USD787458S1 - Gas supply plate for semiconductor manufacturing apparatus - Google Patents

Gas supply plate for semiconductor manufacturing apparatus Download PDF

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Publication number
USD787458S1
USD787458S1 US29/555,303 US201629555303F USD787458S US D787458 S1 USD787458 S1 US D787458S1 US 201629555303 F US201629555303 F US 201629555303F US D787458 S USD787458 S US D787458S
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Prior art keywords
gas supply
manufacturing apparatus
semiconductor manufacturing
supply plate
view
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US29/555,303
Inventor
Dae Youn Kim
Hie Chul Kim
Hyun Soo JANG
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ASM IP Holding BV
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ASM IP Holding BV
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Assigned to ASM IP HOLDING B.V. reassignment ASM IP HOLDING B.V. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: JANG, HYUN SOO, KIM, DAE YOUN, KIM, HIE CHUL
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FIG. 1 is a perspective view of a gas supply plate for a semiconductor manufacturing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 1; and,
FIG. 9 is an enlarged portion view taken along line 9 in FIG. 8.
The even dashed broken lines shown in the drawings represent portions of the gas supply plate for semiconductor manufacturing apparatus, that form no part of the claimed design. The dashed-dot-dashed lines represent the boundary lines of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a gas supply plate for a semiconductor manufacturing apparatus, as shown and described.
US29/555,303 2015-11-18 2016-02-19 Gas supply plate for semiconductor manufacturing apparatus Active USD787458S1 (en)

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KR30-2015-0058066 2015-11-18

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