includes an alkali-soluble resin (A), an o-naphthoquinonediazidesulfonic acid ester (B), a urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule, and a solvent (D).
[Alkali-Soluble Resin (A)]
The alkali-soluble resin (A) is a resin that is soluble in an alkali solution, and the chemical structure of the alkali-soluble resin (A) is not limited hereto in the present invention.
Preferably, the alkali-soluble resin (A) is a carboxyl-containing resin or a phenol-novolac resin.
Preferably, the alkali-soluble resin (A) is obtained by subjecting a mixture to copolymerization in the presence of a polymerization initiator. The mixture can include: (i) an unsaturated carboxylic acid compound and/or an unsaturated carboxylic anhydride compound (a1) and a first unsaturated compound (a2) having an epoxy group; (ii) the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1), the first unsaturated compound (a2), and a second unsaturated compound (a3) that is different from the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) and the first unsaturated compound (a2); or (iii) the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) and the second unsaturated compound (a3).
<Unsaturated Carboxylic Acid Compound and/or Unsaturated Carboxylic Anhydride Compound (a1)>
The unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) may be used in an amount ranging from 5 to 50 parts by weight, preferably from 8 to 45 parts by weight, and more preferably from 10 to 40 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition of the present invention.
The unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) may refer to a compound having an unsaturated group and a carboxylic group or carboxylic anhydride group. Examples of the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) may include, but are not limited to, an unsaturated monocarboxylic acid compound, an unsaturated dicarboxylic acid compound, an unsaturated carboxylic anhydride compound, a polycyclic unsaturated monocarboxylic acid compound, a polycyclic unsaturated dicarboxylic acid compound, and a polycyclic unsaturated carboxylic anhydride compound.
Examples of the unsaturated monocarboxylic acid compound may include, but are not limited to, (meth)acrylic acid, crotonic acid, α-chloroacrylic acid, ethacrylic acid, cinnamic acid, 2-(meth)acryloyloxyethyl succinate monoester, 2-(meth)acryloyloxyethyl hexahydrophthalate, 2-(meth)acryloyloxyethyl phthalate, and omega-carboxypolycaprolactone polyol monoacrylate (commercially available from TOAGOSEI Co., Ltd, Product name: ARONIX M-5300).
Examples of the unsaturated dicarboxylic acid compound may include, but are not limited to, maleic acid, fumaric acid, methylfumaric acid, itaconic acid, and citraconic acid.
Examples of the unsaturated carboxylic anhydride compound may include, but are not limited to, anhydrides of the aforementioned examples of the unsaturated dicarboxylic acid compound.
Examples of the polycyclic unsaturated monocarboxylic acid compound may include, but are not limited to, 5-carboxy-bicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methyl-bicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethyl-bicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methyl-bicyclo[2.2.1]hept-2-ene, and 5-carboxy-6-ethyl-bicyclo[2.2.1]hept-2-ene.
A non-limiting example of the polycyclic unsaturated dicarboxylic acid compound is 5,6-dicarboxy-bicyclo[2.2.1]hept-2-ene.
A non-limiting example of the polycyclic unsaturated dicarboxylic anhydride compound is an anhydride compound of the aforementioned example of the polycyclic unsaturated dicarboxylic acid compound.
Preferably, the unsaturated carboxylic acid compound and/or the unsaturated carboxylic anhydride compound (a1) is selected from the group consisting of acrylic acid, methacrylic acid, maleic anhydride, 2-methacryloyloxyethyl succinate monoester, 2-methacryloyloxyethyl hexahydrophthalate, and combinations thereof.
<First Unsaturated Compound (a2) Having an Epoxy Group>
The first unsaturated compound (a2) having an epoxy group may be used in an amount ranging from 10 to 70 parts by weight, preferably from 20 to 70 parts by weight, and more preferably from 25 to 65 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition of the present invention.
Examples of the first unsaturated compound (a2) having an epoxy group may include, but are not limited to, epoxy-group-containing (meth)acrylates, epoxy-group-containing α-alkylacrylates, and glycidyl ethers.
Examples of the epoxy-group-containing (meth)acrylates may include, but are not limited to, glycidyl(meth)acrylate, 2-methylglycidyl(meth)acrylate, 3,4-epoxybutyl(meth)acrylate, 6,7-epoxyheptyl(meth)acrylates, 3,4-epoxycyclohexyl(meth)acrylate, and 3,4-epoxycyclohexylmethyl(meth)acrylate.
Examples of the epoxy-group-containing α-alkylacrylates may include, but are not limited to, glycidyl α-ethylacrylate, glycidyl α-n-propylacrylate, glycidyl α-n-butylacrylate, and 6,7-epoxyheptyl α-ethylacrylate.
Examples of the glycidyl ethers may include, but are not limited to, o-vinylbenzylglycidyl ether, m-vinylbenzylglycidyl ether, and p-vinylbenzylglycidyl ether.
Preferably, the first unsaturated compound (a2) containing an epoxy group is selected from the group consisting of glycidyl methacrylate, 3,4-epoxycyclohexylmethyl methacrylate, 6,7-epoxyheptyl methacrylate, o-vinylbenzylglycidyl ether, m-vinylbenzylglycidyl ether, and p-vinylbenzylglycidyl ether.
<Second Unsaturated Compound (a3)>
The second unsaturated compound (a3) may be used in an amount ranging from 0 to 70 parts by weight, preferably from 0 to 60 parts by weight, and more preferably from 0 to 55 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition of the present invention.
Examples of the second unsaturated compound (a3) may include, but are not limited to, alkyl(meth)acrylate, alicyclic(meth)acrylate, aryl(meth)acrylate, unsaturated dicarboxylic acid diester, hydroxyalkyl(meth)acrylate, (meth)acrylate polyether, and aryl vinyl compound.
Examples of the alkyl(meth)acrylate may include, but are not limited to, methyl(meth)acrylate, ethyl(meth)acrylate, n-propyl(meth)acrylate, isopropyl(meth)acrylate, n-butyl(meth)acrylate, isobutyl(meth)acrylate, sec-butyl(meth)acrylate, and tert-butyl(meth)acrylate.
Examples of the alicyclic(meth)acrylate may include, but are not limited to, cyclohexyl(meth)acrylate, 2-methylcyclohexyl(meth)acrylate, dicyclopentanyl(meth)acrylate, dicyclopentyloxyethyl(meth)acrylate, isobornyl(meth)acrylate, and tetrahydrofurfuryl(meth)acrylate.
Examples of the aryl(meth)acrylate may include, but are not limited to, phenyl(meth)acrylate and benzyl(meth)acrylate.
Examples of the unsaturated dicarboxylic acid diester may include, but are not limited to, diethyl maleate, diethyl fumarate, and diethyl itaconate.
Examples of the hydroxyalkyl(meth)acrylate may include, but are not limited to, 2-hydroxyethyl(meth)acrylate, and 2-hydroxypropyl(meth)acrylate.
Examples of the (meth)acrylate polyether may include, but are not limited to, poly(ethylene glycol)mono(meth)acrylate, and poly(propylene glycol)mono(meth)acrylate.
Examples of the aryl vinyl compound may include, but are not limited to, styrene, α-methyl styrene, m-methylstyrene, p-methylstyrene, and p-methoxystyrene.
Examples of the second unsaturated compound (a3) may also include, but are not limited to, acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride, acrylamide, methacrylamide, vinyl acetate, 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, N-cyclohexylmaleimide, N-phenylmaleimide, N-benzylmaleimide, N-succinimidyl-3-maleimidobenzoate, N-succinimidyl-4-maleimidobutyrate, N-succinimidyl-6-maleimidohexanoate, N-succinimidyl-3-maleimidopropionate, and N-(9-acridinyl)maleimide.
Preferably, the second unsaturated compound (a3) is selected from the group consisting of methyl(meth)acrylate, butyl(meth)acrylate, 2-hydroxyethyl methacrylate, tert-butyl(meth)acrylate, benzyl(meth)acrylate, dicyclopentanyl(meth)acrylate, dicyclopentyloxyethyl(meth)acrylate, styrene, p-methoxystyrene, and combinations thereof.
Examples of solvents for preparing the alkali-soluble resin (A) may include, but are not limited to:
(1) alcohols, such as methanol, ethanol, benzyl alcohol, 2-phenylethanol, and 3-phenyl-1-propanol;
(2) ethers, such as tetrahydrofuran;
(3) ethylene glycol ethers, such as ethylene glycol monopropyl ether, ethylene glycol monomethyl ether, and ethylene glycol monoethyl ether;
(4) ethylene glycol alkyl ether acetates, such as ethylene glycol butyl ether acetate, ethylene glycol ethyl ether acetate, and ethylene glycol methyl ether acetate;
(5) diethylene glycol ethers, such as diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, and diethylene glycol methyl ethyl ether;
(6) dipropylene glycol ethers, such as dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, and dipropylene glycol methyl ethyl ether;
(7) propylene glycol monoalkyl ethers, such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, and propylene glycol monobutyl ether;
(8) propylene glycol alkyl ether acetates, such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, and propylene glycol monobutyl ether acetate;
(9) propylene glycol alkyl ether propionates, such as propylene glycol monomethyl ether propionate, propylene glycol monoethyl ether propionate, propylene glycol monopropyl ether propionate, and propylene glycol monobutyl ether propionate;
(10) aromatic hydrocarbons, such as benzene and xylene;
(11) ketones, such as methylethyl ketone, cyclohexanone, and diacetone alcohol; and
(12) esters, such as methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl lactate, methyl 2-hydroxy-isobutyrate, ethyl 2-hydroxy-isobutyrate, methyl glycolate, ethyl glycolate, butyl glycolate, methyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropanoate, ethyl 3-hydroxypropanoate, propyl 3-hydroxypropanoate, butyl 3-hydroxypropanoate, methyl 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, propyl ethoxyacetate, butyl ethoxyacetate, methyl propoxyacetate, ethyl propoxyacetate, propyl propoxyacetate, butyl propoxyacetate, methyl butoxyacetate, ethyl butoxyacetate, propyl butoxyacetate, butyl butoxyacetate, 3-methoxybutyl acetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, ethyl 2-butoxypropionate, propyl 2-butoxypropionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, butyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, propyl 3-ethoxypropionate, butyl 3-ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, propyl 3-propoxypropionate, butyl 3-propoxypropionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, propyl 3-butoxypropionate, and butyl 3-butoxypropionate.
Preferably, the solvent for preparing the alkali-soluble resin (A) is selected from the group consisting of diethylene glycol dimethyl ether, propylene glycol monomethyl ether acetate, and the combination thereof.
The aforesaid examples of the solvent for preparing the alkali-soluble resin (A) can be used alone or as a mixture of two or more.
An initiator for preparing the alkali-soluble resin (A) may include, but is not limited to, azo compounds and peroxide compounds.
Examples of the azo compounds may include, but are not limited to, 2,2′-azobisisobutyronitrile, 2,2′-azobis(2,4-dimethylvaleronitrile), 2,2′-azobis(4-methoxy-2,4-dimethylvaleronitrile), 2,2′-azobis(2-methylbutyronitrile), 4,4′-azobis(4-cyanovaleric acid), dimethyl-2,2′-azobis(2-methylpropionate), and 2,2′-azobis(4-methoxy-2,4-dimethylvaleronitrile).
Examples of the peroxide compounds may include, but are not limited to, benzoyl peroxide, lauroyl peroxide, tert-butyl peroxypivalate, 1,1-di(tert-butylperoxy)cyclohexane, and hydrogen peroxide.
Preferably, the molecular weight of the alkali-soluble resin (A) is adjusted by using a single resin or using two or more resins. Preferably, the molecular weight of the alkali-soluble resin (A) ranges from 3,000 to 100,000, more preferably from 4,000 to 80,000, and even more preferably from 5,000 to 60,000.
[O-Naphthoquinonediazidesulfonic Acid Ester (B)]
There is no specific limitation to the O-naphthoquinonediazidesulfonic acid ester (B) for the photosensitive resin composition according to the present invention. The o-naphthoquinonediazidesulfonic acid ester (B) may be a partially or completely esterified compound. Preferably, the o-naphthoquinonediazidesulfonic acid ester (B) is obtained via a reaction of o-naphthoquinonediazidesulfonic acid or salt thereof with a hydroxyl compound. More preferably, the o-naphthoquinonediazidesulfonic acid ester (B) is obtained via a reaction of o-naphthoquinonediazidesulfonic acid or salt thereof with a polyhydroxyl compound.
Examples of the o-naphthoquinonediazidesulfonic acid may include, but are not limited to, o-naphthoquinonediazide-4-sulfonic acid, o-naphthoquinonediazide-5-sulfonic acid, and o-naphthoquinonediazide-6-sulfonic acid. A non-limiting example of the salt of o-naphthoquinonediazidesulfonic acid is halide of o-naphthoquinonediazidesulfonic acid.
Examples of the hydroxyl compound may include, but are not limited to:
(1)hydroxybenzophenones: such as 2,3,4-trihydroxybenzophenone, 2,4,4′-trihydroxybenzophenone, 2,4,6-trihydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2,4,2′,4′-tetrahydroxybenzophenone, 2,4,6,3′,4′-pentahydroxybenzophenone, 2,3,4,2′-pentahydroxybenzophenone, 2,3,4,2′,5′-pentahydroxybenzophenone, 2,4,5,3′,5′-pentahydroxybenzophenone, and 2,3,4,3′,4′,5′-hexahydroxybenzophenone.
(2) hydroxyaryl compounds: a non-limiting example of the hydroxyaryl compound is represented by Formula (a):
Figure US09023589-20150505-C00001
wherein
Rm, Rn, and Ro independently represent a hydrogen atom or a C1-C6 alkyl group;
Rp, Rq, Rr, Rs, Rt, and Ru independently represent a hydrogen atom, a halogen atom, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C6 alkenyl group, or a cycloalkyl group;
Rv and Rw independently represent a hydrogen atom, a halogen atom, or a C1-C6 alkyl group;
x, y, and z independently denote an integer ranging from 1 to 3; and
k is 0 or 1.
Examples of the hydroxyaryl compound represented by Formula (a) include, but are not limited to, tri(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dimethylphenyl)-4-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-3-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-2-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-4-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-3-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-2-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-3,4-dihydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-3,4-dihydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-2,4-dihydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-2,4-dihydroxyphenyl methane, bis(4-hydroxyphenyl)-3-methoxy-4-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxyphenyl)-3-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxyphenyl)-2-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxyphenyl)-4-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxy-6-methylphenyl)-2-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxy-6-methylphenyl)-3-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxy-6-methylphenyl)-4-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxy-6-methylphenyl)-3,4-dihydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxyphenyl)-3-hydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxyphenyl)-4-hydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxyphenyl)-2-hydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxy-4-methylphenyl)-2-hydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxy-4-methylphenyl)-4-hydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxy-4-methylphenyl)-3,4-dihydroxyphenylmethane, 1-[1-(4-hydroxyphenyl)isopropyl]-4-[1,1-bis(4-hydroxyphenyl)ethyl]benzene, and 1-[1-(3-methyl-4-hydroxyphenyl)isopropyl]-4-[1,1-bis(3-methyl-4-hydroxyphenyl)ethyl]benzene.
(3) (hydroxyphenyl)hydrocarbons: a non-limiting example of the (hydroxyphenyl)hydrocarbons is represented by Formula (b):
Figure US09023589-20150505-C00002
wherein
Rx and Ry independently represent a hydrogen atom or a C1-C6 alkyl group; and
x′ and y′ independently represent an integer ranging from 1 to 3.
Examples of the (hydroxyphenyl)hydrocarbon compound represented by Formula (b) may include, but are not limited to, 2-(2,3,4-trihydroxyphenyl)-2-(2′,3′,4′-trihydroxyphenyl)propane, 2-(2,4-dihydroxyphenyl)-2-(2′,4′-dihydroxyphenyl)propane, 2-(4-hydroxyphenyl)-2-(4′-hydroxyphenyl)propane, bis(2,3,4-trihydroxyphenyl)methane, and bis(2,4-dihydroxyphenyl)methane.
(4) other aromatic hydroxyl compounds: such as phenol, p-methoxyphenol, dimethylphenol, hydroquinone, bisphenol A, naphthol, pyrocatechol, pyrogallol monomethyl ether, pyrogallol-1,3-dimethyl ether, gallic acid, and partially esterified or partially etherified gallic acid.
The aforesaid examples of the hydroxyl compounds can be used alone or as a mixture of two or more.
Preferably, the hydroxyl compounds are selected from the group consisting of 1-[1-(4-hydroxyphenyl)isopropyl]-4-[1,1-bis(4-hydroxyphenyl)ethyl]benzene, 2,3,4-trihydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, and combinations thereof.
The reaction of o-naphthoquinonediazidesulfonic acid or salt thereof with the hydroxyl compound is often conducted in an organic solvent such as dioxane, N-pyrrolidone, acetamide, and the like, in the presence of an alkali condensation agent such as triethanolamine, alkali carbonate, alkali hydrogen carbonate, and the like.
Preferably, the esterification rate of the o-naphthoquinonediazidesulfonic acid ester (B) is greater than 50%. That is, more than 50% by mole of the hydroxyl groups contained in the hydroxyl compound undergoes an esterification reaction with o-naphthoquinonediazidesulfonic acid or salt thereof, based on 100% by mole of the total hydroxyl groups contained in the hydroxyl compound. More preferably, the esterification rate of the o-naphthoquinonediazide sulfonate compound (B) is greater than 60%.
The o-naphthoquinonediazidesulfonic acid ester (B) is used in an amount ranging from 10 parts by weight to 50 parts by weight, preferably from 15 parts by weight to 50 parts by weight, and more preferably from 15 parts by weight to 45 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition according to the present invention.
[Urethane(Meth)Acrylate Compound (C)]
The urethane(meth)acrylate compound (C) which has at least six (meth)acryloyl groups in a molecule is capable of increasing the amount of the unsaturated bond in the photosensitive resin composition, so as to improve crosslinking degree after exposure to light and post-baking, resulting in better adhesion to a substrate and a better cross-sectional shape of the protective film. Moreover, the urethane group in the urethane(meth)acrylate compound (C) is capable of increasing the flexibility of the protective film that is made from the photosensitive resin composition, so as to lower the linear thermal expansion coefficient thereof.
The urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule can be prepared by known methods. A non-limiting exemplary method for producing the urethane(meth)acrylate compound (C) may include steps of reacting a polyol compound with a polyisocyanate compound, followed by further reacting with a hydroxyl-containing (meth)acrylate compound, so as to obtain the urethane(meth)acrylate compound (C). Alternatively, the urethane(meth)acrylate compound (C) may be prepared by reacting the polyisocyanate compound with the hydroxyl-containing (meth)acrylate compound, followed by further reacting with the polyol compound.
Preferably, the urethane(meth)acrylate compound (C) is prepared by reacting a difunctional polyol compound with a difunctional polyisocyanate compound, followed by reacting with pentaerythritol tri(meth)acrylate. More preferably, such reaction is conducted under the presence of a catalyst. Examples of the catalyst may include, but are not limited to, di-n-butyltin dilaurate and other conventional catalysts for esterification of urethane.
Examples of the hydroxyl-containing (meth)acrylate compound may include, but are not limited to, 2-hydroxyethyl(meth)acrylate, hydroxymethyl(meth)acrylate, 2-hydroxypropyl(meth)acrylate, glycidol di(meth)acrylate, triglycerol di(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol tetra(meth)acrylate, dipentaerythritol tri(meth)acrylate, dipentaerythritol di(meth)acrylate, trimethylolpropane di(meth)acrylate, and epoxy acrylate. The aforementioned examples of the hydroxyl-containing (meth)acrylate compound may be used alone or in a mixture of two or more. Preferably, the hydroxyl-containing (meth)acrylate compound is pentaerythritol tri(meth)acrylate.
Preferably, the polyisocyanate compound has at least two isocyanate groups in a molecule. Examples of the polyisocyanate compound may include, but are not limited to, tolylene diisocyanate, diphenylmethane diisocyanate, polymethylene polyphenyl polyisocyanate, toluidine diisocyanate, naphthalene diisocyanate, hexamethylene diisocyanate, isophorone diisocyanate, xylylene diisocyanate, hydrogenated xylylene diisocyanate, and dicyclohexylmethane diisocyanate. The aforementioned examples of the polyisocyanate compound may be used alone or in a mixture of two or more.
Preferably, examples of the polyol compound may include, but are not limited to, poly(propylene oxide)diol, polypropylene oxide)triol, co-poly(ethylene oxide-propylene oxide)diol, poly(tetramethylene oxide)diol, ethoxylated bisphenol A, ethoxylated bisphenol S, spiro glycol, caprolactone-modified diol, carbonate diol, trimethylolpropane, and pentaerythritol. The aforementioned examples of the polyol compound may be used alone or in a mixture of two or more.
Preferably, the molecular weight of the urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule ranges from 1,000 to 200,000, more preferably from 1,200 to 100,000, and even more preferably from 1,500 to 50,000.
Commercially available products of the urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule may include, but are not limited to, Shiko UV-1400B, Shiko UV-1700B, Shiko UV-6300B, Shiko UV-7600B, Shiko UV-7605B, Shiko UV-7610B, and Shiko UV-7620EA available from Nippon Synthetic Chemical Industry Co., Ltd.; Art Resin UV-7630B, Art Resin UV-7640B, Art Resin UN-9000H, Art Resin UN-3320HA, Art Resin UN-3320HC, Art Resin UN-3320HS, and Art Resin UN-901T available from Negami Industry Co., Ltd.; NK Oligo U-6HA, NK Oligo U-6LPA, NK Oligo U-15HA, NK Oligo UA-32P, NK Oligo U-324A, and NK Oligo U-6H available from Shin-Nakamura Chemical Industry Co., Ltd.; EBECRYL 1290, EBECRYL 1290K, EBECRYL 5129, and EBECRYL 220 available from Daicel-Cytec Co., Ltd.; and Beam Set 575 available from Toagosei Co., Ltd. The aforementioned commercially available examples of the urethane(meth)acrylate compound (C) can be used alone or in a mixture of two or more. The preferred commercially available products are Shiko UV-1700B, Shiko UV-6300B, and Shiko UV-7605B available from Nippon Synthetic Chemical Industry Co., Ltd.; NK Oligo U-6HA available from Shin-Nakamura Chemical Industry Co., Ltd.; and Art Resin UN-3320HC and Art Resin UN-3320HS available from Negami Industry Co., Ltd.
The amount of the urethane(meth)acrylate compound (C) having at least six (meth)acryloyl groups in a molecule used in the photosensitive resin composition of the present invention ranges generally from 1 to 30 parts by weight, preferably from 3 to 25 parts by weight, and more preferably from 5 to 25 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition.
[Solvent (D)]
There is no specific limitation to the solvent (D) for the photosensitive resin composition of the present invention, so long as the solvent (D) can dissolve other components in the photosensitive resin composition and is highly volatile so as to be evaporated easily under atmospheric pressure with a small amount of provided heat. Preferably, the solvent (D) has a boiling temperature that is lower than 150° C. under atmospheric pressure. Examples of the solvent (D) may include, but are not limited to:
(i) aromatic solvents, such as benzene, toluene, and xylene;
(ii) alcohols, such as methanol and ethanol;
(iii) ethers, such as ethylene glycol monopropyl ether, diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol methyl ether, diethylene glycol ethyl ether, and diethylene glycol butyl ether;
(iv) esters, such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, and ethyl 3-ethoxypropionate (abbreviated as EEP); and
(v) ketones, such as methyl ethyl ketone, and acetone.
Preferably, the solvent (D) is selected from the group consisting of diethylene glycol dimethyl ether, propylene glycol monomethyl ether acetate, ethyl 3-ethoxypropionate, and combinations thereof in view of the storage stability of the photosensitive resin composition of the present invention.
Preferably, the solvent (D) is used in an amount ranging generally from 100 parts by weight to 800 parts by weight, preferably from 150 parts by weight to 750 parts by weight, and more preferably from 200 parts by weight to 600 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition according to the present invention.
[Additives (E)]
The photosensitive resin composition of the present invention may further optionally include additives (E). Examples of the additives (E) may include, but are not limited to, a filler, a polymer other than the alkali-soluble resin (A), a UV absorber, an anticoagulant, a surfactant, an adhesion promoter, a stabilizer, a thermal resistance enhancer, a curing accelerator, and combinations thereof.
There is no specific limitation for the filler. Preferably, the filler is aluminum or a glass material.
Preferably, the polymer other than the alkali-soluble resin (A) is polyvinyl alcohol, polyethylene glycol monoalkyl ether, or polyfluoroalkyl acrylate.
As for the UV absorber, there is no specific requirement for the species thereof. Preferably, the UV absorber is 2-(3-tert-butyl-5-methyl-2-hydroxyphenyl)-5-chlorophenyl azide or alkoxy phenyl ketone.
Preferably, the anticoagulant is, but not limited to, sodium polyacrylate.
Examples of the surfactant may include, but are not limited to, a fluorine surfactant or a silicone surfactant which may be used alone or in combination. The surfactant is used to enhance the coating property of the photosensitive resin composition of the present invention.
Preferably, the fluorine surfactant is a compound having a fluoroalkyl or fluoroalkenyl group at a terminal, main chain, and/or side chain. Examples of the fluorine surfactant may include, but are not limited to, 1,1,2,2-tetrafluorooctyl(1,1,2,2-tetrafluoropropyl)ether, 1,1,2,2-tetrafluorooctylhexyl ether, octaethylene glycol di(1,1,2,2-tetrafluorobutyl)ether, hexaethylene glycol (1,1,2,2,3,3-hexafluoropentyl)ether, octapropylene glycol di(1,1,2,2,-tetrafluorobutyl)ether, hexapropylene glycol (1,1,2,2,3,3-hexafluoropentyl)ether, sodium perfluorododecyl sulfate, 1,1,2,2,8,8,9,9,10,10-decafluorododecane, 1,1,2,2,3,3-hexafluorodecane, sodium fluoroalkylbenzene sulfonate, sodium fluoroalkyl phosphonate, sodium fluoroalkylcarboxylate, fluoroalkylpolyoxyethylene ether, diglycerin tetrakis(fluoroalkylpolyoxyethylene ether), fluoroalkylammonium iodide, fluoroalkylbetain, fluoroalkylpoly(propylene oxide) ether, perfluoroalkylpoly(propylene oxide) ether, and perfluoroalkyl alkanol.
Commercially available products of the fluorine surfactant include BM-1000 and BM-1100 available from BM CHEMIE Co., Ltd.; Megafac F142D, Megafac F172, Megafac F173, Megafac F183, Megafac F178, Megafac F191, Megafac F471 and Megafac F476 available from Dainippon Ink and Chemicals Inc.; Fluorad FC170C, Fluorad FC-171, Fluorad FC-430 and Fluorad FC-431 available from Sumitomo 3M Limited; Surflon S-112, Surflon S-113, Surflon S-131, Surflon S-141, Surflon S-145, Surflon S-382, Surflon SC-101, Surflon SC-102, Surflon SC-103, Surflon SC-104, Surflon SC-105 and Surflon SC-106 available from Asahi Glass Co., Ltd.; F-TOP EF301, F-TOP EF303, and F-TOP EF352 available from Shin Akita Kasei Co., Ltd.; Ftergent FT-100, FT-110, FT-140A, FT-150, FT-250, FT-251, FTX-251, FTX-218, FT-300, FT-310, and FT-400S available from NEOS Co., Ltd.
Commercially available products of the silicone surfactant include, but are not limited to, Toray Silicon DC3PA, DC7PA, SH11PA, SH21PA, SH28PA, SH29PA, SH30PA, SH-190, SH-193, SZ-6032, SF-8427, SF-8428, DC-57 and DC-190 available from Dow Corning Toray silicone Co., Ltd.; TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, and TSF-4452 available from GE Toshiba Silicone Co., Ltd.
Other than the fluorine surfactant and the silicone surfactant, examples of the surfactant which can be used in the photosensitive resin composition of the present invention can also include: (i) polyoxyethylene alkylethers, such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, and polyoxyethylene oleyl ether; (ii) polyoxyethylene aryl ethers, such as polyoxyethylene n-octylphenyl ether and polyoxyethylene n-nonylphenol ether; (iii) polyoxyethylene dialkylesters, such as polyoxyethylene dilaurate and polyoxyethylene distearate; and (iv) non-ionic surfactants, such as KP341 available from Shietsu Chemical Co., Ltd., and Polyflow No. 57 and Polyflow No. 95 available from Kyoeisya Chemical Co., Ltd.
The adhesion promoter can be used for further improving adhesion of the protective film made from the photosensitive resin composition of the present invention to a substrate. The adhesion promoter may include, but is not limited to, functional silane compounds which preferably contain a carboxyl group, an alkenyl group, an isocyanate group, an epoxy group, an amino group, a mercapto group, or halogen. Examples of the silane compound may include, but are not limited to, p-hydroxyphenyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-acryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinyltri(2-methoxyethoxy)silane, γ-isocyanatopropyltriethoxysilane, 3-glycidylpropyltrimethyoxysilane (such as KBM403, commercially available from Shietsu Chemical Co., Ltd.), 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-glycidyl propyldimethylmethoxysilane, 3-amimopropyltrimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, N-(2-aminoethyl)-3-aminopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-chloropropyltrimethoxysilane, and 3-chloropropylmethyldimethoxysilane. The aforementioned examples can be used alone or in a mixture of two or more.
The stabilizer may include sulfides, quinones, hydroquinones, polyoxy compounds, amines, nitro compounds, nitroso compounds, and the like. Examples of the stabilizer may include, but are not limited to, 4-methoxyphenol, N-nitroso-N-phenylhydroxylamine aluminum, 2,2′-thio-bis(4-methyl-6-tert-butylphenol), and 2,6-di-tert-butylphenol.
The thermal resistance enhancer may include an N-(alkoxymethyl)glycoluril compound, an N-(alkoxymethyl)melamine compound, and the like. Examples of the N-(alkoxymethyl)glycoluril compound may include, but are not limited to, N,N,N′,N′-tetra(methoxymethyl)glycoluril, N,N,N′,N′-tetra(ethoxymethyl)glycoluril, N,N,N′,N′-tetra(n-propoxymethyl)glycoluril, N,N,N′,N′-tetra(i-propoxymethyl)glycoluril, N,N,N′,N′-tetra(n-butoxymethyl)glycoluril, and N,N,N′,N′-tetra(t-butoxymethyl)glycoluril, and N,N,N′,N′-tetra(methoxymethyl)glycoluril is preferred. Examples of the N-(alkoxymethyl)melamine compound may include, but are not limited to, N,N,N′,N′,N″,N″-hexa(methoxymethyl)melamine, N,N,N′,N′,N″,N″-hexa(ethoxymethyl)melamine, N,N,N′,N′,N″,N″-hexa(n-propoxymethyl)melamine, N,N,N′,N′,N″,N″-hexa(i-propoxymethyl)melamine, N,N,N′,N′,N″,N″-hexa(n-butoxymethyl)melamine, and N,N,N′,N′,N″,N″-hexa(t-butoxymethyl)melamine, and N,N,N′,N′,N″,N″-hexa(methoxymethyl)melamine is preferred. Commercially available products of the N-(alkoxymethyl)melamine compound include N IKARAKKU N-2702 and MW-30M available from Sanwa chemical Co., Ltd.
The curing accelerator is adopted for lowering the linear thermal expansion coefficient of products made from the photosensitive resin composition according to the present invention. The curing accelerator may include, but are not limited to: (1) thiol group-containing silsesquioxane, commercially available products of which may include, but are not limited to, COMPOCERAN SQ-101, COMPOCERAN SQ-102, COMPOCERAN SQ-102-1, COMPOCERAN SQ-103, COMPOCERAN SQ105, COMPOCERAN SQ105-1, and COMPOCERAN SQ105-7 available from Arakawa Chemical Industries, Ltd.; (2) an epoxy-containing compound, for example, but not limited to, bisphenol diglycidyl ethers, such as bisphenol A diglycidyl ether, bisphenol F diglycidyl ether, bisphenol S diglycidyl ether, hydrogenated bisphenol A diglycidyl ether, hydrogenated bisphenol F diglycidyl ether, hydrogenated bisphenol AD diglycidyl ether, brominated bisphenol A diglycidyl ether, brominated bisphenol F diglycidyl ether, and brominated bisphenol S diglycidyl ether; (3) guanamines, such as melamine, acetoguanamine, and benzoguanamine; (4) amines, such as dicyandiamide, benzyldimethylamine, 4-(dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, and 4-methyl-N,N-dimethylbenzylamine; and (5) imidazole derivatives and salts thereof, such as, imidazole, 2-methyl imidazole, 2-ethyl imidazole, 2-ethyl-4-methyl imidazole, 2-phenyl imidazole, 4-phenyl imidazole, 1-cyanoethyl-2-ethyl imidazole, and 1-(2-cyanoethyl)-2-ethyl-4-methyl imidazole.
The amount of the additives (E) used in the photosensitive resin composition of the present invention may be adjusted based on the knowledge of people having ordinary skill in the art, so long as the intended properties of the photosensitive resin composition are not impaired. The amount of the additive (E) used in the photosensitive resin composition ranges preferably from 0 to 30 parts by weight, more preferably from 0 to 25 parts by weight, and even more preferably from 0 to 20 parts by weight based on 100 parts by weight of the alkali-soluble resin (A) used in the photosensitive resin composition.
To prepare the photosensitive resin composition according to the present invention, the alkali-soluble resin (A), the o-naphthoquinonediazidesulfonic acid ester (B), the urethane(meth)acrylate compound (C), the solvent (D), and optionally the additives (E) are placed into a stirrer and are stirred until a uniform solution is formed.
A protective film of the present invention is formed by coating the photosensitive resin composition onto a substrate, followed by pre-baking, exposing, developing, and post-baking treatments.
The photosensitive resin composition is applied onto the substrate by spray-coating, roller-coating, spin-coating, slit-coating, bar-coating, or the like (preferably by spin-coating or slit-coating), and then is subjected to the pre-baking treatment to remove the solvent therein so as to form a prebaked film. The conditions of the pre-baking treatment depend on the types and the formulating ratio of the components in the photosensitive resin composition according to the present invention. However, the prebaking treatment is usually conducted at a temperature ranging from 60° C. to 110° C. for 30 seconds to 15 minutes. Preferably, the prebaked film has a thickness ranging from 3 to 6 μm.
After the pre-baking treatment, the prebaked film is subjected to the exposing treatment via a photomask by using, for example, UV light, far-UV light, X ray, charged particle beam, or the like. For example, the UV light may be g-line (wavelength of 436 nm), h-line, or i-line (wavelength of 365 nm), the far-UV light may be KrF excimer laser, the X ray may be synchrotron radiation, and the charged particle beam may be an electron beam. Preferably, the UV light is adopted, and more preferably, the g-line or the i-line is adopted. Examples of a device for providing the UV light may include, but are not limited to, a high pressure mercury lamp, an ultra-high pressure mercury lamp, and a metal halide lamp. Preferably, the exposure dose ranges from 50 to 1500 J/m2.
After the exposing treatment, the developing treatment is conducted by immersing the prebaked film into a developing solution for 30 seconds to 2 minutes, so as to obtain a developed film that is formed with a desired pattern. Examples of the developing solution include: (1) inorganic alkali compounds, such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia; (2) primary aliphatic amines, such as ethylamine, and n-propylamine; (3) secondary aliphatic amines, such as diethylamine, and di(n-propyl)amine; (4) tertiary aliphatic amines, such as trimethylamine, N,N-diethylmethylamine, N,N-dimethylethylamine, and triethylamine; (5) tertiary alicyclic acids, such as pyrrole, piperidine, N-methyl piperidine, N-methyl-1,8-diazabicyclo[5.4.0]undec-7-ene, and 1,5-diazabicyclo[4.3.0]non-5-ene; (6) tertiary aromatic amines, such as pyridine, methylpyrimidine, dimethylpyridine, and quinoline; and (7) quaternary ammonium alkali compounds, such as an aqueous tetramethylammonium hydroxide solution and an aqueous tetraethylammonium hydroxide solution.
Moreover, water-soluble organic solvents and/or surfactants, such as methanol and ethanol, may be optionally added into the developing solution, and examples of the method of the developing treatment may be, but not limited to, puddle developing, impregnation developing (with or without sonication), and rinse developing.
The developing solution is removed by rinsing the developed film on the substrate with water, followed by drying with compressed air or nitrogen gas. Preferably, a post-exposure treatment is conducted using a high pressure mercury lamp for decomposing the residue of the o-naphthoquinonediazidesulfonic acid ester (B) in a developed film. More preferably, the exposure dose of the post-exposure treatment ranges from 2000 to 5000 J/m2.
Thereafter, the post-baking treatment is conducted via a heating device, such as a heating plate or an oven, with a temperature ranging from 120° C. to 250° C., so as to form the protective film of the present invention. The baking period of the post-baking treatment may vary depending on the heating device. As for the heating plate, the heating time of the post-baking treatment ranges from 5 minutes to 30 minutes. As for the oven, the heating time ranges from 30 minutes to 90 minutes.
Examples of the substrate suitable for the present invention include an alkali-free glass, a soda-lime glass, a Pyrex glass, a quartz glass, a glass coated with a transparent conductive film thereon, and the like, which are commonly used in a liquid crystal display; and a photoelectric conversion substrate (for example, a silicon substrate) used in a solid-state image sensor.
An element including the substrate and the protective film formed from the photosensitive resin composition of the present invention can be used in a display device, a semiconductor device, an optical waveguide device, and the like.
The following examples are provided to illustrate the preferred embodiments of the invention, and should not be construed as limiting the scope of the invention.
EXAMPLES Preparation of Alkali-Soluble Resin (A) Synthesis Example A-1
A 1000 ml four-necked flask, which is equipped with a nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer, was introduced with nitrogen gas and was added with methacrylic acid (referred as MMA, 10 parts by weight), glycidyl methacrylate (referred as GMA, 65 parts by weight), dicyclopentanyl methacrylate (referred as FA-513M, 15 parts by weight), styrene (referred as SM, 10 parts by weight), and diethylene glycol dimethyl ether as a solvent (referred as Diglyme, 240 parts by weight) to form a mixture.
When the four-necked flask was filled with nitrogen gas, the mixture was stirred and heated up to 85° C. in an oil bath. A catalyst solution (3.0 parts by weight of 2,2′-azobis(2,4-dimethylvaleronitrile) (referred as ADVN) dissolved in 20 parts by weight of Diglyme) was divided into 5 parts and was added sequentially into the four-necked flask part by part within an hour for inducing a polymerization reaction. The polymerization reaction was then conducted at 70° C. for 5 hours. After the polymerization reaction was completed, the product was taken out of the flask, followed by devolatilizing the solvent, so as to obtain an alkali-soluble resin (A-1).
Synthesis Example A-2
A 1000 ml four-necked flask, which is equipped with a nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer, was introduced with nitrogen gas and was added with 2-methacryloyloxyethyl succinate monoester (referred as HOMS, 40 parts by weight), 3,4-epoxycyclohexylmethyl methacrylate (referred as EC-MAA, 25 parts by weight), 2-hydroxyethyl methacrylate (referred as HEMA, 5 parts by weight), FA-513M (10 parts by weight), SM (20 parts by weight), and propylene glycol monomethyl ether acetate as a solvent (referred as PGMEA, 240 parts by weight) to form a mixture.
When the four-necked flask was filled with nitrogen gas, the mixture was stirred and heated up to 85° C. in an oil bath. A catalyst solution (2.4 parts by weight of ADVN dissolved in 20 parts by weight of PGMEA) was divided into 5 parts and was added sequentially into the four-necked flask part by part within one hour for inducing a polymerization reaction. The polymerization reaction was then conducted at 70° C. for 6 hours. After the polymerization reaction was completed, the product was taken out of the flask, followed by devolatilizing the solvent, so as to obtain an alkali-soluble resin (A-2).
Synthesis Example A-3
A 1000 ml four-necked flask, which is equipped with a nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer, was introduced with nitrogen gas and was added with MMA (25 parts by weight), GMA (20 parts by weight), EC-MMA (20 parts by weight), HEMA (10 parts by weight), FA-513M (10 parts by weight), benzyl methacrylate (referred as BzMA, 15 parts by weight), Diglyme (as a solvent, 200 parts by weight), and PGMEA (as a solvent, 40 parts by weight) to form a mixture.
When the four-necked flask was filled with nitrogen gas, the mixture was then stirred and heated up to 85° C. in an oil bath. A catalyst solution (3 parts by weight of 2,2′-azobis(2-methylbutyronitrile) (referred as AMBN) dissolved in 20 parts by weight of Diglyme) was divided into 5 parts and was added sequentially into the four-necked flask part by part within an hour for inducing a polymerization reaction. The polymerization reaction was conducted at 70° C. for 5 hours. After the polymerization reaction was completed, the product was taken out of the flask, followed by devolatilizing the solvent so as to obtain an alkali-soluble resin (A-3).
Preparation of Photosensitive Resin Composition Example 1
A 500 ml three-necked flask was added with the alkali-soluble resin (A-1) (100 parts by weight), an o-naphthoquinonediazidesulfonic acid ester (DPAP200, commercially available from DKC with 67% of average degree of esterification, 30 parts by weight) that is obtained by reacting o-naphthoquinonediazide-5-sulfonic acid with 1-[1-(4-hydroxyphenyl)isopropyl]-4-[1,1-bis(4-hydroxyphenyl)ethyl]benzene, NK Oligo U-6HA (10 parts by weight, commercially available from Shin-Nakamura Chemical Industry Co., Ltd.), Shiko UV-7605B (5 parts by weight, commercially available from Nippon Synthetic Chemical Industry Co., Ltd), PGMEA (400 parts by weight), and COMPOCERAN SQ-101 (3 parts by weight, commercially available from Arakawa Chemical Industries, Ltd.). Stirring was conducted using a shaker so as to obtain a photosensitive resin composition. The photosensitive resin composition was subjected to the following evaluations and the results are listed in Table 2.
Examples 2 to 8 and Comparative Examples 1 to 3
The method for preparing the photosensitive resin composition of each of Examples 2 to 8 and Comparative Examples 1 to 3 is similar to that of Example 1. The only difference resides in the components and the amounts thereof in the photosensitive resin composition, which are shown in Table 2. The photosensitive resin composition of each of Examples 2 to 8 and Comparative Examples 1 to 3 was subjected to the following evaluations and the results are listed in Table 2.
Preparation of Patterned Protective Film Application Example 1
The photosensitive resin composition of Example 1 was spin-coated on a 100×100×0.7 mm3 glass substrate to obtain a coated film that has a thickness of about 2 μm. Thereafter, the coated film was prebaked at 110° C. for 2 minutes, followed by exposure to UV of 200 mJ/cm2 exposure dose (AG500-4N, manufactured by M&R Nano Technology) through a pattern mask and immersing in a developing solution (0.4 wt % of tetramethylammonium hydroxide) at 23° C. for one minute to remove the exposed part of the coated film. The coated film was then rinsed with water, exposed with UV once again with an exposure dose of 300 mJ/cm2 and post-baked at 230° C. for 60 minutes, so as to obtain a patterned protective film.
Application Examples 2 to 8 and Comparative Application Examples 1 to 3
The method for preparing the patterned protective film of each of Application Examples 2 to 8 and Comparative Application Examples 1 to 3 is similar to that of Application Example 1. The only difference resides in that the photosensitive resin compositions of Examples 2 to 8 and Comparative Example 1 to 3 were used, respectively.
Evaluation Methods
1. Cross-Sectional Shape:
The patterned protective film of each of the Application Examples and Comparative Application Examples was subjected to investigation using a Scanning electron microscope (SEM), and the cross-sectional shape of the patterned protective film was evaluated using the following standards:
    • ⊚: Rectangular shape, i.e.,
      Figure US09023589-20150505-P00001
      ;
    • ◯: Frustoconical shape, i.e.,
      Figure US09023589-20150505-P00002
      ; and
    • X: Semicircular shape, i.e.,
      Figure US09023589-20150505-P00003
      , or inverted frustoconical shape, i.e.,
      Figure US09023589-20150505-P00004
      .
      2. Linear Thermal Expansion Coefficient (α):
The linear thermal expansion coefficient of the protective film of each of the Application Examples and the Comparative Application Examples was measured using a thermal mechanical analyzer (TMA, manufactured by SEIKO instruments Inc., Model: TMA120C) and was evaluated using the following standards:
    • ⊚: α<200
    • ◯: 200≦α<300
    • X: α≧300
TABLE 1
Compound (parts by weight, pbw) Solvent Catalyst Reaction Reaction
(a1) (a2) (a3) (pbw) (pbw) Temperature time
MAA HOMS GMA EC-MAA HEMA FA-513M BzMA SM Diglyme PGMEA AMBN ADVN (° C.) (hr)
A-1 10 0 65 0 0 15 0 10 240 0 0 3.0 70 5
A-2 0 40 0 25 5 10 0 20 0 240 0 2.4 70 6
A-3 25 0 20 20 10 10 15 0 200 40 3.0 0 70 5
MAA Methacrylic acid
HOMS 2-methacryloyloxyethyl succinate monoester
GMA glycidyl methacrylate
EC-MAA 3,4-epoxycyclohexylmethyl methacrylate
HEMA 2-hydroxyethyl methacrylate
FA-513M dicyclopentanyl methacrylate
BzMA benzyl methacrylate
SM styrene
Diglyme diethylene glycol dimethyl ether
PGMEA propylene glycol monomethyl ether acetate
AMBN 2,2′-azobis(2-methylbutyronitrile)
ADVN 2,2′-azobis(2,4-dimethylvaleronitrile)
TABLE 2
Comparative
Examples Examples
Components (Parts by weight) 1 2 3 4 5 6 7 8 1 2 3
Alkali-soluble Resin (A) A-1 100 0 0 100 0 0 0 50 100 0 0
A-2 0 100 0 0 100 0 100 50 0 100 0
A-3 0 0 100 0 0 100 0 0 0 0 100
O-Naphthoquinonediazidesulfonic B-1 30 0 10 10 50 20 20 10 30 30 0
Acid Ester (B) B-2 0 20 0 30 0 0 5 5 0 0 30
Urethane (meth)acrylate Compound (C) C-1 10 0 0 0 20 0 0 5 0 0 0
which has at least six (meth)acryloyl C-2 0 5 0 0 0 10 0 10 0 0 0
groups in a molecule C-3 5 0 1 0 10 0 5 0 0 0 0
C-4 0 0 0 20 0 0 5 0 0 0 0
Urethane (meth)acrylate Compound C-5 0 0 0 0 0 0 0 0 0 0 15
which has two
(meth)acryloyl groups in a molecule
Solvent (D) D-1 400 0 100 200 600 400 0 200 300 0 300
D-2 0 200 0 0 200 0 400 100 0 300 0
D-3 0 0 0 100 0 0 0 0 0 0 0
Additives (E) E-1 0 0.1 0 0 0 0 0 0 0 0 0
E-2 0 0 0 0.3 0 0 0 0 0 0 0
E-3 3 0 0 0 0 0 5 0 0 0 0
E-4 0 0 0 0 2 0 0 0 0 0 0
Evaluation: Cross-sectional shape ◯ ◯ ◯ ◯ ◯ ◯ ◯ ◯ X X X
Evaluation: Linear thermal expansion ⊚ ◯ ◯ ◯ ⊚ ◯ ⊚ ◯ X X X
coefficient (α)
B-1 o-naphthoquinonediazidesulfonic acid ester obtained by reacting o-naphthoquinonediazide-5-sulfonic acid with 1-[1-(4-hydroxyphenyl)isopropyl]-4-[1,1-bis(4-hydroxyphenyl)ethyl]benzene,
B-2 o-naphthoquinonediazidesulfonic acid ester obtained by reacting o-naphthoquinonediazide-5-sulfonic acid with 2,3,4-trihydroxybenzophenone
C-1 U-6HA
C-2 UV-1700B
C-3 UV-7605B
C-4 UN-3320HS
C-5 UN-9000PEP
D-1 propylene glycol monomethyl ether acetate
D-2 diethylene glycol dimethyl ether
D-3 ethyl 3-ethoxypropionate
E-1 SF-8427
E-2 KBM403
E-3 COMPOCERAN SQ-101
E-4 bisphenol A diglycidyl ether
As shown in Table 2, the photosensitive resin composition of each of Examples 1 to 8 contains the alkali-soluble resin (A), the o-naphthoquinonediazidesulfonic acid ester (B), the urethane(meth)acrylate Compound (C) and the solvent, and the resulting patterned protective film of each of Application Examples 1 to 8 has a good cross-sectional shape and a low linear thermal expansion coefficient.
Moreover, the photosensitive resin compositions of Examples 1, 5, and 7 further contain the additives (E), such as silsesquioxane and bisphenol A diglycidyl ether, so as to further lower the linear thermal expansion coefficients of the corresponding patterned protective films.
Comparative Examples 1 and 2 do not include the urethane(meth)acrylate compound (C) that has at least six (meth)acryloyl groups in a molecule, thereby resulting in an unsatisfactory cross-sectional shape and high linear thermal expansion coefficient. Comparative Example 3 including urethane(meth)acrylate compound which merely has two (meth)acryloyl groups in a molecule also results in an unsatisfactory cross-sectional shape and high linear thermal expansion coefficient.
While the present invention has been described in connection with what are considered the most practical and preferred embodiments, it is understood that this invention is not limited to the disclosed embodiments but is intended to cover various arrangements included within the spirit and scope of the broadest interpretation so as to encompass all such modifications and equivalent arrangements.

Claims (5)

What is claimed is:
1. A photosensitive resin composition comprising:
an alkali-soluble resin; an o-naphthoquinonediazidesulfonic acid ester;
a urethane(meth)acrylate compound having at least six (meth)acryloyl groups in a molecule; and
a solvent.
2. The photosensitive resin composition as claimed in claim 1, wherein said alkali-soluble resin is obtained by subjecting a mixture to copolymerization, said mixture containing at least one carboxyl group-containing compound selected from the group consisting of an unsaturated carboxylic acid compound and an unsaturated carboxylic anhydride compound, a first unsaturated compound having an epoxy group, and a second unsaturated compound different from said at least one carboxyl group-containing compound and said first unsaturated compound having the epoxy group.
3. The photosensitive resin composition as claimed in claim 1, wherein said o-naphthoquinonediazidesulfonic acid ester is in an amount ranging from 10 to 50 parts by weight, said urethane(meth)acrylate compound is in an amount ranging from 1 to 30 parts by weight, and said solvent is in an amount ranging from 100 to 800 parts by weight based on 100 parts by weight of said alkali-soluble resin.
4. A protective film formed by coating the photosensitive resin composition as claimed in claim 1 onto a substrate, followed by pre-baking, exposure, developing, and post-baking treatments to form the protective film, wherein the exposure treatment is performed via a photo mask using a light source; and the developing treatment is performed by immersing in a developing solution.
5. An element comprising the protective film as claimed in claim 4.
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