WO1996034701A1 - Elastomeric micro electromechanical systems - Google Patents
Elastomeric micro electromechanical systems Download PDFInfo
- Publication number
- WO1996034701A1 WO1996034701A1 PCT/CA1996/000268 CA9600268W WO9634701A1 WO 1996034701 A1 WO1996034701 A1 WO 1996034701A1 CA 9600268 W CA9600268 W CA 9600268W WO 9634701 A1 WO9634701 A1 WO 9634701A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microelectrodes
- substrate
- electromechanical transducer
- microstructures
- macroelectrodes
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019970707737A KR100286486B1 (en) | 1995-05-01 | 1996-04-26 | Elastomeric Micro Electromechanical Systems |
DE69609414T DE69609414T2 (en) | 1995-05-01 | 1996-04-26 | ELASTOMERIC MICROELECTROMECANIC SYSTEM |
AU53945/96A AU5394596A (en) | 1995-05-01 | 1996-04-26 | Elastomeric micro electromechanical systems |
JP8532877A JP3016870B2 (en) | 1995-05-01 | 1996-04-26 | Elastomeric micro-electro-mechanical systems |
EP96910876A EP0824381B1 (en) | 1995-05-01 | 1996-04-26 | Elastomeric micro electromechanical systems |
CA002218876A CA2218876C (en) | 1995-05-01 | 1996-04-26 | Elastomeric micro electro mechanical systems |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/431,735 US5642015A (en) | 1993-07-14 | 1995-05-01 | Elastomeric micro electro mechanical systems |
US08/431,735 | 1995-05-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996034701A1 true WO1996034701A1 (en) | 1996-11-07 |
Family
ID=23713203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CA1996/000268 WO1996034701A1 (en) | 1995-05-01 | 1996-04-26 | Elastomeric micro electromechanical systems |
Country Status (9)
Country | Link |
---|---|
US (1) | US5642015A (en) |
EP (1) | EP0824381B1 (en) |
JP (1) | JP3016870B2 (en) |
KR (1) | KR100286486B1 (en) |
CN (1) | CN1047107C (en) |
AU (1) | AU5394596A (en) |
CA (1) | CA2218876C (en) |
DE (1) | DE69609414T2 (en) |
WO (1) | WO1996034701A1 (en) |
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- 1996-04-26 CA CA002218876A patent/CA2218876C/en not_active Expired - Fee Related
- 1996-04-26 EP EP96910876A patent/EP0824381B1/en not_active Expired - Lifetime
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DE19825581A1 (en) * | 1998-06-09 | 1999-12-16 | Volkswagen Ag | Ultrasonic film transformer for measuring distance to another object, e.g. a vehicle, and manufacturing process giving a transformer which can be easily adapted to different contours |
WO2000039914A1 (en) * | 1998-12-29 | 2000-07-06 | Honeywell Inc. | Polymer microactuator array with macroscopic force and displacement |
US6184608B1 (en) | 1998-12-29 | 2001-02-06 | Honeywell International Inc. | Polymer microactuator array with macroscopic force and displacement |
WO2002015378A1 (en) * | 2000-08-11 | 2002-02-21 | Ecchandes Inc. | Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof |
US6870306B2 (en) | 2000-08-11 | 2005-03-22 | Ecchandes Inc. | Overlapping type piezoelectric stator, overlapping type piezoelectric actuator and applications thereof |
WO2002037660A1 (en) * | 2000-11-02 | 2002-05-10 | Danfoss A/S | Actuating member and method for producing the same |
KR100839818B1 (en) | 2000-11-02 | 2008-06-19 | 댄포스 아/에스 | Actuating member and method for producing the same |
EP1330867B1 (en) * | 2000-11-02 | 2013-11-20 | Danfoss A/S | Actuating member and method for producing the same |
US7400080B2 (en) | 2002-09-20 | 2008-07-15 | Danfoss A/S | Elastomer actuator and a method of making an actuator |
US8692442B2 (en) | 2012-02-14 | 2014-04-08 | Danfoss Polypower A/S | Polymer transducer and a connector for a transducer |
US8891222B2 (en) | 2012-02-14 | 2014-11-18 | Danfoss A/S | Capacitive transducer and a method for manufacturing a transducer |
Also Published As
Publication number | Publication date |
---|---|
CA2218876A1 (en) | 1996-11-07 |
KR100286486B1 (en) | 2001-04-16 |
EP0824381A1 (en) | 1998-02-25 |
CA2218876C (en) | 1999-12-07 |
MX9708359A (en) | 1998-06-30 |
US5642015A (en) | 1997-06-24 |
JP3016870B2 (en) | 2000-03-06 |
DE69609414D1 (en) | 2000-08-24 |
JPH10511528A (en) | 1998-11-04 |
DE69609414T2 (en) | 2001-03-08 |
CN1047107C (en) | 1999-12-08 |
CN1186458A (en) | 1998-07-01 |
EP0824381B1 (en) | 2000-07-19 |
KR19990008212A (en) | 1999-01-25 |
AU5394596A (en) | 1996-11-21 |
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