WO1995029872A1 - Method of producing fumed silica - Google Patents

Method of producing fumed silica Download PDF

Info

Publication number
WO1995029872A1
WO1995029872A1 PCT/US1995/005100 US9505100W WO9529872A1 WO 1995029872 A1 WO1995029872 A1 WO 1995029872A1 US 9505100 W US9505100 W US 9505100W WO 9529872 A1 WO9529872 A1 WO 9529872A1
Authority
WO
WIPO (PCT)
Prior art keywords
flame
fumed silica
hydrogen
steam
oxygen
Prior art date
Application number
PCT/US1995/005100
Other languages
French (fr)
Inventor
Gael Ulrich
Original Assignee
Ulrich Research & Consulting, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulrich Research & Consulting, Inc. filed Critical Ulrich Research & Consulting, Inc.
Priority to AU23641/95A priority Critical patent/AU2364195A/en
Publication of WO1995029872A1 publication Critical patent/WO1995029872A1/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • C01B33/181Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
    • C01B33/183Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/12Surface area

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

A method of producing fumed silica by replacing a portion of the required fuel with superheated steam (8). The steam replaces a portion of the hydrogen fuel required for hydrolysis of SiC14 (12). This results in an increase in the powder producing capacity of existing fumed silica plants without expanding most of the process equipment. This also enables fuel costs to be substantially reduced since 40 to 70 % of the required hydrogen and oxygen is obtained from steam. This process also eliminates the expensive step of drying the combustion air.

Description

METHOD OF PRODUCING FUMED SILICA
BACKGROUND OF THE INVENTION
1. Field of the Invention
The invention relates to methods for making fumed silica.
2. Description of the Related Art
Flame-generated particles have found practical use ever since prehistoric cave
dwellers collected soot from their fires to paint scenes on cave walls. Today a wide
variety of particulate commodities are made by flame technology. Now, too, as
understanding of flame processes improves, flame-generated particles promise to
become even more significant, not only as commodity products but as specialty chemicals as well.
One of the distinguishing characteristics of flame-synthesized particles is the
variation in size possible with the elemental or primary particle - that is, the particle
that, cemented to others, forms the clustered frameworks that are known as
aggregates. In commercial products, these primary particles can range from as small
as 6 nm to as large as 600 nm. Experimental materials have been made in which
the particles are even smaller.
The size of the aggregates, moreover, also can vary because they may be
formed from one to as many as 1000 primary particles, depending on the base
substance and manufacturing conditions.
Such wide variations in two properties suggest great product flexibility.
Versatility is limited, unfortunately, because the two properties are somewhat
interdependent. Conditions that produce small primary particles, for instance, also
yield aggregates with large populations (and vice versa). Thus, there are no small primary particles that are not aggregated or any aggregates having a large population of big primary particles.
Additional valuable characteristics - such as purity, uniformity, and flexibility -
are consequences of flame synthesis technology. This unique combination of properties contributes to the strength, beauty, stability, and other desirable properties of many consumer goods.
Fumed silica was developed as a substitute for carbon black in hydrocarbon- limited Germany during World War II. It is formed by the combustion of silicon tetrachloride or some other silane with a hydrogen containing fuel and oxygen. Minuscule liquid droplets, precipitated by the reaction, form a "smoke" that resembles carbon black in particle size and structure. In context with its more ancient relative, it has, rather carelessly, been called "white soot."
Fumed silica is an amorphous (lacking defined crystalline structure) anhydrous (free of water) form of Silicon Dioxide (Si02). From a macroscopic perspective, it appears as an extremely light fluffy powder. Electron micrographs reveal its structure to be clusters of small (1 to 100 nanometer diameter) particles. These small particles are referred to as primary particles, while the clusters, which can range from .005 to 1 microns in size, are known as aggregates. These aggregates often have irregular chain-like shapes. Fumed silica's have very high purity (99.7% or better). An easily measured indicator of primary particle size of fumed silica is surface area as measured by nitrogen adsorption. Specific surface areas of fumed silica's can range from 15 to 800 square meters per gram. Different applications of fumed silica have different optimal size ranges.
Fumed silica is also sometimes referred to as pyrogenic silica. Fumed silica is added to rubbers, silicones, epoxy resins, and plastics during
their manufacture to reinforce them or otherwise enhance their properties. It is also used as a thickening and gelling agent. The world-wide market for fumed silica
exceeds 100 million kilograms per year. Most commercial fumed silica's are produced by the combustion of silicon tetrachloride (SiCI vapor, along with hydrogen or methane fuel, in air. The ingredients are pre-mixed and fed to a tube-like burner with one end open to the
atmosphere. The burners, which are two to ten centimeters in diameter, produce a
steady cone-shaped flame. There is often a thin concentric flow of pure fuel
(hydrogen or methane) around the outer diameter to anchor the flame, keep the burner from fouling, and to ensure complete reaction.
The reaction products, an aerosol of silica in HCI, C02, N2, H20, and excess oxygen are pulled (along with ambient air, which quickly quenches the products) by
a vacuum to bag filters, where the silica is collected. The gases are then recycled,
scrubbed, or discharged. Depending on the end use of the silica, various after- treatments may be performed on the powder before it is sold.
Product qualities, such as surface area and aggregate size are controlled by changing the stoichiometry. More dilute flames (with greater excesses of fuel or air) generally produce smaller primary particles and, thus, materials having higher surface
areas. Stoichiometries are described in terms of per cent theoretical hydrogen (100% theoretical hydrogen would be enough hydrogen or methane to convert all the chlorine contained in the SiCI4 to HCI; 150% theoretical hydrogen would be one and
a half times this amount) and percent theoretical oxidant (100% theoretical oxidant would be enough oxygen to form Si02 with all the Si present, C02 with all carbon present, and H20 with any excess hydrogen that has not gone to HCI).
It is well known in the art that silanes react prematurely with moisture to
produce a hydrated silicon oxide of poor quality. Because products of this reaction
are sticky, corrosive, and tend to foul equipment, moisture is carefully avoided in the manufacture of fumed silica. Combustion air is scrupulously dried (at added expense) to prevent this premature reaction from occurring in a production line.
For example, using water vapor and gaseous silicon tetrachloride heated separately to a temperature of 300° to 400° C, mixing them together and then reacting the mixture at 600° to 1200° C with a dwell time greater than 5 seconds produces massive, non-crystalline particles of spherical hydrophillic silica as disclosed in U.S. Patent No. 4,967,943, issued to Pauli et al. on December 11 , 1990. This method is not a flame process and it is unsuitable for the production of fine sized particles required for most applications using fumed silica.
SUMMARY OF THE INVENTION It is an object of the invention to provide a method of manufacture of fumed silica that can increase the powder producing capacity of existing fumed silica plants without expanding most of the process equipment.
It is another object of the invention to provide a method of manufacture of fumed silica that increases particle loading. It is still another object of the invention to provide a method of manufacture of fumed silica that uses steam as a "fuel" in SiCI4 hydrolysis.
Another object of the invention is to provide a method of manufacture of fumed silica that reduces fuel costs by enabling a portion of the required hydrogen and oxygen to be obtained from steam. It is still another object of the invention to provide a method of manufacture of
fumed silica that eliminates the need for drying the combustion air.
Finally, it is an object of the invention to provide a
method of manufacture of fumed silica that uses superheated steam as a reactant
constituent.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is a schematic diagram of an apparatus used to practice the method of
manufacture of fumed silica in accordance with the invention.
Fig. 2 is a detailed schematic diagram of the burning section of the apparatus
used to practice the method of manufacture of fumed silica in accordance with the invention.
DETAILED DESCRIPTION OF THE INVENTION
The inventor has discovered that superheated steam and silicon tetrachloride
can be mixed without premature reaction occurring. This contradicts the well-known
fact cited above that spontaneous reaction occurs with moist air. However, it is
postulated that an aqueous hydrochloric acid mist condenses at ambient
temperatures to drive the hydrolysis reaction with an extra heat and free-energy of
solution. If the steam is superheated to the point that a condensed phase cannot
form, it has been found that SiCI4 can be mixed with it, and they will not react.
Given that SiCI4 and superheated steam can be mixed without reacting
prematurely, one can devise a stoichiometry where steam provides some of the
hydrogen and oxygen needed for combustion in the manufacture of fumed silica.
The invention replaces a portion (greater than 0% and possibly as much as
100% of the methane or hydrogen) with an amount of superheated steam that provides equivalent moles of hydrogen. At the same time, the oxygen in the water molecule serves as part of the oxidant need. In order to maintain a 2000 K or higher
flame temperature (which produces a quality product), the amount of nitrogen in the
oxidant mix (air is 79% nitrogen) is reduced as more fuel is replaced by superheated steam. Thus, these adjustments to the stoichiometry require shifting from air as the oxidant in the flame reaction to enriched air (less nitrogen) and eventually to pure oxygen as the fraction of hydrogen from steam is increased.
When considering ranges of stoichiometries, four variables need to be considered: % theoretical oxidant, % theoretical hydrogen, % fuel replaced by superheated steam, and % nitrogen removed from air. In the inventor's experimental work, the first two variables were fixed at 110%. It is believed that the invention is valid at any combination of % oxidant and % hydrogen levels which are used commercially today.
In laboratory experiments, up to 70% of the fuel was replaced with superheated steam, and it is believed that as much as 80% or more could be replaced before product quality is seriously compromised. Replacement beyond the 80% level is possible, however, the pre-heat temperature of the raw material flows (including the steam) would have to be increased. These high levels of fuel replacement (70% or greater) require pure oxygen (100% nitrogen removal from air) as the oxidant. As the percentage of fuel replaced by superheated steam decreases, the amount of nitrogen that can enter the process is increased.
In terms of product quality, there is no single optimal stoichiometry. Silica of different surface area and aggregate size are called for in different applications and it is by changing stoichiometries that these properties are controlled. From an economic standpoint, raw material cost decreases as fuel is replaced by superheated steam, therefore optimal stoichiometries are those which provide the desired product characteristics with the highest level of fuel replacement. More important is the fact that silica concentrations (grams of silica per cubic meter of process gas) become greater with water addition. This means that plant capacity can
be increased without enlarging the equipment. Also, air no longer needs to be dried if it is superheated to the conditions described in the patent. This saves in both
capital and operating expense.
Table 1 shows the stoichiometries used in three laboratory experiments
conducted to test this invention. The first is a base composition typical of existing commercial processes. Samples of silica were made at this condition as basis for comparison. Ingredients were SiCI4, air, and methane fuel. Hydrogen in the fuel equaled 110% of that needed to convert all chlorine to HCI (110% theoretical hydrogen). Air was added at 10% above that needed to convert all silicon to Si02, all carbon to C02, and all excess hydrogen to H20 (110% theoretical oxygen). The adiabatic flame temperature for this stoichiometry is approximately 2100 K, and the silica loading is 180 grams per standard cubic meter of combustion products. The premixed reagent temperature should preferably range from 200 to 220°C.
Two stoichiometries containing superheated steam were considered. One included pure oxygen and the other, oxygen-enriched air as oxidant. These stoichiometries were selected to yield adiabatic flame temperatures near 2100 K,
matching the base case. (Adiabatic flame temperatures of at least 1800 K are desired to perpetuate stable combustion in the laboratory burner selected.) Both stoichiometries are based on total oxygen and total hydrogen at 110% theoretical as Run Preparation: Silica with H20 addition All feeds at 220 C
Methane fuel
Core Diameter: 0.9 inches = 2.286 cm; area = 4.10 cmΛ2
Adiabatic
% Water Flame Core Fiame
Condition %H Oxideήt mg- mol / second Rate Temp. Velocity
SiCld H,Od CH4 N, o? ml/hr K ' std cm/s c
Reference Condition 110 110 0.46 0.0000 0.506 4.135 1.113 0.00 2098 33.9 18
40% H from H20, 50% N2 Reduction 110 110 0.46 0.4048 0.304 1.240 0.668 26.25 2188 16.8 34
70% H from H20, 100% N2 Reduction 110 110 0.46 0.7084 0.152 0.000 0.334 45.94 2032 9.0 57
TABLE I
Figure imgf000010_0001
in the base case.
The first stoichiometry that involves superheated steam employs enriched air containing 50% of its normal nitrogen. In this case, the methane rate can be reduced
by 40% with the equivalent amount of hydrogen coming from steam. The second stoichiometry uses pure oxygen with methane reduced by 70%. The adiabatic flame
temperature remains near 2100 K for both these conditions, whereas silica loadings are increased to 340 and 580 grams per standard cubic meter, respectively
(approximately double and triple that of the base case). Fumed silica with a surface
area of approximately 200 m2/g was produced in all 3 cases.
Experiments were conducted using the apparatus described in Figure 1.
However, the process described herein would also work in burners used to produce fumed silica in commercial plants. Such burners differ from the one described here. Those burners have a larger diameter core tube, and instead of a guard flame (as described below), commercial burners often provide a thin annular flow of hydrogen around the core flame. Also, the typical commercial reactor is open to the
atmosphere, and lacks a residence chamber as provided here.
The apparatus for generating superheated steam described below has a noteworthy advantage. Certain compounds added to the flame in small amounts may have beneficial effects on the properties of the fumed silica. The instant apparatus has the ability to add any water-soluble compound to the flame at a uniform, controlled rate. If the additive compound was volatile, it would be vaporized along with the water. If it was not volatile, it would be carried along as a fine aerosol dust after the water droplets from the atomizer have been vaporized. The instant
apparatus requires a low flow of nitrogen or oxygen around the atomizer tip to carry the water droplets to the heated vaporizer coil. If no additives are desired in the flame, superheated steam could be generated using any conventional means, such
as a commercial boiler.
The raw material flow rates provided in the following example are for a
5 stoichiometry with 110% theoretical oxygen and 110% theoretical hydrogen, with 40% of the hydrogen coming from superheated steam, and the nitrogen/oxygen ratio providing half as much nitrogen as standard air (second condition described in Table
1).
Syringe pump 2 is used to feed water plus any desired additives to ultrasonic lo atomizer 6. Pump 2 is preferably Harvard Apparatus Model 22 or an equivalent metered source of water. In this example, water was fed to atomizer 6 at the rate of approximately 26 ml/hour. Atomizer 6 is preferably SonoTek model 8700-60MS. A metered stream of nitrogen is introduced into port 4. The nitrogen acts as a carrier for the atomized water droplets. In this example, the nitrogen flow rate was 0.10 mg- i5 mol/sec.
From there, the stream of nitrogen with the atomized water droplets plus additives, if any, is fed into vaporizer/superheater 8. This consists of a coil of copper or stainless steel tubing that has been wrapped with an electrical resistance heating element surrounded by mineral fiber insulation. In this example, 1.27 cm diameter
20 copper tubing having a length of approximately 60 cm was used. The tubing was wrapped with a 140 watt heating element and maintained at 220°C. However, temperature as low as 150°C may be suitable under some conditions.
Through port 12, a pre-mixed metered flow of Silicon Tetrachloride (0.46 mg-
mol/sec), Oxygen (0.668 mg-mol/sec), methane (0.304 mg-mol/sec), and Nitrogen (1.14 mg-mol/sec) is introduced. These gases are fed through heated (220° C)
stainless steel lines. Noted that the above rates must be varied in accordance with desired output and necessary stoichiometries to obtain it.
In stainless steel mixing chamber 14, the flow from port 12 and the flow from vaporizer/superheater 8 are mixed and are fed to stainless steel concentric flame
laboratory burner 16. Burner 16 will be discussed in detail in Fig. 2. As noted above, existing commercial silica flame burner geometry could also be used. Dotted line 10
indicates that all structures located within are heated by electrical resistance heaters
and wrapped with mineral fiber insulation. Thermocouples are placed in or on the
equipment and are connected to programmable temperature controllers. The temperature controllers maintain the equipment at a predetermined temperature. In this case, that temperature is 220° C.
Through port 18, oxygen, carbon monoxide, and hydrogen is fed through
heated (220° C) stainless lines which serves a premixed guard flame reagent. After leaving the flame, the reaction products enter the residence chamber which is
preferably a 46 cm long by 4.1 cm inside diameter tube of fused quartz. The core and guard flames can be observed as the reactions proceed. From there, the reactant products are introduced into open air quench area 22. At this point, the reaction products along with a great deal of room air are pulled via a vacuum in the powder collection device 24. This structure could be either an electrostatic precipitator, bag filter, cyclone, or some combination thereof. In this example, an electrostatic precipitator, 10 cm in diameter by 1 meter long, was used. Fumed silica is collected via exit 26, in this example, at the rate of 1.66 grams per minute. Combustion product gases 28 are pulled by vacuum to a scrubber and exhaust. Fig. 2 is a detailed schematic diagram of the burning section of the apparatus used to practice the method of manufacture of fumed silica in accordance with the
invention.
Coil 40 carries the steam, nitrogen, and additives, if any, to the reaction. Areas 42 are preferably controlled by three separate controllers. Preferably, thermocouples are installed in or on the surface of the apparatus and, then, wrapped with electrical resistance heaters and mineral wool insulation. Each temperature is
maintained at 220° C, however, other temperatures would also be suitable. Silicon tetrachloride, methane, oxygen and nitrogen is introduced via inlet 44 which, along with the steam, nitrogen and additives via coil 40 are fed into mixing chamber 46. Preferably, in this laboratory model, the chamber should have a volume of approximately 60 cc to ensure that thorough mixing occurs. Commercial sized units would be scaled accordingly.
Burner 48 is preferably fabricated from stainless steel components sealed with with Viton O-rings 70. Inlet 50 is used to introduce the guard flame fuel and oxidant, carbon monoxide, hydrogen and oxygen. Commercial burners typically use an annular flow of H2. In the laboratory burner used for these experiments, other fuel oxidant combinations, e.g., propane-air were utilized.
Burner core tube 52 is a uniform stainless steel tube, 2.29 cm inside diameter. The reactants flow from the mixing chamber to the burner face through tube 52. Guard flame distributor 54 is a ring of porous sintered stainless steel having an outside diameter of 2.91 cm and an inside diameter of 2.37 cm and having a 20 micron pore size. The seals 72 between the guard flame distributor 54 and tube 52 are press fits between tapered surfaces. Teflon tape (not shown) is used to ensure the integrity of the seals.
Guard flame 56 is a clean-burning flame that surrounds the core flame 60 to serve as an anchor and to isolate and insulate the core flame. Guard flame combustion products 58 (carbon dioxide, water vapor, and excess oxygen) flow as a laminar cylindrical column through the quartz residence chamber 64. This column
is centered within residence chamber 64. Core flame 60 is a luminous cone, ranging
from 4 to 8 cm long. The products produced by core flame 60 are a powder-laden
stream of silica, hydrogen chloride, carbon dioxide, nitrogen, and excess oxygen.
This stream has the appearance of white smoke.
In the laboratory burner, residence chamber 64 is a 4.1 cm inside diameter tube of clear fused quartz. The flame properties of the powder-laden core flame 60 surrounded by the clean guard flame 56 keep tube 64 clean and transparent. Thus, through tube 64, the core flame 60 and the plume 62 of reaction products can be
monitored while the apparatus is running. As noted above, some commercial burners also employ an anchor flame fueled by a thin "mantle" layer of hydrogen gas. There is no porous distributor, just a thin circular gap through which the hydrogen passes. This hydrogen combines (burns) with both oxygen in the surrounding air and excess oxygen from the core combustion zone. Its purpose is essentially the same as the guard flame's in the laboratory
burner: to anchor the flame, keep the burner from fouling, and to help the reaction proceed to completion.
Guard flame 56 reagents were carbon monoxide and oxygen, moderated with hydrogen. Velocity and composition of these gases were adjusted to provide a velocity and adiabatic flame temperature to match those of the core flame. With this arrangement, mixing of guard flame products 58 and core products 62 is prevented, and guard products provide a clean sheath of hot gases to isolate the particle-laden
core plume from the residence chamber wall.
In the examples, there was no evidence of fouling anywhere in the system during more than two hours of operation. The luminous flame cone that one associates with complete combustion was present, similar to that observed with our methane/air/SiCI4 reference flame. Flame length with steam added was about 5.5 cm, near the 6 cm noted for the reference flame. (Since gas flow dropped with steam addition, the fact that flame length stays almost constant indicates a drop in burning velocity.) Product surface areas were in the vicinity of 200 m2/g, similar to that made at the reference condition.
While there have been described what are at present considered to be the preferred embodiments of this invention, it will be obvious to those skilled in the art that various changes and modifications may be made therein without departing from the invention and it is, therefore, aimed to cover all such changes and modifications as. fall within the true spirit and scope of the invention.

Claims

What is claimed is:
1. A method of preparing fumed silica which comprises the steps of: superheating water to form steam at a temperature where a condensed phase
cannot form: mixing the steam with SiCI4, a hydrogen containing fuel, nitrogen and oxygen;
reacting said mixture in a flame having a temperature of at least 1800 K to produce fumed silica.
2. The method of claim 1 wherein at least a portion of the required hydrogen
for hydrolysis of SiCI4 is obtained from the steam.
3. The method of claim 2 wherein the nitrogen introduced in said mixing step is reduced corresponding to the mol equivalent of hydrogen present in the steam.
4. The method of claim 3 wherein the steam in said superheating step is
heated to at least 150° C.
PCT/US1995/005100 1994-05-03 1995-04-27 Method of producing fumed silica WO1995029872A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU23641/95A AU2364195A (en) 1994-05-03 1995-04-27 Method of producing fumed silica

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23634694A 1994-05-03 1994-05-03
US08/236,346 1994-05-03

Publications (1)

Publication Number Publication Date
WO1995029872A1 true WO1995029872A1 (en) 1995-11-09

Family

ID=22889124

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1995/005100 WO1995029872A1 (en) 1994-05-03 1995-04-27 Method of producing fumed silica

Country Status (2)

Country Link
AU (1) AU2364195A (en)
WO (1) WO1995029872A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0855368A1 (en) * 1997-01-23 1998-07-29 Degussa Aktiengesellschaft Pyrogenic oxides and process for the preparation thereof
EP1484046A1 (en) * 2003-06-06 2004-12-08 Degussa AG Homogeneous dental composite material and method of preparation
EP1501759A1 (en) * 2002-05-10 2005-02-02 W.C. Heraeus GmbH Method for the production of a metal oxide powder or a semiconductor oxide powder, oxide powder, solid body, and the use thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3954945A (en) * 1971-10-28 1976-05-04 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler Process for the production of finely divided oxides
US5340560A (en) * 1993-04-30 1994-08-23 General Electric Company Method for making fumed silica having a reduced aggregate size and product

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3954945A (en) * 1971-10-28 1976-05-04 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler Process for the production of finely divided oxides
US5340560A (en) * 1993-04-30 1994-08-23 General Electric Company Method for making fumed silica having a reduced aggregate size and product

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0855368A1 (en) * 1997-01-23 1998-07-29 Degussa Aktiengesellschaft Pyrogenic oxides and process for the preparation thereof
US6063354A (en) * 1997-01-23 2000-05-16 Degussa Aktiengesellschaft Pyrogenic oxides and a process for their preparation
EP1501759A1 (en) * 2002-05-10 2005-02-02 W.C. Heraeus GmbH Method for the production of a metal oxide powder or a semiconductor oxide powder, oxide powder, solid body, and the use thereof
EP1484046A1 (en) * 2003-06-06 2004-12-08 Degussa AG Homogeneous dental composite material and method of preparation

Also Published As

Publication number Publication date
AU2364195A (en) 1995-11-29

Similar Documents

Publication Publication Date Title
US2819151A (en) Process for burning silicon fluorides to form silica
KR100438228B1 (en) Doped and pyrolyzed oxides
US6423331B1 (en) Bactericidal silicon dioxide doped with silver
CA1167234A (en) Process and apparatus for the production of finely- divided metal and metalloid oxides
KR100232438B1 (en) Pyrogenic silica, process for the production thereof and use
US3698936A (en) Production of very high purity metal oxide articles
Zhu et al. Synthesis of SiO2 and SnO2 particles in diffusion flame reactors
Kammler et al. Synthesis of silica‐carbon particles in a turbulent H2‐air flame aerosol reactor
JPS58167472A (en) Double structure composite ceramic powder, manufacture and manufacturing equipment
TW572787B (en) Spray-pyrolysis or spray-drying process, and plant for carrying it out
JPS6335567B2 (en)
JPS6015569B2 (en) Equipment for pyrolytically producing silicon dioxide
US3416890A (en) Process of producing oxides of metals and metalloids
US4559218A (en) Process and apparatus for preparing finely-divided silicon dioxide having good thixotropic properties
WO1995029872A1 (en) Method of producing fumed silica
Kammler et al. Scaling-up the production of nanosized SiO2-particles in a double diffusion flame aerosol reactor
US3110681A (en) Process for the preparation of cubic colloidal zirconia aquasols
CN1548369A (en) Auxiliarily burning reactor and its application in vapor process of preparing nano SiO2
EP1122212B1 (en) Composite carbon clack-fumed silica nanostructured particles
KR20010051410A (en) Polyesters
US4572827A (en) Process for preparing finely-divided silicon dioxide in good yield
CN101941707B (en) Preparation method and device of fumed silica by combustion of small molecular alkane
US3660025A (en) Manufacture of pigmentary silica
JPH06226085A (en) Device for producing oxide fine particles and its production
KR100944863B1 (en) A method of producing glass of optical quality

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AT AU BB BG BR BY CA CH CN CZ DE DK ES FI GB HU JP KP KR KZ LK LU LV MG MN MW NO NZ PL PT RO RU SD SE SK UA US UZ VN

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: CA