WO1987002470A1 - Fabry-perot interferometer - Google Patents

Fabry-perot interferometer Download PDF

Info

Publication number
WO1987002470A1
WO1987002470A1 PCT/GB1986/000631 GB8600631W WO8702470A1 WO 1987002470 A1 WO1987002470 A1 WO 1987002470A1 GB 8600631 W GB8600631 W GB 8600631W WO 8702470 A1 WO8702470 A1 WO 8702470A1
Authority
WO
WIPO (PCT)
Prior art keywords
diaphragm
interferometer
fabry
interferometer according
superstrate
Prior art date
Application number
PCT/GB1986/000631
Other languages
French (fr)
Inventor
Stephen Robert Mallinson
Original Assignee
British Telecommunications Public Limited Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB858525462A external-priority patent/GB8525462D0/en
Priority claimed from GB858525460A external-priority patent/GB8525460D0/en
Priority claimed from GB858525458A external-priority patent/GB8525458D0/en
Priority claimed from GB858525461A external-priority patent/GB8525461D0/en
Priority claimed from GB858525459A external-priority patent/GB8525459D0/en
Priority claimed from GB858526189A external-priority patent/GB8526189D0/en
Application filed by British Telecommunications Public Limited Company filed Critical British Telecommunications Public Limited Company
Priority to JP61505411A priority Critical patent/JPH0690329B2/en
Publication of WO1987002470A1 publication Critical patent/WO1987002470A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2817—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using reflective elements to split or combine optical signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3801—Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
    • G02B6/3803—Adjustment or alignment devices for alignment prior to splicing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3516—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Definitions

  • FABRY-PEROT INTERFEROMETER The invention relates to Fabry-Perot interferometers.
  • a typical Fabry-Perot interferometer comprises a pair of substantially parallel reflective surfaces which are spaced apart to define a gap, at least one of the surfaces being movable relatively to the other to vary the size of the gap.
  • radiation comprising a number of different wavelengths impinges on the interferometer and passes into the gap and is then reflected between the two reflective surfaces. Constructive and destructive interference takes place leading to certain well defined wavelengths being transmitted through the interferometer while the remaining wavelengths are not transmitted.
  • typical Fabry-Perot interferometers a series of well defined transmission peaks are obtained corresponding to wavelengths which are transmitted, the wavelengths at which the peaks are situated being adjustable by varying the width of the gap.
  • Fabry-Perot interferometers have been used to a large extent tc define laser cavities but also find widespread use as multiple wavelength filters.
  • the reflective surfaces of the interferometer are as parallel as possible and it is also desirable to be able to change the separation between the reflective surfaces over a wide range.
  • the most common form of Fabry-Perot interferometer currently in use comprises two glass flats securely mounted on a stable support with facing surfaces of the flats being highly polished and having suitable coatings to define the reflective surfaces.
  • the size of the gap may vary between one millimetre and several centimetres and is varied by using microadjusters and/or piezoelectric translation elements. This is a cumbersome and expensive arrangement and has a relatively large overall size, typically in the order of inches.
  • Fabry-Perot interferometer comprises a single solid glass flat, the opposite faces of which are polished and suitably coated to define the reflective surfaces.
  • the only practical way in which the spacing or gap between the surfaces can be changed is by heating the flat to cause thermal expansion.
  • This construction suffers from the disadvantage that the variation in separation obtainable is small and the disadvantage that it is very difficult to obtain accurately parallel surfaces.
  • one of the reflective surfaces is provided on a diaphragm mounted by a hinge assembly to a support.
  • This invention improves upon the known interferometers by making use of a diaphragm to provide one of the reflective surfaces and mounting the diaphragm by a hinge assembly to a support so that the position of the diaphragm can be easily changed.
  • the interferometer can be used to demultiplex an incoming wavelength division multiplexed signal in which a number of different channels are carried by different wavelength signals.
  • the diaphragm and the hinge assembly are integral with the support. This leads to a compact and secure construction which is much cheaper to manufacture than known devices and involves far fewer components.
  • a single crystal such as silicon is used for the support, diaphragm and hinge assembly.
  • conventional micromachining techniques such as anisotropic etching can be used to form the hinge assembly and diaphragm.
  • Such techniques include masking and etching and laser etching. (It is also believed that these techniques will enable the orientation of the reflective surfaces to be accurately controlled thus making it easier to arrange the one reflective surface parallel with the other.)
  • the interferometer may further comprise control means responsive to control signals to cause the diaphragm to move relatively to the support towards and away from the other reflective surface.
  • the control means may comprise a pair of electrodes for connection in to a control circuit for generating an electrostatic field wherein the position of the diaphragm corresponds to the strength of the field.
  • the interferometer could be used as a pressure sensor due to the sensitive mounting arrangement of the diaphragm. For example pressure changes due to acoustic fields would cause the diaphragm to oscillate thus modulating a single wavelength incident optical wave. This would fin application in microphones and hydrophones.
  • the other reflective surface may be provided on a facing surface of a superstrate positioned adjacent the substrate.
  • the superstrate may conveniently be formed of glass.
  • the superstrate and substrate are connected together via an intermediate spacer layer since this will form a compact construction.
  • the interferometer may be used to demultiplex a wavelength division multiplexed signal or to define a laser cavity. In the latter case, a suitable gain medium would be positioned between the reflective surfaces.
  • Another application for which interferometers according to the invention are particularly applicable is in the construction of an optical beam modulator.
  • the use of a diaphragm enables the size of the separation of the reflective surfaces to be rapidly changed, for example at kilohertz rates. If a single wavelength beam is incident on the interferometer, this can be modulated by moving the diaphragm between two positions at one of which the beam is transmitted and at the other of which the beam is not transmitted.
  • the interferometer can be used as a wavelength switch when beams of radiation centred on two different wavelengths are incident on the interferometer.
  • the size of the gap it can be arranged that one wavelength is transmitted while the other is back reflected.
  • FIGS 3 and 4 illustrate the performance of the interferometer with two different gaps.
  • the interferometer shown in Figures 1 ' and 2 comprises a single crystal .silicon substrate 1 having four integral walls 2-5 forming a square.
  • a diaphragm 6 is suspended from upper portions of the walls 2-5 within a central aperture 7 by a hinge assembly comprising four bridges 8-11 each having a typical length in the range 1-5 mm.
  • the hinge assembly is integral with both the substrate 1 and the diaphragm 6. This structure is formed by anisotropically etching the substrate 1.
  • a semi-reflective coating 12 is provided on a polished upper surface of the diaphragm 6.
  • a spacer layer 13 having a typical thickness in the range 5-50 ⁇ m is grown around the perimeter of the substrate 1 and a glass superstrate 14 is bonded to the spacer layer 13.
  • An air gap 15 is defined between the superstrate 14 and the substrate 1.
  • a portion 16 of the surface of the superstrate 14 facing the diaphragm 6 is polished and coated with a reflective coating to define a second reflective surface
  • a pair of transparent electrodes are coated on the surfaces 6, 16 and are connected to a control circuit (not shown) .
  • Suitable electrodes may be made from Indium Tin Oxide.
  • One electrode is indicated at 17 coupled with a contact pad 18. In a modification (not shown) one electrode could be on the surface of the diaphragm opposite the surface 6.
  • a beam of radiation impinges on either the glass superstrate 14 or the underside of the diaphragm 6 and passes into the air gap 15. Internal reflection of the beam takes place in the air gap 15 due to the reflective surfaces 12, 16 resulting in constructive and destructive interference of the different wavelengths in the incoming beam. The result of this is that certain beams of very narrow bandwidth are transmitted through the air gap into the opposing substrate or superstrate while the majority of the wavelengths are back reflected.
  • the size of the air gap 15 (ie. the distance between the reflective surfaces 12, 16) can be adjusted by varying the electrostatic field generated between the electrodes. This causes movement of the diaphragm 6 relatively to the remainder of the substrate 1. A change in the size of the air gap causes a change in the wavelengths which are transmitted.
  • the use of a single crystal as the substrate is particularly advantageous, as previously mentioned, since the walls 2-4, diaphragm 6, and bridges 8-11 can be integrally formed by conventional micromachining techniques. This leads to a very cheap product compared with previous interferometers and also enables small air gaps to be defined. It should be noted that the interferometer would need no adjustment or * setting up since the cavity gap would be defined during manufacture. If desired, the size of the gap can be monitored by providing capacitor plates on the facing surfaces of the superstrate 14 and the bridge 6 and monitoring the capacitance between the plates. This could very simply be achieved by making use of the electrodes as capacitor plates while a voltage is applied between them.
  • Figures 3 and 4 illustrate graphically examples of the transmission characteristics of the interferometer with gaps of 12 ⁇ m and 48um respectively.
  • the reflectivity of the facing surfaces is 0.8 although it could be as high as 0.999.
  • the device may find application, inter ' alia; " as " ⁇ * * wavelength selective element in long external cavity lasers

Abstract

A Fabry-Perot interferometer comprises a single crystal silicon substrate (1) with an integrally formed diaphragm (6) supported between walls (2-5). A glass superstrate (14) is mounted adjacent the substrate (1) with a spacer (13) sandwiched therebetween. Facing surfaces (12, 16) of the diaphragm (6) and superstrate (14) are polished and suitably coated to define reflective surfaces and the position of the diaphragm may be altered to vary the response of the interferometer.

Description

FABRY-PEROT INTERFEROMETER The invention relates to Fabry-Perot interferometers.
A typical Fabry-Perot interferometer comprises a pair of substantially parallel reflective surfaces which are spaced apart to define a gap, at least one of the surfaces being movable relatively to the other to vary the size of the gap. In use, radiation comprising a number of different wavelengths impinges on the interferometer and passes into the gap and is then reflected between the two reflective surfaces. Constructive and destructive interference takes place leading to certain well defined wavelengths being transmitted through the interferometer while the remaining wavelengths are not transmitted. In typical Fabry-Perot interferometers a series of well defined transmission peaks are obtained corresponding to wavelengths which are transmitted, the wavelengths at which the peaks are situated being adjustable by varying the width of the gap.
Fabry-Perot interferometers have been used to a large extent tc define laser cavities but also find widespread use as multiple wavelength filters.
It is important that the reflective surfaces of the interferometer are as parallel as possible and it is also desirable to be able to change the separation between the reflective surfaces over a wide range.
The most common form of Fabry-Perot interferometer currently in use comprises two glass flats securely mounted on a stable support with facing surfaces of the flats being highly polished and having suitable coatings to define the reflective surfaces. The size of the gap may vary between one millimetre and several centimetres and is varied by using microadjusters and/or piezoelectric translation elements. This is a cumbersome and expensive arrangement and has a relatively large overall size, typically in the order of inches.
Another form of Fabry-Perot interferometer comprises a single solid glass flat, the opposite faces of which are polished and suitably coated to define the reflective surfaces. The only practical way in which the spacing or gap between the surfaces can be changed is by heating the flat to cause thermal expansion. This construction suffers from the disadvantage that the variation in separation obtainable is small and the disadvantage that it is very difficult to obtain accurately parallel surfaces.
In accordance with the present invention, in a Fabry-Perot interferometer one of the reflective surfaces is provided on a diaphragm mounted by a hinge assembly to a support.
This invention improves upon the known interferometers by making use of a diaphragm to provide one of the reflective surfaces and mounting the diaphragm by a hinge assembly to a support so that the position of the diaphragm can be easily changed. This enables the size of the gap to be easily and rapidly changed. For example, the interferometer can be used to demultiplex an incoming wavelength division multiplexed signal in which a number of different channels are carried by different wavelength signals. In this application, it is often necessary to retune rapidly from one channel to another and this can easily be achieved using an interferometer according to the invention. Preferably, the diaphragm and the hinge assembly are integral with the support. This leads to a compact and secure construction which is much cheaper to manufacture than known devices and involves far fewer components.
Conveniently, a single crystal such as silicon is used for the support, diaphragm and hinge assembly. This is particularly advantageous since conventional micromachining techniques such as anisotropic etching can be used to form the hinge assembly and diaphragm. Such techniques include masking and etching and laser etching. (It is also believed that these techniques will enable the orientation of the reflective surfaces to be accurately controlled thus making it easier to arrange the one reflective surface parallel with the other.)
The interferometer may further comprise control means responsive to control signals to cause the diaphragm to move relatively to the support towards and away from the other reflective surface. The control means may comprise a pair of electrodes for connection in to a control circuit for generating an electrostatic field wherein the position of the diaphragm corresponds to the strength of the field.
The interferometer could be used as a pressure sensor due to the sensitive mounting arrangement of the diaphragm. For example pressure changes due to acoustic fields would cause the diaphragm to oscillate thus modulating a single wavelength incident optical wave. This would fin application in microphones and hydrophones.
Typically, the other reflective surface may be provided on a facing surface of a superstrate positioned adjacent the substrate. The superstrate may conveniently be formed of glass.
Preferably, the superstrate and substrate are connected together via an intermediate spacer layer since this will form a compact construction.
As has previously been mentioned, the interferometer may be used to demultiplex a wavelength division multiplexed signal or to define a laser cavity. In the latter case, a suitable gain medium would be positioned between the reflective surfaces. Another application for which interferometers according to the invention are particularly applicable is in the construction of an optical beam modulator. The use of a diaphragm enables the size of the separation of the reflective surfaces to be rapidly changed, for example at kilohertz rates. If a single wavelength beam is incident on the interferometer, this can be modulated by moving the diaphragm between two positions at one of which the beam is transmitted and at the other of which the beam is not transmitted.
In another application, the interferometer can be used as a wavelength switch when beams of radiation centred on two different wavelengths are incident on the interferometer. By suitably choosing the size of the gap, it can be arranged that one wavelength is transmitted while the other is back reflected.
An example of a Fabry-Perot interferometer according to the invention will now be described with reference to the accompanying drawings, in which:- Figure 1 is a cross-section; and, Figure 2 is a plan; and,
Figures 3 and 4 illustrate the performance of the interferometer with two different gaps.
The interferometer shown in Figures 1 ' and 2 comprises a single crystal .silicon substrate 1 having four integral walls 2-5 forming a square. A diaphragm 6 is suspended from upper portions of the walls 2-5 within a central aperture 7 by a hinge assembly comprising four bridges 8-11 each having a typical length in the range 1-5 mm. The hinge assembly is integral with both the substrate 1 and the diaphragm 6. This structure is formed by anisotropically etching the substrate 1. A semi-reflective coating 12 is provided on a polished upper surface of the diaphragm 6. A spacer layer 13 having a typical thickness in the range 5-50 μm is grown around the perimeter of the substrate 1 and a glass superstrate 14 is bonded to the spacer layer 13. An air gap 15 is defined between the superstrate 14 and the substrate 1. A portion 16 of the surface of the superstrate 14 facing the diaphragm 6 is polished and coated with a reflective coating to define a second reflective surface.
A pair of transparent electrodes are coated on the surfaces 6, 16 and are connected to a control circuit (not shown) . Suitable electrodes may be made from Indium Tin Oxide. One electrode is indicated at 17 coupled with a contact pad 18. In a modification (not shown) one electrode could be on the surface of the diaphragm opposite the surface 6.
In use, a beam of radiation impinges on either the glass superstrate 14 or the underside of the diaphragm 6 and passes into the air gap 15. Internal reflection of the beam takes place in the air gap 15 due to the reflective surfaces 12, 16 resulting in constructive and destructive interference of the different wavelengths in the incoming beam. The result of this is that certain beams of very narrow bandwidth are transmitted through the air gap into the opposing substrate or superstrate while the majority of the wavelengths are back reflected.
The size of the air gap 15 (ie. the distance between the reflective surfaces 12, 16) can be adjusted by varying the electrostatic field generated between the electrodes. This causes movement of the diaphragm 6 relatively to the remainder of the substrate 1. A change in the size of the air gap causes a change in the wavelengths which are transmitted.
The use of a single crystal as the substrate is particularly advantageous, as previously mentioned, since the walls 2-4, diaphragm 6, and bridges 8-11 can be integrally formed by conventional micromachining techniques. This leads to a very cheap product compared with previous interferometers and also enables small air gaps to be defined. It should be noted that the interferometer would need no adjustment or* setting up since the cavity gap would be defined during manufacture. If desired, the size of the gap can be monitored by providing capacitor plates on the facing surfaces of the superstrate 14 and the bridge 6 and monitoring the capacitance between the plates. This could very simply be achieved by making use of the electrodes as capacitor plates while a voltage is applied between them.
Furthermore, due to their small size, a number of Fabry-Perot interferometers could be fabricated onto a single wafer which would be particularly useful in optical communication fields.
Figures 3 and 4 illustrate graphically examples of the transmission characteristics of the interferometer with gaps of 12μm and 48um respectively. In each case the reflectivity of the facing surfaces is 0.8 although it could be as high as 0.999.
The device may find application, inter 'alia; "as " ~* * wavelength selective element in long external cavity lasers

Claims

I . A Fabry-Perot interferometer in which one of the reflective surfaces is provided on a diaphragm mounted by a hinge assembly to a support.
2. An interferometer according to claim 1, wherein the diaphragm and the hinge assembly are integral with the support.
3. An interferometer according to claim 2, wherein the support, diaphragm, and hinge assembly are made from a single crystal.
4. An interferometer according to claim 3, wherein the crystal is silicon.
5. An interferometer according to any of the preceding claims, further comprising control means responsive to control signals to cause the diaphragm to move relatively to the support towards and away from the other reflective surface.
6. An interferometer according to claim 5, wherein the control means comprises a pair of electrodes for connection in a control circuit for generating an electrostatic field.
7. An interferometer according to any of the preceding claims, wherein the other reflective surface is formed on a superstrate adjacent the substrate.
8. An interferometer according to claim 7, wherein a spacer is positioned between the substrate and superstrate.
9. An interferometer according to claim 7 or claim 8, wherein the superstrate comprises glass.
10. A Fabry-Perot interferometer substantially as hereinbefore described with reference to the accompanying drawings.
II. A method of modulating a beam of radiation, the method comprising causing the beam to impinge on a Fabry-Perot interferometer according to any of the preceding claims; and causing the diaphragm to oscillate between two positions in response to control signals, whereby in one position the beam is transmitted through the interferometer while in the other position the beam is not transmitted.
PCT/GB1986/000631 1985-10-16 1986-10-16 Fabry-perot interferometer WO1987002470A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61505411A JPH0690329B2 (en) 1985-10-16 1986-10-16 Fabry-Perot-interferometer

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
GB858525462A GB8525462D0 (en) 1985-10-16 1985-10-16 Radiation deflector assembly
GB858525460A GB8525460D0 (en) 1985-10-16 1985-10-16 Movable member mounting
GB858525458A GB8525458D0 (en) 1985-10-16 1985-10-16 Positioning optical components & waveguides
GB858525461A GB8525461D0 (en) 1985-10-16 1985-10-16 Wavelength selection device
GB858525459A GB8525459D0 (en) 1985-10-16 1985-10-16 Mounting component to substrate
GB8525462 1985-10-23
GB8525461 1985-10-23
GB858526189A GB8526189D0 (en) 1985-10-23 1985-10-23 Fabry-perot interferometer
GB8525459 1985-10-23
GB8525460 1985-10-23
GB8525458 1985-10-23
GB8526189 1985-10-23

Publications (1)

Publication Number Publication Date
WO1987002470A1 true WO1987002470A1 (en) 1987-04-23

Family

ID=27546918

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/GB1986/000628 WO1987002472A1 (en) 1985-10-16 1986-10-16 Movable member-mounting
PCT/GB1986/000630 WO1987002475A1 (en) 1985-10-16 1986-10-16 Radiation deflector assembly
PCT/GB1986/000626 WO1987002474A1 (en) 1985-10-16 1986-10-16 Positioning optical components and waveguides
PCT/GB1986/000627 WO1987002518A1 (en) 1985-10-16 1986-10-16 Mounting a component to a substrate
PCT/GB1986/000629 WO1987002476A1 (en) 1985-10-16 1986-10-16 Wavelength selection device and method
PCT/GB1986/000631 WO1987002470A1 (en) 1985-10-16 1986-10-16 Fabry-perot interferometer

Family Applications Before (5)

Application Number Title Priority Date Filing Date
PCT/GB1986/000628 WO1987002472A1 (en) 1985-10-16 1986-10-16 Movable member-mounting
PCT/GB1986/000630 WO1987002475A1 (en) 1985-10-16 1986-10-16 Radiation deflector assembly
PCT/GB1986/000626 WO1987002474A1 (en) 1985-10-16 1986-10-16 Positioning optical components and waveguides
PCT/GB1986/000627 WO1987002518A1 (en) 1985-10-16 1986-10-16 Mounting a component to a substrate
PCT/GB1986/000629 WO1987002476A1 (en) 1985-10-16 1986-10-16 Wavelength selection device and method

Country Status (9)

Country Link
US (7) US4867532A (en)
EP (6) EP0219359B1 (en)
JP (5) JP2514343B2 (en)
AT (6) ATE50864T1 (en)
DE (6) DE3667864D1 (en)
ES (3) ES2013599B3 (en)
GR (3) GR3000242T3 (en)
SG (1) SG892G (en)
WO (6) WO1987002472A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0571107A1 (en) * 1992-05-19 1993-11-24 Vaisala Technologies Inc., Oy Optical force transducer based on a Fabry-Perot resonator, with a sweeping Fabry-Perot resonator as an element of the transducing part
US7164479B2 (en) 2001-11-29 2007-01-16 Sinvent As Optical displacement sensor
US7957004B2 (en) 2005-04-15 2011-06-07 Sinvent As Interference filter
JP2015092257A (en) * 2014-12-08 2015-05-14 セイコーエプソン株式会社 Wavelength variable filter
US11092478B2 (en) 2017-08-02 2021-08-17 X-Beamer Technologies Ltd. Retro-reflective interferometer

Families Citing this family (190)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2514343B2 (en) * 1985-10-16 1996-07-10 ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ Optical device and optical waveguide coupling device
GB2186708B (en) * 1985-11-26 1990-07-11 Sharp Kk A variable interferometric device and a process for the production of the same
US4744627A (en) * 1986-11-03 1988-05-17 General Electric Company Optical fiber holder
GB8707854D0 (en) * 1987-04-02 1987-05-07 British Telecomm Radiation deflector assembly
US4900118A (en) * 1987-05-22 1990-02-13 Furukawa Electric Co., Ltd. Multiple-fiber optical component and method for manufacturing of the same
US4787696A (en) * 1987-12-18 1988-11-29 Gte Laboratories Incorporated Mounting apparatus for optical fibers and lasers
DE3801764A1 (en) * 1988-01-22 1989-08-03 Ant Nachrichtentech WAVELENGTH MULTIPLEXER OR DEMULTIPLEXER, AND METHOD FOR PRODUCING THE WAVELENGTH MULTIPLEXER OR DEMULTIPLEXER
GB8805015D0 (en) * 1988-03-02 1988-03-30 British Telecomm Optical fibre locating apparatus
US4945400A (en) * 1988-03-03 1990-07-31 At&T Bell Laboratories Subassembly for optoelectronic devices
US4904036A (en) * 1988-03-03 1990-02-27 American Telephone And Telegraph Company, At&T Bell Laboratories Subassemblies for optoelectronic hybrid integrated circuits
EP0331332A3 (en) * 1988-03-03 1991-01-16 AT&T Corp. Device including a component in alignment with a substrate-supported waveguide
US4966433A (en) * 1988-03-03 1990-10-30 At&T Bell Laboratories Device including a component in alignment with a substrate-supported waveguide
US4897711A (en) * 1988-03-03 1990-01-30 American Telephone And Telegraph Company Subassembly for optoelectronic devices
DE3809597A1 (en) * 1988-03-22 1989-10-05 Fraunhofer Ges Forschung MICROMECHANICAL ACTUATOR
US4867524A (en) * 1988-09-08 1989-09-19 United Technologies Corporation Metallic bond for mounting of optical fibers to integrated optical chips
EP0361153A3 (en) * 1988-09-29 1991-07-24 Siemens Aktiengesellschaft Arrangement for coupling an optical fibre with a coupling window of a planar integrated optical device, and method for making such an arrangement
JPH02124504A (en) * 1988-11-02 1990-05-11 Toshiba Corp Photodetecting module
US5000534A (en) * 1988-12-05 1991-03-19 Nippon Sheet Glass Co., Ltd. Optical switch
US5017263A (en) * 1988-12-23 1991-05-21 At&T Bell Laboratories Optoelectronic device package method
DE59010539D1 (en) * 1989-01-09 1996-11-21 Siemens Ag Arrangement for optically coupling an optical waveguide around a photodiode on a silicon substrate
US4976506A (en) * 1989-02-13 1990-12-11 Pavlath George A Methods for rugged attachment of fibers to integrated optics chips and product thereof
US4997253A (en) * 1989-04-03 1991-03-05 Tektronix, Inc. Electro-optical transducer module and a method of fabricating such a module
US5069419A (en) * 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
US5243673A (en) * 1989-08-02 1993-09-07 E. I. Du Pont De Nemours And Company Opto-electronic component having positioned optical fiber associated therewith
GB8919220D0 (en) * 1989-08-24 1989-10-04 British Telecomm Diffraction grating assembly
US5026138A (en) * 1989-08-29 1991-06-25 Gte Laboratories Incorporated Multi-fiber alignment package for tilted facet optoelectronic components
DE4002490A1 (en) * 1989-08-31 1991-08-01 Bodenseewerk Geraetetech METHOD FOR ATTACHING ELECTRO-OPTICAL COMPONENTS TO INTEGRATED-OPTICAL WAVE GUIDES
CA2025167A1 (en) * 1989-09-25 1991-03-26 Frederick W. Freyre Method and apparatus for signal multiplexing/demultiplexing
US5011249A (en) * 1989-12-20 1991-04-30 Raychem Corp. Circuit for the transmission of optical signals
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
US5168385A (en) * 1990-01-24 1992-12-01 Canon Kabushiki Kaisha Optical device and producing method therefor
US5144498A (en) * 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5042889A (en) * 1990-04-09 1991-08-27 At&T Bell Laboratories Magnetic activation mechanism for an optical switch
US5195154A (en) * 1990-04-27 1993-03-16 Ngk Insulators, Ltd. Optical surface mount technology (o-smt), optical surface mount circuit (o-smc), opto-electronic printed wiring board (oe-pwb), opto-electronic surface mount device (oe-smd), and methods of fabricating opto-electronic printed wiring board
US5023881A (en) * 1990-06-19 1991-06-11 At&T Bell Laboratories Photonics module and alignment method
GB9014639D0 (en) * 1990-07-02 1990-08-22 British Telecomm Optical component packaging
DE4022026C2 (en) * 1990-07-11 1998-11-12 Siemens Ag Arrangement for optically coupling a laser amplifier chip to an optical fiber by means of a lens
US5109455A (en) * 1990-08-03 1992-04-28 Cts Corporation Optic interface hybrid
US5124281A (en) * 1990-08-27 1992-06-23 At&T Bell Laboratories Method of fabricating a photonics module comprising a spherical lens
US5218420A (en) * 1991-04-11 1993-06-08 The Boeing Company Optical resonance accelerometer
US5142414A (en) * 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5155778A (en) * 1991-06-28 1992-10-13 Texas Instruments Incorporated Optical switch using spatial light modulators
US5162872A (en) * 1991-07-02 1992-11-10 The United States Of America As Represented The Secretary Of The Air Force Tilt/shear immune tunable fabry-perot interferometer
EP0522417A1 (en) * 1991-07-09 1993-01-13 Sumitomo Electric Industries, Limited Light-receiving apparatus with optical fiber connection
US5586013A (en) * 1991-07-19 1996-12-17 Minnesota Mining And Manufacturing Company Nonimaging optical illumination system
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5173959A (en) * 1991-09-13 1992-12-22 Gte Laboratories Incorporated Method and apparatus for assembling a fiber array
FR2681440B1 (en) * 1991-09-17 1994-11-04 Commissariat Energie Atomique OPTICAL SWITCH AND MANUFACTURING METHOD THEREOF.
US5276756A (en) * 1991-12-06 1994-01-04 Amoco Corporation High speed electro-optical signal translator
US5909280A (en) * 1992-01-22 1999-06-01 Maxam, Inc. Method of monolithically fabricating a microspectrometer with integrated detector
US6147756A (en) * 1992-01-22 2000-11-14 Northeastern University Microspectrometer with sacrificial layer integrated with integrated circuit on the same substrate
WO1993015424A1 (en) * 1992-01-28 1993-08-05 British Telecommunications Public Limited Company Alignment of integrated optical components
US5280173A (en) * 1992-01-31 1994-01-18 Brown University Research Foundation Electric and electromagnetic field sensing system including an optical transducer
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
SE515191C2 (en) * 1992-05-05 2001-06-25 Volvo Ab Process for manufacturing a pressure measuring device and pressure measuring device
NL9200884A (en) * 1992-05-20 1993-12-16 Framatome Connectors Belgium CONNECTOR ASSEMBLY.
US5271597A (en) * 1992-05-29 1993-12-21 Ic Sensors, Inc. Bimetallic diaphragm with split hinge for microactuator
US5253311A (en) * 1992-11-02 1993-10-12 The United States Of America As Represented By The Secretary Of The Army Device and method for performing optical coupling without pigtails
US5343548A (en) * 1992-12-15 1994-08-30 International Business Machines Corporation Method and apparatus for batch, active alignment of laser arrays to fiber arrays
DE4301236C1 (en) * 1993-01-19 1994-03-17 Ant Nachrichtentech Optical fibre coupling to opto-electrical transducer, e.g. photodiode - supports transducer parallel to angled end face of optical fibre at end of V-shaped reception groove for latter
GB2275787A (en) * 1993-03-05 1994-09-07 British Aerospace Silicon micro-mirror unit
JP2842132B2 (en) * 1993-03-05 1998-12-24 松下電器産業株式会社 Optical device
US5457573A (en) * 1993-03-10 1995-10-10 Matsushita Electric Industrial Co., Ltd. Diffraction element and an optical multiplexing/demultiplexing device incorporating the same
JPH06334262A (en) * 1993-03-23 1994-12-02 Mitsubishi Electric Corp Semiconductor laser array device, semiconductor laser device, and their manufacture
US5343542A (en) * 1993-04-22 1994-08-30 International Business Machines Corporation Tapered fabry-perot waveguide optical demultiplexer
DE4320194A1 (en) * 1993-06-18 1994-12-22 Sel Alcatel Ag Device for the adjustment-free coupling of a plurality of optical fibers to a laser array
US5345521A (en) * 1993-07-12 1994-09-06 Texas Instrument Incorporated Architecture for optical switch
GB2280544B (en) * 1993-07-30 1997-01-08 Northern Telecom Ltd Providing optical coupling with single crystal substrate mounted electro-optic transducers
JP3302458B2 (en) * 1993-08-31 2002-07-15 富士通株式会社 Integrated optical device and manufacturing method
DE4334578C2 (en) * 1993-10-11 1999-10-07 Dirk Winfried Rossberg Spectrally tunable infrared sensor
US6012855A (en) * 1993-11-09 2000-01-11 Hewlett-Packard Co. Method and apparatus for parallel optical data link
US5500761A (en) * 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
SE503905C2 (en) * 1994-03-16 1996-09-30 Ericsson Telefon Ab L M Process for producing an optocomponent and an optocomponent
FR2717581A1 (en) * 1994-03-18 1995-09-22 Sea N Optic Sa Displacement detection device by deflection of light beam from optical fiber.
SE513183C2 (en) * 1994-03-18 2000-07-24 Ericsson Telefon Ab L M Process for producing an optocomponent and nested optocomponent
US7839556B2 (en) * 1994-05-05 2010-11-23 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7826120B2 (en) * 1994-05-05 2010-11-02 Qualcomm Mems Technologies, Inc. Method and device for multi-color interferometric modulation
DE4431285C1 (en) * 1994-09-02 1995-12-07 Ant Nachrichtentech Semiconductor laser module esp. for coupling into optical waveguide
US5553182A (en) * 1995-02-14 1996-09-03 Mcdonnell Douglas Corporation Alignment fixture and associated method for controllably positioning on optical fiber
US7898722B2 (en) * 1995-05-01 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical device with restoring electrode
US5606635A (en) * 1995-06-07 1997-02-25 Mcdonnell Douglas Corporation Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method
US5602955A (en) * 1995-06-07 1997-02-11 Mcdonnell Douglas Corporation Microactuator for precisely aligning an optical fiber and an associated fabrication method
WO1998012587A1 (en) * 1995-06-07 1998-03-26 Mcdonnell Douglas Corporation An alignment apparatus for precisely aligning an optical fiber and an associated fabrication method
DE69618035T2 (en) * 1995-06-30 2002-07-11 Whitaker Corp DEVICE FOR ALIGNING AN OPTOELECTRONIC COMPONENT
US6324192B1 (en) 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
GB9521100D0 (en) * 1995-10-16 1995-12-20 Hewlett Packard Ltd Optical connector
FR2740550B1 (en) * 1995-10-27 1997-12-12 Schlumberger Ind Sa FILTER FOR ELECTROMAGNETIC RADIATION AND DEVICE FOR DETERMINING A CONCENTRATION OF GAS COMPRISING SUCH A FILTER
US5659647A (en) * 1995-10-30 1997-08-19 Sandia Corporation Fiber alignment apparatus and method
US7907319B2 (en) * 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
SE512121C2 (en) * 1995-12-19 2000-01-31 Ericsson Telefon Ab L M A method of passively aligning a waveguide on a substrate
US5659641A (en) * 1995-12-22 1997-08-19 Corning, Inc. Optical circuit on printed circuit board
US5872880A (en) * 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus
US5862283A (en) * 1996-08-28 1999-01-19 Hewlett-Packard Company Mounting a planar optical component on a mounting member
EP0837356B1 (en) * 1996-10-17 2003-12-03 BRITISH TELECOMMUNICATIONS public limited company Tunable optical filter
US7830588B2 (en) * 1996-12-19 2010-11-09 Qualcomm Mems Technologies, Inc. Method of making a light modulating display device and associated transistor circuitry and structures thereof
US5940558A (en) * 1997-01-02 1999-08-17 Lucent Technologies, Inc. Optical packaging assembly for transmissive devices
IT1288435B1 (en) * 1997-01-28 1998-09-22 Pirelli TIRE AND TREAD BAND FOR TIRES PARTICULARLY FOR TRUCKS AND SIMILAR
US5970200A (en) * 1997-03-21 1999-10-19 Kabushiki Kaisha Toshiba Apparatus having optical components and a manufacturing method thereof
US5896481A (en) * 1997-05-30 1999-04-20 The Boeing Company Optical subassembly with a groove for aligning an optical device with an optical fiber
US5994700A (en) * 1997-09-04 1999-11-30 Lockheed Martin Energy Research Corporation FTIR spectrometer with solid-state drive system
US6014477A (en) * 1997-09-09 2000-01-11 At&T Corp. Article comprising a photostrictive switching element
FR2768812B1 (en) * 1997-09-19 1999-10-22 Commissariat Energie Atomique FABRY-PEROT INTERFEROMETER TUNABLE INTEGRATED
US6438149B1 (en) 1998-06-26 2002-08-20 Coretek, Inc. Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
CN1179191C (en) 1997-12-29 2004-12-08 核心科技公司 Microelectromechanically, tunable, confocel, VCSEL and fabry-perot filter
WO1999042876A1 (en) 1998-02-23 1999-08-26 Huber & Suhner Ag Positioning system for positioning and attaching optical fibres and connectors provided with this positioning system
US5981975A (en) * 1998-02-27 1999-11-09 The Whitaker Corporation On-chip alignment fiducials for surface emitting devices
US6085007A (en) * 1998-02-27 2000-07-04 Jiang; Ching-Long Passive alignment member for vertical surface emitting/detecting device
SE513858C2 (en) 1998-03-06 2000-11-13 Ericsson Telefon Ab L M Multilayer structure and method of manufacturing multilayer modules
US6095697A (en) * 1998-03-31 2000-08-01 Honeywell International Inc. Chip-to-interface alignment
US8928967B2 (en) * 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
KR100703140B1 (en) * 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 Interferometric modulation and its manufacturing method
FI116753B (en) * 1998-04-17 2006-02-15 Valtion Teknillinen Wavelength adjustable laser arrangement
US6584126B2 (en) 1998-06-26 2003-06-24 Coretek, Inc. Tunable Fabry-Perot filter and tunable vertical cavity surface emitting laser
US6813291B2 (en) 1998-06-26 2004-11-02 Coretek Inc Tunable fabry-perot filter and tunable vertical cavity surface emitting laser
US6463190B1 (en) 1998-10-16 2002-10-08 Japan Aviation Electronics Industry Limited Optical switch and method of making the same
US6585427B2 (en) 1999-01-11 2003-07-01 Intel Corporation Flexure coupled to a substrate for maintaining the optical fibers in alignment
US6227724B1 (en) * 1999-01-11 2001-05-08 Lightlogic, Inc. Method for constructing an optoelectronic assembly
US6207950B1 (en) 1999-01-11 2001-03-27 Lightlogic, Inc. Optical electronic assembly having a flexure for maintaining alignment between optical elements
DE19902184C1 (en) * 1999-01-21 2000-09-21 Winter & Ibe Olympus Medical endoscope for viewing fluorescent marked areas
DE60021638T2 (en) * 1999-03-04 2006-05-24 Japan Aviation Electronics Industry, Ltd. Optical switch and method of making such a switch
US6742774B2 (en) 1999-07-02 2004-06-01 Holl Technologies Company Process for high shear gas-liquid reactions
US7538237B2 (en) 1999-07-02 2009-05-26 Kreido Laboratories Process for high shear gas-liquid reactions
US6471392B1 (en) 2001-03-07 2002-10-29 Holl Technologies Company Methods and apparatus for materials processing
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
DE19955759A1 (en) * 1999-11-20 2001-05-23 Colour Control Farbmestechnik Monochromator; has fixed spatial filter to limit solid angle of incident light, dispersion prism and monolithic micromechanical tilting mirror to control geometrical solid angle variation of radiation
US6295130B1 (en) * 1999-12-22 2001-09-25 Xerox Corporation Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer
EP1182487A4 (en) 2000-01-20 2005-12-14 Japan Science & Tech Agency Mechanical optical switch and method for manufacturing the same
US6836366B1 (en) * 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same
US6597461B1 (en) 2000-03-20 2003-07-22 Parvenu, Inc. Tunable fabry-perot interferometer using entropic materials
US6747775B2 (en) * 2000-03-20 2004-06-08 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
US6665109B2 (en) 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
US6678084B2 (en) 2000-03-20 2004-01-13 Np Photonics, Inc. Methods of making mechanisms in which relative locations of elements are maintained during manufacturing
WO2001071277A1 (en) 2000-03-20 2001-09-27 Solus Micro Technologies, Inc. Electrostatically-actuated tunable optical components using entropic materials
US6747784B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Compliant mechanism and method of forming same
US6738145B2 (en) 2000-04-14 2004-05-18 Shipley Company, L.L.C. Micromachined, etalon-based optical fiber pressure sensor
NL1015131C1 (en) 2000-04-16 2001-10-19 Tmp Total Micro Products B V Apparatus and method for switching electromagnetic signals or beams.
US6496616B2 (en) 2000-04-28 2002-12-17 Confluent Photonics, Inc. Miniature monolithic optical demultiplexer
US6453087B2 (en) 2000-04-28 2002-09-17 Confluent Photonics Co. Miniature monolithic optical add-drop multiplexer
US6768590B2 (en) * 2000-05-19 2004-07-27 Shipley Company, L.L.C. Method of fabricating optical filters
US6717715B2 (en) 2000-07-27 2004-04-06 Holl Technologies Company Flexureless magnetic micromirror assembly
CA2314783A1 (en) * 2000-08-01 2002-02-01 Kenneth Lloyd Westra A method of making a high reflectivity micro mirror and a micro mirror
US6810176B2 (en) 2000-08-07 2004-10-26 Rosemount Inc. Integrated transparent substrate and diffractive optical element
US7003187B2 (en) 2000-08-07 2006-02-21 Rosemount Inc. Optical switch with moveable holographic optical element
JP2002082292A (en) * 2000-09-06 2002-03-22 Japan Aviation Electronics Industry Ltd Optical switch
KR100361593B1 (en) * 2000-11-23 2002-11-22 주식회사일진 Optical integrated circuit device having protrusion, fabrication method of the same and module of optical communication transmission and receiving apparatus using the same
DE10061765A1 (en) * 2000-12-12 2003-03-06 Colour Control Farbmestechnik Micromechanical monochromator with integrated aperture stop has at least one of its aperture stops as constituent of monolithic body of micromechanical torsion diffraction grid
US6516131B1 (en) 2001-04-04 2003-02-04 Barclay J. Tullis Structures and methods for aligning fibers
US6830806B2 (en) 2001-04-12 2004-12-14 Kreido Laboratories Methods of manufacture of electric circuit substrates and components having multiple electric characteristics and substrates and components so manufactured
US6965721B1 (en) * 2001-04-18 2005-11-15 Tullis Barclay J Integrated manufacture of side-polished fiber optics
JP4720022B2 (en) * 2001-05-30 2011-07-13 ソニー株式会社 OPTICAL MULTILAYER STRUCTURE, ITS MANUFACTURING METHOD, OPTICAL SWITCHING DEVICE, AND IMAGE DISPLAY DEVICE
US6618519B2 (en) * 2001-07-16 2003-09-09 Chromux Technologies, Inc. Switch and variable optical attenuator for single or arrayed optical channels
US6787246B2 (en) 2001-10-05 2004-09-07 Kreido Laboratories Manufacture of flat surfaced composites comprising powdered fillers in a polymer matrix
US6658032B2 (en) 2001-10-05 2003-12-02 Pranalytica, Inc. Automated laser wavelength selection system and method
US6775436B1 (en) 2002-02-26 2004-08-10 General Dynamics Advanced Technology Systems, Inc. Optical fiber U-turn apparatus and method
US6987901B2 (en) * 2002-03-01 2006-01-17 Rosemount, Inc. Optical switch with 3D waveguides
US6859321B2 (en) * 2002-03-29 2005-02-22 Massachusetts Institute Of Technology Low voltage tunable photonic crystal with large defects as wavelength routing
US6869231B2 (en) * 2002-05-01 2005-03-22 Jds Uniphase Corporation Transmitters, receivers, and transceivers including an optical bench
WO2003098302A2 (en) * 2002-05-15 2003-11-27 Hymite A/S Optical device receiving substrate and optical device holding carrier
JP2003344709A (en) * 2002-05-23 2003-12-03 Okano Electric Wire Co Ltd Fiber type optical module
JP3801099B2 (en) * 2002-06-04 2006-07-26 株式会社デンソー Tunable filter, manufacturing method thereof, and optical switching device using the same
US7098360B2 (en) 2002-07-16 2006-08-29 Kreido Laboratories Processes employing multiple successive chemical reaction process steps and apparatus therefore
CA2497615A1 (en) 2002-09-11 2004-03-25 Kreido Laboratories Methods and apparatus for high-shear mixing and reacting of materials
US6938687B2 (en) 2002-10-03 2005-09-06 Holl Technologies Company Apparatus for transfer of heat energy between a body surface and heat transfer fluid
DE10248924A1 (en) * 2002-10-17 2004-04-29 C. & E. Fein Gmbh & Co Kg power tool
US6996312B2 (en) * 2003-04-29 2006-02-07 Rosemount, Inc. Tunable fabry-perot filter
DE602004007432T2 (en) * 2003-05-23 2008-03-13 Rohm and Haas Electronic Materials, L.L.C., Marlborough An external cavity semiconductor laser containing an etalon and a method of making the same
US20050201668A1 (en) * 2004-03-11 2005-09-15 Avi Neta Method of connecting an optical element at a slope
US7187453B2 (en) * 2004-04-23 2007-03-06 Opsens Inc. Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer
JP3985269B2 (en) * 2004-09-29 2007-10-03 松下電工株式会社 Light switch
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7480432B2 (en) 2006-02-28 2009-01-20 Corning Incorporated Glass-based micropositioning systems and methods
US7743661B2 (en) * 2006-04-26 2010-06-29 Halliburton Energy Services, Inc. Fiber optic MEMS seismic sensor with mass supported by hinged beams
US20080049228A1 (en) * 2006-08-28 2008-02-28 Novaspectra, Inc. Fabry-perot interferometer array
GB2446887A (en) * 2007-05-04 2008-08-27 Zhou Rong A 1
JP2009003096A (en) * 2007-06-20 2009-01-08 Sumitomo Bakelite Co Ltd Optical waveguide module and manufacturing method of the same
DE102008051625B4 (en) 2008-10-02 2015-08-13 Erich Kasper Method for producing a component with an optical coupling window
US8036508B2 (en) * 2009-09-21 2011-10-11 Corning Incorporated Methods for passively aligning opto-electronic component assemblies on substrates
CN102384809B (en) * 2011-08-09 2013-05-08 天津大学 High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method
JP5987573B2 (en) 2012-09-12 2016-09-07 セイコーエプソン株式会社 Optical module, electronic device, and driving method
CN103984062B (en) * 2013-02-08 2015-10-14 源杰科技股份有限公司 The packaging technology of optical-electric module and optical-electric module
CN103457144A (en) * 2013-09-10 2013-12-18 中国科学院国家授时中心 Adjustable high-stable F-P integrated endoscope device
JP6685701B2 (en) * 2014-12-26 2020-04-22 キヤノン株式会社 Surface emitting laser, information acquisition device, imaging device, laser array, and method for manufacturing surface emitting laser
US9952067B2 (en) 2015-05-06 2018-04-24 Kulite Semiconductor Products, Inc. Systems and methods for optical measurements using multiple beam interferometric sensors
US9810594B2 (en) 2015-01-08 2017-11-07 Kulite Semiconductor Products, Inc. Thermally stable high temperature pressure and acceleration optical interferometric sensors
JP6576092B2 (en) 2015-04-30 2019-09-18 キヤノン株式会社 Surface emitting laser, information acquisition device, and imaging device
JP6510990B2 (en) * 2016-01-29 2019-05-08 浜松ホトニクス株式会社 Wavelength variable light source and driving method thereof
US10310197B1 (en) * 2018-09-17 2019-06-04 Waymo Llc Transmitter devices having bridge structures
US10534143B1 (en) 2018-09-20 2020-01-14 Waymo Llc Methods for optical system manufacturing
US11226457B2 (en) * 2020-05-28 2022-01-18 Cisco Technology, Inc. Laser and photonic chip integration
GB202017243D0 (en) 2020-10-30 2020-12-16 Npl Management Ltd Chip assembly and method of making a chip assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3040583A (en) * 1959-12-10 1962-06-26 United Aircraft Corp Optical pressure transducer
US3387531A (en) * 1964-11-05 1968-06-11 Zeiss Jena Veb Carl Devices for supporting, adjusting and displacing at least one of two optical plates located according to the fabry-perot principle

Family Cites Families (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1438974A (en) * 1920-11-13 1922-12-19 Western Electric Co Piezo-electrical voltage indicator
US2586531A (en) * 1950-04-20 1952-02-19 Donald L Gordon Wheeled support having ladder assembly
US2920529A (en) * 1952-05-23 1960-01-12 Blythe Richard Electronic control of optical and near-optical radiation
US3443243A (en) * 1965-06-23 1969-05-06 Bell Telephone Labor Inc Frequency selective laser
US3635562A (en) * 1968-11-12 1972-01-18 Comp Generale Electricite Optical interferometer for detection of small displacements
US3704996A (en) * 1969-10-23 1972-12-05 Licentia Gmbh Optical coupling arrangement
DE2242438A1 (en) * 1972-08-29 1974-03-07 Battelle Institut E V INFRARED MODULATOR
FR2359433A1 (en) * 1976-07-23 1978-02-17 Thomson Csf ADJUSTABLE RADIATION DISTRIBUTOR GUIDED BY OPTICAL FIBER BEAMS
US4169001A (en) * 1976-10-18 1979-09-25 International Business Machines Corporation Method of making multilayer module having optical channels therein
US4070516A (en) * 1976-10-18 1978-01-24 International Business Machines Corporation Multilayer module having optical channels therein
US4115747A (en) * 1976-12-27 1978-09-19 Heihachi Sato Optical modulator using a controllable diffraction grating
FR2426347A1 (en) * 1978-05-18 1979-12-14 Thomson Csf SEMICONDUCTOR LASER SOURCE AND ITS MANUFACTURING PROCESS
US4182544A (en) * 1978-08-03 1980-01-08 Sperry Rand Corporation Resonant multiplexer-demultiplexer for optical data communication systems
US4210923A (en) * 1979-01-02 1980-07-01 Bell Telephone Laboratories, Incorporated Edge illuminated photodetector with optical fiber alignment
JPS5596903A (en) * 1979-01-17 1980-07-23 Mitsubishi Electric Corp Photo switch
US4268113A (en) * 1979-04-16 1981-05-19 International Business Machines Corporation Signal coupling element for substrate-mounted optical transducers
JPS56126818A (en) * 1980-03-12 1981-10-05 Nippon Telegr & Teleph Corp <Ntt> Fine adjustment method of optical fiber axis aligning position
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
JPS575005A (en) * 1980-06-12 1982-01-11 Matsushita Electric Ind Co Ltd Optical branching filter
JPS577989A (en) * 1980-06-17 1982-01-16 Matsushita Electric Ind Co Ltd Mount for semiconductor laser
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
JPS57119314A (en) * 1981-01-16 1982-07-24 Omron Tateisi Electronics Co Connecting method between optical fiber and optical waveguide
JPS57172309A (en) * 1981-04-16 1982-10-23 Omron Tateisi Electronics Co Coupling method of optical fiber and optical waveguide
JPS5821832A (en) * 1981-07-31 1983-02-08 Toshiba Corp Apparatus for supplying semiconductor part
DE3138296A1 (en) * 1981-09-25 1983-04-28 Siemens AG, 1000 Berlin und 8000 München METHOD FOR POSITIONING AND FIXING OPTICAL COMPONENTS RELATIVELY TO OTHER
DE3142918A1 (en) * 1981-10-29 1983-05-11 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt OPTO-ELECTRICAL COUPLING
DE3206919A1 (en) * 1982-02-26 1983-09-15 Philips Patentverwaltung Gmbh, 2000 Hamburg DEVICE FOR OPTICALLY DISCONNECTING AND CONNECTING LIGHT GUIDES
US4466696A (en) * 1982-03-29 1984-08-21 Honeywell Inc. Self-aligned coupling of optical fiber to semiconductor laser or LED
SE435760B (en) * 1982-04-21 1984-10-15 Asea Ab FIBER OPTICAL GENDER
US4450563A (en) * 1982-04-23 1984-05-22 Westinghouse Electric Corp. Rapidly turnable laser system
GB2127987B (en) * 1982-09-29 1986-09-03 Standard Telephones Cables Ltd Integrated optic devices
US4468084A (en) * 1982-11-22 1984-08-28 Honeywell Inc. Integrated optical time integrating correlator
US4611884A (en) * 1982-11-24 1986-09-16 Magnetic Controls Company Bi-directional optical fiber coupler
FR2536867B1 (en) * 1982-11-30 1986-02-07 Thomson Csf METHOD FOR ALIGNING AN OPTOELECTRONIC DEVICE
EP0115843B1 (en) * 1983-02-04 1989-06-28 Kei Mori Apparatus for time-sharing light distribution
DE3307669A1 (en) * 1983-03-04 1984-09-06 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Coupling arrangement between an electrooptical and/or optoelectric semiconductor component and an optical fibre
JPS59172787A (en) * 1983-03-22 1984-09-29 Sharp Corp Submounting device for semiconductor laser
US4668093A (en) * 1983-06-13 1987-05-26 Mcdonnell Douglas Corporation Optical grating demodulator and sensor system
DE3321988A1 (en) * 1983-06-18 1984-12-20 Standard Elektrik Lorenz Ag, 7000 Stuttgart DEVICE FOR THE GAME-FREE MOVEMENT OF OBJECTS IN A COORDINATE SYSTEM
FR2549243B1 (en) * 1983-06-24 1986-01-10 Lyonnaise Transmiss Optiques DIRECT COUPLER WITH ASSOCIATED COMPONENTS FOR LIGHT WAVE
JPS60107532A (en) * 1983-11-17 1985-06-13 Toshiba Corp Multiwavelength spectrophotometer
CA1267468A (en) * 1983-11-21 1990-04-03 Hideaki Nishizawa Optical device package
DE3404613A1 (en) * 1984-02-09 1985-08-14 Siemens AG, 1000 Berlin und 8000 München DEVICE FOR DETACHABLE COUPLING A LIGHT WAVE GUIDE TO AN OPTOELECTRONIC COMPONENT
JPS60182403A (en) * 1984-02-29 1985-09-18 Sumitomo Metal Mining Co Ltd Optical demultiplexing element
JPS60257413A (en) * 1984-06-04 1985-12-19 Matsushita Electric Ind Co Ltd Photoelectric composite apparatus
CA1255382A (en) * 1984-08-10 1989-06-06 Masao Kawachi Hybrid optical integrated circuit with alignment guides
JPS6183515A (en) * 1984-09-18 1986-04-28 Honda Motor Co Ltd Light guide circuit unit
DE3566169D1 (en) * 1984-09-24 1988-12-15 Siemens Ag Opto-electronic device
JPS6187438A (en) * 1984-10-04 1986-05-02 Mitsubishi Electric Corp Optical signal trolley device
JPS6170828U (en) * 1984-10-16 1986-05-14
US4705349A (en) * 1985-01-18 1987-11-10 The United States Of America As Represented By The United States Department Of Energy Optical switch
US4699449A (en) * 1985-03-05 1987-10-13 Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee Optoelectronic assembly and method of making the same
GB8522316D0 (en) * 1985-09-09 1985-10-16 British Telecomm Optical fibre termination
JP2514343B2 (en) * 1985-10-16 1996-07-10 ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ Optical device and optical waveguide coupling device
US4779946A (en) * 1986-02-14 1988-10-25 American Telephone And Telegraph Company, At&T Bell Laboratories Microminiature optical assembly
US4820013A (en) * 1987-01-06 1989-04-11 Alps Electric Co., Ltd. LED array head
US4826272A (en) * 1987-08-27 1989-05-02 American Telephone And Telegraph Company At&T Bell Laboratories Means for coupling an optical fiber to an opto-electronic device
JPH06180207A (en) * 1992-12-11 1994-06-28 Sankyo Seiki Mfg Co Ltd Rotary angle detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3040583A (en) * 1959-12-10 1962-06-26 United Aircraft Corp Optical pressure transducer
US3387531A (en) * 1964-11-05 1968-06-11 Zeiss Jena Veb Carl Devices for supporting, adjusting and displacing at least one of two optical plates located according to the fabry-perot principle

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
IEEE JOURNAL OF QUANTUM ELECTRONICS, vol. QE-17, no. 12, December 1981, pages 2351-2355, IEEE, New York, US; H.J. EICHLER et al.: "Optical tuning of a silicon Fabry-Perot interferometer by a pulsed 1.06 um laser" *
OPTICAL ENGINEERING, vol. 15, no. 1, January-February 1976, pages 35-38, Society of Photo-Optical Instrumentation Engineers, Palos Verdes, US; E.G. LIERKE: "Infrared modulator for optical sensors based on a vibrating Fabry-Perot interferometer" *
OPTICAL ENGINEERING, vol. 20, no. 6, November/December 1981, pages 806-814, Society of Photo-Optical Instrumentation Engineers, Bellingham, Washington, US; P.D. ATHERTON et al.: "Tunable fabry-perot filters" *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0571107A1 (en) * 1992-05-19 1993-11-24 Vaisala Technologies Inc., Oy Optical force transducer based on a Fabry-Perot resonator, with a sweeping Fabry-Perot resonator as an element of the transducing part
US7164479B2 (en) 2001-11-29 2007-01-16 Sinvent As Optical displacement sensor
US7957004B2 (en) 2005-04-15 2011-06-07 Sinvent As Interference filter
JP2015092257A (en) * 2014-12-08 2015-05-14 セイコーエプソン株式会社 Wavelength variable filter
US11092478B2 (en) 2017-08-02 2021-08-17 X-Beamer Technologies Ltd. Retro-reflective interferometer

Also Published As

Publication number Publication date
JPH0769520B2 (en) 1995-07-31
DE3667335D1 (en) 1990-01-11
DE3669401D1 (en) 1990-04-12
DE3667864D1 (en) 1990-02-01
GR3000242T3 (en) 1991-03-15
JPS63501383A (en) 1988-05-26
WO1987002474A1 (en) 1987-04-23
EP0219358B1 (en) 1991-03-06
US4871244A (en) 1989-10-03
WO1987002475A1 (en) 1987-04-23
DE3689537D1 (en) 1994-02-24
GR3000376T3 (en) 1991-06-07
WO1987002476A1 (en) 1987-04-23
US4896936A (en) 1990-01-30
EP0219359A1 (en) 1987-04-22
DE3687063T2 (en) 1993-03-18
US4825262A (en) 1989-04-25
US4846930A (en) 1989-07-11
ATE100245T1 (en) 1994-01-15
EP0219357A1 (en) 1987-04-22
EP0223414A1 (en) 1987-05-27
ES2012346B3 (en) 1990-03-16
ATE50864T1 (en) 1990-03-15
WO1987002472A1 (en) 1987-04-23
JPH077149B2 (en) 1995-01-30
ATE48480T1 (en) 1989-12-15
EP0219356B1 (en) 1989-12-06
EP0219357B1 (en) 1989-12-27
ES2013599B3 (en) 1990-05-16
JPS63501600A (en) 1988-06-16
US4854658A (en) 1989-08-08
ATE49064T1 (en) 1990-01-15
JPS63501382A (en) 1988-05-26
EP0219358A1 (en) 1987-04-22
US4802727A (en) 1989-02-07
EP0226296B1 (en) 1992-11-04
JPS63501384A (en) 1988-05-26
ATE61487T1 (en) 1991-03-15
JPH0690329B2 (en) 1994-11-14
EP0219359B1 (en) 1990-03-07
DE3689537T2 (en) 1994-04-28
DE3677881D1 (en) 1991-04-11
ATE82076T1 (en) 1992-11-15
US4867532A (en) 1989-09-19
ES2011773B3 (en) 1990-02-16
EP0219356A1 (en) 1987-04-22
WO1987002518A1 (en) 1987-04-23
JPS63501385A (en) 1988-05-26
EP0223414B1 (en) 1994-01-12
JP2514343B2 (en) 1996-07-10
SG892G (en) 1992-03-20
EP0226296A1 (en) 1987-06-24
JPH0827432B2 (en) 1996-03-21
GR3000264T3 (en) 1991-03-15
DE3687063D1 (en) 1992-12-10

Similar Documents

Publication Publication Date Title
US4825262A (en) Fabry-perot interferometer
US6556338B2 (en) MEMS based variable optical attenuator (MBVOA)
US5022745A (en) Electrostatically deformable single crystal dielectrically coated mirror
EP0668490B1 (en) Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis
US6519073B1 (en) Micromechanical modulator and methods for fabricating the same
US6822798B2 (en) Tunable optical filter
US5914804A (en) Double-cavity micromechanical optical modulator with plural multilayer mirrors
US5949571A (en) Mars optical modulators
US6351329B1 (en) Optical attenuator
CN103257404A (en) MEMS Fabry-Perot cavity tunable filter
US20050157392A1 (en) Tunable-wavelength optical filter and method of manufacturing the same
JPH1195131A (en) Product including optical fiber fixed to micromechanical device
CA2137063A1 (en) Micromechanical modulator
JP2009080509A (en) Optical filter
CA2371415C (en) Fast attenuator
WO2015101049A1 (en) Tunable laser system
CN106707499A (en) Capacitive-feedback-type tunable Fabry-Perot filter
CN206248914U (en) Fp filter that capacitive feedback type is tunable
US5195374A (en) Sensor systems
CA1333452C (en) Fabry-perot interferometer
JP2005525604A (en) Method and device for variable optical attenuator
CN203480076U (en) MEMS Fabry-Perot cavity tunable filter
US7289262B2 (en) Optical attenuator element, and variable optical equalizer and optical amplifier that use this optical attenuator element
EP0672897B1 (en) Vibrating element transducer
JP2003057438A (en) Fabry-perot filter

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP US