WO1993015318A1 - Kryopumpe mit einem im wesentlichen topfförmigen gehäuse - Google Patents
Kryopumpe mit einem im wesentlichen topfförmigen gehäuse Download PDFInfo
- Publication number
- WO1993015318A1 WO1993015318A1 PCT/EP1992/000869 EP9200869W WO9315318A1 WO 1993015318 A1 WO1993015318 A1 WO 1993015318A1 EP 9200869 W EP9200869 W EP 9200869W WO 9315318 A1 WO9315318 A1 WO 9315318A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- radiation shield
- pump
- pump according
- recess
- drain pipe
- Prior art date
Links
- 230000005855 radiation Effects 0.000 claims abstract description 31
- 238000011069 regeneration method Methods 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 230000008929 regeneration Effects 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 claims abstract description 6
- 238000009434 installation Methods 0.000 claims abstract 2
- 238000005086 pumping Methods 0.000 abstract description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Definitions
- the invention relates to a cryopump with the features of the preamble of claim 1.
- the present invention has for its object to provide a cryopump with the features of the preamble of claim 1 such that the disadvantages described no longer exist.
- this object is achieved in that the condensate collection space is arranged laterally in such a way that the pump can be regenerated even when mounted horizontally, without having to accept the disadvantages of long regeneration times and / or the risk of seals being damaged. Since there is always a defined "deepest point" to which the drain pipe is connected, the pump according to the invention also has the same advantages with regard to its regeneration properties as the pump already proposed for vertical mounting.
- cryopump is denoted by 1, its outer housing by 2, the cold head by 3 and the radiation shield by 4.
- Housing 2 and radiation shield 4 have an essentially cup-shaped design and are arranged concentrically to one another. Your axis is labeled 5.
- the open sides of the housing 2 and radiation shield 4 form the inlet opening 6 of the pump 1.
- the housing flange 7 is used to fasten the pump to a recipient - preferably via a valve (not shown). Entry area of the pump 1 the baffle 8, which is carried by the radiation screen 4.
- the cold head 3 extending laterally into the pump housing 2 and the radiation shield 4 is of two stages (stages 11, 12).
- the cold is generated, for example, with the aid of a refrigerator, not shown in detail, which operates according to the Gifford-McMahon principle.
- the first stage 11 of the cold head 3 is connected to the radiation shield 4 with good thermal conductivity, so that the radiation shield 4 and also the baffle 8 assume the temperature of this stage 11.
- the second stage 12 of the cold head is located in the pump interior 13. It carries the pump surfaces of the second stage, generally designated 15, via a copper block 14 that conducts heat well. These include outer pump surfaces 16, on which the condensable gases argon, nitrogen, oxygen, etc., accumulate.
- inner surface areas 17 covered with adsorption material are provided, which serve for the adsorption of light gases (hydrogen, helium, etc.).
- an attachment flange 21 is equipped with a recess 22 which is embedded in the inside of the respective flange.
- the recess 22 is arranged so that it is basically at the bottom, so that liquid condensate collects therein. If the recess 22 is located in the attachment flange 21, the functionally correct position of the recess 22 can be ensured by suitable mounting of this attachment flange.
- the radiation screen 4 has at least in its lower region a pouring part 23 which is shaped such that condensate flowing out of the screen flows into the recess 22.
- the radiation shield 4 expediently has an outwardly widening edge section 24.
- a collecting trough 27 is provided in the recess 22 at a distance. This prevents the flanges 7 or 21 from becoming undesirably cold.
- the drip pan 27 itself should have the lowest possible mass so that it quickly reaches the temperature of the liquid condensate. This avoids unnecessary evaporation of the condensate or ensures a quick drainage of the condensate.
- the drain pipe used to remove the condensate is designated 31. It opens directly into the recess 22 or - if the collecting trough 27 shown is present - into this collecting trough. It is led out radially through the respective flange 7 or 21. Outside the pump is the valve 32, which is opened to drain the condensate. This valve 32 is equipped with a heater 33 which protects the valve seal from harmful effects of cold due to the condensate.
- the radiation shield 4 is provided with a diameter extension on the bottom, so that the condensate collects laterally in the bottom region of the radiation shield 4 even when the pump 1 is mounted horizontally.
- the drain pipe 31, which is also led out through a bore 34 in the flange 7, is extended into the pump interior 13 in such a way that its inlet opening is located in the collecting space formed by the diameter expansion.
- a pump 1 designed in this way has the advantage that it can be installed both horizontally and vertically - and in all intermediate positions if it is ensured that the collecting space forms the lowest point with the inlet opening of the drain pipe 31.
- the bottom of the radiation shield 4 may also be curved inwards (cf. bottom line 35 shown in broken lines).
- an essentially crescent-shaped end plate 41 is provided which, together with the part of the radiation shield 4 located below, forms the collecting space.
- the end plate 41 is releasably attached to the edge of the radiation shield 4, so that it can be brought into the correct - lower - position in a simple manner.
- It can be equipped, for example, with a carrier 42, which has two sections 43 and 44 which surround the edge of the radiation shield 4, so that a secure hold is guaranteed.
- the drain pipe 31 can be led out of the pump 1 at any point, for example, as shown, again through a radial bore in the flange 7. It is essential that its inlet opening lies in the area of the end plate 41.
- this heater (heating conductor 45) is arranged on the inner section 43 of the carrier 42 for the end plate 41. It thus forms a unit with the end plate 41, so that when correctly installed, the sickle and heating are always in the collecting space.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4508482A JPH07502793A (ja) | 1992-01-23 | 1992-04-18 | ほぼコップ形のケーシングを有するクライオポンプ |
US08/256,796 US5542257A (en) | 1992-01-23 | 1992-04-18 | Cryogenic pump with an essentially cup-shaped housing |
DE59207962T DE59207962D1 (de) | 1992-01-23 | 1992-04-18 | Kryopumpe mit einem im wesentlichen topfförmigen gehäuse |
EP92909000A EP0608232B1 (de) | 1992-01-23 | 1992-04-18 | Kryopumpe mit einem im wesentlichen topfförmigen gehäuse |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EPP4201755.6 | 1992-01-23 | ||
DE4201755A DE4201755A1 (de) | 1992-01-23 | 1992-01-23 | Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1993015318A1 true WO1993015318A1 (de) | 1993-08-05 |
Family
ID=6450093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1992/000869 WO1993015318A1 (de) | 1992-01-23 | 1992-04-18 | Kryopumpe mit einem im wesentlichen topfförmigen gehäuse |
Country Status (5)
Country | Link |
---|---|
US (1) | US5542257A (de) |
EP (1) | EP0608232B1 (de) |
JP (1) | JPH07502793A (de) |
DE (2) | DE4201755A1 (de) |
WO (1) | WO1993015318A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9186601B2 (en) | 2012-04-20 | 2015-11-17 | Sumitomo (Shi) Cryogenics Of America Inc. | Cryopump drain and vent |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5261244A (en) * | 1992-05-21 | 1993-11-16 | Helix Technology Corporation | Cryogenic waterpump |
DE19632123A1 (de) * | 1996-08-09 | 1998-02-12 | Leybold Vakuum Gmbh | Kryopumpe |
US5782096A (en) * | 1997-02-05 | 1998-07-21 | Helix Technology Corporation | Cryopump with improved shielding |
US6155059A (en) * | 1999-01-13 | 2000-12-05 | Helix Technology Corporation | High capacity cryopump |
US6532749B2 (en) | 1999-09-22 | 2003-03-18 | The Coca-Cola Company | Stirling-based heating and cooling device |
US6272867B1 (en) | 1999-09-22 | 2001-08-14 | The Coca-Cola Company | Apparatus using stirling cooler system and methods of use |
US6266963B1 (en) | 1999-10-05 | 2001-07-31 | The Coca-Cola Company | Apparatus using stirling cooler system and methods of use |
US6263679B1 (en) | 2000-04-05 | 2001-07-24 | Helix Technology Corporation | Particulate dam for cryopump flange |
US6550255B2 (en) | 2001-03-21 | 2003-04-22 | The Coca-Cola Company | Stirling refrigeration system with a thermosiphon heat exchanger |
US6581389B2 (en) | 2001-03-21 | 2003-06-24 | The Coca-Cola Company | Merchandiser using slide-out stirling refrigeration deck |
US7037083B2 (en) | 2003-01-08 | 2006-05-02 | Brooks Automation, Inc. | Radiation shielding coating |
US20050274128A1 (en) * | 2004-06-10 | 2005-12-15 | Genesis | Cryopump with enhanced hydrogen pumping |
US7313922B2 (en) * | 2004-09-24 | 2008-01-01 | Brooks Automation, Inc. | High conductance cryopump for type III gas pumping |
CN100579619C (zh) * | 2005-02-08 | 2010-01-13 | 住友重机械工业株式会社 | 改进的低温泵 |
KR100914383B1 (ko) * | 2006-06-20 | 2009-08-28 | 주식회사 엘지화학 | 폴리헤테로고리 화합물, 이를 이용한 유기 전자 소자 및 이유기 전자 소자를 포함하는 전자 장치 |
KR101456889B1 (ko) * | 2007-01-17 | 2014-10-31 | 브룩스 오토메이션, 인크. | 압력 이탈이 없는 고용량 극저온 펌프 |
JP4436863B2 (ja) * | 2007-10-29 | 2010-03-24 | キヤノンアネルバテクニクス株式会社 | 再生構造を備えた冷却トラップユニット |
WO2010002884A2 (en) * | 2008-07-01 | 2010-01-07 | Brooks Automation, Inc. | Method and apparatus for providing temperature control to a cryopump |
US9174144B2 (en) | 2012-04-20 | 2015-11-03 | Sumitomo (Shi) Cryogenics Of America Inc | Low profile cryopump |
JP5570550B2 (ja) * | 2012-05-21 | 2014-08-13 | 住友重機械工業株式会社 | クライオポンプ |
CN109612193B (zh) * | 2013-04-24 | 2021-04-02 | 西门子医疗有限公司 | 包括两级低温制冷机及相关联的安装装置的组件 |
JP6659930B2 (ja) * | 2014-03-21 | 2020-03-04 | エドワーズ バキューム リミテッド ライアビリティ カンパニー | クライオポンプ・ハイブリッド前面アレイ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4719938A (en) * | 1985-01-22 | 1988-01-19 | Helix Technology Corporation | Self-cleaning valve and cryopump utilizing the same |
DE8804218U1 (de) * | 1988-03-29 | 1988-05-11 | Leybold Ag, 6450 Hanau, De |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3140820A (en) * | 1962-05-31 | 1964-07-14 | Robert E Clausing | Method for maintaining very high vacuum in a system |
FR2146100B2 (de) * | 1971-07-16 | 1974-03-29 | Air Liquide | |
DE2512235A1 (de) * | 1975-03-20 | 1976-09-23 | Bosch Gmbh Robert | Kuehlfalle fuer vakuumanlagen |
-
1992
- 1992-01-23 DE DE4201755A patent/DE4201755A1/de not_active Withdrawn
- 1992-04-18 US US08/256,796 patent/US5542257A/en not_active Expired - Lifetime
- 1992-04-18 EP EP92909000A patent/EP0608232B1/de not_active Expired - Lifetime
- 1992-04-18 JP JP4508482A patent/JPH07502793A/ja active Pending
- 1992-04-18 DE DE59207962T patent/DE59207962D1/de not_active Expired - Fee Related
- 1992-04-18 WO PCT/EP1992/000869 patent/WO1993015318A1/de active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4719938A (en) * | 1985-01-22 | 1988-01-19 | Helix Technology Corporation | Self-cleaning valve and cryopump utilizing the same |
DE8804218U1 (de) * | 1988-03-29 | 1988-05-11 | Leybold Ag, 6450 Hanau, De |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9186601B2 (en) | 2012-04-20 | 2015-11-17 | Sumitomo (Shi) Cryogenics Of America Inc. | Cryopump drain and vent |
Also Published As
Publication number | Publication date |
---|---|
DE4201755A1 (de) | 1993-07-29 |
EP0608232B1 (de) | 1997-01-22 |
EP0608232A1 (de) | 1994-08-03 |
US5542257A (en) | 1996-08-06 |
DE59207962D1 (de) | 1997-03-06 |
JPH07502793A (ja) | 1995-03-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0608232B1 (de) | Kryopumpe mit einem im wesentlichen topfförmigen gehäuse | |
US4516994A (en) | Apparatus for separating liquid droplets from gas | |
EP1389273B1 (de) | Verfahren zum abführen von in einem kraftstofffilter abgeschiedenem wasser und vorrichtung zur durchführung dieses verfahrens | |
DE60014809T2 (de) | Trockner für Verflüssiger mit integriertem Sammler | |
DE102007011256B4 (de) | Druckluftversorgungseinrichtung mit verbesserter Regenerationsfähigkeit | |
DE60017706T2 (de) | Filterpatrone und Kondensator | |
EP1669125A1 (de) | Verfahren zum Reinigen von Druckluft an Druckluftbeschaffungsanlagen von Kraftfahrzeugen sowie Kartusche hierfür | |
DE3232742A1 (de) | Trocknungsvorrichtung fuer lufttrockner | |
EP2984421B1 (de) | Sammler | |
DE102017011874A1 (de) | Abscheidevorrichtung zur Abscheidung eines Fluids aus Gas sowie Abscheideelement und Verbindungselement für eine diesbezügliche Abscheidevorrichtung | |
WO2003081147A1 (de) | Kältemittelkondensator | |
DE202005021558U1 (de) | Sammler für die flüssige Phase des Arbeitsmediums einer Klimaanlage | |
DE3232324C2 (de) | Refrigerator-betriebene Kryopumpe | |
DE10258735A1 (de) | Durchflussmengen-Steuerungsventil | |
DE102005057630A1 (de) | Lufttrockner | |
DE19547744A1 (de) | Kältegerät | |
EP1628106A2 (de) | Trockner-Filter-Einsatz für einen Sammler eines Kondensators, insbesondere für Kraftfahrzeug-Klimaanlagen | |
DE3603901A1 (de) | Fluidfilteranordnung | |
DE4446263A1 (de) | Ventilstab für ein Filtergehäuse mit einem Verschlußdeckel und einem topfförmigen Unterteil | |
WO2005005832A1 (de) | Kryopumpe | |
DE102006005514B4 (de) | Luftfilter für eine Luftansaugbaugruppe mit primären und sekundären Einlässen | |
EP1387134B1 (de) | Trockner für Kältemittelkondensator | |
DE3822184C1 (en) | Condenser for vapour (steam)-containing fluid flows | |
WO2004042292A1 (de) | Sammelbehälter, wärmetauscher und kältemittelkreislauf | |
DE2328565C3 (de) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): JP US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IT LU MC NL SE |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1992909000 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 08256796 Country of ref document: US |
|
WWP | Wipo information: published in national office |
Ref document number: 1992909000 Country of ref document: EP |
|
WWG | Wipo information: grant in national office |
Ref document number: 1992909000 Country of ref document: EP |