WO1995024275A3 - Highly abrasion-resistant, flexible coatings for soft substrates - Google Patents

Highly abrasion-resistant, flexible coatings for soft substrates Download PDF

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Publication number
WO1995024275A3
WO1995024275A3 PCT/US1995/002761 US9502761W WO9524275A3 WO 1995024275 A3 WO1995024275 A3 WO 1995024275A3 US 9502761 W US9502761 W US 9502761W WO 9524275 A3 WO9524275 A3 WO 9524275A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
abrasion
vacuum chamber
products
wear resistant
Prior art date
Application number
PCT/US1995/002761
Other languages
French (fr)
Other versions
WO1995024275A2 (en
Inventor
Rudolph Hugo Petrmichl
Bradley J Knapp
Fred M Kimock
Brian Kenneth Daniels
Original Assignee
Diamonex Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22764360&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO1995024275(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Diamonex Inc filed Critical Diamonex Inc
Priority to AT95913563T priority Critical patent/ATE276835T1/en
Priority to CA 2184736 priority patent/CA2184736C/en
Priority to JP7523566A priority patent/JPH10500609A/en
Priority to EP95913563A priority patent/EP0748259B1/en
Priority to DE69533546T priority patent/DE69533546T2/en
Publication of WO1995024275A2 publication Critical patent/WO1995024275A2/en
Publication of WO1995024275A3 publication Critical patent/WO1995024275A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/123—Treatment by wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/913—Material designed to be responsive to temperature, light, moisture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31507—Of polycarbonate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Abstract

An abrasion wear resistant coated substrate product is described comprising a substrate and an abrasion wear resistant coating material comprisisng carbon, hydrogen, silicon, and oxygen. The abrasion wear resistant coating material has the properties of Nanoindentation hardness in the range of about 2 to about 5 GPa and a strain to microcracking greater than about 1 % and a transparency greater than 85 % in the visible spectrum. The coated products of the present invention are suitable for use in optical applications such as ophthalmic lenses or laser bar code scanner windows. In the method for making the products, the substrate is first chemically cleaned to remove contaminants. In the second step, the substrate is inserted into a vacuum chamber, and the air in said chamber is evacuated. In the third step, the substrate surface is bombarded with energetic ions and/or reactive species to assist in the removal of residual hydrocarbons and surface oxides, and to activate the surface. After the substrate surface has been etched, a protective, abrasion-resistant coating is deposited by plasma or ion beam deposition. Once the chosen thickness of the coating has been achieved, the deposition process on the substrates is terminated, the vacuum chamber pressure is increased to atmospheric pressure, and the coated substrate products having improved abrasion-resistance are removed from the vacuum chamber.
PCT/US1995/002761 1994-03-03 1995-03-01 Highly abrasion-resistant, flexible coatings for soft substrates WO1995024275A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT95913563T ATE276835T1 (en) 1994-03-03 1995-03-01 HIGHLY ABRASION-RESISTANT, FLEXIBLE COATINGS FOR SOFT SUBSTRATES
CA 2184736 CA2184736C (en) 1994-03-03 1995-03-01 Highly abrasion-resistant, flexible coatings for soft substrates
JP7523566A JPH10500609A (en) 1994-03-03 1995-03-01 High wear resistance and flexible coatings for flexible substrates
EP95913563A EP0748259B1 (en) 1994-03-03 1995-03-01 Highly abrasion-resistant, flexible coatings for soft substrates
DE69533546T DE69533546T2 (en) 1994-03-03 1995-03-01 HIGH-ABRASIVE, FLEXIBLE COATINGS FOR SOFT SUBSTRATES

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/205,954 1994-03-03
US08/205,954 US5618619A (en) 1994-03-03 1994-03-03 Highly abrasion-resistant, flexible coatings for soft substrates

Publications (2)

Publication Number Publication Date
WO1995024275A2 WO1995024275A2 (en) 1995-09-14
WO1995024275A3 true WO1995024275A3 (en) 1995-10-05

Family

ID=22764360

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1995/002761 WO1995024275A2 (en) 1994-03-03 1995-03-01 Highly abrasion-resistant, flexible coatings for soft substrates

Country Status (6)

Country Link
US (2) US5618619A (en)
EP (1) EP0748259B1 (en)
JP (1) JPH10500609A (en)
AT (1) ATE276835T1 (en)
DE (1) DE69533546T2 (en)
WO (1) WO1995024275A2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station

Families Citing this family (132)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5508368A (en) * 1994-03-03 1996-04-16 Diamonex, Incorporated Ion beam process for deposition of highly abrasion-resistant coatings
US5846649A (en) * 1994-03-03 1998-12-08 Monsanto Company Highly durable and abrasion-resistant dielectric coatings for lenses
US6468642B1 (en) * 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US5918150A (en) * 1996-10-11 1999-06-29 Sharp Microelectronics Technology, Inc. Method for a chemical vapor deposition of copper on an ion prepared conductive surface
US5879775A (en) * 1996-12-12 1999-03-09 Eastman Kodak Compnay Protective inorganic and DLC coatings for plastic media such as plastic cards
EP0885983A1 (en) * 1997-06-19 1998-12-23 N.V. Bekaert S.A. Method for coating a substrate with a diamond like nanocomposite composition
US6110544A (en) 1997-06-26 2000-08-29 General Electric Company Protective coating by high rate arc plasma deposition
US6893720B1 (en) * 1997-06-27 2005-05-17 Nissin Electric Co., Ltd. Object coated with carbon film and method of manufacturing the same
US6086962A (en) 1997-07-25 2000-07-11 Diamonex, Incorporated Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source
US6077567A (en) * 1997-08-15 2000-06-20 University Of Cincinnati Method of making silica coated steel substrates
DE19748240C2 (en) * 1997-10-31 2001-05-23 Fraunhofer Ges Forschung Process for the corrosion-resistant coating of metal substrates by means of plasma polymerization and its application
US6054379A (en) 1998-02-11 2000-04-25 Applied Materials, Inc. Method of depositing a low k dielectric with organo silane
US6660656B2 (en) 1998-02-11 2003-12-09 Applied Materials Inc. Plasma processes for depositing low dielectric constant films
US6303523B2 (en) * 1998-02-11 2001-10-16 Applied Materials, Inc. Plasma processes for depositing low dielectric constant films
US6287990B1 (en) 1998-02-11 2001-09-11 Applied Materials, Inc. CVD plasma assisted low dielectric constant films
US6593247B1 (en) * 1998-02-11 2003-07-15 Applied Materials, Inc. Method of depositing low k films using an oxidizing plasma
US6627532B1 (en) * 1998-02-11 2003-09-30 Applied Materials, Inc. Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition
DE19808180A1 (en) * 1998-02-26 1999-09-09 Bosch Gmbh Robert Combined wear protection layer, method for producing the same, the objects coated with it and their use
US6548173B2 (en) * 1998-04-20 2003-04-15 Argonne National Laboratory Method of produce ultra-low friction carbon films
US6068884A (en) * 1998-04-28 2000-05-30 Silcon Valley Group Thermal Systems, Llc Method of making low κ dielectric inorganic/organic hybrid films
US6368678B1 (en) 1998-05-13 2002-04-09 Terry Bluck Plasma processing system and method
US6667553B2 (en) 1998-05-29 2003-12-23 Dow Corning Corporation H:SiOC coated substrates
US6159871A (en) 1998-05-29 2000-12-12 Dow Corning Corporation Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
US6147009A (en) * 1998-06-29 2000-11-14 International Business Machines Corporation Hydrogenated oxidized silicon carbon material
TW533228B (en) * 1998-07-27 2003-05-21 Advanced Refractory Tech Hardcoats for flat panel display substrates
US6974766B1 (en) * 1998-10-01 2005-12-13 Applied Materials, Inc. In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application
US6251802B1 (en) 1998-10-19 2001-06-26 Micron Technology, Inc. Methods of forming carbon-containing layers
US6475573B1 (en) * 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
US6277480B1 (en) * 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
JP2003501555A (en) * 1999-06-08 2003-01-14 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム Doped diamond-like carbon coating
US6399489B1 (en) 1999-11-01 2002-06-04 Applied Materials, Inc. Barrier layer deposition using HDP-CVD
US20040028906A1 (en) * 2000-01-04 2004-02-12 Anderson Jerrel Charles Diamond-like carbon coating on glass and plastic for added hardness and abrasion resistance
DE10003836C2 (en) * 2000-01-28 2002-04-25 Fraunhofer Ges Forschung Indentor and use of the same
US6749813B1 (en) 2000-03-05 2004-06-15 3M Innovative Properties Company Fluid handling devices with diamond-like films
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6795636B1 (en) 2000-03-05 2004-09-21 3M Innovative Properties Company Radiation-transmissive films on glass articles
ES2256110T3 (en) * 2000-05-09 2006-07-16 Kabushiki Kaisha Riken AMORFO CARBON FILM CONTAINING OXIDE.
EP1158088A3 (en) * 2000-05-26 2003-01-22 Voith Paper Patent GmbH Process and device for treating a fibrous suspension
US6524755B2 (en) 2000-09-07 2003-02-25 Gray Scale Technologies, Inc. Phase-shift masks and methods of fabrication
US6531398B1 (en) 2000-10-30 2003-03-11 Applied Materials, Inc. Method of depositing organosillicate layers
US6537733B2 (en) * 2001-02-23 2003-03-25 Applied Materials, Inc. Method of depositing low dielectric constant silicon carbide layers
US7316764B2 (en) * 2001-03-16 2008-01-08 4 Wave, Inc. System and method for performing sputter etching using independent ion and electron sources and a substrate biased with an a-symmetric bi-polar DC pulse signal
US7288293B2 (en) * 2001-03-27 2007-10-30 Apit Corp. S.A. Process for plasma surface treatment and device for realizing the process
US6709721B2 (en) 2001-03-28 2004-03-23 Applied Materials Inc. Purge heater design and process development for the improvement of low k film properties
US6472333B2 (en) 2001-03-28 2002-10-29 Applied Materials, Inc. Silicon carbide cap layers for low dielectric constant silicon oxide layers
US6486082B1 (en) * 2001-06-18 2002-11-26 Applied Materials, Inc. CVD plasma assisted lower dielectric constant sicoh film
US6926926B2 (en) * 2001-09-10 2005-08-09 Applied Materials, Inc. Silicon carbide deposited by high density plasma chemical-vapor deposition with bias
US6656837B2 (en) * 2001-10-11 2003-12-02 Applied Materials, Inc. Method of eliminating photoresist poisoning in damascene applications
CA2408113C (en) 2001-10-25 2005-10-04 Hoya Corporation Optical element having antireflection film
US6890850B2 (en) * 2001-12-14 2005-05-10 Applied Materials, Inc. Method of depositing dielectric materials in damascene applications
US6838393B2 (en) * 2001-12-14 2005-01-04 Applied Materials, Inc. Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide
US6699784B2 (en) 2001-12-14 2004-03-02 Applied Materials Inc. Method for depositing a low k dielectric film (K>3.5) for hard mask application
US6936309B2 (en) * 2002-04-02 2005-08-30 Applied Materials, Inc. Hardness improvement of silicon carboxy films
US20030194496A1 (en) * 2002-04-11 2003-10-16 Applied Materials, Inc. Methods for depositing dielectric material
US20030194495A1 (en) * 2002-04-11 2003-10-16 Applied Materials, Inc. Crosslink cyclo-siloxane compound with linear bridging group to form ultra low k dielectric
US20030211244A1 (en) * 2002-04-11 2003-11-13 Applied Materials, Inc. Reacting an organosilicon compound with an oxidizing gas to form an ultra low k dielectric
US6815373B2 (en) * 2002-04-16 2004-11-09 Applied Materials Inc. Use of cyclic siloxanes for hardness improvement of low k dielectric films
US20030206337A1 (en) * 2002-05-06 2003-11-06 Eastman Kodak Company Exposure apparatus for irradiating a sensitized substrate
EP1531989A4 (en) * 2002-06-04 2006-11-29 Western Life Sciences Llc Method of forming a polymer tie layer on metal surface
US7105460B2 (en) * 2002-07-11 2006-09-12 Applied Materials Nitrogen-free dielectric anti-reflective coating and hardmask
US6927178B2 (en) * 2002-07-11 2005-08-09 Applied Materials, Inc. Nitrogen-free dielectric anti-reflective coating and hardmask
US6905773B2 (en) * 2002-10-22 2005-06-14 Schlage Lock Company Corrosion-resistant coatings and methods of manufacturing the same
US6897163B2 (en) * 2003-01-31 2005-05-24 Applied Materials, Inc. Method for depositing a low dielectric constant film
US6878404B2 (en) * 2003-02-06 2005-04-12 Guardian Industries Corp. Method of depositing DLC on substrate
US7501148B2 (en) * 2003-11-04 2009-03-10 Guardian Industries Corp. Method of making heat treatable coated article with diamond-like carbon (DLC) and/or zirconium in coating
US7150849B2 (en) * 2003-11-04 2006-12-19 Guardian Industries Corp. Heat treatable coated article with diamond-like carbon (DLC) and/or zirconium in coating
US7507442B2 (en) * 2003-11-04 2009-03-24 Guardian Industries Corp. Heat treatable coated article with diamond-like carbon (DLC) and/or zirconium in coating
US7537801B2 (en) * 2003-11-04 2009-05-26 Guardian Industries Corp. Heat treatable coated article with diamond-like carbon (DLC) and/or zirconium in coating
US7445273B2 (en) * 2003-12-15 2008-11-04 Guardian Industries Corp. Scratch resistant coated glass article resistant fluoride-based etchant(s)
US20110104381A1 (en) * 2004-01-15 2011-05-05 Stefan Laure Plasma Treatment of Large-Scale Components
US8281812B2 (en) * 2004-03-05 2012-10-09 Waters Technologies Corporation Valve with low friction coating
US7390573B2 (en) * 2004-03-09 2008-06-24 Exatec Llc Plasma coating system for non-planar substrates
PL1740950T5 (en) * 2004-04-30 2013-03-29 Vlaamse Instelling Voor Tech Onderzoek Vito Biomolecule immobilisation using atmospheric plasma technology
US7288205B2 (en) * 2004-07-09 2007-10-30 Applied Materials, Inc. Hermetic low dielectric constant layer for barrier applications
US20060110605A1 (en) * 2004-11-24 2006-05-25 Guardian Industries Corp. Hydrophilic coating and method of making same
US20060107599A1 (en) * 2004-11-24 2006-05-25 Guardian Industries Corp. Flush-mounted slider window for pick-up truck with hydrophilic coating on interior surface thereof, and method of making same
WO2006063388A1 (en) * 2004-12-13 2006-06-22 University Of South Australia Craze resistant plastic article and method of production
US8030219B1 (en) * 2005-02-07 2011-10-04 Morgan Advanced Ceramics, Inc. Dielectric coatings and use in capacitors
JP2006258283A (en) * 2005-02-18 2006-09-28 Denso Corp Fluid control valve and solenoid valve
US20090123662A1 (en) * 2005-04-11 2009-05-14 Stefan Laure Plasma Coating Device and Method
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
US8313812B2 (en) * 2005-11-30 2012-11-20 The Boeing Company Durable transparent coatings for aircraft passenger windows
US20070196633A1 (en) * 2005-11-30 2007-08-23 Coak Craig E Durable transparent coatings for polymeric substrates
DE102006018491A1 (en) * 2006-04-19 2007-10-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Flexible plasma polymer products, corresponding articles, manufacturing methods and use
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US7811628B2 (en) * 2006-12-22 2010-10-12 Roger Wen-Yi Hsu Layered lenses and method of layering lenses
US20100323126A1 (en) * 2007-02-26 2010-12-23 Dr. Laure Plasmatechnologie Gmnh Apparatus and Method for Plasma-Assisted Coating and Surface Treatment of Voluminous Parts
US7878054B2 (en) * 2007-02-28 2011-02-01 The Boeing Company Barrier coatings for polymeric substrates
US7857905B2 (en) * 2007-03-05 2010-12-28 Momentive Performance Materials Inc. Flexible thermal cure silicone hardcoats
US9102083B2 (en) * 2007-09-06 2015-08-11 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
DE102007000611A1 (en) * 2007-10-31 2009-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Scratch-resistant and stretchable corrosion protection layer for light metal substrates
WO2009104407A1 (en) * 2008-02-20 2009-08-27 ダイキョーニシカワ株式会社 Resin molded body
US20090311539A1 (en) * 2008-06-11 2009-12-17 The Boeing Company Wear-resistant coating for polymeric transparencies
JP5256441B2 (en) * 2008-08-22 2013-08-07 株式会社ユーテック Transparent resin laminate and method for producing the same
DE102009000699A1 (en) 2009-02-06 2010-08-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Plastic substrate comprising a flexible, transparent protective layer and method for producing such a plastic substrate
TWI403413B (en) * 2009-04-27 2013-08-01 Univ Tatung Hydrophilic-hydrophobic transformable composite film and the method of fabricating the same
DE102009002780A1 (en) 2009-04-30 2010-11-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Metal substrates with a scratch-resistant and elastic corrosion protection layer and process for their production
US8365619B2 (en) * 2009-05-05 2013-02-05 The United States Of America As Represented By The Secretary Of The Army Assembly and method for evaluating effectiveness of anti-fog coatings of eyewear lenses
US7985188B2 (en) * 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
BE1019159A5 (en) * 2010-01-22 2012-04-03 Europlasma Nv METHOD FOR DEPOSITING A EQUIVALENT NANOCOATING BY A LOW-PRESSURE PLASMA PROCESS
JP2011186149A (en) * 2010-03-08 2011-09-22 Olympus Corp Optical component and method of manufacturing the same
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
CA2803613C (en) * 2010-06-29 2018-12-11 Cv Holdings, Llc Syringe with integrated needle
EP2402475A1 (en) 2010-06-30 2012-01-04 Fei Company Beam-induced deposition at cryogenic temperatures
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
EP2498074A1 (en) * 2011-03-07 2012-09-12 Bronlund, Ole Einar Temperature Calibrator further Development
US20130011644A1 (en) * 2011-07-06 2013-01-10 Innovation & Infinity Global Corp. Conductive multilayer structure and touch panel having the same
US9441133B2 (en) * 2011-08-26 2016-09-13 Exatec, Llc Organic resin laminate, methods of making and using the same, and articles comprising the same
WO2013071138A1 (en) 2011-11-11 2013-05-16 Sio2 Medical Products, Inc. PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
FR2985255B1 (en) * 2011-12-28 2015-08-07 Ecole Polytech COATED ARTICLE WITH AN INTERFERENTIAL COATING HAVING STABLE PROPERTIES IN TIME.
US8691915B2 (en) 2012-04-23 2014-04-08 Sabic Innovative Plastics Ip B.V. Copolymers and polymer blends having improved refractive indices
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
BR112015012470B1 (en) 2012-11-30 2022-08-02 Sio2 Medical Products, Inc PRODUCTION METHOD OF A MEDICAL DRUM FOR A MEDICAL CARTRIDGE OR SYRINGE
EP2961858B1 (en) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Coated syringe.
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
WO2014144926A1 (en) 2013-03-15 2014-09-18 Sio2 Medical Products, Inc. Coating method
FR3007024A1 (en) 2013-06-14 2014-12-19 Essilor Int COATED ARTICLE WITH A SILICO-ORGANIC LAYER IMPROVING THE PERFORMANCE OF AN EXTERNAL COATING
KR101482429B1 (en) * 2013-08-12 2015-01-13 삼성전기주식회사 Printed circuit board and method of manufacturing the same
WO2015148471A1 (en) 2014-03-28 2015-10-01 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
EP3155037B1 (en) * 2014-06-12 2019-07-24 Exatec, LLC. Organic resin laminate
WO2016069807A1 (en) 2014-10-29 2016-05-06 Ppg Industries Ohio, Inc. Protective coating system for plastic substrate
US9840807B2 (en) 2015-03-10 2017-12-12 Charles Francis Luzon Process for dyeing textiles, dyeing and fortifying rubber, and coloring and revitalizing plastics
JP2018523538A (en) 2015-08-18 2018-08-23 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド Drug packaging and other packaging with low oxygen transmission rate
AR103980A1 (en) * 2015-09-10 2017-06-21 Xsolutions S A SECURITY GLASS AND PROCEDURE FOR OBTAINING
TWI821234B (en) 2018-01-09 2023-11-11 美商康寧公司 Coated articles with light-altering features and methods for the production thereof
JP6708868B1 (en) * 2018-08-07 2020-06-10 株式会社大木工藝 Lens and lens manufacturing method
US11940682B2 (en) * 2019-06-26 2024-03-26 Applied Materials, Inc. Flexible multi-layered cover lens stacks for foldable displays
US20220011478A1 (en) 2020-07-09 2022-01-13 Corning Incorporated Textured region of a substrate to reduce specular reflectance incorporating surface features with an elliptical perimeter or segments thereof, and method of making the same
CN115505157A (en) * 2022-10-25 2022-12-23 中国科学院宁波材料技术与工程研究所 Application of organic-inorganic composite wear-resistant antifriction coating in surface protection of polyether-ether-ketone

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942065A (en) * 1988-07-05 1990-07-17 General Electric Company Method for curing silicone coatings on plastic substrates, and curable compositions related thereto
US4990376A (en) * 1988-04-25 1991-02-05 General Electric Company Flexible silicone coatings for plastic substrates and methods for making thermoformable, abrasion-resistant thermoplastic articles

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3847652A (en) * 1972-12-08 1974-11-12 Nasa Method of preparing water purification membranes
SE435297B (en) * 1975-08-22 1984-09-17 Bosch Gmbh Robert OPTICAL REFLECTORS MANUFACTURED BY COATING A REFLECTOR
GB1582231A (en) * 1976-08-13 1981-01-07 Nat Res Dev Application of a layer of carbonaceous material to a surface
US4096315A (en) * 1976-12-15 1978-06-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Process for producing a well-adhered durable optical coating on an optical plastic substrate
US4168330A (en) * 1977-10-13 1979-09-18 Rca Corporation Method of depositing a silicon oxide layer
US4217038A (en) * 1978-06-05 1980-08-12 Bausch & Lomb Incorporated Glass coated polysiloxane contact lens
DE3316693A1 (en) * 1983-05-06 1984-11-08 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR PRODUCING AMORPHOUS CARBON LAYERS ON SUBSTRATES AND SUBSTRATES COATED BY THE METHOD
US4698256A (en) * 1984-04-02 1987-10-06 American Cyanamid Company Articles coated with adherent diamondlike carbon films
DE3413019A1 (en) * 1984-04-06 1985-10-17 Robert Bosch Gmbh, 7000 Stuttgart METHOD FOR APPLYING A THIN, TRANSPARENT LAYER TO THE SURFACE OF OPTICAL ELEMENTS
US4649071A (en) * 1984-04-28 1987-03-10 Kabushiki Kaisha Toyota Chuo Kenkyusho Composite material and process for producing the same
US4490229A (en) * 1984-07-09 1984-12-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Deposition of diamondlike carbon films
FR2591587A1 (en) * 1985-12-17 1987-06-19 Saint Gobain Vitrage ORGANO-MINERAL FILM REMOVED ON A GLASS SUBSTRATE WHICH CAN BE COATED WITH ONE OR MORE THIN METAL LAYERS.
US4778721A (en) * 1986-07-09 1988-10-18 Battelle Memorial Institute Method of forming abrasion-resistant plasma coatings and resulting articles
DE3624467A1 (en) * 1986-07-19 1988-01-28 Leybold Heraeus Gmbh & Co Kg METHOD FOR PRODUCING TRANSPARENT PROTECTIVE LAYERS FROM SILICON COMPOUNDS
US4862032A (en) * 1986-10-20 1989-08-29 Kaufman Harold R End-Hall ion source
US4777090A (en) * 1986-11-03 1988-10-11 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article
US4842941A (en) * 1987-04-06 1989-06-27 General Electric Company Method for forming abrasion-resistant polycarbonate articles, and articles of manufacture produced thereby
ZA884511B (en) * 1987-07-15 1989-03-29 Boc Group Inc Method of plasma enhanced silicon oxide deposition
US5051308A (en) * 1987-08-24 1991-09-24 General Electric Company Abrasion-resistant plastic articles
US4927704A (en) * 1987-08-24 1990-05-22 General Electric Company Abrasion-resistant plastic articles and method for making them
US4783374A (en) * 1987-11-16 1988-11-08 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article
JP2623611B2 (en) * 1987-11-17 1997-06-25 株式会社ニコン Metal substrate coated with hard carbon film
US4914143A (en) * 1988-04-25 1990-04-03 General Electric Company Flexible silicone coatings for plastic substrates and methods for making thermoformable, abrasion-resistant thermoplastic articles
US4863520A (en) * 1988-07-05 1989-09-05 General Electric Company Method for curing silicone coatings on plastic substrates, and curable compositions related thereto
US5266409A (en) * 1989-04-28 1993-11-30 Digital Equipment Corporation Hydrogenated carbon compositions
EP0470777A3 (en) * 1990-08-07 1993-06-02 The Boc Group, Inc. Thin gas barrier films and rapid deposition method therefor
US5268217A (en) * 1990-09-27 1993-12-07 Diamonex, Incorporated Abrasion wear resistant coated substrate product
US5135808A (en) * 1990-09-27 1992-08-04 Diamonex, Incorporated Abrasion wear resistant coated substrate product
US5190807A (en) * 1990-10-18 1993-03-02 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
JPH04270736A (en) * 1991-02-26 1992-09-28 Mitsubishi Heavy Ind Ltd Method for forming cured protective film
IT1255257B (en) * 1991-07-22 1995-10-20 Dow Corning COATINGS WITH THIN FILMS MADE WITH THE IMPROVED STEAM STORAGE WITH FLUORED CYCLIC SILOSSANE PLASMA
JPH05194770A (en) * 1992-01-17 1993-08-03 Mitsubishi Kasei Corp Surface-coated plastic article
US5508368A (en) * 1994-03-03 1996-04-16 Diamonex, Incorporated Ion beam process for deposition of highly abrasion-resistant coatings

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990376A (en) * 1988-04-25 1991-02-05 General Electric Company Flexible silicone coatings for plastic substrates and methods for making thermoformable, abrasion-resistant thermoplastic articles
US4942065A (en) * 1988-07-05 1990-07-17 General Electric Company Method for curing silicone coatings on plastic substrates, and curable compositions related thereto

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging

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US5618619A (en) 1997-04-08
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US5679413A (en) 1997-10-21
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ATE276835T1 (en) 2004-10-15

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