WO1995029273A1 - Multi-frequency inductive method and apparatus for the processing of material - Google Patents
Multi-frequency inductive method and apparatus for the processing of material Download PDFInfo
- Publication number
- WO1995029273A1 WO1995029273A1 PCT/EP1995/001522 EP9501522W WO9529273A1 WO 1995029273 A1 WO1995029273 A1 WO 1995029273A1 EP 9501522 W EP9501522 W EP 9501522W WO 9529273 A1 WO9529273 A1 WO 9529273A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reactor
- processing
- wall
- reaction chamber
- supplied
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP95918586A EP0758409A1 (en) | 1994-04-26 | 1995-04-20 | Multi-frequency inductive method and apparatus for the processing of material |
AU24474/95A AU2447495A (en) | 1994-04-26 | 1995-04-20 | Multi-frequency inductive method and apparatus for the processing of material |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE9400433 | 1994-04-26 | ||
BE9400433A BE1008338A5 (en) | 1994-04-26 | 1994-04-26 | Multi-frequency inductive method and device for working material. |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1995029273A1 true WO1995029273A1 (en) | 1995-11-02 |
Family
ID=3888123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1995/001522 WO1995029273A1 (en) | 1994-04-26 | 1995-04-20 | Multi-frequency inductive method and apparatus for the processing of material |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0758409A1 (en) |
AU (1) | AU2447495A (en) |
BE (1) | BE1008338A5 (en) |
WO (1) | WO1995029273A1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19900179C1 (en) * | 1999-01-07 | 2000-02-24 | Bosch Gmbh Robert | Installation for etching substrates by high-density plasmas comprises a phase delay line causing the supply voltages at both ends of the inductively coupled plasma coil to be in counter-phase with one another |
DE19923018A1 (en) * | 1999-05-19 | 2000-11-30 | Univ Dresden Tech | Plasma treatment apparatus, for strip materials or linked individual flat substrates, comprises a screened rectangular passage with a wound internal conductor enclosing a moving workpiece |
US7273655B2 (en) | 1999-04-09 | 2007-09-25 | Shojiro Miyake | Slidably movable member and method of producing same |
CN100366788C (en) * | 2004-09-09 | 2008-02-06 | 复旦大学 | Vacuum thermal evaporation film-forming method using strong electric field |
US7771821B2 (en) | 2003-08-21 | 2010-08-10 | Nissan Motor Co., Ltd. | Low-friction sliding member and low-friction sliding mechanism using same |
US8096205B2 (en) | 2003-07-31 | 2012-01-17 | Nissan Motor Co., Ltd. | Gear |
US8152377B2 (en) | 2002-11-06 | 2012-04-10 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2793140A (en) * | 1953-10-20 | 1957-05-21 | Ohio Commw Eng Co | Method of gas plating with a chromium compound and products of the method |
JPS5633839A (en) * | 1979-08-29 | 1981-04-04 | Hitachi Ltd | Plasma treatment and device therefor |
US4388344A (en) * | 1981-08-31 | 1983-06-14 | United Technolgies Corporation | Method of repairing surface defects in coated laser mirrors |
US4664747A (en) * | 1985-03-28 | 1987-05-12 | Anelva Corporation | Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same |
JPS62188783A (en) * | 1986-02-14 | 1987-08-18 | Sanyo Electric Co Ltd | Production of electrostatic latent image carrier |
JPS63317676A (en) * | 1987-06-19 | 1988-12-26 | Sharp Corp | Production of thin metallic compound film having non-grained structure |
EP0457076A2 (en) * | 1990-04-26 | 1991-11-21 | Hitachi, Ltd. | Method for producing synthetic diamond thin film, the thin film and device using it |
-
1994
- 1994-04-26 BE BE9400433A patent/BE1008338A5/en not_active IP Right Cessation
-
1995
- 1995-04-20 AU AU24474/95A patent/AU2447495A/en not_active Abandoned
- 1995-04-20 EP EP95918586A patent/EP0758409A1/en not_active Withdrawn
- 1995-04-20 WO PCT/EP1995/001522 patent/WO1995029273A1/en not_active Application Discontinuation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2793140A (en) * | 1953-10-20 | 1957-05-21 | Ohio Commw Eng Co | Method of gas plating with a chromium compound and products of the method |
JPS5633839A (en) * | 1979-08-29 | 1981-04-04 | Hitachi Ltd | Plasma treatment and device therefor |
US4388344A (en) * | 1981-08-31 | 1983-06-14 | United Technolgies Corporation | Method of repairing surface defects in coated laser mirrors |
US4664747A (en) * | 1985-03-28 | 1987-05-12 | Anelva Corporation | Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same |
JPS62188783A (en) * | 1986-02-14 | 1987-08-18 | Sanyo Electric Co Ltd | Production of electrostatic latent image carrier |
JPS63317676A (en) * | 1987-06-19 | 1988-12-26 | Sharp Corp | Production of thin metallic compound film having non-grained structure |
EP0457076A2 (en) * | 1990-04-26 | 1991-11-21 | Hitachi, Ltd. | Method for producing synthetic diamond thin film, the thin film and device using it |
Non-Patent Citations (5)
Title |
---|
DATABASE WPI Section Ch Week 8738, Derwent World Patents Index; Class G08, AN 87-268976 * |
KUWANO Y: "Some properties of silicon nitride films produced by radio frequency glow discharge reaction of silane and nitrogen", JAPANESE JOURNAL OF APPLIED PHYSICS, JULY 1969, JAPAN, VOL. 8, NR. 7, PAGE(S) 876 - 882, ISSN 0021-4922 * |
OLCAYTUG F ET AL: "A low temperature process for the reactive formation of Si/sub 3/N/sub 4/ layers on InSb", THIN SOLID FILMS, 15 APRIL 1980, SWITZERLAND, VOL. 67, NR. 2, PAGE(S) 321 - 324, ISSN 0040-6090 * |
PATENT ABSTRACTS OF JAPAN vol. 005, no. 086 (E - 060) 5 June 1981 (1981-06-05) * |
PATENT ABSTRACTS OF JAPAN vol. 013, no. 169 (C - 587) 21 April 1989 (1989-04-21) * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19900179C1 (en) * | 1999-01-07 | 2000-02-24 | Bosch Gmbh Robert | Installation for etching substrates by high-density plasmas comprises a phase delay line causing the supply voltages at both ends of the inductively coupled plasma coil to be in counter-phase with one another |
US7273655B2 (en) | 1999-04-09 | 2007-09-25 | Shojiro Miyake | Slidably movable member and method of producing same |
DE19923018A1 (en) * | 1999-05-19 | 2000-11-30 | Univ Dresden Tech | Plasma treatment apparatus, for strip materials or linked individual flat substrates, comprises a screened rectangular passage with a wound internal conductor enclosing a moving workpiece |
DE19923018C2 (en) * | 1999-05-19 | 2001-09-27 | Univ Dresden Tech | Device for processing band-shaped workpieces using resonant high-frequency plasmas |
US8152377B2 (en) | 2002-11-06 | 2012-04-10 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism |
US8096205B2 (en) | 2003-07-31 | 2012-01-17 | Nissan Motor Co., Ltd. | Gear |
US7771821B2 (en) | 2003-08-21 | 2010-08-10 | Nissan Motor Co., Ltd. | Low-friction sliding member and low-friction sliding mechanism using same |
CN100366788C (en) * | 2004-09-09 | 2008-02-06 | 复旦大学 | Vacuum thermal evaporation film-forming method using strong electric field |
Also Published As
Publication number | Publication date |
---|---|
BE1008338A5 (en) | 1996-04-02 |
EP0758409A1 (en) | 1997-02-19 |
AU2447495A (en) | 1995-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5079031A (en) | Apparatus and method for forming thin films | |
KR101410515B1 (en) | Surface processing apparatus | |
US4971667A (en) | Plasma processing method and apparatus | |
US5439715A (en) | Process and apparatus for microwave plasma chemical vapor deposition | |
TW509982B (en) | Plasma density modulator for improved plasma density uniformity and thickness uniformity in an ionized metal plasma source | |
KR100388530B1 (en) | Rf powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition | |
KR20180025890A (en) | Apparatus for the treatment of web substrates in plasma enhanced processing | |
WO1992014258A1 (en) | High density plasma deposition and etching apparatus | |
EA019460B1 (en) | Process and installation for depositing films onto a substrate | |
US5283087A (en) | Plasma processing method and apparatus | |
TW386249B (en) | Method and device for manufacturing semiconductor thin film | |
EP0758409A1 (en) | Multi-frequency inductive method and apparatus for the processing of material | |
WO1995015672A1 (en) | Method and apparatus for planar plasma processing | |
JP5274659B2 (en) | Method and apparatus for simultaneously depositing films on both sides of a support | |
JP4471589B2 (en) | Antenna device for plasma generation and plasma processing apparatus | |
JP2003041371A (en) | System for chemical vapor deposition at ambient temperature using electron cyclotron resonance and method for depositing metal composite using the same | |
US4320716A (en) | Ultra-high frequency device for depositing thin films on solids | |
JP4818483B2 (en) | Thin film forming equipment | |
US5007374A (en) | Apparatus for forming thin films in quantity | |
JP4022670B2 (en) | Electrode for generating ultrahigh frequency plasma, plasma surface treatment apparatus and plasma surface treatment method comprising the electrode | |
JP3513206B2 (en) | Method and apparatus for forming deposited film | |
KR100256192B1 (en) | Plasma process apparatus and plasma process method | |
Oechsner et al. | ECWR-Plasma CVD as a novel technique for phase controlled deposition of semiconductor films | |
JPH06232429A (en) | Photovoltaic element, and method and equipment for forming same | |
JP2833044B2 (en) | Thin film formation method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AM AT AU BB BG BR BY CA CH CN CZ DE DK EE ES FI GB GE HU JP KE KG KP KR KZ LK LR LT LU LV MD MG MN MW MX NO NZ PL PT RO RU SD SE SI SK TJ TT UA US UZ VN |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): KE MW SD SZ UG AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1995918586 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref country code: US Ref document number: 1997 727484 Date of ref document: 19970116 Kind code of ref document: A Format of ref document f/p: F |
|
WWP | Wipo information: published in national office |
Ref document number: 1995918586 Country of ref document: EP |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 1995918586 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: CA |