WO1989012830A3 - Micro-machined accelerometer - Google Patents

Micro-machined accelerometer Download PDF

Info

Publication number
WO1989012830A3
WO1989012830A3 PCT/US1989/002680 US8902680W WO8912830A3 WO 1989012830 A3 WO1989012830 A3 WO 1989012830A3 US 8902680 W US8902680 W US 8902680W WO 8912830 A3 WO8912830 A3 WO 8912830A3
Authority
WO
WIPO (PCT)
Prior art keywords
mass
force
sense
support structure
patterns
Prior art date
Application number
PCT/US1989/002680
Other languages
French (fr)
Other versions
WO1989012830A2 (en
Inventor
W S Henrion
Original Assignee
Triton Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triton Technologies Inc filed Critical Triton Technologies Inc
Priority to DE68911294T priority Critical patent/DE68911294T2/en
Publication of WO1989012830A2 publication Critical patent/WO1989012830A2/en
Publication of WO1989012830A3 publication Critical patent/WO1989012830A3/en
Priority to HK98103998A priority patent/HK1004901A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Abstract

A spring-mass-support structure and associated electrical circuitry for measuring acceleration applied to the support of the structure is disclosed. According to one aspect of the invention, the spring-mass-support structure of the transducer is fabricated using micro-machining techniques of a silicon wafer. The structure includes E-shaped leaf springs of silicon dioxide which suspend a mass from a support structure. The springs as well as the support structure and the suspended mass, are formed by chemical etching through openings of opposite faces of a silicon wafer on which etch stop layer patterns are diffused. Sense and force conductive patterns are diffused onto the opposite faces of the suspended mass. The spring-mass-support structure is then sandwiched between opposite plates having corresponding sense and force conductive patterns which face such patterns on the suspended mass. According to another aspect of the invention, electrical circuitry is provided by which a sense voltage and a force voltage are applied between opposite sense and force conductive patterns of the opposite plates creating a sense electric field and a force electric field across the sense and force patterns of the mass. A feedback circuit arrangement is provided to substantially maintain the mass at a predetermined reference position between the support plates. Forward circuitry of the feedback arrangement produces a displacement signal in response to a voltage induced on the sense area of the mass as it moves in response to acceleration applied to the support structure. Feedback circuitry of the feedback arrangement produces an amount of charge in response to the displacement signal which is applied to the force conducting area of the mass. The force on said mass is proportional to the product of that charge and the force electric field intensity which causes the mass to remain close to a reference position between the plates. Alternative circuitry for providing analog or binary bit stream representations of acceleration is disclosed.
PCT/US1989/002680 1988-06-20 1989-06-19 Micro-machined accelerometer WO1989012830A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE68911294T DE68911294T2 (en) 1988-06-20 1989-06-19 MICRO WORKED ACCELERATOR.
HK98103998A HK1004901A1 (en) 1988-06-20 1998-05-08 Micro-machined accelerometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/209,415 US4922756A (en) 1988-06-20 1988-06-20 Micro-machined accelerometer
US209,415 1988-06-20

Publications (2)

Publication Number Publication Date
WO1989012830A2 WO1989012830A2 (en) 1989-12-28
WO1989012830A3 true WO1989012830A3 (en) 1990-02-08

Family

ID=22778667

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1989/002680 WO1989012830A2 (en) 1988-06-20 1989-06-19 Micro-machined accelerometer

Country Status (7)

Country Link
US (1) US4922756A (en)
EP (1) EP0407479B1 (en)
JP (1) JP2834245B2 (en)
CA (1) CA1334798C (en)
DE (1) DE68911294T2 (en)
HK (1) HK1004901A1 (en)
WO (1) WO1989012830A2 (en)

Families Citing this family (121)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623782B2 (en) * 1988-11-15 1994-03-30 株式会社日立製作所 Capacitance type acceleration sensor and semiconductor pressure sensor
US5253510A (en) * 1989-06-22 1993-10-19 I C Sensors Self-testable micro-accelerometer
US5103667A (en) * 1989-06-22 1992-04-14 Ic Sensors, Inc. Self-testable micro-accelerometer and method
US5115291A (en) * 1989-07-27 1992-05-19 Honeywell Inc. Electrostatic silicon accelerometer
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
GB9007483D0 (en) * 1990-04-03 1990-05-30 Kellett Michael A Servo accelerometer and control systems therefor
US5357817A (en) * 1990-04-19 1994-10-25 Charles Stark Draper Laboratory, Inc. Wide bandwidth stable member without angular accelerometers
CN1027011C (en) * 1990-07-12 1994-12-14 涂相征 Silicon-piezoelectric acceleration sensor and manufacture thereof
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
WO1992003740A1 (en) * 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
US5620931A (en) * 1990-08-17 1997-04-15 Analog Devices, Inc. Methods for fabricating monolithic device containing circuitry and suspended microstructure
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5209117A (en) * 1990-10-22 1993-05-11 Motorola, Inc. Tapered cantilever beam for sensors
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US5243278A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Differential angular velocity sensor that is sensitive in only one degree of freedom
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5168756A (en) * 1991-02-08 1992-12-08 Sundstrand Corporation Dithering coriolis rate and acceleration sensor utilizing a permanent magnet
DE4106933B4 (en) * 1991-03-05 2004-12-16 Robert Bosch Gmbh patterning methods
JP2761303B2 (en) * 1991-03-20 1998-06-04 株式会社日立製作所 Air bag system collision detection device
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
EP0606220B1 (en) * 1991-06-12 1997-03-26 Harris Corporation Method of manufacturing a semiconductor accelerometer
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
JP3184619B2 (en) * 1991-09-24 2001-07-09 キヤノン株式会社 Parallel plane holding mechanism and memory device and STM device using the same
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5357803A (en) * 1992-04-08 1994-10-25 Rochester Institute Of Technology Micromachined microaccelerometer for measuring acceleration along three axes
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
EP0590658A1 (en) * 1992-10-02 1994-04-06 CSEM, Centre Suisse d'Electronique et de Microtechnique S.A. Force measuring apparatus
FR2697090B1 (en) * 1992-10-21 1994-12-30 Suisse Electronique Micro Cent Force measuring device.
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5495414A (en) * 1993-04-07 1996-02-27 Ford Motor Company Integrated silicon automotive accelerometer and single-point impact sensor
JPH06350105A (en) * 1993-06-07 1994-12-22 Nec Corp Micromachine and its manufacture
US5415726A (en) * 1993-12-21 1995-05-16 Delco Electronics Corporation Method of making a bridge-supported accelerometer structure
US5777226A (en) * 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
US5484073A (en) * 1994-03-28 1996-01-16 I/O Sensors, Inc. Method for fabricating suspension members for micromachined sensors
DE69521889T2 (en) * 1994-03-28 2002-04-11 I O Sensors Inc SENSOR DESIGN WITH L-SHAPED SHOCK ABSORBER
GB9416683D0 (en) * 1994-08-18 1994-10-19 British Tech Group Accelerometer
US5962788A (en) * 1994-08-18 1999-10-05 Btg International Limited Transducer
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5473946A (en) * 1994-09-09 1995-12-12 Litton Systems, Inc. Accelerometer using pulse-on-demand control
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5528520A (en) * 1994-12-08 1996-06-18 Ford Motor Company Calibration circuit for capacitive sensors
US5583290A (en) * 1994-12-20 1996-12-10 Analog Devices, Inc. Micromechanical apparatus with limited actuation bandwidth
JP3610108B2 (en) * 1995-01-13 2005-01-12 キヤノン株式会社 Information processing device
US5517860A (en) * 1995-02-03 1996-05-21 E. I. Du Pont De Nemours And Company Film testing
JP3433401B2 (en) * 1995-05-18 2003-08-04 アイシン精機株式会社 Capacitive acceleration sensor
US6911727B1 (en) 1995-06-06 2005-06-28 Analog Devices, Inc. Package for sealing an integrated circuit die
FR2735580B1 (en) * 1995-06-14 1997-07-18 Commissariat Energie Atomique ACCELEROMETER OF THE WEIGHING EFFECT COMPENSATION TYPE AND METHOD FOR PRODUCING SUCH AN ACCELEROMETER
US5661240A (en) * 1995-09-25 1997-08-26 Ford Motor Company Sampled-data interface circuit for capacitive sensors
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5978972A (en) * 1996-06-14 1999-11-09 Johns Hopkins University Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US6035714A (en) * 1997-09-08 2000-03-14 The Regents Of The University Of Michigan Microelectromechanical capacitive accelerometer and method of making same
US6167757B1 (en) 1997-09-08 2001-01-02 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
US6718605B2 (en) 1997-09-08 2004-04-13 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
FR2769369B1 (en) 1997-10-08 1999-12-24 Sercel Rech Const Elect MOBILE PLATE ACCELEROMETER WITH ELECTROSTATIC FEEDBACK MOTOR
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
US6101864A (en) * 1997-12-17 2000-08-15 I/O Sensors, Inc. Method and apparatus for generation of test bitstreams and testing of close loop transducers
US6020272A (en) * 1998-10-08 2000-02-01 Sandia Corporation Method for forming suspended micromechanical structures
US6871544B1 (en) * 1999-03-17 2005-03-29 Input/Output, Inc. Sensor design and process
WO2000055652A1 (en) 1999-03-17 2000-09-21 Input/Output, Inc. Calibration of sensors
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US20020071169A1 (en) 2000-02-01 2002-06-13 Bowers John Edward Micro-electro-mechanical-system (MEMS) mirror device
US6753638B2 (en) 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6698295B1 (en) 2000-03-31 2004-03-02 Shipley Company, L.L.C. Microstructures comprising silicon nitride layer and thin conductive polysilicon layer
US7026697B2 (en) * 2000-03-31 2006-04-11 Shipley Company, L.L.C. Microstructures comprising a dielectric layer and a thin conductive layer
US6449098B1 (en) 2000-05-16 2002-09-10 Calient Networks, Inc. High uniformity lens arrays having lens correction and methods for fabricating the same
US6628041B2 (en) 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US6585383B2 (en) 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
US6560384B1 (en) 2000-06-01 2003-05-06 Calient Networks, Inc. Optical switch having mirrors arranged to accommodate freedom of movement
US6668108B1 (en) 2000-06-02 2003-12-23 Calient Networks, Inc. Optical cross-connect switch with integrated optical signal tap
US6483961B1 (en) 2000-06-02 2002-11-19 Calient Networks, Inc. Dual refraction index collimator for an optical switch
US6805008B2 (en) 2000-06-21 2004-10-19 Input/Output, Inc. Accelerometer with folded beams
US6643425B1 (en) 2000-08-17 2003-11-04 Calient Networks, Inc. Optical switch having switch mirror arrays controlled by scanning beams
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US7280014B2 (en) * 2001-03-13 2007-10-09 Rochester Institute Of Technology Micro-electro-mechanical switch and a method of using and making thereof
FI113704B (en) * 2001-03-21 2004-05-31 Vti Technologies Oy A method for manufacturing a silicon sensor and a silicon sensor
US7005775B2 (en) * 2001-05-09 2006-02-28 Chang Feng Wan Microfabricated torsional drive utilizing lateral electrostatic force
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
DE60232250D1 (en) * 2001-08-20 2009-06-18 Honeywell Int Inc Arch-shaped spring elements for microelectromechanical acceleration sensor
US6544863B1 (en) 2001-08-21 2003-04-08 Calient Networks, Inc. Method of fabricating semiconductor wafers having multiple height subsurface layers
US6854330B2 (en) 2001-10-26 2005-02-15 Nth Tech Corporation Accelerometer and methods thereof
US7211923B2 (en) 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US6597825B1 (en) 2001-10-30 2003-07-22 Calient Networks, Inc. Optical tap for an optical switch
AU2003226083A1 (en) * 2002-03-26 2003-10-13 The Charles Stark Draper Laboratory, Inc. Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same
FR2838820B1 (en) * 2002-04-17 2006-03-17 Sagem METHOD FOR CONSTITUTING A MECHANICAL RESONATOR WITH PLANE MONOLITHIC VIBRATION STRUCTURE MADE IN A CRYSTALLINE MATERIAL, AND RESONATOR SO CONSTITUTED
US7728339B1 (en) 2002-05-03 2010-06-01 Calient Networks, Inc. Boundary isolation for microelectromechanical devices
JP2003325972A (en) 2002-05-17 2003-11-18 Nintendo Co Ltd Game device changing sound and image in association with tilt operation, and game program therefor
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
ATE307990T1 (en) * 2002-11-25 2005-11-15 Suisse Electronique Microtech SPIRAL CLOCK MOVEMENT SPRING AND METHOD FOR THE PRODUCTION THEREOF
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US7140250B2 (en) * 2005-02-18 2006-11-28 Honeywell International Inc. MEMS teeter-totter accelerometer having reduced non-linearty
DE602006010245D1 (en) * 2005-12-28 2009-12-17 Cradlesafe Ltd PERSONAL WARNING DEVICE
US8187902B2 (en) * 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US8104346B2 (en) * 2008-11-10 2012-01-31 Westerngeco L.L.C. MEMS-based capacitive sensor
US7956783B2 (en) * 2009-01-29 2011-06-07 Analog Devices, Inc. Analog-to-digital converter using digital output as dither
WO2010096020A1 (en) * 2009-02-17 2010-08-26 Agency For Science, Technology And Research Miniaturized piezoelectric accelerometers
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
US9010170B2 (en) 2010-08-16 2015-04-21 Westerngeco L.L.C. Method and apparatus to test an accelerometer
US9217805B2 (en) 2010-10-01 2015-12-22 Westerngeco L.L.C. Monitoring the quality of particle motion data during a seismic acquisition
US9645029B2 (en) * 2014-04-07 2017-05-09 Infineon Technology Ag Force feedback loop for pressure sensors
JP6358913B2 (en) * 2014-09-30 2018-07-18 株式会社日立製作所 Acceleration sensor
JP2017187447A (en) * 2016-04-08 2017-10-12 アルプス電気株式会社 Sensor device
EP3477855B1 (en) 2017-10-25 2023-06-14 ams International AG Sensor arrangement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4144516A (en) * 1976-03-29 1979-03-13 Aine Harry E Solid state transducer and method of making same
USRE31459E (en) * 1976-02-09 1983-12-06 Harry E. Aine Solid state force transducer and method of making same
US4597003A (en) * 1983-12-01 1986-06-24 Harry E. Aine Chemical etching of a semiconductive wafer by undercutting an etch stopped layer

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3427540A (en) * 1965-09-21 1969-02-11 Honeywell Inc Electrostatic voltmeter having various sized input electrodes to provide plural ranges
SU434624A1 (en) * 1972-06-13 1974-06-30 Е. П. Курочкин , К. Л. Куликовский ELECTROSTATIC COMPENSATOR
JPS5018538A (en) * 1973-06-12 1975-02-27
US3877313A (en) * 1973-07-23 1975-04-15 Singer Co Electrostatic accelerometer
JPS54131974A (en) * 1978-04-03 1979-10-13 Singer Co Accelerometer
US4353254A (en) * 1980-12-18 1982-10-12 The Singer Company Control circuit for electro-static accelerometer
JPS5952365A (en) * 1982-09-20 1984-03-26 Tokyo Tatsuno Co Ltd Input and output device of sales data
FR2544865B1 (en) * 1983-04-21 1985-10-04 Onera (Off Nat Aerospatiale) ELECTROSTATIC SUSPENSION ACCELEROMETERS
US4584885A (en) * 1984-01-20 1986-04-29 Harry E. Aine Capacitive detector for transducers
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
FR2580389B2 (en) * 1985-04-16 1989-03-03 Sfena ELECTROSTATIC RECALL MICRO-FACTORY ACCELEROMETER
US4670092A (en) * 1986-04-18 1987-06-02 Rockwell International Corporation Method of fabricating a cantilever beam for a monolithic accelerometer
DE3774077D1 (en) * 1986-08-25 1991-11-28 Richard A Hanson TEST DIMENSIONS FOR AN ACCELEROMETER.
US4779463A (en) * 1987-01-13 1988-10-25 Systron Donner Corporation Servo accelerometer
US4805456A (en) * 1987-05-19 1989-02-21 Massachusetts Institute Of Technology Resonant accelerometer
JPH0672899B2 (en) * 1988-04-01 1994-09-14 株式会社日立製作所 Acceleration sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE31459E (en) * 1976-02-09 1983-12-06 Harry E. Aine Solid state force transducer and method of making same
US4144516A (en) * 1976-03-29 1979-03-13 Aine Harry E Solid state transducer and method of making same
US4597003A (en) * 1983-12-01 1986-06-24 Harry E. Aine Chemical etching of a semiconductive wafer by undercutting an etch stopped layer

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
IEEE Transactions on Electron Devices, Vol. ED-26, No. 12, December 1979, Roylance et al.: "A Batch-Fabricated Silicon Accelerometer", page 1911 - 1917. *
Proceedings of the IEEE, Vol. 70, No. 5, May 1982, Petersen: "Silicon as a Mechanical Material" page 420 - 457. *
Scientific American, April 1983, Angell et al.: "Silicon Micromechanical Devices", page 36 - 47. *

Also Published As

Publication number Publication date
CA1334798C (en) 1995-03-21
WO1989012830A2 (en) 1989-12-28
DE68911294T2 (en) 1994-07-07
DE68911294D1 (en) 1994-01-20
HK1004901A1 (en) 1998-12-11
JPH03501887A (en) 1991-04-25
EP0407479A1 (en) 1991-01-16
EP0407479B1 (en) 1993-12-08
JP2834245B2 (en) 1998-12-09
US4922756A (en) 1990-05-08

Similar Documents

Publication Publication Date Title
WO1989012830A3 (en) Micro-machined accelerometer
US4679434A (en) Integrated force balanced accelerometer
EP1718980B1 (en) Accelerometer
US6935175B2 (en) Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
US6496348B2 (en) Method to force-balance capacitive transducers
US5665253A (en) Method of manufacturing single-wafer tunneling sensor
US6230566B1 (en) Micromachined low frequency rocking accelerometer with capacitive pickoff
EP0718632B1 (en) Torsion beam accelerometer
US4574327A (en) Capacitive transducer
JP3657606B2 (en) Ultra-small electromechanical lateral accelerometer
US7146856B2 (en) Dynamically balanced capacitive pick-off accelerometer
US6327909B1 (en) Bistable mechanical sensors capable of threshold detection and automatic elimination of excessively high amplitude data
US5060039A (en) Permanent magnet force rebalance micro accelerometer
EP0322093A3 (en) Rectilinearly deflectable element fabricated from a single wafer
ATE322020T1 (en) FEEDBACK CIRCUIT FOR MICROMECHANICAL ACCELERATION SENSOR
WO2008021144A2 (en) Mems comb drive actuators and method of manufacture
US5959207A (en) Star patterned accelerometer reed
US5361635A (en) Multiple servo loop accelerometer with tunnel current sensors
EP0390721A1 (en) Electrostatic force nulling accelerometer arrangement
ITRM990223A1 (en) PIEZOELECTRIC ACCELERATION SENSOR.
RU2046346C1 (en) Accelerometer
JPH01262421A (en) Vibration detector

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): JP KP

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BE CH DE FR GB IT LU NL

AK Designated states

Kind code of ref document: A3

Designated state(s): JP KP

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): BE CH DE FR GB IT LU NL

WWE Wipo information: entry into national phase

Ref document number: 1989909087

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1989909087

Country of ref document: EP

WWG Wipo information: grant in national office

Ref document number: 1989909087

Country of ref document: EP