WO1995022170A1 - Forming a layer - Google Patents
Forming a layer Download PDFInfo
- Publication number
- WO1995022170A1 WO1995022170A1 PCT/GB1995/000259 GB9500259W WO9522170A1 WO 1995022170 A1 WO1995022170 A1 WO 1995022170A1 GB 9500259 W GB9500259 W GB 9500259W WO 9522170 A1 WO9522170 A1 WO 9522170A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- liquid
- chamber
- pulse
- workpiece
- shock
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/021—Isostatic pressure welding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/530,195 US5843535A (en) | 1994-02-09 | 1995-02-02 | forming a layer |
EP95907759A EP0693221B1 (en) | 1994-02-09 | 1995-02-09 | Forming a layer |
DE69500438T DE69500438T2 (en) | 1994-02-09 | 1995-02-09 | SHAPING ONE LAYER |
JP7521053A JPH08508854A (en) | 1994-02-09 | 1995-02-09 | Layer formation method |
KR1019950704265A KR100330376B1 (en) | 1994-02-09 | 1995-02-09 | Thin Film Forming Device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9402486.6 | 1994-02-09 | ||
GB9402486A GB9402486D0 (en) | 1994-02-09 | 1994-02-09 | Forming a layer |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1995022170A1 true WO1995022170A1 (en) | 1995-08-17 |
Family
ID=10750112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB1995/000259 WO1995022170A1 (en) | 1994-02-09 | 1995-02-09 | Forming a layer |
Country Status (8)
Country | Link |
---|---|
US (2) | US5843535A (en) |
EP (1) | EP0693221B1 (en) |
JP (1) | JPH08508854A (en) |
KR (1) | KR100330376B1 (en) |
AT (1) | ATE155611T1 (en) |
DE (1) | DE69500438T2 (en) |
GB (1) | GB9402486D0 (en) |
WO (1) | WO1995022170A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999003150A1 (en) * | 1997-07-11 | 1999-01-21 | Trikon Equipments Limited | Method of filling a recess |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9402486D0 (en) * | 1994-02-09 | 1994-03-30 | Electrotech Ltd | Forming a layer |
US6701941B1 (en) * | 1997-05-09 | 2004-03-09 | Semitool, Inc. | Method for treating the surface of a workpiece |
US6340435B1 (en) | 1998-02-11 | 2002-01-22 | Applied Materials, Inc. | Integrated low K dielectrics and etch stops |
US6413583B1 (en) | 1998-02-11 | 2002-07-02 | Applied Materials, Inc. | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound |
US6800571B2 (en) | 1998-09-29 | 2004-10-05 | Applied Materials Inc. | CVD plasma assisted low dielectric constant films |
US7510625B2 (en) * | 1999-03-23 | 2009-03-31 | Dynawave Corporation | Device and method of using explosive forces in a contained environment |
US6176970B1 (en) * | 1999-03-23 | 2001-01-23 | Dynawave Corporation | Device and method of using explosive forces in a contained liquid environment |
US6395647B1 (en) * | 1999-09-02 | 2002-05-28 | Micron Technology, Inc. | Chemical treatment of semiconductor substrates |
US20040006164A1 (en) * | 2002-01-23 | 2004-01-08 | Abu-Isa Ismat A. | Intumescent fire retardant polymeric composition |
TW587582U (en) * | 2003-06-11 | 2004-05-11 | Razor Usa Llc | Driving structure for manpower vehicle |
DE102006030364A1 (en) * | 2006-06-27 | 2008-01-03 | Siemens Ag | Method for removing a protective coating from a component |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2196566A (en) * | 1986-06-27 | 1988-05-05 | Ex Cell O Corp | Producing reinforced articles |
EP0516344A1 (en) * | 1991-05-28 | 1992-12-02 | Electrotech Limited | Method to fill a cavity in a substrate |
US5279316A (en) * | 1992-08-18 | 1994-01-18 | P.C.T. Systems, Inc. | Multiprocessing sonic bath system for semiconductor wafers |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3995581A (en) * | 1974-08-27 | 1976-12-07 | Smejda Richard K | Patterning and blending with lateral distribution channels and crosswise feeder systems |
EP0526889B1 (en) * | 1991-08-06 | 1997-05-07 | Nec Corporation | Method of depositing a metal or passivation fabric with high adhesion on an insulated semiconductor substrate |
US5474796A (en) * | 1991-09-04 | 1995-12-12 | Protogene Laboratories, Inc. | Method and apparatus for conducting an array of chemical reactions on a support surface |
GB9402486D0 (en) * | 1994-02-09 | 1994-03-30 | Electrotech Ltd | Forming a layer |
US5620524A (en) * | 1995-02-27 | 1997-04-15 | Fan; Chiko | Apparatus for fluid delivery in chemical vapor deposition systems |
-
1994
- 1994-02-09 GB GB9402486A patent/GB9402486D0/en active Pending
-
1995
- 1995-02-02 US US08/530,195 patent/US5843535A/en not_active Expired - Lifetime
- 1995-02-09 DE DE69500438T patent/DE69500438T2/en not_active Expired - Lifetime
- 1995-02-09 EP EP95907759A patent/EP0693221B1/en not_active Expired - Lifetime
- 1995-02-09 AT AT95907759T patent/ATE155611T1/en not_active IP Right Cessation
- 1995-02-09 JP JP7521053A patent/JPH08508854A/en active Pending
- 1995-02-09 KR KR1019950704265A patent/KR100330376B1/en not_active IP Right Cessation
- 1995-02-09 WO PCT/GB1995/000259 patent/WO1995022170A1/en active IP Right Grant
-
1998
- 1998-04-06 US US09/055,185 patent/US6019847A/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2196566A (en) * | 1986-06-27 | 1988-05-05 | Ex Cell O Corp | Producing reinforced articles |
EP0516344A1 (en) * | 1991-05-28 | 1992-12-02 | Electrotech Limited | Method to fill a cavity in a substrate |
US5279316A (en) * | 1992-08-18 | 1994-01-18 | P.C.T. Systems, Inc. | Multiprocessing sonic bath system for semiconductor wafers |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999003150A1 (en) * | 1997-07-11 | 1999-01-21 | Trikon Equipments Limited | Method of filling a recess |
GB2341490A (en) * | 1997-07-11 | 2000-03-15 | Trikon Equip Ltd | Method of filling a recess |
GB2341490B (en) * | 1997-07-11 | 2002-05-29 | Trikon Equip Ltd | Method of filling a recess |
US6423635B1 (en) * | 1997-07-11 | 2002-07-23 | Trikon Equipments Limited | Method of filling a recess |
Also Published As
Publication number | Publication date |
---|---|
DE69500438D1 (en) | 1997-08-21 |
EP0693221B1 (en) | 1997-07-16 |
DE69500438T2 (en) | 1998-04-02 |
ATE155611T1 (en) | 1997-08-15 |
US5843535A (en) | 1998-12-01 |
KR100330376B1 (en) | 2002-11-21 |
JPH08508854A (en) | 1996-09-17 |
GB9402486D0 (en) | 1994-03-30 |
US6019847A (en) | 2000-02-01 |
KR960702170A (en) | 1996-03-28 |
EP0693221A1 (en) | 1996-01-24 |
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