WO1996037340A1 - Interactive system for lapping transducers - Google Patents

Interactive system for lapping transducers Download PDF

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Publication number
WO1996037340A1
WO1996037340A1 PCT/US1996/007606 US9607606W WO9637340A1 WO 1996037340 A1 WO1996037340 A1 WO 1996037340A1 US 9607606 W US9607606 W US 9607606W WO 9637340 A1 WO9637340 A1 WO 9637340A1
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
lapping
communication
signal
magnetic
Prior art date
Application number
PCT/US1996/007606
Other languages
French (fr)
Original Assignee
Censtor Corp.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Censtor Corp. filed Critical Censtor Corp.
Publication of WO1996037340A1 publication Critical patent/WO1996037340A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/048Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/16Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding sharp-pointed workpieces, e.g. needles, pens, fish hooks, tweezers or record player styli
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B24B49/045Specially adapted gauging instruments
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10Single-purpose machines or devices
    • B24B7/16Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00Head arrangements not specific to the method of recording or reproducing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00Head arrangements not specific to the method of recording or reproducing
    • G11B21/16Supporting the heads; Supporting the sockets for plug-in heads
    • G11B21/20Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier
    • G11B21/21Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier with provision for maintaining desired spacing of head from record carrier, e.g. fluid-dynamic spacing, slider
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/10Indicating arrangements; Warning arrangements
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10Structure or manufacture of housings or shields for heads
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/187Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1871Shaping or contouring of the transducing or guiding surface
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/455Arrangements for functional testing of heads; Measuring arrangements for heads
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3166Testing or indicating in relation thereto, e.g. before the fabrication is completed
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49021Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032Fabricating head structure or component thereof
    • Y10T29/49034Treating to affect magnetic properties
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49021Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032Fabricating head structure or component thereof
    • Y10T29/49036Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49041Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49021Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032Fabricating head structure or component thereof
    • Y10T29/49048Machining magnetic material [e.g., grinding, etching, polishing]

Definitions

  • the present invention is generally directed to the manufacture of transducers for
  • the transducer for writing and reading
  • a ceramic carrier typically is formed on or attached to a ceramic carrier, a
  • the magnetic pole or poles of the transducer are positioned
  • sliders have been designed to "fly" above the surface of the rotating media at the minimum “flying height” consistent with the need to maintain sufficient separation in
  • the present invention may be applicable to any system in which the particular geometry of
  • a transmitting or receiving terminal of the transducer is important to signal transmission.
  • such lapping of flying heads includes an electrical lapping guide
  • Smith teaches means for improving the accuracy of an electrical lapping guide by
  • resistive lapping guide with a finished lapping guide in order to calculate appropriate
  • Pat. No. 5,137,750 teach a method of making pole heads that may be etched after lapping
  • Haines et al. teaches first lapping a magnetic core for a vertical recording
  • the transducer has been optimally lapped.
  • a slider surface is lapped sufficiently to either expose the magnetic pole or to
  • the optimal amount of lapping is determined directly by reading information from and/or
  • Such an interactive lapping system is the ability to test a transducer for mechanical and
  • magnetically active lapping disks having surface
  • Lapping may be performed in steps with a plurality of disks having decreasing roughness and/or hardness
  • transducer machining progresses generally from rough lapping to polishing.
  • Individual lapping bodies such as disks may also be constructed to have a graded
  • suspension structures in an automated process, but also to automatically test and grade
  • each head for read/write performance.
  • Performing lapping as one of the final steps in transducer fabrication also allows automatic testing and grading of dynamic mechanical performance of each slider suspension structure while in sliding contact operation with a
  • transducer signal information may be utilized in combination with
  • electromechanical transducers e.g., laser Doppler vibrometers
  • signal processing e.g., signal processing and
  • the present invention not only offers a
  • Fig. 1 is a perspective plan view of a simple interactive lapping system of the present invention.
  • Fig. 2 is a plot of an increasing amplitude electronic signal received from a
  • Fig. 3 is a fragmentary, expanded, cross-sectional view of a portion of the lapping system of Fig. 1.
  • Fig. 4 is a fragmentary, expanded, cross-sectional view of a portion of a
  • Fig. 5 is a plot of a surface topography of an interactive rough lapping disk of the
  • Fig. 6 is a plot of a surface topography of an interactive smooth lapping disk of
  • Fig. 7 is a fragmentary top view of a row of transducers being simultaneously
  • Fig. 8 is a superimposed plot of increasing amplitude electronic signals from the
  • transducers of Fig. 7 received by the processor during lapping.
  • Fig. 9 is a plot of the shape of an isolated pulse signal from a transducer received
  • Fig. 10 is a perspective view of a row of transducers connected to flexible support
  • Fig. 11 is an expanded, cross-sectional, cut-away view of a system for holding and
  • Fig. 12 is a fragmentary perspective plan view of an interactive lapping drum
  • FIG. 13 is a fragmentary cross-sectional view of a pair of transducers and pads of
  • Fig. 12 being tilted during lapping for rounding of the pads.
  • Fig. 14 is a simplified plan view of an interactive lapping tape system of the
  • Fig. 15 is a plot of a signal from a transducer being analyzed for performance
  • a lapping disk 20 having an abrasive surface 22 is shown
  • a substrate 24 is disposed beneath the medium layer 23 and connected to a
  • the surface 22 may be
  • Another communication medium such as an electrical or optical storage medium, for lapping transducers employed in information storage systems of those media.
  • a support bar 25 Projecting inwardly over the surface 22 is a support bar 25 which, for simplicity, is shown to be holding a single transducer 28 via a flexure beam 30, the beam connected
  • the transducer 28 in this embodiment is designed for contact reading and writing with
  • the beam 30 and bar 25 include conductive elements that can carry signals
  • transducer 28 and processor 32, which is shown simply as a box in this plan
  • the processor 32 monitors the transducer 28 during lapping with the disk 20, so
  • the processor sends a signal to the positioning element 31 , which
  • the positioning element may be a piezoelectric body
  • the signal can be manually monitored for a visible or audible signal at which point the lapping bar 25 can be manually raised, lifting the transducer from the disk to terminate lapping.
  • Fig. 2 shows a plot 33 of an electronic signal received at processor 32 during
  • lapping depends on a number of factors, and may occur during or just following the
  • the signal received by the transducer 28 from the lapping disk 20 can be any signal received by the transducer 28 from the lapping disk 20.
  • the disk 20 during lapping is preferable as the signal increases with lapping due to
  • simultaneous writing and reading during lapping also provides a method for testing the
  • Fig. 3 shows a more detailed view of the structure ofthe transducer 28 and the
  • the disk substrate 24 is formed of a self-supporting material such as an
  • Another hard layer 27 may be deposited atop the substrate 24 and textured before the magnetic layer 23 is sputtered thereon, the texture being substantially
  • the substrate is first textured in order to obtain a similarly
  • the magnetic layer 23 may be any magnetic material. As is known in the formation of rigid magnetic disks, the magnetic layer 23 may be any magnetic material.
  • the thickness of layer 23 may be over twice that typical for magnetic disks, or as much as about 1000-2000 angstroms, in order to allow a
  • Layer 23 is shown as a single layer, which would be appropriate
  • the stiffening layer 27 may be formed. In the latter case, the stiffening layer 27, the stiffening layer may be formed. In the latter case, the stiffening layer 27, the stiffening layer may
  • the hard protective layer 26 may be formed of diamond-like-carbon (DLC),
  • hard coating layer 26 may have a thickness of between 500 and 2000
  • the coating layer 26 is substantially thinner, preferably about 200 to 300 angstroms
  • the transducer 28 has a head 36 containing a pole 37 for communication with
  • Pole 46 is surrounded by a hard, wear-resistant, non-
  • magnetic material 38 such as DLC, which obstructs pole 37 from communicating with
  • transducer 28 may contain an adjacent pole
  • structures associated with a magnetoresistive sensor may be
  • Transducer 28 is attached to flexure
  • pole tip recession which can be augmented by rounding of the pole tips by lapping
  • pole 37 terminates coextensively with hard wear material 38 at
  • Fig. 4 illustrates the employment ofthe interactive lapping of the present
  • the head 44 is attached to a slider 45 having an air bearing
  • a pair of soft magnetic poles 49 and 50 extend
  • a number of conductive elements 52 are
  • throat height Th as the magnetic coupling of signals is stronger as the throat height
  • a transducer or transducers can be machined with the
  • pole tip recession can be reduced
  • medium layer 23 which also has a thickness of about 80 nanometers and is not shown in
  • the substrate 24 is adjoined with a
  • Formation ofthe rough lapping surface 53 begins by roughening or texturing at
  • a substrate 24 made of aluminum alloy for example.
  • texturing can be accomplished effectively by rubbing an abrasive tape on the surface, preferably in a radial direction as the disk is rotated more slowly or in discrete steps to
  • the substrate roughness may increase, decrease or substantially
  • the medium layer is sputter deposited the medium layer, which may be
  • layer 26 may be formed of DLC, cathodic arc carbon, silicon carbide, boron carbide or
  • CVD enhanced chemical vapor deposition
  • sputtering may be employed. It should be
  • DLC is an essentially amo ⁇ hous mixture containing carbon atoms with bonds
  • layer 26 and surface 53 material characteristics of layer 26 and surface 53, including hardness, roughness and
  • vertical peak 54 to valley 55 height does not substantially exceed about 100 nanometers.
  • a smoother, subsequent lapping disk surface 56 shown in Fig. 6 may be
  • peak 57 to valley 58 height does not exceed 100 nanometers.
  • surface area differ in height by between 2 and 10 nanometers within a 100 ⁇ m surface area.
  • Smooth lapping surface 56 is formed in a manner similar to that described above
  • hard coating layer 26 which tend to mimic the texture ofthe substrate 24 more closely.
  • a smooth lapping surface 56 to be employed for interactive lapping of magnetic transducers, a medium layer 23 and a hard coating layer 26 each may
  • the support bar 25 holds a number of beams 60-65 and
  • transducers 70-75 to lapping disk 20 for simultaneous lapping as the disk revolves in a
  • the transducers 70-75 are each independently connected
  • each ofthe transducers is individually controlled for optimal lapping
  • Plot 80 represents a signal received from
  • transducer 75 which ramps up in amplitude earlier than the other transducers and
  • Plot 81 corresponding to transducer 74, is
  • next signal to increase but reaches a relatively low maximum value and may, for this
  • Plots 82, 83 and 84 correspond to transducers 70, 71 and 72
  • transducer 85 corresponds to transducer 73, which is the last transducer to signal an increase in
  • transducer 73 may result in transducer 73 being discarded due to the low value of
  • amplitude achieved in plot 85 may begin to increase simultaneously during lapping, while proceeding at different rates
  • Fig. 9 shows an alternative preferred method of monitoring transducer signals for
  • a signal is preferably written to the lapping disk 20 during lapping in order to
  • transducer 28 will be lifted from the lapping disk. If transducer 28 is lapped
  • the amplitude ofthe pulse may continue to increase for a period of time
  • threshold narrowness in pulse time at half-maximum amplitude e.g., 10 to 100
  • Fig. 9 can also be used to illustrate another aspect ofthe current invention, as the
  • waveforms 90, 92 and 94 can represent signals from different transducers, such as
  • present invention may be directed to rigid disk storage systems, flexible disk storage
  • the present invention can be used for lapping sliders and/or heads for conventional flying heads, or for lapping heads for contact based communication between the transducer and
  • an information storage system is
  • pu ⁇ ose of this invention to include all types of systems for
  • detecting instrument may include a transducer for detecting relative positions, which can
  • an optical fiber can be used as an
  • electro-optical transducer for obtaining information about the interior of a person ' s body
  • Sensors of magnetic, inductive, capacitative, electrically conductive, optical, radioactive, and other forms of information can be fabricated with the interactive
  • Figs. 10 and 11 show a means for monitoring and lifting transducers from a
  • transducer 110 which has been formed to include magnetic reading
  • transducers 1 10 includes on a bottom surface having a pad 1 12 for contact with a rigid
  • Fig. 1 1 shows a portion of a lapping disk 120 including a substrate 123, a
  • the magnetic layer having a surface 130 for lapping or polishing a transducer
  • transducer 110 Only one transducer 110 and beam 102 are shown Fig. 1 1 for clarity, while one
  • the transducer 110 of this embodiment has three
  • gimbal bump 116 allows the three pads 112-114 to be in simultaneous contact with the
  • each transducer 110 are connected to each transducer 110 to provide an electrical circuit for sending and
  • the surface 130 is moving relative to a beam
  • the beam 102 meets the disk 120 at an angle alpha relative to
  • a plane ofthe surface 130 that may range between -3 and +3 degrees for lapping of a
  • An upper plate 133 of a clamp 135 that holds the beam 102 extends further along
  • transducer 1 10 and a processor, not shown in this figure. Although only one pin 140 is
  • a second pin is also employed for communication with each of the
  • each transducer 1 10 has a
  • a removal block 142 has an air duct 144 which is
  • transducer to be opened when the transducer receives a signal that lapping should be
  • a lapping drum 148 may be employed in
  • the drum 148 offers a uniform lapping speed to each
  • Transducers 150 are disposed at ends of flexible beams 155, and
  • single pad 152 can also be accomplished by varying the angle at which a plane containing
  • the beams 157 addresses the lapping drum 148, a technique similarly applicable to
  • each beam 157 with a clamp that can rotate somewhat about the long axis ofthe beam, not shown. Note that only one side ofthe clamp needs to rotate if the
  • pole tip recession in transducer formation but the converse creation of pole tip protrusion.
  • the abrasive magnetic storage tape 160 is wound from a first reel 162 to a second reel 164 in a direction shown by arrow V, while a row of transducers 166, each
  • tape 160 and transducers 166 may be designed for longitudinal or pe ⁇ endicular
  • the transducers 166 are each connected with a processor 170 via a bar 172, the
  • recording heads 173 may be positioned along the tape upstream ofthe transducers 166 in
  • positioning element 174 is attached to each beam 168 and the bar 172 and electronically
  • the tape may be cost
  • an embedded magnetic pole for contact communication with a medium may be rounded in this manner to avoid separation of the pole from the medium during tilting of
  • Another potential advantage of an interactive, tape based lapping system may be
  • variable air pressure may be used to adjust the pressure felt
  • the tension provided to the tape 160 provides a
  • edges are rounded.
  • rounding of corners may occur differentially for corners that are oriented along the direction of tape motion as compared
  • a tape lapping body like a drum lapping body, has the advantage of
  • Fig. 15 illustrates another aspect of the present invention - the ability to test
  • transducers for electrical, magnetic, mechanical, dynamic, optical or other performance
  • curve 180 is a plot of the signal received by a transducer during lapping with a body
  • the curve 180 has a signal amplitude modulation
  • amplitude modulation may be caused by vibration ofthe transducer being tested, or
  • transducer with specific performance traits, and that such amplitudes and times may vary
  • lines 182 and 184 may represent
  • the transducer is first
  • performance testing and grading may be accomplished in serial or parallel tests

Abstract

A system for lapping transducers (28) has an abrasive surface (22) that communicates with the transducers to provide information for controlling the lapping of the transducer. The lapping body (20) communicates with a transducer (28) with a signal that the transducer is designed to read or write. For lapping a magnetic head or slider, the lapping body contains a magnetic medium layer (23) that is prerecorded or written by the head during lapping, while the signal received by the head is monitored by a processor (32) in order to terminate lapping.

Description

Interactive System For Lapping Transducers
Technical Field
The present invention is generally directed to the manufacture of transducers for
information storage systems such as disk or tape drives, with particular emphasis on
methods and apparatuses for lapping transducers employed in rigid magnetic disk drives.
Background of the Invention
In rigid magnetic media disk drives, the transducer, for writing and reading
information on the media, typically is formed on or attached to a ceramic carrier, a
"slider," which is supported by a flexible suspension, which is in turn mounted on an arm
of an actuator assembly. The magnetic pole or poles of the transducer are positioned
coplanar with the surface of the slider, which confronts the media. In the past, such
sliders have been designed to "fly" above the surface of the rotating media at the minimum "flying height" consistent with the need to maintain sufficient separation in
order to avoid catastrophic wear and achieve long term reliability. The need to fly low, in
order to increase recording density and performance, is thus in conflict with constraints
imposed by mechanical and interface considerations. The latter relate to a variety of
design, manufacturing and quality control issues, not only of the slider but also of the
surface properties of the media. In particular, tight tolerances are required in creating the "air bearing surface," configuring the "ramp," controlling "throat height" and "pole tip recession" and attaching the slider to the gimbal suspension structure. The allowable recording density increased over the years, presenting greater and greater challenges to manufacture.
It should be noted, in passing, that similar considerations and limitations can be
involved in the design and manufacture of all systems which utilize transducers to sense
or record images from or to a medium. That is, the resolution of such systems is
inversely related to the spacing separating the resolving elements of the transducer, e.g.,
an aperture in a near-field optical system, from the medium. As will become apparent,
the present invention may be applicable to any system in which the particular geometry of
a transmitting or receiving terminal of the transducer is important to signal transmission. A particular manufacturing process that has been employed in defining critical
features of transducers or heads used in magnetic read/write disk drive systems is the
lapping of the transducers by an abrasive surface. With the typical heads of such systems
that are designed to "fly" on an air layer during reading or writing operations with a disk,
such lapping has been used to form the air bearing surfaces and ramps of sliders. A
particular problem encountered in mass production of such heads is the differential extent
to which a row of heads may be lapped, due to "bowing" of the row and other factors. In
U.S. Pat. No. 5,321,882, Zarouri et al. propose that the lapping of a group of air bearing
sliders is more advantageously accomplished by holding the sliders in a column rather
than a row. On the other hand, Bischoff et al., in U.S. Pat. No. 5,117,589, disclose a
device for adjusting the bowing of a row of sliders held by the device during lapping, by
mechanically or electronically compensating for bowing. Commonly, such lapping of flying heads includes an electrical lapping guide
attached to or incorporated in the device holding the transducers in an attempt to
determine when optimal material has been removed, for example, for the throat height of
the heads. As noted in U.S. Pat. No. 4,675,986 to Yen, electrical lapping devices have a
graded resistance at a surface of the holding device in order to measure the lapping of the
heads by measuring the resistance of the holding device. U.S. Pat. No. 5,175,938 to
Smith teaches means for improving the accuracy of an electrical lapping guide by
combining different types of graded resistors. Similarly, in U.S. Pat. No. 4,914,868,
Church et al. disclose a lapping control system for magnetoresitive transducers that
measures the resistance of those transducers to determine lapping height. And Zammit
teaches, in U.S. Pat. No. 5,065,483, a method for lapping thin film heads that compares a
resistive lapping guide with a finished lapping guide in order to calculate appropriate
lapping amounts of the heads.
Another approach to achieving smaller tolerances for head throat heights is to
perform an additional step for adjusting throat heights after lapping. Amin et al., in U.S.
Pat. No. 5,137,750, teach a method of making pole heads that may be etched after lapping
to create contoured pole tips. U.S. Pat. No. 5,283,942 to Chen et al. similarly discloses
an etching step which controls planarization of a gap layer at a pole tip. And in U.S. Pat.
No. 5,327,638, Haines et al. teaches first lapping a magnetic core for a vertical recording
head and then winding an electrical coil around the core.
Despite these advancements, a need for ever more accurate transducer dimensions
calls for continued improvement in the processes used for their manufacture. Moreover, a dramatic recent departure from the conventional magnetic recording technology has
resolved the conflicting demands between the reduction in flying height needed to
increase data storage density and the increased tendency to crash as flying height is
reduced. This conflict is resolved by adopting a fundamentally new slider/suspension
design logic, which assumes at the outset the possibility of reliably operating the
slider/transducer in continuous sliding contact, and is of key importance in U.S. Pat. No.
5,041,932 to Hamilton for INTEGRATED MAGNETIC
READ/WRITE/FLEXURE/CONDUCTOR STRUCTURE, assigned to the assignee of
the present invention. This new technology has demonstrated, in many hundreds of thousands of hours of cumulative testing, virtual freedom from "head crash" and the
capability for reliable, long term operation of sliders in continuous sliding contact with the media. In consequence of these developments, the magnetic spacing loss has been
reduced dramatically while the recording density has been correspondingly increased, and
the manufacture of head/suspension structures has been greatly simplified. It is with the preparation of a transducer surface for optimal conformation and
operational confrontation with a media surface that the present invention is concerned.
Therefore, it is a general objective of this invention to facilitate the manufacture of
transducers so as to increase yield and operational performance and decrease costs. A
specific objective of this invention is to provide simple, cost effective means and methods
of preparing the media-confronting surface of sliding and flying heads in concert with
their suspension structures, termed "sliders", so as to enable optimal magnetic interaction
with the media. Summary of the Invention
The above objects have been achieved with a system for lapping transducers
which employs an abrasive surface that transmits a signal during lapping, while
monitoring the transducer during lapping for an indication derived from the signal that
the transducer has been optimally lapped. To perfect a pole tip for a magnetic head, for
instance, a slider surface is lapped sufficiently to either expose the magnetic pole or to
optimize a throat height for magnetic interaction with an information storage medium.
The optimal amount of lapping is determined directly by reading information from and/or
recording information to a body having a relatively moving abrasive surface, which
serves simultaneously as an abrader and an information storage device.
Such a system for determining when to terminate the lapping of slider surfaces in order to optimize mechanical and recording performance has many advantages, the most important of which may be that reading and/or recording performance is by far the most sensitive measure of the point at which the magnetic pole or poles of the transducer come
into optimal relationship with the media. Another advantage that can be achieved with
such an interactive lapping system is the ability to test a transducer for mechanical and
electromagnetic performance characteristics following lapping, testing which may be
accomplished with the same device used for lapping.
In a preferred embodiment, magnetically active lapping disks having surface
coatings with topographies and molecular structures forming superhard materials
specifically optimized for lapping are employed. Superhard materials are defined in this
application as having a hardness greater than 400 kg(force)/mm . Lapping may be performed in steps with a plurality of disks having decreasing roughness and/or hardness,
so that transducer machining progresses generally from rough lapping to polishing.
Individual lapping bodies such as disks may also be constructed to have a graded
roughness, so that a transducer may be moved from a rough to a smooth portion of the
body according to signals received from the transducer.
In a mass production lapping environment, upon receipt of signals indicating that
an individual transducer has been appropriately lapped, that transducer may be
individually removed from the lapping body, thereby eliminating the problems of the
prior art with uneven lapping of a row of transducers. Moreover, preparing the slider
surface while mounted on an individual suspension rather than a row bar affords an
opportunity not only to individually control the lapping operation for each of many slider
suspension structures in an automated process, but also to automatically test and grade
each head for read/write performance. Performing lapping as one of the final steps in transducer fabrication also allows automatic testing and grading of dynamic mechanical performance of each slider suspension structure while in sliding contact operation with a
disk surface, while flying slightly above the surface for the case of flying heads or while
in "pseudo contact" somewhat between flying and sliding for tail dragging heads. In each
of these situations, transducer signal information may be utilized in combination with
electromechanical transducers, e.g., laser Doppler vibrometers, and signal processing and
analysis.
In addition to the advantages mentioned above, the improvements in machining
tolerances and transducer performance testing are achieved in a relatively simple system that does not require extra etching steps or the electrical lapping guides taught in the prior
art of lapping magnetic sliders. In this context, the present invention not only offers a
means for optimizing throat height and similar dimensions by using the most sensitive
and accurate measurement of those dimensions, but allows for integrated testing of
individual transducer characteristics to determine whether each transducer, slider and
suspension conforms to required specifications, in an automated system which
individually controls lapping and testing of multiple transducers simultaneously, yet
simplifies the lapping process.
Brief Description of the Drawings
Fig. 1 is a perspective plan view of a simple interactive lapping system of the present invention.
Fig. 2 is a plot of an increasing amplitude electronic signal received from a
transducer being lapped in the system of claim 1. Fig. 3 is a fragmentary, expanded, cross-sectional view of a portion of the lapping system of Fig. 1.
Fig. 4 is a fragmentary, expanded, cross-sectional view of a portion of a
conventional flying head being lapped by the system of claim 1.
Fig. 5 is a plot of a surface topography of an interactive rough lapping disk of the
present invention.
Fig. 6 is a plot of a surface topography of an interactive smooth lapping disk of
the present invention. Fig. 7 is a fragmentary top view of a row of transducers being simultaneously
lapped on an interactive lapping disk of Fig. 5 or Fig. 6 while individually controlled by a
processor.
Fig. 8 is a superimposed plot of increasing amplitude electronic signals from the
transducers of Fig. 7 received by the processor during lapping.
Fig. 9 is a plot of the shape of an isolated pulse signal from a transducer received
by the. processor during lapping.
Fig. 10 is a perspective view of a row of transducers connected to flexible support
beams for simultaneous interactive lapping.
Fig. 11 is an expanded, cross-sectional, cut-away view of a system for holding and
communicating with the transducers of Fig. 10 during lapping and for removing the
transducers upon achieving individually optimized lapping.
Fig. 12 is a fragmentary perspective plan view of an interactive lapping drum
employed for lapping a row of single pad transducers. Fig. 13 is a fragmentary cross-sectional view of a pair of transducers and pads of
Fig. 12 being tilted during lapping for rounding of the pads.
Fig. 14 is a simplified plan view of an interactive lapping tape system of the
present invention.
Fig. 15 is a plot of a signal from a transducer being analyzed for performance
characteristics and displaying an amplitude modulation indicating that the transducer is
defective. Best Mode for Carrying Out the Invention
Referring now to Fig. 1, a lapping disk 20 having an abrasive surface 22 is shown
rotating in a direction of arrow A. Associated with the surface 22 is a magnetizable
medium 23, which may be formed at the surface 22 or may be disposed beneath the
surface at a distance which affords communication of magnetic signals through the
surface. A substrate 24 is disposed beneath the medium layer 23 and connected to a
conventional means for rotating the disk such as an electric motor 21. For clarity of
illustration the medium layer 23 is shown in Fig. 1 at an exaggerated distance beneath the
surface 22, separated by a hard protective layer 26. Alternatively, the surface 22 may be
associated with another communication medium, such as an electrical or optical storage medium, for lapping transducers employed in information storage systems of those media.
Projecting inwardly over the surface 22 is a support bar 25 which, for simplicity, is shown to be holding a single transducer 28 via a flexure beam 30, the beam connected
to the bar 25 along with a positioning mechanism 31 located near the juncture of the
beam 30 and the bar 25. An electromagnetic signal 29 is shown schematically in this
plan view as providing communication between the transducer 28 and the media 23 in
order to provide information to a processor 32 regarding the lapping of the transducer 28.
The transducer 28 in this embodiment is designed for contact reading and writing with
rigid magnetic storage media, such as described in the above mentioned U.S. Pat. No.
5,041,932, in co-pending U.S. Pat. Application Serial No. 08/338,394, entitled:
TRANSDUCER/FLEXURE/CONDUCTOR STRUCTURE FOR ELECTROMAGNETIC READ/WRITE SYSTEM and in co-pending U.S. Pat.
Application Serial No. 08/408,036, entitled: CONTACT INTERFACE, SYSTEM AND
MEDIUM IN ELECTROMAGNETIC, READ/WRITE, RIGID-RECORDING-MEDIA
ENVIRONMENT, which are hereby incorporated by reference.
The beam 30 and bar 25 include conductive elements that can carry signals
between transducer 28 and processor 32, which is shown simply as a box in this plan
view. The processor 32 monitors the transducer 28 during lapping with the disk 20, so
that upon receiving a signal from the transducer indicating that an optimal amount of
lapping has occurred, the processor sends a signal to the positioning element 31 , which
causes the positioning element to lift the flexure beam 30 and transducer 28 from the
surface 22, terminating lapping. The positioning element may be a piezoelectric body,
spring loaded switch, vacuum lift or other mechanism which lifts the beam 30 upon
receiving a signal from the processor 32. Alternatively, the signal can be manually monitored for a visible or audible signal at which point the lapping bar 25 can be manually raised, lifting the transducer from the disk to terminate lapping.
Fig. 2 shows a plot 33 of an electronic signal received at processor 32 during
lapping of transducer 28 with lapping disk 20. Typically, little or no signal is obtained
initially from the transducer 28. As the lapping proceeds, a small signal is generated,
after which the signal amplitude increases rapidly as shown by the steeply sloped portion
34 ofthe amplitude plot 33. Subsequent amplitude growth is minimal. The signal
amplitude increases during lapping as material impeding transmission ofthe signal 29 is
removed from a terminal of the transducer 28 by lapping, allowing closer spacing between the terminal and the medium. The appropriate time at which to terminate
lapping depends on a number of factors, and may occur during or just following the
steeply sloped section 34 of the signal amplitude plot 33, as delineated by time 35 of
about 2 minutes. The signal received by the transducer 28 from the lapping disk 20 can
be from a signal that was previously written on the disk or a signal that is written on the
disk 20 by the transducer 28 during lapping. This latter method of writing and reading
the disk 20 during lapping is preferable as the signal increases with lapping due to
increasing both writing and reading signals, thereby enhancing sensitivity. The
simultaneous writing and reading during lapping also provides a method for testing the
writing capability ofthe transducer 28, as well as simplifying the lapping procedure by eliminating prewriting ofthe disk 20.
Fig. 3 shows a more detailed view ofthe structure ofthe transducer 28 and the
lapping disk 20. The disk substrate 24 is formed of a self-supporting material such as an
aluminum alloy. Another hard layer 27 may be deposited atop the substrate 24 and textured before the magnetic layer 23 is sputtered thereon, the texture being substantially
reflected in both the magnetic layer 23 and the hard coating 26, and therefore providing a
texture to the surface 22. For the alternative situation in which the hard coating is formed
directly atop the medium 23, the substrate is first textured in order to obtain a similarly
textured surface 22.
As is known in the formation of rigid magnetic disks, the magnetic layer 23 may
be made of, for example, alloys or lattice superstructures of iron, nickel, cobalt, palladium
or platinum. For a rough lapping disk, the thickness of layer 23 may be over twice that typical for magnetic disks, or as much as about 1000-2000 angstroms, in order to allow a
thicker coating layer. Layer 23 is shown as a single layer, which would be appropriate
for longitudinal recording, while for peφendicular recording a dual magnetic layer would
typically be formed. In the latter case, the stiffening layer 27, the stiffening layer may
become a second magnetically soft (although mechanically hard) layer for use in
peφendicular recording.
The hard protective layer 26 may be formed of diamond-like-carbon (DLC),
silicon carbide, boron carbide or other superhard materials. It is important that this layer
26 be hard for durability ofthe lapping disk 20, thin enough to allow magnetic
communication between the transducer 28 and the magnetic medium 23, and have a
surface 22 texture or topography optimized for lapping the transducer. For the case of a
rough lapping disk, hard coating layer 26 may have a thickness of between 500 and 2000
angstroms, and preferably approximately 1000 angstroms or less. For a smooth lapping
disk the coating layer 26 is substantially thinner, preferably about 200 to 300 angstroms
or less, allowing for more sensitive communication with a transducer 28 and more
accurate testing of various transducer parameters.
The transducer 28 has a head 36 containing a pole 37 for communication with
both the magnetic medium layer 23 of lapping disk 20 and a magnetic medium of a rigid
storage disk or drum, not shown. Pole 46 is surrounded by a hard, wear-resistant, non-
magnetic material 38 such as DLC, which obstructs pole 37 from communicating with
layer 23 or other magnetic media by a layer of the hard material 38 having a thickness T.
Although a single pole is shown in this figure, which is appropriate for vertical recording and reading of a magnetic storage medium, transducer 28 may contain an adjacent pole,
not shown, the gap therebetween utilized for longitudinal reading and writing of a storage
medium. Alternatively, structures associated with a magnetoresistive sensor may be
present in addition to, or in place of, the aforementioned pole or poles. In an upper
portion of transducer 28, a soft magnetic core 40 connected with pole 37 is surrounded
with a helical series of conductive elements 42 to form a helical winding used for
inductively reading or writing through the pole 37 or poles. Alternatively, a spiral or
pancake coil structure, not shown, may be utilized. Transducer 28 is attached to flexure
beam 30, with conductors in the beam 30 connecting with ends of the helical winding
and, at an opposite end, with bar 25 and processor 32 shown in Fig. 1.
The use of progressively smoother lapping disks offers a significant reduction in
pole tip recession, which can be augmented by rounding of the pole tips by lapping
techniques discussed below, including tilting of single pad transducers and lapping with a
tape that tends to conform to the pad or pads. Note that the interactive lapping ofthe
present invention is performed without water or other lubricants or slurry. An electrolyte
solution, however, may be distributed on the surface of a final stage lapping or polishing
disk, and a voltage provided between the transducer and disk, in order to grow the
exposed magnetic pole or poles so that pole tip recession is eliminated. In other words,
after lapping is completed pole 37 terminates coextensively with hard wear material 38 at
essentially the same distance from the surface 22 and medium layer 23 as the remainder
ofthe head 36, eliminating the problem of pole tip recession in the fabrication of
transducers. It is also possible to distribute a solution that selectively etches the hard wear material 38 compared to that of the pole 37 and surface 22. Pole tip recession in
prior art devices presents a problem in both flying type heads and contact heads by
spacing the tip of the pole further from the magnetic medium, thereby decreasing the
resolution at which magnetic data can be written and read.
Fig. 4 illustrates the employment ofthe interactive lapping of the present
invention for a magnetic read/write head 44 designed to fly over a storage surface. The
elements ofthe interactive lapping disk 20 denoted previously are shown here without
delineation for brevity. The head 44 is attached to a slider 45 having an air bearing
surface 47 which is lapped along with the head 44, which can be seen to offer an
extension ofthe air bearing surface 47. A pair of soft magnetic poles 49 and 50 extend
to the bearing surface 47, separated by a gap G at that surface that forms magnetic fields employed typically in longitudinal recording. A number of conductive elements 52 are
wound between the poles 49 and 50 for inductive coupling to those poles to read and/or
write magnetic information to a rigid disk. Critical to the performance ofthe head 44 is
the throat height Th, as the magnetic coupling of signals is stronger as the throat height
Th is reduced, but reduction of the throat height Th to a point at which the gap G widens
destroys the data resolution capability ofthe transducer. By monitoring signals from the
head 44 during the lapping process, critical dimensions of the throat height Th and gap G
can be sensitively optimized for performance and longevity. Although not shown, note
that a transducer designed for "pseudo-contact" or "tail-dragging" operation can be
advantageously fabricated with the present invention, in particular with regard to configuring the throat, which is located at the tail and dragged or bounced against a disk
during operation.
As previously mentioned, a transducer or transducers can be machined with the
interactive lapping technique of the present invention in a plurality of steps, using
successively smoother lapping bodies. In this fashion, pole tip recession can be reduced
and performance testing facilitated. An abrasive surface 53 of a rough lapping disk that
would be used in an initial step of lapping magnetic heads or sliders for communication
with hard magnetic disks is shown in schematic or ideallized form a greatly enlarged
cross-section in Fig. 5 to have series of peaks 54 and valleys 55. Note that the horizontal
axis is denoted in microns while the vertical axis is denoted in nanometers. The surface
53 represents the exposed portion of a hard coating layer 26 having a thickness of
approximately 80 nanometers, which is not shown in this figure in order to better
illustrate the roughness of surface 53. Disposed beneath the hard coating layer 26 is a
medium layer 23 which also has a thickness of about 80 nanometers and is not shown in
this figure, and which has a texture at the interface with the hard layer 26 which is similar
but may be smoother or rougher than that ofthe exposed surface 53, depending upon
formation characteristics. Below the medium layer 23, the substrate 24 is adjoined with a
texture that reflects that ofthe surface 53 and the interface between the hard coating 26
and the medium 23, but which may be smoother or rougher still.
Formation ofthe rough lapping surface 53 begins by roughening or texturing at
least one major surface of a substrate 24 made of aluminum alloy, for example. Such
texturing can be accomplished effectively by rubbing an abrasive tape on the surface, preferably in a radial direction as the disk is rotated more slowly or in discrete steps to
effect roughening on all but an inner core. The roughness imparted to the disk substrate
at this stage may need to be greater or less than that desired for the surface 53, as the
subsequent deposition of the medium layer 23 and then the hard coating layer 26 retains
major features of the substrate roughness but may increase, decrease or substantially
parallel smaller feature roughness, depending upon formation processes and materials.
Atop the roughened substrate 24 is sputter deposited the medium layer, which may be
formed of alloys or superlattice structures of iron, nickel, cobalt, platinum, palladium or
other magnetic materials known in the art. Atop the medium layer 23, the hard coating
layer 26 may be formed of DLC, cathodic arc carbon, silicon carbide, boron carbide or
other superhard materials. To form the hard layer 26 of DLC, for example, plasma
enhanced chemical vapor deposition (CVD) or sputtering may be employed. It should be
noted that DLC is an essentially amoφhous mixture containing carbon atoms with bonds
ranging from SP orientations characteristic of diamond, to SP bonds such as are found
in graphite, to SP bonds characteristic of polymers, including from about 2% to about
30% (by mole) hydrocarbons. By varying the process parameters during deposition, the
material characteristics of layer 26 and surface 53, including hardness, roughness and
durability can be tailored to match the lapping needs ofthe transducers being worked.
Formation ofthe hard coating 26 of cathodic arc carbon, silicon carbide or boron carbide
is instead accomplished by sputtering, with attention again being paid to process
parameters in order to achieve the surface 53 characteristics desired. We have determined that the roughness ofthe upper reaches of the surface 53 are
of key importance for lapping puφoses. In this regard, a preferable rough lapping surface
is characterized by having peaks 54 (especially those terminating in the highest few
percent of the surface 53) with radii of curvature less than one-half micron, while the
vertical peak 54 to valley 55 height does not substantially exceed about 100 nanometers.
Another topographic characterization of a preferred rough lapping surface 53 is that the
peaks 54 that terminate in an upper five percent ofthe surface area differ in height by at
least 5 nm, and preferably over 10 nm, within a 100 μm2 overall surface area.
A smoother, subsequent lapping disk surface 56 shown in Fig. 6 may be
characterized by peaks 57 terminating in the highest few percent ofthe surface 56 that
have radii of curvature generally between one-fifth and two microns, while the vertical
peak 57 to valley 58 height, as before, does not exceed 100 nanometers. Alternatively,
the peaks 54 of smooth lapping surface 56 that terminate in an upper one percent ofthe
surface area differ in height by between 2 and 10 nanometers within a 100 μm surface area.
Smooth lapping surface 56 is formed in a manner similar to that described above
for rough lapping surface 53. It should be noted, however, that the substrate 24 is
roughened a significantly lesser amount for a smooth surface 56 than for a rough surface
53, due to both a need for a smoother surface and a much thinner medium layer 23 and
hard coating layer 26 which tend to mimic the texture ofthe substrate 24 more closely. In
a preferred embodiment of a smooth lapping surface 56 to be employed for interactive lapping of magnetic transducers, a medium layer 23 and a hard coating layer 26 each may
have a thickness of about 200 to 400 angstroms.
Referring now to Fig. 7, the support bar 25 holds a number of beams 60-65 and
transducers 70-75 to lapping disk 20 for simultaneous lapping as the disk revolves in a
direction indicated by arrow B. The transducers 70-75 are each independently connected
to processor 32 so that the transducers 70-75 can be individually lifted from the lapping
surface 22 as needed in response to signals received at processor 32 indicating that
optimal lapping has occurred. In this manner, the prior art problem of row bar bowing is
eliminated, as each ofthe transducers is individually controlled for optimal lapping, while
numerous transducers can be lapped simultaneously, speeding manufacture.
Plots of signals from transducers 70-75 are shown superimposed on a single graph
in Fig. 8, to demonstrate the different times at which the signals from the various
transducers 70-75 may increase in amplitude. Plot 80 represents a signal received from
transducer 75, which ramps up in amplitude earlier than the other transducers and
achieves a relatively high signal amplitude. Plot 81, corresponding to transducer 74, is
the next signal to increase, but reaches a relatively low maximum value and may, for this
reason, be discarded. Plots 82, 83 and 84 correspond to transducers 70, 71 and 72
respectively, which increase in amplitude later and reach a satisfactory value, while plot
85 corresponds to transducer 73, which is the last transducer to signal an increase in
amplitude, and may result in transducer 73 being discarded due to the low value of
amplitude achieved in plot 85. In practice, amplitude plots from a number of transducers may begin to increase simultaneously during lapping, while proceeding at different rates
and reaching differing maximum amplitudes.
Fig. 9 shows an alternative preferred method of monitoring transducer signals for
determining optimal lapping amounts by looking to a shape of pulse waveforms
transmitted to the processor 32 from an individual transducer 28 during lapping. In this
system a signal is preferably written to the lapping disk 20 during lapping in order to
optimize the pole tip for writing as well as reading, although the disk may instead be
prewritten. For the situation in which the disk is prewritten, it is preferable to utilize the
same spindle for writing as for reading. For the case in which the transducer 28 being
lapped writes as well as reads signals during lapping, a series of isolated pulses are
written by the transducer in a given disk track during one revolution of the disk, and during a subsequent revolution the transducer reads these isolated pulses. The resolution
ofthe transducer 28 in both reading and writing is reflected by the shape of these isolated
pulses, as narrower pulse widths correspond with higher resolution. Thus waveform 90,
which can be seen to be relatively low and spread out in amplitude, may occur as lapping
has proceeded sufficiently to allow a signal to be written and read by the transducer 28.
As lapping continues the signal grows and narrows, as depicted in waveform 92, which is
dashed in order to distinguish it from other superimposed curves. In waveform 94 the
signal has become shaφer still, reflecting a very high resolution, and has reached a shape
where the transducer 28 will be lifted from the lapping disk. If transducer 28 is lapped
too much, the amplitude ofthe pulse may continue to increase for a period of time, and
then decrease as the shape of the pulse broadens, indicating reduced resolution. The appropriate time for termination of lapping can be indicated by the slowing and then
cessation of the increase in signal sharpness, by a certain threshold PW50 or by a
threshold narrowness in pulse time at half-maximum amplitude (e.g., 10 to 100
nanoseconds). Alternatively, performance tests generally employed in the recording
industry, such as overwrite, bit-shift, 747 and others, may be employed during interactive
lapping, and may be employed in concert.
Fig. 9 can also be used to illustrate another aspect ofthe current invention, as the
waveforms 90, 92 and 94 can represent signals from different transducers, such as
transducers 60, 61 and 62, respectively. In this situation, the waveforms 90, 92 and 94, if
they represent the shaφest signals from transducers 60, 61 and 62, can be used to
determine whether those transducers have acceptable resolution or are defective and should be discarded.
Since the resolution at which signals can be written and read is of a paramount
importance in an information storage system, the above described method of determining
when appropriate lapping has been achieved by monitoring pulse width resolution is
ideally matched to the needs of many information storage systems. For example, the
present invention may be directed to rigid disk storage systems, flexible disk storage
systems, tape drive systems, card based media systems and essentially any other storage
system that involves a transducer for reading and/or writing information with a relatively
moving storage medium. Focusing on the context of a rigid disk magnetic drive system
the present invention can be used for lapping sliders and/or heads for conventional flying heads, or for lapping heads for contact based communication between the transducer and
the media.
Moreover, since virtually any transducer used for reading information can be
thought of as a part of an information storage system, an information storage system is
defined for the puφose of this invention to include all types of systems for
communicating with a storage medium. For instance, an angular or linear motion
detecting instrument may include a transducer for detecting relative positions, which can
be seen to be a type of stored information. Similarly, an optical fiber can be used as an
electro-optical transducer for obtaining information about the interior of a person's body,
which can be seen to represent another form of communication with an information
storage system. Sensors of magnetic, inductive, capacitative, electrically conductive, optical, radioactive, and other forms of information can be fabricated with the interactive
system ofthe present invention.
Figs. 10 and 11 show a means for monitoring and lifting transducers from a
lapping plate on an individual basis. A strong, conductive plate 100 formed of stainless
steel, beryllium copper, doped silicon or other materials has been micromachined or
etched into a number of individual cantilevered beams 102, each of which has been
dissected with a longitudinal cut 104, to form a pair of prongs 106 and 108.
Conductively bonded to a bottom of the each ofthe beams 102 near a tip ofthe prongs
106 and 108 is a transducer 110 which has been formed to include magnetic reading and
writing and mechanical elements as described in the aforementioned co-pending U.S. Pat.
App. Serial No. 08/338,394, for TRANSDUCER/FLEXURE/CONDUCTOR STRUCTURE FOR ELECTROMAGNETIC READ/WRITE SYSTEM. Each of the
transducers 1 10 includes on a bottom surface having a pad 1 12 for contact with a rigid
magnetic disk, not shown in this figure, the pad containing a pole for writing and reading
to and from the magnetic disk.
Fig. 1 1 shows a portion of a lapping disk 120 including a substrate 123, a
magnetic recording layer 125 adjoining the substrate 123 and a hard abrasive layer 128
disposed on the magnetic layer having a surface 130 for lapping or polishing a transducer
110. Only one transducer 110 and beam 102 are shown Fig. 1 1 for clarity, while one
should note that sets often or more beams 102 and transducers 110, as shown in Fig. 10,
are preferably lapped simultaneously. The transducer 110 of this embodiment has three
triangularly spaced pads for contact with a disk 120, one ofthe non-polebearing pads
(113) being hidden from view in this figure by another non-polebearing pad 114. A
gimbal bump 116 allows the three pads 112-114 to be in simultaneous contact with the
rigid magnetic recording disk despite small surface variations. The prongs 106 and 108
are connected to each transducer 110 to provide an electrical circuit for sending and
receiving signals to and from the disk 120. The surface 130 is moving relative to a beam
102 attached to the transducer at a speed which may vary between 150 and 1500 inches
per second in a direction indicated by arrow B, which is generally along a lengthwise
direction ofthe beam 102. The beam 102 meets the disk 120 at an angle alpha relative to
a plane ofthe surface 130 that may range between -3 and +3 degrees for lapping of a
main contact area of the wear pad. As described in the above mentioned pending U.S. Pat. App. Serial No. 08/338,394, other gimbal and beam structures may be
advantageously employed, but is not shown here for brevity.
An upper plate 133 of a clamp 135 that holds the beam 102 extends further along
the beam 102 than a lower plate 137 of that clamp so that a communication pin 140 can
press against a conductive lead ofthe beam 102 for transmitting signals between the
transducer 1 10 and a processor, not shown in this figure. Although only one pin 140 is
shown in Fig. 8, a second pin is also employed for communication with each of the
prongs 104 and 106 of the beams 102 shown in Fig. 10, so that each transducer 1 10 has a
pair of leads for independent communication with a processor regarding appropriate
lapping time and test characteristics. A removal block 142 has an air duct 144 which is
connected to a vacuum source, not shown, with a solenoid valve that is controlled by the
transducer to be opened when the transducer receives a signal that lapping should be
terminated. When the valve is opened the differential air pressure caused by
communication between the vacuum source and the air duct 144 causes beam 102 to be
pulled to the block 142 and transducer 110 to be removed from the lapping process. The
block 142 has a different air duct for each beam 102 so that the various transducers 1 10
can be removed on an individual basis according to their individual optimal lapping
needs.
Referring now to Figs. 12 and 13, a lapping drum 148 may be employed in
machining transducers 150 having single contact pad 152 containing a magnetic pole
structure, not shown in this figure. The drum 148 offers a uniform lapping speed to each
ofthe transducers 150 or other items being lapped in a row, and rotates in this example in a direction of arrow C. Transducers 150 are disposed at ends of flexible beams 155, and
can be rounded at the tip of the pads 152 by tilting the beams 155 and by moving the
beams forward and backward relative to the drum 148 so that different parts ofthe pads
are tangent to the drum 148 during lapping. This is important for a single pad contact
magnetic read-write head in order to ensure close proximity between the pole disposed
within the head and the medium even in situations in which the pad contacts the surface
ofthe recording disk at an angle to normal. Rounding of front and back facets of the
single pad 152 can also be accomplished by varying the angle at which a plane containing
the beams 157 addresses the lapping drum 148, a technique similarly applicable to
lapping with a disk.
Also applicable to a lapping disk environment is the rounding of side facets ofthe pads 152 by tilting a series of transducers 150 each having a single pad 152, which can be
achieved by holding each beam 157 with a clamp that can rotate somewhat about the long axis ofthe beam, not shown. Note that only one side ofthe clamp needs to rotate if the
other side has a semicylindrical surface 158, and that the elements of each clamp that
rotate may be each pivotally attached to a bar in a series, not shown. Another advantage
ofthe faceting or rounding of pads 150 as discussed above is not only the elimination of
pole tip recession in transducer formation but the converse creation of pole tip protrusion.
Instead of interactively lapping transducers with a rigid body such as a disk or
drum as described in previous embodiments, it may be advantageous to employ a flexible
lapping medium such as a tape 160, as shown in a simplified view in Fig. 14. In this
embodiment, the abrasive magnetic storage tape 160 is wound from a first reel 162 to a second reel 164 in a direction shown by arrow V, while a row of transducers 166, each
held by a beam 168, are pressed against the tape. An adjustable platen 169 disposed on
an opposite side of the tape from the transducers 166 provides backing for lapping. The
tape 160 and transducers 166 may be designed for longitudinal or peφendicular
communication with the tape, that is, storage of magnetic information in domains having
remnant magnetization oriented generally parallel or peφendicular to the plane of the
tape. The transducers 166 are each connected with a processor 170 via a bar 172, the
processor individually monitoring communication between each transducer 166 and the
tape 160 in order to individually control lapping of each transducer 166. A row of
recording heads 173 may be positioned along the tape upstream ofthe transducers 166 in
order to write data tracks to the tape 160 for communication with the transducers. A
positioning element 174 is attached to each beam 168 and the bar 172 and electronically
connected to the processor 170 for removal ofthe transducers 166, individually or as a
group, upon actuation by the processor, as determined by signals received at the
processor from the tape via the transducers.
Employment of an interactive lapping tape rather than a disk or drum offers a
number of potential advantages, not the least of which is that the tape may be cost
effective, so that it can easily be replaced when worn out. In addition, due to the
flexibility of the tape 160, it tends to conform somewhat to the item being lapped, which
is desirable for rounding edges of that item in particular for a final stage of lapping in
order to counteract pole tip recession. For instance, a transducer having a single wear pad
with an embedded magnetic pole for contact communication with a medium may be rounded in this manner to avoid separation of the pole from the medium during tilting of
the transducer. Alternatively, flying heads for which edge blending or rounding is
desired may be advantageously finished with such a tape 160. Furthermore, transducer
heads designed for end user employment in tape drives may benefit from such interactive
tape lapping, as such heads often are rounded.
Another potential advantage of an interactive, tape based lapping system may be
the ability to closely control the pressure of lapping, for example by employing a capstan
177 that provides an adjustable backing to the tape 160, in concert with or in the absence
of platen 169. Alternatively, variable air pressure may be used to adjust the pressure felt
by the transducers 166 during lapping. The tension provided to the tape 160 provides a
means for controlling both the pressure on the transducers 166 and the degree of conformance ofthe tape to the transducers, thereby controlling the amount that transducer
edges are rounded. In this regard it should be noted that rounding of corners may occur differentially for corners that are oriented along the direction of tape motion as compared
with corners oriented essentially peφendicular to the direction of tape, due to differing
tension of the tape in those different directions.
Although a reel-to-reel lapping system is depicted in Fig. 14, in many cases a
continuous or endless loop interactive lapping tape may be advantageously employed. It
should be noted that a tape lapping body, like a drum lapping body, has the advantage of
uniform lapping speed for a number of items being lapped. One should also note that
oscillating or vibrating lapping motion is possible with any ofthe lapping bodies
described so far (disk, tape and drum), rather than the unidirectional motion previously described, and such alternative motions may also be utilized with other lapping bodies,
such as a card, plank, plate or irregularly shaped body.
Fig. 15 illustrates another aspect of the present invention - the ability to test
transducers for electrical, magnetic, mechanical, dynamic, optical or other performance
characteristics of a transducer at the time of lapping, again offering a substantial savings
in time and equipment while potentially improving performance. Sinusoidally varying
curve 180 is a plot of the signal received by a transducer during lapping with a body
having an alternating signal written to a medium of that body, as can be the situation, for
example, with magnetic data storage. The curve 180 has a signal amplitude modulation
represented by dashed lines 182 and 184, which form an envelope for the curve 180. This
amplitude modulation may be caused by vibration ofthe transducer being tested, or
electronic or magnetic problems ofthe transducer, for instance. Note that the particular
signal amplitudes and times shown in Fig. 15 are merely representative of a specific
transducer with specific performance traits, and that such amplitudes and times may vary
greatly depending upon the transducer. Alternatively, lines 182 and 184 may represent
aerodynamic characteristics of a flying head slider that has been lapped and is pitching or
rolling during flight. For the testing of a flying head and slider, the transducer is first
lapped by an appropriate amount by employing the interactive technique taught above,
after which the slider may be tested for aerodynamic characteristics by increasing the
rotational speed ofthe disk and/or reducing the load applied to the transducer that holds it
to the disk during lapping. Should the signal received from the transducer appear as
displayed in curves 182 and 184, which can be detected with filtering or amplitude demodulation, for example, an unstable transducer head or slider structure is indicated,
which would potentially result in a crash of the transducer and disk that would destroy the
drive system.
For situations in which a second lapping or test disk is employed that is smoother
than the first and essentially free of lapping debris, testing of various characteristics ofthe
transducer or transducers can be advantageously accomplished. This second lapping disk
may be useful, for example, for the situation in which the transducer is designed for
contact based communication with a disk, tape, drum or other media, since the roughness
of the first lapping disk may make testing of performance characteristics of the transducer
with the rough disk difficult. Alternatively, for the case of a flying head, testing
performed at a separate disk may allow for more realistic testing of critical dynamic
performance characteristics that occur during takeoff and landing ofthe head. Note also that the performance testing and grading may be accomplished in serial or parallel tests
on multiple transducers with a single lapping or testing apparatus, in order to
simultaneously optimize multiple performance parameters.

Claims

1. A method of making a transducer for communication with a medium comprising
providing a partially fabricated transducer having an information-
transmissive terminal being impeded by a material disposed near an end of said terminal,
removing said material while positioning said transducer adjacent to a
body communicating with said transducer, and
monitoring said transducer during said removing for a signal from said
body indicating that a desired amount of said material has been removed.
2. The method of claim 1, wherein said removing includes lapping said transducer with said body.
3. The method of claim 2, further comprising forming an abrasive surface on said body, prior to said lapping.
4. The method of claim 1 , further comprising writing information to at least a
portion of said body with said transducer.
5. The method of claim 1, wherein said monitoring includes analyzing an amplitude
of said signal from said body.
6. The method of claim 1, wherein said monitoring includes analyzing a waveform
of said signal from said body.
7. The method of claim 1, wherein said monitoring includes detecting a magnetic
pattern from said body.
8. The method of claim 1, further comprising testing a performance characteristic of
said transducer, including analyzing said signal from said body.
9. The method of claim 1 , further comprising storing information in at least a portion
of said body, prior to said removing.
10. The method of claim 1 , further comprising
providing a plurality of partially completed transducers having individual communication terminals being impeded by material disposed near ends of said terminals,
removing said material while positioning said terminals adjacent to said
body communicating with said transducer, and
monitoring said transducers individually during said removing for
individual signals indicating that desired amounts of said material have been removed
from each said terminal.
11. A process for enhancing, by the act of material removal, the communication-
performance capability of a transducer relative to an information storage medium, said
process comprising
subjecting such a transducer to a selected material-removal operation
while communicating with such a medium, and
while so subjecting the transducer, monitoring at least one aspect of its
communication-performance capability as an indicator of desired enhancement.
12. A method of forming a transducer for an information storage system comprising forming a transducer having magnetic pole impeded at a tip portion,
lapping said transducer with a body having a magnetic region associated
with a lapping surface, and
monitoring said transducer for a signal from said region indicating that a
desired amount of said tip portion has been removed.
13. The method of claim 12, further comprising writing information to said region
during said lapping.
14. The method of claim 12, wherein said lapping includes forming a slider.
15. The method of claim 12, wherein said forming includes fabricating said
transducer for communication with a layer of magnetic media having an easy axis of
magnetization oriented substantially within a plane defined by said layer.
16. The method of claim 12, wherein said forming includes fabricating said terminal
for communication with a layer of magnetic media having an easy axis of magnetization
orientated transversely to a plane defined by said layer.
17. The method of claim 12, wherein said forming includes fabricating said terminal
for communication with a rigid magnetic storage medium.
18. The method of claim 12, wherein said forming includes fabricating said terminal
for communication with a flexible magnetic storage medium.
19. The method of claim 12, wherein said forming includes fabricating said terminal
for communication with a card having an associated storage medium.
20. The method of claim 12, wherein said body is a tape and said lapping includes
producing relative motion between said transducer and said tape.
21. The method of claim 12, wherein said body is a disk and said lapping includes
rotating said disk relative to said transducer.
22. The method of claim 12, wherein said body is a drum and said lapping includes
rotating said drum relative to said transducer.
23. A device for fabricating a transducer comprising a body with an abrasive surface
for removing excess material from the transducer, said body having a communicative
portion transmitting a signal via said surface to the transducer indicating removal ofthe
excess material.
24. The device of claim 23, wherein said surface is generally flat.
25. The device of claim 23, wherein said surface is generally cylindrical.
26. The device of claim 23, wherein said body is a tape.
27. The device of claim 23, wherein said communicative portion is magnetic.
28. The device of claim 23, further comprising a processor connected to the
transducer and detecting said signal.
29. The device of claim 23, wherein said processor includes means for analyzing
performance characteristics ofthe transducer.
30. The device of claim 23, further comprising a motor connected to said body and
effecting motion relative to the transducer, whereby the transducer is lapped with said
surface.
31. The device of claim 23, further comprising a mechanism, connected to said
processor, holding the transducer against said surface during said removing, and holding
the transducer away from said body upon detection of said signal.
32. The device of claim 23, wherein said surface is superhard.
33. In a lapping machine having a moveable body with an abrasive work surface, an
implement for holding a workpiece and a mechanism for moving the body relative to the
workpiece, the improvement comprising
a communication signal transmitted by said body via said surface for controlling lapping of said workpiece.
34. The improvement of claim 33 wherein said signal is derived from a magnetic
pattern of said body.
35. The improvement of claim 33 wherein said signal is derived from an electrical
pattern of said body.
36. A system for enhancing, by the act of material removal, the communication-
performance capability of a transducer relative to an information storage medium, said
system comprising
an abrader defining a work zone for the selected removal of material from
such a transducer positioned within said zone, and
communication structure operatively associated with said abrader within
said zone, such that communication between said structure and the transducer is
indicative of a communication-performance enhancement of the transducer.
37. The system of claim 36, wherein said communication structure includes a
magnetic medium layer.
38. A system for machining a transducer comprising a body having an abrasive surface and transmitting a communication
signal via said surface,
positioning means for holding the transducer and for affecting relative
movement between the transducer and said surface, and
processing means, connected to the transducer and to said positioning
means, for analyzing information from the transducer regarding said signal and for
controlling said positioning means.
39. The system of claim 38, wherein said system has means for simultaneously
lapping a plurality of transducers while individually determining when each of said
plurality of transducers has been optimally lapped and thereupon individually terminating
said lapping.
PCT/US1996/007606 1995-05-26 1996-05-23 Interactive system for lapping transducers WO1996037340A1 (en)

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Application Number Priority Date Filing Date Title
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US08/452,041 1995-05-26

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