USD441348S1 - Process chamber lid - Google Patents
Process chamber lid Download PDFInfo
- Publication number
- USD441348S1 USD441348S1 US29/114,741 US11474199F USD441348S US D441348 S1 USD441348 S1 US D441348S1 US 11474199 F US11474199 F US 11474199F US D441348 S USD441348 S US D441348S
- Authority
- US
- United States
- Prior art keywords
- process chamber
- chamber lid
- lid
- view
- elevational view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a top perspective view of a process chamber lid showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a side elevational view thereof;
FIG. 4 is an opposite side elevational view thereof;
FIG. 5 is an enlarged end elevational view thereof;
FIG. 6 is an enlarged opposite end elevational view thereof; and,
FIG. 7 is a bottom plan view thereof.
Claims (1)
- The ornamental design for a process chamber lid, as shown and described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/114,741 USD441348S1 (en) | 1999-11-30 | 1999-11-30 | Process chamber lid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/114,741 USD441348S1 (en) | 1999-11-30 | 1999-11-30 | Process chamber lid |
Publications (1)
Publication Number | Publication Date |
---|---|
USD441348S1 true USD441348S1 (en) | 2001-05-01 |
Family
ID=22357149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/114,741 Expired - Lifetime USD441348S1 (en) | 1999-11-30 | 1999-11-30 | Process chamber lid |
Country Status (1)
Country | Link |
---|---|
US (1) | USD441348S1 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100003824A1 (en) * | 2008-07-07 | 2010-01-07 | Lam Research Corporation | Clamped showerhead electrode assembly |
US20100252197A1 (en) * | 2009-04-07 | 2010-10-07 | Lam Reseach Corporation | Showerhead electrode with centering feature |
US20110070740A1 (en) * | 2009-09-18 | 2011-03-24 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US20110083809A1 (en) * | 2009-10-13 | 2011-04-14 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US8206506B2 (en) | 2008-07-07 | 2012-06-26 | Lam Research Corporation | Showerhead electrode |
US8221582B2 (en) | 2008-07-07 | 2012-07-17 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8272346B2 (en) | 2009-04-10 | 2012-09-25 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
US8573152B2 (en) | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
USD938373S1 (en) * | 2019-10-25 | 2021-12-14 | Applied Materials, Inc. | Substrate transfer structure |
-
1999
- 1999-11-30 US US29/114,741 patent/USD441348S1/en not_active Expired - Lifetime
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8313805B2 (en) | 2008-07-07 | 2012-11-20 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8414719B2 (en) | 2008-07-07 | 2013-04-09 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8161906B2 (en) | 2008-07-07 | 2012-04-24 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8206506B2 (en) | 2008-07-07 | 2012-06-26 | Lam Research Corporation | Showerhead electrode |
US8221582B2 (en) | 2008-07-07 | 2012-07-17 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US20100003824A1 (en) * | 2008-07-07 | 2010-01-07 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8796153B2 (en) | 2008-07-07 | 2014-08-05 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8402918B2 (en) | 2009-04-07 | 2013-03-26 | Lam Research Corporation | Showerhead electrode with centering feature |
US20100252197A1 (en) * | 2009-04-07 | 2010-10-07 | Lam Reseach Corporation | Showerhead electrode with centering feature |
US8536071B2 (en) | 2009-04-10 | 2013-09-17 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
US8272346B2 (en) | 2009-04-10 | 2012-09-25 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
US20110070740A1 (en) * | 2009-09-18 | 2011-03-24 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8419959B2 (en) | 2009-09-18 | 2013-04-16 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US20110083809A1 (en) * | 2009-10-13 | 2011-04-14 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US9245716B2 (en) | 2009-10-13 | 2016-01-26 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US10262834B2 (en) | 2009-10-13 | 2019-04-16 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US8573152B2 (en) | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
USD938373S1 (en) * | 2019-10-25 | 2021-12-14 | Applied Materials, Inc. | Substrate transfer structure |
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