WO1996034677A1 - Devices and methods related to the filtration and/or purification of fluids - Google Patents
Devices and methods related to the filtration and/or purification of fluids Download PDFInfo
- Publication number
- WO1996034677A1 WO1996034677A1 PCT/US1996/006748 US9606748W WO9634677A1 WO 1996034677 A1 WO1996034677 A1 WO 1996034677A1 US 9606748 W US9606748 W US 9606748W WO 9634677 A1 WO9634677 A1 WO 9634677A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid
- housing
- carbon
- barrier member
- medium
- Prior art date
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 160
- 238000000034 method Methods 0.000 title claims abstract description 56
- 238000000746 purification Methods 0.000 title claims abstract description 54
- 238000001914 filtration Methods 0.000 title claims abstract description 46
- 229910052751 metal Inorganic materials 0.000 claims abstract description 153
- 239000002184 metal Substances 0.000 claims abstract description 153
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 103
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 101
- 239000000758 substrate Substances 0.000 claims abstract description 82
- 230000004888 barrier function Effects 0.000 claims abstract description 71
- 239000002243 precursor Substances 0.000 claims abstract description 26
- 238000000151 deposition Methods 0.000 claims abstract description 25
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- 239000012535 impurity Substances 0.000 claims description 50
- 239000000356 contaminant Substances 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 239000002609 medium Substances 0.000 description 109
- 239000010410 layer Substances 0.000 description 70
- 239000007789 gas Substances 0.000 description 50
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 44
- 230000008569 process Effects 0.000 description 23
- 229910052786 argon Inorganic materials 0.000 description 22
- 239000001257 hydrogen Substances 0.000 description 22
- 229910052739 hydrogen Inorganic materials 0.000 description 22
- 239000000463 material Substances 0.000 description 21
- 239000001301 oxygen Substances 0.000 description 21
- 229910052760 oxygen Inorganic materials 0.000 description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 20
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 18
- 238000000576 coating method Methods 0.000 description 16
- 238000000429 assembly Methods 0.000 description 14
- 230000000712 assembly Effects 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 14
- 239000011261 inert gas Substances 0.000 description 14
- 238000011144 upstream manufacturing Methods 0.000 description 14
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 13
- 229910002091 carbon monoxide Inorganic materials 0.000 description 13
- 239000000203 mixture Substances 0.000 description 13
- 239000012298 atmosphere Substances 0.000 description 12
- 150000002739 metals Chemical class 0.000 description 11
- 230000008929 regeneration Effects 0.000 description 11
- 238000011069 regeneration method Methods 0.000 description 11
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- 239000010935 stainless steel Substances 0.000 description 10
- 229910001220 stainless steel Inorganic materials 0.000 description 10
- 238000011109 contamination Methods 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 8
- 238000001994 activation Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 229910052756 noble gas Inorganic materials 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 239000002002 slurry Substances 0.000 description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 239000011148 porous material Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 229910001868 water Inorganic materials 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
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- 239000000835 fiber Substances 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 5
- 229910052749 magnesium Inorganic materials 0.000 description 5
- 238000010926 purge Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 4
- 230000002411 adverse Effects 0.000 description 4
- 239000003125 aqueous solvent Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
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- 239000011734 sodium Substances 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000001627 detrimental effect Effects 0.000 description 3
- 238000007323 disproportionation reaction Methods 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
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- 230000000717 retained effect Effects 0.000 description 3
- 150000004756 silanes Chemical class 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- BICAGYDGRXJYGD-UHFFFAOYSA-N hydrobromide;hydrochloride Chemical compound Cl.Br BICAGYDGRXJYGD-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- UOUJSJZBMCDAEU-UHFFFAOYSA-N chromium(3+);oxygen(2-) Chemical class [O-2].[O-2].[O-2].[Cr+3].[Cr+3] UOUJSJZBMCDAEU-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-N hydrogen bromide Substances Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
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- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- RGVLTEMOWXGQOS-UHFFFAOYSA-L manganese(2+);oxalate Chemical compound [Mn+2].[O-]C(=O)C([O-])=O RGVLTEMOWXGQOS-UHFFFAOYSA-L 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052645 tectosilicate Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
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- B01D53/34—Chemical or biological purification of waste gases
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- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/0203—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising compounds of metals not provided for in B01J20/04
- B01J20/0225—Compounds of Fe, Ru, Os, Co, Rh, Ir, Ni, Pd, Pt
- B01J20/0229—Compounds of Fe
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- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
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- B01J20/32—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating
- B01J20/3231—Impregnating or coating ; Solid sorbent compositions obtained from processes involving impregnating or coating characterised by the coating or impregnating layer
- B01J20/3289—Coatings involving more than one layer of same or different nature
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S95/90—Solid sorbent
- Y10S95/901—Activated carbon
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/496—Multiperforated metal article making
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T29/49826—Assembling or joining
- Y10T29/49885—Assembling or joining with coating before or during assembling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49982—Coating
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96915728A EP0828548B1 (en) | 1995-05-03 | 1996-05-02 | Devices and methods related to the filtration and/or purification of fluids |
DE69625902T DE69625902T2 (en) | 1995-05-03 | 1996-05-02 | REACTIVE FILTER DEVICE FOR GAS WITH BLOCKING FILTER |
JP53357996A JP3796754B2 (en) | 1995-05-03 | 1996-05-02 | Apparatus and methods for fluid filtration and / or purification |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43302295A | 1995-05-03 | 1995-05-03 | |
US08/433,022 | 1995-05-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996034677A1 true WO1996034677A1 (en) | 1996-11-07 |
Family
ID=23718543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1996/006748 WO1996034677A1 (en) | 1995-05-03 | 1996-05-02 | Devices and methods related to the filtration and/or purification of fluids |
Country Status (6)
Country | Link |
---|---|
US (2) | US5829139A (en) |
EP (1) | EP0828548B1 (en) |
JP (1) | JP3796754B2 (en) |
KR (1) | KR19990008289A (en) |
DE (1) | DE69625902T2 (en) |
WO (1) | WO1996034677A1 (en) |
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US6471745B1 (en) * | 1996-06-28 | 2002-10-29 | University Of Delaware | Nanoporous carbon catalytic membranes and method for making the same |
CA2194653A1 (en) * | 1997-01-08 | 1998-07-08 | Junichi Matsushita | Hydrogen heat treatment method of silicon wafers using a high-purity inert substitution gas |
US6248235B1 (en) * | 1999-03-30 | 2001-06-19 | Robin Scott | Fluid purification system |
US7465692B1 (en) * | 2000-03-16 | 2008-12-16 | Pall Corporation | Reactive media, methods of use and assemblies for purifying |
US6425946B1 (en) * | 2000-12-26 | 2002-07-30 | Matheson Tri-Gas, Inc. | Method and apparatus for removing trace impurities from a gas using superactivated carbon material |
CA2433511A1 (en) * | 2001-02-08 | 2002-08-22 | Pall Corporation | Purifier |
US6824589B2 (en) * | 2001-10-31 | 2004-11-30 | Matheson Tri-Gas | Materials and methods for the purification of inert, nonreactive, and reactive gases |
GB2394428B (en) * | 2002-10-24 | 2006-09-20 | Microfiltrex Ltd | Improvements in and relating to filters |
FR2850588B1 (en) * | 2003-01-31 | 2007-08-03 | Inst Francais Du Petrole | POROUS INORGANIC CARBON-CONTAINING MEMBRANE, PROCESS FOR PREPARING THE SAME, AND USE THEREOF |
US7553355B2 (en) * | 2003-06-23 | 2009-06-30 | Matheson Tri-Gas | Methods and materials for the reduction and control of moisture and oxygen in OLED devices |
US20050053535A1 (en) * | 2003-09-08 | 2005-03-10 | Seh America, Inc. | Gettering filter and associated method for removing oxygen from a gas |
US7115152B2 (en) * | 2004-01-12 | 2006-10-03 | Friday David K | Four bed regenerable filter system |
CA2503655C (en) * | 2004-04-06 | 2013-08-06 | Universite De Sherbrooke | Carbon sequestration and dry reforming process and catalysts to produce same |
US20070253886A1 (en) * | 2004-04-06 | 2007-11-01 | Universite De Sherbrooke | Carbon sequestration and dry reforming process and catalysts to produce same |
US7850766B1 (en) * | 2005-08-31 | 2010-12-14 | Cocona, Inc. | Systems and methods for preferentially heating active particles and articles produced thereof |
US7484626B2 (en) * | 2006-03-23 | 2009-02-03 | Ut-Battelle, Llc | Water nano-filtration device |
EP2125154A2 (en) * | 2007-03-15 | 2009-12-02 | Janssen Pharmaceutica, N.V. | Filter assembly containing metal fiber filter elements |
TWI617344B (en) * | 2012-02-10 | 2018-03-11 | 恩特葛瑞斯股份有限公司 | Gas purifier |
DE102012005719A1 (en) * | 2012-03-20 | 2013-09-26 | Hydac Accessories Gmbh | Test device for determining the particle load of high-pressure hydrogen |
JP5979667B2 (en) * | 2012-09-19 | 2016-08-24 | 国立研究開発法人物質・材料研究機構 | Method for forming metal silicide |
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-
1996
- 1996-05-02 WO PCT/US1996/006748 patent/WO1996034677A1/en not_active Application Discontinuation
- 1996-05-02 KR KR1019970707815A patent/KR19990008289A/en not_active Application Discontinuation
- 1996-05-02 JP JP53357996A patent/JP3796754B2/en not_active Expired - Fee Related
- 1996-05-02 EP EP96915728A patent/EP0828548B1/en not_active Expired - Lifetime
- 1996-05-02 DE DE69625902T patent/DE69625902T2/en not_active Expired - Fee Related
-
1997
- 1997-11-21 US US08/976,118 patent/US5829139A/en not_active Expired - Fee Related
-
1998
- 1998-11-02 US US09/184,349 patent/US6066591A/en not_active Expired - Fee Related
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EP0083489A2 (en) * | 1982-01-04 | 1983-07-13 | Brunswick Corporation | Membrane systems for filtration |
US5114447A (en) * | 1991-03-12 | 1992-05-19 | Mott Metallurgical Corporation | Ultra-high efficiency porous metal filter |
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PATENT ABSTRACTS OF JAPAN vol. 17, no. 475 (C - 1103) 30 August 1993 (1993-08-30) * |
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Also Published As
Publication number | Publication date |
---|---|
DE69625902T2 (en) | 2003-11-13 |
EP0828548B1 (en) | 2003-01-22 |
DE69625902D1 (en) | 2003-02-27 |
US6066591A (en) | 2000-05-23 |
JP3796754B2 (en) | 2006-07-12 |
EP0828548A1 (en) | 1998-03-18 |
JPH11509466A (en) | 1999-08-24 |
US5829139A (en) | 1998-11-03 |
KR19990008289A (en) | 1999-01-25 |
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