WO1996018589A1 - Substrate of a ceramic material - Google Patents
Substrate of a ceramic material Download PDFInfo
- Publication number
- WO1996018589A1 WO1996018589A1 PCT/IB1995/000963 IB9500963W WO9618589A1 WO 1996018589 A1 WO1996018589 A1 WO 1996018589A1 IB 9500963 W IB9500963 W IB 9500963W WO 9618589 A1 WO9618589 A1 WO 9618589A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ceramic material
- substrate
- substrates
- composition
- ceramic
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 49
- 229910010293 ceramic material Inorganic materials 0.000 title claims abstract description 40
- 239000000463 material Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 14
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 239000000203 mixture Substances 0.000 claims description 28
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 21
- 239000000843 powder Substances 0.000 claims description 14
- 238000005245 sintering Methods 0.000 claims description 8
- 238000010304 firing Methods 0.000 claims description 7
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 238000000465 moulding Methods 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 description 6
- 229910017083 AlN Inorganic materials 0.000 description 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 238000007731 hot pressing Methods 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- -1 MgSiNj Chemical class 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 1
- 101100313763 Arabidopsis thaliana TIM22-2 gene Proteins 0.000 description 1
- 229910017488 Cu K Inorganic materials 0.000 description 1
- 229910017541 Cu-K Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910000836 magnesium aluminium oxide Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- ZBZHVBPVQIHFJN-UHFFFAOYSA-N trimethylalumane Chemical compound C[Al](C)C.C[Al](C)C ZBZHVBPVQIHFJN-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
- C04B35/117—Composites
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP95934785A EP0743929B1 (en) | 1994-12-12 | 1995-11-06 | Substrate of a ceramic material |
JP8518508A JPH09509394A (en) | 1994-12-12 | 1995-11-06 | Ceramic material substrate |
DE69503472T DE69503472T2 (en) | 1994-12-12 | 1995-11-06 | SUBSTRATE FROM A CERAMIC MATERIAL |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP94203601 | 1994-12-12 | ||
EP94203601.3 | 1994-12-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996018589A1 true WO1996018589A1 (en) | 1996-06-20 |
Family
ID=8217447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IB1995/000963 WO1996018589A1 (en) | 1994-12-12 | 1995-11-06 | Substrate of a ceramic material |
Country Status (7)
Country | Link |
---|---|
US (2) | US5571757A (en) |
EP (1) | EP0743929B1 (en) |
JP (1) | JPH09509394A (en) |
KR (1) | KR100404815B1 (en) |
DE (1) | DE69503472T2 (en) |
TW (1) | TW314506B (en) |
WO (1) | WO1996018589A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0757023B1 (en) * | 1995-08-03 | 2000-10-18 | Ngk Insulators, Ltd. | Aluminum nitride sintered bodies and their production method |
US6495912B1 (en) * | 2001-09-17 | 2002-12-17 | Megic Corporation | Structure of ceramic package with integrated passive devices |
WO2003058644A2 (en) * | 2001-10-11 | 2003-07-17 | Arizona Board Of Regents | Superhard dielectric compounds and methods of preparation |
US7396779B2 (en) * | 2003-09-24 | 2008-07-08 | Micron Technology, Inc. | Electronic apparatus, silicon-on-insulator integrated circuits, and fabrication methods |
JP2007508688A (en) | 2003-10-10 | 2007-04-05 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Electronic device and carrier substrate therefor |
CN109053161B (en) * | 2018-08-31 | 2021-05-18 | 武汉科技大学 | Directly foamed Al2O3-AlN porous composite material and preparation method thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0490480A1 (en) * | 1990-12-10 | 1992-06-17 | Ford Motor Company Limited | Preparation of aluminum oxynitride from organosiloxydihaloalanes |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE417818B (en) * | 1979-09-03 | 1981-04-13 | Sandvik Ab | CERAMIC ALLOY EXTREMELY COMPREHENSIVE ALUMINUM OXIDE AND NITRIDES AND / OR CARBON NITRIDES OF ONE OR MULTIPLE METALS OF GROUP IV B, V B AND WE B OF THE PERIODIC SYSTEM AND ONE OR MORE ... |
FR2628414B1 (en) * | 1988-03-11 | 1992-01-17 | Pechiney Electrometallurgie | POLYPHASE ALUMINUM, OXYCARBON AND ALUMINUM OXYNITRIDE POLISHED MATERIAL |
DE69407832T2 (en) * | 1993-02-18 | 1998-07-16 | Koninkl Philips Electronics Nv | Ceramic body |
-
1995
- 1995-11-06 EP EP95934785A patent/EP0743929B1/en not_active Expired - Lifetime
- 1995-11-06 KR KR1019960704373A patent/KR100404815B1/en not_active IP Right Cessation
- 1995-11-06 WO PCT/IB1995/000963 patent/WO1996018589A1/en active IP Right Grant
- 1995-11-06 JP JP8518508A patent/JPH09509394A/en active Pending
- 1995-11-06 DE DE69503472T patent/DE69503472T2/en not_active Expired - Fee Related
- 1995-11-30 TW TW084112786A patent/TW314506B/zh active
- 1995-12-07 US US08/568,774 patent/US5571757A/en not_active Expired - Lifetime
-
1996
- 1996-07-17 US US08/682,216 patent/US5635429A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0490480A1 (en) * | 1990-12-10 | 1992-06-17 | Ford Motor Company Limited | Preparation of aluminum oxynitride from organosiloxydihaloalanes |
Also Published As
Publication number | Publication date |
---|---|
KR100404815B1 (en) | 2004-02-05 |
KR970701158A (en) | 1997-03-17 |
DE69503472T2 (en) | 1999-03-04 |
US5571757A (en) | 1996-11-05 |
EP0743929A1 (en) | 1996-11-27 |
EP0743929B1 (en) | 1998-07-15 |
DE69503472D1 (en) | 1998-08-20 |
JPH09509394A (en) | 1997-09-22 |
TW314506B (en) | 1997-09-01 |
US5635429A (en) | 1997-06-03 |
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