USD732093S1 - Gas tube assembly - Google Patents

Gas tube assembly Download PDF

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Publication number
USD732093S1
USD732093S1 US29/485,465 US201429485465F USD732093S US D732093 S1 USD732093 S1 US D732093S1 US 201429485465 F US201429485465 F US 201429485465F US D732093 S USD732093 S US D732093S
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US
United States
Prior art keywords
tube assembly
gas tube
view
gas
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/485,465
Inventor
Samuel S. Pak
Sang In LEE
Daniel Ho Lee
Hyoseok Daniel Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco ALD Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco ALD Inc filed Critical Veeco ALD Inc
Priority to US29/485,465 priority Critical patent/USD732093S1/en
Assigned to VEECO ALD INC. reassignment VEECO ALD INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LEE, SANG IN, LEE, DANIEL HO, PAK, SAMUEL S., YANG, HYOSEOK DANIEL
Application granted granted Critical
Publication of USD732093S1 publication Critical patent/USD732093S1/en
Assigned to VEECO INSTRUMENTS INC. reassignment VEECO INSTRUMENTS INC. NUNC PRO TUNC ASSIGNMENT (SEE DOCUMENT FOR DETAILS). Assignors: VEECO ALD INC.
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Description

FIG. 1 is a perspective view of a gas tube assembly, showing our new design.
FIG. 2 is another perspective view of the gas tube assembly of FIG. 1.
FIG. 3 is a front view of the gas tube assembly of FIG. 1.
FIG. 4 is a rear view of the gas tube assembly of FIG. 1.
FIG. 5 is a left side view of the gas tube assembly of FIG. 1.
FIG. 6 is a right side view of the gas tube assembly of FIG. 1.
FIG. 7 is a top view of the gas tube assembly of FIG. 1; and,
FIG. 8 is a bottom view of the gas tube assembly of FIG. 1.

Claims (1)

    CLAIM
  1. The ornamental design for a gas tube assembly, as shown and described.
US29/485,465 2014-03-19 2014-03-19 Gas tube assembly Active USD732093S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/485,465 USD732093S1 (en) 2014-03-19 2014-03-19 Gas tube assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/485,465 USD732093S1 (en) 2014-03-19 2014-03-19 Gas tube assembly

Publications (1)

Publication Number Publication Date
USD732093S1 true USD732093S1 (en) 2015-06-16

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Application Number Title Priority Date Filing Date
US29/485,465 Active USD732093S1 (en) 2014-03-19 2014-03-19 Gas tube assembly

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD890823S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts
USD890824S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts
USD890822S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts
USD890825S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts

Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841884A (en) * 1988-05-26 1989-06-27 A. Ahlstrom Corporation Distributor plate for fluidized bed reactor
USD310041S (en) * 1986-08-27 1990-08-21 Sony Magnescale, Inc. Magnetic measuring scale
US5082518A (en) * 1990-10-29 1992-01-21 Submicron Systems, Inc. Sparger plate for ozone gas diffusion
USD341602S (en) * 1991-02-22 1993-11-23 Faig Harold J Movable platen for an injection molding machine
USD345041S (en) * 1991-05-22 1994-03-08 Deutsche Star Gmbh Linear slide with toothed belt drives
USD417162S (en) * 1998-11-02 1999-11-30 Thweatt Sandra K Flat plate ceramic support
US6148761A (en) * 1998-06-16 2000-11-21 Applied Materials, Inc. Dual channel gas distribution plate
US6168765B1 (en) * 1998-09-08 2001-01-02 Uop Llc Process and apparatus for interbed injection in plate reactor arrangement
US6238817B1 (en) * 1999-02-03 2001-05-29 International Fuel Cells, Llc Gas injection system for treating a fuel cell stack assembly
US6453842B1 (en) * 2000-08-11 2002-09-24 Applied Materials Inc. Externally excited torroidal plasma source using a gas distribution plate
US6551446B1 (en) * 2000-08-11 2003-04-22 Applied Materials Inc. Externally excited torroidal plasma source with a gas distribution plate
US6586886B1 (en) * 2001-12-19 2003-07-01 Applied Materials, Inc. Gas distribution plate electrode for a plasma reactor
US7156950B2 (en) * 2002-01-22 2007-01-02 Jusung Engineering Co., Ltd Gas diffusion plate for use in ICP etcher
US7168269B2 (en) * 1999-08-16 2007-01-30 The Boc Group, Inc. Gas injection for glass melting furnace to reduce refractory degradation
US8100348B2 (en) * 2004-05-25 2012-01-24 Nanomi B.V. Device for generating microspheres from a fluid, method of injecting at least one first fluid into a second fluid, and an injection plate
US8143166B2 (en) * 2008-03-11 2012-03-27 Globalfoundries Singapore Pte. Ltd. Polishing method with inert gas injection
USD673195S1 (en) * 2012-07-03 2012-12-25 Cnplus Co., Ltd. Pressure welding connector
USD712364S1 (en) * 2012-05-09 2014-09-02 Gudeng Precision Industrial Co., Ltd. EUV pod
US8869742B2 (en) * 2010-08-04 2014-10-28 Lam Research Corporation Plasma processing chamber with dual axial gas injection and exhaust
US8899565B2 (en) * 2004-08-30 2014-12-02 Lg Display Co., Ltd. Sputtering device with gas injection assembly
USD719537S1 (en) * 2013-05-08 2014-12-16 Mitsubishi Electric Corporation Semiconductor device

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD310041S (en) * 1986-08-27 1990-08-21 Sony Magnescale, Inc. Magnetic measuring scale
US4841884A (en) * 1988-05-26 1989-06-27 A. Ahlstrom Corporation Distributor plate for fluidized bed reactor
US5082518A (en) * 1990-10-29 1992-01-21 Submicron Systems, Inc. Sparger plate for ozone gas diffusion
USD341602S (en) * 1991-02-22 1993-11-23 Faig Harold J Movable platen for an injection molding machine
USD345041S (en) * 1991-05-22 1994-03-08 Deutsche Star Gmbh Linear slide with toothed belt drives
US6148761A (en) * 1998-06-16 2000-11-21 Applied Materials, Inc. Dual channel gas distribution plate
US6168765B1 (en) * 1998-09-08 2001-01-02 Uop Llc Process and apparatus for interbed injection in plate reactor arrangement
USD417162S (en) * 1998-11-02 1999-11-30 Thweatt Sandra K Flat plate ceramic support
US6238817B1 (en) * 1999-02-03 2001-05-29 International Fuel Cells, Llc Gas injection system for treating a fuel cell stack assembly
US7168269B2 (en) * 1999-08-16 2007-01-30 The Boc Group, Inc. Gas injection for glass melting furnace to reduce refractory degradation
US6551446B1 (en) * 2000-08-11 2003-04-22 Applied Materials Inc. Externally excited torroidal plasma source with a gas distribution plate
US6453842B1 (en) * 2000-08-11 2002-09-24 Applied Materials Inc. Externally excited torroidal plasma source using a gas distribution plate
US6586886B1 (en) * 2001-12-19 2003-07-01 Applied Materials, Inc. Gas distribution plate electrode for a plasma reactor
US7156950B2 (en) * 2002-01-22 2007-01-02 Jusung Engineering Co., Ltd Gas diffusion plate for use in ICP etcher
US8100348B2 (en) * 2004-05-25 2012-01-24 Nanomi B.V. Device for generating microspheres from a fluid, method of injecting at least one first fluid into a second fluid, and an injection plate
US8899565B2 (en) * 2004-08-30 2014-12-02 Lg Display Co., Ltd. Sputtering device with gas injection assembly
US8143166B2 (en) * 2008-03-11 2012-03-27 Globalfoundries Singapore Pte. Ltd. Polishing method with inert gas injection
US8869742B2 (en) * 2010-08-04 2014-10-28 Lam Research Corporation Plasma processing chamber with dual axial gas injection and exhaust
USD712364S1 (en) * 2012-05-09 2014-09-02 Gudeng Precision Industrial Co., Ltd. EUV pod
USD673195S1 (en) * 2012-07-03 2012-12-25 Cnplus Co., Ltd. Pressure welding connector
USD719537S1 (en) * 2013-05-08 2014-12-16 Mitsubishi Electric Corporation Semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD890823S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts
USD890824S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts
USD890822S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts
USD890825S1 (en) * 2018-07-18 2020-07-21 Ebara Corporation Substrate holding parts

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