WO1996021140A1 - Fabry-perot micro filter-detector - Google Patents
Fabry-perot micro filter-detector Download PDFInfo
- Publication number
- WO1996021140A1 WO1996021140A1 PCT/US1995/016505 US9516505W WO9621140A1 WO 1996021140 A1 WO1996021140 A1 WO 1996021140A1 US 9516505 W US9516505 W US 9516505W WO 9621140 A1 WO9621140 A1 WO 9621140A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- detector
- filter
- fabry
- wafer
- cavity
- Prior art date
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP95943872A EP0800643B1 (en) | 1994-12-30 | 1995-12-20 | Fabry-perot micro filter-detector |
CA002205875A CA2205875A1 (en) | 1994-12-30 | 1995-12-20 | Fabry-perot micro filter-detector |
DE69530225T DE69530225T2 (en) | 1994-12-30 | 1995-12-20 | MICRO DETECTOR WITH FABRY PEROT FILTER |
JP8521046A JPH10511772A (en) | 1994-12-30 | 1995-12-20 | Fabry-Perot microfilter detector |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/367,491 | 1994-12-30 | ||
US08/367,491 US5550373A (en) | 1994-12-30 | 1994-12-30 | Fabry-Perot micro filter-detector |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996021140A1 true WO1996021140A1 (en) | 1996-07-11 |
Family
ID=23447390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1995/016505 WO1996021140A1 (en) | 1994-12-30 | 1995-12-20 | Fabry-perot micro filter-detector |
Country Status (6)
Country | Link |
---|---|
US (1) | US5550373A (en) |
EP (1) | EP0800643B1 (en) |
JP (1) | JPH10511772A (en) |
CA (1) | CA2205875A1 (en) |
DE (1) | DE69530225T2 (en) |
WO (1) | WO1996021140A1 (en) |
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JPH11160158A (en) * | 1997-11-28 | 1999-06-18 | Hochiki Corp | Fire monitoring device |
DE10239509A1 (en) * | 2002-06-07 | 2004-01-08 | Delta Electronics, Inc. | Optical Fabry-Perot filter device |
US7800066B2 (en) | 2006-12-08 | 2010-09-21 | Regents of the University of Minnesota Office for Technology Commercialization | Detection beyond the standard radiation noise limit using reduced emissivity and optical cavity coupling |
US7957004B2 (en) | 2005-04-15 | 2011-06-07 | Sinvent As | Interference filter |
US7968846B2 (en) | 2006-05-23 | 2011-06-28 | Regents Of The University Of Minnesota | Tunable finesse infrared cavity thermal detectors |
WO2011131164A1 (en) * | 2010-04-21 | 2011-10-27 | Conti Temic Microelectronic Gmbh | Optical device and method for positioning an optical element above an image recording element |
WO2013167811A1 (en) * | 2012-05-08 | 2013-11-14 | Teknologian Tutkimuskeskus Vtt | Fabry-perot interferometer and a method for producing the same |
US8629398B2 (en) | 2008-05-30 | 2014-01-14 | The Regents Of The University Of Minnesota | Detection beyond the standard radiation noise limit using spectrally selective absorption |
WO2015154875A1 (en) * | 2014-04-11 | 2015-10-15 | Jenoptik Optical Systems Gmbh | Camera with integrated spectrometer |
US9448176B2 (en) | 2011-09-29 | 2016-09-20 | Seiko Epson Corporation | Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus |
FR3050526A1 (en) * | 2016-04-25 | 2017-10-27 | Commissariat Energie Atomique | ELECTROMAGNETIC RADIATION DETECTION DEVICE WITH ENCAPSULATION STRUCTURE HAVING AT LEAST ONE INTERFERENTIAL FILTER |
EP3404380A1 (en) * | 2017-04-28 | 2018-11-21 | Robert Bosch GmbH | Method and device for calibration of a microspectrometer module |
EP3683557A1 (en) * | 2019-01-18 | 2020-07-22 | Infineon Technologies Dresden GmbH & Co . KG | Tunable fabry-perot filter element, spectrometer device and method for manufacturing a tunable fabry-perot filter element |
WO2021043457A1 (en) * | 2019-09-03 | 2021-03-11 | Robert Bosch Gmbh | Interferometer device and method for producing an interferometer device |
WO2021043458A1 (en) * | 2019-09-03 | 2021-03-11 | Robert Bosch Gmbh | Interferometer device and method for producing an interferometer device |
WO2021043462A1 (en) * | 2019-09-03 | 2021-03-11 | Robert Bosch Gmbh | Spectrometer package having a mems fabry-pérot interferometer |
US11118972B2 (en) | 2015-04-28 | 2021-09-14 | Hamamatsu Photonics K.K. | Optical detection device having adhesive member |
US11199455B2 (en) | 2017-08-31 | 2021-12-14 | Teknologian Tutkimuskeskus Vtt Oy | Thermal detector and thermal detector array |
US11448553B2 (en) | 2016-03-09 | 2022-09-20 | Hamamatsu Photonics K.K. | Light detection device |
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US6674562B1 (en) * | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
US7808694B2 (en) * | 1994-05-05 | 2010-10-05 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US7852545B2 (en) | 1994-05-05 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US20010003487A1 (en) * | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
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US7898722B2 (en) * | 1995-05-01 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with restoring electrode |
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Also Published As
Publication number | Publication date |
---|---|
CA2205875A1 (en) | 1996-07-11 |
JPH10511772A (en) | 1998-11-10 |
DE69530225D1 (en) | 2003-05-08 |
EP0800643A1 (en) | 1997-10-15 |
US5550373A (en) | 1996-08-27 |
DE69530225T2 (en) | 2004-02-19 |
EP0800643B1 (en) | 2003-04-02 |
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