USD795208S1 - Electrostatic chuck for semiconductor manufacturing equipment - Google Patents

Electrostatic chuck for semiconductor manufacturing equipment Download PDF

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Publication number
USD795208S1
USD795208S1 US29/553,359 US201629553359F USD795208S US D795208 S1 USD795208 S1 US D795208S1 US 201629553359 F US201629553359 F US 201629553359F US D795208 S USD795208 S US D795208S
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Prior art keywords
electrostatic chuck
semiconductor manufacturing
manufacturing equipment
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US29/553,359
Inventor
Yasuharu Sasaki
Tomoyuki Takahashi
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SASAKI, YASUHARU, TAKAHASHI, TOMOYUKI
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FIG. 1 is a front view of an electrostatic chuck for semiconductor manufacturing equipment, showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a cross sectional view taken along the lines of 7-7 of FIG. 1; and,
FIG. 8 is an enlarged view of a portion taken along lines of 8-8 of FIG. 7.
The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.
The alternate long and short dash lines are merely the boundary lines between the claimed parts and the non-claimed parts.
In the FIG. 1, the area surrounded by the alternate long and short dash lines on the electrostatic chuck is not claimed.

Claims (1)

    CLAIM
  1. The ornamental design for an electrostatic chuck for semiconductor manufacturing equipment, as shown and described.
US29/553,359 2015-08-18 2016-02-01 Electrostatic chuck for semiconductor manufacturing equipment Active USD795208S1 (en)

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JPD2015-18087F JP1549882S (en) 2015-08-18 2015-08-18
JP2015-018087 2015-08-18

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